TWI642066B - Review measurement device that has both ends supporting structure - Google Patents

Abstract

The invention relates to a gantry type ultra-high-speed repeat detection device. The X-axis linear platform moves in the X-axis direction, the Y-axis linear platform moves in the Y-axis direction, and a small X moving in an interval smaller than the movement interval of the X-axis linear platform. A detection device for measuring an object to be measured is provided on the linear platform with a rack or a rod having a linear guide or a driving portion, and a measuring probe is installed on the driving portion of the small rod of the small X-axis linear platform. .

Description

Ultra-high-speed repeated detection device with two-end support arm structure

The invention relates to an ultra-high-speed repeated detection device with a two-arm structure, and more specifically relates to the use of a Linear Small X-Axis, thereby remedying the problem of a single-arm structure and improving the durability of the equipment. , To constitute an accurate and high-speed gantry module repeat detection device.

The conventional review detection device is implemented by a linear gantry module (Linear Grantry System).

In addition, the conventional small X-axis repeat detection device is configured as a single arm linear gantry module (Linear Grantry System) and realizes driving. Therefore, there is jitter caused by sagging of the optical system. Problems, as well as problems due to vibration, have limitations in extending the measurement range, and increasing the capacity of the linear motor increases the production cost and the measurement time.

Prior technical literature:

Patent literature

(Patent Document 1) Korean Registered Patent Gazette, Registration No. 10-1540179.

In order to solve the above problems, an object of the present invention is to provide a module that uses an optimal path algorithm and a small X-axis of the arm structure at both ends, thereby preventing the arm from sagging and solving the problem caused by vibration. Jitter, and can reduce the moving time without increasing the capacity of the linear motor, and expand the range that can be measured within a certain measurement time.

To achieve the above object, the present invention provides a gantry type ultra-high-speed repeat detection device, which includes an X-axis linear platform that moves in the X-axis direction; a Y-axis linear platform that moves in the Y-axis direction; and a small X-axis linear platform , Moving in an interval smaller than the moving interval of the X-axis linear platform, wherein the X-axis linear platform including the X-axis frame is arranged in parallel with each other in a spaced-apart manner; and the X-axis linear guide is arranged on the X-axis frame On the upper side, the Y-axis linear platform includes a Y-axis main rod; and a Y-axis driving portion disposed on a side of the main rod.

At this time, the Y-axis main rod is moved in the X-axis direction by the X-axis linear guide, and the small X-axis linear platform includes a small rod; and a small X-axis driving portion is disposed on the small rod. A side surface of the small lever is attached to the Y-axis driving unit, and the small lever is moved in the Y-axis direction by the Y-axis driving unit.

In addition, the measurement probe is mounted on the small X-axis driving unit for driving, and the movement of the measurement probe along the X-axis is decomposed into the movement on the X-axis linear platform and the movement on the small X-axis linear platform. X-axis linear platform movement.

In addition, the present invention further includes a support frame arranged in parallel with the Y-axis main rod for supporting the other side of the small rod, thereby supporting the small rod from both sides.

At this time, the Y-axis driving part disposed on one side of the small rod has a linear guide and a linear motor, and the support frame is provided with a linear guide for supporting the other side of the small rod, and thus, by the The linear guide of the Y-axis driving unit and the linear guide of the support frame guide the small rod.

In addition, the present invention further includes a transfer driving unit for transferring the Y-axis main rod and the support frame simultaneously.

The transfer driving unit includes a main rod post disposed at both ends of the Y-axis main rod; a support frame post disposed at both ends of the support frame; and a bottom plate carrying the main post and the Support post.

In addition, a main post of the transfer driving unit disposed on the bottom plate and the support frame post are parallel to each other, and the Y-axis main post and the support frame are parallel to each other, and the The small rails which are guided by the linear guides and the linear guides of the support frame to be transferred are parallel to the bottom plate 210, so that the main pole and the support frame pillars are parallel to each other while being parallel to the small poles. A right angle is formed with the bottom plate, so that the main pole, the support frame pole, the small pole, and the bottom plate are formed into a quadrangle.

In addition, a plurality of the small rods can be formed on a Y-axis driving portion disposed on a side surface of the Y-axis main rod, and a plurality of the small rods on which the small rods are mounted can be formed on the X-axis frame. The Y-axis main rod.

The features and advantages of the present invention will be made clear by detailed description with reference to the drawings.

Prior to this, the terms or words used in this specification and the scope of the patent application should not be interpreted as ordinary dictionary meanings, but based on the purpose of explaining my invention in the best way, the inventor can understand the concept of terms The principle of proper definition is to interpret the terms as meanings and concepts consistent with the technical idea of the present invention.

100‧‧‧testing device

110‧‧‧X shaft bracket

120‧‧‧Y-axis main lever

121‧‧‧Y-axis drive section

130‧‧‧ Pole

140‧‧‧ support

200‧‧‧Transfer drive unit

210‧‧‧ floor

211‧‧‧Main post

212‧‧‧Support frame column

P‧‧‧Measuring probe

FIG. 1 is a perspective view showing a conventional detection device with a single arm structure.

Fig. 2 is a perspective view showing an ultra-high-speed repetition detection device of the two-end support arm structure of the present invention.

Fig. 3 is a perspective view showing a support frame for supporting a small rod having a measurement probe according to the present invention.

Fig. 4 is a cross-sectional view showing the integrally formed moving driving unit of the present invention.

Fig. 5 is a perspective view showing a detection device provided with a plurality of small rods having measurement probes according to the present invention.

Fig. 6 is a perspective view showing a detection device of the present invention provided with a plurality of Y-axis main rods formed with a plurality of small rods.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In this process, in order to improve the clarity and convenience of the description, the thickness of the lines shown in the drawings, the size of the constituent elements, and the like can be exaggeratedly displayed.

In addition, the terms mentioned below are terms defined in consideration of the functions of the present invention, and may differ depending on the intention or convention of the user or the reference person. Therefore, such terms should be defined based on the entire contents of this specification.

In addition, the following embodiments are not intended to limit the scope of rights of the present invention, but merely exemplary matters performed on the constituent elements in the scope of patent application of the present invention, which are included in the technical idea in the entire specification of the present invention, and have The embodiments that can replace the constituent elements of the patent application scope as equivalents belong to the patent application scope of the present invention.

The invention is a gantry type ultra-high-speed repeated detection device formed as a two-arm structure and for making up for the defects of the single-arm configuration.

Hereinafter, the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a conventional detection device with a single-arm structure, FIG. 2 is a perspective view showing a super-high-speed repeat detection device with a two-arm structure of the present invention, and FIG. 3 is a view showing a support for the present invention A perspective view of a support frame with a small rod for a measuring probe. FIG. 4 is a cross-sectional view showing the integrated mobile driving part of the present invention, and FIG. 5 is a view showing the present invention provided with a plurality of small rods having measuring probes. A perspective view of the detection device.

FIG. 1 is a perspective view showing a conventional detection device with a single-arm structure, and is used to more clearly explain the difference from the repeated detection device with a two-arm structure of the present invention.

As shown in Fig. 1, the detection device of the single-arm structure is driven by a linear gantry module (Linear Grantry System) in the form of a single arm, and there is a problem of jitter caused by sagging of the optical system and accompanying vibration Therefore, there are limitations in expanding the measurement range, and there is also a problem in that the production cost is increased due to the increase in the capacity of the linear motor, and the measurement time is extended.

In contrast, the ultra-high-speed repeat detection device of the two-end arm structure of the present invention, which is formed to solve the problem of the conventional detection device of the single-arm structure, will be described below.

Referring to FIG. 2, the detection device 100 includes an X-axis linear platform (X), which moves in the X-axis direction; a Y-axis linear platform (Y), which moves in the Y-axis direction; and a small X-axis linear platform (SX), which is smaller than Interval movement of the X-axis linear platform (X) movement interval.

At this time, the X-axis linear platform (X), including the X-axis frame 110, is arranged in parallel with each other in a spaced-apart manner; and the X-axis linear guide is disposed on the X-axis bracket, and the Y-axis linear platform includes the Y-axis. The main lever 120 and the Y-axis driving section 121 are disposed on the side of the main lever 120.

In addition, the Y-axis main rod 120 is moved in the X-axis direction by an X-axis linear guide, and a small X-axis linear platform (SX) includes a small rod 130; and a small X-axis driving portion is disposed on the side of the small rod 130 Among them, one side of the small rod 130 is mounted on the Y-axis driving portion 121, and thus, the small rod 130 moves in the Y-axis direction (Y) by the Y-axis driving portion 121.

In addition, the measurement probe P is mounted on the small X-axis driving unit and is driven. Accordingly, the movement of the measurement probe P according to the X axis is decomposed into the movement on the X-axis linear platform X and the movement on the X-axis linear platform (SX). mobile.

In addition, the present invention further includes a support frame 140 that is arranged in parallel with the Y-axis main rod 120 so that the other side of the small rod 130 is supported, and the Y-axis driving portion 121 disposed on one side of the small rod 130 includes a linear guide. With the linear motor, the support frame 140 is provided with a linear guide for supporting the other side of the small rod 130. Thus, the small rod is guided by the linear guide of the Y-axis driving unit 121 and the linear guide of the support frame 140. 130 is transferred.

The “X” shown in the above figure means that the Y-axis main rod 120 and the support frame 140 move in the arrow direction (X-axis) shown together in the figure, and “Y” means that the small rod 130 is formed along the Y-axis main The driving unit 121 on one side of the lever 120 moves in the direction of the arrow (Y-axis) shown together in the figure.

In addition, the "SX (Small X-Axis)" shown in the above drawings refers to moving in the direction of the arrow (SX) shown in the drawings, but the moving interval is smaller than the moving interval of "X", and , Also refers to the movement of the measuring probe driven by the small X-axis driving portion mounted on the small rod 130.

Therefore, "X" refers to the moving direction of the X-axis linear platform, "Y" refers to the moving direction of the Y-axis linear platform, and "SX (Small X-Axis)" refers to the small X-axis linear platform.

In addition, the measurement probe P refers to a device capable of performing a variety of measurements depending on the object to be measured, and the detection device 100 of the present invention can be a device such as a camera.

Referring to FIG. 3, the figure shows a support frame 140 arranged in parallel with the Y-axis main rod 120 and supporting the other side of the small rod 130. By providing a linear guide on one side of the support frame 140, The other side of the small rod 130 is supported.

In addition, support frame posts 212 that support the support frame 140 are formed at both ends of the support frame 140.

Referring to FIG. 4, the figure is a side view showing the transfer driving unit 200 for the Y-axis main rod 120 and the support frame 140 to move in the X-axis linear platform moving direction at the same time.

The transfer driving unit 200 includes a main post 211 disposed at both end portions of the Y-axis main rod 120; a support frame post 212 disposed at both end portions of the support frame 140; and a bottom plate 210 on which the main post is mounted 211 和 Supporting frame column 212.

In addition, the main rod post 211 and the support frame post 212 of the transfer driving unit 200 disposed on the bottom plate 210 are parallel to each other, the Y-axis main rod 120 and the support frame 140 are parallel to each other, and the linear guide and support frame of the Y-axis main rod 120 are parallel to each other. The small rod 130 and the bottom plate 210 which are guided by the linear guide of 140 are parallel to each other.

In addition, the main post 211 and the support frame post 212 are parallel to each other, and form a right angle with the small post 130 and the bottom plate 210. Therefore, the main post 211, the support post 212, the small post 130, and the bottom plate 210 are formed into a quadrangle. .

At this time, a linear guide for transferring is also provided below the bottom plate 210 of the transfer driving unit 200.

The linear guide formed under the bottom plate 210 is in contact with the X-axis linear guides arranged on the X-axis linear platform separated from each other and parallel to the X-axis linear frame 110, so as to realize the movement of the bottom plate 210 in the X-axis direction.

In addition, the width of the bottom plate 210 can be wider than the width of the X-axis linear stage X, and can be the same as the width of the X-axis linear stage X.

Referring to FIG. 5, FIG. 5 is a perspective view showing a detection device provided with a plurality of small rods 130 having measurement probes, and a small rod 130 is additionally disposed on the Y-axis driving portion 121 disposed on the side of the Y-axis main rod 120. Thus, it is mounted on the Y-axis driving section 121.

A small X-axis driving section is provided on the side of the small rod 130 additionally mounted on the Y-axis driving section 121, and the measurement probe is mounted on the small X-axis driving section for driving, whereby the measurement probe P can follow the small X-axis linearity. The platform (SX) moves.

In addition, a support frame 140 for supporting the other side of the two small rods 130 is further formed.

FIG. 6 is a perspective view showing a detection device provided with a plurality of Y-axis main rods 120 having a plurality of small rods 130 according to the present invention.

At this time, even if the Y-axis main lever 120 does not include the plurality of small levers 130, a plurality of them can be formed on the X-axis frame 110.

In summary, the present invention has been described in detail with reference to specific embodiments. However, the above embodiments are used to describe the present invention in detail, and are not intended to limit the present invention. Within the technical idea of the present invention, those skilled in the art can Transform or improve it.

Simple modifications and changes to the present invention belong to the scope of the present invention, and the specific protection scope of the present invention will be clarified in the scope of patent application.

The beneficial effects of the present invention are:

According to the present invention, the linear small X-axis of the two-arm structure is used to compensate for the problems of the sagging of the arm caused by the single-arm structure and the vibration caused by the vibration. The effect of measuring time.

Claims (4)

A gantry type ultra-high-speed repeat detection device includes: an X-axis linear platform that moves in the X-axis direction; a Y-axis linear platform that moves in the Y-axis direction; a small X-axis linear platform that is smaller than the X-axis linear platform The X-axis linear platform includes: an X-axis linear platform arranged parallel to each other in a spaced-apart manner; and an X-axis linear guide configured above the X-axis linear platform and the Y-axis. The Y-axis main rod includes: a Y-axis main rod; and a Y-axis driving portion disposed on a side of the Y-axis main rod, and the Y-axis main rod is moved in the X-axis direction by the X-axis linear guide. The small X-axis linear platform includes: a small rod; and a small X-axis driving portion disposed on a side of the small rod, and one side of the small rod is mounted on the Y-axis driving portion, whereby the small rod The Y-axis driving portion moves in the Y-axis direction, and a measuring probe is mounted on the small X-axis driving portion to realize driving. Therefore, the movement of the measuring probe along the X-axis is decomposed into The movement of the X-axis linear platform is similar to that of the small X-axis linear platform. Movable; a support frame, the rod parallel to the main axis Y arranged, for the other side of the pinion support shaft, whereby the rod is supported from both sides of the small. The gantry type ultra-high-speed repeat detection device according to item 1 of the scope of patent application, wherein a Y-axis driving portion disposed on one side of the small rod has a linear guide and a linear motor, and the support frame is provided for supporting the The other linear guide on the other side of the small rod is thereby guided by the linear guide of the Y-axis drive unit and the linear guide of the support frame to move the small rod. The gantry type ultra-high-speed repeated detection device described in item 2 of the scope of patent application, further includes a transfer driving section for transferring the Y-axis main rod and the support frame at the same time. The gantry-type ultra-high-speed repeated detection device according to item 3 of the patent application scope, wherein the transfer driving unit includes: a main rod post disposed at both ends of the Y-axis main rod; a support frame post disposed on the support Both ends of the frame; and a bottom plate, which carries the main mast post and the support frame post.