TWI675808B - Holder, holder unit and scoring device - Google Patents

Holder, holder unit and scoring device Download PDF

Info

Publication number
TWI675808B
TWI675808B TW104135767A TW104135767A TWI675808B TW I675808 B TWI675808 B TW I675808B TW 104135767 A TW104135767 A TW 104135767A TW 104135767 A TW104135767 A TW 104135767A TW I675808 B TWI675808 B TW I675808B
Authority
TW
Taiwan
Prior art keywords
holder
scoring
holding
pin
hole
Prior art date
Application number
TW104135767A
Other languages
Chinese (zh)
Other versions
TW201623171A (en
Inventor
地主貴裕
Takahiro Jinushi
佐佐木吉也
Yoshinari Sasaki
Original Assignee
日商三星鑽石工業股份有限公司
Mitsuboshi Diamond Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商三星鑽石工業股份有限公司, Mitsuboshi Diamond Industrial Co., Ltd. filed Critical 日商三星鑽石工業股份有限公司
Publication of TW201623171A publication Critical patent/TW201623171A/en
Application granted granted Critical
Publication of TWI675808B publication Critical patent/TWI675808B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
    • B28D7/046Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work the supporting or holding device being of the vacuum type
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

本發明係有鑑於因刻劃輪於銷軸方向移動而導致刻劃線之形成位置偏移之問題點而完成,目的在於提供一種使刻劃線之形成位置穩定,且不會產生從所欲之位置偏移的保持具、保持具單元及刻劃裝置。 The present invention is completed in view of the problem that the formation position of the scribe line is shifted due to the movement of the scribe wheel in the direction of the pin axis. Position shifted holder, holder unit and scoring device.

保持具單元30,具備刻劃輪40、貫通於刻劃輪之貫通孔的銷軸50、形成於保持具60之本體下部62的一對保持部63a、63b、及插通有銷軸的銷孔66a、66b,在保持部63a,形成有用於在與刻劃輪之側面41a對向之位置排出或吸引空氣的通氣孔70。 The holder unit 30 includes a scoring wheel 40, a pin 50 penetrating through a through hole of the scoring wheel, a pair of holding portions 63a, 63b formed in a lower portion 62 of the holder 60, and a pin inserted through the pin The holes 66a and 66b are formed in the holding portion 63a with a ventilation hole 70 for discharging or attracting air at a position facing the side surface 41a of the scoring wheel.

Description

保持具、保持具單元及刻劃裝置 Holder, holder unit and scoring device

本發明係有關於一種在玻璃基板等脆性材料基板之分斷中,於脆性材料基板之表面形成刻劃線時使用之保持具、保持具單元及刻劃裝置。 The present invention relates to a holder, a holder unit, and a scoring device used when a scribe line is formed on the surface of a brittle material substrate during the breaking of a brittle material substrate such as a glass substrate.

在將玻璃基板等脆性材料基板分斷成所欲之尺寸時,一般而言係使用刻劃裝置。該刻劃裝置,在用於保持刻劃輪之保持具安裝刻劃輪而使用。此外,該刻劃輪,藉由在形成於保持具之保持部的銷孔、與形成於刻劃輪之側面的貫通孔插入圓柱狀之銷軸,而被保持於保持部間(保持槽)。 When cutting a brittle material substrate such as a glass substrate into a desired size, a scoring device is generally used. This scoring device is used by attaching a scoring wheel to a holder for holding the scoring wheel. The scoring wheel is held between the holding portions (holding grooves) by inserting a cylindrical pin into a pin hole formed in the holding portion of the holder and a through hole formed in a side surface of the scoring wheel. .

而且,安裝於保持具之刻劃輪,被保持成旋轉自如,藉由在脆性材料基板之表面一邊旋轉一邊前進,而在脆性材料基板形成刻劃線。另外,作為這種刻劃裝置,例如有專利文獻1中記載般之刻劃裝置。 Furthermore, the scribe wheel mounted on the holder is held so as to be rotatable, and the scribe line is formed on the brittle material substrate by advancing while rotating on the surface of the brittle material substrate. Further, as such a scoring device, there is a scoring device described in Patent Document 1, for example.

專利文獻1:國際專利公開WO2007/063979號公報 Patent Document 1: International Patent Publication WO2007 / 063979

安裝於保持具之刻劃輪,如上述般為了形成刻劃線而必須在保持槽中進行旋轉。因此,保持槽之寬度稍微較刻劃輪之厚度寬,以在刻劃輪與保持部之間確保間隙。具體而言,在刻劃輪之厚度為0.65mm的情形時,使保持槽之寬度再寬0.02mm左右。如此,藉由在刻劃輪與保持部之間 存在有間隙,而將刻劃輪保持成旋轉自如。 As described above, the scoring wheel attached to the holder must be rotated in the holding groove in order to form a scribe line. Therefore, the width of the holding groove is slightly wider than the thickness of the scribe wheel to ensure a gap between the scribe wheel and the holding portion. Specifically, when the thickness of the scoring wheel is 0.65 mm, the width of the holding groove is further increased by about 0.02 mm. As such, between the scribe wheel and the holding portion There is a gap and the scoring wheel is kept free to rotate.

另一方面,由於該間隙,將使刻劃輪可在保持槽內沿銷軸移動0.02mm左右。因此,在形成刻劃線時,因刻劃輪於銷軸方向移動,而使刻劃線之形成位置變不穩定,在習知的刻劃裝置中,存在有刻劃線從所欲之位置偏移的問題。 On the other hand, due to this gap, the scoring wheel can move about 0.02 mm along the pin axis in the holding groove. Therefore, when the scribe line is formed, the scribe line moves in the direction of the pin axis, so that the position where the scribe line is formed becomes unstable. In the conventional scoring device, there is a scribe line from a desired position. The problem of offset.

本發明係有鑑於上述之因刻劃輪於銷軸方向移動而導致刻劃線之形成位置偏移之問題點而完成的發明,目的在於提供一種使刻劃線之形成位置穩定,且不會產生從所欲之位置偏移的保持具、保持具單元及刻劃裝置。 The present invention is made in view of the above-mentioned problem points that the formation position of the scribe line is shifted due to the movement of the scribe wheel in the direction of the pin axis, and the object is to provide a stable formation position of the scribe line without A holder, a holder unit, and a scoring device shifted from a desired position are generated.

為了達成上述目的,本發明之保持具,具備本體部、形成在該本體部下方的一對保持部、及位於同軸上且分別形成在該保持部的銷孔,用於藉由貫通於刻劃輪之貫通孔並且插通於該銷孔之銷軸,將該刻劃輪旋轉自如地保持在該保持部間,其特徵在於:在該保持部,形成有用於在保持該刻劃輪時,在與該刻劃輪之側面對向之位置排出或吸引空氣的通氣孔。 In order to achieve the above object, the holder of the present invention includes a main body portion, a pair of holding portions formed below the main body portion, and pin holes located on the coaxial and formed in the holding portions, respectively, for penetrating through the scribe The penetrating hole of the wheel is inserted into the pin shaft of the pin hole, and the scoring wheel is rotatably held between the holding portions. The holding portion is formed with a holding portion for holding the scoring wheel. A vent hole that discharges or attracts air at a position opposite to the side of the scoring wheel.

根據本發明之保持具,藉由在刻劃輪被保持於保持部之狀態下透過通氣孔排出或吸引空氣,能限制因刻劃輪與保持部之間的間隙而導致的刻劃輪於銷軸方向之移動。因此,保持具能夠使刻劃線之形成位置穩定。 According to the holder of the present invention, the scoring wheel can be limited to the pin due to the gap between the scoring wheel and the holding portion by discharging or attracting air through the vent hole while the scoring wheel is held in the holding portion. Movement in the axis direction. Therefore, the holder can stabilize the formation position of the score line.

此外,在本發明之保持具中,該通氣孔僅形成在一對該保持部之一方。 Further, in the holder of the present invention, the vent hole is formed only on one side of the pair of holding portions.

根據本發明之保持具,由於刻劃輪往一方之保持部貼近,因 此更能限制刻劃輪於銷軸方向之移動。因此,保持具能夠使刻劃線之形成位置穩定。 According to the holder of the present invention, since the holder on one side of the scribing wheel is close to the holder, This can further limit the movement of the scoring wheel in the direction of the pin axis. Therefore, the holder can stabilize the formation position of the score line.

此外,在本發明之保持具中,該通氣孔與形成在該保持部之外側側面的側面通氣路連接,該側面通氣路與形成在該本體部之內部的本體通氣路連接。 Further, in the holder of the present invention, the ventilation hole is connected to a side ventilation path formed on an outer side surface of the holding part, and the side ventilation path is connected to a main body ventilation path formed inside the main body part.

根據本發明之保持具,能夠藉由保持具之加工簡單地形成與通氣孔連接之通氣路。 According to the holder of the present invention, it is possible to easily form a ventilation path connected to the vent hole by processing the holder.

此外,在本發明之保持具中,該銷孔兼為該通氣孔。 Moreover, in the holder of the present invention, the pin hole also serves as the vent hole.

根據本發明之保持具,由於在銷孔內產生空氣流動,因此能夠防止在形成刻劃線時所產生之碎屑往銷軸附著。此外,藉由在刻劃輪之中央部產生空氣流動,而能抑制刻劃中之刻劃輪傾斜。 According to the holder of the present invention, since the air flow is generated in the pin hole, it is possible to prevent the debris generated when the scribe line is formed from adhering to the pin shaft. In addition, by generating air flow in the central portion of the scribing wheel, it is possible to suppress the inclination of the scribing wheel during scribing.

此外,本發明之保持具單元,具備刻劃輪、貫通於該刻劃輪之貫通孔的銷軸、及保持具,該保持具具備本體部、形成在該本體部下方且保持該刻劃輪的一對保持部、及位於同軸上且分別形成在該保持部並且插通有該銷軸的銷孔,其特徵在於:在該保持部,形成有用於在與該刻劃輪之側面對向之位置排出或吸引空氣的通氣孔。 In addition, the holder unit of the present invention includes a scoring wheel, a pin penetrating through a through hole of the scoring wheel, and a holder having a main body portion formed below the main body portion and holding the scoring wheel. A pair of holding portions and pin holes that are coaxially formed on the holding portions and pass through the pin shafts are characterized in that the holding portions are formed to face the sides of the scoring wheel. A vent hole that discharges or attracts air.

根據本發明之保持具單元,藉由透過通氣孔排出或吸引空氣,能限制因刻劃輪與保持部之間的間隙而導致的刻劃輪於銷軸方向之移動。因此,保持具能夠使刻劃線之形成位置穩定。 According to the holder unit of the present invention, movement of the scoring wheel in the pin axis direction due to the gap between the scoring wheel and the holding portion can be restricted by exhausting or attracting air through the vent hole. Therefore, the holder can stabilize the formation position of the score line.

此外,在本發明之保持具單元中,該通氣孔僅形成在一對該保持部之一方。 Further, in the holder unit of the present invention, the vent hole is formed only on one side of the pair of holding portions.

根據本發明之保持具單元,由於刻劃輪往一方之保持部貼 近,因此更能限制刻劃輪於銷軸方向之移動。因此,保持具單元能夠使刻劃線之形成位置穩定。 According to the holder unit of the present invention, the scribe wheel is attached to one of the holders due to the scribing wheel. Therefore, the movement of the scoring wheel in the direction of the pin axis can be more restricted. Therefore, the holder unit can stabilize the formation position of the scribe line.

此外,在本發明之保持具單元中,該通氣孔與形成在該保持部之外側側面的側面通氣路連接,該側面通氣路與形成在該本體部之內部的本體通氣路連接。 Further, in the holder unit of the present invention, the ventilation hole is connected to a side ventilation path formed on an outer side surface of the holding part, and the side ventilation path is connected to a main body ventilation path formed inside the main body part.

根據本發明之保持具單元,能夠藉由保持具之加工簡單地形成與通氣孔連接之通氣路。 According to the holder unit of the present invention, it is possible to easily form a ventilation path connected to the vent hole by processing the holder.

此外,在本發明之保持具單元中,該側面通氣路,藉由固定在該保持部之外側側面的止擋件而封住表面。 Further, in the holder unit of the present invention, the side ventilation path seals the surface by a stopper fixed to an outer side surface of the holding portion.

根據本發明之保持具單元,與以樹脂或熔接(焊接)等封住側面通氣路之表面的情形相比,能夠更簡單地封住該表面。此外,該止擋件亦可作為防止銷軸拔出而利用。 According to the holder unit of the present invention, the surface can be sealed more easily than when the surface of the side air passage is sealed with resin, welding (welding), or the like. In addition, the stopper can also be used as a pull-out preventing pin.

此外,在本發明之保持具單元中,該銷孔兼為該通氣孔。 Further, in the holder unit of the present invention, the pin hole also serves as the vent hole.

根據本發明之保持具單元,由於在銷孔內產生空氣流動,因此能夠防止在形成刻劃線時所產生之碎屑往銷軸附著。此外,藉由在刻劃輪之中央部產生空氣流動,而能抑制刻劃中之刻劃輪傾斜。 According to the holder unit of the present invention, since the air flow is generated in the pin hole, it is possible to prevent the debris generated when the scribe line is formed from adhering to the pin shaft. In addition, by generating air flow in the central portion of the scribing wheel, it is possible to suppress the inclination of the scribing wheel during scribing.

此外,本發明之刻劃裝置,具備上述之保持具,且具有透過該通氣孔進行空氣之排出或吸引的吸排氣部。此外,本發明之刻劃裝置,具備上述之保持具單元,且具有透過該通氣孔進行空氣之排出或吸引的吸排氣部。 In addition, the scoring device of the present invention includes the above-mentioned holder, and has an air intake and exhaust unit that exhausts or sucks air through the vent hole. In addition, the scoring device of the present invention includes the holder unit described above, and has a suction / exhaust portion that discharges or sucks air through the vent hole.

根據本發明之刻劃裝置,藉由吸排氣部進行空氣之排出或吸引,藉此能限制因刻劃輪與保持部之間的間隙而導致的刻劃輪於銷軸方向 之移動。因此,刻劃裝置能夠使刻劃線之形成位置穩定。 According to the scoring device of the present invention, the air is exhausted or sucked by the suction and exhaust section, so that the scoring wheel caused by the gap between the scoring wheel and the holding section can be restricted to the pin axis Its movement. Therefore, the scoring device can stabilize the formation position of the scribe line.

1‧‧‧刻劃裝置 1‧‧‧ scoring device

10‧‧‧移動台 10‧‧‧mobile station

11‧‧‧滾珠螺桿 11‧‧‧ball screw

12‧‧‧導軌 12‧‧‧rail

13‧‧‧馬達 13‧‧‧ Motor

14‧‧‧平台 14‧‧‧platform

15‧‧‧脆性材料基板 15‧‧‧ Brittle material substrate

16‧‧‧CCD攝影機 16‧‧‧CCD camera

17‧‧‧橋架 17‧‧‧bridge

18a、18b‧‧‧支柱 18a, 18b

19‧‧‧導件 19‧‧‧Guide

20‧‧‧刻劃頭 20‧‧‧Scratch head

21a、21b‧‧‧軸承 21a, 21b‧‧‧bearing

22‧‧‧隔片 22‧‧‧ septa

23‧‧‧吸排氣部 23‧‧‧ Suction and exhaust section

24‧‧‧導管 24‧‧‧ Catheter

25‧‧‧連通孔 25‧‧‧Connecting hole

30‧‧‧保持具單元 30‧‧‧ holder unit

40‧‧‧刻劃輪 40‧‧‧ Scribing Wheel

41a、41b‧‧‧側面 41a, 41b ‧‧‧ side

50‧‧‧銷軸 50‧‧‧ pin

51‧‧‧尖頭部 51‧‧‧ pointed head

60、160‧‧‧保持具 60, 160‧‧‧ holder

61‧‧‧保持具上部 61‧‧‧ holder upper

62、162‧‧‧保持具下部 62, 162‧‧‧ lower holder

63a、63b、163a‧‧‧保持部 63a, 63b, 163a‧‧‧

64‧‧‧保持槽 64‧‧‧ holding groove

65a、65b、165a‧‧‧圓柱體 65a, 65b, 165a‧‧‧ cylinder

66a、66b、166a‧‧‧銷孔 66a, 66b, 166a ‧‧‧ pin holes

67a、67b‧‧‧保持壁 67a, 67b‧‧‧ Retaining wall

68、168‧‧‧螺釘安裝孔 68、168‧‧‧Screw mounting holes

70、170‧‧‧通氣孔 70, 170‧‧‧ Ventilation holes

71‧‧‧本體通氣路 71‧‧‧Body ventilation path

71a‧‧‧分歧通氣路 71a‧‧‧Different ventilation path

72、172‧‧‧側面通氣路 72, 172‧‧‧ side ventilation

73、173‧‧‧連結孔 73, 173‧‧‧ connecting holes

80a、80b‧‧‧固定螺釘 80a, 80b‧‧‧Fixing screws

81a、81b‧‧‧止擋件 81a, 81b‧‧‧ Stop

圖1,係實施形態1之刻劃裝置之概略圖。 FIG. 1 is a schematic view of a scoring device according to the first embodiment.

圖2(A),係實施形態1之保持具單元之前視圖;圖2(B),係保持具單元之側視圖。 Fig. 2 (A) is a front view of the holder unit of Embodiment 1; Fig. 2 (B) is a side view of the holder unit.

圖3(A),係構成實施形態1之保持具單元的保持具之前視圖;圖3(B),係保持具之側視圖;圖3(C),係圖3(B)之IIIC-IIIC線之剖面圖。 Fig. 3 (A) is a front view of a holder constituting the holder unit of Embodiment 1; Fig. 3 (B) is a side view of the holder; Fig. 3 (C) is a IIIC-IIIC of Fig. 3 (B) Sectional view of the line.

圖4(A),係圖3(B)之區域P之放大圖;圖4(B),係圖4(A)中所示之情形之從下方側觀看之立體圖;圖4(C),係圖4(A)之IVC-IVC線之剖面圖。 Fig. 4 (A) is an enlarged view of a region P in Fig. 3 (B); Fig. 4 (B) is a perspective view of the situation shown in Fig. 4 (A) viewed from the lower side; Fig. 4 (C), It is a sectional view taken along the line IVC-IVC in FIG. 4 (A).

圖5,係實施形態2之保持具之要部放大側視圖。 FIG. 5 is an enlarged side view of a main part of a holder in Embodiment 2. FIG.

以下,使用圖式說明本發明之實施形態。但是,以下所示之實施形態,係表示用於具體化本發明之技術思想的一例,並無意圖將本發明特定在該實施形態。本發明亦可適用於包含在申請專利範圍內的其他實施形態。 Hereinafter, embodiments of the present invention will be described using drawings. However, the embodiment shown below is an example for embodying the technical idea of the present invention, and it is not intended to limit the present invention to this embodiment. The present invention is also applicable to other embodiments included in the scope of patent application.

[實施形態1] [Embodiment 1]

圖1係本發明之實施形態之刻劃裝置1的概略圖。刻劃裝置1,具備移動台10。移動台10,與滾珠螺桿11螺合,該滾珠螺桿11藉由馬達之驅動旋轉,藉此可沿一對導軌12於y軸方向移動。 FIG. 1 is a schematic view of a scoring device 1 according to an embodiment of the present invention. The scoring device 1 includes a mobile station 10. The moving table 10 is screwed with a ball screw 11, and the ball screw 11 is rotated by a motor, thereby being movable along a pair of guide rails 12 in the y-axis direction.

在移動台10之上面,設置有馬達13。馬達13,使位於上部 之平台14在xy平面旋轉以定位於既定角度。可藉由馬達13水平旋轉之平台14,具備未圖示之真空吸附手段,藉由該真空吸附手段保持已載置於平台14上之脆性材料基板15。 A motor 13 is provided above the mobile station 10. Motor 13, so that it is located on the upper part The platform 14 is rotated in the xy plane to be positioned at a predetermined angle. The platform 14 that can be horizontally rotated by the motor 13 is provided with a vacuum suction means (not shown), and the vacuum suction means is used to hold the brittle material substrate 15 that has been placed on the platform 14.

該脆性材料基板15,係玻璃基板、由低溫燒成陶瓷或高溫燒成陶瓷構成之陶瓷基板、矽基板、化合物半導體基板、藍寶石基板、石英基板等。此外,脆性材料基板15,亦可為使薄膜或半導體材料附著、或包含在基板之表面或內部而成者。此外,脆性材料基板15,亦可在其表面附著有非相當於脆性材料的薄膜等。 The brittle material substrate 15 is a glass substrate, a ceramic substrate made of a low-temperature fired ceramic or a high-temperature fired ceramic, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. In addition, the fragile material substrate 15 may be formed by attaching a thin film or a semiconductor material to the surface or the inside of the substrate. In addition, the brittle material substrate 15 may have a film or the like other than a brittle material adhered to the surface thereof.

刻劃裝置1,在載置於平台14之脆性材料基板15的上方,具備拍攝形成於該脆性材料基板15表面之對準標記的二台CCD攝影機16。以跨越移動台10與其上部之平台14的方式,將橋架17架設於支柱18a、18b。 The scoring device 1 is provided with two CCD cameras 16 that photograph an alignment mark formed on the surface of the brittle material substrate 15 above the brittle material substrate 15 placed on the platform 14. A bridge 17 is erected on the pillars 18a, 18b so as to span the mobile station 10 and the upper platform 14 thereof.

在橋架17安裝有導件19,將刻劃頭20設置成由該導件19引導而於X軸方向移動。在刻劃頭20之下端,安裝有於保持具60保持刻劃輪40的保持具單元30。 A guide 19 is attached to the bridge 17, and the scoring head 20 is provided so as to be guided by the guide 19 and move in the X-axis direction. A holder unit 30 is attached to the lower end of the scoring head 20 to hold the scoring wheel 40 on the holder 60.

此處,概略地說明使用刻劃裝置1對脆性材料基板15形成刻劃線的步驟。首先,在安裝於刻劃頭20之保持具60安裝刻劃輪40。然後,刻劃裝置1,藉由一對CCD攝影機16進行脆性材料基板15之定位。接著,刻劃裝置1,使刻劃頭20移動至既定之位置,對刻劃輪40施加既定的負載,並使其接觸脆性材料基板15。然後,刻劃裝置1,藉由使刻劃頭20於X軸方向移動,而在脆性材料基板15的表面形成既定的刻劃線。另外,刻劃裝置1,視需要而使平台14旋動或於Y軸方向移動,以與上述之情形 同樣之方式形成刻劃線。 Here, a procedure for forming a score line on the brittle material substrate 15 using the scoring device 1 will be briefly described. First, the scoring wheel 40 is attached to a holder 60 attached to the scoring head 20. Then, the scribe device 1 performs positioning of the brittle material substrate 15 by a pair of CCD cameras 16. Next, the scoring device 1 moves the scoring head 20 to a predetermined position, applies a predetermined load to the scoring wheel 40, and contacts the scoring material substrate 15. Then, the scoring device 1 moves the scoring head 20 in the X-axis direction to form a predetermined scribe line on the surface of the brittle material substrate 15. In addition, the scoring device 1 rotates the platform 14 or moves in the Y-axis direction as necessary to meet the situation described above. A score line is formed in the same manner.

接下來,針對保持具單元30之細節,使用圖式進行說明。圖2(A)係保持具單元30之前視圖,圖2(B)係保持具單元30之側視圖。此外,圖3(A)係構成保持具單元30之保持具60之前視圖,圖3(B)係保持具60之側視圖,圖3(C)係沿圖3(B)之IIIC-IIIC線之剖面圖。此外,圖4(A)係圖3(B)之以一點鏈線圍繞之區域P之放大圖,圖4(B)係從圖4(A)中所示之部位之下方側觀看之立體圖,圖4(C)係沿圖4(A)之IVC-IVC線之剖面圖。另外,圖4(C)除了顯示保持具30之剖面外,同時亦顯示一部分構成保持具單元30之其他零件。此外,形成刻劃線時之保持具單元30之行進方向,係圖2(B)之以箭頭D所示之方向。 Next, details of the holder unit 30 will be described using drawings. FIG. 2 (A) is a front view of the holder unit 30, and FIG. 2 (B) is a side view of the holder unit 30. As shown in FIG. In addition, FIG. 3 (A) is a front view of the holder 60 constituting the holder unit 30, FIG. 3 (B) is a side view of the holder 60, and FIG. 3 (C) is taken along the line IIIC-IIIC of FIG. 3 (B). Section view. In addition, FIG. 4 (A) is an enlarged view of the area P surrounded by a one-point chain line in FIG. 3 (B), and FIG. 4 (B) is a perspective view viewed from the lower side of the portion shown in FIG. 4 (A). Fig. 4 (C) is a sectional view taken along the line IVC-IVC in Fig. 4 (A). In addition, FIG. 4 (C) shows a part of the holder unit 30 in addition to the cross section of the holder 30. In addition, the traveling direction of the holder unit 30 when forming the scribe line is a direction indicated by an arrow D in FIG. 2 (B).

保持具單元30,係刻劃輪40、圖4(C)所示之銷軸50、與保持具60成為一體而成。另外,在圖2中顯示有內藏於刻劃頭20且構成用於將保持具單元30安裝於刻劃頭20之保持具接頭(未圖示)的二個軸承21a、21b,以及圓筒形之隔片(spacer)22。 The holder unit 30 is integrally formed with the scoring wheel 40, the pin 50 shown in FIG. 4 (C), and the holder 60. In addition, FIG. 2 shows two bearings 21 a and 21 b and a cylinder, which are built in the scoring head 20 and constitute a holder joint (not shown) for mounting the holder unit 30 to the scoring head 20. Shaped spacer (22).

刻劃輪40,例如係以燒結金剛石或超硬合金等形成之圓板狀的構件。此外,在刻劃輪40,於圓板之兩側面41a、41b之中心形成有用於供銷軸50貫通之貫通孔。此外,在刻劃輪40,於外周部形成有形成稜線之V字狀刀刃。此外,本實施形態之刻劃輪40,厚度約0.65mm,外徑約2.0mm,貫通孔41之直徑約0.8mm,刀刃43之刃前角約130°。 The scoring wheel 40 is, for example, a disc-shaped member formed of sintered diamond or cemented carbide. In addition, in the scoring wheel 40, through-holes through which the pin shaft 50 penetrates are formed in the centers of both side surfaces 41a and 41b of the circular plate. Further, a V-shaped blade forming a ridgeline is formed on the outer peripheral portion of the scoring wheel 40. In addition, the scoring wheel 40 of this embodiment has a thickness of about 0.65 mm, an outer diameter of about 2.0 mm, a diameter of the through hole 41 of about 0.8 mm, and a rake angle of the blade 43 of about 130 °.

另外,刻劃輪40,除了以燒結金剛石或超硬合金形成之外,亦可由單結晶金剛石或多結晶金剛石構成。 In addition, the scoring wheel 40 may be formed of sintered diamond or cemented carbide, or may be composed of single crystal diamond or polycrystalline diamond.

銷軸50,例如係以燒結金剛石或超硬合金等形成之圓柱狀 的構件,如圖4(C)所示般其一端成為尖頭形狀之尖頭部51。此外,本實施形態之銷軸50之直徑約為0.8mm。 The pin 50 is, for example, a cylindrical shape made of sintered diamond or cemented carbide. As shown in FIG. 4 (C), the end of the member is a pointed portion 51 having a pointed shape. The diameter of the pin 50 in this embodiment is about 0.8 mm.

保持具60,例如係以SUS303等金屬形成。保持具60,以形成本體部之上方側之保持具上部61、及下方側之保持具下部62構成。保持具上部61,插入於構成上述之保持具接頭的二個軸承21a、21b、與隔片22。 The holder 60 is formed of a metal such as SUS303. The holder 60 includes a holder upper portion 61 on the upper side of the main body portion and a holder lower portion 62 on the lower side. The holder upper portion 61 is inserted into the two bearings 21a, 21b and the spacer 22 constituting the holder joint described above.

保持具下部62,例如圖3(B)所示般在側視觀察下,在下方側成為寬度逐漸變窄之梯形狀。保持具下部62之梯形狀部分,如圖3(A)所示般在前視觀察下,下方開放,形成有一對保持部63a、63b、及位於保持部63a、63b之間的保持槽64。 The lower portion 62 of the holder has a stepped shape with a gradually narrowing width on the lower side when viewed from the side as shown in FIG. 3 (B). As shown in FIG. 3 (A), the ladder-shaped portion of the lower portion 62 of the holder is opened downward, and a pair of holding portions 63a, 63b and holding grooves 64 between the holding portions 63a, 63b are formed.

此外,在保持部63a、63b,藉由硬焊(brazing)(熔接)分別在同軸位置固定有圓柱體65a、65b。而且,在圓柱體65a、65b,於同軸位置形成有供銷軸50插通之銷孔66a、66b。因此,刻劃輪40之側面41a與保持部63a之圓柱體65a對向,側面41b與保持部63b之圓柱體65b對向,與側面41a對向之圓柱體65a之對向面成為保持壁67a,與側面41b對向之圓柱體65b之對向面成為保持壁67b。另外,在各圖中,圓柱體65a、65b,以左右斜線產生之影線(hatching)顯示。 Further, cylindrical bodies 65a and 65b are fixed to the holding portions 63a and 63b at coaxial positions by brazing (welding), respectively. Pins 66a and 66b through which the pin shaft 50 is inserted are formed in the cylindrical bodies 65a and 65b at coaxial positions. Therefore, the side surface 41a of the scoring wheel 40 faces the cylindrical body 65a of the holding portion 63a, the side surface 41b faces the cylindrical body 65b of the holding portion 63b, and the facing surface of the cylinder 65a facing the side surface 41a becomes the holding wall 67a. The opposing surface of the cylindrical body 65b opposing the side surface 41b becomes a retaining wall 67b. In each drawing, the cylinders 65a and 65b are shown by hatching generated by left and right oblique lines.

此外,該圓柱體65a、65b,係為了抑制與刻劃輪40之側面41的摩擦並謀求旋轉精度之維持而安裝,由燒結金剛石或超硬合金構成。因此,該圓柱體65a、65b並非為必需,而是依據與刻劃輪40之材質等的關係而設於保持部63a、63b。另外,該圓柱體65a、65b之安裝方法等,具體而言可採用日本特開2011-240540號公報中記載之方法。此外,圓柱體65a、65b,在安裝步驟中,下端側被切斷。因此,圓柱體65a、65b,在各圖中以 下端被切斷之狀態顯示。 The cylinders 65a and 65b are mounted to suppress friction with the side surface 41 of the scoring wheel 40 and maintain rotation accuracy, and are made of sintered diamond or cemented carbide. Therefore, the cylinders 65a and 65b are not necessarily required, but are provided in the holding portions 63a and 63b in accordance with the relationship with the material and the like of the scoring wheel 40. In addition, as the mounting method of the cylindrical bodies 65a and 65b, specifically, the method described in Japanese Patent Application Laid-Open No. 2011-240540 can be adopted. In addition, the cylindrical bodies 65a and 65b are cut at the lower end side in the mounting step. Therefore, the cylinders 65a, 65b are represented by The status of the lower end being cut off is displayed.

如上述般之構成的保持具60,為了防止刻劃輪40於銷軸50方向移動所導致的刻劃線之形成位置之偏移,進一步具備為了使刻劃輪40之側面41a始終與保持壁67a分離而能夠排出空氣的通氣孔70、或為了將側面41a拉往保持壁67a而能夠吸引空氣的通氣孔70。以下,針對通氣孔70進行說明。 The holder 60 configured as described above is further provided to prevent the side surface 41a of the scribe wheel 40 and the retaining wall from shifting in the formation position of the scribe line caused by the scribe wheel 40 moving in the direction of the pin 50. 67a is a vent hole 70 capable of discharging air, or a vent hole 70 capable of sucking air in order to pull the side surface 41a toward the holding wall 67a. The ventilation holes 70 will be described below.

首先,在保持具上部61與保持具下部62之內部形成有本體通氣路71。該本體通氣路71,如圖3(C)所示,上下延伸於保持具上部61之內部中央,並且抵達至保持具下部62之保持槽64之稍微上方。此外,在與構成保持具接頭之隔片22的位置對應之位置,等間隔地形成4個連接本體通氣路71之分歧通氣路71a。 First, a body ventilation path 71 is formed inside the holder upper part 61 and the holder lower part 62. As shown in FIG. 3 (C), the main body ventilation path 71 extends up and down in the center of the inside of the upper portion 61 of the holder, and reaches slightly above the holding groove 64 of the lower portion 62 of the holder. In addition, at four positions corresponding to the positions of the spacers 22 constituting the holder joint, four branched air passages 71a connecting the body air passages 71 are formed at equal intervals.

此外,在保持具下部62,形成有貫通右側面與左側面之間的螺釘安裝孔68。此外,如圖3(B)所示,在保持部63a之外側側面S藉由形雕放電加工(die sinking EDM)形成連結銷孔66a與螺釘安裝孔68之間的側面通氣路72。 A screw mounting hole 68 is formed in the holder lower portion 62 and penetrates between the right side surface and the left side surface. In addition, as shown in FIG. 3 (B), a side air passage 72 connecting the pin hole 66a and the screw mounting hole 68 is formed on the outer side surface S of the holding portion 63a by die sinking EDM.

而且,在該側面通氣路72之中途形成有連接本體通氣路71之連結孔73。 Further, a connection hole 73 is formed in the side air passage 72 to connect to the main body air passage 71.

如此,在保持具60,形成有從保持具上部61之分歧通氣路71a開始,從分歧通氣路71a到達本體通氣路71、從本體通氣路71到達連結孔73、從連結孔73到達側面通氣路72之通氣路徑。而且,藉由側面通氣路72與銷孔66a重疊,保持具60成為通氣路徑與銷孔66a連接的構成。而且,在本實施形態中,通氣孔70成為兼為銷孔66a的構成。 In this way, in the holder 60, the branched air passage 71a from the holder upper part 61 is formed, and the branched air passage 71a reaches the main body airway 71, the main body airway 71 reaches the connection hole 73, and the connection hole 73 reaches the side airway. Ventilation path of 72. Further, the side ventilation passage 72 overlaps the pin hole 66a, and the holder 60 has a structure in which the ventilation path is connected to the pin hole 66a. Further, in the present embodiment, the vent hole 70 has a configuration that also serves as a pin hole 66a.

使用這種保持具60,將銷軸50插通於刻劃輪40之貫通孔並插通於一對保持部63a、63b之銷孔66a、66b,如圖2所示,使用螺釘安裝孔68與固定螺釘80a、80b分別安裝止擋件81a、81b,藉此構成保持具單元30。 Using this holder 60, the pin shaft 50 is inserted into the through hole of the scoring wheel 40 and the pin holes 66a and 66b of the pair of holding portions 63a and 63b. As shown in FIG. 2, a screw mounting hole 68 is used. Stoppers 81a and 81b are attached to the fixing screws 80a and 80b, respectively, thereby constituting the holder unit 30.

另外,該止擋件81a、81b,如圖4(C)所示,係以銷軸50不脫落的方式用於分別閉塞銷孔66a、66b。 In addition, as shown in FIG. 4 (C), the stoppers 81a and 81b are used to close the pin holes 66a and 66b so that the pin shaft 50 does not fall off.

而且,進一步地,止擋件81a,在閉塞銷孔66a時,封住露出於保持部63a之外側側面的側面通氣路72之表面。另外,側面通氣路72之表面亦可非藉由止擋件81a而是藉由樹脂或熔接等其他方法封住,但可藉由利用閉塞銷孔66a之止擋件81a而簡單地封住。 Furthermore, when the stopper 81a closes the pin hole 66a, the stopper 81a seals the surface of the side air passage 72 exposed on the outer side surface of the holding portion 63a. In addition, the surface of the side air passage 72 may be sealed by other methods such as resin or welding instead of the stopper 81a, but may be simply closed by using the stopper 81a of the closing pin hole 66a.

保持具單元30,通氣路徑藉由安裝止擋件81a而成為氣密狀態,以能夠從兼為銷孔66a之通氣孔70透過通氣路徑進行空氣之排出或吸引。 In the holder unit 30, the ventilation path is made airtight by attaching the stopper 81a, and air can be exhausted or sucked through the ventilation path from the ventilation hole 70, which also serves as the pin hole 66a.

而且,保持具單元30,能夠藉由從外部往分歧通氣路71a送入空氣而透過保持具60之通氣路徑從通氣孔70即銷孔66a排出空氣。由於從該銷孔66a排出之空氣,沿銷軸50按壓刻劃輪40之側面41a,因此,側面41a從保持壁67a離開,側面41b則被按壓在保持壁67b側。 In addition, the holder unit 30 can discharge air from the pin hole 66a, which is a vent hole 70, through the ventilation path of the holder 60 by sending air into the branched air passage 71a from the outside. The air discharged from the pin hole 66a presses the side surface 41a of the scoring wheel 40 along the pin shaft 50. Therefore, the side surface 41a is separated from the holding wall 67a, and the side surface 41b is pressed against the holding wall 67b.

因此,使刻劃輪40之側面41b與保持壁67b之間的間隙為零,且由於在形成刻劃線時,限制刻劃輪40沿銷軸50移動,因此刻劃裝置1能夠使刻劃線之形成位置穩定,而往所欲之位置形成刻劃線。另外,圖4(C)之虛線箭頭E,係概略性地顯示利用通氣路徑從通氣孔70排出空氣時之空氣之流動。 Therefore, the gap between the side surface 41b of the scoring wheel 40 and the holding wall 67b is made zero, and the scoring wheel 40 is restricted from moving along the pin 50 when the scribe line is formed, so the scoring device 1 can make the scoring The formation position of the line is stable, and a scribe line is formed to a desired position. In addition, the dotted arrow E in FIG. 4 (C) schematically shows the flow of air when the air is exhausted from the vent hole 70 through the vent path.

此外,相反地,保持具單元30,能夠藉由從分歧通氣路71a引出空氣,而透過保持具60之通氣路徑從通氣孔70即銷孔66a吸引空氣。由於藉由從該銷孔66a吸引空氣,而沿銷軸50拉引刻劃輪40之側面41a,因此側面41a被往保持壁67a拉近。 On the other hand, the holder unit 30 can suck air from the vent hole 70, that is, the pin hole 66a through the ventilation path of the holder 60 by taking out air from the branched air passage 71a. Since the side surface 41a of the scoring wheel 40 is drawn along the pin shaft 50 by sucking air from the pin hole 66a, the side surface 41a is drawn toward the holding wall 67a.

因此,使刻劃輪40之側面41a與保持壁67a之間的間隙為零,由於在形成刻劃線時,限制刻劃輪40沿銷軸50移動,因此刻劃裝置1能夠使刻劃線之形成位置穩定,而往所欲之位置形成刻劃線。 Therefore, the gap between the side surface 41a of the scoring wheel 40 and the holding wall 67a is made zero, and the scoring wheel 40 is restricted from moving along the pin 50 when the scribe line is formed, so the scoring device 1 can make the scribe line The formation position is stable, and a score line is formed to a desired position.

如以上所述,由於從成為通氣孔70之銷孔66a排出或吸引空氣,因此刻劃裝置1如圖3(C)所示般,利用由本體通氣路71、側面通氣路72等構成之通氣路徑。為此,刻劃裝置1,具備用於往通氣孔70送入空氣或從通氣孔70吸出空氣之吸排氣部23、與從吸排氣部23往刻劃頭20內連接之導管24。此外,如圖2所示,在隔片22設有連通孔25。在刻劃頭20內,保持具上部61氣密性相對較佳地收容於刻劃頭20內。因此,保持具60之通氣路徑與刻劃頭20內,成為藉由從吸排氣部23往刻劃頭20內送入空氣或從吸排氣部23吸出空氣而透過連通孔25與分歧通氣路71a使空氣流動。 As described above, since the air is exhausted or sucked from the pin hole 66a that becomes the ventilation hole 70, the scoring device 1 uses the ventilation composed of the main body ventilation path 71, the side ventilation path 72, and the like as shown in FIG. 3 (C). path. For this purpose, the scoring device 1 is provided with a suction / exhaust section 23 for sending air into or out of the air vent 70 and a duct 24 connected to the scoring head 20 from the suction / exhaust section 23. As shown in FIG. 2, a communication hole 25 is provided in the spacer 22. In the scoring head 20, the airtightness of the holder upper part 61 is relatively preferably accommodated in the scoring head 20. Therefore, the ventilation path of the holder 60 and the inside of the scoring head 20 pass through the communication hole 25 and the branched ventilation by sending air into or from the suction and exhaust section 23 into the scoring head 20. The road 71a allows air to flow.

另外,當從通氣孔70排出時之風壓過強時,反而有可能妨礙刻劃輪40之旋轉。因此,在排出或吸引空氣時,亦考慮這類的問題點等以決定來自吸排氣部之風量。在本實施形態中,在以0.05MPa左右之風壓送出空氣時,刻劃裝置1能夠形成良好的刻劃線。 In addition, when the wind pressure when discharged from the vent hole 70 is too strong, it may conversely prevent the scoring wheel 40 from rotating. Therefore, when exhausting or attracting air, such problems and the like are also taken into consideration to determine the amount of air from the intake and exhaust sections. In this embodiment, the scoring device 1 can form a good scribe line when air is sent out at a wind pressure of about 0.05 MPa.

此外,在吸排氣部23例如使用供應壓縮空氣的壓縮機(compressor)。除此之外,可使用真空泵、吸氣風扇或排氣風扇等。另外, 在吸排氣部23與刻劃頭20之間亦可設置壓力感測器或壓力調整用之調節器(regulator)。此外,雖與本實施形態般之透過通氣孔70對刻劃輪40之側面41a排出或吸引空氣之刻劃裝置1完全不同,但作為從保持具或保持具周圍排出或吸引空氣之刻劃裝置,例如已知有日本特開2000-247667號公報或日本特開2008-94635號公報記載的刻劃裝置。因此,作為刻劃裝置1所具備之吸排氣部23或導管24之具體的構成,可採用如上述文獻記載之構成。 A compressor that supplies compressed air is used as the intake and exhaust section 23, for example. In addition, vacuum pumps, suction fans or exhaust fans can be used. In addition, A pressure sensor or a regulator for pressure adjustment may be provided between the suction / exhaust section 23 and the scoring head 20. In addition, although it is completely different from the scoring device 1 that discharges or sucks air to the side surface 41a of the scoring wheel 40 through the vent hole 70 as in this embodiment, it is a scoring device that discharges or sucks air from the holder or around the holder For example, a scoring device described in Japanese Patent Application Laid-Open No. 2000-247667 or Japanese Patent Application Laid-Open No. 2008-94635 is known. Therefore, as a specific configuration of the suction / exhaust section 23 or the duct 24 included in the scoring device 1, a configuration described in the above-mentioned document can be adopted.

如此,本實施形態之保持具60,具有形成於形成本體部之保持具下部62之一對保持部63a、63b,在該保持部63a,形成有用於在保持刻劃輪40時在與刻劃輪40之側面41a對向之位置排出或吸引空氣的通氣孔70。因此,保持具單元30,藉由在保持刻劃輪40的狀態下從通氣孔70往刻劃輪40之側面41a排出空氣,而使刻劃輪40之側面41b與保持壁67b之間的間隙為零,使得在形成刻劃線時,限制刻劃輪40沿銷軸50移動。因此,刻劃裝置1,能夠使刻劃線之形成位置穩定,而往所欲之位置形成刻劃線。 As described above, the holder 60 of this embodiment has a pair of holding portions 63a, 63b formed in a lower portion 62 of the holder forming the main body portion. The holding portion 63a is formed to hold and scribe when the scribe wheel 40 is held. The side surface 41 a of the wheel 40 opposes a vent hole 70 for discharging or attracting air. Therefore, the holder unit 30 discharges air from the vent hole 70 to the side surface 41a of the scoring wheel 40 while holding the scoring wheel 40, so that the gap between the side surface 41b of the scoring wheel 40 and the holding wall 67b Is zero, so that the scribe wheel 40 is restricted from moving along the pin 50 when the scribe line is formed. Therefore, the scoring device 1 can stabilize the formation position of the scribe line and form the scribe line to a desired position.

此外,相反地,保持具單元30,藉由在保持刻劃輪40的狀態下從通氣孔70從刻劃輪40之側面41a吸引空氣,而使刻劃輪40之側面41a與保持壁67a之間的間隙為零,使得在形成刻劃線時,限制刻劃輪40沿銷軸50移動。因此,刻劃裝置1,能夠使刻劃線之形成位置穩定,而往所欲之位置形成刻劃線。 In addition, on the contrary, the holder unit 30 sucks air from the vent hole 70 from the side surface 41a of the scoring wheel 40 while holding the scoring wheel 40, so that the side surface 41a of the scoring wheel 40 and the holding wall 67a The gap between them is zero, so that when the scribe line is formed, the scribe wheel 40 is restricted from moving along the pin 50. Therefore, the scoring device 1 can stabilize the formation position of the scribe line and form the scribe line to a desired position.

此外,在本實施形態中,為利用銷孔66a作為通氣孔70的構成。因此,刻劃裝置1,在銷孔66a內產生空氣流動,能夠防止在形成刻劃線時所產生之碎屑附著於銷軸50。此外,刻劃裝置1,藉由從銷孔66a 進行空氣之排出或吸引,能夠對刻劃輪40之側面41a均勻地施加力。 In addition, in this embodiment, it is a structure which uses the pin hole 66a as the ventilation hole 70. Therefore, the scoring device 1 can generate air flow in the pin hole 66a, and can prevent the debris generated when the scribe line is formed from adhering to the pin shaft 50. In addition, the scoring device 1 passes the pin hole 66a When the air is exhausted or sucked, a force can be uniformly applied to the side surface 41 a of the scoring wheel 40.

此外,當在刻劃輪40成為傾斜之狀態下形成刻劃線時,即將產生在相對於基板厚度方向傾斜之方向形成裂紋之所謂的裂變現象。而且,一旦裂變產生,則脆性材料基板15之切斷面亦成為傾斜,而無法在所欲之位置分斷。但是,本實施形態之保持具單元30,為利用銷孔66a作為通氣孔70之構成。因此,保持具單元30,藉由從銷孔66a進行空氣之排出或吸引,能夠對刻劃輪40之側面41a均勻地施加力,能夠使刻劃輪40直立。因此,刻劃裝置1,能夠形成裂變難以產生之刻劃線。 In addition, when the scribe line is formed with the scoring wheel 40 inclined, a so-called fission phenomenon in which a crack is formed in a direction inclined with respect to the thickness direction of the substrate is about to occur. Furthermore, once fission occurs, the cut surface of the brittle material substrate 15 also becomes inclined, and it cannot be broken at a desired position. However, the holder unit 30 of this embodiment has a configuration in which a pin hole 66 a is used as the vent hole 70. Therefore, the holder unit 30 can uniformly apply a force to the side surface 41a of the scribe wheel 40 by exhausting or sucking air from the pin hole 66a, and can make the scribe wheel 40 stand upright. Therefore, the scoring device 1 can form a scribing line where fission is unlikely to occur.

[實施形態2] [Embodiment 2]

接下來,使用圖式針對其他實施形態進行說明。圖5係構成實施形態2之保持具單元的保持具160之保持具下部162的要部放大側視圖。 Next, another embodiment will be described using drawings. Fig. 5 is an enlarged side view of a main portion of a holder lower portion 162 of the holder 160 constituting the holder unit of the second embodiment.

該保持具單元,為與實施形態1之保持具單元30大致同樣的構成。因此,針對與保持具單元30不同的地方進行說明。此外,關於與實施形態1同樣之構成,使用一部分相同的符號進行說明。 This holder unit has substantially the same configuration as the holder unit 30 of the first embodiment. Therefore, points different from the holder unit 30 will be described. In addition, about the same structure as Embodiment 1, it demonstrates using the same code | symbol.

實施形態1之保持具單元30之構成,係銷孔66a兼為形成於保持具60之通氣孔70。另一方面,本實施形態之保持具單元,則為形成於保持具160之保持具下部162的銷孔166a與通氣孔170個別地設置。 In the structure of the holder unit 30 according to the first embodiment, the pin hole 66 a also serves as a vent hole 70 formed in the holder 60. On the other hand, in the holder unit of this embodiment, the pin holes 166a and the vent holes 170 formed in the holder lower portion 162 of the holder 160 are separately provided.

銷孔166a與實施形態1之銷孔66a同樣地形成於被硬焊在保持部163a之圓柱體165a。另一方面,通氣孔170,在銷孔166a之周圍等間隔地形成有三個。 The pin hole 166a is formed in a cylindrical body 165a which is brazed to the holding portion 163a in the same manner as the pin hole 66a of the first embodiment. On the other hand, three ventilation holes 170 are formed at regular intervals around the pin holes 166a.

而且,實施形態1之側面通氣路72,係以連結銷孔66a與螺 釘安裝孔68間之方式形成在保持部63a之外側側面,但本實施形態之側面通氣路172,如圖5所示,藉由形雕放電加工以連結螺釘安裝孔168與三個通氣孔170之方式形成於保持部163a之外側側面。此外,在該側面通氣路172之中途形成有連接本體通氣路之連結孔173。 In addition, the side air passage 72 of the first embodiment is connected to the pin hole 66a and the screw Nail mounting holes 68 are formed on the outer side surface of the holding portion 63a. However, as shown in FIG. 5, the side air passage 172 of this embodiment is connected to the screw mounting hole 168 and the three air holes 170 by sculpting electrical discharge machining. This aspect is formed on the outer side surface of the holding portion 163a. A connection hole 173 is formed in the side air passage 172 to connect the air passage of the main body.

保持具單元,利用保持具160之螺釘安裝孔168安裝未圖示之止擋件。保持具單元,藉由止擋件閉塞銷孔166a,並且封住側面通氣路172之表面,而能夠透過以側面通氣路172構成之通氣路,從三個通氣孔170進行空氣之排出或吸引。 In the holder unit, a stopper (not shown) is mounted using a screw mounting hole 168 of the holder 160. The holder unit closes the pin hole 166a by the stopper and seals the surface of the side air passage 172, and can exhaust or suck air from the three air holes 170 through the air passage formed by the side air passage 172.

因此,保持具單元,藉由從形成於保持具160之通氣孔170排出空氣,使刻劃輪40之側面41b、和與保持部163a相反側之保持部之保持壁(未圖示)之間的間隙為零,使得在形成刻劃線時,限制刻劃輪40沿銷軸50移動。而且,具備該保持具單元之刻劃裝置,能夠使刻劃線之形成位置穩定,而能夠往所欲之位置形成刻劃線。 Therefore, the holder unit discharges air from the vent hole 170 formed in the holder 160, so that the side surface 41b of the scoring wheel 40 and the holding wall (not shown) of the holding portion on the opposite side to the holding portion 163a. The gap is zero, so that when the scribe line is formed, the scribe wheel 40 is restricted from moving along the pin 50. In addition, the scoring device provided with the holder unit can stabilize the formation position of the scribe line and form the scribe line to a desired position.

此外,相反地,保持具單元,藉由從通氣孔170吸引空氣,使刻劃輪40之側面41a、與保持部163a側之保持壁之間的間隙為零,使得在形成刻劃線時,限制刻劃輪40沿銷軸50移動。而且,具備該保持具單元之刻劃裝置,能夠使刻劃線之形成位置穩定,而能夠往所欲之位置形成刻劃線。 In addition, on the contrary, the holder unit draws air from the vent hole 170 to make the gap between the side surface 41a of the scoring wheel 40 and the holding wall on the side of the holding portion 163a zero, so that when the scribe line is formed, The scoring wheel 40 is restricted from moving along the pin shaft 50. In addition, the scoring device provided with the holder unit can stabilize the formation position of the scribe line and form the scribe line to a desired position.

此外,本實施形態之保持具單元,與實施形態1之通氣孔70不同,為與銷孔166a個別地在保持具160具有通氣孔170之構成。因此,通過通氣孔170之空氣流動難以對銷軸50造成影響。此外,由於與銷孔166a為個別的設計,因此本實施形態之保持具單元,能夠自由地形成通氣孔170 之數量或位置、形狀。因此,該保持具單元,能夠採用更適合於空氣之排出或吸引的通氣孔170。 The holder unit of the present embodiment is different from the vent hole 70 of the first embodiment in that the holder unit has a vent hole 170 in the holder 160 separately from the pin hole 166a. Therefore, it is difficult for the air flow through the vent hole 170 to affect the pin shaft 50. In addition, since it is designed separately from the pin hole 166a, the holder unit of this embodiment can freely form the vent hole 170. Number or position, shape. Therefore, the holder unit can use the vent hole 170 which is more suitable for exhausting or sucking air.

另外,在上述之實施形態中,例如,實施形態1之通氣孔70,形成於一對保持部63a、63b之中的保持部63a。也就是,通氣孔70僅形成於保持部63a側,但本發明亦可為通氣孔70形成於保持部63a、63b之兩方的構成。在該情形,成為在保持部63b側透過連結孔73連接側面通氣路72與本體通氣路71。 In addition, in the above-mentioned embodiment, for example, the vent hole 70 of the first embodiment is formed in the holding portion 63a among the pair of holding portions 63a, 63b. That is, the vent hole 70 is formed only on the holding portion 63a side, but the present invention may have a configuration in which the vent hole 70 is formed on both of the holding portions 63a and 63b. In this case, the side ventilation path 72 and the main body ventilation path 71 are connected to each other through the connection hole 73 on the holding portion 63b side.

如此,從保持部63a、63b兩側,分別對刻劃輪40之側面41a、41b從保持部63a、63b之通氣孔70排出或吸引空氣,藉此,使刻劃輪40之位置,穩定地位於保持槽64之大致中央。此外,由於在刻劃輪40之側面41a、41b兩側產生空氣流動,因此碎屑難以附著在刻劃輪40之表面或銷軸50之表面。 In this way, the sides 41a, 41b of the scoring wheel 40 are exhausted or sucked from the vent holes 70 of the holding portions 63a, 63b from both sides of the holding portions 63a, 63b, thereby stably positioning the scoring wheel 40. It is located approximately at the center of the holding groove 64. In addition, since air flows are generated on both sides of the side surfaces 41 a and 41 b of the scoring wheel 40, it is difficult for debris to adhere to the surface of the scoring wheel 40 or the surface of the pin 50.

此外,例如,實施形態1之保持具60之構成,為形成本體通氣路71或側面通氣路72等、且具備連接通氣孔70之通氣路徑。因此,本發明,例如亦可為如形成於保持具之通氣孔與刻劃裝置1之吸排氣部23直接以管(tube)等之導管24連接般,在保持具不設置通氣路徑的構成。 In addition, for example, the holder 60 of the first embodiment is configured to form a main body air passage 71 or a side air passage 72 and the like, and is provided with a ventilation path connected to the ventilation hole 70. Therefore, for example, the present invention may have a configuration in which the ventilation hole formed in the holder is not directly connected to the suction / exhaust portion 23 of the scoring device 1 by a tube 24 such as a tube, and no ventilation path is provided in the holder. .

Claims (9)

一種保持具,具備:本體部、形成在該本體部下方的一對保持部、及位於同軸上且分別形成在該保持部的銷孔,用於藉由貫通於刻劃輪之貫通孔並且插通於該銷孔之銷軸,將該刻劃輪旋轉自如地保持在該保持部間,其特徵在於:在該保持部,形成有用於在保持該刻劃輪時,在與該刻劃輪之側面對向之位置排出或吸引空氣的通氣孔,該通氣孔,僅形成在一對該保持部之一方。A holder includes a main body portion, a pair of holding portions formed below the main body portion, and pin holes that are coaxially formed on the holding portions, respectively, and are used to pass through the through holes penetrating through the scoring wheel and insert. A pin shaft passing through the pin hole holds the scoring wheel between the holding parts freely, and is characterized in that: the holding part is formed with the scoring wheel when holding the scoring wheel. A vent hole for discharging or attracting air at a position opposite to the side surface is formed only on one side of the pair of holding portions. 如申請專利範圍第1項之保持具,其中,該通氣孔,與形成在該保持部之外側側面的側面通氣路連接;該側面通氣路,與形成在該本體部之內部的本體通氣路連接。For example, the holder of the scope of patent application, wherein the ventilation hole is connected to a side ventilation path formed on a side surface outside the holding part; the side ventilation path is connected to a main body ventilation path formed inside the main body part. . 如申請專利範圍第1或2項之保持具,其中,該銷孔兼為該通氣孔。For example, if the holder of the scope of patent application No. 1 or 2, the pin hole is also the vent hole. 一種保持具單元,具備:刻劃輪、貫通於該刻劃輪之貫通孔的銷軸、及保持具,該保持具具有本體部、形成在該本體部下方且保持該刻劃輪的一對保持部、及位於同軸上且分別形成在該保持部並且插通有該銷軸的銷孔,其特徵在於:在該保持部,形成有用於在與該刻劃輪之側面對向之位置排出或吸引空氣的通氣孔,該通氣孔,僅形成在一對該保持部之一方。A holder unit includes a scoring wheel, a pin penetrating through a through hole of the scoring wheel, and a holder, the holder having a main body portion, a pair formed under the main body portion, and holding the scoring wheel The holding portion and the pin holes, which are coaxially formed on the holding portion and are inserted through the pin shaft, are characterized in that the holding portion is formed with a position for discharging to a side opposite to a side surface of the scoring wheel. Or an air vent for attracting air is formed in only one of the pair of holding portions. 如申請專利範圍第4項之保持具單元,其中,該通氣孔,與形成在該保持部之外側側面的側面通氣路連接;該側面通氣路,與形成在該本體部之內部的本體通氣路連接。For example, the holder unit of the fourth patent application range, wherein the ventilation hole is connected to a side ventilation path formed on the outer side surface of the holding part; the side ventilation path is connected to a main body ventilation path formed inside the main body part. connection. 如申請專利範圍第4或5項之保持具單元,其中,形成在該保持部之外側側面的側面通氣路,藉由固定在該保持部之外側側面的止擋件而封住表面。For example, the holder unit of the fourth or fifth aspect of the patent application, wherein the side surface ventilation path formed on the outer side surface of the holding portion is sealed by a stopper fixed to the outer side surface of the holding portion. 如申請專利範圍第4或5項之保持具單元,其中,該銷孔兼為該通氣孔。For example, the holder unit of the fourth or fifth aspect of the patent application, wherein the pin hole is also the vent hole. 一種刻劃裝置,其特徵在於:具備申請專利範圍第1至3項中任一項之保持具;具有透過該通氣孔進行空氣之排出或吸引的吸排氣部。A scoring device is characterized by having a holder in any one of the scope of claims 1 to 3 of the scope of patent application, and having an air suction and exhaust unit through which the air is exhausted or sucked. 一種刻劃裝置,其特徵在於:具備申請專利範圍第4至7項中任一項之保持具單元;具有透過該通氣孔進行空氣之排出或吸引的吸排氣部。A scoring device comprising a holder unit according to any one of claims 4 to 7 of the scope of application for a patent, and a suction and exhaust unit for discharging or attracting air through the vent hole.
TW104135767A 2014-12-12 2015-10-30 Holder, holder unit and scoring device TWI675808B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014252233A JP6515518B2 (en) 2014-12-12 2014-12-12 Holder, holder unit and scribing device
JPJP2014-252233 2014-12-12

Publications (2)

Publication Number Publication Date
TW201623171A TW201623171A (en) 2016-07-01
TWI675808B true TWI675808B (en) 2019-11-01

Family

ID=56140454

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104135767A TWI675808B (en) 2014-12-12 2015-10-30 Holder, holder unit and scoring device

Country Status (4)

Country Link
JP (1) JP6515518B2 (en)
KR (1) KR20160072016A (en)
CN (1) CN105690579B (en)
TW (1) TWI675808B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7109041B2 (en) * 2017-09-29 2022-07-29 三星ダイヤモンド工業株式会社 Cutter holder mounting structure, cutter holder and holder joint
JP7015070B2 (en) * 2020-02-17 2022-02-02 三星ダイヤモンド工業株式会社 Scribe head and scribe device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127732U (en) * 1979-03-02 1980-09-09
JP2000072330A (en) * 1998-08-31 2000-03-07 Kyocera Corp Yarn filament body guide roller
TW201433551A (en) * 2013-02-27 2014-09-01 Mitsuboshi Diamond Ind Co Ltd Scribing wheel, holding tool unit, scribing device and method of manufacturing scribing wheel

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571828A (en) * 1984-03-19 1986-02-25 Fletcher-Terry Company Lubricated glass cutter
JPH08174539A (en) * 1994-12-21 1996-07-09 Rohm Co Ltd Wheel cutter
JP4191304B2 (en) * 1999-03-03 2008-12-03 三星ダイヤモンド工業株式会社 Chip holder
JP2005082413A (en) * 2003-09-04 2005-03-31 St Lcd Kk Scribing apparatus
CN102701580B (en) * 2005-12-01 2014-10-08 三星钻石工业股份有限公司 Method for replacing tip holder of Scribe device
TWI456647B (en) * 2011-05-09 2014-10-11 Mitsuboshi Diamond Ind Co Ltd Scribe device
JP2014188729A (en) * 2013-03-26 2014-10-06 Mitsuboshi Diamond Industrial Co Ltd Scribing wheel, scribing device, and method of manufacturing scribing wheel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127732U (en) * 1979-03-02 1980-09-09
JP2000072330A (en) * 1998-08-31 2000-03-07 Kyocera Corp Yarn filament body guide roller
TW201433551A (en) * 2013-02-27 2014-09-01 Mitsuboshi Diamond Ind Co Ltd Scribing wheel, holding tool unit, scribing device and method of manufacturing scribing wheel

Also Published As

Publication number Publication date
CN105690579B (en) 2019-08-20
TW201623171A (en) 2016-07-01
JP2016112745A (en) 2016-06-23
KR20160072016A (en) 2016-06-22
JP6515518B2 (en) 2019-05-22
CN105690579A (en) 2016-06-22

Similar Documents

Publication Publication Date Title
JP5185412B2 (en) Method of scribing and dividing brittle material substrate using cutter wheel
JP6043149B2 (en) Breaking device for brittle material substrate and method for breaking brittle material substrate
JP2015093827A (en) Cutting dust collector and cutting method
TWI657060B (en) Scribing wheel, holder unit, scribing device and scribing method
TWI675808B (en) Holder, holder unit and scoring device
JP5055158B2 (en) Processing system and processing method for brittle material annular workpiece
JP4915294B2 (en) Method for dividing glass substrate used for manufacturing integrated thin film solar cell
TW201444776A (en) Cutter unit, cutting device, cutting method and holder
TWI659849B (en) Peeling device and method of laminated body, and manufacturing method of electronic device
TW201529501A (en) Breaking apparatus
JP2009130011A (en) Substrate positioning apparatus
TWI779123B (en) Breaking method of substrate with metal film
TW201706098A (en) Cutter wheel which can inhibit crack of blade tip due to impact during polishing process and can be stably held at a tapered shaft of the polishing apparatus
TWI652235B (en) Holder, holder unit and scoring device
TWI496670B (en) Patterning device
TWI576321B (en) Engraving wheel retainer, retainer unit and scribing device
TW201811525A (en) Scribe device and holder unit
JP2009269158A (en) Cutting blade
JP2016056074A (en) Scribing apparatus, scribing method, holder unit and holder
TWI778179B (en) Scribing device and stand unit
TWI663133B (en) Holder, holder unit and scribing device
JP2008192746A (en) Carrying tool of article, apparatus and method for reversing article, and apparatus and method for manufacturing flat panel display
JP2015223783A (en) End material separation method and end material separation device of brittle material substrate
JP2018027666A (en) End material removal device
JP2001235736A (en) Method of manufacturing for liquid crystal panel and its manufacturing device

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees