TWI667247B - 有機矽化合物、硬化性聚矽氧組合物、及半導體裝置 - Google Patents
有機矽化合物、硬化性聚矽氧組合物、及半導體裝置 Download PDFInfo
- Publication number
- TWI667247B TWI667247B TW104117525A TW104117525A TWI667247B TW I667247 B TWI667247 B TW I667247B TW 104117525 A TW104117525 A TW 104117525A TW 104117525 A TW104117525 A TW 104117525A TW I667247 B TWI667247 B TW I667247B
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- integer
- organosilicon compound
- sio
- composition
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 81
- 229920001296 polysiloxane Polymers 0.000 title claims abstract description 64
- 150000003961 organosilicon compounds Chemical class 0.000 title claims abstract description 33
- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- -1 polysiloxane Polymers 0.000 claims abstract description 118
- 239000002318 adhesion promoter Substances 0.000 claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 36
- 229910052710 silicon Inorganic materials 0.000 claims description 31
- 125000003342 alkenyl group Chemical group 0.000 claims description 27
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 25
- 125000004432 carbon atom Chemical group C* 0.000 claims description 18
- 239000003054 catalyst Substances 0.000 claims description 17
- 125000000217 alkyl group Chemical group 0.000 claims description 16
- 238000006459 hydrosilylation reaction Methods 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 150000003377 silicon compounds Chemical class 0.000 claims description 10
- 150000001244 carboxylic acid anhydrides Chemical group 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 125000002947 alkylene group Chemical group 0.000 claims description 6
- 125000001931 aliphatic group Chemical group 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 125000005417 glycidoxyalkyl group Chemical group 0.000 claims 4
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 claims 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- OSFBJERFMQCEQY-UHFFFAOYSA-N propylidene Chemical group [CH]CC OSFBJERFMQCEQY-UHFFFAOYSA-N 0.000 claims 2
- 210000005069 ears Anatomy 0.000 claims 1
- 229920005989 resin Polymers 0.000 abstract description 11
- 239000011347 resin Substances 0.000 abstract description 11
- 150000001875 compounds Chemical class 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000002834 transmittance Methods 0.000 abstract description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 46
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 25
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 21
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 18
- 229920001577 copolymer Polymers 0.000 description 14
- 239000004615 ingredient Substances 0.000 description 14
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 13
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 239000000843 powder Substances 0.000 description 12
- 229910052697 platinum Inorganic materials 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 10
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 125000003545 alkoxy group Chemical group 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 238000005481 NMR spectroscopy Methods 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 125000003118 aryl group Chemical group 0.000 description 7
- 125000003944 tolyl group Chemical group 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 229910004283 SiO 4 Inorganic materials 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 239000012964 benzotriazole Substances 0.000 description 6
- 238000009835 boiling Methods 0.000 description 6
- 150000002430 hydrocarbons Chemical group 0.000 description 6
- 125000005375 organosiloxane group Chemical group 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 5
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 5
- 125000004122 cyclic group Chemical group 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 229920006136 organohydrogenpolysiloxane Polymers 0.000 description 5
- 239000011541 reaction mixture Substances 0.000 description 5
- 239000011257 shell material Substances 0.000 description 5
- 229920002554 vinyl polymer Polymers 0.000 description 5
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 description 4
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- RFIAUHDYYXYZQE-UHFFFAOYSA-N C(=C)[Si](N[Si](C)(C)C=C)(C)C.[Pt] Chemical compound C(=C)[Si](N[Si](C)(C)C=C)(C)C.[Pt] RFIAUHDYYXYZQE-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 239000004954 Polyphthalamide Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000002223 garnet Substances 0.000 description 4
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001624 naphthyl group Chemical group 0.000 description 4
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 4
- 229920006375 polyphtalamide Polymers 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 125000003710 aryl alkyl group Chemical group 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 3
- 238000002329 infrared spectrum Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 125000000962 organic group Chemical group 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000002683 reaction inhibitor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 125000005023 xylyl group Chemical group 0.000 description 3
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 2
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 2
- LRUDIIUSNGCQKF-UHFFFAOYSA-N 5-methyl-1H-benzotriazole Chemical compound C1=C(C)C=CC2=NNN=C21 LRUDIIUSNGCQKF-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 229910052693 Europium Inorganic materials 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 2
- 125000004202 aminomethyl group Chemical group [H]N([H])C([H])([H])* 0.000 description 2
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 125000003493 decenyl group Chemical group [H]C([*])=C([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 125000006038 hexenyl group Chemical group 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 125000005187 nonenyl group Chemical group C(=CCCCCCCC)* 0.000 description 2
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000004365 octenyl group Chemical group C(=CCCCCCC)* 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 125000002255 pentenyl group Chemical group C(=CCCC)* 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 125000005372 silanol group Chemical group 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 2
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 2
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 2
- 125000005065 undecenyl group Chemical group C(=CCCCCCCCCC)* 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- MDTUWBLTRPRXBX-UHFFFAOYSA-N 1,2,4-triazol-3-one Chemical compound O=C1N=CN=N1 MDTUWBLTRPRXBX-UHFFFAOYSA-N 0.000 description 1
- FMCUPJKTGNBGEC-UHFFFAOYSA-N 1,2,4-triazol-4-amine Chemical compound NN1C=NN=C1 FMCUPJKTGNBGEC-UHFFFAOYSA-N 0.000 description 1
- ZEWJFUNFEABPGL-UHFFFAOYSA-N 1,2,4-triazole-3-carboxamide Chemical compound NC(=O)C=1N=CNN=1 ZEWJFUNFEABPGL-UHFFFAOYSA-N 0.000 description 1
- LZTSCEYDCZBRCJ-UHFFFAOYSA-N 1,2-dihydro-1,2,4-triazol-3-one Chemical compound OC=1N=CNN=1 LZTSCEYDCZBRCJ-UHFFFAOYSA-N 0.000 description 1
- ASOKPJOREAFHNY-UHFFFAOYSA-N 1-Hydroxybenzotriazole Chemical compound C1=CC=C2N(O)N=NC2=C1 ASOKPJOREAFHNY-UHFFFAOYSA-N 0.000 description 1
- AJARSKDYXXACJR-UHFFFAOYSA-N 1-[(dibutylamino)methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CCCC)CCCC)N=NC2=C1C(O)=O AJARSKDYXXACJR-UHFFFAOYSA-N 0.000 description 1
- LQPDFQFGNCXQSL-UHFFFAOYSA-N 1-[(dioctylamino)methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CCCCCCCC)CCCCCCCC)N=NC2=C1C(O)=O LQPDFQFGNCXQSL-UHFFFAOYSA-N 0.000 description 1
- KGEPBYXGRXRFGU-UHFFFAOYSA-N 1-[[bis(2-ethylhexyl)amino]methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CC(CC)CCCC)CC(CC)CCCC)N=NC2=C1C(O)=O KGEPBYXGRXRFGU-UHFFFAOYSA-N 0.000 description 1
- OILIWDRDPKUVBC-UHFFFAOYSA-N 1-[[bis(2-hydroxyethyl)amino]methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CCO)CCO)N=NC2=C1C(O)=O OILIWDRDPKUVBC-UHFFFAOYSA-N 0.000 description 1
- RMSGQZDGSZOJMU-UHFFFAOYSA-N 1-butyl-2-phenylbenzene Chemical group CCCCC1=CC=CC=C1C1=CC=CC=C1 RMSGQZDGSZOJMU-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- QYLFHLNFIHBCPR-UHFFFAOYSA-N 1-ethynylcyclohexan-1-ol Chemical compound C#CC1(O)CCCCC1 QYLFHLNFIHBCPR-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- OCGGBKUCKYBJSC-UHFFFAOYSA-N 1-phenylbut-3-yn-2-ol Chemical compound C#CC(O)CC1=CC=CC=C1 OCGGBKUCKYBJSC-UHFFFAOYSA-N 0.000 description 1
- MKBAMMMBEHOLHI-UHFFFAOYSA-N 1H-pyrrole 1H-1,2,4-triazole Chemical compound N1N=CN=C1.N1C=CC=C1 MKBAMMMBEHOLHI-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- VMAWODUEPLAHOE-UHFFFAOYSA-N 2,4,6,8-tetrakis(ethenyl)-2,4,6,8-tetramethyl-1,3,5,7,2,4,6,8-tetraoxatetrasilocane Chemical compound C=C[Si]1(C)O[Si](C)(C=C)O[Si](C)(C=C)O[Si](C)(C=C)O1 VMAWODUEPLAHOE-UHFFFAOYSA-N 0.000 description 1
- WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 description 1
- ITLDHFORLZTRJI-UHFFFAOYSA-N 2-(benzotriazol-2-yl)-5-octoxyphenol Chemical compound OC1=CC(OCCCCCCCC)=CC=C1N1N=C2C=CC=CC2=N1 ITLDHFORLZTRJI-UHFFFAOYSA-N 0.000 description 1
- WKZLYSXRFUGBPI-UHFFFAOYSA-N 2-[benzotriazol-1-ylmethyl(2-hydroxyethyl)amino]ethanol Chemical compound C1=CC=C2N(CN(CCO)CCO)N=NC2=C1 WKZLYSXRFUGBPI-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- CEBKHWWANWSNTI-UHFFFAOYSA-N 2-methylbut-3-yn-2-ol Chemical compound CC(C)(O)C#C CEBKHWWANWSNTI-UHFFFAOYSA-N 0.000 description 1
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- YTZPUTADNGREHA-UHFFFAOYSA-N 2h-benzo[e]benzotriazole Chemical compound C1=CC2=CC=CC=C2C2=NNN=C21 YTZPUTADNGREHA-UHFFFAOYSA-N 0.000 description 1
- KFJDQPJLANOOOB-UHFFFAOYSA-N 2h-benzotriazole-4-carboxylic acid Chemical compound OC(=O)C1=CC=CC2=NNN=C12 KFJDQPJLANOOOB-UHFFFAOYSA-N 0.000 description 1
- NECRQCBKTGZNMH-UHFFFAOYSA-N 3,5-dimethylhex-1-yn-3-ol Chemical compound CC(C)CC(C)(O)C#C NECRQCBKTGZNMH-UHFFFAOYSA-N 0.000 description 1
- HMVBQEAJQVQOTI-UHFFFAOYSA-N 3,5-dimethylhex-3-en-1-yne Chemical compound CC(C)C=C(C)C#C HMVBQEAJQVQOTI-UHFFFAOYSA-N 0.000 description 1
- WVIXTJQLKOLKTQ-UHFFFAOYSA-N 3-(benzotriazol-1-yl)propane-1,2-diol Chemical compound C1=CC=C2N(CC(O)CO)N=NC2=C1 WVIXTJQLKOLKTQ-UHFFFAOYSA-N 0.000 description 1
- MVRGLMCHDCMPKD-UHFFFAOYSA-N 3-amino-1h-1,2,4-triazole-5-carboxylic acid Chemical compound NC1=NNC(C(O)=O)=N1 MVRGLMCHDCMPKD-UHFFFAOYSA-N 0.000 description 1
- CQLAMJKGAKHIOC-UHFFFAOYSA-N 3-hydroxybenzotriazole-5-carboxylic acid Chemical compound OC(=O)C1=CC=C2N=NN(O)C2=C1 CQLAMJKGAKHIOC-UHFFFAOYSA-N 0.000 description 1
- GRGVQLWQXHFRHO-UHFFFAOYSA-N 3-methylpent-3-en-1-yne Chemical compound CC=C(C)C#C GRGVQLWQXHFRHO-UHFFFAOYSA-N 0.000 description 1
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- NGKNMHFWZMHABQ-UHFFFAOYSA-N 4-chloro-2h-benzotriazole Chemical compound ClC1=CC=CC2=NNN=C12 NGKNMHFWZMHABQ-UHFFFAOYSA-N 0.000 description 1
- QRHDSDJIMDCCKE-UHFFFAOYSA-N 4-ethyl-2h-benzotriazole Chemical compound CCC1=CC=CC2=C1N=NN2 QRHDSDJIMDCCKE-UHFFFAOYSA-N 0.000 description 1
- UTMDJGPRCLQPBT-UHFFFAOYSA-N 4-nitro-1h-1,2,3-benzotriazole Chemical compound [O-][N+](=O)C1=CC=CC2=NNN=C12 UTMDJGPRCLQPBT-UHFFFAOYSA-N 0.000 description 1
- WZUUZPAYWFIBDF-UHFFFAOYSA-N 5-amino-1,2-dihydro-1,2,4-triazole-3-thione Chemical compound NC1=NNC(S)=N1 WZUUZPAYWFIBDF-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- JEPCASZHBPZHLT-KTKRTIGZSA-N C(CCCCCCC\C=C/CCCCCCCC)N1N=NC2=C1C1=C(C=C2)C=CC=C1 Chemical compound C(CCCCCCC\C=C/CCCCCCCC)N1N=NC2=C1C1=C(C=C2)C=CC=C1 JEPCASZHBPZHLT-KTKRTIGZSA-N 0.000 description 1
- YRRJRRNPPPGIML-UHFFFAOYSA-N CC(C)N(C(C)C)CN1N=NC2=C1C=CC=C2C(=O)O Chemical compound CC(C)N(C(C)C)CN1N=NC2=C1C=CC=C2C(=O)O YRRJRRNPPPGIML-UHFFFAOYSA-N 0.000 description 1
- DCERHCFNWRGHLK-UHFFFAOYSA-N C[Si](C)C Chemical group C[Si](C)C DCERHCFNWRGHLK-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- NGCTXXLEFJGVJP-UHFFFAOYSA-N N1C=CC=C1.SC1=NNC=N1 Chemical compound N1C=CC=C1.SC1=NNC=N1 NGCTXXLEFJGVJP-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- SBFDPWWVJYLRGG-UHFFFAOYSA-N [N]=O.[P] Chemical compound [N]=O.[P] SBFDPWWVJYLRGG-UHFFFAOYSA-N 0.000 description 1
- QYJHBNLRANFWHO-UHFFFAOYSA-N [ethenyl-[(ethenyl-methyl-phenylsilyl)amino]-methylsilyl]benzene Chemical compound C=1C=CC=CC=1[Si](C)(C=C)N[Si](C)(C=C)C1=CC=CC=C1 QYJHBNLRANFWHO-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 125000004946 alkenylalkyl group Chemical group 0.000 description 1
- 150000001345 alkine derivatives Chemical class 0.000 description 1
- FNCIDSNKNZQJTJ-UHFFFAOYSA-N alumane;terbium Chemical compound [AlH3].[Tb] FNCIDSNKNZQJTJ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- PMLUEBXXHBVGNR-UHFFFAOYSA-N benzene 2H-benzotriazole Chemical compound C1=CC=CC=C1.N1N=NC2=C1C=CC=C2 PMLUEBXXHBVGNR-UHFFFAOYSA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- QABCGOSYZHCPGN-UHFFFAOYSA-N chloro(dimethyl)silicon Chemical compound C[Si](C)Cl QABCGOSYZHCPGN-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- AHUXYBVKTIBBJW-UHFFFAOYSA-N dimethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OC)(OC)C1=CC=CC=C1 AHUXYBVKTIBBJW-UHFFFAOYSA-N 0.000 description 1
- PKTOVQRKCNPVKY-UHFFFAOYSA-N dimethoxy(methyl)silicon Chemical compound CO[Si](C)OC PKTOVQRKCNPVKY-UHFFFAOYSA-N 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- MCPKSFINULVDNX-UHFFFAOYSA-N drometrizole Chemical compound CC1=CC=C(O)C(N2N=C3C=CC=CC3=N2)=C1 MCPKSFINULVDNX-UHFFFAOYSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- RSIHJDGMBDPTIM-UHFFFAOYSA-N ethoxy(trimethyl)silane Chemical compound CCO[Si](C)(C)C RSIHJDGMBDPTIM-UHFFFAOYSA-N 0.000 description 1
- CWAFVXWRGIEBPL-UHFFFAOYSA-N ethoxysilane Chemical compound CCO[SiH3] CWAFVXWRGIEBPL-UHFFFAOYSA-N 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 125000001188 haloalkyl group Chemical group 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- HZVOZRGWRWCICA-UHFFFAOYSA-N methanediyl Chemical group [CH2] HZVOZRGWRWCICA-UHFFFAOYSA-N 0.000 description 1
- POPACFLNWGUDSR-UHFFFAOYSA-N methoxy(trimethyl)silane Chemical compound CO[Si](C)(C)C POPACFLNWGUDSR-UHFFFAOYSA-N 0.000 description 1
- ZMMBQCILDZFYKX-UHFFFAOYSA-N methyl 2h-benzotriazole-5-carboxylate Chemical compound C1=C(C(=O)OC)C=CC2=NNN=C21 ZMMBQCILDZFYKX-UHFFFAOYSA-N 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- JPQBRSQJGWOTGC-UHFFFAOYSA-N methyl(silyloxysilyloxy)silane Chemical compound C[SiH2]O[SiH2]O[SiH3] JPQBRSQJGWOTGC-UHFFFAOYSA-N 0.000 description 1
- KVPNXFZHSSICLH-UHFFFAOYSA-N methyl-tris(2-methylprop-1-enylsilyloxy)silane Chemical compound C[Si](O[SiH2]C=C(C)C)(O[SiH2]C=C(C)C)O[SiH2]C=C(C)C KVPNXFZHSSICLH-UHFFFAOYSA-N 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- OKQVTLCUHATGDD-UHFFFAOYSA-N n-(benzotriazol-1-ylmethyl)-2-ethyl-n-(2-ethylhexyl)hexan-1-amine Chemical compound C1=CC=C2N(CN(CC(CC)CCCC)CC(CC)CCCC)N=NC2=C1 OKQVTLCUHATGDD-UHFFFAOYSA-N 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000001367 organochlorosilanes Chemical class 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 125000003566 oxetanyl group Chemical group 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000004344 phenylpropyl group Chemical group 0.000 description 1
- PARWUHTVGZSQPD-UHFFFAOYSA-N phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000007348 radical reaction Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 125000004469 siloxy group Chemical group [SiH3]O* 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000012756 surface treatment agent Substances 0.000 description 1
- IENQTDRUPBYCHN-UHFFFAOYSA-N tetrakis(2-methylprop-1-enylsilyl) silicate Chemical compound CC(=C[SiH2]O[Si](O[SiH2]C=C(C)C)(O[SiH2]C=C(C)C)O[SiH2]C=C(C)C)C IENQTDRUPBYCHN-UHFFFAOYSA-N 0.000 description 1
- RSNQKPMXXVDJFG-UHFFFAOYSA-N tetrasiloxane Chemical compound [SiH3]O[SiH2]O[SiH2]O[SiH3] RSNQKPMXXVDJFG-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- 239000005051 trimethylchlorosilane Substances 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- ZQTYRTSKQFQYPQ-UHFFFAOYSA-N trisiloxane Chemical compound [SiH3]O[SiH2]O[SiH3] ZQTYRTSKQFQYPQ-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- MQWLIFWNJWLDCI-UHFFFAOYSA-L zinc;carbonate;hydrate Chemical compound O.[Zn+2].[O-]C([O-])=O MQWLIFWNJWLDCI-UHFFFAOYSA-L 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/549—Silicon-containing compounds containing silicon in a ring
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/0834—Compounds having one or more O-Si linkage
- C07F7/0838—Compounds with one or more Si-O-Si sequences
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
- C07F7/1804—Compounds having Si-O-C linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/21—Cyclic compounds having at least one ring containing silicon, but no carbon in the ring
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/541—Silicon-containing compounds containing oxygen
- C08K5/5435—Silicon-containing compounds containing oxygen containing oxygen in a ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/56—Materials, e.g. epoxy or silicone resin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Silicon Polymers (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
本發明提供一種新穎有機矽化合物,含有其作為接著促進劑、對於有機樹脂等之基材之初期接著性及接著耐久性優異、形成透光性較高之硬化物之硬化性聚矽氧組合物,以及使用該組合物而成之可靠性優異之半導體裝置。
本發明係一種通式所表示之有機矽化合物、含有其作為接著促進劑之矽氫化反應硬化性聚矽氧組合物、以及利用上述組合物之硬化物將半導體元件進行密封而成之半導體裝置。
Description
本發明係關於一種新穎有機矽化合物、含有其作為接著促進劑之硬化性聚矽氧組合物、及使用該組合物所製作之半導體裝置。
藉由矽氫化反應而硬化之硬化性聚矽氧組合物通常缺乏接著性,因而於要求接著性之情形時,必須含有接著促進劑。例如專利文獻1中揭示有含有如下接著促進劑之硬化性聚矽氧組合物,該接著促進劑於環狀矽氧烷或鏈狀矽氧烷中之矽原子上具有烯基、及烷氧基或縮水甘油氧基丙基。
但是,即便為此種硬化性聚矽氧組合物,亦存在如下課題:對於硬化過程中所接觸之金屬或有機樹脂、尤其是鍵結強極性基之熱塑性樹脂,初期接著性或接著耐久性並不充分。
[專利文獻1]日本專利特開2010-229402號公報
本發明之目的在於提供一種新穎有機矽化合物,含有其作為接著促進劑、對於金屬或有機樹脂等之基材之初期接著性及接著耐久性
優異、形成透光性較高之硬化物之硬化性聚矽氧組合物,以及使用該組合物而成之可靠性優異之半導體裝置。
本發明之有機矽化合物係以下述通式表示,
(式中,R1為相同或不同之不具有脂肪族不飽和鍵之碳數1~12之一價烴基;R2為碳數2~12之烯基;R3為碳數2~12之伸烷基;X為選自由烷氧基矽烷基烷基、縮水甘油氧基烷基、環氧環烷基烷基、環氧烷基、及含羧酸酐殘基之烷基所組成之群中之至少一種基;m為0以上之整數,n為1以上之整數,p為1以上之整數,其中,m、n及p之合計為3~50之整數;z為1~50之整數)。
又,本發明之另一有機矽化合物係以下述通式表示,[化2]
(式中,R1為相同或不同之不具有脂肪族不飽和鍵之碳數1~12之一價烴基;R2為碳數2~12之烯基;R3為碳數2~12之伸烷基;X為選自由烷氧基矽烷基烷基、縮水甘油氧基烷基、環氧環烷基烷基、環氧烷基、及含羧酸酐殘基之烷基所組成之群中之至少一種基;a為1~3之整數,b為1~3之整數,其中,a與b之合計為2~4之整數;z為1~50之整數)。
本發明之硬化性聚矽氧組合物之特徵在於含有上述有機矽化合物作為接著促進劑,較佳為本發明之硬化性聚矽氧組合物係藉由矽氫化反應而硬化者,進而較佳為包含:(A)一分子中具有至少2個烯基之有機聚矽氧烷100質量份、(B)一分子中具有至少2個鍵結矽原子之氫原子之有機氫聚矽氧烷{相對於(A)成分與(C)成分中所含之烯基之合計1莫耳,提供0.1~10.0莫耳之鍵結矽原子之氫原子之量}、(C)包含上述有機矽化合物之接著促進劑0.01~50質量份、及(D)矽氫化反應用觸媒(對於促進本組合物之硬化而言充分之量)者。
本發明之半導體裝置之特徵在於:半導體元件係利用上述硬化性聚矽氧組合物之硬化物進行密封而成,較佳為該半導體元件為發光
元件。
本發明之有機矽化合物為新穎化合物,其特徵在於:可對硬化性聚矽氧組合物賦予優異之接著性。又,本發明之硬化性聚矽氧組合物之特徵在於:硬化物之折射率、透光率及對基材之密接性較高。進而,本發明之半導體裝置之特徵在於:由於半導體元件係由上述組合物之硬化物被覆,故而可靠性優異。
1‧‧‧發光元件
2‧‧‧引線框架
3‧‧‧引線框架
4‧‧‧接合線
5‧‧‧殼材
6‧‧‧硬化性聚矽氧組合物之硬化物
圖1係作為本發明之半導體裝置之一例之LED之剖面圖。
首先,對本發明之有機矽化合物進行詳細說明。
本發明之有機矽化合物係以下述通式表示,
式中,R1為相同或不同之不具有脂肪族不飽和鍵之碳數1~12之一價烴基。具體而言,可例示:甲基、乙基、丙基、丁基、戊基、己基等烷基;苯基、甲苯基、二甲苯基、萘基等芳基;苄基、苯乙基等芳烷基;3-氯丙基、3,3,3-三氟丙基等鹵化烷基,較佳為甲基、苯
基。
式中,R2為碳數2~12之烯基。具體而言,可例示:乙烯基、烯丙基、丁烯基、戊烯基、己烯基、庚烯基、辛烯基、壬烯基、癸烯基、十一碳烯基、十二碳烯基,較佳為乙烯基。
式中,R3為碳數2~12之伸烷基。具體而言,可例示:伸乙基、伸丙基、伸丁基、伸戊基、伸己基、伸庚基、伸辛基、伸壬基,較佳為伸乙基、伸丙基。
式中,X為選自由烷氧基矽烷基烷基、縮水甘油氧基烷基、環氧環烷基烷基、環氧烷基、及含羧酸酐殘基之烷基所組成之群中之至少一種基。作為烷氧基矽烷基烷基,可例示:三甲氧基矽烷基乙基、甲基二甲氧基矽烷基乙基、三乙氧基矽烷基乙基、三異丙氧基矽烷基乙基、三甲氧基矽烷基丙基、三甲氧基矽烷基丁基。作為縮水甘油氧基烷基,可例示:2-縮水甘油氧基乙基、3-縮水甘油氧基丙基、4-縮水甘油氧基丁基。作為環氧環烷基烷基,可例示:2-(3,4-環氧環己基)乙基、3-(3,4-環氧環己基)丙基。作為環氧烷基,可例示:3,4-環氧丁基、7,8-環氧辛基。作為含羧酸酐殘基之烷基,可例示通式:
所表示之基、通式:[化5]
所表示之基、通式:
所表示之基、通式:
所表示之基、或通式:[化8]
所表示之基。再者,上式中,R4為碳數2~12之伸烷基。具體而言,可例示:甲基、乙基、丙基、丁基、戊基、己基等烷基;苯基、甲苯基、二甲苯基、萘基等芳基;苄基、苯乙基等芳烷基。又,上式中,R5為氫原子或碳數1~12之烷基。作為R5之烷基,可例示與上述R4相同之基。
式中,m為0以上之整數,n為1以上之整數,p為1以上之整數,其中,m、n及p之合計為3~50之整數。又,式中,z為1~50之整數,較佳為1~5之整數。尤佳為m為0,n為2以上之整數,p為2以上之整數,z為1之有機矽氧烷。
作為此種有機矽化合物,可例示如下化合物。
又,本發明之另一有機矽化合物係以下述通式表示,
式中,R1為相同或不同之不具有脂肪族不飽和鍵之碳數1~12之一價烴基,可例示與上述相同之基。式中,R2為碳數2~12之烯基,可例示與上述相同之基。式中,R3為碳數2~12之伸烷基,可例示與上述相同之基。式中,X為選自由烷氧基矽烷基烷基、縮水甘油氧基烷基、環氧環烷基烷基、環氧烷基、及含羧酸酐殘基之烷基所組成之群中之至少一種基,可例示與上述相同之基。
式中,a為1~3之整數,b為1~3之整數,其中,a與b之合計為2~4之整數。又,式中,z為1~50之整數,較佳為1~5之整數。尤佳為a為1~2之整數,b為2~3之整數,z為1之有機矽氧烷。
作為此種有機矽化合物,可例示如下化合物。
[化14]
作為製備此種有機矽化合物之方法,可列舉:使通式:
所表示之環狀矽氧烷或通式:
所表示之鏈狀矽氧烷、與通式:
所表示之含鍵結矽原子之氫原子之矽氧烷於矽氫化反應用觸媒之存在下進行部分加成反應,藉此製備該有機矽化合物之方法。
關於上述環狀矽氧烷,式中,R1、R2、及m係如上所述。又,式中,n'為2以上之整數。其中,m與n'之合計為3~50之整數。作為此種環狀矽氧烷,可例示:環狀甲基乙烯基矽氧烷、環狀甲基烯丙基矽氧烷、環狀二甲基矽氧烷-甲基乙烯基矽氧烷共聚物。
又,關於上述鏈狀矽氧烷,式中,R1及R2係如上所述。又,式中,b'為2~4之整數。作為此種鏈狀矽氧烷,可例示:四(二甲基乙烯基矽烷氧基)矽烷、甲基三(二甲基乙烯基矽烷氧基)矽烷。
又,關於上述含鍵結矽原子之氫原子之矽氧烷,式中,R1、X、及z係如上所述。作為此種含鍵結矽原子之氫原子之矽氧烷,可例示如下化合物。
[化19]
作為上述製備方法中所使用之矽氫化反應用觸媒,可例示鉑系觸媒、銠系觸媒、鈀系觸媒,尤佳為鉑系觸媒。作為該鉑系觸媒,可例示:鉑細粉末、鉑黑、擔載鉑之二氧化矽細粉末、擔載鉑之活性碳、氯鉑酸、氯鉑酸之醇溶液、鉑之烯烴錯合物、鉑之烯基矽氧烷錯合物等鉑系化合物。
上述製備方法中可使用有機溶劑。作為可使用之有機溶劑,可例示:醚類、酮類、乙酸酯類、芳香族或脂肪族烴、γ-丁內酯、及2種以上該等之混合物。作為較佳之有機溶劑,可例示:丙二醇單甲醚、丙二醇單甲醚乙酸酯、丙二醇單乙醚、丙二醇單丙醚、丙二醇單丁醚、丙二醇單第三丁醚、γ-丁內酯、甲苯、二甲苯。
於上述製備方法中,較佳為相對於環狀矽氧烷或鏈狀矽氧烷中之烯基1莫耳,以含鍵結矽原子之氫原子之矽氧烷中之鍵結矽原子之
氫原子未達1莫耳之量,具體而言為0.25~0.75莫耳之範圍內之量進行反應。
此種有機矽化合物係具有矽氧烷鍵與矽伸烷基鍵之新穎化合物,可用作硬化性聚矽氧組合物之接著促進劑、無機粉末之表面處理劑等。
其次,詳細地說明本發明之硬化性聚矽氧組合物。
本發明之硬化性聚矽氧組合物之特徵在於:調配上述有機矽化合物作為接著促進劑。此種硬化性聚矽氧組合物之硬化機制並無限定,可例示矽氫化反應、縮合反應、自由基反應,較佳為矽氫化反應。作為藉由該矽氫化反應而硬化之硬化性聚矽氧組合物,具體而言,較佳為包含:(A)一分子中具有至少2個烯基之有機聚矽氧烷100質量份、(B)一分子中具有至少2個鍵結矽原子之氫原子之有機氫聚矽氧烷{相對於(A)成分與(C)成分中所含之烯基之合計1莫耳,提供0.1~10.0莫耳之鍵結矽原子之氫原子之量}、(C)包含上述有機矽化合物之接著促進劑0.01~50質量份、及(D)矽氫化反應用觸媒者。
(A)成分為本組合物之主劑,為一分子中具有至少2個烯基之有機聚矽氧烷。作為該烯基,可例示:乙烯基、烯丙基、丁烯基、戊烯基、己烯基、庚烯基、辛烯基、壬烯基、癸烯基、十一碳烯基、十二碳烯基等碳數為2~12個之烯基,較佳為乙烯基。又,作為(A)成分中之烯基以外之鍵結矽原子之基,可例示:甲基、乙基、丙基、異丙基、丁基、異丁基、第三丁基、戊基、新戊基、己基、環己基、庚基、辛基、壬基、癸基、十一烷基、十二烷基等碳數為1~12個之烷基;苯基、甲苯基、二甲苯基、萘基等碳數為6~20個之芳基;苄基、苯乙基、苯基丙基等碳數為7~20個之芳烷基;該等基之氫原子
之一部分或全部被取代為氟原子、氯原子、溴原子等鹵素原子之基。再者,於(A)成分中之矽原子上,可於無損本發明之目的之範圍內具有少量之羥基或甲氧基、乙氧基等烷氧基。
(A)成分之分子結構並無特別限定,可例示:直鏈狀、一部分具有支鏈之直鏈狀、支鏈狀、環狀及三維網狀結構。(A)成分可為1種具有該等分子結構之有機聚矽氧烷、或2種以上具有該等分子結構之有機聚矽氧烷之混合物。
(A)成分於25℃下之性狀並無特別限定,例如為液狀或固體狀。(A)成分於25℃下為液狀之情形時,較佳為其於25℃下之黏度為1~1,000,000mPa‧s之範圍內,尤佳為10~1,000,000mPa‧s之範圍內。再者,該黏度例如可藉由依據JIS K7117-1並使用B型黏度計之測定而求出。
作為此種(A)成分,可例示:二甲基乙烯基矽氧基封阻分子鏈兩末端之二甲基聚矽氧烷、二甲基乙烯基矽氧基封阻分子鏈兩末端之二甲基矽氧烷-甲基乙烯基矽氧烷共聚物、二甲基乙烯基矽氧基封阻分子鏈兩末端之二甲基矽氧烷-甲基苯基矽氧烷共聚物、二甲基乙烯基矽氧基封阻分子鏈兩末端之甲基苯基聚矽氧烷、三甲基矽氧基封阻分子鏈兩末端之二甲基矽氧烷-甲基乙烯基矽氧烷共聚物、三甲基矽氧基封阻分子鏈兩末端之二甲基矽氧烷-甲基乙烯基矽氧烷-甲基苯基矽氧烷共聚物、包含(CH3)3SiO1/2單元與(CH3)2(CH2=CH)SiO1/2單元與SiO4/2單元之共聚物、包含(CH3)2(CH2=CH)SiO1/2單元與SiO4/2單元之共聚物,此外可例示如下之有機聚矽氧烷。再者,式中,Me、Vi、Ph分別表示甲基、乙烯基、苯基,x、x'分別為1~100之整數。
ViMe2SiO(Me2SiO)xSiMe2Vi
ViPhMeSiO(Me2SiO)xSiMePhVi
ViPh2SiO(Me2SiO)xSiPh2Vi
ViMe2SiO(Me2SiO)x(Ph2SiO)x'SiMe2Vi
ViPhMeSiO(Me2SiO)x(Ph2SiO)x'SiPhMeVi
ViPh2SiO(Me2SiO)x(Ph2SiO)x'SiPh2Vi
ViMe2SiO(MePhSiO)xSiMe2Vi
MePhViSiO(MePhSiO)xSiMePhVi
Ph2ViSiO(MePhSiO)xSiPh2Vi
ViMe2SiO(Ph2SiO)x(PhMeSiO)x'SiMe2Vi
ViPhMeSiO(Ph2SiO)x(PhMeSiO)x'SiPhMeVi
ViPh2SiO(Ph2SiO)x(PhMeSiO)x'SiPh2Vi
(B)成分為本組合物之交聯劑,為一分子中具有至少2個鍵結矽原子之氫原子之有機氫聚矽氧烷。作為(B)成分之分子結構,例如可列舉直鏈狀、一部分具有支鏈之直鏈狀、支鏈狀、環狀、樹枝狀,較佳為直鏈狀、一部分具有支鏈之直鏈狀、樹枝狀。(B)成分中之鍵結矽原子之氫原子之鍵結位置並無限定,例如可列舉分子鏈之末端及/或側鏈。又,作為(B)成分中之氫原子以外之鍵結矽原子之基,可例示:甲基、乙基、丙基等烷基;苯基、甲苯基、二甲苯基等芳基;苄基、苯乙基等芳烷基;3-氯丙基、3,3,3-三氟丙基等鹵化烷基,較佳為甲基、苯基。又,(B)成分之黏度並無限定,較佳為25℃下之黏度為1~10,000mPa‧s之範圍內,尤佳為1~1,000mPa‧s之範圍內。
作為此種(B)成分之有機氫聚矽氧烷,可例示:1,1,3,3-四甲基二矽氧烷、1,3,5,7-四甲基環四矽氧烷、三(二甲基氫矽烷氧基)甲基矽烷、三(二甲基氫矽烷氧基)苯基矽烷、1-縮水甘油氧基丙基-1,3,5,7-四甲基環四矽氧烷、1,5-縮水甘油氧基丙基-1,3,5,7-四甲基環四矽氧烷、1-縮水甘油氧基丙基-5-三甲氧基矽烷基乙基-1,3,5,7-四甲基環四矽氧烷、三甲基矽氧基封阻分子鏈兩末端之甲基氫聚矽氧烷、三甲基矽氧基封阻分子鏈兩末端之二甲基矽氧烷-甲基氫矽氧烷共聚物、二
甲基氫矽氧基封阻分子鏈兩末端之二甲基聚矽氧烷、二甲基氫矽氧基封阻分子鏈兩末端之二甲基矽氧烷-甲基氫矽氧烷共聚物、三甲基矽氧基封阻分子鏈兩末端之甲基氫矽氧烷-二苯基矽氧烷共聚物、三甲基矽氧基封阻分子鏈兩末端之甲基氫矽氧烷-二苯基矽氧烷-二甲基矽氧烷共聚物、三甲氧基矽烷之水解縮合物、包含(CH3)2HSiO1/2單元與SiO4/2單元之共聚物、及包含(CH3)2HSiO1/2單元與SiO4/2單元與(C6H5)SiO3/2單元共聚物,此外可例示如下之有機氫聚矽氧烷。再者,式中之Me、Vi、Ph、Naph分別表示甲基、乙烯基、苯基、萘基,y、y'分別為1~100之整數,c、d、e、f為正數,其中,分子中之c、d、e、f之合計為1。
HMe2SiO(Ph2SiO)ySiMe2H
HMePhSiO(Ph2SiO)ySiMePhH
HMeNaphSiO(Ph2SiO)ySiMeNaphH
HMePhSiO(Ph2SiO)y(MePhSiO)y'SiMePhH
HMePhSiO(Ph2SiO)y(Me2SiO)y'SiMePhH
(HMe2SiO1/2)c(PhSiO3/2)d
(HMePhSiO1/2)c(PhSiO3/2)d
(HMePhSiO1/2)c(NaphSiO3/2)d
(HMe2SiO1/2)c(NaphSiO3/2)d
(HMePhSiO1/2)c(HMe2SiO1/2)d(PhSiO3/2)e
(HMe2SiO1/2)c(Ph2SiO2/2)d(PhSiO3/2)e
(HMePhSiO1/2)c(Ph2SiO2/2)d(PhSiO3/2)e
(HMe2SiO1/2)c(Ph2SiO2/2)d(NaphSiO3/2)e
(HMePhSiO1/2)c(Ph2SiO2/2)d(NaphSiO3/2)e
(HMePhSiO1/2)c(HMe2SiO1/2)d(NaphSiO3/2)e
(HMePhSiO1/2)c(HMe2SiO1/2)d(Ph2SiO2/2)e(NaphSiO3/2)f
(HMePhSiO1/2)c(HMe2SiO1/2)d(Ph2SiO2/2)e(PhSiO3/2)f
關於(B)成分之含量,相對於(A)成分與(C)成分中所含之烯基之合計1莫耳,為本成分中之鍵結矽原子之氫原子成為0.1~10.0莫耳之量,較佳為成為0.5~5莫耳之量。其原因在於,若(B)成分之含量為上述範圍之上限以下,則所獲得之硬化物之機械特性良好,另一方面,若為上述範圍之下限以上,則所獲得之組合物之硬化性良好。
(C)成分係用以對本組合物賦予接著性之接著促進劑。關於(C)成分係如上所述。關於(C)成分之含量,相對於(A)成分100質量份,為0.01~50質量份之範圍內,較佳為0.1~25質量份之範圍內。其原因在於,若(C)成分之含量為上述範圍之下限以上,則可對所獲得之組合物賦予充分之接著性,另一方面,若為上述範圍之下限以下,則變得難以阻礙所獲得之組合物之硬化性,又,可抑制所獲得之硬化物之著色等。
(D)成分係用以促進本組合物硬化之矽氫化反應用觸媒,可例示鉑系觸媒、銠系觸媒、鈀系觸媒。尤其是由於可顯著地促進本組合物之硬化,故而較佳為(D)成分為鉑系觸媒。作為該鉑系觸媒,可例示:鉑細粉末、氯鉑酸、氯鉑酸之醇溶液、鉑-烯基矽氧烷錯合物、鉑-烯烴錯合物、鉑-羰基錯合物,較佳為鉑-烯基矽氧烷錯合物。
(D)成分之含量為對於促進本組合物之硬化而言有效之量。具體而言,由於可充分地促進本組合物之硬化反應,故而(D)成分之含量相對於本組合物,較佳為以質量單位計(D)成分中之觸媒金屬成為0.01~500ppm之範圍內之量,更佳為成為0.01~100ppm之範圍內之量,尤佳為成為0.01~50ppm之範圍內之量。
又,於本組合物中,作為其他任意之成分,亦可含有2-甲基-3-丁炔-2-醇、3,5-二甲基-1-己炔-3-醇、2-苯基-3-丁炔-2-醇等炔醇;3-甲基-3-戊烯-1-炔、3,5-二甲基-3-己烯-1-炔等烯炔化合物;1,3,5,7-四
甲基-1,3,5,7-四乙烯基環四矽氧烷、1,3,5,7-四甲基-1,3,5,7-四己烯基環四矽氧烷、苯并三唑等反應抑制劑。於本組合物中,該反應抑制劑之含量並無限定,相對於上述(A)成分~(C)成分之合計100質量份,較佳為0.0001~5質量份之範圍內。
進而,於本組合物中,為了提高硬化過程中硬化物對於所接觸之基材之接著性,亦可含有(C)成分以外之接著促進劑。作為該接著促進劑,較佳為一分子中具有至少1個鍵結矽原子之烷氧基之有機矽化合物。作為該烷氧基,可例示甲氧基、乙氧基、丙氧基、丁氧基、甲氧基乙氧基,尤佳為甲氧基。又,作為該有機矽化合物之鍵結矽原子之烷氧基以外之基,可例示:烷基、烯基、芳基、芳烷基、鹵化烷基等經取代或未經取代之一價烴基;3-縮水甘油氧基丙基、4-縮水甘油氧基丁基等縮水甘油氧基烷基;2-(3,4-環氧環己基)乙基、3-(3,4-環氧環己基)丙基等環氧環己基烷基;4-氧雜環丙基丁基、8-氧雜環丙基辛基等氧雜環丙基烷基等含環氧基之一價有機基;3-甲基丙烯醯氧基丙基等含丙烯醯基之一價有機基;氫原子。較佳為該有機矽化合物具有鍵結矽原子之烯基或鍵結矽原子之氫原子。又,由於可賦予對各種基材之良好接著性,故而較佳為該有機矽化合物為一分子中具有至少1個含環氧基之一價有機基者。作為此種有機矽化合物,可例示有機矽烷化合物、有機矽氧烷低聚物、矽酸烷基酯。作為該有機矽氧烷低聚物或矽酸烷基酯之分子結構,可例示直鏈狀、一部分具有支鏈之直鏈狀、支鏈狀、環狀、網狀,尤佳為直鏈狀、支鏈狀、網狀。作為此種有機矽化合物,可例示:3-縮水甘油氧基丙基三甲氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷等矽烷化合物;一分子中分別具有至少1個鍵結矽原子之烯基或鍵結矽原子之氫原子、及鍵結矽原子之烷氧基之矽氧烷化合物,具有至少1個鍵結矽原子之烷氧基之矽烷化合物或矽氧烷化合物與一分
子中分別具有至少1個鍵結矽原子之羥基及鍵結矽原子之烯基的矽氧烷化合物之混合物,聚矽酸甲酯、聚矽酸乙酯、含環氧基之聚矽酸乙酯。
進而,於本組合物中,可調配用以轉換自利用本組成之硬化物密封或被覆而成之發光元件所放出之光之波長,而獲得所需波長之光的螢光體。作為此種螢光體,可例示:廣泛地用於發光二極體(LED)之包含氧化物系螢光體、氮氧化物系螢光體、氮化物系螢光體、硫化物系螢光體、氧硫化物系螢光體等之黃色、紅色、綠色、藍色發光螢光體。作為氧化物系螢光體,可例示:包含鈰離子之釔、鋁、石榴石系之YAG(Yttrium Aluminum Garnet,釔-鋁-石榴石)系綠色~黃色發光螢光體、包含鈰離子之鋱、鋁、石榴石系之TAG(Terbium Aluminum Garnet,鋱-鋁-石榴石)系黃色發光螢光體、及包含鈰或銪離子之矽酸酯系綠色~黃色發光螢光體。作為氮氧化物螢光體,可例示:包含銪離子之矽、鋁、氧、氮系之塞隆(Sialon)系紅色~綠色發光螢光體。作為氮化物系螢光體,可例示:包含銪離子之鈣、總、鋁、矽、氮系之CASN系紅色發光螢光體。作為硫化物系,可例示:包含銅離子或鋁離子之ZnS系綠色顯色螢光體。作為氧硫化物系螢光體,可例示:包含銪離子之Y2O2S系紅色發光螢光體。該等螢光體可使用1種或2種以上之混合物。於本組合物中,螢光體之含量相對於(A)成分與(B)成分之合計量為0.1~70質量%之範圍內,較佳為1~20質量%之範圍內。
又,於本組合物中,只要無損本發明之目的,則作為其他任意之成分,亦可含有:二氧化矽、玻璃、氧化鋁、氧化鋅等無機填充劑;聚甲基丙烯酸酯樹脂等有機樹脂細粉末;耐熱劑、染料、顏料、阻燃性賦予劑、溶劑等。
作為任意成分而添加之成分中,為了充分地抑制因空氣中之含
硫氣體所引起之光半導體裝置中之銀電極或基板之銀鍍層之變色,可添加選自由表面被覆有選自由Al、Ag、Cu、Fe、Sb、Si、Sn、Ti、Zr及稀土元素所組成之群中之至少1種元素之氧化物的氧化鋅細粉末、利用不具有烯基之有機矽化合物進行過表面處理之氧化鋅細粉末、及碳酸鋅之水合物細粉末所組成之群中之平均粒徑為0.1nm~5μm之至少一種細粉末。
於表面被覆有氧化物之氧化鋅細粉末中,作為稀土元素,可例示釔、鈰、銪。作為氧化鋅細粉末之表面之氧化物,可例示:Al2O3、AgO、Ag2O、Ag2O3、CuO、Cu2O、FeO、Fe2O3、Fe3O4、Sb2O3、SiO2、SnO2、Ti2O3、TiO2、Ti3O5、ZrO2、Y2O3、CeO2、Eu2O3、及2種以上該等氧化物之混合物。
於利用有機矽化合物進行過表面處理之氧化鋅細粉末中,該有機矽化合物係不具有烯基者,可例示:有機矽烷、有機矽氮烷、聚甲基矽氧烷、有機氫聚矽氧烷、及有機矽氧烷低聚物,具體而言,可例示:三甲基氯矽烷、二甲基氯矽烷、甲基三氯矽烷等有機氯矽烷;甲基三甲氧基矽烷、甲基三乙氧基矽烷、苯基三甲氧基矽烷、乙基三甲氧基矽烷、正丙基三甲氧基矽烷、γ-甲基丙烯醯氧基丙基三甲氧基矽烷等有機三烷氧基矽烷;二甲基二甲氧基矽烷、二甲基二乙氧基矽烷、二苯基二甲氧基矽烷等二有機二烷氧基矽烷;三甲基甲氧基矽烷、三甲基乙氧基矽烷等三有機烷氧基矽烷;該等有機烷氧基矽烷之部分縮合物;六甲基二矽氮烷等有機矽氮烷;聚甲基矽氧烷、有機氫聚矽氧烷、具有矽烷醇基或烷氧基之有機矽氧烷低聚物、包含R6SiO3/2單元(式中,R6為甲基、乙基、丙基等烷基,苯基等芳基所例示之除烯基以外之一價烴基)或SiO4/2單元且具有矽烷醇基或烷氧基之樹脂狀有機聚矽氧烷。
又,於本組合物中,由於可進而抑制因空氣中之含硫氣體引起
之銀電極或基板之銀鍍層之變色,故而作為任意之成分,亦可含有三唑系化合物。作為此種成分,可例示:1H-1,2,3-三唑、2H-1,2,3-三唑、1H-1,2,4-三唑、4H-1,2,4-三唑、2-(2'-羥基-5'-甲基苯基)苯并三唑、1H-1,2,3-三唑、2H-1,2,3-三唑、1H-1,2,4-三唑、4H-1,2,4-三唑、苯并三唑、甲苯并三唑、羧基苯并三唑、1H-苯并三唑-5-羧酸甲酯、3-胺基-1,2,4-三唑、4-胺基-1,2,4-三唑、5-胺基-1,2,4-三唑、3-巰基-1,2,4-三唑、氯苯并三唑、硝基苯并三唑、胺基苯并三唑、環己并[1,2-d]三唑、4,5,6,7-四羥基甲苯并三唑、1-羥基苯并三唑、乙基苯并三唑、萘并三唑、1-N,N-雙(2-乙基己基)-[(1,2,4-三唑-1-基)甲基]胺、1-[N,N-雙(2-乙基己基)胺基甲基]苯并三唑、1-[N,N-雙(2-乙基己基)胺基甲基]甲苯并三唑、1-[N,N-雙(2-乙基己基)胺基甲基]羧基苯并三唑、1-[N,N-雙(2-羥基乙基)胺基甲基]苯并三唑、1-[N,N-雙(2-羥基乙基)胺基甲基]甲苯并三唑、1-[N,N-雙(2-羥基乙基)胺基甲基]羧基苯并三唑、1-[N,N-雙(2-羥基丙基)胺基甲基]羧基苯并三唑、1-[N,N-雙(1-丁基)胺基甲基]羧基苯并三唑、1-[N,N-雙(1-辛基)胺基甲基]羧基苯并三唑、1-(2',3'-二羥基丙基)苯并三唑、1-(2',3'-二羧基乙基)苯并三唑、2-(2'-羥基-3',5'-二第三丁基苯基)苯并三唑、2-(2'-羥基-3',5'-戊基苯基)苯并三唑、2-(2'-羥基-4'-辛氧基苯基)苯并三唑、2-(2'-羥基-5'-第三丁基苯基)苯并三唑、1-羥基苯并三唑-6-羧酸、1-油醯基苯并三唑、1,2,4-三唑-3-醇、5-胺基-3-巰基-1,2,4-三唑、5-胺基-1,2,4-三唑-3-羧酸、1,2,4-三唑-3-羧醯胺、4-胺基脲唑、及1,2,4-三唑-5-酮。該苯并三唑化合物之含量並無特別限定,於本組合物中以質量單位計為成為0.01ppm~3%之範圍內之量,較佳為成為0.1ppm~1%之範圍內之量。
本組合物係於室溫下進行硬化或藉由加熱進行硬化,但為了迅速硬化,較佳為進行加熱。作為該加熱溫度,較佳為50~200℃之範
圍內。
其次,對本發明之半導體裝置進行詳細說明。
本發明之半導體裝置之特徵在於:其係利用上述硬化性聚矽氧組合物之硬化物對半導體元件進行密封而成。作為此種本發明之半導體裝置,可例示發光二極體(LED)、光電耦合器、CCD(Charge Coupled Device,電荷耦合元件)。又,作為半導體元件,可例示發光二極體(LED)晶片、固體攝像元件。
將作為本發明之半導體裝置之一例的單獨體之表面安裝型LED之剖面圖示於圖1。於圖1所示之LED中,發光元件(LED晶片)1係黏晶於引線框架2上,該發光元件(LED晶片)1係接合線4而與引線框架3進行打線結合。該發光元件(LED晶片)1之周圍設置有殼材5,該殼材5之內側之發光元件(LED晶片)1係利用本發明之硬化性聚矽氧組合物之硬化物6而被密封。
作為製造圖1所示之表面安裝型LED的方法,可例示:將發光元件(LED晶片)1黏晶於引線框架2上,將該發光元件(LED晶片)1與引線框架3利用金製之接合線4進行打線接合,繼而於發光元件(LED晶片)1之周圍所設置之殼材5之內側填充本發明之硬化性聚矽氧組合物後,藉由在50~200℃下進行加熱而使之硬化的方法。
藉由實施例,對本發明之有機矽氧烷、硬化性聚矽氧組合物及半導體裝置進行詳細說明。再者,式中之Me、Vi、Ph及Ep分別表示甲基、乙烯基、苯基、及3-縮水甘油氧基丙基。
向反應容器中投入苯基三甲氧基矽烷400g(2.02mol)及1,3-二乙烯基-1,3-二苯基二甲基二矽氧烷93.5g(0.30mol),預先混合後,投入三氟甲磺酸1.74g(11.6mmol),於攪拌下投入水110g(6.1mol),並進
行2小時加熱回流。其後,進行加熱常壓蒸餾,直至達到85℃為止。
繼而,投入甲苯89g及氫氧化鉀1.18g(21.1mmol),進行加熱常壓蒸餾,直至反應溫度達到120℃為止,於該溫度下反應6小時。其後,冷卻至室溫,投入乙酸0.68g(11.4mmol)進行中和。將所生成之鹽過濾分離後,自所獲得之透明溶液加熱減壓去除低沸點物,而製備下述平均單元式所表示之有機聚矽氧烷樹脂347g(產率:98%),
(MePhViSiO1/2)0.23(PhSiO3/2)0.77。
向反應容器中加入環狀甲基乙烯基矽氧烷30g、鉑-1,3-二乙烯基-1,1,3,3-四甲基二矽氧烷錯合物之甲苯溶液0.011g,並加熱至100℃。其次,滴加式:
所表示之二矽氧烷21.5g。滴加結束後,反應2小時,藉由IR光譜分析(infrared absorption spectrum analysis,紅外吸收光譜分析)確認反應混合物中無鍵結矽原子之氫原子。其後,於減壓下去除低沸點成分,而獲得淡黃色液體。該液體之29Si-NMR分析(29Si-nuclear magnetic resonance analysis,29Si-核磁共振分析)之結果為,於-32ppm附近、-18.4ppm附近、7.9~9ppm附近可見訊號,據此得知為平均式:[化23]
所表示之有機矽化合物。
向反應容器中加入環狀甲基乙烯基矽氧烷20g、鉑-1,3-二乙烯基-1,1,3,3-四甲基二矽氧烷錯合物之甲苯溶液0.013g,並加熱至100℃。其次,滴加式:
所表示之二矽氧烷14.4g(0.058mol)與式:
所表示之二矽氧烷17.2g(0.058mol)之混合物。滴加結束後,加熱2小時,藉由IR光譜確認反應混合物中無鍵結矽原子之氫原子。其後,於減壓下去除低沸點成分,而獲得淡黃色液體。該液體之29Si-NMR分析之結果為,於-42ppm附近、-32ppm、-18.4ppm附近、7.3
~8.7ppm附近觀察到訊號,據此得知為平均式:
所表示之有機矽化合物。
向反應容器中加入環狀甲基乙烯基矽氧烷15g、鉑-1,3-二乙烯基-1,1,3,3-四甲基二矽氧烷錯合物之甲苯溶液0.01g,並加熱至100℃。其次,滴加式:
所表示之二矽氧烷25.8g(0.087mol)。滴加結束後,加熱2小時,藉由IR光譜確認反應混合物中無鍵結矽原子之氫原子。其後,於減壓下去除低沸點成分,而獲得淡黃色液體。該液體之29Si-NMR分析之結
果為,於-42ppm附近、-32ppm、-18.4ppm附近、7.1~8.5ppm附近觀察到訊號,據此得知為平均式:
所表示之有機矽化合物。
向反應容器中加入四乙烯基二甲基矽烷氧基矽烷30g、鉑-1,3-二乙烯基-1,1,3,3-四甲基二矽氧烷錯合物之甲苯溶液0.01g,並加熱至80℃。其次,滴加式:
所表示之二矽氧烷16.9g(0.068mol)與式:
所表示之二矽氧烷20.2g(0.068mol)之混合物。滴加結束後,加熱2小時,藉由IR光譜確認反應混合物中無鍵結矽原子之氫原子。其後,於減壓下去除低沸點成分,而獲得淡黃色液體。該液體之29Si-NMR分析之結果為,於-104ppm、-42ppm附近、-32ppm、-2.6ppm附近、7.1~8.7ppm附近觀察到訊號,據此得知為平均式:
所表示之有機矽化合物。
於70℃下,向環狀甲基氫矽氧烷50g(0.835mol)、鉑-1,3-二乙烯基-1,1,3,3-四甲基二矽氧烷錯合物之甲苯溶液9.8微升之混合溶液中,滴加烯丙基縮水甘油醚47.7g(0.418mol)。滴加結束後,加熱2小時,藉由氣相層析法確認反應混合物中無烯丙基縮水甘油醚。其後,於減壓下去除低沸點成分,而獲得透明液體。該液體之29Si-NMR分析之結果為,於-32.9ppm、-17.7~-16.2ppm附近觀察到訊號,據此得知為平均式:[化32]
所表示之有機矽氧烷。
使用下述成分,製備表1所示之組成之硬化性聚矽氧組合物。再者,表1中,(D)成分之含量係以質量單位計之鉑金屬相對於硬化性聚矽氧組合物之含量(ppm)表示。又,表1中之H/Vi係表示(B)成分中所含之鍵結矽原子之氫原子相對於(A)成分與(C)成分中所含之烯基之合計1莫耳的莫耳數。
作為(A)成分,使用以下成分。
(A-1)成分:平均單元式:(Me2ViSiO1/2)0.2(PhSiO3/2)0.8
所表示之有機聚矽氧烷(乙烯基之含量=4.1質量%)
(A-2)成分:平均單元式:(MePhViSiO1/2)0.23(PhSiO3/2)0.77
所表示之有機聚矽氧烷(乙烯基之含量=4.59質量%)
(A-3)成分:25℃下之黏度為3,000mPa‧s之二甲基乙烯基矽氧基封阻分子鏈兩末端之甲基苯基聚矽氧烷(乙烯基之含量=1.8質量%)
作為(B)成分,使用以下成分。
(B-1)成分:式:HMe2SiOPh2SiOSiMe2H
所表示之有機三矽氧烷
作為(C)成分,使用以下成分。
(C-1)成分:實施例1中所製備之接著促進劑
(C-2)成分:實施例2中所製備之接著促進劑
(C-3)成分:實施例3中所製備之接著促進劑
(C-4)成分:實施例4中所製備之接著促進劑
(C-5)成分:25℃下之黏度為30mPa‧s之包含矽烷醇基封阻分子鏈兩末端之甲基乙烯基矽氧烷低聚物與3-縮水甘油氧基丙基三甲氧基矽烷之縮合反應物的接著賦予劑(乙烯基之含量=5.6質量%),
(C-6)成分:平均式:
所表示之接著促進劑
(C-7)成分:參考例1中所製備之接著促進劑
作為(D)成分,使用以下成分。
(D-1)成分:鉑-1,3-二乙烯基-1,1,3,3-四甲基二矽氧烷錯合物之1,3,5,7-四甲基-1,3,5,7-四乙烯基環四矽氧烷之溶液(含有0.1質量%之鉑之溶液)
藉由如下方式對硬化性聚矽氧組合物之硬化物及半導體裝置加以評價。
於2塊鋁板、銀板、聚鄰苯二甲醯胺板(寬25mm、長75mm、厚1mm)間夾入聚四氟乙烯樹脂製之間隔片(寬10mm、長20mm、厚1
mm),於其間隙中填充硬化性聚矽氧組合物,並利用夾具加以固定,於150℃之循環式熱風烘箱中保持1小時使之硬化。冷卻至室溫後,拆去夾具與間隔片,利用拉力試驗機將該鋁板沿水平相反方向拉伸,並測定破壞時之應力。
朝向底部經堵塞之圓筒狀之聚鄰苯二甲醯胺(PPA)樹脂製殼材5(內徑2.0mm,深1.0mm)之內底部之中心部,引線框架2、3自側壁外延,引線框架2之中央部載置有LED晶片1,LED晶片1與引線框架3係利用接合線4進行電性連接之未密封之光半導體裝置內,將硬化性聚矽氧組合物消泡並使用分注器注入其中。其後,於1次硬化溫度(70℃)下保持1小時,繼而於2次硬化溫度(150℃)下保持1小時,使硬化性聚矽氧組合物硬化,而製作圖1所示之表面安裝型發光二極體(LED)。
將藉由上述方法所製作之16個發光二極體浸漬於市售之紅色墨水中,於50℃下放置24小時。放置後,使用顯微鏡檢查紅色墨水向LED內之浸漬情況,並藉由如下基準進行評價。
◎:確認到墨水浸漬之發光二極體為2個以下。
△:確認到墨水浸漬之發光二極體為3個~8個。
×:確認到墨水浸漬之發光二極體為9個以上。
將藉由上述方法所製作之16個發光二極體,於1小時內在-40℃125℃之溫度下放置1000個循環,進行通電,檢查LED之點亮情況,並藉由如下基準進行評價。
◎:確認點亮之發光二極體為14個以上。
○:確認點亮之發光二極體為8個~13個。
△:確認點亮之發光二極體為7個以下。
將下述成分以表2所示之組成均勻混合,而製備實施例10~11及比較例6之硬化性聚矽氧組合物。再者,表2中,(D)成分之含量係以質量單位計之鉑金屬相對於硬化性聚矽氧組合物之含量(ppm)表示。又,表2中之H/Vi係表示(B)成分中所含之鍵結矽原子之氫原子相對於(A)成分與(C)成分中所含之烯基之合計1莫耳的莫耳數。
作為(A)成分,使用以下成分。
(A-4)成分:25℃下之黏度為10,000mPa‧s之平均式:Me2ViSiO(Me2SiO)500SiMe2Vi
所表示之有機聚矽氧烷[乙烯基之含量為0.15wt%)]
(A-5)成分:25℃下為白色固體狀且為甲苯可溶性之平均單元式:(Me2ViSiO1/2)0.10(Me3SiO1/2)0.40(SiO4/2)0.50(HO1/2)0.0001
所表示之一分子中具有2個以上乙烯基之有機聚矽氧烷樹脂(乙烯基之含量=3.39量%)
(A-6)成分:黏度為300mPa‧s之平均式:Me2ViSiO(Me2SiO)150SiMe2Vi
所表示之有機聚矽氧烷[乙烯基之含量為0.48wt%)]
(A-7)成分:25℃下為白色固體狀且為甲苯可溶性之平均單元式:(Me2ViSiO1/2)0.06(Me3SiO1/2)0.44(SiO4/2)0.50(HO1/2)0.0001
所表示之一分子中具有2個以上乙烯基之有機聚矽氧烷樹脂(乙烯基之含量=5.4質量%)
(A-8)成分:平均式:Me2ViSiO(Me2SiO)300SiMe2Vi
所表示之有機聚矽氧烷[乙烯基之含量為0.24wt%)]
作為(B)成分,使用以下成分。
(B-3)成分:25℃下之黏度為5mPa‧s之平均式:
Me3SiO(MeHSiO)mSiMe3
所表示之三甲基矽氧基封阻分子鏈兩末端之聚甲基氫矽氧烷(鍵結矽原子之氫原子含量=1.4質量%)
作為(C)成分,使用上述中所說明之(C-2)成分、(C-3)成分及(C-5)成分。
作為(D)成分,使用上述中所說明之(D-1)成分。
作為反應抑制劑,使用以下成分。
(E-1)成分:1-乙炔基環己醇
於2塊鋁板、銀板、聚鄰苯二甲醯胺板(寬25mm、長75mm、厚1mm)間夾入聚四氟乙烯樹脂製之間隔片(寬10mm、長20mm、厚1mm),於其間隙中填充硬化性聚矽氧組合物並利用夾具加以固定,於150℃之循環式熱風烘箱中保持1小時使之硬化。冷卻至室溫後,拆去夾具與間隔片,利用拉力試驗機將該鋁板沿水平相反方向拉伸,並測定破壞時之應力。
本發明之硬化性聚矽氧組合物由於在流動性方面優異,可硬化而形成螢光體均勻地分散且折射率較高之硬化物,故而適合作為發光二極體(LED)等光半導體裝置中之發光元件之密封劑或被覆劑。
Claims (14)
- 如請求項1之有機矽化合物,其中R3為伸乙基或伸丙基。
- 如請求項1或2之有機矽化合物,其中X為烷氧基矽烷基烷基及/或縮水甘油氧基烷基。
- 如請求項1或2之有機矽化合物,其中z為1~5之整數。
- 如請求項5之有機矽化合物,其中R3為伸乙基或伸丙基。
- 如請求項5或6之有機矽化合物,其中X為烷氧基矽烷基烷基及/或縮水甘油氧基烷基。
- 如請求項5或6之有機矽化合物,其中z為1~5之整數。
- 一種接著促進劑,其包含如請求項1至8中任一項之有機矽化合物。
- 一種硬化性聚矽氧組合物,其含有如請求項1至8中任一項之有機矽化合物作為接著促進劑。
- 如請求項10之硬化性聚矽氧組合物,其藉由矽氫化反應而硬化。
- 如請求項11之硬化性聚矽氧組合物,其中藉由矽氫化反應而硬化之硬化性聚矽氧組合物至少包含:(A)一分子中具有至少2個烯基之有機聚矽氧烷100質量份、(B)一分子中具有至少2個鍵結矽原子之氫原子之有機氫聚矽氧烷{相對於(A)成分與(C)成分中所含之烯基之合計1莫耳,提供0.1~10.0莫耳之鍵結矽原子之氫原子之量}、(C)包含如請求項1至8中任一項之有機矽化合物之接著促進劑0.01~50質量份、及(D)矽氫化反應用觸媒(對於促進本組合物之硬化而言充分之量)。
- 一種半導體裝置,其特徵在於:其係利用如請求項10至12中任一項之硬化性聚矽氧組合物之硬化物將半導體元件進行密封而成。
- 如請求項13之半導體裝置,其中半導體元件為發光元件。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014-112614 | 2014-05-30 | ||
JP2014112614 | 2014-05-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201602122A TW201602122A (zh) | 2016-01-16 |
TWI667247B true TWI667247B (zh) | 2019-08-01 |
Family
ID=54698488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104117525A TWI667247B (zh) | 2014-05-30 | 2015-05-29 | 有機矽化合物、硬化性聚矽氧組合物、及半導體裝置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10125242B2 (zh) |
EP (1) | EP3153516A4 (zh) |
JP (1) | JP6628366B2 (zh) |
KR (1) | KR20170016392A (zh) |
CN (1) | CN106459101B (zh) |
TW (1) | TWI667247B (zh) |
WO (1) | WO2015182143A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017088776A (ja) * | 2015-11-13 | 2017-05-25 | 信越化学工業株式会社 | 付加硬化型シリコーン樹脂組成物、該組成物の製造方法、及び光学半導体装置 |
US10439114B2 (en) * | 2017-03-08 | 2019-10-08 | Cree, Inc. | Substrates for light emitting diodes and related methods |
TWI762649B (zh) * | 2017-06-26 | 2022-05-01 | 日商杜邦東麗特殊材料股份有限公司 | 黏晶用固化性矽組合物 |
US11987731B2 (en) | 2018-08-10 | 2024-05-21 | Dow Toray Co., Ltd. | Organopolysiloxane composition for forming pressure sensitive adhesive layer, and use of same |
CN109294515A (zh) * | 2018-09-29 | 2019-02-01 | 烟台德邦先进硅材料有限公司 | 一种韧性优异粘接性强的led有机硅固晶胶 |
EP4015215A4 (en) * | 2019-08-13 | 2023-08-23 | Dow Toray Co., Ltd. | SELF-ADHESIVE LAYER-FORMING ORGANOPOLYSILOXA COMPOSITION AND THEIR USE |
KR20230060685A (ko) * | 2021-10-28 | 2023-05-08 | 주식회사 엘지화학 | 봉지재 필름용 조성물 및 이를 포함하는 봉지재 필름 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014046308A1 (en) * | 2012-09-21 | 2014-03-27 | Dow Corning Toray Co., Ltd. | Highly refractive surface treatment agent, and fine member and optical material surface-treated using the same |
TW201412883A (zh) * | 2012-09-07 | 2014-04-01 | Dow Corning Toray Co Ltd | 可硬化性聚矽氧組合物及光半導體裝置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5840794A (en) * | 1997-01-10 | 1998-11-24 | Dow Corning Corporation | Alkoxy functional sealants with rapid development of green strength |
US6303811B1 (en) | 1998-12-21 | 2001-10-16 | Dow Corning Corporation | Cyclic organosilicon endcapper having one aliphatic unsaturation |
JP3370313B2 (ja) * | 2000-07-17 | 2003-01-27 | コナミ株式会社 | ゲーム装置、ゲーム機の制御方法及び情報記憶媒体 |
KR100749304B1 (ko) | 2000-08-28 | 2007-08-14 | 디시이 아프릴리스, 인코포레이티드 | 양이온 중합반응을 수행할 수 있는 다작용성 에폭시모노머를 포함하는 홀로그래픽 기록 매체 |
CN101563397B (zh) * | 2006-12-21 | 2012-10-10 | 陶氏康宁公司 | 双重固化性聚合物及其制备方法与用途 |
JP5499774B2 (ja) * | 2009-03-04 | 2014-05-21 | 信越化学工業株式会社 | 光半導体封止用組成物及びそれを用いた光半導体装置 |
JP2014062198A (ja) | 2012-09-21 | 2014-04-10 | Dow Corning Toray Co Ltd | 硬化性シリコーン組成物、それを用いてなる半導体封止材および光半導体装置 |
JP5847054B2 (ja) | 2012-10-11 | 2016-01-20 | 株式会社神戸製鋼所 | 成膜装置 |
-
2015
- 2015-05-28 WO PCT/JP2015/002699 patent/WO2015182143A1/ja active Application Filing
- 2015-05-28 CN CN201580033523.9A patent/CN106459101B/zh active Active
- 2015-05-28 EP EP15798707.4A patent/EP3153516A4/en not_active Withdrawn
- 2015-05-28 KR KR1020167036884A patent/KR20170016392A/ko active IP Right Grant
- 2015-05-28 US US15/315,067 patent/US10125242B2/en not_active Expired - Fee Related
- 2015-05-28 JP JP2016523157A patent/JP6628366B2/ja active Active
- 2015-05-29 TW TW104117525A patent/TWI667247B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201412883A (zh) * | 2012-09-07 | 2014-04-01 | Dow Corning Toray Co Ltd | 可硬化性聚矽氧組合物及光半導體裝置 |
WO2014046308A1 (en) * | 2012-09-21 | 2014-03-27 | Dow Corning Toray Co., Ltd. | Highly refractive surface treatment agent, and fine member and optical material surface-treated using the same |
Also Published As
Publication number | Publication date |
---|---|
CN106459101A (zh) | 2017-02-22 |
EP3153516A4 (en) | 2018-03-07 |
KR20170016392A (ko) | 2017-02-13 |
EP3153516A1 (en) | 2017-04-12 |
US20170190878A1 (en) | 2017-07-06 |
JP6628366B2 (ja) | 2020-01-08 |
JPWO2015182143A1 (ja) | 2017-04-27 |
WO2015182143A1 (ja) | 2015-12-03 |
CN106459101B (zh) | 2019-08-20 |
TW201602122A (zh) | 2016-01-16 |
US10125242B2 (en) | 2018-11-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI667247B (zh) | 有機矽化合物、硬化性聚矽氧組合物、及半導體裝置 | |
JP6460534B2 (ja) | 硬化性シリコーン組成物、その硬化物、および光半導体装置 | |
JP6509814B2 (ja) | 硬化性シリコーン組成物、その硬化物、および光半導体装置 | |
JP6552488B2 (ja) | オルガノシロキサン、硬化性シリコーン組成物、および半導体装置 | |
JP6212122B2 (ja) | 硬化性シリコーン組成物、その硬化物、および光半導体装置 | |
JP6059010B2 (ja) | 硬化性シリコーン組成物、その硬化物、および光半導体装置 | |
JP6707446B2 (ja) | 硬化性シリコーン組成物、および光半導体装置 | |
TWI623586B (zh) | 可硬化性聚矽氧組合物、其硬化製品及光半導體裝置 | |
US9944759B2 (en) | Curable silicone composition, cured product therefrom, and optical semiconductor device | |
TWI609926B (zh) | 可硬化性聚矽氧組合物、其硬化製品及光半導體裝置 | |
WO2015186323A1 (ja) | 接着促進剤、硬化性シリコーン組成物、および半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |