CN113866587A - Flying probe test equipment - Google Patents
Flying probe test equipment Download PDFInfo
- Publication number
- CN113866587A CN113866587A CN202110960679.9A CN202110960679A CN113866587A CN 113866587 A CN113866587 A CN 113866587A CN 202110960679 A CN202110960679 A CN 202110960679A CN 113866587 A CN113866587 A CN 113866587A
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- Prior art keywords
- testing
- test
- flying probe
- moving mechanism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
Abstract
The invention discloses flying probe testing equipment which comprises 2N testing tracks, wherein each testing track is provided with two on-off testing units, one testing unit of each testing track is provided with an image unit, each on-off testing unit comprises an X-direction moving mechanism, a Y-direction moving mechanism and a Z-direction moving mechanism, and a testing probe is arranged on the Z-direction moving mechanism, wherein N is more than or equal to 1. The flying probe test equipment improves the test efficiency and the image analysis capability of the flying probe equipment and the stability and the safety of a tested product in the test process, ensures enough precision, and can keep the precision for a long time.
Description
Technical Field
The invention relates to the technical field of testing, in particular to flying probe testing equipment.
Background
For packaging substrates, ceramic substrates, silicon substrates, printed wiring boards, electrical performance testing is a crucial step. The detection equipment is used for automatically detecting whether the defects such as open circuit, short circuit and the like exist in products such as a packaging substrate, a ceramic substrate, a silicon substrate, a printed circuit board and the like, so that the detection efficiency can be greatly improved, and the detection equipment is essential. At present, the mainstream electrical performance detection equipment mainly comprises special test equipment and flying probe test equipment.
For the flying probe test equipment, the main characteristics and problems are as follows:
1. the existing flying probe test equipment usually controls the probe motion test by driving a screw rod or a belt by a servo/stepping motor. The problem is that a servo/stepping motor is adopted to drive a screw or a belt to drive, irreversible abrasion is easy to occur, and the whole testing system cannot keep stable precision. This problem is more pronounced, particularly with screw drives.
2. Existing flying probe test equipment is configured with only one test unit per rail/lead screw. The problem is that all test units are a closed loop system, and when one test unit fails/is abnormal, other test units cannot work normally.
3. The prior flying probe test equipment is respectively provided with an independent industrial camera at the front and the back or is provided with one industrial camera on all test heads. The problem is that when one industrial camera is configured at the front and the rear, the two industrial cameras are only used for positioning the reference points before testing, and real-time images/videos cannot be viewed in the testing process. If the position of the test probe changes in the test process, the position cannot be found easily in time. However, if all the test heads have industrial cameras, a very complex algorithm needs to be matched to avoid collision, and when the test heads are gathered together, the image of the tested product cannot be seen. And sometimes the equipment is suddenly stopped in order to avoid collision when testing particularly high-end products (products with small and dense pads), but sometimes collision is unavoidable.
4. The existing flying probe test equipment often adopts a vertical clamping plate mode to bear a tested product, so that when a soft plate is tested, the soft plate cannot be in a very flat state on a frame plate frame. The pin marks can not be controlled, and the product with the measuring points closer to the plate is inconvenient to test.
Disclosure of Invention
The invention aims to provide a flying probe testing device which can efficiently test and keep stable testing precision.
In order to solve the technical problem, the invention provides flying probe testing equipment which comprises 2N testing tracks, wherein each testing track is provided with two on-off testing units, one testing unit of each testing track is provided with an image unit, each on-off testing unit comprises an X-direction moving mechanism, a Y-direction moving mechanism and a Z-direction moving mechanism, a testing probe is arranged on the Z-direction moving mechanism, and N is more than or equal to 1.
Furthermore, the device comprises a testing beam, an upper testing track and a lower testing track are respectively arranged on two sides of the testing beam, two on-off testing units are respectively arranged on the upper testing track and the lower testing track, the on-off testing units on the upper testing track and the lower testing track are arranged in an up-and-down symmetrical mode, the image units on the two upper testing tracks are arranged on the two on-off testing units in a crossed mode, and the image units on the two lower testing tracks are arranged on the two on-off testing units in a crossed mode.
Further, still include the splint device, splint device level sets up and is located between last test track and the lower test track.
Furthermore, the clamping plate device comprises two parallel sliding rails, and two clamping mechanisms are symmetrically arranged between the two sliding rails; each clamping mechanism comprises a sliding seat and a clamping piece, wherein two ends of the sliding seat can slide on the sliding rail, the clamping piece is used for clamping a tested product, and an air bag is arranged between the sliding seat and the clamping piece.
Furthermore, a locking knob and a fine adjustment rod are further arranged on the clamping mechanism.
Furthermore, the X-direction movement mechanism and the Z-direction movement mechanism respectively adopt linear motors, wherein the stator of the X-direction linear motor is arranged on and fixed on the test beam, and the Y-direction movement mechanism is arranged on the rotor of the X-direction linear motor; one end of a rotor of the Z-direction linear motor is provided with a test support, and the test probe is installed on the test support; the Y-direction movement mechanism is a rotating motor, and the rotating motor drives the Z-direction linear motor to rotate together with the test support and the test probe.
Furthermore, grating rulers are respectively arranged on the X-direction linear motor and the Y-direction linear motor; and a rotary encoder is arranged on the rotary motor.
Furthermore, the image unit is arranged on a base of the Z-direction movement mechanism and comprises a camera with a horizontally arranged lens optical axis, and a reflector arranged at an angle of 45 degrees is arranged in front of the lens.
Furthermore, the image unit also comprises a horizontal light-emitting diode and an inclined light-emitting diode, and light emitted by the horizontal light-emitting diode horizontally irradiates the reflector and vertically irradiates to a detected product after being reflected by the reflector; and light emitted by the side-inclined light emitting diode is emitted to a detected product in an inclined angle.
Furthermore, the included angle between the light emitted by the side-inclined light emitting diode and the horizontal plane is 45 degrees.
The flying probe test equipment improves the test efficiency and the image analysis capability of the flying probe equipment and the stability and the safety of a tested product in the test process, ensures enough precision, and can keep the precision for a long time.
Drawings
Figure 1 is a front view of one embodiment of a test beam structure of the present invention.
Figure 2 is a perspective view of one embodiment of a test beam structure of the present invention.
FIG. 3 is a schematic structural diagram of an embodiment of the present invention in which an on-off test unit is installed on a test track.
Fig. 4 is a schematic structural view of an embodiment of the splint device according to the present invention.
FIG. 5 is a schematic structural diagram of an embodiment of an on-off test unit according to the present invention.
FIG. 6 is a schematic structural diagram of an image unit according to an embodiment of the present invention.
FIG. 7 is a schematic diagram of an illumination path of an image unit according to the present invention.
FIG. 8 is a simplified schematic diagram of the rotational scan range of the test fixture and flying probe of the present invention.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
The flying probe testing equipment comprises 2N (N is more than or equal to 1) testing tracks, wherein each testing track is provided with two on-off testing units, the two on-off testing units on the same track form a group of independent on-off testing systems, one testing unit of each testing track is provided with an image unit, each on-off testing unit comprises an X-direction moving mechanism, a Y-direction moving mechanism and a Z-direction moving mechanism, and a testing probe is arranged on the Z-direction moving mechanism. That is, in the present invention, the test tracks are arranged in pairs, two on-off test units are provided on each test track, and the image unit is provided on only one of the two on-off test units on the same test track. The on-off test unit drives the test probes to respectively move in the X direction, the Y direction and the Z direction so as to realize the detection of any point on a tested product.
As shown in fig. 1 to 3, in this embodiment, a test beam 1 is provided, upper test rails 2 and lower test rails 3 are respectively arranged on the test beam 1 in pairs, the two upper test rails 2 are respectively arranged on both sides of the test beam 1, and the two lower test rails 3 are also respectively arranged on both sides of the test beam 1. Every is gone up and is set up two break-make test unit on the test track 2, also sets up two break-make test unit on every test track 3 down, and goes up the test track 2 and the break-make test unit on the test track 3 down is the longitudinal symmetry setting, and the break-make test unit on the test track 2 sets up downwards promptly, and the break-make test unit on the test track 3 down sets up towards the top. The image units 7 on the two upper test tracks 2 are arranged on the two on-off test units in a crossed manner, and the image units 7 on the two lower test tracks 3 are arranged on the two on-off test units in a crossed manner. That is, if the image unit on the front upper test track is disposed on the left on-off test unit, the image unit on the rear upper test track is disposed on the right on-off test unit; and vice versa. Similarly, if the image unit on the front lower test track is arranged on the left on-off test unit, the image unit on the rear lower test track is arranged on the right on-off test unit; and vice versa. In other embodiments, only the upper test track may be provided.
As shown in fig. 4, an embodiment of the present invention further includes a clamping device, which is horizontally disposed and located between the upper test rail 2 and the lower test rail 3. After the tested product is clamped on the clamping plate device, the on-off testing units on the upper testing track are used for detecting the upper surface of the tested product from two sides of the testing beam respectively, and the on-off testing units on the lower testing track are used for detecting the lower surface of the tested product from two sides of the testing beam respectively. The clamping plate device is used for supporting the tested product and ensuring that the tested product is safely and stably placed in the middle of the equipment in the testing process, and preferably placed in the middle.
As shown in fig. 4, the clamping plate device includes two parallel slide rails 12, and two clamping mechanisms are symmetrically disposed between the two slide rails 12; each clamping mechanism comprises a sliding seat 14 with two ends capable of sliding on the sliding rails 12 and a clamping piece 16 for clamping a tested product, wherein an air bag 15 is arranged between the sliding seat 12 and the clamping piece 16 and is communicated with an air source for providing compressed air. A locking knob 18 is arranged on the clamping mechanism; a porous rod 13 is arranged inside the slide rail 12. The working principle is as follows: according to the size of the product to be measured, the front clamping mechanism and the rear clamping mechanism are adjusted, the front clamping mechanism and the rear clamping mechanism slide on the sliding rail 12 to a proper position, and the locking knob 18 is rotated to enable the clamping mechanisms to be tightly fixed on the porous rod 13. The passage between the compressed air source and the air bag 15 is closed, the compressed air in the air bag 15 is pressed out, the tested product or the auxiliary clamp can be placed between the two clamping pieces 16 at the moment, the passage between the compressed air source and the air bag is opened, the air bag 15 is inflated, and the tested product can be firmly fixed between the clamping pieces at the moment. A fine adjustment lever 17 may be provided on the clamping mechanism to fine-tune the clamping force.
As shown in fig. 5, in an embodiment of the present invention, linear motors are respectively used as the X-direction movement mechanism and the Z-direction movement mechanism, wherein a stator 4 of the X-direction linear motor is fixed on the test beam 1, so that the linear motor is separately arranged from the test track, and the Y-direction movement mechanism is arranged on a mover 5 of the X-direction linear motor; one end of a rotor of the Z-direction linear motor 10 is provided with a test support 8, and the test probe is installed on the test support 8; the Y-direction movement mechanism is a rotating motor 9, and the rotating motor 9 drives the Z-direction linear motor to rotate together with the test support and the test probe. Preferably, the linear motors in the X direction and the Y direction are respectively provided with a grating ruler 11; the rotary motor 9 is provided with a rotary encoder 6. The structure can enable the on-off test unit to move in X, Y, Z three directions, wherein the test support and the test probe move to the X coordinate position of the tested product pad in the X direction through the linear motor which is horizontally installed and the grating ruler. Meanwhile, the rotary motor in the Y direction is matched with the rotary encoder to move to the Y coordinate position of the bonding pad of the product to be tested. After the test probe moves to a position right above X, Y coordinates of a bonding pad of a tested product, the linear motor arranged in the Z direction is matched with the grating ruler to drive the test support and the test probe to move downwards to complete the contact test of the corresponding bonding pad.
In the invention, the test support and the test probe adopt a rotation positioning mode in the Y direction to find the Y-direction coordinate of the pad to be tested. As shown in fig. 3 in conjunction with fig. 5 and 8, the test rack and the flying probe head on the left side can be rotationally positioned 0-180 degrees on the right side of the test unit, and the test rack and the flying probe head on the right side can be rotationally positioned 0-180 degrees on the left side of the test unit, so that 100% full coverage of the test track area is realized.
As shown in fig. 5 and 6, the image unit of the present invention is disposed on the base of the Z-direction moving mechanism, the image unit includes a camera 19 with a horizontally disposed lens optical axis, and a mirror 20 disposed at an angle of 45 degrees is disposed in front of the lens. The image unit also comprises a horizontal light-emitting diode and an inclined light-emitting diode 22, light emitted by the horizontal light-emitting diode horizontally irradiates the reflective mirror 20, and is reflected by the reflective mirror 20 and then vertically irradiates a detected product; the light emitted by the laterally inclined LED 22 is directed towards the product under test at an oblique angle. The included angle between the light emitted by the side-inclined light emitting diode and the horizontal plane is preferably 45 degrees. Wherein the camera is preferably an industrial camera.
According to the invention, the industrial camera is transversely arranged and fixed on the base of the Z-direction movement mechanism, so that the industrial camera can synchronously move with the test support in the horizontal direction, but cannot move along with the test support in the Z direction, and thus, the real-time test condition can be checked, and the industrial camera has good stability. The transverse camera transmits the image of the circuit board to be measured to the industrial camera through the lens after reflecting by using the reflector. Therefore, the product with different thicknesses can be focused accurately, and the method is suitable for testing products with 0-10mm thickness difference.
The image unit on the on-off test unit is formed by an industrial camera matched light path structure used for assisting the test system in accurately scanning and positioning and checking real-time images/videos. The X-direction focal length fine adjustment function and the Z-direction object distance adjustment function are equipped, the X-direction can be adjusted by 0-10mm, and the Z-direction can be adjusted by 0-15 mm. So as to adapt to the test requirements of different products.
One embodiment of the optical path structure in the imaging unit is shown in fig. 7, and includes at least 2 horizontal leds 21 for irradiating light onto a reflector 20 at an angle of 45 degrees with respect to the horizontal plane, and irradiating the light onto the surface of a product 23 to be measured through the reflector 20. In addition, in order to prevent the test probe from blocking the light reflected by the reflective mirror 20, at least 2 side-inclined light emitting diodes 22 may be further provided to irradiate the light onto the surface of the product 23 to be tested in a direction forming an angle of 45 degrees with the horizontal plane. Under the irradiation of 2 groups of light, the industrial camera can acquire a very clear image/video of the detected area of the product 23 to be detected.
The industrial camera can provide functions of positioning scanning, viewing real-time images and the like for the test area covered by the test track. The image units on the adjacent test tracks are designed with height differences, so that the image units on the same surface can not collide or interfere with the image units on the adjacent test tracks in the scanning alignment and test processes.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the invention is all within the protection scope of the invention. The protection scope of the invention is subject to the claims.
Claims (10)
1. The flying probe testing equipment is characterized by comprising 2N testing tracks, wherein each testing track is provided with two on-off testing units, one testing unit of each testing track is provided with an image unit, each on-off testing unit comprises an X-direction moving mechanism, a Y-direction moving mechanism and a Z-direction moving mechanism, a testing probe is arranged on the Z-direction moving mechanism, and N is more than or equal to 1.
2. The flying probe testing device of claim 1, wherein the device comprises a testing beam, an upper testing rail and a lower testing rail are respectively arranged on two sides of the testing beam, two on-off testing units are respectively arranged on the upper testing rail and the lower testing rail, the on-off testing units on the upper testing rail and the lower testing rail are symmetrically arranged up and down, the image units on the two upper testing rails are arranged on the two on-off testing units in a crossed manner, and the image units on the two lower testing rails are arranged on the two on-off testing units in a crossed manner.
3. The flying probe testing apparatus of claim 2, further comprising a clamp arrangement disposed horizontally and between the upper and lower test rails.
4. The flying probe testing device of claim 3, wherein the clamping plate device comprises two sliding rails arranged in parallel, and two clamping mechanisms are symmetrically arranged between the two sliding rails; each clamping mechanism comprises a sliding seat and a clamping piece, wherein two ends of the sliding seat can slide on the sliding rail, the clamping piece is used for clamping a tested product, and an air bag is arranged between the sliding seat and the clamping piece.
5. The flying probe testing apparatus of claim 4, wherein a locking knob and a vernier are further provided on the clamping mechanism.
6. The flying probe testing device of claim 1, wherein the X-direction moving mechanism and the Z-direction moving mechanism are respectively linear motors, wherein a stator of the X-direction linear motor is arranged on the test beam, and the Y-direction moving mechanism is arranged on a mover of the X-direction linear motor; one end of a rotor of the Z-direction linear motor is provided with a test support, and the test probe is installed on the test support; the Y-direction movement mechanism is a rotating motor, and the rotating motor drives the Z-direction linear motor to rotate together with the test support and the test probe.
7. The flying probe testing device of claim 6, wherein grating scales are respectively arranged on the X-direction linear motor and the Y-direction linear motor; and a rotary encoder is arranged on the rotary motor.
8. The flying probe testing apparatus of claim 6, wherein the imaging unit is disposed on a base of the Z-motion mechanism, the imaging unit comprises a camera with a lens having a horizontal optical axis, and a mirror disposed at an angle of 45 degrees is disposed in front of the lens.
9. The flying probe testing device of claim 8, wherein the image unit further comprises a horizontal light emitting diode and an inclined light emitting diode, and light emitted by the horizontal light emitting diode is horizontally emitted to the reflector and is vertically emitted to a tested product after being reflected by the reflector; and light emitted by the side-inclined light emitting diode is emitted to a detected product in an inclined angle.
10. The flying probe testing apparatus of claim 9, wherein the light from the side-slanted light emitting diode is at an angle of 45 degrees from horizontal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110960679.9A CN113866587A (en) | 2021-08-20 | 2021-08-20 | Flying probe test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110960679.9A CN113866587A (en) | 2021-08-20 | 2021-08-20 | Flying probe test equipment |
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| Publication Number | Publication Date |
|---|---|
| CN113866587A true CN113866587A (en) | 2021-12-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110960679.9A Pending CN113866587A (en) | 2021-08-20 | 2021-08-20 | Flying probe test equipment |
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| CN (1) | CN113866587A (en) |
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