JP2009052073A - Sheet provided with vapor deposition mask, method for manufacturing device provided with vapor deposition mask, and method for manufacturing sheet provided with vapor deposition mask - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet provided with a vapor deposition mask, which includes a vapor deposition mask that enables a pattern with extremely high definition to be formed, and can inhibit the vapor deposition mask from being damaged while being handed. <P>SOLUTION: The sheet 60 provided with the vapor deposition mask is provided with a sheet made from a resin 32 and a sheet made from a metal 34 which is laminated with the sheet made from the resin. The sheet made from the metal 34 has a plurality of holes 25 formed therein. The sheet made from the metal 34 is used as the vapor deposition mask 20 after having been separated from the sheet made from the resin 32. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sheet with a vapor deposition mask used for a vapor deposition mask. Moreover, this invention relates to the method of manufacturing the vapor deposition mask apparatus provided with the vapor deposition mask from the sheet | seat with a vapor deposition mask. Furthermore, this invention relates to the method of manufacturing the sheet | seat with a vapor deposition mask used for a vapor deposition mask.

  Conventionally, a method of forming a thin film with a desired pattern using a vapor deposition mask including holes arranged in a desired pattern is known. In recent years, for example, when an organic material is vapor-deposited on a substrate at the time of manufacturing an organic EL display device, it is strongly desired to perform extremely high-definition patterning by vapor deposition.

In general, such a deposition mask can be manufactured by forming holes in a metal plate by etching using a photolithography technique (for example, Patent Document 1). Moreover, when forming a hole in a metal plate by etching, there are a method of etching from both sides of the metal plate and a method of etching only from one side of the metal plate.
JP 2004-39319 A

  However, when handling a vapor deposition mask in which fine holes are formed with high precision in order to perform extremely high-definition patterning, for example, when conveying the vapor deposition mask, the vapor deposition mask may be damaged. In particular, in an evaporation mask used for patterning an organic light emitting material on a glass substrate in a desired pattern when manufacturing an organic EL display device, a plurality of elongated holes extending in the same direction are arranged at a short pitch. There may be. And when handling such a vapor deposition mask, the force which acts on a vapor deposition mask will cut between the hole of a vapor deposition mask, or the part extended linearly between a hole and a hole. Inconveniences such as falling off easily occur.

  In addition, when a vapor deposition mask produced by etching is used, there is a problem in that vapor deposition with an extremely high-definition pattern cannot be performed with high accuracy even if the vapor deposition mask is not damaged. An investigation of the cause of this failure confirmed the following.

  In etching using a photolithography technique, erosion starts from a region of the metal plate that is not covered with a resist film. Thereafter, the erosion does not proceed only in the thickness direction of the metal plate, but also proceeds in the direction along the plate surface of the metal plate. Accordingly, tapered holes are formed by etching. For this reason, when etching is performed from both surfaces of the metal plate 2, as shown in FIG. 12, the cross-sectional area (opening area) is the largest in the hole 2a except at the end in the thickness direction of the metal plate 2. The overhanging portion 3 is formed to reduce the. When vapor deposition is performed using such a vapor deposition mask 1, the film thickness of the vapor deposition film 5 formed in a region corresponding to the back side of the protruding portion 3 of the substrate 4 is not stable. As a result, the edge of the vapor deposition pattern is blurred (the outline of the vapor deposition pattern is not clear). In the first place, it is difficult to control the position and cross-sectional shape of the overhang portion formed in the hole. From the above, when the metal plate is etched from both sides, it is not possible to perform deposition with an extremely fine pattern with high accuracy.

  On the other hand, when the metal plate is etched only from the upper surface, an etchant that has already been used for erosion and has a low erosion ability remains in the tapered hole formed by erosion. After that, when the hole of the metal plate reaches the lower surface, the etching solution remaining in the hole until then flows out from the lower surface, and into the hole in which a fresh etching solution having a high erosion ability is formed. Flows in. At this time, the liquid pressure increases in the lower region in the hole where the cross-sectional area (opening area) is small, and the lower region in the hole is eroded violently by the fresh etching solution. As a result, as in the case where etching is performed from both sides of the metal plate, a protruding portion is formed in the hole.

  Further, when the metal plate 6 is etched only from the lower surface through the resist film 7, when the tapered hole 6a formed by erosion penetrates the metal plate 6, as shown in FIG. In addition, the etching solution 8 may remain. As a result, erosion also proceeds from the upper surface of the metal plate by the remaining etching solution, and an overhang portion is formed in the hole as in the case of etching from both sides of the metal plate.

  Therefore, even when the metal plate is etched from only one side, the edge of the vapor deposition pattern is blurred (the outline of the vapor deposition pattern is not clear). In the first place, when the metal plate is etched from one surface side, the cross-sectional shape of the hole may be bent due to the pressure generated when the hole is penetrated and the etching solution starts to flow. In this case, it is difficult to accurately form the hole with a desired shape. This phenomenon becomes more prominent in the above-described deposition mask for performing high-definition patterning. From the above, even when the metal plate is etched only from one surface, it is not possible to perform deposition with an extremely high-definition pattern with high accuracy.

  The present invention has been made in consideration of these points, and includes a vapor deposition mask that enables extremely fine patterning, and prevents the vapor deposition mask from being damaged during handling. It aims at providing the sheet | seat with a vapor deposition mask which can do.

  Another object of the present invention is to provide a method for manufacturing a vapor deposition mask without damaging the vapor deposition mask from a sheet with a vapor deposition mask including a vapor deposition mask that enables extremely high-definition patterning. And

  Furthermore, the present invention provides a method for manufacturing a sheet with a vapor deposition mask that includes a vapor deposition mask that enables extremely high-definition patterning and that can prevent the vapor deposition mask from being damaged during handling. The purpose is to do.

  A sheet with a vapor deposition mask according to the present invention includes a resin sheet and a metal sheet laminated with the resin sheet, and a metal sheet having a plurality of holes formed therein, It is used as a vapor deposition mask after being separated from the resin sheet.

  In the sheet with a vapor deposition mask according to the present invention, the metal sheet is formed on the metal sheet from a surface that does not face the resin sheet to a surface that faces the resin sheet of the metal sheet. The cross-sectional area of the holes may be reduced. In such a sheet with a vapor deposition mask, the hole may be formed by etching the metal sheet in a state where the metal sheet and the resin sheet are laminated.

  Moreover, the sheet with a vapor deposition mask according to the present invention may further include a frame fixed to the metal sheet.

  Furthermore, the sheet | seat with a vapor deposition mask by this invention WHEREIN: The joining force with respect to the said metal sheet | seat of the said resin sheet may fall by irradiating the said resin sheet with UV light. In such a sheet with a vapor deposition mask, the resin sheet has a base sheet and a UV release layer that joins the base sheet and the metal sheet, and the bonding strength of the UV release layer is It may be lowered when irradiated with UV light.

  Furthermore, in the sheet with a vapor deposition mask according to the present invention, the plurality of holes may be arranged side by side along one direction, and each hole may extend along another direction orthogonal to the one direction.

  Furthermore, in the sheet with a vapor deposition mask according to the present invention, the metal sheet includes a plurality of perforated regions in which a plurality of holes are arranged in a predetermined pattern, and a non-perforated region disposed between the perforated regions. It may be included.

  Furthermore, in the sheet with a vapor deposition mask according to the present invention, in the cross section orthogonal to the sheet surface of the metal sheet, the end of the hole on the side of the metal sheet that does not face the resin sheet and the metal sheet You may make it the angle made by the straight line which connects the edge part of the said hole in the side which faces a resin-made sheet, and the surface which faces the said resin-made sheet of the said metal sheet be 60 degrees or less.

  A method for manufacturing a vapor deposition mask device according to the present invention is a method for producing a vapor deposition mask device from the above-described sheet with a vapor deposition mask, wherein the resin sheet is separated from the metal sheet, and the resin sheet is vapor deposited. A step of removing from the masked sheet is provided.

  In the method of manufacturing a vapor deposition mask device according to the present invention, the bonding force of the resin sheet to the metal sheet is reduced by irradiating the resin sheet with UV light. In the step of removing the resin sheet, the resin sheet may be irradiated with UV light to separate the metal sheet and the resin sheet.

  In the method of manufacturing a vapor deposition mask device according to the present invention, the plurality of holes formed in the metal sheet are arranged side by side along one direction, and each hole extends along another direction orthogonal to the one direction. In the step of removing the resin sheet, the metal sheet and the resin sheet may be separated along the other direction.

  Furthermore, the manufacturing method of the vapor deposition mask apparatus according to the present invention may further include a step of attaching the frame to the metal sheet. The step of attaching the frame to the metal sheet may be performed before the step of removing the resin sheet, or may be performed after the step of removing the resin sheet.

  The sheet with a vapor deposition mask according to the present invention is a method for producing the above-described sheet with a vapor deposition mask, and a step of supplying a laminate having a resin sheet and a metal sheet laminated on the resin sheet. And a step of etching the supplied laminate to form a large number of holes in the metal sheet.

  In the step of etching the laminate of the deposition masked sheet according to the present invention, a plurality of holes arranged side by side along one direction, each extending along another direction orthogonal to the one direction May be formed.

  Moreover, the sheet | seat with a vapor deposition mask by this invention WHEREIN: You may make it the said laminated body supply along the said other direction.

  Furthermore, in the step of etching the laminate of the sheet with vapor deposition mask according to the present invention, a plurality of perforated regions in which a plurality of holes are arranged in a predetermined pattern may be formed on the metal sheet.

  Furthermore, in the step of supplying the laminate of the sheet with vapor deposition mask according to the present invention, a laminate including a resin sheet that is adapted to reduce the bonding force to the metal sheet when irradiated with UV light is supplied. You may make it do.

  Furthermore, in the step of supplying the laminated body of the sheet with vapor deposition mask according to the present invention, the wound body around which the laminated body is wound may be rewound to supply a laminated body extending in a band shape.

  ADVANTAGE OF THE INVENTION According to this invention, the sheet | seat with a vapor deposition mask containing the vapor deposition mask in which the cross-sectional area became small gradually from the one surface toward the other surface and the shape in the other surface was formed with high precision is obtained. And while handling a sheet | seat with a vapor deposition mask, for example, conveying a sheet | seat with a vapor deposition mask, the metal sheet | seat in which many holes used as a vapor deposition mask were formed is protected by the resin-made sheet | seat. Accordingly, it is possible to prevent the metal sheet that forms the vapor deposition mask from being damaged during handling such as conveyance.

  Hereinafter, with reference to FIG. 1 thru | or FIG. 11, embodiment of the sheet | seat with a vapor deposition mask by this invention, the manufacturing method of a vapor deposition mask apparatus, and the manufacturing method of a sheet | seat with a vapor deposition mask is described. Here, FIG. 1 to FIG. 11 are diagrams for explaining an embodiment of the present invention. In the following embodiments, an example of a vapor deposition mask (metal mask for vapor deposition) used for patterning an organic light emitting material on a glass substrate in a desired pattern when manufacturing an organic EL display device will be given. The manufacturing method of a sheet | seat with a vapor deposition mask, a vapor deposition mask apparatus, and the manufacturing method of a sheet | seat with a vapor deposition mask are demonstrated. However, the present invention is not limited to such an example, and the present invention can be applied to a vapor deposition mask (a metal mask for vapor deposition) used for various purposes.

  First, an example of a sheet with a vapor deposition mask, and a vapor deposition mask and a vapor deposition mask apparatus obtained from the sheet with a vapor deposition mask will be described mainly with reference to FIGS. 1 to 6. Here, FIG. 1 is a plan view showing a sheet with a vapor deposition mask from the resin sheet side, FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1, and FIG. FIG. 4 is a partial plan view showing from the side, FIG. 4 is a perspective view showing an example of a vapor deposition mask and a vapor deposition mask device that can be manufactured from the sheet with vapor deposition mask shown in FIG. 1, and FIG. 5 is a vapor deposition mask and vapor deposition mask device. It is a figure for demonstrating the usage method.

  As shown in FIGS. 1 to 4, the sheet 60 with a vapor deposition mask includes a resin sheet 32 and a metal sheet 34 laminated on the resin sheet 32. The metal sheet 34 is made of a rectangular metal sheet and has a plurality of holes 25 formed therein. Further, the metal sheet 34 forms the vapor deposition mask 20 after being separated from the resin sheet 32.

  As shown in FIG. 1, in the present embodiment, the metal sheet 34 of the vapor deposition mask-attached sheet 60 that forms the vapor deposition mask 20 has a substantially rectangular shape in a plan view, more precisely, a substantially rectangular shape in a plan view. It has the outline of. The metal sheet 34 of the sheet 60 with the vapor deposition mask has a plurality of perforated regions 22 in which the holes 25 are formed and a non-perforated region 23 in which the holes 25 are not formed and occupies a region surrounding the perforated region 22. And have. As shown in FIG. 1, each of the perforated regions 22 has a substantially rectangular shape in a plan view, more precisely, a substantially rectangular shape in a plan view.

  In the present embodiment, the plurality of perforated regions 22 are arranged at predetermined intervals along one direction parallel to one side of the metal sheet 34 of the sheet 60 with vapor deposition mask, and orthogonal to the one direction. Are arranged at predetermined intervals along the other direction.

  As shown in FIGS. 1 and 3, the plurality of holes 25 provided in each perforated region 22 are arranged in the perforated region 22 at regular intervals along the one direction described above. Yes. In addition, each hole 25 extends elongated from one end to the other end of the perforated region 22 in parallel with the other direction orthogonal to the one direction. Further, as shown in FIG. 2, the cross-sectional area of each hole 25 in the cross section along the sheet surface of the metal sheet 34 gradually decreases from one surface 34a of the metal sheet 34 to the other surface 34b. It is like that.

  As will be described later in detail, the vapor deposition mask device 10 is produced from the sheet 60 with the vapor deposition mask. In particular, the metal sheet 34 of the sheet 60 with the vapor deposition mask is used as the vapor deposition mask 20 of the vapor deposition mask apparatus 10 after being separated from the resin sheet 32.

  Here, with reference to FIG. 4 thru | or FIG. 6, the method of performing vapor deposition using the vapor deposition mask 20 and the vapor deposition mask apparatus 10 is demonstrated. In the example shown in FIG. 4, the vapor deposition mask device 10 includes a vapor deposition mask 20 made of a metal sheet 34 of a sheet 60 with a vapor deposition mask, and a frame 15 attached to the peripheral edge of the rectangular vapor deposition mask 20. Yes. The frame 15 of the vapor deposition mask apparatus 10 holds the vapor deposition mask so that the vapor deposition mask 20 is not bent. The vapor deposition mask 20 and the frame 15 are fixed to each other, for example, by spot welding.

  As shown in FIGS. 5 and 6, the vapor deposition mask device 10 is supported in the vapor deposition device 40 so that the vapor deposition mask 20 faces the glass substrate 42. In the vapor deposition apparatus 40, a crucible 44 for accommodating a vapor deposition material (for example, an organic light emitting material) 48 and a heater 46 for heating the crucible 44 are disposed below the glass substrate 42 with the vapor deposition mask apparatus 10 interposed therebetween. Has been. The vapor deposition material 48 in the crucible 44 is vaporized or sublimated by heating from the heater 46 and adheres to the surface of the glass substrate 42. As described above, a large number of holes 25 are formed in the vapor deposition mask 20, and the vapor deposition material 48 adheres to the glass substrate 42 through the holes 25. As a result, the vapor deposition material 48 is formed on the surface of the glass substrate 42 in a desired pattern corresponding to the position of the hole 25 of the vapor deposition mask 20.

  In the present embodiment, one perforated region 22 corresponds to one organic EL display device. That is, according to the vapor deposition mask apparatus 10 (deposition mask 20) shown in FIG. 1, vapor deposition with multiple surfaces is possible.

  By the way, as shown in FIG. 6, when the vapor deposition mask device 10 is accommodated in the vapor deposition device 40, one surface 20 a (34 a) of the vapor deposition mask 20 (metal sheet 34) is placed on the crucible 44 holding the vapor deposition material 48. The other surface 20b (34b) of the vapor deposition mask 20 (metal sheet 34) faces the glass substrate 42. That is, as shown in FIG. 6, the vapor deposition material 48 passes through the holes 25 having a gradually decreasing cross-sectional area and adheres to the glass substrate 42. As shown in FIG. 6, the vapor deposition material 48 may not move linearly from the crucible 44 toward the glass substrate 42, but may move obliquely with respect to the plate surface of the glass substrate 42. At this time, if the cross-sectional shape of the hole 25 has an outline indicated by a dotted line in FIG. 6, the vapor deposition material 48 that moves obliquely does not adhere to the vapor deposition mask 20 and reach the glass substrate 42.

  That is, in order to increase the utilization efficiency of the vapor deposition material (deposition efficiency: ratio of adhering to the glass substrate 42) and save an expensive vapor deposition material, a cross section perpendicular to the sheet surface of the vapor deposition mask 20 (metal sheet 34). (Cross section in FIG. 6), the straight line L connecting the end of the hole 25 on the one surface 20a (34a) side and the end of the hole 25 on the other surface 20b (34b) side, and the other surface 20b (34b) It is better that the angle θ formed by However, the ratio of the vapor deposition material that moves toward the glass substrate 42 so as to form a large angle with respect to the perpendicular to the glass substrate 42 is small. And if the angle (theta) which the above-mentioned straight line L makes with respect to the other surface 20b is 60 degrees or less, the film-forming efficiency of vapor deposition material will become a sufficient value. In addition, if the angle θ formed by the straight line L with respect to the other surface 20b is to be less than 30 °, the formation of the hole 25 becomes difficult, but the deposition efficiency of the vapor deposition material corresponding to the difficulty is improved. I can't get it. That is, the angle θ formed by the straight line L with respect to the other surface 20b is preferably 30 ° or more and 60 ° or less.

  As the angle θ is decreased, the wall surfaces of the adjacent holes 25 are connected as shown by a two-dot chain line in FIG. However, considering the strength of the vapor deposition mask 20 (metal sheet), it is preferable that the wall surfaces of the adjacent holes 25 are not connected to each other, and a flat surface of 5 μm or more between the adjacent holes 25 on one surface 20a. Is more preferably formed.

  That is, the angle θ formed by the straight line L with respect to the other surface 20b is not less than an angle at which a flat surface of 5 μm or more is formed between the holes 25 on one surface 20a, and not more than 60 degrees. Preferably there is.

  Incidentally, as described above, in the present embodiment, the holes 25 are arranged at equal intervals in each perforated region 22. As an example, when the sheet 60 with the vapor deposition mask is used for the vapor deposition mask 20 (vapor deposition mask apparatus 10) for producing a display (about 2 to 3 inches) such as a mobile phone or a digital camera, the arrangement pitch P of the holes 25 ( 3) can be set to about 84 μm (300 ppi) or more and 254 μm (100 ppi) or less. When color display is desired, the vapor deposition mask 20 (vapor deposition mask device 10) and the glass substrate 42 are relatively moved along the arrangement direction of the holes 25 (one direction described above), and the red organic The light emitting material, the green organic light emitting material, and the blue organic light emitting material may be deposited in this order. Moreover, when the sheet | seat 60 with a vapor deposition mask is used for the vapor deposition mask 20 (vapor deposition mask apparatus 10) for producing the display of a mobile telephone, the width | variety (slit width | variety) along the arrangement direction (one above-mentioned) of each hole 25 ) W can be about 28 μm or more and 84 μm or less.

  Moreover, the vapor deposition mask apparatus 10 is hold | maintained inside the vapor deposition apparatus 40 used as high temperature atmosphere. Therefore, the metal sheet 60 of the vapor deposition mask-attached sheet 60 that forms the vapor deposition mask 20 and the frame 15 used in the vapor deposition mask device 60 have a low coefficient of thermal expansion in order to prevent the occurrence of bending and thermal stress. It is preferable that they are made of the same material. As such a material, for example, a 36% Ni invar material can be used. However, the sheet is not limited thereto, and a sheet made of stainless steel, copper, iron, or aluminum can be used as the metal sheet 34.

  On the other hand, as the resin-made sheet 32 of the sheet 60 with a vapor deposition mask, for example, a sheet made of polyethylene terephthalate or polypropylene having a thickness of about 50 μm to 150 μm can be used. In the present embodiment, a resin sheet 32 is used in which the bonding force to the metal sheet 34 is reduced when irradiated with UV light. Specifically, as shown in FIG. 2, a resin sheet 32 includes a base sheet 32 a made of polyethylene terephthalate, and a UV release layer 32 b that is laminated on the base sheet 32 a and faces the metal sheet 34. , Can be provided. Here, the UV release layer 32b has an adhesive force at first, and adheres the base sheet 32a and the metal sheet 34, but when irradiated with UV light, the adhesive strength of the irradiated portion is reduced. It is a layer that is. For example, when irradiated with UV light, the irradiated portion is cured and the bonding force to the metal sheet 34 is reduced. Such a UV peeling layer 32b can be formed from, for example, an acrylic UV re-peeling adhesive.

  Next, a method of manufacturing the vapor deposition mask apparatus 10 using the vapor deposition mask-attached sheet 60 having the above configuration will be described mainly with reference to FIG.

  As shown in FIG. 7, in the present embodiment, the method for manufacturing a vapor deposition mask device includes a vapor deposition mask-attached sheet 60 including a resin sheet 32 and a hole-formed metal sheet 34 laminated on the resin sheet 32. A step of separating the resin sheet 32 from the metal sheet 34 and removing the resin sheet 32 from the deposition masked sheet 60, and a step of attaching the metal sheet 34 to the frame 15. Yes. Each step will be described in more detail below.

  First, the prepared sheet 60 with vapor deposition mask is supplied to a removing device (removing means) 54. In the example shown in FIG. 7, the sheet 60 with the vapor deposition mask is supplied so that the metal sheet 34 is located below and the resin sheet 32 is located above. Further, as shown in FIG. 7, the removal device 54 in the present embodiment has UV light irradiation means 55. The UV light irradiation means 55 is provided along the movement path of the sheet 60 with a vapor deposition mask, a shade 55a that covers the sheet 60 with a vapor deposition mask from the resin sheet 32 side, a UV light source 55b disposed in the shade 55a, have. And the sheet | seat 60 with a vapor deposition mask conveyed is irradiated with UV light from the resin-made sheet 32 side, and the base-material sheet | seat 32a and the metal sheet | seat 34 (vapor-deposition) by UV light which permeate | transmits the base-material sheet | seat 32a of the resin-made sheet 32. The adhesive strength of the UV release layer 32b that bonds the mask 20) is greatly weakened. As a result, the resin sheet 32 and the metal sheet 34 (deposition mask 20) forming the sheet 60 with the deposition mask can be separated. Then, as shown in FIG. 7, the resin sheet 32 is gradually peeled off from the metal sheet 34 while the sheet 60 with vapor deposition mask is guided by the roller 57.

  The direction in which the resin sheet 32 is peeled from the metal sheet 34 is preferably parallel to the direction in which the holes 25 formed in the metal sheet 34 extend (the other direction described above). When the resin sheet 32 is separated from the metal sheet 34 along such a direction, the gap between the hole 25 and the hole 25 of the metal sheet 34 is cut, or the gap between the hole 25 and the hole 25 is cut. It is possible to effectively prevent the portion extending linearly from becoming tangled.

  In this way, the vapor deposition mask 20 composed of the metal sheet 34 separated from the resin sheet 32 is obtained. Thereafter, the frame 15 is fixed to the obtained vapor deposition mask 20. In the example shown in FIG. 7, the frame 15 is fixed to the vapor deposition mask 20 by the spot welding device 59.

  As described above, the vapor deposition mask device 10 including the vapor deposition mask 20 and the frame 15 fixed to the vapor deposition mask 20 is obtained.

  In addition, in the manufacturing method of the above-described vapor deposition mask apparatus, the conveyance direction of the sheet 60 with vapor deposition mask and the vapor deposition mask 20 (metal sheet 34) is the direction in which the holes 25 formed in the metal sheet 34 extend (described above). It is preferable to be parallel to the other direction. When transporting the vapor deposition mask-attached sheet 60 and the vapor deposition mask 20 (metal sheet 34) along such a direction, the gap between the hole 25 and the hole 25 of the metal sheet 34 may be cut, It is possible to effectively prevent the portion extending linearly from the hole 25 from becoming tangled.

  According to the above method, the vapor deposition mask apparatus 10 can be manufactured very easily from the sheet 60 with the vapor deposition mask. In addition, the direction in which the resin sheet 32 is peeled off from the metal sheet and the direction in which the sheet 60 with the vapor deposition mask and the vapor deposition mask 20 (metal sheet 34) are conveyed are the directions in which the holes 25 formed in the metal sheet 34 extend. By aligning with (the other direction mentioned above), between the hole 25 and the hole 25 of the metal sheet 34 is cut, or a portion extending linearly between the hole 25 and the hole 25 is tangled. Can be effectively prevented. That is, it is possible to avoid a problem that the shape of the fine holes 25 once formed in the metal sheet 34 is damaged during the subsequent handling.

  Next, a method for manufacturing a sheet with a vapor deposition mask will be described mainly with reference to FIGS.

  As shown in FIG. 8, the manufacturing method of the vapor deposition mask in this Embodiment is the process of supplying the laminated body 30 which has the resin sheet 32 and the metal sheet 34 laminated | stacked on the resin sheet 32, Photo Etching using a lithography technique is performed on the metal sheet 34 of the laminate 30 to form a large number of holes 25 in the metal sheet 34. After the etching process, the laminate 30 is cut to a predetermined length. And a process. Each step will be described in more detail below.

  As shown in FIG. 8, in the present embodiment, a laminated body 29 is prepared by winding the laminated body 30 around a supply core 31. Then, when the supply core 31 rotates and the wound body 29 is rewound, the laminated body 30 extending in a strip shape is supplied as shown in FIG. Here, the laminated body 30 is supplied so that the metal sheet 34 is located below and the resin sheet 32 is located above. Such a wound body 29 is available at a low cost and is very convenient for handling.

  In addition, the metal sheet 34 of the laminated body 30 is formed with the holes 25 to form the vapor deposition mask 20. Therefore, as described above, the metal sheet 34 is made of, for example, 36% Ni invar material. Further, as described above, the resin sheet 32 is made of, for example, polyethylene terephthalate or polypropylene having a thickness of about 50 μm to 150 μm. However, in order to allow the resin sheet 32 to be easily peeled off from the metal sheet 34, as described above, the bonding force to the metal sheet 34 is reduced when irradiated with UV light. The resin sheet 32 is preferably used.

  The supplied laminate 30 is subjected to an etching process by an etching apparatus (etching means) 50. Specifically, first, a photosensitive resist material is applied on the surface of the metal sheet 34 of the laminate 30 (on the lower surface of the paper in FIG. 9), and a resist film 36 is formed on the metal sheet 34. To do. Next, a glass dry plate 37 is prepared in which light is not transmitted to a region to be removed of the resist film 36, and the glass dry plate 37 is disposed on the resist film 36.

  Thereafter, as shown in FIG. 9, the resist film 36 is exposed through a glass dry plate 37, and the resist film 36 is further developed. As described above, the resist pattern 36 a is formed on the metal sheet 34 of the stacked body 30.

  Note that a region of the glass dry plate 37 facing the resist film 36 to be removed may be black, and visible light may be used as exposure light. In this case, the visible light is absorbed by the black portion, so that light does not enter the region to be removed of the resist film 36 and the resist film 36 is not fixed on the metal sheet 34. On the other hand, light is incident on an area where the resist film 36 should not be removed, and the resist film 36 in the area is fixed on the metal sheet 34. The unfixed resist film 36 is removed by, for example, hot water washing.

  Next, as shown in FIG. 10, the stacked body 30 is etched with an etching solution (for example, ferric chloride solution) 38 using the resist pattern 36 a formed on the metal sheet 34 as a mask. In the present embodiment, the etching solution 38 is sprayed from the nozzle 51 of the etching apparatus 50 disposed below the transported laminate 30 toward the one surface 34a of the metal sheet 34 through the resist pattern 36a. The At this time, as shown by a dotted line in FIG. 10, erosion by the etching solution starts in a region of the metal sheet 34 that is not covered with the resist pattern 36a. Thereafter, erosion proceeds not only in the thickness direction of the metal sheet 34 but also in the direction along the sheet surface of the metal sheet 34. As described above, erosion by the etching solution proceeds from one surface 34a of the metal sheet 34 to the other surface 34b, and the hole 25 penetrating the metal sheet 34 is formed.

  Thereafter, the resist pattern 36a on the stacked body 30 is removed, and the stacked body 30 is further washed with water. In this manner, a sheet 60 with a vapor deposition mask is obtained, which is composed of the resin sheet 32 and the metal sheet 34 in which a large number of holes 25 are formed.

  By the way, if the resin sheet 32 is not provided, as described above, the etching liquid stays on the other surface 34b side of the metal sheet 34 after the metal sheet 34 is penetrated and the hole 25 is formed. This may cause a problem that the shape and size of the hole 25 are not stable. However, according to the present embodiment, even if the hole 25 penetrating the metal sheet 34 is formed, the upper side of the hole 25 is covered with the resin sheet 32. Therefore, it is possible to reliably avoid the problems that have occurred in the conventional method. As a result, the metal sheet 34 is eroded only from the one surface 34a side, and the cross-sectional area of the hole 25 formed in the metal sheet 34 is changed from one surface 34a (20a) to the other surface 34b (20b). It will gradually become smaller toward you. Further, the hole 25 having a desired opening area (area of the hole 25 in plan view) can be formed with high accuracy.

  Thereafter, the sheet 60 with the vapor deposition mask obtained in this way is conveyed to a cutting device (cutting means) 53 by a pair of conveyance rollers 52 and 52 that rotate while holding the sheet 60 with the vapor deposition mask. . The supply core 31 described above is rotated by the rotation of the conveying rollers 52, 52 via the tension (pulling force) acting on the sheet 60 with the vapor deposition mask and the laminated body 30, and the laminated body 30 is supplied from the wound body 29. It has come to be.

  In the present embodiment, the metal sheet 34 is supported and reinforced by the resin sheet 32. Therefore, when the laminated body 30 and the sheet 60 with the vapor deposition mask are conveyed, the stress between the holes 25 and the holes 25 is cut between the holes 25 and the holes 25 of the metal sheet 34, The trouble that the part extended linearly between 25 and the hole 25 becomes tangled can be suppressed markedly. As a result, it is possible to avoid the problem that the shape of the fine holes 25 formed in the metal sheet 34 in the etching process is subsequently lost.

  In addition, as described above, in the case of forming the elongated holes 25 extending along the direction orthogonal to the arrangement direction, the direction in which the holes 25 extend (the other direction described above) and the direction in which the stacked body 30 is supplied (the stacked body and the vapor deposition). The direction in which the masked sheet 60 is conveyed is preferably substantially parallel. In this case, it is possible to effectively prevent the gap between the hole 25 and the hole 25 of the metal sheet 34 from being cut or a portion extending linearly between the hole 25 and the hole 25 from being tangled. it can.

  Thus, the sheet | seat 60 with a vapor deposition mask conveyed to the cutting device 53 is cut | disconnected sequentially so that the metal sheet 34 may have the same length as the length of the vapor deposition mask 20 of 1 sheet. As described above, the sheet 60 with the vapor deposition mask is sequentially manufactured.

  As described above, according to the present embodiment, the metal sheet 34 of the sheet 60 with the vapor deposition mask that forms the vapor deposition mask 20 is laminated on the resin sheet 32 and protected by the resin sheet 32. Therefore, when handling the sheet 60 with the vapor deposition mask, for example, when conveying the sheet with the vapor deposition mask, the tension (tensile force) acting on the metal sheet 34 of the sheet 60 with the vapor deposition mask is remarkably reduced, and the metal sheet It is possible to effectively prevent the fine holes 25 formed in the 34 from being damaged.

  Moreover, the holes 25 can be formed in the metal sheet 34 laminated on the resin sheet 32. Therefore, the metal sheet 34 can be etched only from the one surface 34 a side to form the hole 25 penetrating the metal sheet 34. In this case, although the hole 25 penetrates the metal sheet 34, the end of the hole 25 located on the other surface 34 b side of the metal sheet 34 is covered with the resin sheet 32. That is, since the hole 25 does not penetrate through the laminated body 30, the above-described conventional problems can be avoided. Thereby, the hole 25 whose cross-sectional area is gradually reduced from the one surface 34a (20a) toward the other surface 34b (20b) can be formed in the metal sheet 34. Moreover, the vapor deposition mask 20 opened with a high-definition pattern can be produced with high accuracy.

  And the vapor deposition mask 20 which consists of metal sheets 34 can be easily produced by removing the resin-made sheet | seats 32 from this sheet | seat 60 with a vapor deposition mask. According to the vapor deposition mask 20 thus obtained and the vapor deposition mask apparatus 10 using the vapor deposition mask 20, vapor deposition with a high-definition pattern can be performed with high accuracy. Therefore, the vapor deposition mask 20 and the vapor deposition mask device 10 thus obtained are used for, for example, patterning an organic light emitting material on the glass substrate 42 in a desired pattern when manufacturing an organic EL display device. Very suitable for (metal mask for evaporation).

  Various modifications can be made to the above-described embodiment within the scope of the present invention. Hereinafter, an example of a modification will be described.

  In embodiment mentioned above, when manufacturing the vapor deposition mask apparatus 10, the example which removes the resin sheet 32 from the laminated body 30 by irradiating the resin sheet 32 with UV light was shown. The removal method of 32 is not restricted to this. For example, the laminate 30 may be sent to a heating furnace (removing means), and the resin sheet 32 of the laminate 30 may be burned to remove the resin sheet 32 from the laminate 30. When the resin sheet 32 is removed by burning, the metal sheet 34 is removed from the metal sheet 34 (deposition mask 20) without affecting the holes 25 by a simple method using a simple apparatus. The resin sheet 32 can be separated. In addition, when removing the resin sheet 32 by burning, it is not necessary to use the resin sheet 32 in which the bonding force to the metal sheet 34 is reduced by being irradiated with UV light.

  Moreover, in embodiment mentioned above, when manufacturing the sheet | seat 60 with a vapor deposition mask, the example which prepared and supplied the laminated body 30 by which the resin sheet 32 and the metal sheet 34 were laminated | stacked previously was shown. Not limited to this. For example, the metal sheet 34 extending in a band shape and the resin sheet 32 extending in a band shape are supplied, and the laminate 30 is manufactured by laminating the supplied metal sheet 34 and the resin sheet 32, and sequentially manufacturing them. The laminated body 30 being processed may be subjected to the above-described processing to produce the sheet 60 with a vapor deposition mask. Alternatively, the metal sheet 34 extending in a strip shape is supplied and the sheet-like resin sheet 32 is laminated on the supplied metal sheet 34, and the sheet-like resin sheet 32 of the metal sheets 34 is stacked. The above-described processing may be sequentially performed on the laminated portion (laminated body 30) to produce the sheet 60 with a vapor deposition mask. Alternatively, a sheet-like metal sheet 34 is laminated on the resin sheet 34 by supplying the resin sheet 32 extending in a belt shape and laminating the sheet-like metal sheet 34 on the supplied resin sheet 32. The above-described processing may be sequentially performed on the sheet 34 to manufacture the sheet 60 with the vapor deposition mask.

  Furthermore, in the above-described embodiment, an example in which the metal sheet 34 is cut into a predetermined length by the cutting device 53 after the holes 25 are formed in the metal sheet 34 when the vapor deposition masked sheet 60 is manufactured. Although shown, it is not limited to this. For example, the step of cutting the metal sheet 34 may be performed before the holes 25 are formed in the metal sheet 34.

  Further, in the above-described embodiment, when the sheet 60 with a vapor deposition mask is manufactured, the vapor deposition mask is set so that the metal sheet 34 of the sheet 60 with the vapor deposition mask has the same length as the length of one vapor deposition mask 20. Although the example which cut | disconnects the attached sheet 60 was shown, it is not restricted to this. For example, the sheet 60 with the vapor deposition mask is set so that the metal sheet 34 of the sheet 60 with the vapor deposition mask has a length longer than the length of one vapor deposition mask 20 (for example, the length of two vapor deposition masks 20). You may make it cut | disconnect. In addition, as shown in FIG. 11, the sheet 60 with the vapor deposition mask extending in a belt shape is wound around the winding core 61 and handled as a wound body 60a of the sheet 60 with the vapor deposition mask (shipping, transportation, etc.). May be. Furthermore, instead of cutting the entire sheet 60 with the vapor deposition mask, the laminated body 30 may be half-cut to the extent that the resin sheet 32 cannot be cut, and only the metal sheet 34 may be cut. Further, during the step of forming the holes 25 by etching, the metal sheet 34 may be etched so as to be cut to a predetermined length. That is, when the hole 25 is formed by etching, the metal sheet 34 may be separated into a predetermined length by etching. In this case, the trouble of separately cutting the metal sheet 34 into a predetermined length can be saved.

  Furthermore, in embodiment mentioned above, when manufacturing the vapor deposition mask apparatus 10 from the sheet | seat 60 with a vapor deposition mask, the example which attaches the flame | frame 15 to the metal sheet | seat 34 (vapor deposition mask 20) isolate | separated from the resin-made sheets 32 is shown. Although shown, it is not limited to this. For example, the frame 15 may be attached to the metal sheet 34 (deposition mask 20) before being separated from the resin sheet 32. Further, when the sheet 60 with the vapor deposition mask is manufactured, a step of attaching the frame 15 to the metal sheet 34 is provided so that the frame 15 is handled as the sheet 60 with the vapor deposition mask attached (shipping and transportation). Good.

FIG. 1 is a top view showing an embodiment of a sheet with a vapor deposition mask according to the present invention. FIG. 2 is a cross-sectional view taken along the line II-II in FIG. FIG. 3 is a partial bottom view of the sheet with vapor deposition mask shown in FIG. FIG. 4 is a perspective view showing an example of a vapor deposition mask and a vapor deposition mask device that can be manufactured from the sheet with the vapor deposition mask shown in FIG. 1. FIG. 5 is a diagram for explaining a method of using the vapor deposition mask and the vapor deposition mask apparatus. FIG. 6 is a diagram for explaining the operation of the vapor deposition mask. FIG. 7 is a diagram for explaining an embodiment of a method for manufacturing a vapor deposition mask device according to the present invention, and a method for manufacturing the vapor deposition mask and the vapor deposition mask device from the sheet with the vapor deposition mask shown in FIG. It is a figure for demonstrating. FIG. 8 is a view for explaining an embodiment of a method for producing a sheet with a vapor deposition mask according to the present invention, and is a diagram for explaining a method for producing the sheet with a vapor deposition mask shown in FIG. is there. FIG. 9 is a diagram for explaining a method of forming a resist pattern on a laminate (metal sheet). FIG. 10 is a diagram for explaining a method of etching a laminated body (metal sheet). FIG. 11 is a diagram corresponding to FIG. 8 and illustrating a modified example of the method for manufacturing the sheet with the vapor deposition mask. FIG. 12 is a view corresponding to FIG. 6 for explaining a method of vapor deposition using a vapor deposition mask made of a metal plate etched from both sides. FIG. 13 is a diagram corresponding to FIG. 10 and is a diagram for explaining a method of manufacturing a vapor deposition mask by etching a metal plate from the lower surface.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Deposition mask apparatus 15 Frame 20 Deposition mask 20a One side 20b The other side 22 Perforated area 23 Non-perforated area 25 Hole 29 Roll body 30 Laminated body 32 Resin sheet 34 Metal sheet 34a One side 34b The other side 60 Sheet L with vapor deposition mask Straight line θ Angle

Claims (17)

A resin sheet;
A metal sheet laminated with the resin sheet, and a metal sheet in which a plurality of holes are formed,
The metal sheet is used as a vapor deposition mask after being separated from the resin sheet. The cross-sectional area of the hole formed in the metal sheet is reduced from the surface of the metal sheet that does not face the resin sheet toward the surface of the metal sheet that faces the resin sheet. The sheet | seat with a vapor deposition mask of Claim 1 characterized by the above-mentioned. The sheet with a vapor deposition mask according to claim 1, further comprising a frame fixed to the metal sheet. 4. The bonding force of the resin sheet to the metal sheet is reduced by irradiating the resin sheet with UV light. 5. The sheet | seat with a vapor deposition mask of description. The resin sheet has a base sheet, and a UV release layer that joins the base sheet and the metal sheet,
The sheet with vapor deposition mask according to claim 4, wherein the bonding strength of the UV release layer decreases when irradiated with UV light. The vapor deposition according to any one of claims 1 to 5, wherein the plurality of holes are arranged side by side along one direction, and each hole extends along another direction orthogonal to the one direction. Sheet with mask. The metal sheet includes a plurality of perforated areas in which a plurality of holes are arranged in a predetermined pattern, and a non-porous area arranged between the perforated areas. The sheet | seat with a vapor deposition mask as described in any one of these. A method for producing a vapor deposition mask device from the sheet with vapor deposition mask according to claim 1,
The manufacturing method of the vapor deposition mask apparatus characterized by including the process of separating the said resin-made sheet | seat from the said metal sheet | seat, and removing the said resin-made sheet | seat from the said sheet | seat with a vapor deposition mask. The bonding force of the resin sheet to the metal sheet is reduced by irradiating the resin sheet with UV light,
The vapor deposition mask apparatus according to claim 8, wherein in the step of removing the resin sheet, the resin sheet is irradiated with UV light to separate the metal sheet and the resin sheet. Production method. The plurality of holes formed in the metal sheet are arranged side by side along one direction, and each hole extends along another direction orthogonal to the one direction,
The method for manufacturing a vapor deposition mask device according to claim 8 or 9, wherein, in the step of removing the resin sheet, the metal sheet and the resin sheet are separated along the other direction. . The manufacturing method of the vapor deposition mask apparatus as described in any one of Claims 8 thru | or 10 further equipped with the process of attaching the said flame | frame to the said metal sheets. A method for producing a sheet with a vapor deposition mask according to claim 1,
Supplying a laminate having a resin sheet and a metal sheet laminated on the resin sheet;
And a step of etching the supplied laminated body to form a large number of holes in the metal sheet. In the step of etching the laminated body, a plurality of holes arranged side by side along one direction, each of which extends along another direction orthogonal to the one direction, are formed. The manufacturing method of the sheet | seat with a vapor deposition mask of Claim 12 to do. The method for manufacturing a sheet with a vapor deposition mask according to claim 13, wherein the laminate is supplied along the other direction. 15. The step of etching the laminate, wherein a plurality of perforated regions in which a plurality of holes are arranged in a predetermined pattern are formed on a metal sheet. Manufacturing method of sheet | seat with a vapor deposition mask. 13. The step of supplying the laminate includes supplying a laminate including a resin sheet that is configured to reduce a bonding force to the metal sheet when irradiated with UV light. The manufacturing method of the sheet | seat with a vapor deposition mask as described in any one of 15. The vapor deposition according to any one of claims 12 to 16, wherein in the step of supplying the laminated body, the laminated body that has wound up the laminated body is rewound to supply a laminated body that extends in a band shape. Manufacturing method of sheet with mask.

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