CN102903730B - Organic deposit and encapsulation mask frame, its manufacture method and equipment - Google Patents
Organic deposit and encapsulation mask frame, its manufacture method and equipment Download PDFInfo
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- CN102903730B CN102903730B CN201210295635.XA CN201210295635A CN102903730B CN 102903730 B CN102903730 B CN 102903730B CN 201210295635 A CN201210295635 A CN 201210295635A CN 102903730 B CN102903730 B CN 102903730B
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000005538 encapsulation Methods 0.000 title claims abstract description 13
- 230000000873 masking effect Effects 0.000 claims abstract description 94
- 239000011521 glass Substances 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 8
- 238000003466 welding Methods 0.000 claims description 33
- 239000000203 mixture Substances 0.000 claims description 13
- 229910000679 solder Inorganic materials 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 229920001621 AMOLED Polymers 0.000 description 15
- 238000010586 diagram Methods 0.000 description 14
- 238000005516 engineering process Methods 0.000 description 8
- 230000008901 benefit Effects 0.000 description 6
- 230000011218 segmentation Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 206010057071 Rectal tenesmus Diseases 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 208000012271 tenesmus Diseases 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present invention relates to organic deposit and encapsulation mask frame in order to make white light OLED panel that white light OLED tv mechanism is made in technique, its manufacture method and making apparatus.The making apparatus of the organic deposit and encapsulation mask frame in order to make white light OLED panel of the present invention, it is made up of the aligned in position camera apparatus of framework and mask supply arrangement, framework charging appliance, glass basis supply and charging appliance, mask supply arrangement, mask and glass basis, mask is welded in framework equipment, it is characterized in that, including: opposite a pair framework minor face (Y-axis) mobile model fixture, hold the two ends of masking tape, it is possible to move along framework short side direction when applying tension force；The long limit of opposite a pair framework (X-axis) mobile model fixture, holds the two ends of masking tape, it is possible to move along framework long side direction when applying tension force.
Description
Technical field
A kind of white light OLED tv mechanism that relates to of the present invention is made in technique to make organic deposit and the encapsulation mask frame of white light OLED panel, its manufacture method and making apparatus, more particularly to one in order to more than forth generation that the white light OLED got most of the attention together with active matrix organic light-emitting diode (AMOLED) panel (AMOLED) is maximized to, and utilize the mask frame of multiple metal bar mask manufacture, with its manufacture method and making apparatus.
Background technology
The response speed of OLED (Organic Light Emitting Diode) is faster compared to Thin Film Transistor-LCD (TFTLCD).Additionally, can be luminous because of self, it is not necessary to backlight, therefore thickness and weight can reduce 1/3rd, are the secondary display from generation to generation having wide viewing angle with low power consumption structure.
Such OLED is divided into AM mode (actively) and PM mode (passively).Passive matrix organic light emitting diode (AMOLED) panel (PMOLED) is compared to active matrix organic light-emitting diode (AMOLED) panel (AMOLED), low production cost, but is restricted in power consumption, life-span, resolution.AMOLED uses TFT and electric capacity in each pixel, on power consumption, life-span, resolution side all very outstanding, therefore have ignored the shortcoming that the production cost caused because TFT makes is high, in every field, be subject to exploitation widely at present attempt with volume production in rapid succession.The great advantage of AMOLED is in that its competitiveness in image quality.Compared to the LCD of maximum contention opponent, its recall factor checked colors has exceeded 30%, even outstanding 20 times more than of contrast.The image image retention effects of LCD disadvantage also has no way of looking in AMOLED.This is because, in contrast to LCD, backlight is by liquid crystal, chromatic filter etc. by indirect light source, shows for complicated picture, and AMOLED directly reproduces self-colored picture by organic substance self is luminous.Additionally, OLED is compared to LCD, its structure is very simple, therefore also highly beneficial in parts side.
But, when checking OLED material original cost, drive circuit, driving IC price, the devaluation ratio of OLED arrives greatly unexpectedly, account for the half of totle drilling cost.This is because OLED not yet universalness between consumer, cause being difficult to play the effect being reduced production cost by large-scale production.
Because this realistic problem, white light OLED technology becomes Display Technique emerging recently.White light OLED is briefly described and is exactly, the technology that the advantage of the advantage of LCD Yu AMOLED panel is merged.
That is, the R/G/B primary color filters of display color is placed white light OLED and the TFT with handoff functionality, the white light OLED of self luminescence switches to TFT to show the Display Technique of R/G/B primary colors color filter.
If can realize maximizing by this white light OLED panel, it is provided that the popular high-quality display floater that the volume production yield of LCD rank is suitable with AMOLED.
But, current truth is, but without the technology of the white light OLED panel providing more than more than 40 inches or eighth generation can producing popular universal LCD or PDP rank now in a large number, therefore the display floater of universal high-quality is remote truth.
It is strictly and can possess large-sized coil and realize individual mode, but the reason that the mask being difficult with individual formation realizes maximizing is, the size of the raw-material coil supply of mask, it does not have produce with the size dimension maximizing required.That is, because profitability problem, coil production business will not remove to produce the coil of size needed for white light OLED display manufacturer.
In addition, in order to make the white light OLED panel of more than forth generation in a large number, if having fine, the manufacturing technology of the white light OLED mask frame that simultaneously can also deposit white light OLED is laid the groundwork, yield problem just can be overcome to realize volume production, but the manufacturing technology of most mask frame or equipment are provided to LCD or the purposes of AMOLED panel making, being therefore difficult to directly application is white light OLED mask frame.
Concrete reason is those that have previously been in forming the LCD maximized or developing the manufacture method of AMOLED mask frame or the making apparatus of maximization technology, such as FMMTypeOLED, in order to make R/G/B Organic substance precipitate, utilize the metal mask (FineMetalMASK) of the intensive groove defining correspondence in each pixel, utilize open mask Metal is deposited and encapsulates.But white light OLED is different, for corresponding R/G/B color, employ the colour filter used in LCD processing technology, therefore in White organic deposition with metal deposit and packaging technology, all make use of open mask.Therefore, there is no need to applied metal mask, open mask be produced on inside individual to take multiaspect when making, can because the restricted and very difficult application of MaskCoilSize.
Additionally, as shown in figure 11, inside individual, take the conventional mode that multiaspect makes, be difficult to make mask when not tenesmus, maintain tension force, critically dispose, therefore, it is difficult to produce large-area white light OLED mask frame.
That is, if mask does not have tension force, because the accurate not central authorities causing mask in position occur sagging, shade (Shadow) and deposition position can be had impact, therefore the white light OLED panel of fine cannot be provided, the problem that yield reduces occurs.
Summary of the invention
(solving the technical problem that)
In order to solve problem described above, it is an object of the invention to provide a kind of mask frame and preparation method thereof and making apparatus, in order to make the white light OLED panel of more than forth generation obtain volume production, it is moved and positioned into mask rod groove is divided into the position that can hold required big picture frame area.In order to not make the middle body generation tenesmus etc. of mask during segmentation, to the manufacture method welded after its applying tension force and making apparatus, make mask frame with it.
(solving the equipment of problem)
In order to reach object indicated above and remove conventional shortcoming, it is an object of the invention to provide white light OLED tv mechanism and make in technique, the manufacture method of organic deposit and encapsulation mask frame in order to make white light OLED panel, it is characterised in that including:
(A) in order to determine the attachment position of masking tape, and the stage of glass basis location is carried out；
(B) in order to be fixed by solder mask band, and the stage of framework loading is carried out；
(C) two ends of masking tape are carried out at framework minor face mobile model fixture or framework long limit mobile model fixture the stage held；
(D), after the framework minor face mobile model fixture at two ends being moved to pad along framework short side direction or framework long limit mobile model fixture along framework long side direction, the masking tape display part that applying tension force is formed on glass basis carries out the stage alignd；
(E) in order to prevent from maintaining the bending of the masking tape alignd with glass basis display part, the θ angular adjustment motor possessed on framework minor face mobile model fixture or long limit mobile model fixture is utilized to regulate the stage of θ angle；
(F) position will be determined and regulated the stage that the two ends of masking tape of θ angle are welded on framework；
(G) with the masking tape quantity to be arranged on the minor face of framework or long limit, the stage to (F) stage in (C) stage is repeated.
The present invention is as the presently preferred embodiments, by described (F) or (G) in the stage, after having determined that the masking tape of position and adjusted complete θ angle utilizes framework long limit mobile model fixture to be welded on framework by its two ends, on framework minor face, welding was constituted with the stage of the masking tape cross part arranged.
As the presently preferred embodiments, described welding sequence first can connect masking tape in the long side weld of framework again to the present invention after framework minor face solder mask band.
The present invention as the presently preferred embodiments, can weld with the direction from inboard to outside by the welding sequence on the minor face of described framework and long limit.
The present invention as the presently preferred embodiments, in described multiple masking tape with the welding of framework short side direction, also weld by the masking tape of both sides and long margin frame frame comprehensive engagement；
In described multiple masking tape with the welding of framework long side direction, the masking tape of both sides and minor face framework comprehensive engagement are also welded.
The present invention is with another embodiment, white light OLED tv mechanism is provided to make in technique, the making apparatus of organic deposit and encapsulation mask frame in order to make white light OLED panel, described white light OLED panel making mask frame making apparatus is made up of the aligned in position camera apparatus of framework supply arrangement, framework charging appliance, glass basis supply and charging appliance, mask supply arrangement, mask and glass basis, equipment that mask is welded in framework, it is characterized in that, including:
Opposed a pair framework minor face mobile model fixture, holds the two ends of masking tape, it is possible to move along framework short side direction when applying tension force；
Opposed a pair framework long limit mobile model fixture, holds the two ends of masking tape, it is possible to move along framework long side direction when applying tension force.
As the presently preferred embodiments, the composition of described framework minor face mobile model fixture and framework long limit mobile model fixture more includes the present invention: θ angular adjustment motor, regulates the masking tape θ angle being transplanted on；θ axle regulates buffer device, supports in opposite side direction and holds cylinder and cylinder part, wherein said holding cylinder by with the rotation because of described θ angular adjustment motor and the bar that advances contacts and rotate.
As the presently preferred embodiments, described framework minor face mobile model fixture and framework long limit mobile model fixture are installed on linear servo-actuator and carry out accurate reciprocating motion the present invention.
The present invention is with another embodiment, white light OLED tv mechanism is provided to make in technique, in order to make organic deposit and the encapsulation mask frame of white light OLED panel, it is characterised in that, including: made by described mask frame manufacture method, form peripheral framework；
More than one first masking tape, carries out welding in the longer side and a shorter side of described framework and arranges across inner space；
Second masking tape, longer side and a shorter side comprehensive engagement with described framework is also welded；
Multiple white light OLED deposition grooves, by the masking tape of welding on the minor face of described framework or long limit, are formed at inner space.
(effect of invention)
The present invention as above has, in order to make the white light OLED panel of the above large area of forth generation, it is provided that the advantage of organic deposit and encapsulation mask frame；
Additionally, after utilizing the long limit of each pair framework total of four fixture opposed with on short side direction to hold the masking tape of supply, by the advantage of masking tape precision positioning on the position wanted；
Furthermore, it is possible to when applying tension force in masking tape and position, regulate θ angle and place bending and tenesmus, thus make the white light OLED panel of fine, prevent the useful invention of the advantage of shade phenomenon etc., its utilization industrially enjoys expectation.
Accompanying drawing explanation
Fig. 1 indicates that the floor map of the white light OLED mask frame of the use masking tape slot segmentation according to one embodiment of the invention.
Fig. 2 indicates that the floor map of the white light OLED mask frame of use masking tape slot segmentation according to another embodiment of the present invention.
Fig. 3 indicates that according to the schematic flow sheet of solder mask in the framework utilizing mobile model fixture of one embodiment of the invention.
Fig. 4 indicates that according to the schematic diagram of the equipment of solder mask in the framework utilizing mobile model fixture of one embodiment of the invention.
Fig. 5 indicates that and is monolithically fabricated skeleton diagram according to one embodiment of the invention.
Fig. 6 indicates that the schematic diagram of the calibration equipment of the θ angle according to one embodiment of the invention.
Fig. 7 indicates that the framework according to one embodiment of the invention and glass basis pull the schematic diagram of equipment up and down.
Fig. 8 indicates that the schematic diagram of the masking tape charging appliance according to one embodiment of the invention.
Fig. 9 indicates that the schematic diagram of the image according to one embodiment of the invention and laser welding apparatus.
Figure 10 indicates that the manufacture method flow chart of the mask frame of the present invention.
Figure 11 indicates that take multiaspect inside individual makes the schematic diagram of white light OLED mask frame in the past.
(description of reference numerals)
1: framework the 2a: the first masking tape
2b: the second masking tape
3: groove 4a: framework minor face (Y-axis) mobile model fixture
4b: the long limit of framework (X-axis) mobile model fixture
5: linear servo-actuator 41a, 41b: cylinder
42a, 42b: hold cylinder
6: framework and glass basis pull equipment up and down
7: masking tape charging appliance
8: image and laser welding apparatus
9: image and laser welding apparatus transfer linear servo-actuator
10: θ pivot hinge 11: θ angular adjustment motor
12: θ axle regulates the fixing equipment of buffer device 13: θ axle
15: mobile model fixture Up/Down motor
Detailed description of the invention
With reference to the accompanying drawings, the composition of embodiments of the invention is functioned it is specifically described.Additionally, in the process that the present invention is described, when judge to think to relevant well-known function or composition illustrate may obscure main idea of the present invention time, omit it and illustrate.
Fig. 1 indicates that the floor map of the white light OLED mask frame of the use masking tape slot segmentation according to one embodiment of the invention.Fig. 2 indicates that the floor map of the white light OLED mask frame of use masking tape slot segmentation according to another embodiment of the present invention.
As it can be seen, the structure according to the mask frame of the present invention includes: form the framework 1 of periphery；More than one first masking tape 2a, across the inner space of described framework and be welded in its longer side and a shorter side；Second masking tape 2b, longer side and a shorter side comprehensive engagement with described framework is also welded；Multiple white light OLED deposition grooves 3, the masking tape of minor face or long limit by being welded in described framework is formed at frame interior space.
Described first masking tape 2a is the compression segmentation mask of its internal long strips not having such as any processing such as grooves.
The mask frame of the present invention is the mask frame being used in the organic deposit (Evaporation) made in white light OLED and encapsulation (Passivation).
Framework suitable in described mask frame is deposition framework (Frame), and its material uses iron-nickel alloy (Invar36) and rustless steel (SUS420).The thickness being now preferably used is 30mmt and 20mmt, and thickness deviation is 100 μm of below t, flatness is less than 50 μm.Certainly, this is only the preferred example of proposition, and the present invention is not limited in numerical value as above.
Additionally, the material of described masking tape be preferably used can weld the iron-nickel alloy that thickness is 100 μm of ロ 10% (Invar), rustless steel (StainlessSteel), nickel-cobalt alloy (Ni-CoAlloy).
Additionally, when utilizing described framework to make mask frame with masking tape, in order to minimize the impact that variations in temperature causes, framework and masking tape are preferably used identical material.
Because having possessed mask frame configured as described above, making can by described white light OLED deposition groove 3 as organic white light OLED sedimentary origin, it is deposited on object glass substrate, thus makes the making of the large area white light OLED panel of more than forth generation (size of the benchmark of glass substrate respectively 780mm and 920mm anyhow) become possibility.If this white light OLED panel is made, it is possible to adhere to R/G/B primary color filters in its front, and during by white light OLED switching action luminous, display with color representation.
Fig. 3 indicates that, according to the schematic flow sheet of solder mask in the framework utilizing mobile model fixture of one embodiment of the invention, Fig. 4 indicates that according to the schematic diagram of the equipment of solder mask in the framework utilizing mobile model fixture of one embodiment of the invention.
As it can be seen, the fixed pattern fixture that the mask frame of the present invention is different from the past, but mobile model fixture is utilized masking tape to be positioned on framework and weld composition.
For this, the mask frame of the present invention by, framework is interposed between middle and opposed pairs framework minor face (Y-axis) mobile model fixture 4a and framework is interposed between the middle and long limit of opposed pairs framework (X-axis) mobile model fixture 4b composition.Use 4 mobile model fixtures altogether masking tape to be moved at the ad-hoc location intended to move to, apply tension force and weld and on framework.
Now, it is preferred that welding sequence is, first after the minor face solder mask band of framework, the long side weld of framework connects masking tape again, minor face and being welded by the direction of inner side to outside on long limit.According to diagram an embodiment illustrate the welding sequence in minor face be by inner side 1., 2. position in outward direction 3., 4. the order of position carry out.Additionally, the welding sequence in long limit be by 5. position, inner side in outward direction 6., 7. the order of position carry out.If as drawing split time be not limited to order as above.
But, described framework short side direction carries out in the multiple masking tape welded, the masking tape of both sides always with long margin frame frame comprehensive engagement welding；Described framework long side direction carries out in the multiple masking tape welded, the masking tape of both sides always with minor face framework comprehensive engagement welding.Thus constitute tenesmus or the distortion of the masking tape preventing width short compared to length direction.
Welding proceeded as above, because the structure that framework does not distort the mask frame made becomes firm.
If more specifically describing according to Fig. 4, namely pair of frames minor face (Y-axis) mobile model fixture 4a and the long limit of framework (X-axis) mobile model fixture 4b carries out critically back and forth movement respectively on the linear servo-actuator (Linerservomotor, 5) be arranged on its underpart.That is, framework minor face (Y-axis) mobile model fixture described in this pair always carries out ganged movement on linear servo-actuator (Linerservomotor, 5).The long limit of pair of frames (X-axis) mobile model fixture also as above, is arranged on linear servo-actuator and carries out ganged movement.
In addition, framework minor face (Y-axis) mobile model fixture 4a and the long limit of framework (X-axis) mobile model fixture 4b is possible not only at linear servo-actuator (Linerservomotor, 5) back and forth movement is carried out on, also for seesaw in the direction orthogonal with this, cylinder 41a, 41b is respectively constituted in order to hold the masking tape of loading, by holding cylinder 42a, 42b holding masking tape after fixture seesaws inside it.After holding, masking tape does rectilinear motion on linear servo-actuator, is transplanted on the position of welding and stops.Mobile stop after, by after the image chatted and laser welding apparatus move, make the position of masking tape align with between glass basis and weld.
When loading masking tape as above can order shown in Fig. 3, first after the minor face solder mask band of framework, the long side weld at framework connects masking tape.
Fig. 5 indicates that and is monolithically fabricated skeleton diagram according to one embodiment of the invention, Fig. 6 indicates that the schematic diagram of the calibration equipment of the θ angle according to one embodiment of the invention, Fig. 7 indicates that the framework according to one embodiment of the invention and glass basis pull the schematic diagram of equipment up and down, Fig. 8 indicates that the schematic diagram of the masking tape charging appliance according to one embodiment of the invention, and Fig. 9 indicates that the schematic diagram of the image according to one embodiment of the invention and laser welding apparatus.
As shown in the figure, the mask frame of the present invention, its composition includes: image and glass basis pull equipment 6 up and down, it is possible to loads the integral device including framework minor face (Y-axis) mobile model fixture 4a and the long limit of framework (X-axis) the mobile model fixture 4b arranged on linear servo-actuator 5 and positions glass basis in its underpart；Masking tape charging appliance 7, it is possible to the masking tape that framework minor face (Y-axis) mobile model fixture 4a and the long limit of framework (X-axis) mobile model fixture 4b holds and transfers is pulled up and down；Image and laser welding apparatus 8, possess video camera, laser displacement sensor, laser welding apparatus inside it, it is possible to carries out aliging and being welded with masking tape by framework with glass basis by masking tape；With image and laser welding apparatus transfer with linear servo-actuator (Linerservomotor, 9), it is possible to transfer described image and laser welding apparatus.
Furthermore, it is possible to possess θ angular adjustment motor 11, fine regulate framework minor face (Y-axis) mobile model fixture 4a or the long limit of framework (X-axis) the mobile model fixture 4b θ angle occurred in transfer.
Namely, framework minor face (Y-axis) mobile model fixture 4a or the long limit of framework (X-axis) though mobile model fixture 4b hold and transfer in masking tape transferred by accurate linear servo-actuator, it is also possible to transferred when the change of trickle angle occurs.It is directly welded on framework can produce mask frame inferior if not carrying out in this state makes corrections, and cannot use.Conventional mode, during if there is θ angle described above, masking tape being adjusted back to initial position and re-start transfer, such operation not only by increasing numerous and diverse technique number, the shortcoming of the time that increases consumption, also can cannot ensure that θ angle is correctly corrected.In order to solve such problem, the present invention has possessed the calibration equipment that can implement correction operation on correspondence position.
θ angular adjustment motor 11 can be substituted, it is possible to use passive type micrometer, but use θ angular adjustment motor 11 can carry out accurate control.This motor is preferably used and controls motor as servomotor or motor etc. are accurate.
Specifically, the present invention is for the θ angle that makes corrections, centered by the θ pivot hinge 10 being arranged on framework minor face (Y-axis) mobile model fixture 4a or the long limit of framework (X-axis) mobile model fixture 4b bottom, arranging θ angular adjustment motor 11 and θ axle regulates buffer device 12, described θ angular adjustment motor 11 rotary setting holds the part of cylinder 42a, 42b and cylinder 41a, 41b；The direction opposed with θ angular adjustment motor 11 arranges θ axle and regulates buffer device 12, in other direction support, and the contacting of connecting rod 111 advanced because of the rotation with described θ angular adjustment motor 11 and holding cylinder 42a, 42b of rotating and cylinder 41a, 41b portion.
The θ angle in turn resulted in before rotarily driving connecting rod according to described θ angular adjustment motor 11 trickle, rod-pulling type or the fixing equipment 13 of screw θ axle that can be located at rear are fixed as the θ angle adjusted.
Possess mobile model fixture Up/Down motor 14 at described framework minor face (Y-axis) mobile model fixture 4a or the long limit of framework (X-axis) mobile model fixture 4b bottom, utilize it to carry out Up/Down repeatedly to measure the degree repeatedly of position.Namely, framework and glass basis pull after arranging indicator (Indicator-is not shown) on equipment 6 up and down, move repeatedly framework minor face (Y-axis) mobile model fixture 4a or the long limit of framework (X-axis) mobile model fixture 4b to measure position with 20mm.Pendulous frequency is each fixture (Gripper) about 20 times so that it is reach below 10um.
Described framework and glass basis pull equipment 6 to be carry out, by multiple cylinders, the composition that lifts up and down, possesses the fixture etc. of supporting frame and glass basis, constructed as described above for the general composition pulling equipment up and down, the technical staff with usual knowledge can be carried out simply by drawing, therefore omits careful explanation.
Described masking tape charging appliance 7 is to carry out, by multiple cylinders, the composition that lifts, possesses the fixture etc. supporting masking tape, composition for general charging appliance constructed as described above, the technical staff with usual knowledge can be carried out simply by drawing, therefore omits careful explanation.
Described image and laser welding apparatus 8；With the image of mobile described image and laser welding apparatus and laser welding apparatus transfer linear servo-actuator (Linerservomotor, 9) composition is common composition, the technical staff with usual knowledge can be carried out simply by drawing, therefore omits careful explanation.
Making apparatus according to mask frame described above, in order to make the manufacture method of the mask frame of white light OLED panel, carries out interim explanation according to Figure 10 as follows, by
(A) in order to determine the attachment position of masking tape, and the stage S100 of glass basis location is carried out；
(B) in order to be fixed by solder mask band, and the stage S200 of framework loading is carried out；
(C) two ends of masking tape are carried out at framework minor face (Y-axis) mobile model fixture or the long limit of framework (X-axis) mobile model fixture the stage S300 held；
(D), after framework minor face (Y-axis) the mobile model fixture at two ends being moved to pad along the long limit of framework short side direction or framework (X-axis) mobile model fixture along framework long side direction, the masking tape display part that applying tension force is formed on glass basis carries out the stage S400 alignd；
(E) in order to prevent from maintaining the bending of the masking tape alignd with glass basis display part, the θ angular adjustment motor possessed on framework minor face (Y-axis) mobile model fixture or long limit (X) mobile model fixture is utilized to regulate the stage S500 of θ angle；
(F) position will be determined and regulated the stage S600 that the two ends of masking tape of θ angle are welded on framework；
(G) it is arranged as required to the masking tape number on the minor face (Y-axis) or long limit (X-axis) of framework, repeats the stage S700 in (C) stage to (F) stage and constitute.
Described (F) or (G) are in the stage, after having determined that the masking tape of position and adjusted complete θ angle utilizes the long limit of framework (X-axis) mobile model fixture to be welded on framework by its two ends, the stage of welding and the masking tape cross part arranged on framework minor face.
Welding sequence on the minor face of described framework and long limit is welded with the direction from inboard to outside.
In described multiple masking tape with the welding of framework short side direction, the masking tape of both sides and long margin frame frame comprehensive engagement are also welded；In described multiple masking tape with the welding of framework long side direction, the masking tape of both sides and minor face framework comprehensive engagement are also welded.
The present invention is not limited to above-mentioned specific preferred embodiment, general technical staff of the technical field of the invention is to be understood that, in idea of the invention situation required in without departing from Claims scope, can therefrom realizing various deformation to implement, as above changing is in the scope that right is recorded.
Claims (9)
1. a manufacture method for mask frame, it makees to make in technique organic deposit and the encapsulation of white light OLED panel for white light OLED tv mechanism, it is characterised in that including:
(A) in order to determine the attachment position of masking tape, and the stage of glass basis location is carried out；
(B) in order to be fixed by solder mask band, and the stage of framework loading is carried out；
(C) two ends of masking tape are carried out at framework minor face mobile model fixture or framework long limit mobile model fixture the stage held；
(D), after the framework minor face mobile model fixture at two ends being moved to pad along framework short side direction or framework long limit mobile model fixture along framework long side direction, the masking tape display part that applying tension force is formed on glass basis carries out the stage alignd；
(E) in order to prevent from maintaining the bending of the masking tape alignd with glass basis display part, the θ angular adjustment motor possessed on framework minor face mobile model fixture or long limit mobile model fixture is utilized to regulate the stage of θ angle；
(F) position will be determined and regulated the stage that the two ends of masking tape of θ angle are welded on framework；
(G) with the masking tape quantity to be arranged on the minor face of framework or long limit, the stage to (F) stage in (C) stage is repeated.
2. the manufacture method of mask frame according to claim 1, it is characterised in that
Described (F) or (G) stage include: after having determined that the masking tape of position and adjusted complete θ angle utilizes framework long limit mobile model fixture to be welded on framework by its two ends, weld and the stage of the masking tape cross part arranged on framework minor face.
3. the manufacture method of mask frame according to claim 1, it is characterised in that
Welding sequence for first connecing masking tape in the long side weld of framework again after framework minor face solder mask band.
4. the manufacture method of mask frame according to claim 1, it is characterised in that
Welding sequence on the minor face of described framework and long limit is welded with the direction from inboard to outside.
5. the manufacture method of mask frame according to claim 1, it is characterised in that
With in multiple masking tape that the short side direction of described framework welds, the masking tape of both sides and long margin frame frame comprehensive engagement are also welded；
With in multiple masking tape that the long side direction of described framework welds, the masking tape of both sides and minor face framework comprehensive engagement are also welded.
6. the making apparatus of a mask frame, it makees in technique to make organic deposit and the encapsulation of white light OLED panel for white light OLED tv mechanism, this equipment is made up of the aligned in position camera apparatus of framework supply arrangement, framework charging appliance, glass basis supply and charging appliance, mask supply arrangement, mask and glass basis, equipment that mask is welded in framework, it is characterized in that, including:
Opposite a pair framework minor face mobile model fixture, holds the two ends of masking tape, moves along framework short side direction when applying tension force；
Opposite a pair framework long limit mobile model fixture, holds the two ends of masking tape, moves along framework long side direction when applying tension force.
7. the making apparatus of mask frame according to claim 6, it is characterised in that the composition of described framework minor face mobile model fixture and framework long limit mobile model fixture more includes:
θ angular adjustment motor, regulates the masking tape θ angle being transplanted on；
θ axle regulates buffer device, supports in opposite side direction and holds cylinder and cylinder part, wherein said holding cylinder by with the rotation because of described θ angular adjustment motor and the bar that advances contacts and rotate.
8. the making apparatus of mask frame according to claim 6, it is characterised in that
Described framework minor face mobile model fixture and framework long limit mobile model fixture are installed on linear servo-actuator (Linearservomotor) and carry out accurate reciprocating motion.
9. the white light OLED tv mechanism made by the mask frame manufacture method of any one in described claim 1 to 5 makes organic deposit and the encapsulation mask frame in order to make white light OLED panel in technique, it is characterized in that, including:
Form peripheral framework；
More than one first masking tape, carries out welding in the longer side and a shorter side of described framework and arranges across inner space；
Second masking tape, longer side and a shorter side comprehensive engagement with described framework is also welded；
Multiple white light OLED deposition grooves, by the first masking tape welded on the minor face of described framework or long limit and the second masking tape, are formed at inner space.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110082895A KR101295354B1 (en) | 2011-08-19 | 2011-08-19 | Mask frame assembly for evaporation and pssivation for manufacturing White OLED panel, manufacturing method and apparatus thereof |
| KR10-2011-0082895 | 2011-08-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102903730A CN102903730A (en) | 2013-01-30 |
| CN102903730B true CN102903730B (en) | 2016-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210295635.XA Active CN102903730B (en) | 2011-08-19 | 2012-08-17 | Organic deposit and encapsulation mask frame, its manufacture method and equipment |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101295354B1 (en) |
| CN (1) | CN102903730B (en) |
| TW (1) | TWI488541B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668052A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Composite mask plate assembly |
| CN103668049A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Mask plate assembly for use in vapor deposition of large-sized OLED (Organic Light Emitting Diode) |
| KR102162790B1 (en) * | 2013-05-02 | 2020-10-08 | 삼성디스플레이 주식회사 | Welding device for mask frame assembly |
| KR101397959B1 (en) * | 2013-10-30 | 2014-05-28 | 최종성 | The mask frame to the plane of the planar laser marking information in the marking device |
| CN104536260A (en) * | 2014-12-31 | 2015-04-22 | 深圳市华星光电技术有限公司 | Combination type mask plate and manufacturing method thereof |
| KR102366569B1 (en) | 2015-07-01 | 2022-02-25 | 삼성디스플레이 주식회사 | Mask tension welding device for thin film deposition |
| CN105810853B (en) * | 2016-05-19 | 2017-11-24 | 京东方科技集团股份有限公司 | Resistance bringing device, mask manufacture device and correlation method |
| KR101882962B1 (en) * | 2016-10-19 | 2018-07-30 | (주)케이피에스 | Apparatus for manufacturing the tension mask assemblay |
| CN106367718B (en) * | 2016-12-05 | 2018-10-30 | 京东方科技集团股份有限公司 | A kind of mask plate and its assemble method |
| KR101898616B1 (en) * | 2017-11-30 | 2018-09-13 | 주식회사 한송네오텍 | Single tension type welding apparatus for manufacturing AMOLED mobile mask frame assembly and manufacturing method of AMOLED mobile mask frame assembly using thereof |
| KR101898612B1 (en) * | 2017-11-30 | 2018-09-13 | 주식회사 한송네오텍 | Dual tension type welding apparatus for manufacturing AMOLED mobile mask frame assembly and manufacturing method of AMOLED mobile mask frame assembly using thereof |
| KR102191388B1 (en) | 2018-06-12 | 2020-12-15 | 어플라이드 머티어리얼스, 인코포레이티드 | Mask Frame and Mask Assembly |
| CN109628908B (en) * | 2018-11-26 | 2020-02-18 | 武汉华星光电半导体显示技术有限公司 | Mask plate for flexible OLED panel film packaging |
| KR102633293B1 (en) | 2022-04-26 | 2024-02-05 | 주식회사 한송네오텍 | Manufacturing method of high-resolution large area mask frame assembly using partial pattern divided mask |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20130020325A (en) | 2013-02-27 |
| TW201306651A (en) | 2013-02-01 |
| CN102903730A (en) | 2013-01-30 |
| TWI488541B (en) | 2015-06-11 |
| KR101295354B1 (en) | 2013-08-12 |
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