JP2889083B2 - 2D coordinate measuring machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-dimensional measuring machine, and more particularly to a two-dimensionally slidable detecting unit which irradiates an object to be measured from underneath the detecting unit with transmitted light. The present invention relates to a two-dimensional measuring machine for measuring an object to be measured.

[0002]

2. Description of the Related Art As a means for measuring the dimensions of a film-shaped original plate such as a printed wiring board or a semiconductor pattern diagram, a detecting unit slidably movable in a two-dimensional direction and a light source for irradiating the detection unit from below the film-shaped original plate. There is known a two-dimensional measuring machine having a section and an example thereof is shown in FIG.

The two-dimensional measuring apparatus shown in FIG.
A plurality of guide rails 2 fixed in parallel on the base 1
An X-axis frame 3 slidably mounted on the guide rail 2, a Y-axis drive unit 4 for moving the X-axis frame 3 along the guide rail 2, and a longitudinal axis direction of the X-axis frame 3. A detection unit mounted on a mounting table 5 slidably provided along an X-axis drive unit 6 for moving the mounting table 5 along the X-axis frame 3; An object to be measured placed on the base 1 is irradiated with light from a light source unit (not shown) provided inside the device.

The Y and X axis driving units 4 and 6 are composed of motors 4a and 6a and ball screws 4b and 6b, respectively.
Is installed in a concave portion 1a provided at one end of the base 1, and the X-axis frame 3 is engaged with the ball screw 6a. Motor 4a and bolt 4b of X-axis drive unit 4
Is a mounting table 5 which is installed in an X-axis frame 3 having a concave cross section and has a detection unit mounted on a ball screw 4a.
Are engaged.

In the two-dimensional measuring machine configured as described above, an object to be measured is placed on the base 1, illuminated by a light source from below, and transmitted light is received by a detector on the mounting table 5. ,
The measurement is performed by moving the mounting table 5. The movement at this time is performed by rotating the ball screw 4b, so that the detection unit moves along the X-axis frame 3, the amount of movement is detected by, for example, a rotary encoder, and the ball screw 6b is driven to rotate. By doing
The X-axis frame 3 moves along the guide rail 2, and the amount of movement is similarly detected.

[0006] However, the conventional two-dimensional measuring machine configured as described above has the following technical problems.

[0007]

That is, in the two-dimensional measuring machine shown in FIG. 8, the Y-axis driving unit 4 is provided at the end of the base 1 and the end of the X-axis frame 3 is provided. The driving force is applied from the side, for example, in a state where the mounting table 5 on which the detection unit is mounted is located at the end opposite to the Y-axis driving unit 4,
When the X-axis frame 3 is moved by the Y-axis drive unit 4, there is a problem that a measurement error increases.

The cause of this error is that the guide rail 2 and the like are machined with a predetermined dimensional accuracy, but it is impossible to make the machining accuracy zero, and a slight machining error is included. Due to this processing error, when the X-axis frame 3 is moved by the Y-axis drive unit 4, a yawing motion may occur. When this motion occurs, the sine of the yawing angle is set to the length of the X-axis frame 3. The multiplication error occurs in the Y-axis direction, and becomes larger as the X-axis frame 3 becomes longer.

The present invention has been made in view of such conventional problems, and a first object of the present invention is to reduce a measurement error of a two-dimensional measuring machine. Further, as a second object, a two-dimensional measuring machine having a transmitted light type light source unit,
In particular, it is to simplify the configuration of the light source unit and its support structure.

[0010]

In order to achieve the above object, the present invention provides an X-axis frame slidably mounted on a guide rail extending in parallel, and the X-axis frame is connected to the guide rail. Y-axis drive unit that moves along the axis, a detection unit that is slidably provided along the longitudinal axis direction of the X-axis frame, and an X-axis drive unit that moves the detection unit along the X-axis frame And a light source unit for irradiating the object to be measured from below the detection unit, wherein the Y-axis driving unit is provided substantially at the center of the X-axis frame in the longitudinal axis direction. .

The light source unit may be configured to be attached to the X-axis frame and to move synchronously with the detection unit. Further, the light source unit may be constituted by a plurality of light emitting diodes. Further, the light emitting diodes may be arranged linearly along a longitudinal axis direction of the X-axis frame.

[0012]

According to the two-dimensional measuring device having the above-described structure, the Y-axis driving section is provided substantially at the center of the X-axis frame in the longitudinal axis direction. The detection unit slidably provided on the shaft frame moves at most about one half of the longitudinal direction of the X-axis frame relative to the Y-axis drive unit, and therefore, the measurement error due to the yawing motion. Can be reduced to approximately 1/2.

According to the second aspect of the present invention, since the light source unit is attached to the X-axis frame, the configuration for causing the light source unit to follow the movement of the detection unit in the two-dimensional direction is limited to the uniaxial direction. I'm done. According to the configuration of the third aspect, since the light source unit includes a plurality of light emitting diodes, heat generation of the light source unit can be reduced. According to the configuration of claim 4, since the light-emitting diodes of the light source unit are linearly arranged along the longitudinal axis direction of the X-axis frame, a configuration for causing the light source unit to follow the movement of the detection unit is provided. It becomes unnecessary.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. 1 and 2 show a first embodiment of a two-dimensional measuring machine according to the present invention. The two-dimensional measuring apparatus shown in FIG.
Two guide rails 12 fixed in parallel with each other, an X-axis frame 14 slidably mounted on the guide rail 12, and the X-axis frame 14
Y-axis driving unit 16 that moves along the X-axis frame, detection unit 18 that is slidably provided along the longitudinal axis direction of the X-axis frame 14, and moves the detection unit 18 along the X-axis frame 14. And an X-axis drive unit 20 for performing the operation.

A transparent glass table 21 on which an object to be measured is placed is installed on the upper surface of the base 10, and a light source unit for irradiating the object to be measured on the back side of the table 21, such as a fluorescent lamp, is provided. Be placed. Also, inside the base 10,
A control system of the two-dimensional measuring machine is built in, and an operation unit 22 is provided on one side thereof. The X-axis frame 14 has a substantially concave longitudinal section, and a plurality of sliders 24 that are fitted to the guide rails 12 are fixed to both ends on the lower surface side, and a detection unit 18 is provided on the upper end surface side. A plurality of rails 26 for slidably supporting a mounting table 25 to be mounted are fixedly provided.

As shown in detail in FIG. 2, the X-axis frame 14 is provided with a substantially rectangular window 14a, and the table 21 is inserted through the window 14a. is set up. The detection unit 18 is, specifically,
It is composed of a magnifying microscope, fixedly supported on a mounting table 25, and provided with a reflective illumination lamp 28 on its side. The X-axis drive unit 20 includes a motor 20a and a ball screw 20b connected to a rotation shaft of the motor 20a. These members are installed in the X-axis frame 14, and the ball screw 20b and the mounting table 25 are engaged. I agree.

The Y-axis drive section 16 is composed of a motor 16a and a ball screw 16b connected to the rotation shaft of the motor 16a.
Is installed at a substantially central portion of the base 10 below. The ball screw 16b and the X-axis frame 14 are connected by a connecting plate 30 protruding from a lower surface of a substantially central portion of the X-axis frame 14 in the longitudinal axis direction. The member indicated by reference numeral 32 shown in FIG. 1 is a guide rod of the connecting plate 30.

In the two-dimensional measuring machine constructed as described above, similarly to this kind of conventional measuring machine, the object to be measured is placed on the table 21 provided on the base 10 and the light source section is placed on the table 21 from below. The measurement is performed by moving the detection unit 18 while receiving the transmitted light by the detection unit 18, and the movement amount in the two-dimensional direction at this time is, for example, a rotation drive amount of the ball screws 16 b and 20 b, for example, It is detected by a rotary encoder or the like.

In such a measurement, in the measuring machine of the present embodiment, the Y-axis driving section 16 is provided substantially at the center of the X-axis frame 14 in the longitudinal axis direction. Even if it occurs, the detecting unit 18 slidably provided on the X-axis frame 14 moves the Y-axis driving unit 16 at most only about の in the longitudinal direction of the X-axis frame 14. For this reason, the measurement error due to the yawing motion can be reduced to approximately 、, and the accuracy of the measuring machine can be greatly improved.

The Y-axis drive unit 16 is connected to the X-axis frame 14.
Is provided at substantially the center in the longitudinal axis direction of the
Can be reduced when the is reciprocated along the X-axis frame 14. FIGS. 3 to 5 show a second embodiment of a two-dimensional measuring machine according to the present invention, and only the characteristic points will be described below. In the two-dimensional measuring machine shown in the figure, the light source unit 34 is provided immediately below the detection unit 18. The light source unit 34 includes a plurality of light emitting diodes 34.
a in this embodiment, the light emitting diode 34
a is attached to the substrate 34b.

The light source unit 34 having the above-described structure includes a pair of support plates 36 disposed opposite to the lower surface of the end of the X-axis frame 14, and a pair of support plates 36 provided between the support plates 36.
X is formed by a book guide bar 37 and a slide table 38 that is inserted through the guide bar 37 and has a substrate 34b fixed to the upper surface.
It is attached to the shaft frame 14. The light source unit 34 of this embodiment is configured to move synchronously along the longitudinal direction of the detection unit 18 and the X-axis frame 14, as shown in detail in FIG. This moving mechanism is composed of a plurality of rotating sheaves 39 and a plurality of wires 40, and one end of one wire 40 is fixed to a protruding piece 41 which is vertically provided at a side end of the mounting table 25 of the detection unit 18. The other end is locked to the slide table 38 via a plurality of rotating sheaves 39. Another wire 40 has one end fixed to the slide table 38 and the other end fixed to the protruding piece 41 via a plurality of rotating sheaves.

In the moving mechanism constructed as described above, when the detecting section 18 moves along the X-axis frame 14, the detecting section 18 is pulled by the wire 40 and the slide table 38 is moved to the guide bar 37.
Move synchronously along. In the two-dimensional measuring machine configured as described above, measurement is performed in the same manner as in the first embodiment. At this time, in this embodiment, the light source unit 34 is attached to the X-axis frame 14. And the light source unit 34
When the Y-axis driving unit 16 is driven, the X-axis frame 14 moves together with the X-axis frame 14, and the detection unit 18 and the X-axis frame 1 are moved by a moving mechanism composed of a rotating sheave 39 and a wire 40.
4, the light source unit 34 is connected to the detection unit 1.
8 and move synchronously in two-dimensional directions.

In the light source section 34 having such a configuration, first,
Since the light source is constituted by the light emitting diode 34a, the heat generation is much smaller than that of a fluorescent lamp or the like. Therefore, for example, when measuring a film-shaped original plate or the like, the influence of thermal expansion can be reduced. The accuracy is improved. As a means for eliminating the influence of such heat generation of the light source, a light source is provided outside the measuring instrument, and the light is detected by an optical fiber.
Measuring device that guides underneath (Japanese Patent Laid-Open No. 3-255301)
However, this measuring device requires a two-dimensional synchronous movement mechanism, and furthermore, the optical fiber must be supported by the link mechanism so as to be movable in the two-dimensional direction. However, in the case of the present embodiment, since the light source unit 34 is attached to the X-axis frame 14, the configuration for causing the light source unit 34 to follow the movement of the detection unit 18 in the two-dimensional direction is as follows. Only one axial direction is required, and the configuration can be greatly simplified.

FIGS. 6 and 8 show a three-dimensional measuring machine according to a third embodiment of the present invention. Only the features of the embodiment will be described below. In the two-dimensional measuring machine shown in FIG.
The light source unit 44 is composed of a plurality of light emitting diodes 44a as in the second embodiment.
It is provided linearly along the longitudinal axis direction of the X-axis frame 14.

The light emitting diode 44a is supported by a substrate 44b, and the substrate 44b is fixed to a side surface of the X-axis frame 14. A diffusion filter 44c is provided on the upper surface side of the light emitting diode 44a. Now, in the two-dimensional measuring machine configured as described above, measurement is performed by the same method as in the first and second embodiments. At this time, in this embodiment, the light source unit 44 of the X-axis frame 14 Since the light source unit 44 is provided linearly along the longitudinal axis direction, the light source unit 44 moves together with the X-axis frame 14 when the Y-axis driving unit 16 is driven, and when the detection unit 18 moves along the X-axis frame 14. The object to be measured can be constantly illuminated from the lower side, and as a result, the light source unit 44 is the same as moving the detection unit 18 in a two-dimensional direction synchronously.

In this case, the light emitting diodes 44a of the light source section 44 do not always have to be turned on all the time. For example, the detection section 18 moves as the detection section 18 moves.
Can be partially turned on for each viewing range. According to the two-dimensional measuring device having such a configuration, the same operation and effect as those of the second embodiment can be obtained, and the light source unit 44 does not need a mechanism for synchronously moving the detecting unit 18 in the two-dimensional direction. Therefore, the configuration can be further simplified.

The light source section 44 composed of the light emitting diode 44a can easily change the luminance by adjusting the applied voltage. For example, the light control for changing the luminance in accordance with the object to be measured can be performed. Easy to do.

[0028]

As described above in detail in the embodiments,
According to the two-dimensional measuring apparatus according to the present invention, measurement accuracy can be greatly improved. According to the configuration of the second aspect, the configuration for synchronously moving the light source unit is simplified. Further, according to the configuration of the third aspect, the thermal effect of the light source unit can be reduced. Furthermore, according to the configuration of the fourth aspect, the configuration for synchronously moving the light source unit is further simplified.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a first embodiment of a two-dimensional measuring machine according to the present invention.

FIG. 2 is an enlarged view of a main part of FIG.

FIG. 3 is a perspective view showing a second embodiment of the two-dimensional measuring machine according to the present invention.

FIG. 4 is an enlarged view of a main part of FIG. 3;

FIG. 5 is an enlarged view of a main part of FIG. 3;

FIG. 6 is a perspective view showing a third embodiment of the two-dimensional measuring machine according to the present invention.

FIG. 7 is an enlarged view of a main part of FIG. 3;

FIG. 8 is a perspective view showing an example of a conventional two-dimensional measuring machine.

[Explanation of symbols]

 Reference Signs List 10 base 12 guide rail 14 X-axis frame 16 Y-axis drive 16a motor 16b ball screw 18 detector 20 X-axis drive 20a motor 20b ball screw 21 table 24 slider 25 mounting table 34, 44 light source 34a, 44a light emitting diode 36 support Plate 37 Guide bar 38 Slide table 39 Rotating sheave 40 Wire

Claims (4)

(57) [Claims] 1. An X-axis frame slidably mounted on a guide rail extending in parallel, a Y-axis drive unit for moving the X-axis frame along the guide rail, and the X-axis frame. A detection unit slidably provided along the longitudinal axis of the X-axis frame; an X-axis driving unit that moves the detection unit along the X-axis frame; and a light source that irradiates the device under test from below the detection unit. A two-dimensional coordinate measuring machine, comprising: a Y-axis driving unit provided substantially at the center of the X-axis frame in the longitudinal axis direction. 2. The two-dimensional measuring device according to claim 1, wherein the light source unit is attached to the X-axis frame and moves synchronously with the detection unit. 3. The two-dimensional measuring device according to claim 2, wherein the light source unit includes a plurality of light emitting diodes. 4. The two-dimensional measuring device according to claim 3, wherein the light emitting diodes are arranged linearly along a longitudinal direction of the X-axis frame.