TWI679671B - 多模式脈衝程序中程序點偵測用之控制器、方法及電腦可讀取媒體 - Google Patents
多模式脈衝程序中程序點偵測用之控制器、方法及電腦可讀取媒體 Download PDFInfo
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- TWI679671B TWI679671B TW104134173A TW104134173A TWI679671B TW I679671 B TWI679671 B TW I679671B TW 104134173 A TW104134173 A TW 104134173A TW 104134173 A TW104134173 A TW 104134173A TW I679671 B TWI679671 B TW I679671B
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- 238000000034 method Methods 0.000 title claims abstract description 94
- 230000008569 process Effects 0.000 title description 24
- 238000012545 processing Methods 0.000 claims abstract description 81
- 238000000491 multivariate analysis Methods 0.000 claims abstract description 11
- 235000012431 wafers Nutrition 0.000 claims description 118
- 238000001228 spectrum Methods 0.000 claims description 25
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000005070 sampling Methods 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 8
- 238000000295 emission spectrum Methods 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 24
- 238000005530 etching Methods 0.000 description 21
- 238000003860 storage Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 14
- 238000001514 detection method Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 3
- 238000013500 data storage Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000001636 atomic emission spectroscopy Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000819 phase cycle Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
- H01J37/32963—End-point detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462066330P | 2014-10-20 | 2014-10-20 | |
| US62/066,330 | 2014-10-20 | ||
| US14/523,770 US9640371B2 (en) | 2014-10-20 | 2014-10-24 | System and method for detecting a process point in multi-mode pulse processes |
| US14/523,770 | 2014-10-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201630028A TW201630028A (zh) | 2016-08-16 |
| TWI679671B true TWI679671B (zh) | 2019-12-11 |
Family
ID=54337130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104134173A TWI679671B (zh) | 2014-10-20 | 2015-10-19 | 多模式脈衝程序中程序點偵測用之控制器、方法及電腦可讀取媒體 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US9640371B2 (enExample) |
| EP (1) | EP3012855B1 (enExample) |
| JP (1) | JP2016082233A (enExample) |
| KR (1) | KR102623688B1 (enExample) |
| CN (2) | CN105679688B (enExample) |
| SG (1) | SG10201508634SA (enExample) |
| TW (1) | TWI679671B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI893072B (zh) * | 2020-03-17 | 2025-08-11 | 日商東京威力科創股份有限公司 | 偵測方法及電漿處理裝置 |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9640371B2 (en) * | 2014-10-20 | 2017-05-02 | Lam Research Corporation | System and method for detecting a process point in multi-mode pulse processes |
| JP6356615B2 (ja) * | 2015-02-06 | 2018-07-11 | 東芝メモリ株式会社 | 半導体製造装置および半導体製造方法 |
| US10522429B2 (en) * | 2015-11-30 | 2019-12-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of manufacturing semiconductor device |
| US20170330764A1 (en) * | 2016-05-12 | 2017-11-16 | Lam Research Corporation | Methods and apparatuses for controlling transitions between continuous wave and pulsing plasmas |
| CN107644811B (zh) * | 2016-07-20 | 2020-05-22 | 中微半导体设备(上海)股份有限公司 | 博世工艺的刻蚀终点监测方法以及博世刻蚀方法 |
| US10546748B2 (en) | 2017-02-17 | 2020-01-28 | Lam Research Corporation | Tin oxide films in semiconductor device manufacturing |
| CN111771264A (zh) | 2018-01-30 | 2020-10-13 | 朗姆研究公司 | 在图案化中的氧化锡心轴 |
| US11209478B2 (en) * | 2018-04-03 | 2021-12-28 | Applied Materials, Inc. | Pulse system verification |
| CN110648888B (zh) * | 2018-06-27 | 2020-10-13 | 北京北方华创微电子装备有限公司 | 射频脉冲匹配方法及其装置、脉冲等离子体产生系统 |
| US10748823B2 (en) | 2018-09-27 | 2020-08-18 | International Business Machines Corporation | Embedded etch rate reference layer for enhanced etch time precision |
| WO2020106297A1 (en) * | 2018-11-21 | 2020-05-28 | Lam Research Corporation | Method for determining cleaning endpoint |
| CN111238669B (zh) * | 2018-11-29 | 2022-05-13 | 拓荆科技股份有限公司 | 用于半导体射频处理装置的温度测量方法 |
| KR20250008974A (ko) * | 2019-06-27 | 2025-01-16 | 램 리써치 코포레이션 | 교번하는 에칭 및 패시베이션 프로세스 |
| TW202309969A (zh) * | 2021-05-06 | 2023-03-01 | 日商東京威力科創股份有限公司 | 電漿處理裝置及終點檢測方法 |
| GB202109722D0 (en) * | 2021-07-06 | 2021-08-18 | Oxford Instruments Nanotechnology Tools Ltd | Method of etching or depositing a thin film |
| KR20250065369A (ko) * | 2022-09-08 | 2025-05-12 | 램 리써치 코포레이션 | 반도체 장비의 상태의 멀티-센서 결정 |
| US20240339309A1 (en) * | 2023-04-10 | 2024-10-10 | Tokyo Electron Limited | Advanced OES Characterization |
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| US20040238489A1 (en) * | 2003-05-09 | 2004-12-02 | David Johnson | Envelope follower end point detection in time division multiplexed processes |
| US20050006341A1 (en) * | 2003-07-07 | 2005-01-13 | Applied Materials, Inc. | Interferometric endpoint detection in a substrate etching process |
| US20060006139A1 (en) * | 2003-05-09 | 2006-01-12 | David Johnson | Selection of wavelengths for end point in a time division multiplexed process |
| TW200943459A (en) * | 2008-02-29 | 2009-10-16 | Applied Materials Inc | Advanced process sensing and control using near infrared spectral reflectometry |
| US20090308840A1 (en) * | 2006-09-19 | 2009-12-17 | Tokyo Electron Limited | Plasma cleaning method and plasma cvd method |
| CN101784778A (zh) * | 2007-08-21 | 2010-07-21 | 丰田自动车株式会社 | 车辆控制方法以及车辆控制装置 |
| TW201322329A (zh) * | 2011-08-22 | 2013-06-01 | Lam Res Corp | 快速交替製程之即時控制用的系統、方法及設備 |
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| JP3630931B2 (ja) * | 1996-08-29 | 2005-03-23 | 富士通株式会社 | プラズマ処理装置、プロセスモニタ方法及び半導体装置の製造方法 |
| JPH11243078A (ja) | 1997-02-10 | 1999-09-07 | Hitachi Ltd | プラズマ終点判定方法 |
| JP2003524753A (ja) * | 1998-04-23 | 2003-08-19 | サンディア コーポレーション | プラズマ処理操作を監視する方法及び装置 |
| US6566272B2 (en) * | 1999-07-23 | 2003-05-20 | Applied Materials Inc. | Method for providing pulsed plasma during a portion of a semiconductor wafer process |
| JP2001044171A (ja) | 1999-07-28 | 2001-02-16 | Matsushita Electric Ind Co Ltd | エッチング終点検出方法および装置 |
| JP2004134540A (ja) * | 2002-10-10 | 2004-04-30 | Dainippon Screen Mfg Co Ltd | ドライエッチング装置および終点検出方法 |
| US8257546B2 (en) * | 2003-04-11 | 2012-09-04 | Applied Materials, Inc. | Method and system for monitoring an etch process |
| US20050211668A1 (en) * | 2004-03-26 | 2005-09-29 | Lam Research Corporation | Methods of processing a substrate with minimal scalloping |
| FR2880470B1 (fr) | 2004-12-31 | 2007-04-20 | Cit Alcatel | Dispositif et procede pour le controle de la profondeur de gravure lors de la gravure alternee par plasma de substrats semi-conducteurs |
| US20080176149A1 (en) * | 2006-10-30 | 2008-07-24 | Applied Materials, Inc. | Endpoint detection for photomask etching |
| JP2008218898A (ja) * | 2007-03-07 | 2008-09-18 | Hitachi High-Technologies Corp | プラズマ処理装置 |
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| JP5170216B2 (ja) * | 2010-11-16 | 2013-03-27 | 株式会社デンソー | プラズマ発生装置 |
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| CN102931045B (zh) * | 2012-10-18 | 2015-08-26 | 中微半导体设备(上海)有限公司 | 刻蚀工艺监控信号的处理方法和刻蚀终点控制方法 |
| JP5384758B2 (ja) * | 2013-01-31 | 2014-01-08 | 株式会社日立ハイテクノロジーズ | プラズマエッチング装置 |
| CN103117202B (zh) | 2013-02-19 | 2015-09-09 | 中微半导体设备(上海)有限公司 | 等离子体处理工艺的终点检测装置及方法 |
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-
2014
- 2014-10-24 US US14/523,770 patent/US9640371B2/en active Active
-
2015
- 2015-10-09 JP JP2015200658A patent/JP2016082233A/ja active Pending
- 2015-10-13 EP EP15189588.5A patent/EP3012855B1/en active Active
- 2015-10-19 SG SG10201508634SA patent/SG10201508634SA/en unknown
- 2015-10-19 TW TW104134173A patent/TWI679671B/zh active
- 2015-10-19 KR KR1020150145313A patent/KR102623688B1/ko active Active
- 2015-10-20 CN CN201510683129.1A patent/CN105679688B/zh active Active
- 2015-10-20 CN CN201910203268.8A patent/CN110246743B/zh active Active
-
2017
- 2017-04-05 US US15/479,597 patent/US10242849B2/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040238489A1 (en) * | 2003-05-09 | 2004-12-02 | David Johnson | Envelope follower end point detection in time division multiplexed processes |
| US20060006139A1 (en) * | 2003-05-09 | 2006-01-12 | David Johnson | Selection of wavelengths for end point in a time division multiplexed process |
| US20050006341A1 (en) * | 2003-07-07 | 2005-01-13 | Applied Materials, Inc. | Interferometric endpoint detection in a substrate etching process |
| US20090308840A1 (en) * | 2006-09-19 | 2009-12-17 | Tokyo Electron Limited | Plasma cleaning method and plasma cvd method |
| CN101784778A (zh) * | 2007-08-21 | 2010-07-21 | 丰田自动车株式会社 | 车辆控制方法以及车辆控制装置 |
| TW200943459A (en) * | 2008-02-29 | 2009-10-16 | Applied Materials Inc | Advanced process sensing and control using near infrared spectral reflectometry |
| TW201322329A (zh) * | 2011-08-22 | 2013-06-01 | Lam Res Corp | 快速交替製程之即時控制用的系統、方法及設備 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI893072B (zh) * | 2020-03-17 | 2025-08-11 | 日商東京威力科創股份有限公司 | 偵測方法及電漿處理裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105679688A (zh) | 2016-06-15 |
| EP3012855B1 (en) | 2018-07-18 |
| JP2016082233A (ja) | 2016-05-16 |
| US20160111261A1 (en) | 2016-04-21 |
| US10242849B2 (en) | 2019-03-26 |
| US20170207070A1 (en) | 2017-07-20 |
| KR20160046309A (ko) | 2016-04-28 |
| EP3012855A1 (en) | 2016-04-27 |
| CN110246743A (zh) | 2019-09-17 |
| CN110246743B (zh) | 2022-12-20 |
| CN105679688B (zh) | 2019-04-16 |
| US9640371B2 (en) | 2017-05-02 |
| KR102623688B1 (ko) | 2024-01-10 |
| SG10201508634SA (en) | 2016-05-30 |
| TW201630028A (zh) | 2016-08-16 |
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