JP4606114B2 - Metal mask position alignment method and apparatus - Google Patents

Description

  The present invention includes extremely thin and different regions of rigidity, such as a metal mask having a mask portion having a large number of minute openings, which is used for a vapor deposition mask used in an organic EL element manufacturing process. The present invention relates to a technique for fixing a metal mask to a frame-like frame in a flat state without distortion, and more particularly, to a method and apparatus for taking a position alignment of the metal mask when fixing the metal mask to the frame.

Conventionally, vacuum evaporation has been performed in the manufacture of organic EL elements, and as an evaporation mask, an opening that allows evaporation , that is, a large number of elongated minute slits that act as openings for performing evaporation of a desired pattern. A metal mask having a mask portion provided is used. In vapor deposition, the metal mask is attached to a frame having a large rigidity having an opening larger than that of the mask by a magnet or the like. However, in recent years, as the patterning has become finer and the slits formed in the mask portion have become finer and the thickness of the metal mask itself has become thinner, the metal mask is simply used in a frame-like frame. Just fixing them causes distortion and sagging in the mask part, which causes a problem that the slit accuracy cannot be maintained. Therefore, the present applicant has first developed a metal mask holding jig that can hold the metal mask in a state of being pulled in the slit direction of the mask portion with the metal mask attached to the frame (patent) Reference 1). By using this holding jig, it is possible to hold the thin line portion (non-hole portion) between the slits of the mask portion in a state of being pulled in the longitudinal direction, so that the slits can be held linearly and at a constant pitch, and high-definition patterning can be performed. The advantage of being possible is obtained.

  However, the metal mask described in Patent Document 1 has a problem that productivity is poor because only one mask portion is formed on one metal mask. In order to increase productivity, a multifaceted metal mask in which a plurality of mask portions are formed on a single metal mask may be used. However, in a multifaceted metal mask, simply holding both ends and pulling the metal mask Even if the entire width of the mask is pulled evenly, the mask portion and the non-mask portion have different rigidity. Turned out to be. For example, in the case of a multi-face mask for vapor deposition used for manufacturing an organic EL element, a total pitch of ± 10 μm or less may be required for the position of each mask portion, but it is difficult to achieve such dimensional accuracy. .

  Therefore, as a result of studying to solve this problem, each of the four sides of the metal mask is gripped by a plurality of clamps, tension is applied to the metal mask by each clamp, and the tension is adjusted for each clamp. Thus, the present inventors have found that the metal mask can be made flat without wrinkles and sagging, and the slits of each mask portion can be held linearly and at a constant pitch. In addition, tension is applied to the metal mask to make it flat, and the metal mask is fixed to the frame-like frame by spot welding, etc., so that the metal mask is tensioned and flat even after the clamp is removed. Therefore, it has been found that a multi-face mask can be held without distortion and sagging using a frame having a simple structure.

By the way, when tension is applied to each of the four sides of the metal mask in this way and the frame is fixed to the frame, the elongation generated in the metal mask is not necessarily uniform simply by adjusting the tension so that there is no wrinkle or slack in the metal mask. Therefore, the positions of the plurality of mask portions formed on the metal mask may be shifted from the proper positions. That is, the plurality of mask portions need to be accurately positioned at predetermined pitches in the vertical direction and the horizontal direction, respectively, but the pitch error may increase or the arrangement may be twisted as a whole. there were. To prevent this, a length measuring device that can measure the position of several mask parts with high tension (micron order) in the XY direction (vertical and horizontal directions) with tension applied to the metal mask. It is sufficient to adopt a method in which the tension is adjusted so as to obtain an appropriate position. However, this method has the following problems: (1) the length measuring device is expensive, (2) time is required for length measurement, the work efficiency is poor, and (3) position management cannot be performed at a plurality of locations at once. there were.
JP 2003-68453 A

  The present invention has been made in view of such a situation, and when a tension is applied to a metal mask such as a multi-face mask for vapor deposition so that there is no distortion or sagging, the equipment is less expensive than a length measuring device A metal mask position alignment method and apparatus capable of managing the positions of a plurality of locations in the metal mask so as to be at appropriate positions with high accuracy in a shorter time than when using a length measuring device. The task is to do.

The invention according to claim 1 to solve the above-mentioned problem is that a metal mask having a large number of openings for depositing a desired pattern is fixed on a frame-like frame. A method of obtaining a position alignment of the metal mask , wherein each of the four sides of the metal mask is held by a plurality of clamps, and tension is applied to the metal mask by each clamp; among the plurality of openings are formed, in a position showing the correct position of at least a plurality of openings, a glass scale having a plurality of reference marks of a small size than the opening, before the tensioning process or A step of positioning the metal mask at a position close to the lower surface of the metal mask and a plurality of openings of the metal mask corresponding thereto; The metal mask position alignment method and a tension adjustment step of adjusting the tension by the plurality of clamps so as to go match the reference mark of the glass scale and summary.

  According to a second aspect of the present invention, in the metal mask position alignment method according to the first aspect, prior to the tension adjusting step, at least one of the metal mask and the glass scale is moved in the vertical and horizontal directions and in the rotational direction to perform rough positioning. It is set as the structure which has the process to perform.

According to a third aspect of the present invention, in fixing a metal mask having a large number of openings for performing deposition of a desired pattern to a frame-shaped frame, the metal mask is positioned on the frame supported at a predetermined position. An apparatus for aligning a position of a metal mask, wherein the metal mask is positioned on the frame supported at a predetermined position, and tension is applied by gripping a plurality of positions on each of the four sides of the metal mask. a plurality of tensioning units arranged so as to be disposed at a position close to the lower surface of the metal mask in the state stretched by the plurality of tension unit, the one of the plurality of openings are formed in the metal mask A guide having a plurality of fiducial marks formed at positions indicating the appropriate positions of at least the plurality of openings and having a size smaller than that of the openings. A scale, a transmission illumination device disposed on the lower surface side of the glass scale, and a metal mask stretched by the plurality of tension units. The metal mask opening and the glass scale The gist of the present invention is a metal mask position alignment apparatus having an image pickup means for picking up an overlapping portion of reference marks and an adjustment means capable of individually adjusting tensions applied by the plurality of tension units.

  According to a fourth aspect of the present invention, a reflecting mirror is disposed in place of the illuminating illumination device disposed under the glass scale in the above-described third aspect of the present invention, and the opening of the metal mask and the reference of the glass scale are arranged. The overlapping portion of the mark is imaged using reflected light.

  The invention according to claim 5 is the metal mask position alignment apparatus according to claim 3 or 4, wherein the glass scale is mounted on an X, Y, θ stage, and the metal mask and the glass are placed on the X, Y, θ stage. In this configuration, coarse positioning with the scale can be performed.

  According to a sixth aspect of the present invention, in the metal mask position alignment apparatus according to the third, fourth, or fifth aspect of the present invention, four image pickup means are provided so that four openings can be picked up simultaneously. is there.

  According to the method and apparatus of the present invention described above, the glass scale is positioned close to the lower surface of the metal mask in a state where tension is applied to the four sides of the metal mask. It is possible to see whether or not the opening of the metal mask is at a predetermined proper position by looking at the overlay state of the metal mask, so that the opening of the metal mask is aligned with the fiducial mark on the glass scale. By adjusting the tension to be applied, the position in the metal mask can be aligned with an appropriate position with high accuracy, and alignment can be achieved. For example, when a plurality of mask portions are formed on the metal mask, each mask The position of the part can be positioned at a predetermined position with high accuracy. When performing this alignment, it is only necessary to align the opening of the metal mask with the fiducial mark on the glass scale, making it easy to make judgments, allowing easy adjustment of the metal mask tension, and quick adjustment It is. Further, since a length measuring device is unnecessary, the function can be satisfied with an inexpensive device, which is economically advantageous.

  The present invention can be applied to any metal mask that needs to be kept flat without distortion or sagging, but is particularly suitable as a multi-face mask for vapor deposition for manufacturing an organic EL element that requires precision. It is preferable to apply to the metal mask to be used. Hereinafter, a preferred embodiment of the present invention will be described by taking a metal mask used as a multi-face mask for vapor deposition in manufacturing an organic EL element as an example. FIG. 1 is a schematic perspective view of a main part of a metal mask position alignment apparatus (hereinafter abbreviated as an alignment apparatus) according to an embodiment of the present invention. FIG. 2 is a schematic side view showing a part of the alignment apparatus in cross section. 3 is a schematic side view of a tension unit provided in the alignment apparatus, FIG. 4 is a schematic plan view showing a plurality of tension units provided in the alignment apparatus and a metal mask held by the tension unit, and FIG. 5 is another embodiment. FIG. 6 is a schematic perspective view showing a metal mask to be handled by these alignment devices and a frame-like frame for fixing the alignment mask, and FIG. FIG. 8A is a schematic perspective view of a vapor deposition mask device formed by fixing a mask, and FIG. 8A is a reference formed on a glass scale. (B) is an enlarged schematic plan view showing the opening formed in the metal mask, and (c) is an image of the overlapping area of the opening and the reference mark. It is a schematic front view which shows the state displayed on.

In FIG. 6, reference numeral 1 denotes a right-sided quadrilateral metal mask used as a vapor deposition mask, which is formed by arranging a plurality of mask portions 2 vertically and horizontally. Each mask portion 2 includes a large number of minute openings that permit vapor deposition, that is, a large number of minute openings for performing vapor deposition in a desired pattern . The shape and arrangement of the openings in each mask portion are arbitrary. For example, there are those in which elongated slit-like openings are arranged in parallel, rectangular openings are arranged in the vertical direction and in parallel, and the like. be able to. Many of the openings formed in the mask portion 2 are used for positioning the metal mask 1 as will be described later. A frame 3 having a large rigidity for attaching the metal mask 1 includes an opening 4 having a size including a region (referred to as an effective region) in which a large number of mask portions 2 of the metal mask 1 are formed. The metal mask 1 is made larger in both the vertical and horizontal directions than the frame 3, and an easy cutting line 5 that can be easily cut by bending is formed at a position substantially corresponding to the outer peripheral edge of the frame 3. The easy cutting line 5 has a strength that can withstand a tensile force applied to the metal mask 1. Although the thickness of the metal mask 1, the dimension of the mask part 2, the dimension of the opening formed in it are not specifically limited, the thickness of the metal mask 1 is typically 30 to 200 μm, and the mask part 2 As for the dimensions, the length is 50 to 70 mm, the width is 30 to 50 mm, the width of the opening is 40 to 100 μm, the width of the non-porous portion between the openings is 80 to 150 μm, and the like.

  1 to 4, an alignment apparatus generally indicated by reference numeral 10 can hold a support base 11 and apply tension to the support base 11 by gripping a plurality of locations on each of the four sides of the metal mask 1. A plurality of tension units 13 arranged as described above are provided.

  As shown in an enlarged view in FIG. 3, each tension unit 13 includes a base member 15, a clamp 17 movably held by the base member 15 via a linear motion guide 16, and a drive for reciprocating the clamp 17. Means 18 and the like are provided. Here, an air cylinder is used as the driving means 18, but a hydraulic cylinder, a servo motor or the like may be used instead of the air cylinder. The clamp 17 is a toggle mechanism that pivots the movable claw 17b to hold the metal mask 1 between the fixed claw 17a, the movable claw 17b, and the movable claw 17b while pressing the movable claw 17b firmly against the fixed claw 17a. And an air cylinder (both not shown). As can be clearly seen from FIG. 4, each tension unit 13 is arranged so that each side of the metal mask 1 can be gripped by a plurality of tension units 13 and tension can be applied to the side in a direction perpendicular thereto. Further, the clamps 17 of the plurality of tension units 13 arranged so as to hold each side of the metal mask 1 are arranged in accordance with the mask part 2 and the non-mask part of the metal mask 1, and accordingly, the metal mask A region extending in the vertical direction and a region extending in the horizontal direction in which one mask portion 2 is formed, and a region extending in the vertical direction and a region extending in the horizontal direction without the mask portion, that is, regions having different rigidity, are separately clamped. It is possible to apply tension by pulling at 17.

  The driving means 18 provided in each of the plurality of tension units 13 has adjusting means (not shown) for individually adjusting the driving force by the driving means so that the tension applied to the metal mask 1 can be individually adjusted. Is provided. More specifically, an air supply pipe is connected to the air cylinder constituting the drive means 18, and a regulator capable of individually adjusting the supply pressure to each air cylinder is provided as an adjustment means in the air supply pipe. It has been. Note that air is supplied to the air supply pipes connected to these air cylinders via a common on-off valve so that the drive means (air cylinders) 18 of all the tension units 13 can be operated simultaneously. A speed controller is also provided in the air supply piping to each air cylinder so that the operation timing of each air cylinder can be adjusted.

  2 and 3, a frame support 20 that supports the frame 3 is provided on the base member 15 of the tension unit 13. The frame support 20 places the frame 3 thereon, thereby positioning the frame 3 at a predetermined position in the horizontal plane, and the upper surface of the frame 3 is held by the clamp 17 and applied to the tension applied to the metal mask 1. It arrange | positions so that it can also position in an up-down direction so that it may become a substantially contact | connecting position.

  Furthermore, the support base 11 is provided with an X, Y, and θ stage 23, and a transmission illumination device 24 and a glass scale 25 are provided on the upper surface thereof. The X, Y, and θ stages 23 can adjust the position of the upper surface on which the illumination device 24 for transmission and the glass scale 25 are mounted in the vertical direction (X direction) and the horizontal direction (Y direction) in a horizontal plane. The position can also be adjusted in the rotation direction (θ direction) with the vertical axis at the center as the center. The transmission illumination device 24 can illuminate the entire surface of the glass scale 25 from below.

  The glass scale 25 is formed by forming a large number of reference marks on the surface of a transparent glass substrate so as to indicate the appropriate positions of the openings of the metal mask 1, and the openings formed in the metal mask 1 at the reference marks. By aligning the portions, the metal mask 1 is provided in a flat state without distortion and sagging, and the mask portions 2 can be positioned at predetermined positions with the pitches of the plurality of mask portions 2 set to appropriate values. . FIG. 8 illustrates the relationship between the reference mark formed on the glass scale 25 and the opening formed in the mask portion 2 of the metal mask 1. As shown in FIG. 8B, a large number of openings 40 are formed in each of the plurality of mask portions 2 of the metal mask 1. The shape, size, pitch, and the like of the openings 40 are determined according to a desired vapor deposition pattern. As an example, an opening 40 having a rectangular shape as illustrated and having a width of 50 μm and a length of 150 μm is used. It is assumed that As shown in FIG. 8A, a large number of reference marks 42 are formed on the glass scale 25 used for the metal mask 1 having the openings 40, and each reference mask 42 has an opening 40. The size is made smaller both vertically and horizontally, for example, 30 μm wide and 130 μm long. As a result, in a state where the reference mask 42 and the opening 40 are overlapped with each other centered, the reference mask 42 and the reference mask 42 are illuminated from the lower side of the glass scale 25 with the transmission illumination device 24 (see FIG. 2). When the overlapping portion with the opening 40 is imaged from above and displayed on the monitor 43 as shown in FIG. 8C, the reference mark 42 enters the opening 40 and the rectangular bright portion outside the reference mark 42. 44 appears. It is possible to recognize that the reference mark 42 and the opening 40 are correctly overlapped by visually observing the rectangular bright portion 44 or by recognizing it by image processing.

  The reference marks 42 formed on the glass scale 25 are preferably provided so as to correspond to all the openings 40 formed in the metal mask 1, whereby the openings 40 of the mask part 2 at arbitrary positions are provided. Although the mask portion 2 can be positioned according to the reference mark 42, the present invention is not limited to this, and the reference mark 42 may be formed only in a desired region of the glass scale 25. When aligning the metal mask 1, a plurality of mask portions 2, for example, a plurality of masks as shown in FIG. When the portions 2 are arranged side by side in the vertical and horizontal directions, if the mask portion 2 (the mask portion at the position indicated by A, B, C, D) located on the outermost side in the outermost row is aligned, the other mask portions Since the position 2 is often an appropriate position, a reference mark 42 may be formed in a region corresponding to the mask portions 2 so that the mask portions 2 can be aligned. That's fine. In addition, since only one opening 40 is used for alignment with respect to one mask portion 2, only one reference mark 42 is required in the region corresponding to one mask portion 2, but only one. Since it is difficult to find the position of the reference mark only by providing the reference mark 42, it is preferable to form a large number of reference marks 42 for one mask portion 2, and further, It is more preferable to form the reference mark 42 corresponding to all the openings 40 of the two mask portions 2. As described above, when the reference mark 42 is formed on the glass scale 25 so as to correspond to all the openings 40 of the mask portion 2 in the regions indicated by A, B, C, and D of the metal mask 1, In the state where the glass scale 25 is overlaid on the glass mask 25, the tension applied to each side of the metal mask 1 is adjusted, and any one opening 40 in each mask portion 2 at the positions indicated by A, B, C, D is provided. By aligning with the corresponding reference mark 42, the metal mask 1 can be stretched in a state free from distortion and slack, and each mask portion 2 can be positioned at a predetermined position.

  In FIG. 2, the glass scale 25 is arranged so as to be in a very close position, although it is not in contact with the metal mask 1 stretched by the plurality of tension units 13 thereon. Here, the reason why the glass scale 25 is not in contact with the metal mask 1 is to prevent the two from rubbing and scratching. This is to enable simultaneous and accurate imaging of the opening 40 of the metal mask 1. The distance between the glass scale 25 and the metal mask 1 is set to about 50 to 200 μm, preferably about 50 to 100 μm. Instead of fixing the glass scale 25 at the position shown in FIG. 2 in advance, when the metal mask 1 is stretched, the glass scale 25 and the transmission illumination device 24 are kept waiting downward, and the opening of the metal mask 1 is opened. When performing alignment, an appropriate lifting mechanism may be provided so that the glass scale 25 and the transmission illumination device 24 are raised so that the glass scale 25 can be positioned close to the metal mask 1.

  1 and 2, the alignment apparatus 10 further includes a moving table 28 that is held movably horizontally on a side frame 27 fixed to the support table 11, and four images that are held on the moving table 28. Means 30 are provided. The imaging means 30 is capable of simultaneously imaging the reference mark of the glass scale 25 and the opening of the metal mask 1, and a CCD camera is used in this embodiment. The CCD camera 30 has one opening of the mask portion 2 in the regions A, B, C, and D of the metal mask 1 (preferably, openings at positions close to the four corners of the region where the many mask portions 2 are arranged). And the depth of focus is determined so that the opening of the metal mask 1 and the reference mark of the glass scale 25 can be simultaneously imaged.

  Next, an alignment operation performed by the alignment apparatus 10 having the above configuration will be described. The frame 3 is held by the frame supports 20 of the plurality of tension units 13 in a state where the movable table 28 holding the imaging means 30 is in a standby position outside the plurality of tension units 13 and the glass scale 25 and the like. Then, the metal mask 1 is placed thereon, and the four sides thereof are gripped by the clamps 17 of the plurality of tension units 13. This state is the state shown in FIG. At this time, the metal mask 1 is positioned with respect to the frame 3 using a plurality of positioning pins (not shown). Next, the moving table 28 moves above the glass scale 25 and stops at a predetermined position (see FIG. 2). Next, pressurized air is sent to driving means (air cylinder) 18 connected to each clamp 17 to move each clamp 17 in a direction away from the metal mask 1, and the metal mask 1 is moved in both vertical and horizontal directions by a number of clamps. A small tension is applied so that the metal mask 1 is stretched. Thereafter, the positioning pin is removed so that a large tension can be applied to the metal mask 1 without hindrance. Even if the positioning pins are removed from the metal mask 1, the position of the metal mask 1 with respect to the frame 3 does not change much, and the desired positioning accuracy of the metal mask 1 with respect to the frame 3 is maintained.

  Next, imaging is started by the CCD camera 30, and an image is displayed on the monitor 43 (see FIG. 8). While confirming this, the operator adjusts the X, Y, and θ stages 23 to move the position of the glass scale 25 in the X, Y, and θ directions, and the reference mark 42 of the glass scale 25 is opened in the metal mask 1. Coarse positioning on the part 40 After the rough positioning, the X, Y, and θ stages 23 are fixed at the positions, and the driving force of the driving means 18 of the plurality of tension units 13 that apply tension to the metal mask 1 is confirmed while checking with the monitor 43. The tension applied to the metal mask 1 is adjusted to adjust the four openings 40 to the corresponding reference marks 42. When the four opening portions 40 coincide with the reference mark 42, the plurality of mask portions 2 formed on the metal mask 1 are respectively positioned at predetermined positions. Further, the metal mask 1 is in a flat state without distortion and sagging, and the slits (openings) of the mask part 2 are aligned in parallel. That is, the metal mask position alignment is completed.

  Thereafter, with the tension applied to the metal mask 1, the movable table 28 is returned to the standby position outside the metal mask 1, and the metal mask 1 is spot welded to the frame 3 using a laser or the like (not shown). (See reference numeral 33 in FIG. 4) and fix. Thereafter, the metal mask 1 is removed from the clamp 17, and the peripheral portion of the metal mask 1 is removed using the easy cutting line 5. By the above, as shown in FIG. 7, the vapor deposition mask apparatus 8 of the structure which fixed the metal mask 1 to the flame | frame 3 can be manufactured.

  In the vapor deposition mask device 8 obtained, the metal mask 1 is kept in a state in which there is no distortion or sagging, and the openings of the mask part 2 are accurately aligned in parallel, and the position of each mask part is also predetermined. It is kept within the dimensional accuracy. Thus, by performing vapor deposition using the vapor deposition mask device 8, it is possible to accurately perform vapor deposition of a fine pattern with multiple faces.

  In the above-described embodiment, the transmission illumination device 24 is provided under the glass scale 25, and the light transmitted through the glass scale 25 and the metal mask 1 is imaged by the CCD camera 30. Although the overlapping state between the opening 42 of the metal mask 1 and the opening 40 of the metal mask 1 is monitored, the imaging by the CCD camera 30 is not limited to the transmitted light, but may be configured to use reflected light by illumination from the surface side. In that case, as shown in FIG. 5, it is preferable to provide a reflecting mirror 35 under the glass scale 25 because the amount of reflected light passing through the opening 40 of the metal mask 1 can be increased.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to this embodiment, and can be changed as appropriate within the scope of the claims. For example, in the above-described embodiment, when adjusting the tension applied to the metal mask 1, the monitor 43 is used to determine whether or not the opening 40 of the metal mask 1 and the reference mark 42 of the glass scale 25 are correctly overlapped. However, instead of visual observation, a signal from the CCD camera 30 may be processed and determined. In the above embodiment, the CCD cameras 30 are provided at four locations. However, the present invention is not limited to this, and one or two CCD cameras 30 are used, and the CCD cameras 30 are moved to positions to be imaged. The method used may be used. However, if the CCD cameras 30 are provided at four locations as in the illustrated embodiment, tension adjustment can be performed while monitoring the four openings 40, and the tension adjustment can be performed easily and promptly. The advantage that can be obtained. Further, in the above-described embodiment, the metal mask 1 is positioned by aligning the openings of the four mask portions 2 with the fiducial marks on the glass scale. However, the mask portions 2 used for alignment are four pieces. For example, when positioning only in the vertical direction or only in the horizontal direction of the metal mask is sufficient, the alignment may be performed using the openings of the two mask portions 2.

  Further, in the above-described embodiment, the glass scale 25 is held on the X, Y, and θ stages 23 in order to perform the rough positioning of the metal mask 1 and the glass scale 25. The tension unit 13 to be held may be held on the X, Y, and θ stages. In some cases, coarse positioning may be omitted, and the opening and the reference mark may be aligned only by adjusting the tension. However, as described in the embodiment, if rough alignment is performed, there is an advantage that tension adjustment for alignment between the opening and the reference mark becomes easy.

The schematic perspective view of the principal part of the alignment apparatus which concerns on embodiment of this invention FIG. 1 is a schematic side view showing a part of the alignment device shown in FIG. Schematic side view of the tension unit provided in the alignment apparatus shown in FIG. FIG. 1 is a schematic plan view showing a plurality of tension units provided in the alignment apparatus shown in FIG. 1 and a metal mask held by the tension units. The schematic side view which shows the alignment apparatus which concerns on other embodiment of this invention in part in a cross section FIG. 1 is a schematic perspective view showing a metal mask handled by the alignment apparatus shown in FIG. 1 and a frame-like frame for fixing the metal mask. Schematic perspective view of a vapor deposition mask device formed by fixing a metal mask to a frame (A) is a schematic plan view showing a reference mark formed on the glass scale, (b) is a schematic plan view showing an opening formed in the metal mask, and (c) is an overlapping region of the reference mark and the opening. Schematic front view showing a state where images are captured and displayed on a monitor

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal mask 2 Mask part 3 Frame 4 Opening 5 Easy cutting line 8 Deposition mask apparatus 10 Alignment apparatus 11 Support stand 13 Tension unit 15 Base member 16 Direct motion guide 17 Clamp 17a Fixed claw 17b Movable claw 18 Driving means (air cylinder)
20 Frame support 23 X, Y, θ stage 24 Illumination device for transmission 25 Glass scale 27 Side frame 28 Moving table 30 Imaging means (CCD camera)
33 Spot weld 40 Opening 42 Reference mark 43 Monitor 44 Bright area

Claims (6)

A method of taking a position alignment of the metal mask positioned on the frame when fixing a metal mask having a large number of openings for vapor deposition of a desired pattern to a frame-like frame, each of the four sides of the mask, gripped by a plurality of clamps, the tension step of applying tension to the metal mask by each clamp, one of the plurality of openings are formed in the metal mask, at least a plurality of openings A step of positioning a glass scale formed with a plurality of reference marks smaller in size than the opening at a position close to the lower surface of the metal mask before or after the tensioning step. The plurality of openings of the metal mask are aligned with the corresponding glass scale reference marks. Metal mask position alignment method and a tension adjustment step of adjusting tension by the clamp.   The metal mask position alignment method according to claim 1, further comprising a step of rough positioning by moving at least one of the metal mask and the glass scale in the vertical and horizontal directions and in the rotational direction prior to the tension adjusting step. An apparatus for taking a position alignment of the metal mask positioned on the frame supported at a predetermined position in fixing a metal mask having a large number of openings for vapor deposition of a desired pattern to the frame-shaped frame. The metal mask is positioned on the frame supported at a predetermined position, and a plurality of positions arranged so that tension can be applied by gripping a plurality of locations on each of the four sides of the metal mask. a tension unit is disposed at a position close to the lower surface of the metal mask in the state stretched by the plurality of tension unit, the one of the plurality of openings are formed in the metal mask, proper of at least a plurality of openings A glass scale formed at a position indicating a position and having a plurality of fiducial marks smaller than the opening, and the glass A transmissive illumination device disposed on the lower surface side of the scale and a metal mask stretched by the plurality of tension units, and an overlapping portion of the opening of the metal mask and the reference mark of the glass scale. A metal mask position alignment apparatus, comprising: an imaging unit that captures an image; and an adjustment unit that can individually adjust tensions applied by the plurality of tension units. An apparatus for taking a position alignment of the metal mask positioned on the frame supported at a predetermined position in fixing a metal mask having a large number of openings for vapor deposition of a desired pattern to the frame-shaped frame. The metal mask is positioned on the frame supported at a predetermined position, and a plurality of positions arranged so that tension can be applied by gripping a plurality of locations on each of the four sides of the metal mask. a tension unit is disposed at a position close to the lower surface of the metal mask in the state stretched by the plurality of tension unit, the one of the plurality of openings are formed in the metal mask, proper of at least a plurality of openings A glass scale formed at a position indicating a position and having a plurality of fiducial marks smaller than the opening, and the glass A reflector disposed on the lower surface side of the scale and a metal mask stretched by the plurality of tension units are disposed above, and images the overlapping portion of the opening of the metal mask and the reference mark of the glass scale. A metal mask position alignment apparatus comprising: an imaging unit; and an adjustment unit that can individually adjust tensions applied by the plurality of tension units.   5. The metal mask position alignment apparatus according to claim 3, wherein the glass scale is mounted on an X, Y, and θ stage.   The metal mask position alignment apparatus according to claim 3, 4 or 5, wherein four image pickup means are provided so that four openings can be picked up simultaneously.

Images