TWI645422B - Test socket and conductive particle - Google Patents

Abstract

The invention relates to a test socket. The test socket includes: The electrical parts are arranged at positions corresponding to the terminals of the test target device and spaced apart from each other in the surface direction of the test socket. Each of the conductive parts includes a plurality of conductive particles, and the plurality of conductive particles are contained in an elastic insulating material Align in the thickness direction of the test socket; and an insulating support arranged between the conductive portions spaced apart from each other to support the conductive portions and insulate the conductive portions from each other in the surface direction, and the conductive particles include: a body having a pillar shape; And at least two protruding portions protruding from the upper end portion of the body, wherein recessed portions recessed toward the body are provided between adjacent protruding portions, and an angle between mutually facing inner surfaces of the protruding portions is greater than 90 ° obtuse angle.

Description

Test socket and conductive particles

The present invention relates to a test socket and conductive particles, and more particularly, to a test socket and conductive particles configured to maintain conductivity for a long time even when the test socket frequently contacts a test target device.

In general, test sockets are used during the testing process to check whether the manufactured device has defects or errors. For example, when performing an electrical test to check whether a manufactured device (a test target device) has defects or errors, the test target device and the test equipment are not directly contacted with each other but are indirectly connected to the test socket through a test socket. each other. This is because the test equipment is relatively expensive and is worn and damaged due to frequent contact with the test target device, which causes difficulties and high costs when it needs to be replaced by new test equipment. Therefore, the test socket can be detachably attached to the upper side of the test device, and then the test target device to be tested can be electrically tested by contacting the test target device with the test socket instead of the test target device with the test device. Connect to the test equipment. Thereafter, the electrical signals generated from the test equipment can be transmitted to the test target device through the test socket.

Such a test socket is called an anisotropic conductive connector, and the related art anisotropic conductive connector is shown in FIG. 1 and FIG. 2. FIG. 1 is a plan view illustrating an anisotropic conductive connection member 10 of the related art, and FIG. 2 is a cross-sectional view illustrating the anisotropic conductive connection member 10 shown in FIG. 1.

The anisotropic conductive connecting member 10 includes: an elastic anisotropic conductive film 15 having conductivity in a thickness direction of the elastic anisotropic conductive film 15; and a frame plate 20 including a metal Material and supports the elastic anisotropic conductive film 15.

As shown in FIG. 3, a plurality of penetration holes 21 are formed side by side in the length direction and the width direction of the frame plate 20, and the plurality of penetration holes 21 have a rectangular cross-sectional shape and can be formed in the frame. The plate 20 extends in the thickness direction. In the illustrated example, a plurality of position holes for aligning and placing the anisotropic conductive connector 10 are formed in a peripheral region of the frame plate 20.

In the surface direction of the elastic anisotropic conductive film 15, a plurality of conductive connection portions 16 for connecting to the electrodes are arranged at intervals in a pattern corresponding to the electrode pattern. In detail, a plurality of conductive connection group groups are arranged side by side in a length direction and a width direction of the elastic anisotropic conductive film 15, and each of the plurality of conductive connection group groups includes a grid according to a pattern. A plurality of conductive connection portions 16 arranged at a grid point. In addition, in this example, a plurality of conductive non-connection portions 18 that can extend in its own thickness direction are arranged spaced apart from each other at a position where the group of conductive connection portions are not arranged to surround each other. In the group of conductive connection portions, the conductive non-connection portions 18 are arranged in the surface direction at the same pitch as that of the conductive connection portions 16. The conductive connection portion 16 and the conductive non-connection portion 18 are insulated from each other by an insulating portion 17 arranged between the conductive connection portion 16 and the conductive non-connection portion 18. Each of the conductive connection portion 16 and the conductive non-connection portion 18 includes magnetic conductive particles that are closely arranged in the insulating elastic polymer in the thickness direction of the insulating elastic polymer, and the insulating portion 17 Contains the insulating elastic polymer. In the illustrated example, each of the conductive connection portions 16 includes protruding portions 16A and 16B that respectively protrude from both sides of the insulating portion 17. In addition, the elastic anisotropic conductive film 15 is integrally fixed to the frame plate 20 and is supported by the frame plate 20 so that the conductive connection portion groups are respectively located in the through holes 21 of the frame plate 20, and the conductive non-connection portions 18 is placed on the frame plate 20.

Such an anisotropic conductive connection member of the related art can be manufactured as follows.

First, a frame plate 20 as shown in FIG. 3 is manufactured. Next, a flowable molding material is prepared by dispersing the magnetic conductive particles P into a liquid polymer molding material that can be cured into an insulating elastic polymer. In addition, as shown in FIG. 3, a mold 50 for forming an elastically anisotropic conductive film is prepared. Next, the spacer plate (not shown) is used to align and place the frame plate 20 above the upper surface of the lower mold 56 of the mold 50, and the spacer 50 (not shown) is used to align the upper mold 51 of the mold 50 Aligned and disposed above the frame plate 20. Next, the prepared molding material is filled in a molding space formed by the upper mold 51, the lower mold 56, the partition wall, and the frame plate 20 to form a molding material layer 15A.

Next, an electromanget or a permanent magnet is placed on the upper surface of the ferromagnetic substrate 52 of the upper mold 51 and the lower surface of the ferromagnetic substrate 57 of the lower mold 56 so that the molding material layer 15A A parallel magnetic field with a non-uniform intensity distribution is applied in the thickness direction of. That is, a parallel magnetic field is applied in the thickness direction of the forming material layer 15A, and the parallel magnetic field has a relatively high magnetic strength between the magnetic member 54A of the upper mold 51 and the magnetic member 59A corresponding to the magnetic member 54A of the lower mold 56. . Next, as shown in FIG. 4, the conductive particles P dispersed in the forming material layer 15A are gathered in a region between the magnetic member 54A of the upper mold 51 and the magnetic member 59A of the lower mold 56, and the conductive particles P are made. It is aligned in the thickness direction of the forming material layer 15A.

In this state, the molding material layer 15A is cured, thereby forming the elastic anisotropic conductive film 15 fixed to the frame plate 20. The elastic anisotropic conductive film 15 includes a conductive connection portion 16 and a conductive non-connection portion 18 including conductive particles P closely arranged between the magnetic member 54A of the upper mold 51 and the magnetic member 59A of the lower mold 56; and an insulating portion. 17. The conductive particles P are not provided or have very few conductive particles P, and the insulating portion 17 is arranged between the conductive connection portion 16 and the conductive non-connection portion 18. In this way, an anisotropic conductive connection 10 is manufactured.

Such an anisotropic conductive connection includes a conductive portion in which conductive particles are arranged in an elastic insulating material, and the conductive portion frequently contacts a terminal of a test target device. As described above, when the terminals of the test target device frequently contact the conductive portion, the conductive particles distributed in the elastic insulating material can be easily separated from the elastic insulating material. Specifically, since the conductive particles have a spherical shape, the conductive particles can be more easily separated from the elastic insulating material. As described above, if the conductive particles are separated, the conductivity of the anisotropic conductive connection member may be reduced, and thus the test reliability may be negatively affected.

In Korean Patent No. 1019721, entitled "Test Socket with Conductive Pillar Particles", filed by the applicant of the present application, a solution for solving the problems related to the conductive particles of the prior art is disclosed. Problematic technology. As shown in FIG. 5, such a test socket 30 includes: a conductive portion 31 including a plurality of conductive pillar particles 311 respectively, the plurality of conductive pillar particles 311 being contained in an elastic insulating material; and an insulating support body 32 that supports conductive部 31。 31. Since the conductive pillar particles 311 are distributed in the conductive portion 31 of the test socket 30, the contact area between adjacent conductive pillar particles 311 can be relatively large, and therefore the resistance of the test socket 30 can be reduced, thereby providing a stable Electrical connection. In addition, since the conductive pillar particles 311 and the elastic insulating material have a relatively large contact area compared to the spherical conductive particles of the prior art, the adhesion between the conductive pillar particles 311 and the elastic insulating material is strong, and therefore even when When the test is repeatedly performed, the conductive pillar particles 311 may still not be easily separated from the elastic insulating material.

Although the conductive pillar particles 311 provide improved conductivity compared to the spherical conductive particles, if the conductive pillar particles 311 closely arranged in the conductive portion 31 are not vertically aligned as shown in FIG. 6 (a), the conductive pillars The particles 311 may be compressed into a non-aligned state due to a compressive force as shown in FIG. 6 (b). In this case, the contact point between the conductive pillar particles 311 may not be maintained, and the conductive pillar particles 311 may not be able to return to their original positions even when the compressive force is released.

The present invention is provided to solve the above problems. More specifically, it is an object of the present invention to provide a test socket configured to prevent the conductive particles from being separated from the conductive portion during frequent contact, so as to ensure a strong electrical connection between the conductive particles while the conductive portion is compressed and expanded. And provide a conductive particle.

To achieve the above objective, an embodiment of the present invention provides a test socket configured to be placed between a test target device and a test device to electrically connect a terminal of the test target device to the test device. The test socket includes a plurality of conductive parts arranged at positions corresponding to the terminals of the test target device and spaced apart from each other in a surface direction of the test socket. Each includes a plurality of conductive particles contained in an elastic insulating material and aligned in a thickness direction of the test socket; and an insulating support arranged between the conductive portions spaced apart from each other. To support the conductive portions and insulate the conductive portions from each other in the surface direction, wherein each of the conductive particles includes: a body having a pillar shape; and at least two protruding portions from the An upper end portion of the body is protruded, and a recessed portion recessed toward the body is provided between the protruding portions adjacent to each other, and the inner sides of the protruding portions facing each other The angle between the surface of an obtuse angle greater than 90 °.

The shape and size of the body can make the conductive particles stand in the thickness direction when the conductive particles are aligned in the elastic insulating material using a magnetic field.

Each of the bodies may have an h / w ratio greater than 1, where h refers to a vertical length measured from the upper end portion to the lower end portion of the body, and w refers to a direction perpendicular to the vertical length The horizontal length of the body.

Each of the bodies may have a w / d ratio greater than 1, where d refers to the thickness of the body.

The mutually facing inner surfaces of the protrusions may be inclined to guide protrusions of adjacent conductive particles into the depressions.

A lateral surface may be provided between the upper end portion and the lower end portion of the body, and the lateral surface may face from the upper end portion and the lower end portion of the body toward a center portion of the body. Inside depression.

A plurality of uneven portions may be provided on a lateral surface of the body.

At least two protrusions may protrude from a lower end portion of the body.

The upper end portion of the body and the protruding portion on the lower end portion may be symmetrical with respect to the body.

In order to achieve the above object, an embodiment of the present invention provides a conductive particle for use in a test socket configured to be placed between a test target device and a test device to connect a terminal of the test target device. The pad electrically connected to the test device, wherein the conductive particles include a plurality of conductive particles aligned in a conductive portion of the test socket in a thickness direction of the test socket, and the conductive particles are arranged in elasticity. In the insulating material, and when the terminal of the test target device presses the conductive portion, the conductive particles arranged in the conductive portion contact each other to make the conductive portion conductive, wherein Each of the conductive particles includes: a body having a pillar shape; and at least two protrusions protruding from an upper end portion of the body, wherein a protrusion toward the body is provided between the protrusions adjacent to each other. A recessed recessed portion, and an angle between mutually facing inner surfaces of the protruding portions is an obtuse angle greater than 90 °.

The mutually facing inner surfaces of the protrusions may be inclined to guide protrusions of adjacent conductive particles into the depressions.

The body can be elongated in one direction so that when the conductive particles are aligned in the elastic insulating material by a magnetic field, the conductive particles can stand in the thickness direction of the test socket.

At least two protrusions may protrude from a lower end portion of the body.

According to the present invention, the angle between the mutually facing inner surfaces of the conductive particles of the test socket is an obtuse angle (ie, greater than 90 °), and thus one-point contact can be maintained between the coupled conductive particles. ) To improve contact stability.

Hereinafter, a test socket according to an embodiment of the present invention will be explained in detail with reference to the accompanying drawings.

According to a preferred embodiment of the present invention, the test socket 100 is in the form of a sheet having a predetermined thickness, and is configured to block current in a surface direction of the test socket 100 and conduct current in a thickness direction of the test socket 100 to be perpendicular to The terminal 131 of the test target device 130 is electrically connected to the pad 141 of the test device 140 in a direction. The test socket 100 can be used to perform an electrical test on the test target device 130.

The test socket 100 includes a conductive portion 110 and an insulating support 120. The conductive portion 110 extends in the thickness direction, and when the conductive portion 110 is pressed in the thickness direction, the conductive portion 110 can be compressed and can conduct current in the thickness direction. The conductive portions 110 are spaced apart from each other in the surface direction and the insulating support 120 is arranged between the conductive portions 110 so that a current may not flow between the conductive portions 110. The conductive portion 110 and the insulating support 120 will now be described in detail.

An upper end portion of the conductive portion 110 may contact a terminal 131 of the test target device 130, and a lower end portion of the conductive portion 110 may contact a pad 141 of the test device 140. In the elastic insulating material, a plurality of conductive particles 111 are vertically aligned between an upper end portion and a lower end portion of each of the conductive portions 110. When the conductive part 110 is pressed by the test target device 130, the conductive particles 111 may contact each other and conduct current. That is, when the conductive portion 110 is not pressed by the test target device 130, the conductive particles 111 are slightly spaced apart from or in contact with each other, and when the conductive portion 110 is pressed and compressed by the test target device 130, the conductive particles 111 can be firmly in contact with each other , And therefore can conduct current.

Specifically, the conductive portion 110 is formed by closely and vertically arranging conductive particles 111 in an elastic insulating material, and the conductive portion 110 is located at a position approximately corresponding to the terminal 131 of the test target device 130.

Preferably, the elastic insulating material may include an insulating polymer substance having a crosslinked structure. A variety of curable polymer forming materials can be used to obtain such crosslinked polymer materials. Specific examples of the cross-linked polymer substance include: conjugated diene rubber, such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene -Butadiene copolymer rubber (styrene-butadiene copolymer rubber), or acrylonitrile-butadiene copolymer rubber (acrylonitrile-butadiene copolymer rubber); hydrogenation products of conjugated diene rubber; block copolymer rubber (block copolymer rubber), such as styrene-butadiene-diene block copolymer rubber (styrene-butadiene-diene block copolymer rubber) or styrene-isoprene block copolymer rubber (styrene-isoprene block copolymer rubber); Hydrogenation products of block copolymer rubber; chloroprene rubber; urethane rubber; polyester rubber; epichlorohydrin rubber; silicone rubber (Silicone rubber); ethylene-propylene copolymer rubber (ethylene-propylene copolymer rubber); and ethylene -Propylene-diene copolymer rubber. Since silicone rubber has better formability and electrical properties, silicone rubber can be used.

Preferably, the silicone rubber can be obtained from a liquid silicone rubber by crosslinking or condensation. Liquid silicone rubber may preferably be one when a shear rate of 10 ^-1 sec (shear rate) having a viscosity of not higher than ¹⁰⁵ poises (Poise) when measured. The liquid silicone rubber may be one of condensation curing silicone rubber, addition curing silicone rubber, and silicone rubber having vinyl or hydroxyl groups. Specific examples of the liquid silicone rubber may include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, and methylphenyl vinyl silicone raw rubber (Methyl phenyl vinyl silicon raw rubber).

Each of the conductive particles 111 includes a body 112 having a column shape as a whole, and a protruding portion 113 protruding from an upper end portion and a lower end portion of the body 112.

The body 112 has an approximately columnar shape, and specifically has a thin rectangular prism shape. Although the body 112 is described as having a quadrangular prism shape in the above example, the body 112 is not limited thereto. For example, the body 112 may have a polygonal prism shape.

The shape and size of the body 112 are determined so that the conductive particles 111 can stand in the thickness direction by aligning the conductive particles 111 in the elastic insulating material by using a magnetic field. That is, when the test socket 100 is manufactured, the mold 150 is filled with the liquid silicone rubber in which the conductive particles 111 are distributed, and a magnetic field is applied in one direction to linearly arrange the conductive particles 111 to correspond to the conductive portion 110. position. For this process, it is important to size the body 112 so that the conductive particles 111 can stand in one direction. To this end, the body 112 may have a long column shape extending in one direction.

Specifically, each of the bodies 112 may have an h / w ratio greater than 1, where h refers to a vertical length from an upper end portion to a lower end portion of the body 112, and w refers to a body perpendicular to the vertical length. The horizontal length of 112. When the h / w ratio is greater than 1, the vertical length of the body 112 is greater than the horizontal length of the body 112, and therefore the body 112 can easily stand in a direction parallel to the thickness direction. Therefore, when the conductive particles 111 are aligned in the thickness direction, the protrusions 113 extending from the adjacent bodies 112 can be easily coupled to each other. However, if the h / w ratio is less than 1, the conductive particles 111 may be oriented differently, and therefore, the protrusions 113 may not be easily coupled to each other.

In addition, the body 112 may have a w / d ratio greater than 1, where d refers to the thickness of the body 112. That is, the body 112 may have a rectangular horizontal cross-section instead of a square horizontal cross-section. When the body 112 has a w / d ratio greater than 1, the conductive particles 111 may be oriented in a specific direction. That is, the conductive particles 111 may not rotate to a random angle but may be oriented in a specific direction with respect to the central axis of the body 112 (passing through the center of the body 112 in parallel with the vertical length of the body 112), and thus the upper portion is conductive The particles and the protruding portions 113 of the lower conductive particles 111 can be easily coupled to each other. However, if the w / d ratio is less than 1, the conductive particles 111 may be rotated to different angles, and therefore, the protruding portions 113 of the conductive particles 111 may not be easily coupled to each other. The w / d ratio may be preferably greater than 1, more preferably 2 or greater, and even more preferably 5 or greater.

If the size of the body 112 is determined as described above, the protruding portions 113 of the conductive particles 111 can be easily coupled to each other when the conductive particles 111 are aligned with each other.

In addition, a lateral surface 1121 for connecting the upper end surface and the lower end surface is formed between the upper end portion and the lower end portion of each of the bodies 112, and the lateral surface 1121 faces the body from the upper end portion and the lower end portion of the body 112. The center of 112 is recessed inward. That is, the elastic insulating material may be even filled in the concave central portion of the lateral surface 1121, and thus the separation of the conductive particles 111 from the conductive portion 110 may be minimized.

At least two protrusions 113 may protrude from an upper end portion of each of the bodies 112. In addition, the protruding portion 113 protruding from the lower end portion of the body 112 may have a shape or form corresponding to the shape or form of the protruding portion 113 protruding from the upper end portion of the body 112. A recessed portion 1132 recessed toward the main body 112 is formed between adjacent protruding portions 113. Preferably, the angle q between the inner surfaces 1131 of the recessed portions 1132 formed between the adjacent protruding portions 113 may be an obtuse angle (ie, greater than 90 °). The angle q between the inner surfaces 1131 may have any value greater than 90 °. Preferably, the angle q may be in a range of 95 ° to 170 °, and more preferably in a range of 100 ° to 160 °.

As described above, since the angle q between the inner surfaces 1131 is greater than 90 °, when the test socket 100 is manufactured, the conductive particles 111 contained in the mold 150 can be closely gathered by magnetic force. In detail, as shown in FIG. 10, before being aligned by magnetic force, the conductive particles 111 are contained in the liquid elastic material at a certain distance from each other, and as shown in FIG. 11, when the conductive particles 111 are compacted by a magnetic field When the grounds are gathered, the protruding portions 113 of the conductive particles 111 may contact each other due to the large angle q between the inner surfaces 1131. Then, as the magnetic field is continuously applied, the conductive particles 111 may be firmly coupled to each other. In this manner, the test socket 100 can be manufactured as shown in FIG. 12.

In a state where the conductive particles 111 are coupled to each other as described above, if the liquid elastic material is cured, the manufacture of the test socket 100 is completed. Thereafter, when the terminal 131 of the test target device 130 presses the upper side of the conductive portion 110, the conductive particles 111 which are relatively higher among the conductive particles 111 are rotated to some angle as shown in FIG. 13 while the coupling between the conductive particles 111 is performed Be maintained.

In addition to the shape of the conductive particles 111, materials that can be used to form the conductive particles 111 will now also be described.

The conductive particles 111 may be formed of a magnetic material to easily arrange the conductive particles 111 along magnetic lines of force in a vertical direction. For example, the conductive particles 111 may be the following particles: particles of a magnetic metal, such as nickel, iron, or cobalt; particles of an alloy of the magnetic metal; particles containing such a magnetic metal; or including this Seed particles serve as core particles and are plated with particles of a conductive metal that is difficult to oxidize, such as gold, silver, palladium, or rhodium.

However, the conductive particles 111 do not always need to include magnetic core particles. For example, the conductive particles 111 may include: core particles formed of an inorganic material such as non-magnetic metal, glass, or carbon; and formed of a polymer such as polystyrene or polystyrene crosslinked with divinylbenzene Core particles; or core particles formed by breaking elastic fiber filaments or glass fiber filaments into particles having a length equal to or less than a certain value, wherein the core particles may be plated with, for example, cobalt or nickel Conductive magnetic materials such as cobalt alloys, or conductive magnetic materials and conductive metals that are difficult to oxidize.

The insulating support 120 insulates the conductive portions 110 from each other and supports the conductive portions 110. Preferably, the insulating support 120 may be formed of the same silicone rubber as the elastic insulating material used to form the conductive portion 110. However, the insulating support 120 is not limited to this. That is, the insulating support 120 may be formed of an insulating material different from that used to form an elastic insulating material.

The test target device 130 may be tested using the test socket 100 according to the preferred embodiment of the present invention as follows.

First, as shown in FIG. 7, the test socket 100 is placed above the test device 140. In detail, the test socket 100 is placed so that the lower end portion of the conductive portion 110 contacts the pad 141 of the test device 140. Thereafter, as shown in FIG. 8, the test target device 130 is moved downward so that the terminal 131 of the test target device 130 contacts the conductive portion 110. At this time, if the test target device 130 is further lowered, the test target device 130 starts to press the conductive portion 110, and the ends of the conductive particles 111 of the conductive portion 110 are in contact with each other and are therefore electrically connected to each other. At this time, if the test equipment 140 generates a predetermined electrical signal, the electrical signal is transmitted to the test target device 130 through the test socket 100.

In detail, when the terminal 131 of the test target device 130 presses the conductive portion 110, the conductive portion 110 is contracted in the thickness direction of the conductive portion 110 as shown in FIG. 13. In this process, the conductive particles 111 coupled to each other through the protrusions 113 remain in a coupled state while rotating relative to each other, and thus the electrical signals can be reliably transmitted through the conductive particles 111.

In addition, when the terminal 131 of the test target device 130 moves away from the conductive portion 110, the conductive portion 110 returns to its original coupling state as shown in FIG. 12. Therefore, even when the terminal of another test target device presses the conductive portion 110, the conductive portion 110 can maintain the electrical connection.

According to a preferred embodiment of the present invention, the test socket 100 has the following effects.

First, since the angle between the mutually facing inner surfaces 1131 of the conductive particles 111 of the test socket 100 is an obtuse angle (ie, greater than 90 °), a little contact can be maintained between the coupled conductive particles 111, thereby increasing the contact. stability.

In addition, since the body 112 has a pillar shape with an h / w ratio greater than 1, the body 112 can be easily vertically aligned when the test socket 100 is manufactured.

In addition, since the protruding portions 113 are provided on the upper and lower end portions of the vertically aligned conductive particles 111, the conductive particles 111 can be easily coupled to each other in the conductive portion 110. This coupling structure makes it possible to maintain contact between the conductive particles 111 even when the conductive portion 110 is compressed by the test target device 130, and therefore, the conductivity of the conductive particles 111 can be maintained.

In addition, since the main body 112 is concave at a central region thereof, a contact area between the main body 112 and the elastic insulating material increases, and thus the main body 112 may not be easily separated from the conductive portion 110.

In addition, since the thickness (d) of the body 112 of the conductive particles 111 is smaller than the width (w) of the body 112, the conductive particles 111 can be easily aligned in the vertical direction, and thus the conductive particles 111 can be easily coupled to each other.

In addition, since the protruding portion 113 is inserted into the recessed portion 1132 formed between the protruding portions 113, when the test socket 100 is used, the contact between adjacent conductive particles 111 can be maintained at one point, and thus the contact stability Can be improved.

The test socket 100 according to the preferred embodiment of the present invention may be modified as described below.

Referring to FIG. 14, a concave and convex portion 1122 may be provided on a lateral surface of a concave center region of the conductive particles 111 ′. If a plurality of uneven portions are provided on the lateral surface as described above, the elastic insulating material can be filled between the uneven portions, and thus the separation of the conductive particles can be reliably prevented.

In the embodiments described above, the lateral surface 1121 is linearly inclined. However, as shown in FIG. 15, the lateral surface of the conductive particle 111 ″ may be provided with a concave-convex portion 1123 having a constant width in a vertical direction.

In the embodiment described above, the angle between the mutually facing inner surfaces 1131 of the adjacent protrusions 113 is an obtuse angle (ie, greater than 90 °). However, the angle may be equal to or greater than 90 °.

Although the preferred embodiments of the present invention have been shown and described above, the present invention is not limited to the embodiments or modified examples of the present invention, and various other retouching and changes can be made without departing from the scope of the present invention. .

10‧‧‧Anisotropic conductive connection

15‧‧‧ Elastic Anisotropic Conductive Film

15A‧‧‧Forming material layer

16‧‧‧ conductive connection

16A, 16B ‧‧‧ protruding parts

17‧‧‧Insulation Department

18‧‧‧ conductive non-connection

20‧‧‧Frame board

21‧‧‧ through hole

30, 100‧‧‧test socket

31, 110‧‧‧ Conductive section

32‧‧‧ insulated support

50, 150‧‧‧mould

51‧‧‧upper mould

52, 57‧‧‧ Ferromagnetic substrate

54A, 59A‧‧‧ Magnetic members

56‧‧‧Lower mold

111, 111 ', 111``‧‧‧ conductive particles

112‧‧‧ Ontology

113‧‧‧ protrusion

120‧‧‧ insulated support

130‧‧‧Test target device

131‧‧‧Terminal

140‧‧‧test equipment

141‧‧‧ pad

311‧‧‧ conductive pillar particles

1121‧‧‧ lateral surface

1122, 1123‧‧‧ Bumps

1131‧‧‧Inner surface

1132‧‧‧Depression

d‧‧‧thickness

h‧‧‧vertical length

P‧‧‧Conductive particles / magnetic conductive particles

w‧‧‧horizontal length / width

q‧‧‧angle

FIG. 1 is a diagram illustrating a prior art test socket.

FIG. 2 is a sectional view illustrating the test socket shown in FIG. 1. FIG.

3 and 4 are diagrams illustrating how the test socket shown in FIG. 1 is manufactured.

FIG. 5 is a diagram illustrating another example of a prior art test socket.

6 (a) and 6 (b) are diagrams explaining problems in the prior art.

FIG. 7 is a diagram illustrating a test socket according to an embodiment of the present invention.

FIG. 8 is a diagram illustrating the operation of the test socket shown in FIG. 7. FIG.

FIG. 9 is a perspective view illustrating one of conductive particles located in a conductive portion of the test socket shown in FIG. 7. 10 to 12 are schematic views illustrating a process for manufacturing a test socket. FIG. 13 is an enlarged view illustrating the operation of the test socket shown in FIG. 12. 14 and 15 are diagrams illustrating conductive particles according to other embodiments of the present invention.

Claims (13)

A test socket configured to be placed between a test target device and a test device to electrically connect a terminal of the test target device to a pad of the test device, the test socket includes: a plurality of conductive portions, Arranged at positions corresponding to the terminals of the test target device and spaced apart from each other in a surface direction of the test socket, each of the conductive portions includes a plurality of conductive particles, the plurality of conductive particles Included in an elastic insulating material and aligned in a thickness direction of the test socket; and an insulating support body arranged between the conductive portions spaced apart from each other to support the conductive portions and keep the conductive portions in place The surface directions are insulated from each other, wherein each of the conductive particles includes: a body having a pillar shape; and at least two protrusions protruding from an upper end portion of the body, wherein the protrusions adjacent to each other A recessed portion recessed toward the body is provided between the portions, and an angle between inner surfaces of the protruding portions facing each other is an obtuse angle greater than 90 °. The test socket according to item 1 of the scope of patent application, wherein the shape and size of the body are such that the conductive particles stand in the thickness direction when the conductive particles are aligned in the elastic insulating material using a magnetic field. on. The test socket according to item 2 of the scope of patent application, wherein each of the bodies has an h / w ratio greater than 1, where h is measured from the upper end portion to the lower end portion of the body Vertical length, and w refers to the horizontal length of the body perpendicular to the vertical length. The test socket of item 3 of the scope of patent application, wherein each of the bodies has a w / d ratio greater than 1, where d refers to the thickness of the body. The test socket according to item 1 of the scope of patent application, wherein the mutually facing inner surfaces of the protrusions are inclined to guide the protrusions of adjacent conductive particles into the recesses. The test socket according to item 1 of the scope of patent application, wherein a lateral surface is provided between the upper end portion and the lower end portion of the body, and the lateral surface extends from the upper end portion of the body and The lower end portion is recessed inward toward a central portion of the body. The test socket according to any one of claims 1 to 6, wherein a plurality of uneven portions are provided on a lateral surface of the body. The test socket according to item 1 of the scope of patent application, wherein at least two protruding portions protrude from a lower end portion of the body. The test socket according to item 8 of the scope of patent application, wherein the upper end portion of the body and the protruding portion on the lower end portion are symmetrical with respect to the body. A conductive particle for a test socket, the test socket is configured to be placed between a test target device and a test device to electrically connect a terminal of the test target device to a pad of the test device, wherein The conductive particles include a plurality of conductive particles aligned in a conductive portion of the test socket in a thickness direction of the test socket, the conductive particles are arranged in an elastic insulating material, and when When the terminal presses the conductive portion, the conductive particles arranged in the conductive portion contact each other to make the conductive portion conductive, wherein each of the conductive particles includes: a body having A column shape; and at least two protruding portions protruding from an upper end portion of the body, wherein recessed portions recessed toward the body are provided between the protruding portions adjacent to each other, and mutual surfaces of the protruding portions The angle between the inner surfaces of the pair is an obtuse angle greater than 90 °. The conductive particle according to item 10 of the patent application range, wherein the mutually facing inner surfaces of the protrusions are inclined to guide the protrusions of the adjacent conductive particles into the depressions . The conductive particle according to item 10 of the patent application scope, wherein the body is elongated in one direction so that when the conductive particle is aligned in the elastic insulation material by a magnetic field, the conductive particle stands In the thickness direction of the test socket. The conductive particle according to item 10 of the patent application scope, wherein at least two protruding portions protrude from a lower end portion of the body.