JP2003064468A - Combination mask - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a vapor deposition mask for obtaining a prescribed shape and a prescribed circuit pattern by sticking and fixing a metallic mask 4 impossible to keep a prescribed dimension and shape in the metallic mask single body to a vapor deposition fixture frame for an organic electroluminescence element. SOLUTION: A combination mask 9 is formed by spreading a screen mesh 2 while keeping the anisotropy in the X-Y direction of the screen mesh 2 inside a screen plate frame 1 used for screen printing, composed of aluminum and having a rectangular shape. The metallic mask 4 of the circuit pattern 3, which does not keep the prescribed dimension and shape only in the metallic mask single body, is formed into the combination mask 9 and the vapor deposition mask used for manufacturing the organic electroluminescence element is manufactured by using the combination mask 9.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a combination mask used for manufacturing a vapor deposition mask for manufacturing an organic electroluminescent device.

[0002]

2. Description of the Related Art Japanese Patent Publication No. 7-45241 discloses a technique of a combination mask for screen printing. This combination mask for screen printing is attached to the inside of a rectangular screen printing plate frame with the screen mesh tensioned in the XY directions, and characters, patterns, etc. are placed in the center of the screen mesh. It is attached to the metal mask on which the mark is drawn with an adhesive, and the screen mesh located inside the attachment white of the metal mask is cut out along the edge of the metal mask and stretched with isotropic tension. Is to be set up. This combination mask is directly used for screen printing.

[0003]

The problem to be solved is that with the finer circuit pattern of the metal mask 4, the metal mask alone cannot maintain a predetermined size and shape. It is very difficult to directly bond and fix the metal mask 4 which cannot maintain a predetermined size and shape only with such a metal mask directly to the vapor deposition jig frame for manufacturing an organic electroluminescence element while maintaining the predetermined size and shape. Is. Even if the metal mask 4, which cannot maintain a predetermined size and shape with the metal mask alone, is directly bonded and fixed to the vapor deposition jig frame for the organic electroluminescence element,
The vapor deposition mask does not have a predetermined size and shape. With such a vapor deposition mask, it becomes impossible to form a vapor deposition film according to a predetermined circuit pattern of the metal mask, which causes problems such as disconnection and short circuit. The present invention is a vapor deposition mask for adhering and fixing a metal mask 4, which cannot maintain a predetermined size and shape with a single metal mask, to a vapor deposition jig frame for an organic electroluminescence element, thereby realizing a predetermined size and shape and a predetermined circuit pattern. The purpose is to create.

[0004]

The inventor of the present invention has made extensive studies to solve the above-mentioned problems, and as a result, has completed the invention described below. That is, the present invention introduced a new concept of applying a combination mask to create a vapor deposition mask, and established a new method of manufacturing a combination mask using a new technique.

The metal mask of the present invention has a fine circuit pattern (line width 10 to 100 μm, line gap 10 to 500 μm, line length 1 to 10 cm) used for manufacturing an organic electroluminescence device.
Is for. Therefore, it is very thin (thickness 2
0 to 100 micron), which is easily wrinkled. The screen mesh of the present invention, polyester used for screen printing, gauze made of synthetic fibers such as nylon,
Or a gauze made of metal fiber such as stainless steel having a thickness of 10 to 150 μm, preferably 30 to 100 μm. The vapor deposition mask of the present invention is for forming a pattern by a vapor deposition method.

According to the present invention, a combination mask 9 is produced by tensioning the screen mesh 2 inside a quadrangular screen plate frame 1 made of aluminum or the like for screen printing while maintaining anisotropy in the XY directions. To do. The metal mask 4 of the circuit pattern 3 which cannot maintain a predetermined size and shape by a metal mask alone is used as a combination mask 9, and using this, a vapor deposition mask used when manufacturing an organic electroluminescence device is manufactured. To do.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, a combination mask 9 is used as a combination mask 9 for forming a circuit pattern 3 or a metal mask 4 having a thin plate thickness whose size and shape cannot be maintained by a metal mask alone. It is characterized by using 9.
Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows a combination mask in the first step of manufacturing the combination mask 9 of the present invention. (A) is this plan view, (b) is FIG. 1 (a)
3 is a cross-sectional view taken along the line AA ′ of FIG. A screen mesh 2 (thickness 10 to 150 μm, preferably 30 to 100 μm) made of synthetic fibers such as polyester and nylon is pulled into a quadrangular shape made of aluminum or the like while being pulled with different predetermined strengths in the XY directions. A screen mesh 2 is fixedly stretched on the upper surface of the screen plate frame 1. The screen mesh is stretched so as to conform to the fine circuit pattern of the organic electroluminescence element based on the value of the sinking amount of the screen mesh. Using a tension gauge 75B manufactured by Tokyo Process Service Co., Ltd., the sink amount in the X direction (right angle to the slit shape) is set to 1 to 6 mm, and Y
Direction (parallel to the slit shape) sink amount 0.3-4 mm
And The amount of sinking in the X direction (right angle to the slit shape) is made larger than the amount of sinking in the Y direction (parallel to the slit shape).
The screen printing plate frame 1 and the screen mesh 2 are bonded and fixed using a fast-acting adhesive 6 (for example, a cyanoacrylate-based adhesive).

With the metal mask alone, the circuit pattern 3 (line width 10 to 100 μm, line gap 10 to 500 μm, line length 0.
A metal mask 4 (thickness: 1 to 100 mm) (thickness: 20 to 100 μm) and a screen mesh 2 below the central portion of the screen plate frame 1 are sandwiched by a flat plate 7 smaller than the metal mask 4 and a large flat plate 7 (glass, acrylic, etc.). . The edge portion 5 of the metal mask 4 and the screen mesh 2 are coated with a fast-acting adhesive 6 from the side of the screen mesh 2 to bond and fix the metal mask 4 and the screen mesh 2. After confirming the hardening of the fast-acting adhesive 6, the flat plate is removed.

FIG. 2 shows a combination mask in the second step of manufacturing the combination mask of the present invention. 2A is this plan view, and FIG. 2B is a sectional view taken along the line AA ′ of FIG. The screen mesh 2 is cut along the outer surface of the screen plate frame 1 with a cutter knife or the like. Then metal mask 4
And the screen mesh 2 along the bonded portion, and the central portion of the screen mesh 2 is cut using a soldering iron or the like. As a result, due to the anisotropic tension generated due to the difference in the sink amount of the screen mesh remaining portion 9, the metal mask 4
Is pulled to have a predetermined size and shape without wrinkles and sagging. It is possible to manufacture a combination mask in which the predetermined size and shape of the metal mask and the circuit pattern are maintained.

[0011]

The present invention has the following effects. By stretching the screen mesh in each of the XY directions,
It is possible to produce a metal mask that maintains a predetermined size and shape. By using the combination mask, the metal mask can be manufactured in accordance with a predetermined size and shape and a circuit pattern, and can be adhesively fixed to the vapor deposition jig frame for organic electroluminescence.

[Brief description of drawings]

FIG. 1 is a combination mask 9 in the first manufacturing process of the present invention. (A) is a top view. 1B is a sectional view taken along the line AA ′ of FIG.

FIG. 2 is a combination mask 9 in the second manufacturing process of the present invention. (A) is a top view. 2B is a sectional view taken along the line AA ′ of FIG.

[Explanation of symbols]

1 screen version frame 2 screen mesh 3 circuit patterns 4 metal mask 5 peripheral part 6 adhesive 7 flat plate 8 Screen mesh remainder 9 combination masks

Claims (2)

[Claims] 1. A combination mask used for manufacturing a vapor deposition mask. 2. A combination mask in which a metal mask is stretched inside a screen printing plate frame through a screen mesh, and the metal mask alone cannot maintain a predetermined size or shape or a circuit pattern. A combination mask in which a mesh is stretched while maintaining anisotropy in each of the XY directions to maintain a predetermined size and shape of a metal mask and a circuit pattern.