TWI686624B - 電流計式掃描器及雷射加工機 - Google Patents

電流計式掃描器及雷射加工機 Download PDF

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Publication number
TWI686624B
TWI686624B TW108102928A TW108102928A TWI686624B TW I686624 B TWI686624 B TW I686624B TW 108102928 A TW108102928 A TW 108102928A TW 108102928 A TW108102928 A TW 108102928A TW I686624 B TWI686624 B TW I686624B
Authority
TW
Taiwan
Prior art keywords
galvanometer scanner
laser
light
hub
laser light
Prior art date
Application number
TW108102928A
Other languages
English (en)
Chinese (zh)
Other versions
TW201932911A (zh
Inventor
中筋淑江
船岡幸治
貴島拓己
村上和也
八原昌亨
内山研吾
高橋尚弘
Original Assignee
日商三菱電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商三菱電機股份有限公司 filed Critical 日商三菱電機股份有限公司
Publication of TW201932911A publication Critical patent/TW201932911A/zh
Application granted granted Critical
Publication of TWI686624B publication Critical patent/TWI686624B/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
TW108102928A 2018-01-26 2019-01-25 電流計式掃描器及雷射加工機 TWI686624B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2018-011263 2018-01-26
JP2018011263 2018-01-26
??PCT/JP2019/001202 2019-01-17
WOPCT/JP2019/001202 2019-01-17
PCT/JP2019/001202 WO2019146481A1 (ja) 2018-01-26 2019-01-17 ガルバノスキャナおよびレーザ加工機

Publications (2)

Publication Number Publication Date
TW201932911A TW201932911A (zh) 2019-08-16
TWI686624B true TWI686624B (zh) 2020-03-01

Family

ID=67395965

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108102928A TWI686624B (zh) 2018-01-26 2019-01-25 電流計式掃描器及雷射加工機

Country Status (5)

Country Link
JP (1) JP6808077B2 (ja)
KR (1) KR102439918B1 (ja)
CN (1) CN111656250B (ja)
TW (1) TWI686624B (ja)
WO (1) WO2019146481A1 (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003307700A (ja) * 2002-04-18 2003-10-31 Mitsubishi Electric Corp ガルバノスキャナ
TW200730286A (en) * 2005-10-11 2007-08-16 Gsi Group Corp Optical metrological scale and laser-based manufacturing method therefor
JP2011203632A (ja) * 2010-03-26 2011-10-13 Mitsubishi Electric Corp ガルバノスキャナ
CN103529507A (zh) * 2012-07-06 2014-01-22 三菱电机株式会社 偏振光相位差板以及激光加工机
TW201411186A (zh) * 2012-06-08 2014-03-16 Mitsubishi Electric Corp 電流鏡掃描器及雷射加工機

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0663542B2 (ja) * 1986-03-31 1994-08-22 日本精工株式会社 スピンドルユニツト
JP2782923B2 (ja) 1990-06-21 1998-08-06 松下電器産業株式会社 自走式掃除機
JP3511359B2 (ja) * 1998-02-27 2004-03-29 三菱電機株式会社 レーザ加工装置
US20070291382A1 (en) * 2006-06-16 2007-12-20 Pinard Adam I Mirror mounting structures and methods employing shape memory materials for limited rotation motors and scanners
JP4531022B2 (ja) * 2006-08-18 2010-08-25 住友重機械工業株式会社 ビームスキャナ
JP5936574B2 (ja) * 2012-07-06 2016-06-22 三菱電機株式会社 偏光位相差板およびレーザ加工機
JP6234231B2 (ja) * 2014-01-07 2017-11-22 キヤノン株式会社 駆動装置および物品処理装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003307700A (ja) * 2002-04-18 2003-10-31 Mitsubishi Electric Corp ガルバノスキャナ
TW200730286A (en) * 2005-10-11 2007-08-16 Gsi Group Corp Optical metrological scale and laser-based manufacturing method therefor
JP2011203632A (ja) * 2010-03-26 2011-10-13 Mitsubishi Electric Corp ガルバノスキャナ
TW201411186A (zh) * 2012-06-08 2014-03-16 Mitsubishi Electric Corp 電流鏡掃描器及雷射加工機
CN103529507A (zh) * 2012-07-06 2014-01-22 三菱电机株式会社 偏振光相位差板以及激光加工机

Also Published As

Publication number Publication date
JPWO2019146481A1 (ja) 2020-07-16
CN111656250B (zh) 2022-12-06
JP6808077B2 (ja) 2021-01-06
KR20200100130A (ko) 2020-08-25
TW201932911A (zh) 2019-08-16
KR102439918B1 (ko) 2022-09-02
WO2019146481A1 (ja) 2019-08-01
CN111656250A (zh) 2020-09-11

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