CN110687115A - Semiconductor detection probe platform - Google Patents

Semiconductor detection probe platform Download PDF

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Publication number
CN110687115A
CN110687115A CN201910793989.9A CN201910793989A CN110687115A CN 110687115 A CN110687115 A CN 110687115A CN 201910793989 A CN201910793989 A CN 201910793989A CN 110687115 A CN110687115 A CN 110687115A
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CN
China
Prior art keywords
base
probe platform
guide rail
fixed
wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910793989.9A
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Chinese (zh)
Inventor
肖遵保
许建亚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Needle Table Semiconductor Technology Co., Ltd.
Original Assignee
Shanghai Tianxin Electronic Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Tianxin Electronic Technology Co Ltd filed Critical Shanghai Tianxin Electronic Technology Co Ltd
Priority to CN201910793989.9A priority Critical patent/CN110687115A/en
Publication of CN110687115A publication Critical patent/CN110687115A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The invention discloses a semiconductor detection probe platform which comprises a side plate, a probe station, a base and an object carrying tray, wherein a first guide rail is fixed on the surface of the top of the base, one end of the first guide rail, which is far away from the base, is connected and fixed with the probe station, a probe fixing block is fixed on the upper surface of the probe station, a bracket is fixed on the surface of the top of the side plate, an air cylinder is fixed on the upper surface of the bracket, the air cylinder is connected and fixed with a second guide rail through a connecting plate, a microscope is fixed on the second guide rail, a threaded column is welded at one end of the probe station, a driven wheel is welded at the bottom end of the threaded column, a hand-operated wheel is fixed on the upper surface of the base, a driving wheel is welded at the bottom end of the hand-operated wheel, a speed change wheel is fixed on. The invention has the advantages of high lifting precision, liftable microscope and synchronous lifting of the platform.

Description

Semiconductor detection probe platform
Technical Field
The invention relates to the technical field of semiconductor detection, in particular to a semiconductor detection probe platform.
Background
During and after the fabrication of an electronic device, such as a semiconductor substrate, it is necessary to perform a correlation test to determine its performance. The probe platform on the existing market can not go up and down or the lifting precision is big, mostly the hand wheel shakes 360 degrees, go up and down 0.5-1 millimeter and vary, can not satisfy more and more accurate test needs, and the microscope can not go up and down, because the microscope camera lens is different in length, when changing different multiplying power camera lenses and testing, the phenomenon of current collision can appear in advance to microscope camera lens and measured sample, current product utilizes linear bearing to go up and down as the vertical direction, leads to the vertical lift unstable, the clearance is big, can not really reach synchronous lift when going up and down.
Disclosure of Invention
The invention aims to provide a semiconductor detection probe platform which has the advantages of high lifting precision, liftable microscope and capability of synchronously lifting the platform, and solves the problems that the probe platform in the current market cannot be lifted or has high lifting precision, mostly adopts a hand wheel to shake for 360 degrees, has unequal lifting ranges of 0.5-1 mm, cannot meet the requirements of more and more precise tests, cannot lift a microscope, has unstable vertical lifting and large clearance due to the fact that the microscope lenses are different in length and are collided with a sample to be detected when different multiplying power lenses are replaced for testing, and cannot be lifted in a real way due to the fact that the existing product utilizes a linear bearing to lift the probe platform in a vertical guide mode.
In order to achieve the purpose, the invention provides the following technical scheme: a semiconductor detection probe platform comprises a side plate, a probe platform, a base and a carrying tray, wherein a first guide rail is fixed on the top surface of the base, one end of the first guide rail, which is far away from the base, is fixedly connected with a probe station, a probe fixing block is fixed on the upper surface of the probe station, a side plate is fixed on one side of the top surface of the base, which is positioned on the first guide rail, a bracket is fixed on the top surface of the side plate, the upper surface of the bracket is fixed with an air cylinder which is fixedly connected with the second guide rail through a connecting plate, a microscope is fixed on the second guide rail, a threaded column is welded at one end of the probe station, a driven wheel is welded at the bottom end of the threaded column, the upper surface of base is fixed with hand round, the bottom welding of hand round has the action wheel, the bottom fixed surface of base has the change wheel, the upper surface of base is fixed with carries the thing tray.
Preferably, the threaded column is in transmission connection with the variable speed wheel through a belt, and the variable speed wheel is in transmission connection with the driving wheel through the belt.
Preferably, the bottom end of the carrying tray is provided with two movable plates, the two movable plates are respectively fixedly connected with the longitudinal moving structure and the transverse moving structure, and the longitudinal moving structure and the transverse moving structure are identical in structure and size.
Preferably, a threaded rod is rotatably mounted inside the transverse moving structure, a handle is arranged at one end of the threaded rod, which is located outside the transverse moving structure, a connecting block is sleeved outside the threaded rod, and threads matched with the outer surface of the threaded rod in size are formed in the inner surface of the connecting block.
Preferably, a threaded sleeve is arranged at a position, corresponding to the threaded column, on the upper surface of the base, and the threaded column is in threaded connection with the threaded sleeve.
Preferably, the bottom surface of the probe station is uniformly distributed with limiting rods, the limiting rods correspond to the first guide rail in position, and the probe station is matched with the first guide rail through the limiting rods to be limited and installed above the base.
Compared with the prior art, the invention has the beneficial effects that: through setting up the change wheel, the user carries out the variable speed through the change wheel when rotating hand round, reaches the effect of the lift precision of control probe platform, and the bottom evenly distributed of probe platform has the gag lever post, and the gag lever post carries on spacingly when mutually supporting to the probe platform with first guide rail to reach and make the synchronous lift of probe platform, through setting up the cylinder, the cylinder is mutually supported with the guide rail and is guaranteed that the microscope goes up and down stably smooth-going not produce vibrations.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic side cross-sectional view of the present invention;
FIG. 3 is a schematic top view of the present invention;
FIG. 4 is a schematic bottom view of the present invention;
fig. 5 is a schematic cross-sectional view of the moving structure of the present invention.
In the figure: 1. a side plate; 2. a probe station; 3. a first guide rail; 4. a base; 5. a longitudinally moving structure; 6. a carrying tray; 7. a lateral movement structure; 8. a hand-operated wheel; 9. a probe fixing block; 10. a microscope; 11. a second guide rail; 12. a connecting plate; 13. a threaded post; 14. a change wheel; 15. a belt; 16. a driving wheel; 17. a cylinder; 18. a bracket; 19. a threaded rod; 20. connecting blocks; 21. a handle.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 5, an embodiment of the present invention includes: a semiconductor detection probe platform comprises a side plate 1, a probe platform 2, a base 4 and an object carrying tray 6, wherein a first guide rail 3 is fixed on the top surface of the base 4, one end of the first guide rail 3, which is far away from the base 4, is connected and fixed with the probe platform 2, limit rods are uniformly distributed on the bottom surface of the probe platform 2 and correspond to the positions of the first guide rail 3, the probe platform 2 is in limit installation above the base 4 through the mutual matching of the limit rods and the first guide rail 3, the limit rods and the first guide rail 3 are in limit during the lifting of the probe platform 2, so that the probe platform 2 is synchronously lifted, a probe fixing block 9 is fixed on the upper surface of the probe platform 2, the side plate 1 is fixed on one side of the first guide rail 3 on the top surface of the base 4, a bracket 18 is fixed on the top surface of the side plate 1, an air cylinder 17 is fixed on the upper surface of the bracket 18, the air cylinder 17 is connected and, the microscope 10 is fixed on the second guide rail 11, and the air cylinder 17 is matched with the guide rail to ensure that the microscope 10 stably and smoothly ascends and descends without vibration.
The probe station comprises a probe station 2, a threaded column 13 welded at one end of the probe station 2, a threaded sleeve arranged at a position, corresponding to the threaded column 13, on the upper surface of a base 4, the threaded column 13 is in threaded connection with the threaded sleeve, the threaded column 13 and a speed-changing wheel 14 are in transmission connection through a belt 15, the speed-changing wheel 14 is in transmission connection with a driving wheel 16 through the belt 15, a driven wheel is welded at the bottom end of the threaded column 13, a hand-operated wheel 8 is fixed on the upper surface of the base 4, the driving wheel 16 is welded at the bottom end of the hand-operated wheel 8, the speed-changing wheel 14 is fixed on the bottom surface of the base 4, when a user rotates the hand-operated wheel 8, the speed is changed through the speed-changing wheel 14 to achieve the effect of controlling the lifting precision of the probe station 2, an object carrying tray 6 is fixed on the upper surface of the base 4, two movable plates are arranged at the bottom end of the object carrying tray, make the semiconductor remove under microscope 10, the structure and the size of longitudinal movement structure 5 and lateral shifting structure 7 are the same, lateral shifting structure 7's internal rotation installs threaded rod 19, the one end of threaded rod 19 is located the outside of lateral shifting structure 7 and is equipped with handle 21, connecting block 20 has been cup jointed to the outside of threaded rod 19, the screw thread with 19 surface size looks adaptations of threaded rod is seted up to connecting block 20 internal surface, when the user rotates handle 21, handle 21 drives threaded rod 19 and rotates, make connecting block 20 pass through lead screw nut principle and move on threaded rod 19.
The working principle is as follows: the user is when using, place the semiconductor on year thing tray 6, the bottom of carrying thing tray 6 is equipped with two movable plates, and two movable plates are connected fixedly with longitudinal movement structure 5 and lateral shifting structure 7 respectively, convenient to use person carries thing tray 6 through longitudinal movement structure 5 and lateral shifting structure 7 removal, make the semiconductor remove under microscope 10, later user rotates hand wheel 8, make the probe platform descend, make probe and semiconductor contact, later user is through passing through the outside air pump of air pump switch-on with cylinder 17, make cylinder 17 control microscope 10's height, and cylinder 17 and guide rail mutually support guarantee that microscope 10 lift is stable smooth-going not produce vibrations.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (6)

1. The utility model provides a semiconductor test probe platform, includes curb plate (1), probe platform (2), base (4) and year thing tray (6), its characterized in that: the top fixed surface of base (4) has first guide rail (3), the one end that first guide rail (3) deviates from base (4) is connected fixedly with probe platform (2), the last fixed surface of probe platform (2) has probe fixed block (9), one side that the top surface of base (4) is located first guide rail (3) is fixed with curb plate (1), the top fixed surface of curb plate (1) has bracket (18), the last fixed surface of bracket (18) has cylinder (17), cylinder (17) are connected fixedly through connecting plate (12) and second guide rail (11), be fixed with microscope (10) on second guide rail (11), the one end welding of probe platform (2) has screw thread post (13), the bottom welding of screw thread post (13) has from the driving wheel, the last fixed surface of base (4) has hand wheel (8), the bottom welding of hand wheel (8) has action wheel (16), the bottom surface mounting of base (4) has change wheel (14), the upper surface mounting of base (4) has thing tray (6) of carrying.
2. The semiconductor test probe platform of claim 1, wherein: the thread column (13) is in transmission connection with the variable speed wheel (14) through a belt (15), and the variable speed wheel (14) is in transmission connection with the driving wheel (16) through the belt (15).
3. The semiconductor test probe platform of claim 1, wherein: the bottom of the carrying tray (6) is provided with two movable plates which are respectively fixedly connected with the longitudinal moving structure (5) and the transverse moving structure (7), and the longitudinal moving structure (5) and the transverse moving structure (7) are identical in structure and size.
4. A semiconductor test probe platform according to claim 3, wherein: threaded rod (19) are installed in the inside rotation of lateral shifting structure (7), the outside that the one end of threaded rod (19) is located lateral shifting structure (7) is equipped with handle (21), connecting block (20) have been cup jointed to the outside of threaded rod (19), the screw thread with threaded rod (19) surface size looks adaptation is seted up to connecting block (20) internal surface.
5. The semiconductor test probe platform of claim 1, wherein: the upper surface of the base (4) is provided with a threaded sleeve corresponding to the threaded column (13), and the threaded column (13) is in threaded connection with the threaded sleeve.
6. The semiconductor test probe platform of claim 1, wherein: the probe platform is characterized in that limiting rods are uniformly distributed on the bottom surface of the probe platform (2), the positions of the limiting rods correspond to those of the first guide rail (3), and the probe platform (2) is matched with the first guide rail (3) through the limiting rods to be limited and is arranged above the base (4).
CN201910793989.9A 2019-08-27 2019-08-27 Semiconductor detection probe platform Pending CN110687115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910793989.9A CN110687115A (en) 2019-08-27 2019-08-27 Semiconductor detection probe platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910793989.9A CN110687115A (en) 2019-08-27 2019-08-27 Semiconductor detection probe platform

Publications (1)

Publication Number Publication Date
CN110687115A true CN110687115A (en) 2020-01-14

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Application Number Title Priority Date Filing Date
CN201910793989.9A Pending CN110687115A (en) 2019-08-27 2019-08-27 Semiconductor detection probe platform

Country Status (1)

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CN (1) CN110687115A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113495352A (en) * 2020-04-08 2021-10-12 上海柯舜科技有限公司 Workpiece containing and carrying cavity of low-temperature probe station

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113495352A (en) * 2020-04-08 2021-10-12 上海柯舜科技有限公司 Workpiece containing and carrying cavity of low-temperature probe station

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CB02 Change of applicant information
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Address after: Block C, No. 888, Huanhu West 2nd Road, Nanhui New Town, Pudong New Area, Shanghai, 201306

Applicant after: Shanghai Core Semiconductor Technology Co., Ltd.

Address before: Room 7076, Building 5, No. 24, Hongwei Road, Nanqiao Town, Fengxian District, Shanghai, 201499

Applicant before: Shanghai Tianxin Electronic Technology Co.,Ltd.

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Effective date of registration: 20220811

Address after: Room 108, Building 2, No. 258-288, Youdong Road, Minhang District, Shanghai, 201100

Applicant after: Shanghai Needle Table Semiconductor Technology Co., Ltd.

Address before: Block C, No. 888, Huanhu West 2nd Road, Nanhui New Town, Pudong New Area, Shanghai, 201306

Applicant before: Shanghai Core Semiconductor Technology Co., Ltd.

CB02 Change of applicant information
CB02 Change of applicant information

Address after: Building A2, 3rd Floor, No. 8 Xinda Road, Huimin Street, Jiashan County, Jiaxing City, Zhejiang Province, 314112

Applicant after: Zhejiang Jifeng Precision Electronics Co.,Ltd.

Address before: Room 108, Building 2, No. 258-288, Youdong Road, Minhang District, Shanghai, 201100

Applicant before: Shanghai Needle Table Semiconductor Technology Co.,Ltd.