KR102301332B1 - Producing method of template for supporting mask and producing method of mask integrated frame - Google Patents

Abstract

The present invention relates to a method for manufacturing a mask support template and a method for manufacturing a frame-integrated mask. A method of manufacturing a mask supporting template according to the present invention is a manufacturing method of a mask supporting template corresponding to a frame by supporting a mask for forming an OLED pixel, comprising the steps of: (a) inserting the template into a groove formed in the template supporting portion; (b) adhering a mask metal film on at least one surface of the template and the template support; and (c) forming a mask pattern on the mask metal film, and manufacturing the mask by cutting the edge of the mask metal film to have the same size as the template.

Description

Manufacturing method of mask support template and manufacturing method of frame-integrated mask

The present invention relates to a method for manufacturing a mask support template and a method for manufacturing a frame-integrated mask. More particularly, it relates to a method of manufacturing a mask support template capable of stably supporting and moving a mask without deformation of the mask, and clearly aligning each mask, and a method of manufacturing a frame-integrated mask.

As a technology for forming pixels in the OLED manufacturing process, the FMM (Fine Metal Mask) method is mainly used to deposit an organic material at a desired location by attaching a thin metal mask to the substrate.

In the existing OLED manufacturing process, the mask is manufactured in the form of a stick or plate, and then the mask is welded and fixed to the OLED pixel deposition frame. A plurality of cells corresponding to one display may be provided in one mask. In addition, for large-area OLED manufacturing, multiple masks can be fixed to the OLED pixel deposition frame, and in the process of fixing to the frame, each mask is stretched so that it is flat. Adjusting the tension so that the entire part of the mask is flat is a very difficult task. In particular, in order to align a mask pattern with a size of only a few to several tens of μm while flattening each cell, it is necessary to finely control the tensile force applied to each side of the mask and check the alignment state in real time. do.

Nevertheless, in the process of fixing a plurality of masks to one frame, there is a problem in that the masks are not well aligned with each other and between the mask cells. In addition, in the process of welding and fixing the mask to the frame, since the thickness of the mask film is too thin and large, the mask is sagged or distorted by load There were problems such as misalignment of the alignment.

In the case of ultra-high-definition OLED, the current QHD image quality is 500-600 PPI (pixel per inch), with a pixel size of about 30-50 μm. has a resolution of As such, it is necessary to reduce the alignment error between cells by several μm in consideration of the pixel size of the ultra-high-definition OLED, and an error outside of this may lead to product failure, and thus the yield may be very low. Therefore, there is a need to develop a technology capable of preventing deformation such as sagging or twisting of the mask, and clarifying alignment, and a technology of fixing the mask to a frame.

Accordingly, the present invention has been devised in order to solve the problems of the prior art as described above, and an object of the present invention is to provide a method of manufacturing a mask support template capable of simultaneously attaching and responding to a plurality of mask support templates to a frame. .

In addition, the present invention provides a method of manufacturing a mask support template and a method of manufacturing a frame-integrated mask that can stably support and move the mask without deformation, prevent deformation such as sagging or twisting of the mask, and clarify alignment for that purpose to provide.

Another object of the present invention is to provide a method for manufacturing a frame-integrated mask that significantly reduces manufacturing time and significantly increases yield.

The above object of the present invention is to provide a method for manufacturing a mask support template corresponding to a frame by supporting a mask for forming an OLED pixel, comprising the steps of: (a) inserting the template into a groove formed in the template support; (b) adhering a mask metal film on at least one surface of the template and the template support; and (c) forming a mask pattern on the mask metal film, and manufacturing the mask by cutting the edge of the mask metal film to the same size as the template size.

a step of raising the process temperature between steps (a) and (b), and further comprising lowering the process temperature between steps (b) and (c), or after step (c). can

If the process temperature is increased to bond the mask metal film to the template and then the process temperature is lowered, the template shrinks less than the mask, so that the mask may be subjected to a tensile force in the lateral direction.

After step (c), the step of separating the template and the mask adhered on one surface of the template from the template support may be further included.

The template and the template support may have a lower coefficient of thermal expansion than the mask.

The mask may have a coefficient of thermal expansion of at least one greater than one, and the template may have a coefficient of thermal expansion less than one (greater than zero).

In step (b), a temporary adhesive portion may be formed on the template corresponding to the mask metal layer and one surface of the template support portion.

In step (a), a temporary adhesive portion is formed in the groove of the template support portion so that the other surface of the template may be bonded to the template support portion through the temporary adhesive portion.

The temporary adhesive part may be an adhesive that can be separated by applying heat, or an adhesive that can be separated by UV irradiation.

In step (a), position control for alignment of the template and the template support may be further performed.

After step (a), a planarization process may be performed to match the height of the template and one surface of the template support.

The template support part may include a base plate and an edge plate connected to the edge of one surface of the base plate and having a hollow area, and the hollow area may correspond to a groove of the template support part.

In addition, the above object of the present invention is a method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed, comprising the steps of: (a) inserting a template into a groove formed in a template support portion; (b) adhering a mask metal film on at least one surface of the template and the template support; (c) manufacturing a mask by forming a mask pattern on the mask metal film and cutting the edge of the mask metal film to have the same size as the template; (d) loading a template on a frame having at least one mask cell region so that the mask corresponds to the mask cell region of the frame; and (e) attaching the mask to the frame.

And, the above object of the present invention is a method for manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed, (a) on a frame having at least one mask cell region, the manufacturing method loading the template manufactured by the method to correspond to the mask with the mask cell region of the frame; and (b) attaching the mask to the frame.

According to the present invention configured as described above, there is an effect that a plurality of mask support templates can be simultaneously attached to and correspond to the frame.

In addition, according to the present invention, it is possible to stably support and move the mask without deformation, to prevent deformation such as sagging or twisting of the mask, and to clarify alignment.

In addition, according to the present invention, there is an effect that can significantly reduce the manufacturing time and significantly increase the yield.

1 is a schematic diagram showing a process of attaching a conventional mask to a frame.
2 is a front view and a side cross-sectional view showing a frame-integrated mask according to an embodiment of the present invention.
3 is a schematic plan view and a side cross-sectional view illustrating a mask according to an embodiment of the present invention and a mask support template according to a comparative example.
4 is a schematic diagram illustrating a process of loading a mask support template on a frame according to a comparative example.
5 to 6 are schematic diagrams illustrating a process of manufacturing a mask support template according to an embodiment of the present invention.
7 is a schematic view showing a template support according to another embodiment of the present invention.
8 is a schematic diagram illustrating a process of loading a mask support template onto a frame according to an embodiment of the present invention.
9 is a schematic diagram illustrating a state in which a template is loaded onto a frame and a mask corresponds to a cell region of the frame according to an embodiment of the present invention.
10 is a schematic diagram illustrating a process of separating the mask and the template after attaching the mask to the frame according to an embodiment of the present invention.
11 is a schematic diagram illustrating a state in which a mask is attached to a frame according to an embodiment of the present invention.
12 is a schematic diagram illustrating an OLED pixel deposition apparatus using a frame-integrated mask according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0023] Reference is made to the accompanying drawings, which show by way of illustration specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein with respect to one embodiment may be embodied in other embodiments without departing from the spirit and scope of the invention. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description set forth below is not intended to be taken in a limiting sense, and the scope of the invention, if properly described, is limited only by the appended claims, along with all scope equivalents to those claimed. In the drawings, like reference numerals refer to the same or similar functions in various aspects, and the length, area, thickness, and the like may be exaggerated for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to enable those of ordinary skill in the art to easily practice the present invention.

1 is a schematic diagram illustrating a process of attaching a conventional mask 10 to a frame 20 .

The conventional mask 10 is a stick-type or plate-type, and the stick-type mask 10 of FIG. 1 can be used by welding and fixing both sides of the stick to the OLED pixel deposition frame. A plurality of display cells C are provided in the body of the mask 10 (or the mask film 11 ). One cell C corresponds to one display such as a smart phone. A pixel pattern P is formed in the cell C to correspond to each pixel of the display.

Referring to FIG. 1A , the stick mask 10 is loaded on the frame 20 in the form of a square frame in a flat state by applying tensile forces F1 to F2 in the long axis direction of the stick mask 10 . The cells C1 to C6 of the stick mask 10 are located in the blank area inside the frame 20 of the frame 20 .

Referring to Figure 1 (b), after aligning while finely adjusting the tensile force (F1 ~ F2) applied to each side of the stick mask 10, a part of the side of the stick mask 10 is welded (W) Accordingly, the stick mask 10 and the frame 20 are interconnected. Figure 1 (c) shows a cross-section of the stick mask 10 and the frame interconnected.

Although the tensile force F1 to F2 applied to each side of the stick mask 10 is finely adjusted, there is a problem in that the mask cells C1 to C3 are not well aligned with each other. For example, the distance between the patterns of the cells C1 to C6 is different from each other, or the patterns P are skewed, for example. Since the stick mask 10 has a large area including a plurality of cells C1 to C6 and has a very thin thickness of several tens of μm, it is easily sagged or twisted by a load. In addition, it is very difficult to check the alignment state between the cells C1 to C6 in real time through a microscope while adjusting the tensile force F1 to F2 to flatten all the cells C1 to C6. In order to prevent the mask pattern P having a size of several to several tens of μm from adversely affecting the pixel process of the ultra-high-definition OLED, it is preferable that the alignment error does not exceed 3 μm. This alignment error between adjacent cells is referred to as pixel position accuracy (PPA).

In addition, the alignment state between the plurality of stick masks 10 and between the plurality of cells C to C6 of the stick mask 10 while connecting the plurality of stick masks 10 to one frame 20, respectively. It is also a very difficult task to clarify, and the process time according to alignment is inevitably increased, which is a significant reason for reducing productivity.

On the other hand, after the stick mask 10 is connected and fixed to the frame 20 , the tensile forces F1 to F2 applied to the stick mask 10 may reversely apply the tension to the frame 20 . Such tension may slightly deform the frame 20 , and a problem of misalignment between the plurality of cells C to C6 may occur.

Accordingly, the present invention proposes a frame 200 and a frame-integrated mask that allows the mask 100 to form an integrated structure with the frame 200 . The mask 100 integrally formed with the frame 200 is prevented from being deformed such as sagging or twisting, and can be clearly aligned with the frame 200 .

2 is a front view [FIG. 2 (a)] and a side cross-sectional view [FIG. 2 (b)] showing a frame-integrated mask according to an embodiment of the present invention.

In this specification, the structure of the frame-integrated mask will be briefly described below, but it can be understood that the structure and manufacturing process of the frame-integrated mask are included in the contents of Korean Patent Application No. 2018-0016186 as a whole.

Referring to FIG. 2 , the frame-integrated mask may include a plurality of masks 100 and one frame 200 . In other words, a plurality of masks 100 are attached to the frame 200 one by one. Hereinafter, for convenience of explanation, the mask 100 having a rectangular shape will be described as an example, but the masks 100 may be in the form of a stick mask having protrusions clamped on both sides before being attached to the frame 200 , and the frame 200 . ) after being attached to the protrusion can be removed.

A plurality of mask patterns P may be formed on each mask 100 , and one cell C may be formed on one mask 100 . One mask cell C may correspond to one display such as a smart phone.

The mask 100 may be made of invar, super invar, nickel (Ni), nickel-cobalt (Ni-Co), or the like. The mask 100 may use a metal sheet produced by a rolling process or electroforming.

The frame 200 is formed so that a plurality of masks 100 can be attached thereto. The frame 200 is preferably made of the same material as the mask in consideration of thermal deformation. The frame 200 may include an edge frame portion 210 having a substantially rectangular shape or a rectangular frame shape. The inside of the edge frame part 210 may have a hollow shape.

In addition, the frame 200 may include a plurality of mask cell regions CR, and may include a mask cell sheet unit 220 connected to the edge frame unit 210 . The mask cell sheet unit 220 may include an edge sheet unit 221 and first and second grid sheet units 223 and 225 . The edge sheet portion 221 and the first and second grid sheet portions 223 and 225 refer to partitioned portions of the same sheet, and they are integrally formed with each other.

The thickness of the edge frame part 210 may be formed to a thickness of several mm to several cm thicker than the thickness of the mask cell sheet part 220 . The mask cell sheet part 220 is thinner than the thickness of the edge frame part 210 , but may have a thickness of about 0.1 mm to 1 mm thicker than the mask 100 . The width of the first and second grid sheet parts 223 and 225 may be about 1 to 5 mm.

In the flat sheet, a plurality of mask cell regions CR: CR11 to CR56 may be provided except for regions occupied by the edge sheet part 221 and the first and second grid sheet parts 223 and 225 .

The frame 200 includes a plurality of mask cell regions CR, and each mask 100 may be attached such that one mask cell C corresponds to the mask cell region CR. The mask cell C corresponds to the mask cell region CR of the frame 200 , and a part or all of the dummy may be attached to the frame 200 (mask cell sheet unit 220 ). Accordingly, the mask 100 and the frame 200 can form an integrated structure.

3 is a schematic plan view and a side cross-sectional view showing a mask 100 according to an embodiment of the present invention and a mask support template 50 ′ according to a comparative example.

Referring to FIGS. 3A and 3B , the mask 100 may include a mask cell C on which a plurality of mask patterns P are formed and a dummy DM around the mask cell C. . The mask 100 may be manufactured from a metal sheet produced by a rolling process, electroplating, or the like, and one cell C may be formed in the mask 100 . The dummy DM corresponds to a portion of the mask film 110 (mask metal film 110 ) excluding the cell C, and includes only the mask film 110 or a predetermined dummy having a shape similar to the mask pattern P. The patterned mask layer 110 may be included. A part or all of the dummy DM may be attached to the frame 200 (the mask cell sheet unit 220 ) corresponding to the edge of the mask 100 .

The width of the mask pattern P may be formed to be smaller than 40 μm, and the thickness of the mask 100 may be formed to be about 5 to 20 μm. Since the frame 200 includes a plurality of mask cell regions CR: CR11 to CR56, the mask 100 having mask cells C: C11 to C56 corresponding to each of the mask cell regions CR: CR11 to CR56. ) may also be provided in plurality.

Referring to FIG. 3B , the mask 100 is attached and supported on one surface of the template 50 ′ according to the comparative example and may be moved. A central portion of the template 50 ′ may correspond to the mask cell C of the mask metal layer 110 , and an edge portion may correspond to the dummy DM of the mask metal layer 110 . The size of the template 50 ′ is a flat plate shape having a larger area than that of the mask metal layer 110 so that the mask metal layer 110 can be supported as a whole.

The template 50' passes the laser through the template 50' so that the laser L irradiated from the top of the template 50' can reach the welding part (the area to be welded, WP) of the mask 100. A ball 51' may be formed. The laser passing hole 51 ′ may be formed in the template 50 to correspond to the position and number of the welding parts WP.

A temporary adhesive part 55' may be formed on one surface of the template 50'. The temporary adhesive portion 55 ′ is formed by temporarily adhering the mask 100 (or the mask metal film 110 ) to one surface of the template 50 ′ until the mask 100 is attached to the frame 200 . ') can be supported on the

4 is a schematic diagram illustrating a process of loading a mask support template 50 ′ on a frame 200 according to a comparative example.

Referring to FIG. 4 , the template 50 ′ may be transferred by the vacuum chuck 90 . The mask 100 may be transferred by adsorbing the opposite surface of the template 50 ′ to which the mask 100 is attached with the vacuum chuck 90 .

The mask 100 may correspond to one mask cell region CR of the frame 200 . By loading the template 50 ′ onto the frame 200 (or the mask cell sheet unit 220 ), the mask 100 may correspond to the mask cell region CR.

Subsequently, the mask 100 may be adhered to the frame 200 by laser welding by irradiating the laser L to the mask 100 . A welding bead WB is generated in the welding portion of the laser-welded mask, and the welding bead WB may have the same material as that of the mask 100/frame 200 and may be integrally connected.

One mask 100 corresponds to one mask cell region CR, and the process of adhering the mask 100 to the frame 200 by irradiating the laser L is repeatedly performed to form all the mask cell regions CR. A mask 100 may be adhered to each. However, after the mask 100 is adhered to the frame 200 by welding, a tensile force may be applied to the mask cell sheet 220 around the mask 100 . As a result, the mask cell sheet part 220 is slightly deformed, which may adversely affect alignment when the next mask 100 is to be adhered.

Accordingly, rather than matching/adhering the masks 100 to the mask cell regions CR one by one, it may be desirable to simultaneously correspond and adhere all the masks 100 to all the mask cell regions CR. In order to simultaneously apply the mask 100 to the mask cell region CR, a plurality of templates 50 ′ to which the mask 100 is supported and adhered must be loaded on the frame 200 . However, as shown in FIG. 4 , since the template 50 ′ is formed to have a larger area than the mask 100 , interference occurs due to overlapping regions OR between neighboring templates 50 ′. there was It is difficult to match the plurality of templates 50 ′ side by side on the frame 200 . Since the widths of the first and second grid sheet parts 223 and 225 are only about 1 to 5 mm, the difference between the lengths of one side of the mask 100 and the template 50 ′ is about 0.5 to 2.5 mm, which is 1/2 of the width. should be less than It is very difficult to perform a process of manufacturing the mask 100 having the mask pattern P on the template 50' while satisfying the above dimensional difference.

Accordingly, it is proposed to configure the template 50 having the same area as the mask 100 . However, when the process of forming the mask pattern P on the mask metal film 110 is directly performed on the template 50 having the same area as the mask metal film 110 , the mask pattern P and the template 50 are A problem of misalignment occurs, and a problem of misalignment between the laser passage hole 51 of the template 50 and the dummy DM (or the welded portion WP) of the mask 100 also occurs. In addition, after forming the mask pattern P on the mask metal film 110 , the edge portion is cut to complete the mask 100 as shown in FIG. 3A , and a template having the same area as the mask 100 . Cutting the corner portion at (50) is a difficult problem.

In order to solve this problem, a method of manufacturing the mask 100 on a predetermined substrate and then transferring the mask 100 to the template 50 having the same size as the mask 100 may be considered. However, in the process of transferring the mask 100 , a defect occurs in the mask 100 , creases or deformation occurs in the mask 100 , so that the alignment with the template 50 is misaligned, or the mask 100 and the template 50 . The problem that the defective rate of the product increased due to the intervening of foreign substances occurred again.

Accordingly, the present invention is characterized in that the mask 100 having the same area as the template 50 is manufactured in a state in which the template 50 is inserted into the template support unit 60 . More specifically, according to the present invention, the template 50 is inserted into the template support part 60 , and the mask metal film 110 is adhered on the template support part 60 and the template 50 , and then the mask metal film 110 . A mask 100 having the same size as that of the template 50 is manufactured by forming a mask pattern P on the surface and cutting the edge of the mask metal film 110 .

5 to 6 are schematic views showing a process of manufacturing the mask support template 50 according to an embodiment of the present invention.

Referring to FIG. 5A , the template support unit 60 may be prepared. The template support 60 may be formed with a groove 64 into which a template 50 is inserted. The width and height of the groove 64 may be formed to correspond to the template 50 . It goes without saying that the size and height of the template support 60 should be larger than that of the template 50 so that the template 50 can be accommodated in the groove 64 . In addition, the template support unit 60 may employ the same material as the template 50 and a material having the same coefficient of thermal expansion so that the thermal behavior is similar.

Meanwhile, a temporary adhesive portion 65 may be formed in at least a portion of the groove 64 to be adhesively fixed after the template 50 is inserted. The temporary adhesive part 65 may use the same material as the temporary adhesive part 55 of the template 50 to be described later, and preferably, an adhesive sheet (UV release tape; URT) that can be separated by UV irradiation may be used. . When the URT is used as the temporary adhesive part 65 , since the separation can be performed by irradiating only a specific area with UV, there is an advantage in that it is easy to separate the template 50 from the template support part 60 later.

Next, referring to FIG. 5B , the template 50 may be prepared and inserted into the groove 64 of the template support unit 60 . The template 50 is a medium that can move the mask 100 in a supported state attached to one surface. One surface of the template 50 is preferably flat to support and move the flat mask 100 .

In the template 50 , a laser passing hole 51 may be formed in the template 50 so that the laser L irradiated from the upper portion of the template 50 can reach the welding portion WP of the mask 100 . . The laser passing hole 51 may be formed in the template 50 to correspond to the position and number of the welding parts WP. Since a plurality of welding portions WP are disposed along a predetermined interval in the edge or dummy DM portion of the mask 100 , a plurality of laser passage holes 51 may be formed along predetermined intervals to correspond thereto. For example, since a plurality of welding parts WP are disposed along a predetermined interval on both sides (left/right) dummy DM portions of the mask 100, the laser passing hole 51 also has the template 50 on both sides (left / A plurality may be formed along a predetermined interval on the right side).

The laser passing hole 51 does not necessarily correspond to the position and number of the welding part. For example, welding may be performed by irradiating the laser L to only a part of the laser passing hole 51 . In addition, some of the laser passing holes 51 that do not correspond to the welding part may be used instead of the alignment mark when aligning the mask 100 and the template 50 . If the material of the template 50 is transparent to the laser (L) light, the laser passing hole 51 may not be formed.

Position control for alignment may be performed in the process of inserting the template 50 into the groove 64 of the template support unit 60 . Although the groove 64 and the template 50 may be clearly identical, an alignment process may be necessary if the groove 64 is formed larger than the template 50 . Position control may be performed using a known positioning and positioning means such as a microscope or an aligner.

On the other hand, after inserting the template 50 into the groove 64 of the template support part 60, if the heights of the template 50 and the one surface (upper surface) of the template support part 60 do not match, a predetermined flattening process is performed. can be done The planarization process may refer to a series of processes for matching the heights of the template 50 and the template support part 60 by polishing or the like. Since a processing tolerance may occur between the template 50 and the template support part 60, by matching the heights, the subsequent processes of forming the temporary adhesive part 55 and bonding the mask metal film 110 can be easily performed. .

Next, referring to FIG. 5C , a temporary adhesive part 55 may be formed on one surface of the template 50 and the template support part 60 . The temporary adhesive part 55 is preferably formed on the part of the template 50 and the template support part 60 corresponding to the mask metal layer 110 . Since the mask metal film 110 may have a larger area than the template 50 and smaller than the template support part 60 , the entire surface (upper surface) of the template 50 and a part of one surface (upper surface) of the template support part 60 . A temporary adhesive portion 55 may be formed there. The temporary adhesive part 55 may allow the mask 100 to be temporarily adhered to one surface of the template 50 and supported on the template 50 until the mask 100 is attached to the frame 200 . In addition, the temporary adhesive part 55 forms a mask pattern P on the mask metal layer 110 to form the mask metal layer 110 on one surface of the template 50 and the template support part 60 until the mask 100 is manufactured. It can be adhered to and supported.

The temporary adhesive part 55 may use an adhesive that can be separated by applying heat, or an adhesive that can be separated by UV irradiation.

For example, the temporary adhesive part 55 may use liquid wax. As the liquid wax, the same wax used in the polishing step of the semiconductor wafer and the like may be used, and the type is not particularly limited. The liquid wax is a resin component for controlling adhesion, impact resistance, and the like with respect to holding power, and may include materials such as acrylic, vinyl acetate, nylon, and various polymers and solvents. For example, the temporary adhesive part 55 may use acrylonitrile butadiene rubber (ABR) as a resin component and SKYLIQUID ABR-4016 containing n-propyl alcohol as a solvent component. The liquid wax may form the temporary adhesive portion 55 using spin coating.

The temporary adhesive part 55, which is a liquid wax, has a lower viscosity at a temperature higher than 85 ° C. to 100 ° C., and increases in viscosity at a temperature lower than 85 ° C. and can be partially solidified like a solid. [and the template support portion 60] can be fixedly bonded.

Again, referring to FIG. 5C , the process temperature of the space in which the temporary adhesive part 55 is formed and the process in which the mask metal film 110 is adhered to the template 50 and the template support part 60 is performed is set at room temperature. Raise to a higher temperature (T1). The process temperature T1 may be about 85° C. to 100° C. at which the viscosity of the temporary adhesive portion 55 is lowered.

Next, referring to FIG. 5D , the mask metal layer 110 may be adhered on the template 50 and the template support unit 60 . For example, after heating the liquid wax to 85° C. or higher and bringing the mask metal film 110 into contact with the template 50 and the template support part 60 , the mask metal film 110 , the template 50 , and the template support part 60 . ) can be passed between the rollers to perform adhesion.

According to an embodiment, baking is performed on the template 50 (and the template support part 60) at about 120° C. for 60 seconds to vaporize the solvent in the temporary adhesive part 55, and immediately, the mask metal film ( 110) may proceed with the lamination process. The lamination is performed by loading the mask metal film 110 on the template 50 and the template support part 60 having the temporary adhesive part 55 formed on one surface, and between the upper roll at about 100° C. and the lower roll at about 0° C. This can be done by passing Alternatively, the mask metal film 110 may be loaded on the template 50 and the template support part 60 having the temporary adhesive part 55 formed on one surface, and vacuum lamination may be performed at room temperature or a temperature higher than room temperature. As a result, the mask metal layer 110 may be in contact with the template 50 and the template support part 60 via the temporary adhesive part 55 .

Meanwhile, one surface of the mask metal layer 110 may be planarized. The thickness of the mask metal layer 110 manufactured by the rolling process may be reduced by the planarization process. In addition, a planarization process may be performed on the mask metal film 110 manufactured by the electroplating process to control surface characteristics and thickness. Accordingly, as the thickness of the mask metal layer 110 is reduced, the thickness of the mask metal layer 110 may be about 5 μm to 20 μm. Of course, the mask metal layer 110 having a reduced thickness may be loaded on the template 50 and the template support unit 60 .

Next, referring to FIG. 6E , a patterned insulating portion 25 may be formed on the mask metal layer 110 . The insulating part 25 may be formed of a photoresist material using a printing method or the like.

Subsequently, the mask metal layer 110 may be etched. Methods such as dry etching and wet etching may be used without limitation, and as a result of the etching, a portion of the mask metal layer 110 exposed to the empty space 26 between the insulating portions 25 may be etched. The etched portion of the mask metal layer 110 constitutes the mask pattern P, and the mask 100 in which the plurality of mask patterns P are formed may be manufactured.

Simultaneously with the etching of the mask pattern P, the edge of the mask metal layer 110 may also be etched (EC). When an empty portion of the insulating portion 25 is formed to correspond to the shape of the template 50 and the portion of the mask metal layer 110 exposed to the empty space is etched (EC), the mask metal is identical to the size of the template 50 . The edge portion 111 of the film 110 may be cut. Subsequently, a process of removing the insulating part 25 may be further performed.

Next, referring to FIG. 6(f) , the template 50 and the mask 100 may be debonded from the template support unit 60 . The separation can be performed through at least one of heat application, chemical treatment, ultrasonic application, and UV application (UV) to the temporary adhesive part 65, but UV is applied to the URT temporary adhesive part 65 to facilitate separation of only a specific area. A method to investigate is preferred.

Next, referring to FIG. 6 (g), the process temperature of the template 50 supporting the mask 100 is set to room temperature, or the temperature T2 at which the viscosity of the temporary adhesive part 55 increases and it can be partially solidified like a solid. ) can be lowered. Then, the mask 100 may be adhered to the template 50 in a taut state under the action of the tensile force IT in the lateral direction, and the manufacture of the template 50 supporting the mask 100 may be completed. . The principle that the mask 100 receives the tensile force IT in the lateral direction will be described in detail later with reference to FIGS. 9 and 10 .

Since the frame 200 includes a plurality of mask cell regions CR: CR11 to CR56, the mask 100 having mask cells C: C11 to C56 corresponding to each of the mask cell regions CR: CR11 to CR56. ) may also be provided in plurality. In addition, a plurality of templates 50 supporting each of the plurality of masks 100 may be provided.

7 is a schematic diagram showing a template support 60' according to another embodiment of the present invention.

Referring to FIG. 7 , the template support unit 60 ′ according to another embodiment may include a base plate 61 ′ and an edge plate 62 ′ that are separate components. The base plate 61 ′ may have a flat plate shape, and the edge plate 62 ′ may have a rectangular ring shape having a hollow region 66 . A frame plate 62' is adhered to the base plate 61' with a predetermined adhesive portion 67 interposed therebetween, and the hollow region 66 of the frame plate 62' constitutes a groove of the template support unit 60'. can The adhesive part 67 may correspond to the adhesive or the temporary adhesive part 55 .

In particular, the frame plate 62 ′ and the template 50 may be manufactured using the same original plate. When the frame plate 62' and the template 50 are manufactured using the same original plate, the thickness and material are the same, and processing tolerances according to height do not occur. Accordingly, there is an advantage in that the flattening process for matching the heights of the template 50 and the template support part 60 as described above in step (b) of FIG. 5 can be omitted. In addition, as the frame plate 62' is separated from the base plate 61', the template 50 on which the mask 100 is supported is protrudingly disposed on the base plate 61', so that the template 50 is placed on the base plate. This has the advantage of being easier to separate from the plate 61'.

8 is a schematic diagram illustrating a process of loading a mask support template onto a frame according to an embodiment of the present invention.

Referring to FIG. 8 , the template 50 may be transferred by the vacuum chuck 90 . The mask 100 may be transferred by adsorbing the opposite surface of the template 50 to which the mask 100 is attached with the vacuum chuck 90 . The vacuum chuck 90 may be connected to a moving means (not shown) that moves along the x, y, z, and θ axes. In addition, the vacuum chuck 90 may be connected to a flip means (not shown) capable of flipping the template 50 by adsorbing it. As shown in (b) of FIG. 8 , in the process of transferring the template 50 onto the frame 200 after the vacuum chuck 90 adsorbs the template 50 and flips it, the mask 100 Adhesion and alignment are not affected.

9 is a schematic diagram illustrating a state in which a template is loaded onto a frame and a mask corresponds to a cell region of the frame according to an embodiment of the present invention.

Referring to FIG. 9 , the mask 100 may correspond to one mask cell region CR of the frame 200 . By loading the template 50 on the frame 200 (or the mask cell sheet unit 220 ), the mask 100 may correspond to the mask cell region CR. While controlling the position of the template 50/vacuum chuck 90, it is possible to check whether the mask 100 corresponds to the mask cell region CR through a microscope. Since the template 50 compresses the mask 100 , the mask 100 and the frame 200 may be in close contact.

Sequentially or simultaneously, a plurality of templates 50 may be loaded onto the frame 200 (or the mask cell sheet unit 220 ) so that each mask 100 corresponds to each mask cell region CR. have. Since the template 50 and the mask 100 have the same size, the template 50 corresponding to the specific mask cell region CR11 and the template 50 corresponding to the neighboring mask cell regions CR12 and CR21 are the same. may form a predetermined interval without interfering/overlapping each other. The predetermined interval may be less than 1/2 of the width of the first and second grid sheet parts 223 and 225 .

Meanwhile, the lower support 70 may be further disposed under the frame 200 . The lower support 70 may press the opposite surface of the mask cell region CR to which the mask 100 contacts. At the same time, since the lower support 70 and the template 50 press the edge and the frame 200 (or the mask cell sheet part 220 ) of the mask 100 in opposite directions, the mask 100 is The alignment state can be maintained without being disturbed.

Then, the mask 100 may be attached to the frame 200 by irradiating the laser L to the mask 100 by laser welding. A welding bead WB is generated in the welding portion of the laser-welded mask, and the welding bead WB may have the same material as that of the mask 100/frame 200 and may be integrally connected.

Selection of materials according to thermal expansion coefficients of the template 50 and the mask 100 and thermal behavior after the mask 100 is attached to the frame 200 will be further described below.

As in the prior art, when the thermal expansion coefficient of the template 50' made of glass or the like is higher than the mask 100 (or the mask metal layer 110) made of Invar or the like, the following problem may occur. Conventionally, glass, borosilicate glass, or the like is used as a material of the template 50'. ^{In particular, BOROFLOAT ®} 33, a borosilicate glass, has a thermal expansion coefficient of about 3.3 X 10 ^-6 /℃ and an invar mask metal film 110 with a thermal expansion coefficient of 1.5~3 X 10 ^{-6 /℃ and a thermal expansion coefficient.} Since the difference is small, the mask metal layer 110 has been widely used due to the ease of control.

Since the coefficient of thermal expansion of the template 50' is higher than that of the mask 100, when the temperature is raised and the mask 100 is attached to the template 50' and then the temperature is lowered again, the mask 100 changes in temperature. On the other hand, the template 50' is contracted to a relatively large degree, while contracting only a relatively small degree. At the same time, since the template 50 ′ and the mask 100 are in a well-adhesive state with the temporary adhesive part 55 interposed therebetween, the mask 100 is subjected to a force to be contracted more than the original shrinkage level. The force to be further contracted is generated because the degree to which the template 50' is contracted is greater than the degree to which the mask 100 is contracted. Accordingly, the mask 100 is adhered to the template 50' in a state where a compressive force is applied in the lateral direction (inside of the mask 100).

As described above, the template 50 ′, in which the mask 100 is subjected to compressive force in the lateral direction, is loaded into the frame 200 to match the mask 100 to the mask cell region CR, and welding is performed to the frame. A mask 100 is attached to 200 (see FIG. 4 ). Then, the template 50 ′ is separated from the mask 100 . However, as the template 50 ′ is separated from the mask 100 and the compressive force acting on the mask 100 is released, the alignment of the mask 100 may be disturbed. In other words, due to the compressive force acting on the mask 100, both sides of the mask 100 cannot be attached to the frame 200 while being taut in the outward direction, and the problem of being attached to the frame 200 in a wrinkled or sagging state. can occur This leads to product failure due to an alignment error of the mask 100 , a PPA error between cells C, and the like.

Accordingly, the template 50 of the present invention is characterized in that the coefficient of thermal expansion is lower than that of the mask 100 (or the mask metal film 110 ). In addition, the template support unit 60 may also have a lower coefficient of thermal expansion than the mask 100 . As shown in (c) and (d) of FIG. 5 , the process temperature may be increased to a temperature T1 higher than room temperature, and the mask metal layer 110 may be adhered to the template 50 and the template support unit 60 . And, after the mask 100 is manufactured on the template 50, the process temperature may be lowered to a temperature T2 where the viscosity of the temporary adhesive part 55 increases and it may be partially solidified like a solid.

The mask metal layer 110 (or the mask 100 ) may be made of a material having a thermal expansion coefficient of at least greater than 1, such as Invar, Super Invar, Nickel, or Nickel-Cobalt. On the other hand, the template 50 (and the template support 60 ) may have a coefficient of thermal expansion less than 1 (greater than 0). Preferably, the template 50 (and the template support 60) made of a quartz material having a coefficient of thermal expansion of 0.55 may be used, but is not limited thereto.

Since the coefficient of thermal expansion of the template 50 is lower than that of the mask 100 , when the temperature T2 is lowered as shown in FIG. shrink to a small extent. Although the mask 100 can be contracted relatively large, it cannot be contracted because it is well adhered and fixed on the template 50 through the temporary adhesive part 55, and thus is subjected to an internal force IT to be contracted. In other words, the mask 100 may be adhered to the template 50 in a taut state by applying a tensile force IT in the lateral direction.

In this state, the template 50 is loaded onto the frame 200 to correspond to the mask 100 , and the mask 100 can be attached to the frame 200 by performing welding to form the weld bead WB. .

10 is a schematic diagram illustrating a process of separating the mask and the template after attaching the mask to the frame according to an embodiment of the present invention.

Referring to FIG. 10 , after the mask 100 is attached to the frame 200 , the mask 100 and the template 50 may be debonded. Separation of the mask 100 and the template 50 may be performed through at least one of heat application (ET), chemical treatment (CM), ultrasonic application (US), and UV application (UV) to the temporary adhesive part 55 . have. Since the mask 100 remains attached to the frame 200 , only the template 50 can be lifted. For example, when heat of a temperature higher than 85° C. to 100° C. is applied (ET), the viscosity of the temporary adhesive part 55 is lowered, and the adhesive force between the mask 100 and the template 50 is weakened, so that the mask 100 ) and the template 50 may be separated. As another example, the mask 100 and the template 50 may be separated by dissolving or removing the temporary adhesive part 55 by immersing (CM) the temporary adhesive part 55 in a chemical substance such as IPA, acetone, or ethanol. have. As another example, when ultrasound is applied (US) or UV is applied (UV), the adhesive force between the mask 100 and the template 50 is weakened, so that the mask 100 and the template 50 may be separated.

At the same time as the template 50 is separated from the mask 100 , the tensile force IT acting on the mask 100 is released and may be converted into a tension TS that tightens both sides of the mask 100 . In other words, the mask 100 is pulled to a length longer than the length it will have at the original lowering temperature T2 and is attached to the template 50, and in this state, it is welded to the frame 200, so it is in a pulled state [self A state in which the tension TS is applied to the mask cell sheet part 220] may be maintained. Therefore, since the mask 100 is attached while being pulled taut on the frame 200, wrinkles, deformation, and the like do not occur. Accordingly, there is an effect in reducing the alignment error of the mask 100 and the PPA error between the cells (C).

11 is a schematic diagram illustrating a state in which the mask 100 is attached to the frame 200 according to an embodiment of the present invention. 11 shows a state in which all the masks 100 are attached to the cell region CR of the frame 200 . After attaching the masks 100 one by one, the templates 50 may be separated, but after all the masks 100 are attached, all the templates 50 may be separated.

Since the conventional mask 10 of FIG. 1 includes six cells (C1 to C6), it has a long length, whereas the mask 100 of the present invention has a short length including one cell (C). The degree of distortion of pixel position accuracy (PPA) may be reduced. In addition, in the present invention, since it is only necessary to match one cell (C) of the mask 100 and check the alignment state, the conventional method in which a plurality of cells (C: C1 to C6) are simultaneously matched and the alignment state is checked Compared to the method of [see FIG. 1], it is possible to significantly reduce the manufacturing time.

When the template 50 and the masks 100 are separated after all of the masks 100 are attached on the corresponding mask cell region CR, the tension TS at which the plurality of masks 100 contract in opposite directions to each other. ) is applied, the force is canceled and deformation does not occur in the mask cell sheet part 220 . For example, the first grid sheet part 223 between the mask 100 attached to the CR11 cell area and the mask 100 attached to the CR12 cell area moves to the right of the mask 100 attached to the CR11 cell area. The applied tension TS and the tension TS acting in the left direction of the mask 100 attached to the CR12 cell region may be offset. Thus, the frame 200 (or the mask cell sheet portion 220 ) due to the tension TS is deformed to be minimized, so that the alignment error of the mask 100 (or the mask pattern P) can be minimized. There is this.

12 is a schematic diagram illustrating an OLED pixel deposition apparatus 1000 using the frame-integrated masks 100 and 200 according to an embodiment of the present invention.

Referring to FIG. 12 , the OLED pixel deposition apparatus 1000 includes a magnet plate 300 in which a magnet 310 is accommodated and a coolant line 350 is disposed, and an organic material source 600 from a lower portion of the magnet plate 300 . ) and a deposition source supply unit 500 for supplying the .

A target substrate 900 such as glass on which the organic source 600 is deposited may be interposed between the magnet plate 300 and the source deposition unit 500 . The frame-integrated masks 100 and 200 [or FMMs] that allow the organic material source 600 to be deposited for each pixel may be disposed in close contact with or very close to each other on the target substrate 900 . The magnet 310 may generate a magnetic field and may be in close contact with the target substrate 900 by the magnetic field.

The deposition source supply unit 500 may supply the organic material source 600 while reciprocating left and right paths, and the organic material sources 600 supplied from the deposition source supply unit 500 may include patterns P formed on the frame-integrated masks 100 and 200 . ) and may be deposited on one side of the target substrate 900 . The deposited organic material source 600 passing through the pattern P of the frame-integrated masks 100 and 200 may act as the pixel 700 of the OLED.

In order to prevent non-uniform deposition of the pixel 700 due to the shadow effect, the pattern of the frame-integrated masks 100 and 200 may be inclined (S) (or formed in a tapered shape (S)). . Since the organic material sources 600 passing through the pattern diagonally along the inclined surface may also contribute to the formation of the pixel 700 , the pixel 700 may be deposited to have a uniform thickness as a whole.

Although the present invention has been illustrated and described with reference to preferred embodiments as described above, it is not limited to the above-described embodiments and is not limited to the above-described embodiments, and various methods can be obtained by those of ordinary skill in the art to which the present invention pertains within the scope of the present invention. Transformation and change are possible. Such modifications and variations are intended to fall within the scope of the present invention and the appended claims.

50: template
51: laser passing hole
55, 65: temporary adhesive
60, 60' : template support
100: mask
110: mask film, mask metal film
200: frame
210: border frame portion
220: mask cell sheet portion
221: border sheet portion
223: first grid sheet portion
225: second grid sheet portion
C: cell, mask cell
CR: mask cell area
DM: dummy, mask dummy
L: laser
P: mask pattern
WB: Weld Bead

Claims (14)

A method of manufacturing a mask support template corresponding to a frame by supporting a mask for forming an OLED pixel, the method comprising:
(a) inserting the template into the groove formed in the template support;
(b) adhering a mask metal film on at least one surface of the template and the template support; and
(c) manufacturing a mask by forming a mask pattern on the mask metal film and cutting the edge of the mask metal film to the same size as the template
including,
In step (a), a temporary adhesive portion is formed in at least a portion of the groove of the template support portion to adhesively fix the inserted template,
(c) after step, weakening the adhesive force of the temporary adhesive formed in the groove of the template support to separate the template from the template support, a method of manufacturing a mask support template. According to claim 1,
elevating the process temperature between steps (a) and (b);
The method of claim 1, further comprising lowering the process temperature between steps (b) and (c) or after step (c). 3. The method of claim 2,
A method of manufacturing a mask support template, wherein when the process temperature is increased to adhere the mask metal film to the template and then the process temperature is lowered, the template shrinks less than the mask and the mask is subjected to tensile force in the lateral direction. According to claim 1,
After step (c), as the template is separated from the template support, the mask adhered on one surface of the template is also separated from the template support. According to claim 1,
A method of manufacturing a mask supporting template, wherein the template and the template supporting portion have a lower coefficient of thermal expansion than the mask. 6. The method of claim 5,
wherein the mask has a coefficient of thermal expansion of at least one greater than one, and the template has a coefficient of thermal expansion of less than one (greater than zero). According to claim 1,
In step (b), a temporary adhesive portion is formed on one surface of the template and the template support portion corresponding to the mask metal film, the manufacturing method of the mask support template. According to claim 1,
In step (a), a temporary adhesive portion is formed in the groove of the template support portion and the other surface of the template is bonded to the template support portion through the temporary adhesive portion, the method of manufacturing a mask support template. 9. The method of claim 7 or 8,
The temporary adhesive part is an adhesive that can be separated by applying heat, an adhesive that can be separated by UV irradiation, a method of manufacturing a mask support template. According to claim 1,
In step (a), a method of manufacturing a mask support template, further performing position control for alignment of the template and the template support. According to claim 1,
After step (a), a planarization process is performed to match the height of the template and one surface of the template support part, the manufacturing method of the mask support template. According to claim 1,
A method of manufacturing a mask support template, wherein the template support includes a base plate and a border plate connected to the edge of one surface of the base plate and having a hollow region, wherein the hollow region corresponds to a groove of the template support. A method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed, the method comprising:
(a) inserting the template into the groove formed in the template support;
(b) adhering a mask metal film on at least one surface of the template and the template support;
(c) manufacturing a mask by forming a mask pattern on the mask metal film and cutting the edge of the mask metal film to have the same size as the template;
(d) loading a template on a frame having at least one mask cell region so that the mask corresponds to the mask cell region of the frame; and
(e) attaching the mask to the frame;
including,
In step (a), a temporary adhesive portion is formed in at least a portion of the groove of the template support portion to adhesively fix the inserted template,
(c) after step, weakening the adhesive force of the temporary adhesive formed in the groove of the template support to separate the template from the template support, a method of manufacturing a frame-integrated mask. A method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed, the method comprising:
(a) loading a template manufactured by the manufacturing method of claim 1 on a frame having at least one mask cell region so that a mask corresponds to the mask cell region of the frame; and
(b) attaching the mask to the frame;
Including, a method of manufacturing a frame-integrated mask.

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