JP2021138599A - Interpolation mechanism for laser scribe device and scribe device applied with interpolation mechanism - Google Patents

Abstract

To provide an interpolation mechanism used to adjust an optical path of a laser beam to a vertically lower direction in a conveyor type scribe device to position a light reaching point in a carrying direction of a conveyor.SOLUTION: A scribe device has: a conveyor (substrate transfer means) which horizontally transfers a substrate; a horizontal moving table which moves in a direction orthogonal to the transfer direction of the substrate; a laser oscillator which is installed on the horizontal moving table and emits a laser beam; and an interpolation mechanism which is installed slidably on the horizontal moving table, and receives and guides the laser beam vertically downward toward the substrate to adjust the optical path to a vertically downward direction, and thus adjusts the position of a light reaching point.SELECTED DRAWING: Figure 7

Description

The present invention relates to a laser scribe device for dividing a brittle substrate, and more specifically, to an interpolation mechanism for improving the scribe accuracy through position interpolation of laser irradiation and a scribe device to which the interpolation mechanism is applied.

A scribe device is used as a tool for cutting various thin and brittle substrates including a glass substrate to a required size. A scribe device is a device that forms a scribe line on the surface of a substrate using a laser irradiation unit or a scribing wheel. After the scribe line is formed, for example, a bending force is applied to the substrate around the scribe line to apply a bending force to the substrate. Can be disconnected.

For example, a wheel scribe device has a control unit, a table that supports the brittle substrate to be machined, a guide rail that is horizontally installed above the table and extends in the longitudinal direction, and moves (slides) along the guide rail. It has a basic structure consisting of a scribe head that can be mounted and a scribing wheel provided at the lower end of the scribe head. The scribing wheel travels (rolls) in a state of being pressed against a brittle substrate to form a scribe line on the substrate.

The table can be transferred in the Y direction (direction orthogonal to the guide rail) of the brittle substrate, or can be rotated with respect to the vertical axis in the Z direction while the brittle substrate is kept horizontal. Further, on the guide rail, a camera for photographing the alignment mark formed on the brittle substrate, an image display device, and the like are installed.

In a conventional scribe device having the above structure, if the direction of the brittle substrate entering below the guide rail is distorted, the scribe line must be aligned through the correction process. There are a method of correcting the position of the brittle substrate by moving the chuck holding the brittle substrate, and a method of forming a scribe line while correcting the irradiation position of the laser beam using a galvano scanner.
By the way, the above-mentioned correction method can be applied when the table supporting the brittle substrate can be rotated, and it is difficult to apply the correction method to, for example, an apparatus to which a conveyor capable of only linear motion is applied.
Also, galvano scanners are expensive and, above all, incompatible with the scribe device control system, so a new program must be applied to make the galvano scanner control program compatible with the scribe device control program. There is an inconvenience that it does not become.

Korean Published Patent Gazette No. 10-2017-00839393

The present invention was created in order to solve the above-mentioned problems, has a size and a structure suitable for application to a conveyor type scribe device, does not require special additional equipment, and is configured at low cost. An object of the present invention is to provide an interpolation mechanism for a laser scribe device, which is advantageous in manufacturing and maintenance, and a laser scribe device to which the interpolation mechanism is applied.
In addition, there is no increase in the time required for interpolation work compared to when other control methods are used, and an interpolation mechanism for a laser scribing device that enables quick and accurate work and a scribe to which the interpolation mechanism is applied. The purpose is to provide the device.

The scribing device of the present invention as a means for solving the problem for achieving the above object includes a substrate transfer means (for example, a conveyor) that horizontally transfers the substrate in the Y direction while horizontally supporting the substrate; above the substrate transfer means. A horizontal moving table that is located and moves in the X direction orthogonal to the transfer direction of the substrate; a laser oscillator provided on one side of the horizontal moving table and emits a laser beam in the X direction; and slidable to the horizontal moving table. It is installed in the substrate, receives a laser beam emitted from the laser oscillator, and guides the laser beam in the vertical downward direction toward the substrate, and adjusts the optical path of the laser beam in the vertical downward direction to the substrate. It has a laser irradiation unit provided with an interpolation mechanism that adjusts the position of the light landing point reflected in the image in the Y direction.

Further, the laser irradiation unit includes a slide structure slidably mounted on the horizontal moving table, and the interpolation mechanism; receives a laser beam fixed to the slide structure and irradiated from the laser oscillator. , A first optical path conversion portion that converts the optical path of the laser beam in the Y direction, and a movable frame that is supported by the slide structure so that the position can be adjusted in the Y direction; And; although it is installed in the movable frame, it is arranged corresponding to the first optical path conversion portion, the distance from the first optical path conversion portion is adjusted by the position adjusting means, and the first optical path conversion portion is formed. It is provided with a second optical path conversion portion that receives the passed laser beam and guides the laser beam downward in the Z direction, which is a direction perpendicular to the Y direction and the X direction.

At the same time, the first optical path conversion unit includes a first mirror that reflects the laser beam but reflects the laser beam so that the incident angle and the exit angle are perpendicular to each other, and the second optical path conversion unit includes the second optical path conversion unit. It includes a second mirror that reflects the laser beam reflected by the first mirror, but reflects so that the angle of incidence and the angle of exit are perpendicular.

In addition, a photographing unit that captures the alignment marks marked on both sides of the tip portion of the substrate that has passed below the horizontal moving table in the moving direction and the imaging content of the photographing unit are transmitted to the laser irradiation unit in the X direction. The difference between the moving movement line and the virtual straight line connecting the alignment marks is grasped, the deviation amount of the virtual straight line in the Y direction with respect to the moving movement line in the X direction is calculated, and the position adjusting means is based on the deviation amount. Further included is a control unit that adjusts the distance of the second mirror with respect to the first mirror through.

The position adjusting means; the servomotor fixed to the slide structure and controlled by the control unit, the ball screw fixed to the drive shaft of the servomotor, and the ball fixed to the movable frame. A reciprocating block that reciprocates the movable frame by receiving a force from a screw is provided.
At the same time, the scribing device of the present invention as a means for solving the problem for achieving the above object is a horizontal movement that moves in the X direction on the upper part of the board transfer means (for example, a conveyor) that horizontally transfers the substrate in the Y direction. It is mounted on a table so as to be slidable, and is installed in a laser irradiation unit that guides a laser beam incident in the X direction from the outside in the vertical downward direction toward the substrate. A first optical path conversion unit that receives a laser beam emitted from an oscillator and converts the optical path of the laser beam in the Y direction; a movable frame supported by the laser irradiation unit so as to be adjustable in the Y direction; the movable A position adjusting means for moving the frame in the Y direction; although it is installed in the movable frame, it is arranged corresponding to the first optical path conversion portion, and the distance from the first optical path conversion portion is adjusted by the position adjusting means. It is provided with a second optical path conversion section that receives the laser beam that has passed through the first optical path conversion section and guides the laser beam downward in the Z direction, which is a direction perpendicular to the Y direction and the X direction.
Further, the first optical path conversion unit includes a first mirror that reflects the laser beam but reflects the laser beam so that the incident angle and the exit angle are perpendicular to each other, and the second optical path conversion unit includes the first optical path conversion unit. It includes a second mirror that reflects the laser beam reflected by one mirror, but reflects so that the incident angle and the exit angle are perpendicular to each other.

The present invention made as described above has a size and structure suitable for application to a conveyor type scribe device, can be configured at low cost without the need for special additional equipment, and is advantageous in manufacturing and maintenance. be. In addition, since the time required for the interpolation work does not increase as compared with the case where other control methods are used, quick and accurate work is possible.

The plan view for demonstrating the purpose and principle of laser beam irradiation position interpolation. The perspective view which shows the scribe apparatus which concerns on one Embodiment of this invention as a whole. The perspective view of the laser irradiation unit to which the interpolation mechanism which concerns on one Example of this invention is applied. The perspective view of the laser irradiation unit to which the interpolation mechanism which concerns on one Example of this invention is applied. The figure which shows the interval change of the 2nd mirror with respect to the 1st mirror. The figure which shows the interval change of the 2nd mirror with respect to the 1st mirror. The block diagram which shows the whole structure of the laser beam irradiation position interpolation mechanism which concerns on one Example of this invention.

Hereinafter, an embodiment according to the present invention will be described in more detail with reference to the attached drawings.

FIG. 1 is a plan view for explaining the purpose and principle of laser beam irradiation position interpolation.

The basic purpose of interpolation is to form a scribe line at an exact location on the brittle substrate (100). That is, as shown in FIG. 1, the brittle substrate (100), which is horizontally moved in the Y direction by the first belt conveyor (13) and is located at the lower part of the horizontal moving table (17), is in a distorted state. However, in consideration of the degree of distortion, the beam emitting portion that moves in the X direction is also moved in the Y direction at the same time.

Such interpolation is a deviation (in the Y direction along the X direction) between the virtual straight line (100a) connecting the alignment marks (100e) and the moving flow line (100b) of the laser irradiation unit (30) itself. This is done by calculating the amount (ΔY) and linearly moving the light landing point by the deviation amount (ΔY) while the laser irradiation unit (30) moves in the X direction. The light landing point is a point where the laser beam (L) irradiated vertically toward the brittle substrate (100) is reflected. Such interpolation work is performed by the photographing unit (51), the control unit (53), and the servomotor (35), which will be described later, and the related description will be described later.

FIG. 2 is a perspective view showing the scribe device according to an embodiment of the present invention as a whole.

As shown in the figure, the scribe device (10) according to the present embodiment includes the first and second belt conveyors (13, 15) supported by the base frame (11), the horizontal moving table (17), and the laser oscillator (19). ), A laser irradiation unit (30), and a wheel scribing device (20). The wheel scribe device (20) may be omitted if necessary.

The first and second belt conveyors (13, 15) are horizontally supported by the base frame (11), and the brittle substrate (100) charged from the outside is transferred in the Y direction. The downstream end of the first belt conveyor (13) and the upstream end of the second belt conveyor (15) are separated in parallel with each other, and the wheel scribing device (20) and the laser are located above the separated space. It has an irradiation unit (30).

In this description, the Y direction is the transfer direction of the brittle substrate (100), and the X direction is a direction orthogonal to the Y direction. The Z direction is the direction of a vertical line perpendicular to the brittle substrate (100).

The brittle substrate placed on the first belt conveyor (13) passes under the horizontal moving table (17) along the Y direction. In the brittle substrate, the point where the scribe line should be formed while passing through the lower part of the horizontal moving table (17) is the wheel (not shown) of the wheel scribe device (20) or the beam of the laser irradiation unit (30). Waiting for scribe processing while stopping at a point located at the vertical lower part of the discharge part (49 in FIG. 3).

The horizontal moving table (17) is a horizontal structure that moves in the X direction orthogonal to the transfer direction of the brittle substrate, and slidably supports the wheel scribing device (20) and the laser irradiation unit (30).

The laser oscillator (19) is provided on one side of the horizontal moving table (17) and emits a laser beam in the X direction. The laser beam emitted from the laser oscillator (19) extends in the X direction, is reflected by the first mirror (43) shown in FIG. 3, and is folded at an angle of 90 degrees. The laser beam generated from the laser oscillator (19) has the energy to reach the surface of the brittle substrate and form a scribe line.

The wheel scribing device (20) has a scribing wheel (not shown) at the lower end, and moves in the X direction with the scribing wheel pressed against the upper surface of the brittle substrate, leaving a scribing line on the substrate. The structure is the same as that of a general wheel scribe device.

The laser irradiation unit (30) slides in the X direction and at the same time receives a laser beam emitted from the laser oscillator (19) and guides it to the brittle substrate to form a scribing line on the brittle substrate. Includes interpolation mechanism.

At the same time, the scribe device (10) further includes a photographing unit (51 in FIG. 7) and a control unit (53 in FIG. 7). The photographing unit (51) and the control unit (53) are for embodying the interpolation operation of the interpolation mechanism, and the photographing unit (51) grasps the position of the alignment mark (100e) described with reference to FIG. The control unit (53) grasps the above-mentioned deviation amount (ΔY) based on the information transmitted from the imaging unit (51), and the control unit (53) obtains a beam corresponding to the deviation amount. It has a function of moving the discharge unit (49) in the Y direction.

3 and 4 are perspective views of the laser irradiation unit (30) to which the interpolation mechanism according to the embodiment of the present invention is applied, and FIGS. 5a and 5b and 6a and 6b are the first mirrors (43). It is a figure which showed the interval change of the 2nd mirror (45) with respect to.

As shown in the figure, a fixing plate (33) and a first mirror fixing base (41) are fixed to one side surface of a slide structure (31) forming the body of the laser irradiation unit (30). The fixed plate (33) is a plate-shaped member having a certain thickness, is erected vertically, and has horizontal rails (33a) above and below. The horizontal rails (33a) are parallel to each other and are horizontally extended attachments that slidably support the slider (39a) in the Y direction.

At the same time, the servomotor (35) is mounted on the fixed plate (33). The servomotor (35) is a position adjusting means for horizontally moving the movable frame (39) described later in the Y direction, and is controlled by a control unit (53 in FIG. 7). The moving distance of the movable frame (39) in the Y direction is adjusted by the control unit (53).

A ball screw (35a) is fixed to the drive shaft of the servomotor (35), and the ball screw (35a) meshes with the reciprocating block (37). The reciprocating block (37) is a block-type member fixed to the movable frame (39), and receives a force in the longitudinal direction of the ball screw (that is, in the Y direction) when the ball screw (35a) rotates about its axis. (39) is moved.

The first mirror fixing body (41) serves to fix the first mirror (43). The first mirror (43) refracts the laser beam emitted from the laser oscillator (19) at an angle of 90 degrees and guides the laser beam to the second mirror (45) described later. The first mirror (43) is fixed to the first mirror fixed body (41) and does not move separately.

The movable frame (39) is a structure supported by a fixed plate (33) through a slider (39a), and supports a second mirror (45), a light guiding case (47), and a beam emitting portion (49). do. The second mirror (45), the light guiding case (47), and the beam emitting unit (49) form a single body and move at the same time while being fixed to the movable frame (39). That is, it moves in the Y direction by the operation of the servomotor (35).

The second mirror (45) is fixed to the upper portion of the movable frame (39) and maintains a state of being tilted at an angle of 45 degrees. The second mirror (45) receives the laser beam reflected by the first mirror (43) and reflects it vertically downward. The laser beam reflected by the second mirror (45) passes through the light guiding case (47) and the beam emitting portion (49) and reaches the brittle substrate.

A lens is provided inside the beam emitting portion. The first mirror (43) and the second mirror (45) are first and second optical path conversion portions, and reflect the laser beam emitted from the laser oscillator (19) several times to form a brittle substrate. It is something to reach.

The laser beam horizontally emitted in the X direction by the laser oscillator (19) is incident on the first mirror (43) at an angle of 45 degrees and emitted at an angle of 45 degrees. The angle between the reflected laser beams is 90 degrees. The laser beam reflected by the first mirror (43) is reflected by the second mirror (45) while still maintaining the horizontal position.

The second mirror (45) refracts the optical path of the horizontally incident laser beam at a right angle to guide the laser beam in the vertical direction, that is, in the Z direction. The angle between the incident light and the reflected light of the laser beam reflected by the second mirror (45) is 90 degrees.

On the other hand, while scribing is performed using the laser irradiation unit (30) having the above structure, the light landing point (100f in FIG. 5b) on which the laser beam is reflected on the substrate (100) should be moved by the deviation amount (ΔY). If so, the servomotor (35) is operated to move the second mirror (45) in the direction of arrow K by a deviation amount (ΔY). That is, the second mirror (45), which is separated from the first mirror (43) by the interval D1 minutes, is narrowed down to the interval D2.

Since the laser beam reflected by the second mirror (45) is vertical, the light landing point (100f) moves in the same manner by the moving distance of the second mirror (45). In this way, the interpolation work is performed by adjusting the distance between the second mirror (45) and the first mirror (43) using the servomotor (35).

FIG. 7 is a block diagram for explaining the operation of the laser irradiation unit interpolation mechanism according to the embodiment of the present invention.

As shown in the figure, the photographing unit (51) photographs the alignment displayed on the brittle substrate (100) and sends it to the control unit (53). The control unit (53) compares the flow lines of the virtual straight line (100a) and the laser irradiation unit (30) based on the information transmitted through the imaging unit, and obtains the deviation amount (ΔY) along the X direction. , The servomotor (35) is used to move the second mirror (45) in the Y direction by a deviation amount. While such interpolation work is being performed, the laser irradiation unit (30) moves in the X direction along the horizontal moving table (17) to form a scribe line, and such a process is repeated.

Although the present invention has been described in detail through specific examples, the present invention is not limited to the above-mentioned examples, and various modifications can be made by a person having ordinary knowledge within the scope of the technical idea of the present invention. It is possible.

10 Scrivener 11 Base frame 13 First belt conveyor (board transfer means)
15 Second belt conveyor (board transfer means)
17 Horizontal moving table 19 Laser oscillator 20 Wheel scribing device 30 Laser irradiation unit 31 Slide structure 33 Fixed plate 33a Horizontal rail 35 Servo motor 35a Ball screw 37 Reciprocating block 39 Movable frame 39a Slider 41 First mirror fixing base 43 First Mirror 45 Second mirror 47 Light induction case 49 Beam emitting part 51 Imaging part 53 Control part 100 Fragile substrate 100a Virtual straight line 100b Flow line 100e Alignment mark 100f Light landing point

Claims (7)

With a substrate transfer means that horizontally transfers the substrate in the Y direction while supporting it horizontally;
With a horizontal moving table located above the substrate transfer means and horizontally moving in the X direction orthogonal to the Y direction;
With a laser oscillator installed on the horizontal moving table and emitting a laser beam in the X direction;
It is slidably installed on the horizontal moving table, receives a laser beam emitted from the laser oscillator, and guides the laser beam in the vertical downward direction toward the substrate, and is an optical path in the vertical downward direction of the laser beam. A scribing device having a laser irradiation unit provided with an interpolation mechanism that adjusts the position of the light landing point reflected on the substrate in the Y direction. The laser irradiation unit includes a slide structure that is slidably mounted on the horizontal moving table.
The interpolation mechanism is;
A first optical path conversion unit fixed to the slide structure, receiving a laser beam emitted from the laser oscillator, and converting the optical path of the laser beam in the Y direction.
With a movable frame that is supported by the slide structure so that it can be adjusted in the Y direction;
With a position adjusting means for moving the movable frame in the Y direction;
Although it is installed in the movable frame, it is arranged corresponding to the first optical path conversion portion, the distance from the first optical path conversion portion is adjusted by the position adjusting means, and the laser passes through the first optical path conversion portion. The scribing device according to claim 1, further comprising a second optical path conversion unit that receives the beam and guides the laser beam downward in the Z direction, which is a direction perpendicular to the Y direction and the X direction. The first optical path conversion portion includes a first mirror that reflects the laser beam but reflects the laser beam so that the incident angle and the emitted angle are at right angles.
The second aspect of claim 2, wherein the second optical path conversion unit reflects a laser beam reflected by the first mirror, but includes a second mirror that reflects the laser beam so that the incident angle and the exit angle are at right angles. Screen device. An imaging unit that captures the alignment marks marked on both sides of the tip of the substrate that has passed below the horizontal moving table, and an imaging unit that captures the alignment marks.
The shooting content of the imaging unit is transmitted, the difference between the X-direction moving flow line of the laser irradiation unit and the virtual straight line connecting the alignment marks is grasped, and the Y direction of the virtual straight line with respect to the moving flow line in the X direction. The scribing device according to claim 3, further comprising a control unit that calculates the deviation amount of the second mirror and adjusts the distance of the second mirror with respect to the first mirror through the position adjusting means based on the deviation amount. The position adjusting means is;
A servomotor fixed to the slide structure and controlled by the control unit,
A ball screw fixed to the drive shaft of the servo motor and
The scribe device according to claim 4, further comprising a reciprocating block fixed to the movable frame and receiving a force from the ball screw to reciprocate the movable frame. It is slidably mounted on a horizontal moving table that moves in the X direction above the board transfer means that horizontally transfers the substrate in the Y direction, and guides the laser beam incident in the X direction from the outside in the vertical downward direction toward the substrate. It constitutes a laser irradiation unit and
With a first optical path conversion unit fixed to the laser irradiation unit, receiving a laser beam emitted from a laser oscillator, and converting the optical path of the laser beam in the Y direction;
With a movable frame supported by the laser irradiation unit so that it can be adjusted in the Y direction;
With a position adjusting means for moving the movable frame in the Y direction;
Although it is installed in the movable frame, it is arranged corresponding to the first optical path conversion portion, the distance from the first optical path conversion portion is adjusted by the position adjusting means, and the laser passes through the first optical path conversion portion. An interpolation mechanism for a laser scribing device including a second optical path conversion unit that receives a beam and guides the laser beam downward in the Z direction, which is a direction perpendicular to the Y and X directions. The first optical path conversion portion includes a first mirror that reflects the laser beam but reflects the laser beam so that the incident angle and the emitted angle are at right angles.
The sixth aspect of claim 6, wherein the second optical path conversion unit reflects a laser beam reflected by the first mirror, but includes a second mirror that reflects the laser beam so that the incident angle and the exit angle are perpendicular to each other. Interpolating mechanism for laser scribing equipment.

Images