CN107607138B - Ultra-high-speed repetitive detection device with arm structure at both ends - Google Patents

Abstract

The invention relates to a gantry type ultra-high-speed repetitive detection device, an X-axis linear platform that moves in the X-axis direction, a Y-axis linear platform that moves in the Y-axis direction, and a small X-axis linear platform that moves in an interval smaller than the movement interval of the X-axis linear platform. On the axis linear platform, a frame or rod with a linear guide rail or a driving part is respectively arranged, and a measuring probe is installed on the driving part of the small rod of the small X-axis linear platform, so as to realize the measurement of the object to be measured. detection device.

Description

Ultra-high-speed repetitive detection device with arm structure at both ends

technical field

The present invention relates to an ultra-high-speed repetitive detection device with a two-end arm structure, and more specifically relates to the use of a Linear Small X-Axis, thereby compensating for the problem of a single arm structure and improving the durability of the equipment, A repeat detection device that constitutes an accurate and high-speed gantry module.

Background technique

The existing repetition (Review) detection device is constituted by a linear gantry module (Linear Grantry System) to realize the driving.

In addition, the existing Small X-Axis repetitive detection device is configured as a linear gantry module (Linear Grantry System) in the form of a single arm and is driven, so there is a jitter caused by the sagging of the optical system. Problems, and problems caused by vibration, have limitations in the expansion of the measurement range, and increase the capacity of the linear motor, increase the production cost, and increase the measurement time.

prior art literature

Patent Literature

(Patent Document 1) Korean Registered Patent Gazette, Registration No. 10-1540179.

SUMMARY OF THE INVENTION

The technical problem to be solved by the invention

In order to solve the above-mentioned problems, the object of the present invention is to provide a kind of module, which uses the optimal path algorithm and the small X-axis (Small X-Axis) of the arm structure at both ends, thereby preventing the sagging of the arm and solving the problems caused by vibration. In addition, it is possible to shorten the travel time without increasing the capacity of the linear motor, and to expand the range that can be measured within a certain measurement time.

technical solutions to problems

In order to achieve the above object, the present invention is directed to a gantry type ultra-high-speed repetitive detection device, the detection device includes: an X-axis linear platform, which moves in the X-axis direction; the Y-axis linear platform, which moves in the Y-axis direction; and a small X-axis. The linear platform moves according to an interval smaller than the moving interval of the X-axis linear platform, wherein the X-axis linear platform includes: an X-axis frame, which is arranged in parallel in a manner of being separated from each other; and an X-axis linear guide rail, which is arranged on the On the top of the X-axis frame, the Y-axis linear platform includes: a Y-axis main rod; and a Y-axis driving part, which is arranged on the side of the main rod.

At this time, the Y-axis main rod moves in the X-axis direction through the X-axis linear guide rail, and the small X-axis linear platform includes: a small rod; and a small X-axis driving part, which is arranged on the side of the small rod On the side surface, and one side of the small rod is attached to the Y-axis driving part, the small rod is moved in the Y-axis direction by the Y-axis driving part.

Moreover, the measurement probe is mounted on the small X-axis driving part to realize driving, whereby the movement of the measurement probe along the X-axis is decomposed into the movement of the X-axis linear platform and the movement of the small X-axis. Movement of the X-axis linear platform.

In addition, it further includes a support frame which is arranged parallel to the Y-axis main rod and supports the other side of the small rod, thereby supporting the small rod from both sides.

At this time, the Y-axis drive part arranged on one side of the small rod has a linear guide rail and a linear motor, and the support frame is provided with a linear guide rail for supporting the other side of the small rod. The small rod is transferred by guiding the linear guide of the Y-axis drive unit and the linear guide of the support frame.

In addition, it further includes a transfer drive unit for simultaneously transferring the Y-axis main rod and the support frame.

The transfer driving part includes: a main rod column, arranged at both ends of the Y-axis main rod; a support frame column, arranged at both ends of the support frame; and a bottom plate, on which the main rod column and the Describe the support column.

In addition, the main rod column and the support frame column of the transfer drive part arranged on the upper surface of the base plate are parallel to each other, the Y-axis main rod and the support frame are parallel to each other, and the linearity of the Y-axis main rod is parallel to each other. The guide rail and the linear guide rail of the support frame are guided to realize the transfer of the small rod and the bottom plate are parallel to each other, so that the main rod column and the support frame column are parallel to each other, at the same time as the small rod and all The bottom plate forms a right angle, whereby the main pole column, the support frame column, the small pole, and the bottom plate form a quadrilateral.

In addition, a plurality of the small rods can be formed on the Y-axis driving part arranged on the side surface of the Y-axis main rod, and a plurality of small rods can be formed on the X-axis frame. The Y-axis main rod.

The features and advantages of the present invention will become apparent from the detailed description with reference to the accompanying drawings.

Prior to this, the terms and words used in this specification and the claims should not be interpreted as usual dictionary meanings, but should be based on the concept that the inventor can understand the terms in order to describe the invention in the most preferable way. The principle of proper definition is to interpret the terms as meanings and concepts in accordance with the technical idea of the present invention.

effect of invention

According to the present invention, the use of the Linear Small X-Axis of the arm structure at both ends can make up for the problem of arm sag caused by the single arm structure and the jitter caused by vibration, which can expand the measurement range and shorten the The effect of measuring time.

Description of drawings

FIG. 1 is a perspective view showing a conventional single-arm structure detection device,

Figure 2 is a perspective view showing the ultra-high-speed repetitive detection device of the two-end arm structure of the present invention,

Figure 3 is a perspective view showing a support frame for supporting a small rod with a measuring probe according to the present invention,

FIG. 4 is a cross-sectional view showing the integrally formed moving drive part of the present invention,

FIG. 5 is a perspective view showing a detection device provided with a plurality of small rods having measuring probes according to the present invention,

6 is a perspective view showing a detection device provided with a plurality of Y-axis main rods formed with a plurality of small rods according to the present invention.

Description of reference numerals

100: Detection device 110: X-axis frame

120: Y-axis main rod 121: Y-axis drive part

130: Small rod 140: Support frame

200: Transfer drive unit 210: Bottom plate

211: Main pole column 212: Support frame column

P: measuring probe

Detailed ways

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In this process, in order to improve the clarity and convenience of the description, the thickness of the line, the size of the component, and the like shown in the drawings may be exaggerated.

In addition, the terms mentioned below are terms defined in consideration of the functions of the present invention, and may vary depending on the intentions or conventions of users or referees. Accordingly, such terms should be defined on the basis of the entire content of this specification.

Furthermore, the following examples are not intended to limit the scope of the claims of the present invention, but are merely illustrative matters for the constituent elements within the scope of the claims of the present invention, and the technical ideas contained in the entire specification of the present invention have Embodiments that can replace the constituent elements within the scope of the claims as equivalents belong to the scope of the claims of the present invention.

The present invention is a gantry type ultra-high-speed repeated detection device which is formed into a structure of two ends of the arms to compensate for the defects of the form of a single arm.

Hereinafter, the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a conventional single-arm structure detection device, FIG. 2 is a perspective view showing an ultra-high-speed repetitive detection device with two-end arms structure of the present invention, and FIG. Figure 4 is a cross-sectional view showing the integral moving drive part of the present invention, and Figure 5 is a perspective view showing a detection device provided with a plurality of small rods with measuring probes of the present invention.

FIG. 1 is a perspective view showing a conventional detection device with a single-arm structure, which is used to more clearly illustrate the difference from the repetitive detection device with a two-arm structure of the present invention.

As shown in Figure 1, the single-arm structure detection device is driven by a linear gantry module (LinearGrantry System) in the form of a single arm. Therefore, there is a limitation in enlarging the measurement range, and there are also problems in that the production cost is increased due to the increase in the capacity of the linear motor, and the measurement time is prolonged.

On the contrary, the ultra-high-speed repetitive detection device of the double-arm structure of the present invention, which is formed to solve the problems of the existing single-arm structure detection device, will be described below.

Referring to FIG. 2, the detection device 100 includes: an X-axis linear stage (X), which moves in the X-axis direction; a Y-axis linear stage (Y), which moves in the Y-axis direction; and a small X-axis linear stage (SX), Move according to an interval smaller than the movement interval of the X-axis linear platform (X).

At this time, the X-axis linear stage (X) includes: an X-axis frame 110, which is arranged in parallel and separated from each other; and an X-axis linear guide rail, which is arranged on the upper surface of the X-axis bracket, and the Y-axis frame The axial linear platform includes: a Y-axis main rod 120;

In addition, the Y-axis main rod 120 moves in the X-axis direction through the X-axis linear guide rail, and the small X-axis linear stage (SX) includes: a small rod 130; and a small X-axis drive part, which is arranged on the side of the small rod 130, wherein one side of the small rod 130 is mounted on the Y-axis driving part 121, so that the small rod 130 is driven in the Y-axis direction (Y) by the Y-axis driving part move.

In addition, the measurement probe P is mounted on the small X-axis drive part to realize driving, so that the movement of the measurement probe P according to the X-axis is decomposed into the movement of the X-axis linear stage X and the movement of the small X-axis. Movement of the X-axis linear stage (SX).

Furthermore, it also includes a support frame 140 arranged in parallel with the Y-axis main rod 120 to support the other side of the small rod 130 and a Y-axis drive part disposed on one side of the small rod 130 It includes a linear guide rail and a linear motor, and the support frame 140 is provided with a linear guide rail for supporting the other side of the small rod. The small rod 130 is transferred by the guidance of the linear guide.

"X" shown in the above figure means that the Y-axis main rod and the support frame move in the direction of the arrow (X-axis) shown together in the drawings, and "Y" means that the small rod 130 is formed along the The drive unit 121 on one side of the Y-axis main rod 120 moves in the direction of the arrow (Y-axis) shown together in the drawing.

In addition, the "SX (Small X-Axis)" shown in the above drawings refers to moving in the direction of the arrow (SX) shown in the drawings, but the moving interval is smaller than the moving interval of the "X". , and also refers to the movement of the measurement probe driven by the small X-axis drive part installed on the small rod 130 .

Thus, the "X" refers to the moving direction of the X-axis linear stage, the "Y" refers to the moving direction of the Y-axis linear stage, and the "SX (Small X-Axis)" refers to Small X-axis linear platform.

In addition, the measurement probe P refers to a device that can perform various measurements according to the object to be measured, and in the detection device of the present invention, it can be a device such as a camera.

Referring to FIG. 3 , the drawing shows a support frame that is arranged parallel to the Y-axis main rod and is used to support the other side of the small rod. By arranging a linear guide rail on one side of the support frame 140 , while supporting the other side of the small rod 130 .

In addition, support frame columns 212 for supporting the support frame 140 are formed at both ends of the support frame.

Referring to FIG. 4 , the drawing is a side view showing the transfer driving part 200 for the Y-axis main rod 120 and the support frame 140 to move simultaneously according to the moving direction of the X-axis linear platform.

The transfer driving part 200 includes: a main rod column 211, which is arranged on both sides of the Y-axis main rod 120; a supporting frame column 212, which is arranged on both sides of the supporting frame 140; and a bottom plate 210, the main pole column 211 and the support frame column 212 are mounted.

In addition, the main rod column 211 and the support frame column 212 of the transfer driving part 200 arranged on the upper surface of the bottom plate 210 are parallel to each other, and the Y-axis main rod 120 and the support frame 140 are parallel to each other. The small rod 130 and the bottom plate 210 are guided by the linear guide rail of the Y-axis main rod and the linear guide rail of the support frame 140 to realize the transfer and are parallel to each other.

In addition, the main pole column 211 and the support frame column 212 are parallel to each other and at the same time form a right angle with the small pole 130 and the bottom plate 210 , thus, the main pole column 211 and the support frame column 212. The small rod 130 and the bottom plate 210 are formed into a quadrilateral.

At this time, on the lower surface of the bottom plate 210 of the transfer drive unit, a linear guide for transferring is similarly provided.

The linear guide rails formed under the bottom plate 210 are in contact with the X-axis linear guide rails arranged on the upper surface of the X-axis linear frame 110 which are separated from each other and parallel to the X-axis linear platform, so as to realize the Movement in the X-axis direction.

In addition, the width of the bottom plate 210 can be wider than the width of the X-axis linear platform X, and can also be the same as the width of the X-axis linear platform X.

Referring to FIG. 5, the FIG. 5 is a perspective view showing a detection device provided with a plurality of small rods with measuring probes. The small rod 130 is thus attached to the Y-axis drive part 121 .

A small X-axis driving part is provided on the side surface of the small rod 130 which is additionally mounted on the Y-axis driving part 121, and the measurement probe is mounted on the small X-axis driving part to realize driving, whereby the measurement The probe P can be moved in the direction of a small X-axis linear stage (SX).

In addition, a support frame 140 for supporting the other side of the two small rods 130 is also formed.

FIG. 6 is a perspective view showing a detection device provided with a plurality of Y-axis main rods 120 having a plurality of small rods 130 according to the present invention.

At this time, even if it is the Y-axis main rod 120 that does not include the plurality of small rods 130 , a plurality of them can be formed on the upper surface of the X-axis frame 110 .

To sum up, the present invention has been described in detail with reference to the specific embodiments. However, the above-mentioned embodiments are used to describe the present invention in detail and are not intended to limit the present invention. Within the technical idea of the present invention, those skilled in the art can Transform or improve it.

Simple deformations and changes of the present invention belong to the scope of the present invention, and the specific protection scope of the present invention will be clarified in the scope of the claims.

Claims (1)

1. a gantry type ultra-high-speed repetitive detection device, is characterized in that, the detection device, include: The X-axis linear platform moves according to the X-axis direction; The Y-axis linear stage moves in the direction of the Y-axis; and The small X-axis linear platform moves according to the interval smaller than the moving interval of the X-axis linear platform, in, The X-axis linear platform includes: X-axis frames arranged in parallel and spaced apart from each other; and The X-axis linear guide rail is arranged on the top of the X-axis frame, The Y-axis linear platform includes: Y-axis main rod; and The Y-axis drive part is arranged on the side surface of the main rod, In addition, the Y-axis main rod moves in the X-axis direction through the X-axis linear guide, The small X-axis linear platform includes: small rod; and The small X-axis drive part is arranged on the side of the small rod, In addition, one side of the small rod is attached to the Y-axis driving part, whereby the small rod is moved in the Y-axis direction by the Y-axis driving part, Moreover, the measurement probe is mounted on the small X-axis driving part to realize driving, so that the movement of the measurement probe along the X-axis is decomposed into the movement of the X-axis linear platform and the movement of the small X-axis. Movement of the X-axis linear platform; Also includes: a support frame, arranged in parallel with the Y-axis main rod, for supporting the other side of the small rod, Thereby, the small rod is supported from both sides; The Y-axis drive part arranged on one side of the small rod has a linear guide rail and a linear motor, The support frame is provided with a linear guide rail for supporting the other side of the small rod, Thereby, the small rod is transferred by being guided by the linear guide rail of the Y-axis drive part and the linear guide rail of the support frame; It also includes: a transfer driving part for transferring the Y-axis main rod and the support frame at the same time; The transfer drive part includes: The main rod column is arranged at both ends of the Y-axis main rod; support frame columns, disposed at both ends of the support frame; and A bottom plate is mounted with the main pole column and the support frame column.

Images