CN210534002U

CN210534002U - Semiconductor detection probe platform

Info

Publication number: CN210534002U
Application number: CN201921397952.6U
Authority: CN
Inventors: 肖遵保; 许建亚
Original assignee: Shanghai Tianxin Electronic Technology Co Ltd
Current assignee: Zhejiang Jifeng Precision Electronics Co.,Ltd.
Priority date: 2019-08-27
Filing date: 2019-08-27
Publication date: 2020-05-15
Anticipated expiration: 2029-08-27

Abstract

The utility model discloses a semiconductor test probe platform, including curb plate, probe station, base and year thing tray, the top fixed surface of base has first guide rail, first guide rail deviates from the one end of base and is connected fixedly with the probe station, the last fixed surface of probe station has the probe fixed block, the top fixed surface of curb plate has the bracket, the last fixed surface of bracket has the cylinder, the cylinder passes through the connecting plate and is connected fixedly with the second guide rail, be fixed with the microscope on the second guide rail, the one end welding of probe station has the screw thread post, the bottom welding of screw thread post has from the driving wheel, the last fixed surface of base has hand wheel, the bottom welding of hand wheel has the action wheel, the bottom fixed surface of base has the change wheel, the last fixed surface of base has year thing tray. The utility model discloses possess that lifting accuracy is high, the microscope liftable, and can make the platform carry out the advantage of synchronous lift.

Description

Semiconductor detection probe platform

Technical Field

The utility model relates to a semiconductor inspection technical field specifically is a semiconductor test probe platform.

Background

During and after the fabrication of an electronic device, such as a semiconductor substrate, it is necessary to perform a correlation test to determine its performance. The probe platform on the existing market can not go up and down or the lifting precision is big, mostly the hand wheel shakes 360 degrees, go up and down 0.5-1 millimeter and vary, can not satisfy more and more accurate test needs, and the microscope can not go up and down, because the microscope camera lens is different in length, when changing different multiplying power camera lenses and testing, the phenomenon of current collision can appear in advance to microscope camera lens and measured sample, current product utilizes linear bearing to go up and down as the vertical direction, leads to the vertical lift unstable, the clearance is big, can not really reach synchronous lift when going up and down.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor test probe platform, it is high to possess the lifting accuracy, the microscope liftable, and can make the platform carry out the advantage of synchronous lift, it can not go up and down or the lifting accuracy is big to have solved probe platform on the existing market, mostly be the hand wheel and shake 360 degrees, go up and down 0.5-1 millimeter and vary, can not satisfy more and more accurate test needs, and the microscope can not go up and down, because the microscope camera lens is different in size, when changing different multiplying power camera lenses test, the microscope camera lens can go out the phenomenon of current collision earlier with the sample under test, current product utilizes linear bearing to go up and down as the vertical direction, lead to the vertical lift unstable, the clearance is big, can not be real problem that reaches synchronous lift in the time of going up and.

In order to achieve the above object, the utility model provides a following technical scheme: a semiconductor detection probe platform comprises a side plate, a probe platform, a base and a carrying tray, wherein a first guide rail is fixed on the top surface of the base, one end of the first guide rail, which is far away from the base, is fixedly connected with a probe station, a probe fixing block is fixed on the upper surface of the probe station, a side plate is fixed on one side of the top surface of the base, which is positioned on the first guide rail, a bracket is fixed on the top surface of the side plate, the upper surface of the bracket is fixed with an air cylinder which is fixedly connected with the second guide rail through a connecting plate, a microscope is fixed on the second guide rail, a threaded column is welded at one end of the probe station, a driven wheel is welded at the bottom end of the threaded column, the upper surface of base is fixed with hand round, the bottom welding of hand round has the action wheel, the bottom fixed surface of base has the change wheel, the upper surface of base is fixed with carries the thing tray.

Preferably, the threaded column is in transmission connection with the variable speed wheel through a belt, and the variable speed wheel is in transmission connection with the driving wheel through the belt.

Preferably, the bottom end of the carrying tray is provided with two movable plates, the two movable plates are respectively fixedly connected with the longitudinal moving structure and the transverse moving structure, and the longitudinal moving structure and the transverse moving structure are identical in structure and size.

Preferably, a threaded rod is rotatably mounted inside the transverse moving structure, a handle is arranged at one end of the threaded rod, which is located outside the transverse moving structure, a connecting block is sleeved outside the threaded rod, and threads matched with the outer surface of the threaded rod in size are formed in the inner surface of the connecting block.

Preferably, a threaded sleeve is arranged at a position, corresponding to the threaded column, on the upper surface of the base, and the threaded column is in threaded connection with the threaded sleeve.

Preferably, the bottom surface of the probe station is uniformly distributed with limiting rods, the limiting rods correspond to the first guide rail in position, and the probe station is matched with the first guide rail through the limiting rods to be limited and installed above the base.

Compared with the prior art, the beneficial effects of the utility model are that: through setting up the change wheel, the user carries out the variable speed through the change wheel when rotating hand round, reaches the effect of the lift precision of control probe platform, and the bottom evenly distributed of probe platform has the gag lever post, and the gag lever post carries on spacingly when mutually supporting to the probe platform with first guide rail to reach and make the synchronous lift of probe platform, through setting up the cylinder, the cylinder is mutually supported with the guide rail and is guaranteed that the microscope goes up and down stably smooth-going not produce vibrations.

Drawings

Fig. 1 is a schematic front view of the present invention;

FIG. 2 is a schematic side cross-sectional view of the present invention;

fig. 3 is a schematic top view of the present invention;

fig. 4 is a schematic bottom view of the present invention;

fig. 5 is a schematic sectional view of the moving structure of the present invention.

In the figure: 1. a side plate; 2. a probe station; 3. a first guide rail; 4. a base; 5. a longitudinally moving structure; 6. a carrying tray; 7. a lateral movement structure; 8. a hand-operated wheel; 9. a probe fixing block; 10. a microscope; 11. a second guide rail; 12. a connecting plate; 13. a threaded post; 14. a change wheel; 15. a belt; 16. a driving wheel; 17. a cylinder; 18. a bracket; 19. a threaded rod; 20. connecting blocks; 21. a handle.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1 to 5, the present invention provides an embodiment: a semiconductor detection probe platform comprises a side plate 1, a probe platform 2, a base 4 and an object carrying tray 6, wherein a first guide rail 3 is fixed on the top surface of the base 4, one end of the first guide rail 3, which is far away from the base 4, is connected and fixed with the probe platform 2, limit rods are uniformly distributed on the bottom surface of the probe platform 2 and correspond to the positions of the first guide rail 3, the probe platform 2 is in limit installation above the base 4 through the mutual matching of the limit rods and the first guide rail 3, the limit rods and the first guide rail 3 are in limit during the lifting of the probe platform 2, so that the probe platform 2 is synchronously lifted, a probe fixing block 9 is fixed on the upper surface of the probe platform 2, the side plate 1 is fixed on one side of the first guide rail 3 on the top surface of the base 4, a bracket 18 is fixed on the top surface of the side plate 1, an air cylinder 17 is fixed on the upper surface of the bracket 18, the air cylinder 17 is connected and, the microscope 10 is fixed on the second guide rail 11, and the air cylinder 17 is matched with the guide rail to ensure that the microscope 10 stably and smoothly ascends and descends without vibration.

The probe station comprises a probe station 2, a threaded column 13 welded at one end of the probe station 2, a threaded sleeve arranged at a position, corresponding to the threaded column 13, on the upper surface of a base 4, the threaded column 13 is in threaded connection with the threaded sleeve, the threaded column 13 and a speed-changing wheel 14 are in transmission connection through a belt 15, the speed-changing wheel 14 is in transmission connection with a driving wheel 16 through the belt 15, a driven wheel is welded at the bottom end of the threaded column 13, a hand-operated wheel 8 is fixed on the upper surface of the base 4, the driving wheel 16 is welded at the bottom end of the hand-operated wheel 8, the speed-changing wheel 14 is fixed on the bottom surface of the base 4, when a user rotates the hand-operated wheel 8, the speed is changed through the speed-changing wheel 14 to achieve the effect of controlling the lifting precision of the probe station 2, an object carrying tray 6 is fixed on the upper surface of the base 4, two movable plates are arranged at the bottom end of the object carrying tray, make the semiconductor remove under microscope 10, the structure and the size of longitudinal movement structure 5 and lateral shifting structure 7 are the same, lateral shifting structure 7's internal rotation installs threaded rod 19, the one end of threaded rod 19 is located the outside of lateral shifting structure 7 and is equipped with handle 21, connecting block 20 has been cup jointed to the outside of threaded rod 19, the screw thread with 19 surface size looks adaptations of threaded rod is seted up to connecting block 20 internal surface, when the user rotates handle 21, handle 21 drives threaded rod 19 and rotates, make connecting block 20 pass through lead screw nut principle and move on threaded rod 19.

The working principle is as follows: the user is when using, place the semiconductor on year thing tray 6, the bottom of carrying thing tray 6 is equipped with two movable plates, and two movable plates are connected fixedly with longitudinal movement structure 5 and lateral shifting structure 7 respectively, convenient to use person carries thing tray 6 through longitudinal movement structure 5 and lateral shifting structure 7 removal, make the semiconductor remove under microscope 10, later user rotates hand wheel 8, make the probe platform descend, make probe and semiconductor contact, later user is through passing through the outside air pump of air pump switch-on with cylinder 17, make cylinder 17 control microscope 10's height, and cylinder 17 and guide rail mutually support guarantee that microscope 10 lift is stable smooth-going not produce vibrations.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a semiconductor test probe platform, includes curb plate (1), probe platform (2), base (4) and year thing tray (6), its characterized in that: the top fixed surface of base (4) has first guide rail (3), the one end that first guide rail (3) deviates from base (4) is connected fixedly with probe platform (2), the last fixed surface of probe platform (2) has probe fixed block (9), one side that the top surface of base (4) is located first guide rail (3) is fixed with curb plate (1), the top fixed surface of curb plate (1) has bracket (18), the last fixed surface of bracket (18) has cylinder (17), cylinder (17) are connected fixedly through connecting plate (12) and second guide rail (11), be fixed with microscope (10) on second guide rail (11), the one end welding of probe platform (2) has screw thread post (13), the bottom welding of screw thread post (13) has from the driving wheel, the last fixed surface of base (4) has hand wheel (8), the bottom welding of hand wheel (8) has action wheel (16), the bottom surface mounting of base (4) has change wheel (14), the upper surface mounting of base (4) has thing tray (6) of carrying.

2. The semiconductor test probe platform of claim 1, wherein: the thread column (13) is in transmission connection with the variable speed wheel (14) through a belt (15), and the variable speed wheel (14) is in transmission connection with the driving wheel (16) through the belt (15).

3. The semiconductor test probe platform of claim 1, wherein: the bottom of the carrying tray (6) is provided with two movable plates which are respectively fixedly connected with the longitudinal moving structure (5) and the transverse moving structure (7), and the longitudinal moving structure (5) and the transverse moving structure (7) are identical in structure and size.

4. A semiconductor test probe platform according to claim 3, wherein: threaded rod (19) are installed in the inside rotation of lateral shifting structure (7), the outside that the one end of threaded rod (19) is located lateral shifting structure (7) is equipped with handle (21), connecting block (20) have been cup jointed to the outside of threaded rod (19), the screw thread with threaded rod (19) surface size looks adaptation is seted up to connecting block (20) internal surface.

5. The semiconductor test probe platform of claim 1, wherein: the upper surface of the base (4) is provided with a threaded sleeve corresponding to the threaded column (13), and the threaded column (13) is in threaded connection with the threaded sleeve.

6. The semiconductor test probe platform of claim 1, wherein: the probe platform is characterized in that limiting rods are uniformly distributed on the bottom surface of the probe platform (2), the positions of the limiting rods correspond to those of the first guide rail (3), and the probe platform (2) is matched with the first guide rail (3) through the limiting rods to be limited and is arranged above the base (4).