KR100922046B1 - Apparatus for fabricating mask of vertical deposition - Google Patents

Abstract

According to the present invention, when the substrate on which the deposition is performed is made larger, the mask sheet and the mask frame may be welded vertically from the ground to prevent sagging due to the weight of the mask when fabricating a large-area mask corresponding to the substrate. It is an object to provide a vertical deposition mask manufacturing apparatus.

In order to achieve the above object, a vertical deposition mask manufacturing apparatus according to an embodiment of the present invention, the tension unit for tensioning and fixing the mask sheet; Welding means for joining the mask frame and the mask frame in close contact with the peripheral area of the mask sheet,

The tension unit includes a plurality of clamps for supporting the mask sheet; A plurality of tensioning means connected to the plurality of clamps, respectively, for tensioning the mask sheets fixed by the clamps by applying a tension force to the plurality of connected clamps; It characterized in that it is configured to include a clamp position adjusting means on one side of the clamp to move at least one of the clamp portion of the plurality of clamps up or down.

Description

Apparatus for fabricating mask of vertical deposition

The present invention relates to a vertical deposition mask manufacturing apparatus, and more particularly to a vertical deposition mask manufacturing apparatus for preventing the deflection of the mask.

In general, a mask is used when a layer having a predetermined pattern is deposited during the manufacture of a light emitting display device. That is, when depositing a layer such as an organic film, a layer having a specific pattern corresponding to the opening is formed by using a mask having an opening of a specific pattern on the substrate on which the deposition is performed.

In this case, the mask is made of a metal material having a certain strength to maintain the shape of the opening of the specific pattern, the deposition process is performed after placing the mask horizontally on the substrate.

In this case, however, the center of the mask may be sag due to the weight of the mask itself, which causes errors in the pattern of the film deposited on the substrate during the deposition process.

This problem is more prominent in the deposition of a large-area substrate, as the size of the substrate on which the deposition is performed increases, the corresponding mask size also increases, causing the mask center deflection due to the weight of the mask itself to be more severe.

FIG. 1 is a perspective view illustrating a mask in which a general mask sheet and a mask frame are welded, and FIG. 2 is a diagram illustrating deflection of the mask shown in FIG. 1.

1 and 2, the mask 10 includes a mask sheet 11 having an opening 12 having a predetermined pattern and a mask frame 13 for fixing the mask sheet 11.

At this time, the mask 10 is manufactured by welding the mask sheet 11 and the mask frame 13 through a mask manufacturing apparatus.

That is, the mask manufacturing apparatus fixes the edge region of the mask sheet 11 with a clamp (not shown), bonds the mask sheet 11 fixed to the clamp to the mask frame 13, and then joins the bonded region. Weld to prepare a mask.

In the conventional case, the mask manufacturing apparatus performs welding after positioning the mask sheet 11 and the mask frame 13 in a horizontal direction, and the mask 10 manufactured by the mask sheet 11 and the mask frame ( By the load of 13), the mask 10 sags in the ground direction as shown in FIG.

Accordingly, the welding line between the mask sheet 11 and the mask frame 13 forms a curve 15 without forming a straight line 14, which supports the mask sheet 11 by the mask frame 13. Since the area of the point to be changed for each part, the position of the opening 12 formed in the mask sheet 11 is not formed in the previously designed area.

Accordingly, the thin film pattern formed on the substrate using the mask 10 is not uniformly formed, and the position of the thin film formed on the substrate is not formed at the predetermined position of the substrate.

According to the present invention, when the substrate on which the deposition is performed is made larger, the mask sheet and the mask frame may be welded vertically from the ground to prevent sagging due to the weight of the mask when fabricating a large-area mask corresponding to the substrate. It is an object to provide a vertical deposition mask manufacturing apparatus.

It is also an object of the present invention to provide a clamp position adjusting means capable of moving the clamp of the tension unit up and down.

In order to achieve the above object, a vertical deposition mask manufacturing apparatus according to an embodiment of the present invention, a welding unit for joining the tension unit for tensioning and fixing the mask sheet and the mask frame in close contact with the mask sheet and the peripheral region of the mask sheet Means,

The tension unit is connected to a plurality of clamps and the plurality of clamps supporting the mask sheet, respectively, a plurality of tension means for flatly fixing the mask sheet fixed by the clamp by applying a tensile force to the plurality of connected clamps And a clamp position adjusting means on one side of the clamp to move at least one clamp portion of the plurality of clamps upward or downward.

At this time, the tension unit is formed on each of the four peripheral surfaces of the rectangular frame having a central opening, the clamp position adjusting means may be provided in the tension unit formed on the left and right sides of the frame. In addition, the clamp position adjusting means is formed on the frame and connected to the lower and upper surfaces of the clamp and the elastic member formed between the upper surface and the body of the clamp and the lower surface and the body of the clamp It may be configured to include a support that is provided between the support for supporting the clamp and the lower portion of the clamp to move the support to the upper or lower portion.

Here, between each clamp and the tension means may be further provided with a tensile force measuring means for measuring the tensile force of the clamp. The tensile force measuring means may include a piezoelectric element for detecting a change in the tensile force of the clamp and a electrostatic regulator for adjusting the pneumatic pressure supplied to the tension means when the measured tensile force is different from the preset value. .

The apparatus may further include a mask sheet vertical transfer unit configured to transfer the mask sheet to the tension unit in an upright position, wherein the mask sheet vertical transfer unit includes: a first carrier configured to transfer the mask sheet; A first adsorption member positioned above the first carrier to adsorb a mask sheet; A first guide rail for moving the first carrier in the direction of the tension unit; A first plate coupled between the first carrier and the first guide rail and configured to lower and raise the first carrier by 90 ° may be included. In addition, a second guide rail may be further formed on the first plate to move the first carrier in a direction perpendicular to the tension unit direction, and at least one of adsorbing the mask sheet on the front surface of the first adsorption member. The above adsorption holes can be formed.

The apparatus may further include a mask frame vertical transfer unit configured to transfer the mask frame to the tension unit in an upright state, and the mask frame vertical transfer unit may include a second carrier configured to transfer the mask frame; A second adsorption member positioned above the second carrier to adsorb a mask frame; A first guide rail for moving the second carrier in the direction of the tension unit; A second plate coupled between the second carrier and the first guide rail and lowering and raising the second carrier by 90 ° may be included. Here, a third guide rail for moving the second carrier in the direction perpendicular to the tension unit direction may be further formed on the second plate, wherein the first guide rail is a mask frame perpendicular to the lower end of the mask vertical transfer part. It may be formed of a guide formed with a pair of grooves parallel to the lower end of the conveying part. The second adsorption member may include at least one adsorption port for adsorbing a glass substrate; A mask frame suction unit may be included to bond the mask frame to the circumference of the glass substrate.

In addition, at least one alignment mark may be formed on the glass substrate to align the mask sheet and the mask frame. A mask frame fixing block may be further provided, and a cylinder protruding to the outside of the mask fixing block may be provided in the mask frame fixing block.

In addition, the mask sheet vertical transfer unit and the mask frame vertical transfer unit may be connected by a connecting member and moved simultaneously.

According to the present invention, sagging of the mask sheet and the mask frame can be prevented by manufacturing the mask sheet and the mask frame using the vertical deposition apparatus.

In addition, in order to prevent the mask sheet from sagging to the ground by the tension unit during the vertical deposition of the mask sheet and the mask frame, by forming a deflection prevention means on one side of the tension unit, the deflection phenomenon of the mask sheet is prevented and applied to the large area substrate. The large area mask to be applied can be produced without bending.

In addition, in order to fix the tension unit in the mask sheet in place, by further forming a clamp position adjusting means for driving the clamp constituting the tension unit up and down, if the clamp is not fixed to the mask sheet in place By compensating for the error, a large area mask applied to a large area substrate can be manufactured without error.

Furthermore, when the thin films are formed on the substrate using a mask manufactured according to the present invention, productivity may be improved.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention; The following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms.

3 is a view showing a vertical deposition mask manufacturing apparatus according to a first embodiment of the present invention. 4A to 4B are enlarged views of the tension unit according to the first embodiment of the present invention.

3, the vertical deposition mask manufacturing apparatus 100 according to the first embodiment of the present invention, the mask sheet vertical transfer portion for vertically transferring the mask sheet; A mask frame vertical transfer unit for vertically transferring the mask frame corresponding to the mask sheet, and a mask manufacturing unit for welding the transferred mask sheet and the mask frame to manufacture a mask.

In this case, the mask vertical transfer unit 110, the mask frame vertical transfer unit 130, and the mask manufacturing unit 120 may initially have a mask vertical transfer region 110 and a mask frame vertical transfer region (as shown in FIG. 3). 130, located in the mask manufacturing region 120.

3, the mask fabrication region 120 is positioned between the mask vertical transfer portion 110 and the mask frame vertical transfer region 130, and is vertically transferred from each of the transfer regions 110 and 130. The mask sheet and the mask frame are received and welded thereto.

The mask manufacturing unit 120 located in the mask manufacturing region 130 includes a tension unit 126 for bonding the mask sheet and the mask frame together. The tension unit 126 is configured to tension and fix the mask sheet to prevent bending of the mask sheet during vertical deposition of the mask sheet and the mask frame, thereby manufacturing a large area mask applied to a large area substrate without bending. Play a role.

The tension unit 126 includes a plurality of clamps 122 for supporting the mask sheet, tension means 124 for providing a tension force to the plurality of clamps, between the clamp 122 and tension means 124. It is configured to include a tensile force measuring means 123 is provided to measure the tensile force of the clamp 122.

At this time, the tension unit 126 is formed on each of the four circumferential sides of the rectangular frame 121 having a central opening. That is, as shown, a plurality of clamps 122, tensile force measuring means 123, tension means 124 are formed on each of the four sides of the frame 121 to tension and fix the mask sheet located inside the frame. Support.

However, in the embodiment of the present invention is characterized in that the clamp position adjusting means 125 for moving the clamp 122 formed on the left, right side of the frame 121 up and down is further provided.

This is a problem in that when an error occurs in the support area of the mask sheet fixed to the clamp 122 and an alignment error between the mask sheet and the mask frame, the mask sheet needs to be detached from the clamp 122 and then fixed again to the clamp 122. It is to prevent. In addition, the clamp 122 for supporting the mask sheet can tension the mask sheet only to the left and right, so as to easily move the upper and lower errors in the support region of the mask sheet.

The clamp position adjusting means 125 transfers the clamp 122 in the up and down directions to adjust the position of the clamp 122 fixed to the mask sheet. The support area error of the sheet can be compensated for. By compensating for the error in the support area of the mask sheet, the mask sheet can be positioned in position, and more accurate welding is possible when welding the mask frame.

The plurality of clamps 122 are formed in the vertical and horizontal directions with respect to the ground as shown in FIG. 3, and fix the edge region of the mask sheet.

In addition, the plurality of tension means 124 is connected to each of the clamps 122 to support the plurality of clamps 122 respectively connected, and apply a tensile force to the plurality of clamps 122 connected to the clamp ( It serves to fix the mask sheet fixed by 122) flat. That is, the tension means 124 applies a tensile force to the clamp 122 to tension the mask sheet fixed to the clamp 122, thereby preventing the mask sheet from bending.

In addition, between the plurality of clamps 122 and the tension means 124 is provided with a tensile force measuring means 123 for measuring the tensile force of the clamp 122. Tensile force measuring means 123 measures the tensile force by the pneumatic pressure supplied from the tension means 124, serves to measure the tensile force transmitted to the clamp 122.

At this time, the tensile force measuring means 123 is a piezoelectric element (not shown) for detecting a change in the tensile force of the clamp 122, and the tensile means 124 when the tensile force of the measured clamp is different from the predetermined value Electro-pneumatic regulator (not shown) for adjusting the air pressure supplied to the configuration is included.

That is, the tensile force measuring means 123 is a piezoelectric element built in the tensile force measuring means 123 changes when the tensile force of the clamp 122 changes, so that the magnitude of the tensile force can be known through the current generated therein. do.

In addition, when the tensile force of the clamp 122 measured by the tensile force measuring means 123 is measured differently from the preset value, by adjusting the pneumatic pressure supplied to the tension means 124 in the electric regulator to adjust the tensile force of the clamp 122 Adjust

For example, if the tensile force of the clamp 122 is smaller than the set tensile force, by increasing the pneumatic pressure supplied to the tension means 124 to adjust the tensile force greatly, and when the tensile force of the clamp 122 is greater than the set tensile force, the tension means The tensile force is adjusted small by reducing the pneumatic pressure supplied to 124.

In this case, the plurality of clamps 122, the tensioning means 124, and the tensile force measuring means 123 are formed on the frame 121 formed around the inside of the mask manufacturing part 120.

Clamp position adjusting means 125 is provided in the tension unit 126 formed on the left and right sides of the frame 121, the clamp of the tension unit 126 formed on the left and right sides of the frame 121 ( 122) can be moved up and down.

To this end, the clamp position adjusting means 125 is provided with a body portion 125a on the upper and lower surfaces of the frame and clamp 122, and a hole in the body portion 125a corresponding to the lower surface of the clamp 122. 125b is formed, and the adjusting part 125c is provided inside and outside the hole 125b. In addition, the adjusting part 125c provided in the hole 125b may be inclined to change the position of the clamp 122 by changing the position of the adjusting part 125c.

In addition, an elastic member 125e is provided between the upper surface of the clamp 122 and the body portion 125a so that the clamp 122 supported by the support 125d is moved to the upper surface of the body portion 125a. It can prevent. In addition, a support 125d may be provided between the lower surface of the clamp 122 and the body portion 125a to adjust the position of the clamp 122.

Looking at the driving method of the clamp position adjusting means 125, by turning the adjusting portion (125d) formed in the clamp position adjusting means 125 clockwise or counterclockwise to move the clamp 122 to the upper or lower.

That is, when an error occurs in the support region of the mask sheet, it is possible to fix the clamp 122 to the correct position of the mask sheet by moving the clamp 122 as desired using the clamp position adjusting means 125.

The mask manufacturing region 120 is provided with welding means 127 for welding the mask sheet and the mask frame. At this time, the welding means 127 may be formed as a laser welder as an embodiment.

The welding means 127 serves to weld the mask sheet tensioned and fixed by the tensioning unit 126 and the joint surface of the mask frame corresponding to the mask sheet, and by the welding means 127. Welding may be performed by spot welding or seam welding in which welding is continuously performed on the joint surface.

The mask sheet vertical transfer unit 110 for vertically transferring the mask sheet to the mask manufacturing region 120 is positioned in the initial mask sheet vertical transfer region 110, which is a first carrier 113 for transferring the mask sheet and the A first guide rail 141 is included to facilitate the movement of the first carrier 113. At this time, the first carrier 113 and the first guide rail 141 are coupled to each other by the first plate 114.

At this time, the first guide rail 141 is a rail for conveying the mask sheet to the left and right as shown in FIG. 3, which is a mask sheet passing through the mask manufacturing region 120 in the mask sheet vertical conveying region 110. It extends to the frame vertical transfer area 130.

Accordingly, the first guide rail 141 may be formed as a guide in which a pair of grooves parallel to the lower end surface of the mask frame vertical transfer region 130 is formed from the lower end surface of the mask sheet vertical transfer region 110.

 In addition, a second guide rail 142 is formed on the first plate 114 to move the first carrier 113 in a forward and backward direction, which is a first plate on which the first carrier 113 is installed. A pair of grooves parallel from the front to the rear of the 114 may be formed as a guide.

In addition, the upper side of the first carrier 113 is further provided with a first adsorption member 111 for adsorbing it in order to transfer the mask sheet vertically, a plurality of adsorption holes on the front of the first adsorption member 111 112 may be formed to adsorb the mask sheet to the first adsorption member 111.

In addition, the first ball screw 117 and the first motor 115 are installed on the left side or the right side of the first plate 114, and the first carrier 113 can be moved in left and right directions. The second ball screw 118 and the second motor 116 are installed on the front or rear surface of the first carrier 113 to move the first carrier 113 in the front and rear directions.

That is, as the first ball screw 117 is rotated using the first motor 115, the first plate 114 is moved in the left and right directions. In addition, as the second ball screw 118 is rotated using the second motor 116, the first carrier 113 is moved forward and backward.

The mask frame vertical transfer unit 130 for vertically transferring the mask frame to the mask manufacturing region 120 is positioned in the first mask frame vertical transfer region 130, which is the second carrier 137 and the first carrier for transferring the mask frame. The first guide rail 141 is included to facilitate the movement of the two carriers 137. At this time, the second carrier 137 and the first guide rail 141 are coupled to each other by the second plate 138.

In this case, as described above, the first guide rail 141 may be formed as a guide having a pair of grooves formed from the lower end surface of the mask sheet vertical transfer region 110 to the lower end surface of the mask frame vertical transfer region 130. Can be.

 In addition, a third guide rail 143 is formed on the second plate 138 to move the second carrier 137 in a forward and backward direction, which is a second plate provided with the second carrier 137. It may be formed of a guide formed with a pair of grooves in parallel from the front to the rear of the (138).

In addition, a second adsorption member 131 is further provided on the upper side of the second carrier 137 to adsorb the mask frame vertically, and a plurality of adsorption holes are provided on the front surface of the second adsorption member 131. 132 is formed to adsorb the glass substrate 133. The glass substrate 133 is provided to align the mask sheet and the mask frame. At least two alignment marks 134 are formed at the corners of the glass substrate 133 to align the mask sheet and the mask frame. Can be.

A mask frame suction part 135 is further formed on the outermost side of the second suction member 131 to bond the mask frame around the glass substrate 133. In addition, at least three mask frame fixing blocks 136 are further provided at corners of the second suction member 131 to prevent detachment of the mask frame adsorbed to the mask frame suction part 135. In the embodiment shown in FIG. 3, for convenience of description, a mask frame fixing block 136 is installed in the entire corner of the second suction member 131.

When the mask frame is adsorbed on the mask frame suction unit 135, the mask frame fixing block 136 protrudes a cylinder (not shown) provided in the mask frame fixing block 136 to the outside, thereby masking the mask frame. It may be prevented from being removed or moved from the frame suction unit 135. That is, the mask frame fixing block 136 supports the mask frame adsorbed by the mask frame suction unit 135 in a double manner to more stably support the mask frame.

In addition, the third ball screw 140 and the third motor 139 may be installed on the left side or the right side of the second plate 138 to move the second carrier 137 in the left and right directions. In addition, a fourth ball screw (not shown) and a fourth motor (not shown) may be installed on the front or rear surface of the second carrier 137 to move the second carrier 137 in the front and rear directions.

5A and 5B are perspective views showing the driving method of the clamp position adjusting means of the present invention.

FIG. 5A is a view illustrating the movement of the clamp 122 upward by using the clamp position adjusting means 125. The adjusting part 125c is rotated clockwise to adjust the adjusting part 125 in the groove 125b. Positioning it inward to move the support (125d) located on the adjuster (125c) in the upper direction. Accordingly, the clamp 122 located above the support 125d is moved upward. In addition, the elastic member 125e provided between the upper surface of the clamp 122 and the body portion 125a may be compressed to prevent the clamp 122 from moving.

On the contrary, FIG. 5B is a view illustrating the movement of the clamp 122 in the downward direction by using the clamp position adjusting means 125. The adjusting part 125c is rotated counterclockwise, and the upper part of the adjusting part 125c is used. Move the support (125d) located in the downward direction. Accordingly, the clamp 122 located above the support 125d is moved downward. In addition, the elastic member 125e provided between the upper surface of the clamp 122 and the body portion 125a may be expanded to prevent the clamp 122 from moving.

6 is a perspective view showing a vertical deposition mask manufacturing apparatus according to a second embodiment of the present invention.

However, the description of the components overlapping with FIG. 3 will be omitted.

The second embodiment shown in FIG. 6 is generally the same as the configuration of the embodiment shown in FIG. 3, but the first plate 242 and the second plate 238 in the mask frame vertical transfer area are connected to the connection member 250. There is a difference in that the left and right movements are simultaneously connected to each other by.

That is, as an example, as shown in FIG. 3, the first plate 242 and the first plate 242 and the first ball screw 117 are formed using only the first motor 115 and the first ball screw 117 formed on the right side of the first plate 142. The two plates 238 can be moved left and right at the same time.

Accordingly, since the second embodiment uses fewer motors than the first embodiment, the vertical deposition mask manufacturing apparatus can be formed more simply.

The mask manufactured through the vertical deposition mask manufacturing apparatus according to the above-described embodiment is an organic light emitting display device (OLED), a liquid crystal display (LCD), a field emission display (FED), a plasma display panel (ELP), or an ELD ( It will be apparent to those skilled in the art that the present invention can be applied to Electro Luminescent Display, and Vacuum Fluorescent Display.

As described above, the preferred embodiment of the present invention has been disclosed through the detailed description and the drawings. The terms are used only for the purpose of describing the present invention and are not used to limit the scope of the present invention as defined in the meaning or claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1 is a perspective view showing a mask in which a general mask sheet and a mask frame are welded.

2 is a diagram showing deflection of a mask.

Figure 3 is a perspective view showing a vertical deposition mask manufacturing apparatus according to an embodiment of the present invention.

4A to 4B are enlarged views of the tension unit according to the embodiment of the present invention.

5A and 5B are perspective views showing a driving method of the clamp position adjusting means of the present invention.

Figure 6 is a perspective view showing a vertical deposition mask manufacturing apparatus according to a second embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

111: first adsorption member 112: adsorption port

113: first carrier 114: first plate

115: first motor 116: second motor

117: ball screw 121: frame

122: clamp 123: tensile force measuring means

124: tension means 125: clamp position adjustment means

Reference numeral 126: tensioning unit 127: welding means 131: second suction member 132: suction hole 133: glass substrate 134: alignment mark 135: mask frame suction part 136: mask frame fixing block 137: second carrier 138: second plate

Claims (16)

A mask frame in which a mask sheet is vertically positioned on one surface; A plurality of tension units disposed around the mask frame and configured to tension and fix the mask sheet; And Welding means for joining a peripheral region of the mask sheet to the mask frame, The tension unit includes a plurality of clamps for fixing the edge area of the mask sheet; A plurality of tensioning means for tensioning the mask sheet by providing a tension force to the plurality of clamps; And Vertical deposition mask manufacturing apparatus comprising a clamp position adjusting means for adjusting the position of the clamp to compensate for the error in the support region of the mask sheet. The vertical deposition according to claim 1, wherein the tension units are formed on four circumferential sides of the rectangular frame having a central opening, and the clamp position adjusting means is provided on tension units formed on the left and right sides of the frame. Type mask manufacturing equipment. The method of claim 2, wherein the clamp position adjusting means A body part formed on the frame and connected to a lower surface and an upper surface of the clamp; An elastic member formed between an upper surface of the clamp and a body portion; A support provided between the lower surface of the clamp and the body to support the clamp; Vertical deposition mask manufacturing apparatus characterized in that it comprises a control unit corresponding to the lower surface of the clamp to move the support up or down. The method of claim 1, Vertical clamping mask manufacturing apparatus characterized in that the tension between the clamp and the tension means is further provided for measuring the tensile force of the clamp. The method of claim 4, wherein The tensile force measuring means, A piezoelectric element for detecting a change in tensile force of the clamp; And a pore regulator for adjusting the pneumatic pressure supplied to the tensioning means when the measured tensile force of the clamp is different from a preset value. The method of claim 1, Further comprising a mask sheet vertical transfer unit for transferring the mask sheet to the tension unit in a standing state, The mask sheet vertical transfer unit, A first carrier for transporting the mask sheet; A first adsorption member positioned above the first carrier to adsorb a mask sheet; A first guide rail for moving the first carrier in the direction of the tension unit; And a first plate coupled between the first carrier and the first guide rail, the first plate lowering and raising the first carrier by 90 °. The method of claim 6, And a second guide rail is further formed on the first plate to move the first carrier in a direction perpendicular to the direction of the tension unit. The method of claim 6, Vertical deposition type mask manufacturing apparatus, characterized in that at least one adsorption port for adsorbing the mask sheet is formed on the front surface of the first adsorption member. The method of claim 1, Further comprising a mask frame vertical transfer unit for transferring the mask frame to the tension unit in an upright position, The mask frame vertical transfer unit, A second carrier for conveying the mask frame; A second adsorption member positioned above the second carrier to adsorb a mask frame; A first guide rail for moving the second carrier in the direction of the tension unit; And a second plate coupled between the second carrier and the first guide rail, the second plate lowering and raising the second carrier by 90 °. The method of claim 9, And a third guide rail is further formed on the second plate to move the second carrier in a direction perpendicular to the direction of the tension unit. The method of claim 9, The first guide rail is a vertical deposition mask manufacturing apparatus, characterized in that formed with a guide formed with a pair of parallel grooves from the lower end of the mask vertical transfer portion to the lower end of the mask frame vertical transfer portion. The method of claim 9, The second adsorption member, At least one adsorption port for adsorbing a glass substrate; And a mask frame suction unit for bonding the mask frame to the circumference of the glass substrate. The method of claim 12, And at least one alignment mark is formed on the glass substrate to align the mask sheet and the mask frame. The method of claim 9, The second adsorption member is a vertical deposition mask manufacturing apparatus, characterized in that a plurality of mask frame fixing block is further provided to prevent detachment of the mask frame adsorbed to the mask frame suction. The method of claim 14, Vertical mask mask manufacturing apparatus, characterized in that the inside of the mask frame fixing block is provided with a cylinder protruding out of the mask fixing block. The method according to claim 6 or 9, And a connecting member connecting the mask sheet vertical transfer unit and the mask frame vertical transfer unit to move the mask sheet vertical transfer unit and the mask frame vertical transfer unit at the same time.

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