CN102347456B - Divided mask frame assembly and manufacturing method of divided mask frame assembly - Google Patents
Divided mask frame assembly and manufacturing method of divided mask frame assembly Download PDFInfo
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- CN102347456B CN102347456B CN201110205061.8A CN201110205061A CN102347456B CN 102347456 B CN102347456 B CN 102347456B CN 201110205061 A CN201110205061 A CN 201110205061A CN 102347456 B CN102347456 B CN 102347456B
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- mask
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
A mask frame assembly divided for manufacturing a large AMOLED TV panel and a panel for a mobile device and a manufacturing method thereof are provided to prevent the sag of the center of a frame by forming a rib in the center of the frame. CONSTITUTION: A rib crosses the center of a frame(1). A division mask(2) welded with the frame by the rib is divided into two parts. A mother glass printed with a mask pattern is integrated with a jig. The mother glass jig integrated with the mother glass is installed on the lower side of the frame. The pattern of the mother glass is matched with the division mask.
Description
Technical field
The present invention relates to get for manufacturing large scale AMOLED (Active Matrix/Organic Light Emitting Diode: active matrix organic light-emitting diode (AMOLED) panel) multiaspect mask frame and manufacture method thereof that the bar-shaped mask (stick mask) of television panels and mobile device (Mobile) guidance panel is cut apart.Be specifically related to following mask frame and manufacture method thereof, utilize multiple when cutting apart mask and manufacturing large-sized multiaspect and get mask frame, form rib and make the degree of sag of framework can be minimum at the central portion of framework, thereby when being welded on to framework, improves by mask pattern and the degree of registration of female glass that is positioned at bottom, thereby carry out more accurate mask welding, and, because the rib of central portion makes the sagging minimum of framework, thereby prevent shade (shadow) phenomenon producing in the time of evaporation organic substance, finally significantly improve the quality of large scale AMOLED panel.
Background technology
The reaction speed of Organic Light Emitting Diode (OLED:Organic Light Emitting Diode) is obviously fast than Thin Film Transistor-LCD (TFT LCD).And backlight because be that so self-luminous does not need, its thickness and weight can be reduced to 1/3, be a display of future generation with wide viewing angle and low power consumption structure.
Above-mentioned Organic Light Emitting Diode is divided into AM mode (actively) and PM mode (passive).The manufacture unit price of PMOLED is low compared with AMOLED, and power consumption, life-span and resolution have certain restriction.The each pixel of AMOLED has TFT and capacitor, all there is outstanding performance at aspects such as power consumption, life-span, resolution, so can overcome the weakness that improves its manufacturing expense because manufacturing TFT, all attempting now active development and a large amount of production in each field.
The great advantage of AMOLED is the competitiveness of image quality.Compared with its maximum contention object LCD, its color rendering rate is 30%, and contrast is 20 times.The imperceptible after image as LCD greatest weakness of AMOLED (after image) phenomenon.Because in LCD, make to pass through liquid crystal, chromatic filter etc. as the backlight of indirect light source, more complicated ground display frame, on the contrary, AMOLED directly reproduces Natural color picture by organic substance self-luminous.
In addition, OLED and LCD structure compared are simple, preponderate very much during fabrication in parts convenience.
But, OLED in material cost, drive in the price of loop, drive IC, the shared ratio of its allowance for depreciation is very large, is bordering on the half of whole cost.This is that unit price effect is manufactured in the reduction that is difficult to obtain being produced by its a large amount of production because OLED does not also form popularly in consumer.But As time goes on, output increases, allowance for depreciation can decline, and can expect also can be at war with LCD in price.Its reason is, because self luminous mode does not need the parts such as BLU and chromatic filter, simple in structure, so can fully reduce its cost.
So, in order to possess price competitiveness, need to do effort for reducing allowance for depreciation.
But, for a large amount of production, also have a lot of technical issues that need to address.That is, luminous organic substance, to wherein manufacturing environment is very responsive, be produced high-quality display very difficult, therefore needs to overcome the problem of rate of finished products, from now on along with it maximizes, also has the more difficult series of problems that waits of the rate of finished products of guaranteeing.
Below, with reference to being shown in the accompanying drawing 12 of manufacturing the principle of AMOLED in the organic matter vaporization plating device that utilizes mask frame, the manufacture method of the display floater in the past that utilizes AMOLED (active Organic Light Emitting Diode) is described.
The essential structure of AMOLED display floater is on glass substrate, to form the ITO (Induim Tin Oxide: tin indium oxide) as anode, surperficial evaporation organic substance R, G, B thereon, then form negative electrode thereon, make anode and cathodal closing and luminous simple structure.
A kind of the mode of position that mask alignment sets the goal for the manufacture of (mask stretching) mode that stretches of mask AMOLED display, in the past with above-mentioned basic comprising, by repeatedly measuring the flow process compensating behind band (stripe) position of mask frame, thereby make the mode of its alignment.
Therefore, the R of glass substrate equipment in organic evaporator, G, the position of B and the opening of mask (open) position need correct alignment, therefore, evaporate the organic while by vapor deposition source, induction organic substance makes it, and correctly the accuracy of the mask frame between the partition wall of evaporation in glass substrate element is extremely important.
; the restriction of the mask coil dimension of the low and producer's supply of the rate of finished products that uses the stretching mode of free hand drawing formula mask (single pattern mask) to produce due to the foozle of mask self, because of defects on mask etc.; can realize now be the 4th generation Half level 30 " level of free hand drawing formula TV, the maximized high-tech level of size is 42, and " multiaspect water intaking is flat.But cost is too high in the structure of the running stores for evaporation, in economy, have restricted.
Therefore, mass-produced AMOLED major part was small-sized in the past, in the time utilizing free hand drawing formula mask to manufacture mask frame production large scale AMOLED, restricted in its size.
Carrying out with free hand drawing formula mask the difficult point maximizing is can not meet as the supply size of the raw-material coil of mask the needed size that maximizes.,, due to Profit Margin, coil manufacturer does not produce AMOLED and shows the required size of manufacturer.
For addressing the above problem proposed scheme for utilizing multiple masks of cutting apart to manufacture mask frame.It is below the manufacture method of cutting apart the maximum sized large scale mask frame that mask can manufacture about utilizing.
Figure 13 utilized the process chart of cutting apart mask manufacture mask frame in the past, Figure 14 shows while manufacturing mask frame according to method in the past, make to cut apart that mask is positioned at the after-applied tension force in female glass top and the illustration figure that makes the structure of its alignment, Figure 15 shows the illustration figure that makes the pattern of female glass while manufacturing mask frame in the past and cut apart the principle of the groove alignment of mask.
As shown in the figure; the manufacture method of mask frame is in the past to clamp multiple two ends of cutting apart mask with clamper to apply tension force; then make itself and the female glass pattern that is positioned at bottom align and after exposing; make and etched mask pattern groove between align; be welded on framework and assemble one by one cutting apart mask; when assembling, on the framework of not cutting apart mask, together weld block masks; manufacture after mask frame with this; for preventing that mask from rocking; together weld anti-rock mask, thereby complete mask frame.
Figure 16 and Figure 17 represent large scale (730 × 920mm higher level) mask frame of manufacturing by said method.Figure 16 represents to connect by method in the past the large scale mask frame of cutting apart mask in the long side weld of framework, and Figure 17 represents the large scale mask frame at the minor face welding segmentation framework assembly of framework by previous methods.
But the increase as above-mentioned method along with framework and mask length, because its weight increases the problem such as sagging that causes central portion, thereby is difficult to batch production.
Below more specifically have a look its problem.
If do not utilize above the 8th generation FMM of the 4th generation of large scale (Fine Metal Mask), for form R, G, B position and the manufacture direct pattern of mask, mask frame of glass substrate equipment in organic evaporator, be difficult to now to realize third generation TV, low power consumption, good the AMOLED that reproduces dynamic image is in large size.In order to ensure batch production and economy, must guarantee large scale FMM, technology is in the past manufactured mask frame as Figure 16, Figure 17 utilize horizontal type tensioner and vertical-type tensioner.But this mask frame is in the past put into a lot of unit boxes (Cell) at it, aspect the diversity of its production quantity and template (Model), there is advantage, but because of invar coil for film, (m) raw-material length, thickness restricted of thickness=10～100 μ, material is supplied with has restriction.
Manufacture and cut apart mask by the direction of invar coil method even if change film, also can produce following problem.
The raw-material flatness problem of-invar coil
The problem of the flatness of-alkali-free soda-lime glass (soda lime glass) and thermal coefficient of expansion (approximately 3 × 10-6/ degree (tempered glass))
The length issue of-alkali-free soda-lime glass
-utilize to use a restriction for the homogenizer degree (Beam Uniformity) of the mask of pleasing both parties of exposure
-be difficult to overcome the temperature rise occurring when exposing along with UV and the relevant mask quality such as the cooling problem causing and the restriction of the uniformity, be difficult to grasp mask position precision, and be difficult to overcome because of the sagging shade causing of mask central portion and the restriction of position precision
When-elongation mask welds, the power being applied on framework because of tension force can cause the problem such as frame deformation and flatness variation
-guarantee the flatness problem of large scale invar and steel
After-deposition mask frame assembly by cleaning the problems such as mask position that recovery process and the vibrations that produced by the automatic logistics that forms mask frame and trembling of mask form changes repeatedly.
As above-mentioned, mask frame manufacture is in the past by extending mask, utilize photographic means that mask and female glass are directly aligned, form one by welding and mask frame, guarantee the location positioning of mask and important at it, even if solved other all problems, because of the structure problem that the shape of mask frame is brought, prevent from hindering evaporation shade and evaporation position, mask central portion is sagging neither part nothing the matter.
In addition, in the past, because causing the sagging value of maximum of its central portion mask, mask weight maintains below 150 μ m, for overcoming the problems such as evaporation shade, when evaporation, the light contact of induction mask and substrate (Substrate), use permanent magnet to prevent the sagging shade causing of the mask being produced by gravity as mask clamp (Mask Chuck), in the case, use permanent magnet to there is some problem: the drastic change of area of section, disconnect phenomenon in the generation magnetic field, place that does not configure the NS utmost point, mask is longer, the more difficult fine shake that NS is coupled and residual magnetic field causes that overcomes mask causes degradation problem under its positional accuracy.
Along with the large area of glass size, use when fixture for controlling glass (Glass Keeping), at the handle part of controlling glass, magnet can not be set, so its evaporating quality can be greatly affected in the time that mask is elongated.
Summary of the invention
In order to address the above problem, the object of the invention is to utilize multiple masks of cutting apart to manufacture when mask frame, for preventing the sagging of central portion, central portion at framework forms rib, according to being formed on mother's pattern on glass of manufacturing matchingly with the framework of being cut apart by rib, when the mask hole that makes to cut apart mask is critically neat corresponding thereto, applying tension force welds, thereby the shade phenomenon producing while preventing evaporation organic substance, even if what mask was cut apart in loss is a line unit box left and right, also to stick on framework cutting apart mask, solve thereby provide the quality problems (the mask uniformity) that caused by the length variations of mask, more than high definition QVGA level mobile device AMOLED or TV AMOLED mask frame and manufacture method thereof are provided.
Another object of the present invention is to provide a kind of following mask frame and manufacture method thereof, the method comprises the operation of cutting apart adaptably female glass and forming as one with female glass platform with the framework of being cut apart by rib, wherein, this mother's glass platform is formed with groove at central portion, to when maintaining the degree of alignment pattern, rib is installed.
Another object of the present invention is to provide a kind of following mask frame and manufacture method thereof, the method comprises: when cutting apart mask and be welded to indivedual cutting part of the framework of being cut apart by rib, for solving the dimensional problem as the conventional invar of mask material, by 2 exposures, after carrying out pattern exposure, the effective coverage suitable with the indivedual cutting parts of framework carry out etching, formation has strip pattern mask, stress while opening in order to eliminate, after virtual exposure is carried out in remaining untapped region, carry out etching and form the dummy mask with gas pressure relief slot, , and be welded to after framework, remove the operation of the dummy mask that does not use region.
Other another object of the present invention is to provide a kind of following mask frame and manufacture method thereof, the method is included in when cutting apart mask and be welded to indivedual cutting part of the framework of being cut apart by rib, welded pattern mask and dummy mask are welded to after framework, and the region that do not use that removal is not used in organic matter vaporization plating is the operation of dummy mask.
Another other object of the present invention is to provide a kind of mask frame and manufacture method thereof, the method is included in when cutting apart mask and be welded on the framework of being cut apart by rib, fixture applies tension force and after welding to the two side ends of cutting apart mask to horizontal direction, and removing the region that do not use that is not used in organic matter vaporization plating is the operation of dummy mask.
Another other object of the present invention is to provide a kind of mask frame and manufacture method thereof, the method comprises: when cutting apart mask and be welded on the framework of being cut apart by rib, when fixture applies tension force and welds cutting apart mask two side ends, one side is applied to the tension force in horizontal direction, the vertical direction fixture that possesses low friction roller is to being formed with the central portion of rib and applying tension force and after welding, and removing the region that do not use that is not used in organic matter vaporization plating is the operation of dummy mask.
In order to achieve the above object, the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel of the present invention, it is characterized in that, comprise the following steps: steps A, manufacture framework, this framework is cut apart mask space is set by being formed for preventing the sagging rib of central portion; Step B, forms as one female glass and the female glass fixture that is formed with rib avoidance mouth, and wherein, this mother's glass only has mask pattern in the part except the part suitable with above-mentioned rib; Step C, is positioned at behind said frame bottom the female glass fixture forming as one with female glass, applies tension force and places and itself and the pattern of the female glass that is positioned at bottom are aligned cutting apart mask; And step D, what welding had been alignd cuts apart mask.
As an embodiment of the invention, in above-mentioned steps B, the part of placing except being formed on the rib region on framework at the female glass fixture upper surface that is formed with rib avoidance mouth forms after the figuratum female glass forming by one, utilize adhesive to make itself and female glass fixture upper surface bonding, then, female glass of removing the region suitable with rib avoidance mouth by cutting action forms as one, thereby guarantees the location degree of same female glass.
As an embodiment of the invention, in above-mentioned steps C, the mode that applies tension force is the tensionless mode that applies of extended pattern, the tensionless mode that applies of this extended pattern is the horizontal direction two side ends that the two side ends of cutting apart mask is extended to the framework that is provided with clamper, clamps and cuts apart mask and apply tension force with the clamper of horizontal direction.
As an embodiment of the invention, in above-mentioned steps C, applying tensionless mode is the tensionless mode that applies of non-extended pattern, wherein, the tensionless mode that applies of this non-extended pattern is by extending to by cutting apart mask one side the clamper that is arranged on framework horizontal direction one side, clamper is clamped and cut apart a side of mask and apply tension force, and the clamper that makes to be positioned at vertical direction is clamped in the low friction roller position arranging by the rib of framework and applied tension force to the other end of cutting apart mask of upper direction bending.
As an embodiment of the invention, in above-mentioned steps D, in welding and cutting apart after mask that the pattern of female glass aligns, cut and remove the dummy pattern part of cutting apart mask that does not form mask pattern.
As an embodiment of the invention, the described mask of cutting apart is that a mask forms different patterns by 2 exposures, form the pattern mask with pattern groove in the mask part by 1 exposure, form the dummy mask with gas pressure relief slot in the remaining mask part by 2 exposures, the adjustment of tonicity equilibrium for remove the pressure that produces in the time that mask is applied to tension force of this gas pressure relief slot.
As an embodiment of the invention, the described mask of cutting apart forms as one the pattern mask that is formed with pattern groove by welding with the dummy mask that is formed with gas pressure relief slot, wherein, this dummy mask is used for removing the pressure that produces when mask is applied to tension force and adjustment of tonicity equilibrium.
As an embodiment of the invention, in above-mentioned steps D, mask is cut apart in a side setting in the cut zone of the framework of being cut apart by rib, cut apart mask in the cut zone setting of opposite side framework afterwards, and then the mode of a side region division being cut apart to mask is cut apart mask from the central portion of cutting apart mask toward framework two side direction uniform weldings.
As an embodiment of the invention, above-mentioned rib is to form by the long limit of segmentation framework.
As an embodiment of the invention, above-mentioned rib is to form by the minor face of segmentation framework.
As an embodiment of the invention, above-mentioned gas pressure relief slot is by etching partially or total eclipse carves to form.
As an embodiment of the invention, be formed with the framework for preventing the sagging rib of central portion; Cut apart on each region of cut zone that mask is welded on respectively the framework of being cut apart by rib and form, wherein, above-mentioned rib is to form by the minor face of segmentation framework.
The present invention as above has the following advantages.
Manufacture when mask frame utilizing multiple masks of cutting apart, for the sagging central portion at framework that prevents central portion forms rib, according to being formed on the mother corresponding with the framework of being cut apart by rib pattern on glass, mask groove is exerted pressure and welded with critically aliging of segmentation framework, thereby the shade phenomenon producing while preventing evaporation organic substance, especially in the time of welding, be exactly the unit box that loses a line degree of cutting apart mask, also to cut apart mask and paste on framework, solve the quality problems (the mask uniformity) that cause due to the length of mask, manufacture more than high-resolution QVGA level mobile device AMOLED or TV AMOLED mask frame, have that to realize AMOLED by above the 8th generation FMM of the 4th generation of large scale (Fine Metal Mask) in large size.
And, comprise following operation, that is, cut apart matchingly female glass with the framework of being cut apart by rib, and be formed with to maintain the female glass fixture aliging with the mode of pattern is installed the groove of rib at central portion and form as one.Thus, realize the hole of the formation pattern that makes female glass pattern and mask accurate consistent.
In addition, comprise following operation,, when cutting apart mask and be welded to indivedual cutting part of the framework of being cut apart by rib, by 2 exposures, after the effective coverage exposing patterns suitable with the indivedual cutting parts of framework, carry out etching, formation has band (stripe) pattern mask, pressure while opening in order to eliminate and carry out etching after virtual exposure is carried out in remaining untapped region, thereby form the dummy mask with gas pressure relief slot (etch partially or total eclipse carve), be welded to after framework, remove the dummy mask that does not use region.Thus, solve the conventional invar dimensional problem of mask material.
In addition, comprise following operation, that is, when cutting apart mask and be welded to indivedual cutting part of the framework of being cut apart by rib, after welded pattern mask and dummy mask, then to remove the region that is not used in organic matter vaporization plating be dummy mask.Thus, solve the conventional invar dimensional problem of mask material.
In addition, comprise following operation, that is, when cutting apart mask and be welded to the framework of being cut apart by rib, fixture welds in the time that horizontal direction applies tension force the two side ends of cutting apart mask, and then only removing the region that is not used in organic matter vaporization plating is dummy mask.Thus, solved the dimensional problem of the conventional invar of mask material and prevented the sagging of mask.
In addition, comprise following operation,, when cutting apart mask and be welded to the framework of being cut apart by rib, fixture welds cutting apart when the two side ends of mask applies tension force, one side is applied in the tension force in horizontal direction, and after welding in the vertical direction fixture that possesses low friction roller at the central portion that is formed with rib applies tension force, only removing the region that is not used in organic matter vaporization plating is dummy mask.Thus, solving mask material commonly uses the problem of invar size, prevents that mask is sagging and can weld in the case of not destroying cutting apart mask of original welding.
Solve following problem in the past: the raw-material flatness problem of invar coil in the past; The problem of the flatness of soda-lime glass and thermal coefficient of expansion (approximately 3 × 10-6/ degree (tempered glass)); The length issue of soda-lime glass; Utilize the restricted problem of the homogenizer degree of the photomask exposing by point; The mask quality that the cooling problem that the temperature rise occurring when exposing along with UV causes etc. produces and the uniformity are difficult to overcome its restriction and are difficult to the problem of grasp mask position precision; When elongation mask welds, the power being applied on framework producing because of tension force can cause the problem such as frame deformation and flatness variation; Guarantee the flatness problem of large scale invar and steel; The mask position that the recovery process washing by mask after deposition mask frame assembly and vibrations that produced by the automatic logistics that forms mask frame and trembling form such as changes repeatedly at the problem.The present invention can produce has economy and the high definition mask frame assembly for large scale AMOLED, thereby can manufacture large scale AMOLED panel.Therefore, the present invention is a useful invention, can expect its utilization industrially.
Accompanying drawing explanation
Fig. 1 is the illustration figure that shows the mask frame of an embodiment in the present invention;
Fig. 2 is the illustration figure that shows the mask frame of another embodiment in the present invention;
Fig. 3 is female glass and the fixture thereof while showing the manufacture mask frame of an embodiment in the present invention and the illustration figure of cutting apart the extended pattern tension force of mask;
Fig. 4 shows the illustration figure of cutting apart mask arrangement using in one embodiment of the invention;
Fig. 5 shows the illustration figure that uses segmentation framework structure in another embodiment of the present invention;
Fig. 6 shows the illustration figure that makes the extended pattern tension force of cutting apart mask used in this invention;
Fig. 7 shows the illustration figure that makes the non-extended pattern tension force of cutting apart mask used in this invention;
Fig. 8 shows the illustration figure that welds the order of cutting apart mask in the present invention on the framework that is formed with rib;
Fig. 9 shows the illustration figure that is used in the female glass in the present invention;
Figure 10 shows while female glass being set to female glass fixture in the present invention, the bonding and correct illustration figure of bonding example of mistake;
Figure 11 is the manufacturing procedure picture of female glass in the present invention;
Figure 12 is presented at the illustration figure that manufactures the principle of AMOLED in the organic matter vaporization plating device that utilizes mask frame;
Figure 13 utilized the process chart of cutting apart mask manufacture mask frame in the past;
Figure 14 shows while manufacturing mask frame according to method in the past, makes to cut apart that mask is positioned at the after-applied tension force in female glass top and the illustration figure of the structure of aliging;
Figure 15 is the illustration figure of the principle that shows that the groove that makes the pattern of female glass while manufacturing mask frame in the past and cut apart mask aligns;
Figure 16 shows the illustration figure that connects the large scale mask frame of cutting apart mask by method in the past in the long side weld of framework;
Figure 17 shows the illustration figure at the large scale mask frame of the minor face welding segmentation framework assembly of framework by previous methods.
Description of reference numerals:
1: framework; 2: cut apart mask;
3: fixture; 4: female glass;
5: female glass fixture; 6: low friction roller;
11: rib; 21: pattern mask;
22: dummy mask; 51: rib is avoided mouth.
Embodiment
Below, be elaborated for structure and the effect thereof of the embodiment of the present invention with reference to accompanying drawing.In explanation time of the present invention, illustrating of relevant known function or structure is judged as while unnecessarily affecting of the present invention will putting, omit its detailed description.
Fig. 1 is the illustration figure that shows mask frame in one embodiment of the invention, and Fig. 2 is the illustration figure that shows mask frame in another embodiment of the present invention.As shown in the figure, in the present invention, mask frame is following structure, be formed with across the rib of framework (1) central portion the Region Segmentation of cutting apart mask (2) being welded on framework (1) is become to 2, and the mask of cutting apart is separately welded on framework (1) and rib in the both sides area of space of being cut apart by rib.In addition, on the space face of being cut apart by rib, open and cut apart mask (2) and when welding with fixture (3), there are following two kinds of methods,, as shown in Figure 1, by the long limit of rib segmentation framework (1), on long side direction, open and cut apart mask (2) and carry out welding method; As shown in Figure 2, by the minor face of rib segmentation framework (1), on short side direction, open and cut apart mask (2) and weld.Can weld by demand system of selection.The central portion of sagging or mask frame that can prevent mask central portion as above-mentioned formation is sagging, can guarantee according to the material supply of mask size and the integrality of exposure/etched mask quality, thereby it is in large size to realize AMOLED by above the 8th generation FMM of the 4th generation of large scale.
Fig. 3 shows while manufacturing mask frame in one embodiment of the invention, female glass and female glass fixture and cut apart the illustration figure of the extended pattern tension force of mask.Here, extended pattern refers to that the two side ends of cutting apart mask extends to after the fixture (3) that is arranged on framework horizontal direction two side ends, applied tension force by fixture (3) clamping to cutting apart mask, applying after its tension force, complete with the female glass (4) that is positioned at bottom and align, be then welded on framework cutting apart mask.
There is non-extended pattern tension force to apply state as concept in contrast to this, non-extended pattern refers to that a side of cutting apart mask extends to the fixture (3) that is arranged on framework horizontal direction one side, cut apart a side of mask and apply tension force by fixture (3) clamping, another side of cutting apart mask is clamped by the fixture (3) that is positioned at vertical direction low friction roller (6) position arranging at the rib through framework and is applied tension force to the cutting apart mask of upper direction bending, after aligning with the female glass (4) that is positioned at bottom under its state, the method of cutting apart mask and be welded on framework.Embodiment is by aftermentioned.
As shown in the figure, in one embodiment of the present of invention, mask frame forms rib, cut apart mask and be placed on framework upper to the clamping of two side ends direction to be applied in the state of tension force by fixture (3) from both sides in extended pattern mode, its underpart is formed with female glass (4), this mother's glass (4) is divided into 2 accordingly with the mask of cutting apart that is formed with rib on framework, female glass (4) bottom that is divided into 2 is formed with female glass fixture (5), this mother's glass fixture (5) is formed with rib and avoids mouthful (51), so that the rib being formed on framework can be mounted also supported.Female glass fixture (5) is made up of invar material.
As shown in Figure 3, in embodiment cut apart mask (2) use be not general mask mask, following of cutting apart,, the cut zone of only cutting apart at the rib that is arranged on the central portion that is formed on framework according to the present invention is formed with pattern, the mask part of cutting apart beyond it does not have pattern, so that cut and remove after using.Be elaborated for the mask of cutting apart of the present invention referring to Fig. 4 and Fig. 5.
Fig. 4 shows the illustration figure that uses the structure of cutting apart in an embodiment of the present invention mask, and Fig. 5 shows the illustration figure of cutting apart mask construction using in another embodiment of the present invention.
First, as shown in Figure 4, being used in the mask of cutting apart of the present invention is welded on framework, on the mask surface of certain area that will form mask frame, first carry out 1 exposure and form area of the pattern, pressure when residue is not used region to apply tension force for eliminating by fixture, maintain balancing tension and carry out 2 exposures and etching, masks area 1 exposure forms the pattern mask with pattern groove, 2 times exposed film region forms the dummy mask with gas pressure relief slot, be welded to after framework, it is dummy mask that excision is not used region.That is, a side pattern mask (21) of cutting apart mask is welded on the rib that is formed at framework and framework central portion, and after welding finishes, excision is not welded on the residue dummy mask (22) of the part on rib.At this moment, gas pressure relief slot is by etching partially or total eclipse formation at quarter.
The part that is used as pattern in when exposure here, must form by single exposure.Above-mentioned mode is can guarantee when cutting apart the invar of mask material or SUS material and elongate direction and welding direction long than framework employing, is divided into pattern mask portion and is not the dummy mask portion of drafting department and carry out 2 etchings as above-mentioned.
What Fig. 5 showed is pattern mask (21) and the dummy mask (22) by welding prior formation, mask is cut apart in manufacture, not to cut apart mask at one as illustrated in fig. 4 carry out 2 exposures and form respectively different pattern groove and gas pressure relief slot, but possess at the very start different masks welding and complete one and cut apart mask., the dummy mask (22) of manufacturing respectively the figuratum pattern mask of etching (21) and being formed with gas pressure relief slot afterwards, welds and forms one and cut apart mask.At this moment, gas pressure relief slot is by etching partially or total eclipse carves to form.This mode is to be to adopt during than framework prolonging direction and the long material of welding direction being difficult to obtain as cutting apart the invar of mask material or SUS material.
As shown in above-mentioned Fig. 4 and Fig. 5, the present invention can guarantee that the mass fraction of cutting apart mask is as benchmark in exposure effective coverage, by guaranteeing the uniformity of mask pattern, more than stable supplying QVGA high definition mask framework, thus produce the large-size frame assembly of quality problems that overcome the sagging problem of mask, mask length issue, exposure area problem, and the quality that cause and price problem elongated along with mask length, cause because of thermal expansion etc.Its reason is that the present invention forms rib by segmentation framework, does not need to cut apart the entirety of mask, need on whole mask, not form mask pattern.With pattern mask to whole cut apart mask and expose after, carry out etching and use, but exposure device is difficult to the whole mask of cutting apart of uniform exposure in the past in the case, need more accurate exposure process in order to carry out accurate exposure or use special exposure machine, cutting apart mask manufacture unit price but this can cause improving, is not optimal way.In addition, also can cause the unit price of the unnecessary wasting of resources and etching mask patterns to rise, so preferably only form as in the present invention dummy pattern.
, illustrated the present invention seems that shown when conventional art to cut apart mask the same or little with explanation, but in fact also can be larger than it, so use exposure machine to be in the past difficult to the whole masked area of cutting apart to expose.Allow to expose, in the fine pattern degree of the mask of guaranteeing to form by exposure, there is restriction.
Fig. 6 is the illustration figure of cutting apart mask and apply extended pattern tension force showing using in the present invention, Fig. 7 is the illustration figure of cutting apart mask and apply non-extended pattern tension force showing using in the present invention, as shown in the figure, Fig. 6 is to be that both sides that mask is cut apart in the Horizontal clamp clamping that is recited as X fixture in the present invention apply the general horizontal direction extended pattern tension force welding after tension force and apply mode with fixture, Fig. 7 is that the region to being cut apart by rib applies tension force respectively and the mode of welding, this mode by mask exposure once, mask length does not need so long, frame end one side was as in the past, cut apart a side of mask by fixture clamping, after the opposite side framework that forms rib is made to cut apart mask and is bent upwards by low friction roller (6), the superposed fixture that is recited as in the present invention Y fixture applies the non-extended pattern tension force that tension force welds and applies mode.This non-prolongation tension force applies mode and does not cause the interference between mask of cutting apart of having welded, and can improve the quality of mask frame.By situation, low friction roller (6) can be configured to an equipment or be configured to specific installation with Y fixture.But the formation that specifically arranges of this fixture and low friction roller (6) is not core of the present invention, thereby omit.Only need to possess this device.
Fig. 8 is presented at the illustration figure that welds the order of cutting apart mask on the framework that is formed with rib the present invention relates to.As shown in the figure, the present invention relates to cut apart mask from the central portion of framework to cutting apart individually mask, weld after applying tension force by extended pattern or non-extended pattern mode, then dummy mask unnecessary in mask is cut apart in excision.Its job order is that the side region division in the framework cut zone of being cut apart by rib is cut apart mask, then mask is cut apart in the cut zone setting of opposite side framework, from again cutting apart mask and the framework central portion cut apart balancedly welds the mode of cutting apart mask to framework both sides in a side cut zone setting.The welding sequence of cutting apart mask is first weld (1-1) on drawing and (1-2) avoid the position that frame deformation causes to distort, then welding (2-1) and (2-2) relatively symmetrically, finally proceeds to location and the welding of (N-1), (N mask).The mask frame that welding forms so can not produce bending, has uniform flatness, can not produce shade phenomenon, thereby can produce in a large number high-quality panel while manufacturing AMOLED display floater.
Fig. 9 is used in the present invention, be formed with the illustration figure of female glass alignment pattern, Figure 10 is, even if determine very accurately in the present invention female glass position of being cut apart mutually by female glass fixture, as shown in Figure 10 (A), be difficult to make Yp1 and Yp2, Xp1 and Xp2 and Thetap1 and Thetap2 form as one at institute's allocation, shown in Figure 10 (B), need to make the technology of female glass, thereby can make Yp1 and Yp2, Xp1 and Xp2 and Thetap1 and Thetap2 form as one at institute's allocation, Figure 11 is the production process of the female glass that the present invention relates to.
As shown in the figure, the female glass being applicable in the present invention is not general female glass, to be segmented in the framework that central portion is formed with rib to form figuratum female glass and bond to the female glass on female glass fixture in the part except rib region accordingly, if female glass be not correctly bonded in to female glass fixture and form as one, in the time that cutting apart mask and female glass, alignment cannot accurate align.In order to overcome this problem, a female glass (4) that prints figuratum Figure 11 is placed on the female glass fixture (5) be made up of invar R or iron that is formed with rib avoidance mouthful (51), engage female glass fixture (5) and female glass (4) with encapsulant, form rib with the rib interference part of laser cutting machine or drilling cutting mill excision framework and avoid mouthful (51), to avoid the interference of framework rib (11), form just thus at last female glass fixture that two patterns can not lose positional accuracy yet, female glass fixture (5) is made up of kinds such as invar or the little steel of thermal expansion, thereby make its thermal expansion degree minimum, complete critically female glass fixture of location.
Complete as after above-mentioned work, to cutting apart of the present invention relates to, mask applied extended pattern or non-extended pattern tension force after fixing, confirm to be positioned at female glass pattern of bottom in the words of effective range by the pattern hole of mask with superposed camera (not shown), just utilize superposed welder (not shown) to weld successively, only the pattern part of mask is welded on framework, and dummy pattern part is cut away after welding finishes, produce thus mask frame.
The invention is not restricted to above-mentioned preferred embodiment, in the case of not departing from the main points of the present invention of claim record, belong to those skilled in the art and can carry out various deformation enforcement, and this distortion also belongs in the scope of claim record.
Claims (11)
1. a manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel, is characterized in that, comprises the following steps:
Steps A, manufactures framework, and this framework is cut apart mask space is set by being formed for preventing the sagging rib of central portion;
Step B, forms as one female glass and the female glass fixture that is formed with rib avoidance mouth, and wherein, this mother's glass only has mask pattern in the part except the part suitable with above-mentioned rib;
Step C, is positioned at behind said frame bottom the female glass fixture forming as one with female glass, applies tension force and places and itself and the pattern of the female glass that is positioned at bottom are aligned cutting apart mask; And
Step D, what welding had been alignd cuts apart mask,
In above-mentioned steps B, the part of placing except being formed on the rib region on framework at the female glass fixture upper surface that is formed with rib avoidance mouth forms after the figuratum female glass forming by one, utilize adhesive to make itself and female glass fixture upper surface bonding, then, remove with female glass in rib avoidance mouthful suitable region and form as one by cutting action, thereby guarantee identical female glass location degree.
2. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
In above-mentioned steps C, the mode that applies tension force is the tensionless mode that applies of extended pattern, the tensionless mode that applies of this extended pattern is the clamper that the two side ends of cutting apart mask is extended to the horizontal direction two side ends that is arranged on framework, clamps and cuts apart mask and apply tension force with the clamper of horizontal direction.
3. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
In above-mentioned steps C, applying tensionless mode is the tensionless mode that applies of non-extended pattern, the tensionless mode that applies of this non-extended pattern is by extending to by cutting apart mask one side the clamper that is arranged on framework horizontal direction one side, clamper is clamped and cut apart a side of mask and apply tension force, and the clamper that makes to be positioned at vertical direction is clamped in the low friction roller position arranging by the rib of framework and applied tension force to the other end of cutting apart mask of upper direction bending.
4. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
In above-mentioned steps D, in welding and cutting apart after mask that the pattern of female glass aligns, cut and remove the dummy pattern region of cutting apart mask that does not form mask pattern.
5. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
The described mask of cutting apart is that a mask forms different patterns by 2 exposures, form the pattern mask with pattern groove in the mask part by 1 exposure, form the dummy mask with gas pressure relief slot in the remaining mask part by 2 exposures, the adjustment of tonicity equilibrium for remove the pressure that produces in the time that mask is applied to tension force of this gas pressure relief slot.
6. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
The described mask of cutting apart forms as one by welding the dummy mask that is formed with the pattern mask of pattern groove and be formed with gas pressure relief slot, and wherein, this dummy mask is used for removing the pressure that produces when mask is applied to tension force and adjustment of tonicity equilibrium.
7. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
In above-mentioned steps D, a side region division in the cut zone of the framework of being cut apart by rib is cut apart mask, cut apart mask in the cut zone setting of opposite side framework afterwards, and then the mode of a side region division being cut apart to mask is cut apart mask from the central portion of cutting apart mask toward framework two side direction uniform weldings.
8. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
Above-mentioned rib is to form by the long limit of segmentation framework.
9. the manufacture method of cutting apart mask frame that is used for manufacturing large scale AMOLED multiaspect and gets television panels and mobile device panel as claimed in claim 1, is characterized in that,
Above-mentioned rib is to form by the minor face of segmentation framework.
10. the manufacture method of cutting apart mask frame that being used for as described in claim 5 or 6 manufactured large scale AMOLED multiaspect and got television panels and mobile device panel, is characterized in that,
Above-mentioned gas pressure relief slot is by etching partially or total eclipse carves to form.
11. by the mask frame of cutting apart that is used for manufacturing large scale AMOLED multiaspect and getting television panels and mobile device panel of the method manufacture described in any one in claim 1 to 7, it is characterized in that,
Be formed with the framework for preventing the sagging rib of central portion; Cut apart on each region of cut zone that mask is welded on respectively the framework of being cut apart by rib and form, wherein, above-mentioned rib is to form by the minor face of segmentation framework.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2010-0074928 | 2010-08-03 | ||
| KR1020100074928A KR100989321B1 (en) | 2010-08-03 | 2010-08-03 | Manufacturing method of mask frame assembly divided by stick for manufacturing big size of amoled multi cell tv and mobile panel and mask frame assembly thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102347456A CN102347456A (en) | 2012-02-08 |
| CN102347456B true CN102347456B (en) | 2014-06-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110205061.8A Expired - Fee Related CN102347456B (en) | 2010-08-03 | 2011-07-21 | Divided mask frame assembly and manufacturing method of divided mask frame assembly |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100989321B1 (en) |
| CN (1) | CN102347456B (en) |
| TW (1) | TWI472027B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101295354B1 (en) | 2011-08-19 | 2013-08-12 | (주)한 송 | Mask frame assembly for evaporation and pssivation for manufacturing White OLED panel, manufacturing method and apparatus thereof |
| KR101272299B1 (en) * | 2011-08-25 | 2013-06-07 | (주)한 송 | Apparatus for manufacturing divided mask frame assembly for manufacturing AMOLED panel |
| KR102642345B1 (en) * | 2016-09-06 | 2024-02-29 | 삼성디스플레이 주식회사 | Division mask |
| KR102640219B1 (en) * | 2016-09-12 | 2024-02-23 | 삼성디스플레이 주식회사 | Division mask |
| WO2019045240A1 (en) * | 2017-09-01 | 2019-03-07 | 주식회사 티지오테크 | Method for producing frame-integrated mask |
| KR102371174B1 (en) * | 2018-01-10 | 2022-03-08 | 주식회사 오럼머티리얼 | Supporter and producing system of mask integrated frame comprising the same |
| KR102301332B1 (en) * | 2019-11-14 | 2021-09-14 | 주식회사 오럼머티리얼 | Producing method of template for supporting mask and producing method of mask integrated frame |
| WO2022092846A1 (en) * | 2020-10-30 | 2022-05-05 | 에이피에스홀딩스 주식회사 | Deposition mask stick intermediate |
| CN113059290B (en) * | 2021-02-19 | 2022-12-09 | 福建华佳彩有限公司 | Method for processing mask plate through displacement control |
| KR102633293B1 (en) | 2022-04-26 | 2024-02-05 | 주식회사 한송네오텍 | Manufacturing method of high-resolution large area mask frame assembly using partial pattern divided mask |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040123804A1 (en) * | 2002-09-20 | 2004-07-01 | Semiconductor Energy Laboratory Co., Ltd. | Fabrication system and manufacturing method of light emitting device |
| JP5151004B2 (en) * | 2004-12-09 | 2013-02-27 | 大日本印刷株式会社 | Metal mask unit and manufacturing method thereof |
| KR20080054741A (en) * | 2006-12-13 | 2008-06-19 | 엘지디스플레이 주식회사 | Frame mask assembly for organic light emitting device and method for manufacturing the same |
| KR20100026655A (en) * | 2008-09-01 | 2010-03-10 | 삼성모바일디스플레이주식회사 | Mask for thin film deposition and manufacturing method of oled using the same |
-
2010
- 2010-08-03 KR KR1020100074928A patent/KR100989321B1/en active IP Right Grant
-
2011
- 2011-07-21 CN CN201110205061.8A patent/CN102347456B/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI472027B (en) | 2015-02-01 |
| KR100989321B1 (en) | 2010-10-25 |
| CN102347456A (en) | 2012-02-08 |
| TW201220490A (en) | 2012-05-16 |
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