CN107607138B - Superspeed repeated detection device with two-end support arm structure - Google Patents
Superspeed repeated detection device with two-end support arm structure Download PDFInfo
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- CN107607138B CN107607138B CN201710271835.4A CN201710271835A CN107607138B CN 107607138 B CN107607138 B CN 107607138B CN 201710271835 A CN201710271835 A CN 201710271835A CN 107607138 B CN107607138 B CN 107607138B
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- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 239000000523 sample Substances 0.000 claims abstract description 16
- 238000012546 transfer Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 2
- 230000003252 repetitive effect Effects 0.000 abstract description 7
- 238000007689 inspection Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
- G01N2021/887—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing the measurements made in two or more directions, angles, positions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/104—Mechano-optical scan, i.e. object and beam moving
- G01N2201/1042—X, Y scan, i.e. object moving in X, beam in Y
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- General Health & Medical Sciences (AREA)
- Immunology (AREA)
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
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Abstract
The present invention relates to a gantry type ultra-high speed repetitive detection device, which is a detection device for realizing measurement of an object to be measured by respectively arranging a frame or a rod having a linear guide rail or a driving part on an X-axis linear platform moving in an X-axis direction, a Y-axis linear platform moving in a Y-axis direction, and a small X-axis linear platform moving in a section smaller than a moving section of the X-axis linear platform, and mounting a measuring probe on the driving part of the small rod of the small X-axis linear platform.
Description
Technical Field
The present invention relates to an ultra-high speed duplicate detection device having a double-end arm structure, and more particularly, to a duplicate detection device which compensates for a single arm structure, improves durability of equipment, and constitutes an accurate and high-speed gantry module by using a linear Small X-Axis (L inner Small X-Axis).
Background
A conventional duplicate (Review) detection apparatus is configured by a linear gantry module (L inner gantry System) and is driven.
Further, the conventional Small X-Axis (Small X-Axis) repetitive detection device is configured as a single arm type linear gantry module (L inner gantry System) and driven, thereby causing a problem of jitter due to a sag of an optical System and a problem due to vibration, which has a limitation in expanding a measurement range, and a problem of increasing a capacity of a linear motor, increasing a manufacturing cost, and extending a measurement time.
Prior art documents
Patent document
(patent document 1) korean registered patent publication No. 10-1540179.
Disclosure of Invention
Technical problem to be solved by the invention
In order to solve the above problems, an object of the present invention is to provide a module that uses an optimal path algorithm and a Small X-Axis (Small X-Axis) of a both-end arm structure to prevent the arm from sagging and to solve the vibration-induced jitter, and that can shorten the moving time and expand the range of measurement within a certain measurement time without increasing the capacity of a linear motor.
Technical scheme for solving problems
In order to achieve the above object, the present invention is directed to a gantry type ultra high speed repetitive detection apparatus, comprising: an X-axis linear stage moving in the X-axis direction; a Y-axis linear stage moving in the Y-axis direction; and a small X-axis linear platform which moves according to an interval smaller than the moving interval of the X-axis linear platform, wherein the X-axis linear platform comprises: x-axis frames arranged in parallel and spaced from each other; and an X-axis linear guide disposed on the X-axis frame, the Y-axis linear stage including: a Y-axis main rod; and a Y-axis driving part configured on the side surface of the main rod.
In this case, the Y-axis main rod moves in the X-axis direction by the X-axis linear guide, and the small X-axis linear stage includes: a small rod; and a small X-axis driving part disposed at a side surface of the small bar, and one side of the small bar is mounted to the Y-axis driving part, whereby the small bar is moved in a Y-axis direction by the Y-axis driving part.
The movement of the measurement probe along the X axis is divided into the movement on the X axis linear stage and the movement on the small X axis linear stage by mounting and driving the measurement probe to the small X axis driving unit.
And a support frame disposed in parallel with the Y-axis main lever and supporting the other side of the small lever, thereby supporting the small lever from both sides.
In this case, the Y-axis driving unit disposed at one side of the small bar has a linear guide and a linear motor, and the linear guide for supporting the other side of the small bar is provided in the support frame, so that the small bar is transferred by being guided by the linear guide of the Y-axis driving unit and the linear guide of the support frame.
And a transfer driving part for simultaneously transferring the Y-axis main rod and the support frame.
The transfer drive unit includes: main pole columns arranged at both ends of the Y-axis main pole; support frame columns configured at two ends of the support frame; and a base plate on which the main pole and the support frame are mounted.
The main pole column, the support frame column, the small pole, and the bottom plate of the transfer driving unit are configured in a quadrangular shape by being parallel to each other, the Y-axis main pole and the support frame being parallel to each other, and the small pole transferred by being guided by the linear guide of the Y-axis main pole and the linear guide of the support frame being parallel to each other, and the main pole column and the support frame column being parallel to each other and being at a right angle to the small pole and the bottom plate.
Further, a plurality of the small bars may be formed in a Y-axis driving part disposed at a side surface of the Y-axis main bar, and a plurality of the Y-axis main bars to which the small bars are attached may be formed in the X-axis frame.
The features and advantages of the present invention will become apparent from the detailed description, which proceeds with reference to the accompanying drawings.
Before this, the terms and words used in the present specification and claims should not be interpreted as ordinary dictionary meanings, but interpreted as meanings and concepts conforming to the technical idea of the present invention on the basis of the principle that the inventor can appropriately define the concept of the terms in order to explain his invention in the most preferable manner.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, the linear Small X-Axis (L initial Small X-Axis) of the arm structure at both ends is used to compensate for the arm droop caused by the single arm structure and the jitter caused by the vibration, thereby having the effect of expanding the measurement range and shortening the measurement time.
Drawings
FIG. I is a perspective view showing a conventional detecting device with a single arm structure,
FIG. two is a perspective view showing the ultra-high speed repetitive detection device of the two-end arm structure of the present invention,
figure three is a perspective view showing the support stand of the present invention for supporting a small rod with a measurement probe,
figure four is a sectional view showing the integrally formed movement driving part of the present invention,
figure five is a perspective view showing a testing device of the present invention provided with a plurality of small rods having measuring probes,
fig. 6 is a perspective view showing a detecting apparatus of the present invention provided with a plurality of Y-axis main bars formed with a plurality of small bars.
Description of the reference numerals
100: the detection device 110: x-axis frame
120: y-axis main lever 121: y-axis driving part
130: the small rod 140: supporting frame
200: the transfer drive unit 210: base plate
211: main stem 212: support frame column
P: measuring probe
Detailed Description
Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. In this process, in order to improve clarity and convenience of description, the thickness of the lines and the size of the components shown in the drawings may be exaggerated.
Also, the terms referred to below are defined in consideration of functions of the present invention, and may be different depending on intentions or conventions of users or consultants. Accordingly, such terms should be defined based on the contents throughout the present specification.
The following embodiments are not intended to limit the scope of the present invention, but are merely illustrative matters of the constituent elements in the scope of the present invention, and include technical ideas in the entire description of the present invention, and also include embodiments in which the constituent elements in the scope of the claims can be replaced as equivalents, and all fall within the scope of the claims of the present invention.
The invention relates to a gantry type super-high-speed repeated detection device which is formed into a structure of supporting arms at two ends and is used for making up the defects of a single supporting arm form.
The present invention will be described below with reference to the accompanying drawings.
Fig. one is a perspective view showing a conventional inspection apparatus of a single arm structure, fig. two is a perspective view showing an ultra-high speed repetitive inspection apparatus of a double-arm structure of the present invention, fig. three is a perspective view showing a support bracket of the present invention for supporting a small rod having a measuring probe, fig. four is a sectional view showing an integrally formed movement driving part of the present invention, and fig. five is a perspective view showing an inspection apparatus of the present invention provided with a plurality of small rods having measuring probes.
Fig. one is a perspective view showing a conventional detecting device of a single arm structure, which is used to more clearly illustrate the difference from the repetitive detecting device of the two-end arm structure of the present invention.
As shown in the drawing, the single arm detection device is driven by a single arm linear gantry module (L initial gantry System), and has a problem of jitter caused by the sag of an optical System and a problem associated with vibration, so that there is a limitation in extending a measurement range, and there is a problem in that a manufacturing cost is increased and a measurement time is prolonged by increasing the capacity of a linear motor.
On the contrary, the present invention provides an ultra high speed repetitive detection device with a double end arm structure, which solves the problems of the conventional detection device with a single arm structure, as described below.
Referring to fig. two, the detection apparatus 100 includes: an X-axis linear stage (X) that moves in the X-axis direction; a Y-axis linear stage (Y) that moves in the Y-axis direction; and a small X-axis linear Stage (SX) which moves in a section smaller than the moving section of the X-axis linear stage (X).
At this time, the X-axis linear stage (X) includes: x-axis frames 110 arranged in parallel to be spaced apart from each other; and an X-axis linear guide disposed on an upper surface of the X-axis support, and the Y-axis linear stage includes: a Y-axis main lever 120; and a Y-axis driving part 121 disposed on a side surface of the main lever 120.
Further, the Y-axis main rod 120 is moved in the X-axis direction by the X-axis linear guide, and the small X-axis linear Stage (SX) includes: a small rod 130; and a small X-axis driving part disposed at a side surface of the small bar 130, wherein one side of the small bar 130 is mounted to the Y-axis driving part 121, and thus the small bar 130 is moved in a Y-axis direction (Y) by the Y-axis driving part.
The measuring probe P is mounted on the small X-axis driving unit and driven, so that the movement of the measuring probe P along the X-axis is divided into the movement on the X-axis linear stage X and the movement on the small X-axis linear Stage (SX).
Further, the Y-axis driving unit may include a support frame 140 disposed parallel to the Y-axis main lever 120 to support the other side of the small lever 130, and the support frame 140 may include a linear guide and a linear motor, and the linear guide may be disposed on one side of the small lever 130 to support the other side of the small lever, so that the small lever 130 may be transferred by being guided by the linear guide of the Y-axis driving unit 121 and the linear guide of the support frame 140.
The "X" shown in the upper drawing means that the Y-axis main lever and the support bracket move in the arrow direction (X-axis) shown in the drawing, and the "Y" means that the small lever 130 moves in the arrow direction (Y-axis) shown in the drawing along the driving part 121 formed at one side of the Y-axis main lever 120.
In addition, "SX (Small X-Axis)" illustrated in the above drawings means a movement in an arrow direction (SX) shown in the drawings, but a movement section is smaller than the movement section of "X", and also means a movement of the measurement probe driven by the Small X-Axis driving unit attached to the Small lever 130.
Thus, the "X" refers to the moving direction of the X-Axis linear stage, the "Y" refers to the moving direction of the Y-Axis linear stage, and the "SX (Small X-Axis)" refers to the Small X-Axis linear stage.
The measurement probe P is a device capable of performing a plurality of types of measurements according to an object, and the detection device of the present invention may be a device such as a camera.
Referring to fig. three, the figure shows a support frame disposed parallel to the Y-axis main bar and supporting the other side of the small bar, and the other side of the small bar 130 is supported by providing a linear guide rail on one side of the support frame 140.
Referring to fig. four, the drawing is a side view showing the transfer driving unit 200 for moving the Y-axis main lever 120 and the supporting frame 140 in the moving direction of the X-axis linear stage at the same time.
The transfer driving unit 200 includes: main posts 211 disposed at both side ends of the Y-axis main post 120; support frame columns 212 disposed at both side ends of the support frame 140; and a base plate 210 on which the main pole 211 and the support pole 212 are mounted.
The main rod 211 and the support frame 212 of the transfer driving unit 200, which are disposed on the upper surface of the base plate 210, are parallel to each other, the Y-axis main rod 120 and the support frame 140 are parallel to each other, and the small rod 130, which is transferred by being guided by the linear guide of the Y-axis main rod and the linear guide of the support frame 140, is parallel to the base plate 210.
The main pole 211 and the support pole 212 are parallel to each other and are perpendicular to the small pole 130 and the bottom plate 210, so that the main pole 211, the support pole 212, the small pole 130, and the bottom plate 210 are formed in a quadrangular shape.
At this time, a linear guide for transfer is also provided on the lower surface of the bottom plate 210 of the transfer driving unit.
The linear guide formed on the lower surface of the base plate 210 is in contact with the X-axis linear guide disposed on the upper surface of the X-axis linear frame 110 spaced apart from and parallel to each other on the X-axis linear stage, thereby achieving movement of the base plate 210 in the X-axis direction.
The width of the base plate 210 may be wider than the width of the X-axis linear stage X, or may be the same as the width of the X-axis linear stage X.
Referring to fig. five, which is a perspective view showing a detection apparatus provided with a plurality of small bars having a measuring probe, one small bar 130 is additionally disposed on the Y-axis driving part 121 disposed on the side surface of the Y-axis main bar 120, and thus, is attached to the Y-axis driving part 121.
A small X-axis driving unit is provided on a side surface of the small bar 130 attached to the Y-axis driving unit 121, and the measuring probe P is moved in the direction of a small X-axis linear Stage (SX) by being attached to the small X-axis driving unit and driven.
And, a support frame 140 for supporting the other side of the two small bars 130 is further formed.
Fig. 6 is a perspective view showing a detecting apparatus of the present invention provided with a plurality of Y-axis main bars 120 having a plurality of small bars 130.
In this case, even if the Y-axis main bar 120 is not provided with the plurality of small bars 130, a plurality of small bars can be formed on the X-axis frame 110.
While the present invention has been described in detail with reference to the specific embodiments, the above embodiments are intended to illustrate the present invention in detail, and are not intended to limit the present invention, and those skilled in the art can modify or improve the present invention within the technical spirit of the present invention.
Simple modifications and variations of the present invention are within the scope of the present invention, and the specific scope of the present invention will be defined in the claims.
Claims (1)
1. A gantry type ultra-high speed repeated detection device, which is characterized in that,
the detection device is used for detecting the position of the object,
the method comprises the following steps:
an X-axis linear stage moving in the X-axis direction;
a Y-axis linear stage moving in the Y-axis direction; and
a small X-axis linear platform moving according to a section smaller than the moving section of the X-axis linear platform,
wherein,
the X-axis linear stage comprising:
x-axis frames arranged in parallel and spaced from each other; and
an X-axis linear guide rail disposed on the X-axis frame,
the Y-axis linear stage comprising:
a Y-axis main rod; and
a Y-axis driving part disposed on a side surface of the main lever,
and the Y-axis main rod moves in the X-axis direction through the X-axis linear guide,
the small X-axis linear stage comprising:
a small rod; and
a small X-axis driving part disposed on a side surface of the small rod,
and one side of the small rod is mounted on the Y-axis driving part, so that the small rod moves along the Y-axis direction through the Y-axis driving part,
a measurement probe mounted on the small X-axis driving unit and driven, thereby dividing movement of the measurement probe along the X-axis into movement on the X-axis linear stage and movement on the small X-axis linear stage;
further comprising:
a support frame configured in parallel with the Y-axis main rod for supporting the other side of the small rod,
thereby, the small bar is supported from both sides;
the Y-axis driving part arranged at one side of the small rod is provided with a linear guide rail and a linear motor,
the support frame is provided with a linear guide rail for supporting the other side of the small rod,
thereby, the small rod is transferred by the guide of the linear guide rail of the Y-axis driving part and the linear guide rail of the supporting frame;
further comprising: a transfer driving part for simultaneously transferring the Y-axis main rod and the support frame;
the transfer drive unit includes:
main pole columns arranged at both ends of the Y-axis main pole;
support frame columns configured at two ends of the support frame; and
and a base plate on which the main pole and the support frame are mounted.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160088106A KR101846385B1 (en) | 2016-07-12 | 2016-07-12 | Review measurement device that has both ends suporting structure |
| KR10-2016-0088106 | 2016-07-12 |
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| CN107607138A CN107607138A (en) | 2018-01-19 |
| CN107607138B true CN107607138B (en) | 2020-07-10 |
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| CN201710271835.4A Active CN107607138B (en) | 2016-07-12 | 2017-04-24 | Superspeed repeated detection device with two-end support arm structure |
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| Country | Link |
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| KR (1) | KR101846385B1 (en) |
| CN (1) | CN107607138B (en) |
| TW (1) | TWI642066B (en) |
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| KR102308226B1 (en) * | 2020-11-24 | 2021-11-04 | 디아이티 주식회사 | Substrate surface defect review apparatus |
| KR102631655B1 (en) * | 2020-12-17 | 2024-02-01 | (주)메티스 | Vision inspection apparatus for enhancing operation efficiency |
| CN116609336A (en) * | 2023-04-26 | 2023-08-18 | 晶诺微(上海)科技有限公司 | Defect detection apparatus |
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| CN101852744A (en) * | 2009-03-30 | 2010-10-06 | 松下电器产业株式会社 | Imaging check device and imaging check method |
| CN102393293A (en) * | 2011-08-29 | 2012-03-28 | 阮立山 | Fresnel solar lens detector |
| CN102494704A (en) * | 2011-11-22 | 2012-06-13 | 吴江市博众精工科技有限公司 | Movement module |
| CN102564337A (en) * | 2010-12-31 | 2012-07-11 | 鸿富锦精密工业（深圳）有限公司 | Image-measuring machine |
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| DE602006011792D1 (en) * | 2006-04-18 | 2010-03-04 | Hexagon Metrology Spa | HORIZON ALARM COORDINATE MEASURING MACHINE |
| JP4210692B2 (en) * | 2006-05-30 | 2009-01-21 | セイコープレシジョン株式会社 | Drilling device |
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| JP4762351B2 (en) * | 2009-03-30 | 2011-08-31 | パナソニック株式会社 | Imaging inspection apparatus and imaging inspection method |
| JP2011007647A (en) * | 2009-06-26 | 2011-01-13 | Shimadzu Corp | Inspection device of prober frame for tft substrate inspection device |
| KR101540179B1 (en) * | 2014-05-02 | 2015-07-28 | 주식회사 에이치비테크놀러지 | Review measurement path algorithm |
| US9707584B2 (en) * | 2014-07-09 | 2017-07-18 | Nordson Corporation | Dual applicator fluid dispensing methods and systems |
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- 2016-07-12 KR KR1020160088106A patent/KR101846385B1/en active IP Right Grant
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- 2017-04-24 CN CN201710271835.4A patent/CN107607138B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101852744A (en) * | 2009-03-30 | 2010-10-06 | 松下电器产业株式会社 | Imaging check device and imaging check method |
| CN102564337A (en) * | 2010-12-31 | 2012-07-11 | 鸿富锦精密工业（深圳）有限公司 | Image-measuring machine |
| CN102393293A (en) * | 2011-08-29 | 2012-03-28 | 阮立山 | Fresnel solar lens detector |
| CN102494704A (en) * | 2011-11-22 | 2012-06-13 | 吴江市博众精工科技有限公司 | Movement module |
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| Publication number | Publication date |
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| CN107607138A (en) | 2018-01-19 |
| KR101846385B1 (en) | 2018-04-06 |
| TW201802824A (en) | 2018-01-16 |
| KR20180007194A (en) | 2018-01-22 |
| TWI642066B (en) | 2018-11-21 |
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