CN107607138A - Ultrahigh speed with both ends support arm structure repeats detection means - Google Patents
Ultrahigh speed with both ends support arm structure repeats detection means Download PDFInfo
- Publication number
- CN107607138A CN107607138A CN201710271835.4A CN201710271835A CN107607138A CN 107607138 A CN107607138 A CN 107607138A CN 201710271835 A CN201710271835 A CN 201710271835A CN 107607138 A CN107607138 A CN 107607138A
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- CN
- China
- Prior art keywords
- axis
- small
- drive division
- detection means
- linear stage
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
- G01N2021/887—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing the measurements made in two or more directions, angles, positions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/104—Mechano-optical scan, i.e. object and beam moving
- G01N2201/1042—X, Y scan, i.e. object moving in X, beam in Y
Abstract
The present invention relates to planer-type ultrahigh speed to repeat detection means, in the X-axis linear stage moved according to X-direction, the Y-axis linear stage moved according to Y direction, and in the small X-axis linear stage according to the section movement of the moving section less than X-axis linear stage, the frame or bar of drive division are set with linear guides or be configured with respectively, also, measuring probe is installed on the drive division of the small bar in the small X-axis linear stage, so as to it realize the detection means of the measurement to determinand.
Description
Technical field
The present invention relates to the ultrahigh speed with both ends support arm structure to repeat detection means, is related in more detail by using line
Property small X-axis (Linear Small X-Axis), so as to the problem of making up single support arm structure, the durability for improving equipment, form
Accurate and gantry module of high speed repetition detection means.
Background technology
Existing repetition (Review) detection means be made up of linear gantry module (Linear Grantry System) and
Realize driving.
Also, existing small X-axis (Small X-Axis) repeats linear gantry that detection means is configured to single support arm form
Module (Linear Grantry System) simultaneously realizes driving, thus, exist because optical system it is sagging caused by shake and ask
The problem of inscribing, and being produced because of vibration, limitation in terms of the extension of measurement range be present, also, increase linear electric machine
Capacity, the problem of raising manufacturing cost, extension time of measuring be present.
Citation
Patent document
(patent document 1) Ebrean Registered Patent publication, number of registration the 10-1540179th.
The content of the invention
Invention technical problems to be solved
To solve the above problems, it is an object of the invention to provide a kind of module, optimal path algorithm and both ends are used
The small X-axis (Small X-Axis) of support arm structure, so as to prevent sagging, the caused shake of solution vibration of support arm, also, nothing
The capacity of linear electric machine, which need to be increased, can also shorten traveling time, expand the scope that can be measured in certain minute.
The technical scheme solved the problems, such as
To achieve the above object, the present invention repeats detection means, the detection means, bag for a kind of planer-type ultrahigh speed
Include：X-axis linear stage, is moved according to X-direction；Y-axis linear stage, is moved according to Y direction；And small X-axis linear stage, press
Moved according to the section of the moving section less than X-axis linear stage, wherein, the X-axis linear stage, including：X-axis frame, with mutual
The mode of separation abreast configures；And X-axis linear guides, it is configured above the X-axis frame, the Y-axis linear stage, wraps
Include：Y-axis mobile jib；And Y-axis drive division, it is configured at the side of the mobile jib.
Now, the Y-axis mobile jib is moved by the X-axis linear guides according to X-direction, and the small X-axis is linearly put down
Platform, including：Small bar；And small X-axis drive division, be configured at the side of the small bar, also, the side of the small bar be installed on it is described
Y-axis drive division, thus, the small bar are moved by the Y-axis drive division according to Y direction.
Moreover, measuring probe is installed on the small X-axis drive division and realizes driving, thus, by the measuring probe
Along moving for X-axis, the movement in the X-axis linear stage and the movement in the small X-axis linear stage are decomposed into.
Also, also include support frame, configured in a manner of parallel with the Y-axis mobile jib, for supporting the another of the small bar
Side, thus, the small bar is supported from both sides.
Now, the Y-axis drive division for being configured at the side of the small bar has linear guides and linear electric machine, support frame as described above
Be provided with the linear guides of the opposite side for supporting the small bar, thus, by the linear guides of the Y-axis drive division with it is described
The guiding of the linear guides of support frame, and the small bar is transferred.
Also, also include transfer drive division, for being transferred to the Y-axis mobile jib with support frame as described above simultaneously.
The transfer drive division, including：Main stem, it is configured at the both ends of the Y-axis mobile jib；Trestle is supported, is configured at institute
State the both ends of support frame；And bottom plate, it is equipped with the main stem and support frame as described above post.
Also, the main stem for being configured at the substrate of the transfer drive division and support frame as described above post are mutually flat
OK, the Y-axis mobile jib is parallel to each other with support frame as described above, passes through the linear guides of the Y-axis mobile jib and the line of support frame as described above
Property guide rail guiding and realize that the small bar of transfer and the bottom plate are parallel to each other, so as to, the main stem and support frame as described above post
It is at a right angle with the small bar and the sole shape while being parallel to each other, thus, the main stem, support frame as described above post, institute
Small bar is stated, and the bottom plate is configured to quadrangle.
In addition, on the Y-axis drive division of side for being configured at the Y-axis mobile jib, multiple small bars can be formed, and
And on the X-axis frame, multiple Y-axis mobile jibs for being provided with the small bar can be formed.
The feature and advantage of the present invention will be obtained clearly by reference to the detailed description of accompanying drawing.
Before this, the term used in present specification and claims or vocabulary should not be construed as common dictionary
Implication, but illustrated based on for the invention to me in a manner of most preferred, inventor can be to the concept of term
The principle of appropriate definition is carried out, term is construed to the implication and concept of technological thought for meeting the present invention.
The effect of invention
According to the present invention, made up using the linear small X-axis (Linear Small X-Axis) of both ends support arm structure because of list
Support arm caused by support arm structure it is sagging and because of vibration and caused by jitter problem, measurement range can be expanded by having, and shorten measurement
The effect of time.
Brief description of the drawings
Figure one is the stereogram for the detection means for showing existing single support arm structure,
Figure two repeats the stereogram of detection means for the ultrahigh speed of the both ends support arm structure of the display present invention,
Figure three is the display stereogram for supplying to support the support frame of the small bar with measuring probe of the invention,
The sectional view for the mobile drive division that figure four is integrated for the formation of the display present invention,
Figure five is the stereogram of the detection means for being provided with multiple small bars with measuring probe of the display present invention,
Figure six is the solid of the detection means for being provided with multiple Y-axis mobile jibs formed with multiple small bars of the display present invention
Figure.
Description of reference numerals
100：Detection means 110：X-axis frame
120：Y-axis mobile jib 121：Y-axis drive division
130：Small bar 140：Support frame
200：Transfer drive division 210：Bottom plate
211：Main stem 212：Support trestle
P：Measuring probe
Embodiment
Below, the preferred embodiments of the present invention are illustrated referring to the drawings.In the process, in order to improve the bright of explanation
True property and facility, the size of thickness or inscape for line illustrated in accompanying drawing etc., the display that can be exaggerated.
Also, the term being hereinafter previously mentioned is the term for considering function of the invention and being defined, may be because using
The intention or convention of person or reference person and produce difference.Therefore, such term should enter by foundation of the content in the whole text of this specification
Row definition.
Moreover, the following examples are not intended to limit the interest field of the present invention, only will to the right of the present invention
The example item for asking the inscape in scope to be carried out, the technological thought being contained in the specification in the whole text of the present invention, also,
With the embodiment that equipollent can be used as to enter line replacement to the inscape of right, right of the invention is belonged to
Claimed range.
The present invention is created as both ends support arm structure, and supplies to make up the planer-type superelevation of defect possessed by single support arm form
Speed repeats detection means.
Below, the present invention will be described referring to the drawings.
For figure one to show the stereogram of the detection means of existing single support arm structure, figure two is display both ends branch of the invention
The ultrahigh speed of arm configuration repeats the stereogram of detection means, and figure three is the display present invention for small bar of the support with measuring probe
Support frame stereogram, the sectional view of mobile drive division that figure four is integrated for is formationed of the display present invention, figure five is shows
The stereogram of the detection means for being provided with multiple small bars with measuring probe of the present invention.
Figure one is shows the stereogram of the detection means of existing single support arm structure, for more clearly illustrating and the present invention
Both ends support arm structure repetition detection means difference.
As shown in figure, the detection means of single support arm structure by single support arm form linear gantry module (Linear
Grantry System) form and drive, exist because optical system it is sagging caused by jitter problem, and vibration it is adjoint
The problem of, therefore, limitation on measurement range is expanded be present, also, also exist and improve system because increasing the capacity of linear electric machine
Make expense, the problem of extending time of measuring.
On the contrary, to solve the problems, such as both ends support arm structure of the invention that the detection means of existing single support arm structure is formed
Ultrahigh speed repeat detection means, as explained below.
Reference picture two, the detection means 100, including：X-axis linear stage (X), is moved according to X-direction；Y-axis is linear
Platform (Y), is moved according to Y direction；And small X-axis linear stage (SX), according to less than X-axis linear stage (X) turnover zone
Between section movement.
Now, the X-axis linear stage (X), including：X-axis frame 110, is abreast configured in a manner of mutually separating；And X
Axle linear guides, it is configured above the X-axis support, also, the Y-axis linear stage, including：Y-axis mobile jib 120；And Y-axis
Drive division 121, it is configured at the side of the mobile jib 120.
In addition, the Y-axis mobile jib 120 is moved by the X-axis linear guides according to X-direction, also, the small X
Axle linear stage (SX), including：Small bar 130；And small X-axis drive division, the side of the small bar 130 is configured at, wherein, it is described small
The side of bar 130 is installed on the Y-axis drive division 121, and thus, the small bar 130 is by Y-axis drive division and according to Y direction
(Y) it is mobile.
Also, measuring probe P is installed on the small X-axis drive division and realizes driving, thus, by the measuring probe P's
Movement according to X-axis is decomposed into the movement in the X-axis linear stage X and the movement in the small X-axis linear stage (SX).
Moreover, also including support frame 140, abreast configured with the Y-axis mobile jib 120, so as to support the small bar 130
Opposite side, also, the Y-axis drive division for being configured at the side of the small bar 130 includes linear guides and linear electric machine, the branch
The linear guides of the opposite side for supporting the small bar are provided with support 140, thus, pass through the line of the Y-axis drive division 121
Property guide rail and support frame as described above 140 linear guides guiding, and the small bar 130 is transferred.
" X " shown in upper figure refers to the Y-axis mobile jib with support frame as described above according to the arrow side together shown in accompanying drawing
Mobile to (X-axis), " Y " refers to drive division 121 of the small bar 130 along the side for being formed at the Y-axis mobile jib 120 according in figure one
The direction of arrow (Y-axis) with display is mobile.
Also, " SX (small X-axis, Small X-Axis) " illustrated in above-mentioned accompanying drawing refers to according to together being shown in accompanying drawing
The direction of arrow (SX) is mobile, but moving section is less than the moving section of " X ", also, also refers to by being installed on the small bar
130 small X-axis drive division and the movement of the measuring probe of realizing driving.
Thus, described " X " refers to the moving direction of X-axis linear stage, and " Y " refers to the mobile side of Y-axis linear stage
To " SX (small X-axis, the Small X-Axis) " refers to small X-axis linear stage.
Also, the measuring probe P is the equipment for referring to carry out a variety of measurements according to determinand, in the inspection of the present invention
It can be the devices such as video camera to survey in device.
Reference picture three, the accompanying drawing is shown abreast to be configured with the Y-axis mobile jib, and for supporting the another of the small bar
The support frame of side, by setting linear guides in the side of support frame as described above 140, and the opposite side of the small bar 130 is entered
Row support.
Also, at the both ends of support frame as described above formed with the support trestle 212 being supported to support frame 140.
Reference picture four, the accompanying drawing are simultaneously linear according to X-axis with support frame as described above 140 for the Y-axis mobile jib 120 for display
The side view for the transfer drive division 200 that the moving direction of platform moves.
The transfer drive division 200, including：Main stem 211, it is configured at the both side ends of the Y-axis mobile jib 120；Support
Trestle 212, it is configured at the both side ends of support frame as described above 140；And a bottom plate 210, it is equipped with the main stem 211 and described
Support trestle 212.
Also, the main stem 211 being configured above the bottom plate 210 and support frame as described above of the transfer drive division 200
Post 212 is parallel to each other, and the Y-axis mobile jib 120 is parallel to each other with support frame as described above 140, passes through the linear guides of the Y-axis mobile jib
Guiding with the linear guides of support frame as described above 140 and realize the small bar 130 of transfer and the bottom plate 210 and be parallel to each other.
Moreover, the main stem 211 and support frame as described above post 212 be while being parallel to each other, with the small bar 130 and institute
State bottom plate 210 and form right angle, thus, the main stem 211, support frame as described above post 212, the small bar 130, and the bottom plate
210 are configured to quadrangle.
Now, below the bottom plate 210 of the transfer drive division, the linear guides for being transferred are again provided with.
The linear guides being formed at below the bottom plate 210, be configured at the X-axis linear stage mutual separation and
X-axis linear guides above the parallel X-axis linear strands 110 are in contact, so as to realize the bottom plate 210 according to X-axis side
To movement.
In addition, the width of the bottom plate 210, can be wider than the width of the X-axis linear stage X, also can be with the X-axis
Linear stage X width is identical.
Reference picture five, the figure five are the solids for showing the detection means for being provided with multiple small bars with measuring probe
Figure, on the Y-axis drive division 121 of the side of Y-axis mobile jib 120 is configured at, a small bar 130 is configured in addition, thus, peace
Loaded on the Y-axis drive division 121.
The side for the small bar 130 for being additionally mounted at the Y-axis drive division 121 is provided with small X-axis drive division, and
And measuring probe is installed on the small X-axis drive division and realizes driving, thus, the measuring probe P can be according to small X-axis line
The direction movement of mild-natured (SX).
Also, it is also formed with the support frame 140 of the opposite side for supporting described two small bars 130.
Fig. 6 is the vertical of the detection means for being provided with multiple Y-axis mobile jibs 120 with multiple small bars 130 of the display present invention
Body figure.
Now, also can be on the X-axis frame 110 even not possessing the Y-axis mobile jib 120 of the multiple small bar 130
Formed multiple.
To sum up, the present invention is described in detail with reference to specific embodiment, but, above-described embodiment is used for the present invention
It is described in detail, is not intended to limit the present invention, in the technological thought of the present invention, one of ordinary skill in the field can
It is deformed or improved.
Simple deformation and change to the present invention belong to the scope of the present invention, and specific protection domain of the invention will be
Obtained in right clearly.
Claims (5)
1. a kind of planer-type ultrahigh speed repeats detection means, it is characterised in that
The detection means,
Including：
X-axis linear stage, is moved according to X-direction；
Y-axis linear stage, is moved according to Y direction；And
Small X-axis linear stage, moved according to the section of the moving section less than X-axis linear stage,
Wherein,
The X-axis linear stage, including：
X-axis frame, is abreast configured in a manner of mutually separating；And
X-axis linear guides, it is configured above the X-axis frame,
The Y-axis linear stage, including：
Y-axis mobile jib；And
Y-axis drive division, the side of the mobile jib is configured at,
Also, the Y-axis mobile jib is moved by the X-axis linear guides according to X-direction,
The small X-axis linear stage, including：
Small bar；And
Small X-axis drive division, the side of the small bar is configured at,
Also, the side of the small bar is installed on the Y-axis drive division, thus, the small bar is pressed by the Y-axis drive division
Moved according to Y direction,
Moreover, measuring probe is installed on the small X-axis drive division and realizes driving, thus, by the measuring probe along X
The movement of axle, it is decomposed into the movement in the X-axis linear stage and the movement in the small X-axis linear stage.
2. detection means according to claim 1, it is characterised in that
Also include：
Support frame, the mode parallel with the Y-axis mobile jib configure, the opposite side for supporting the small bar,
Thus, the small bar is supported from both sides.
3. detection means according to claim 2, it is characterised in that
The Y-axis drive division for being configured at the side of the small bar has linear guides and linear electric machine,
Support frame as described above is provided with the linear guides of the opposite side for supporting the small bar,
Thus, by the guiding of the linear guides of the Y-axis drive division and the linear guides of support frame as described above, and to the small bar
Transferred.
4. detection means according to claim 3, it is characterised in that
Also include：
Drive division is transferred, for being transferred to the Y-axis mobile jib with support frame as described above simultaneously.
5. detection means according to claim 4, it is characterised in that
The transfer drive division, including：
Main stem, it is configured at the both ends of the Y-axis mobile jib；
Trestle is supported, is configured at the both ends of support frame as described above；And
One bottom plate, it is equipped with the main stem and support frame as described above post.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160088106A KR101846385B1 (en) | 2016-07-12 | 2016-07-12 | Review measurement device that has both ends suporting structure |
| KR10-2016-0088106 | 2016-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107607138A true CN107607138A (en) | 2018-01-19 |
| CN107607138B CN107607138B (en) | 2020-07-10 |
Family
ID=61059699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710271835.4A Active CN107607138B (en) | 2016-07-12 | 2017-04-24 | Superspeed repeated detection device with two-end support arm structure |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101846385B1 (en) |
| CN (1) | CN107607138B (en) |
| TW (1) | TWI642066B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116609336A (en) * | 2023-04-26 | 2023-08-18 | 晶诺微(上海)科技有限公司 | Defect detection apparatus |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102308226B1 (en) * | 2020-11-24 | 2021-11-04 | 디아이티 주식회사 | Substrate surface defect review apparatus |
| KR102631655B1 (en) * | 2020-12-17 | 2024-02-01 | (주)메티스 | Vision inspection apparatus for enhancing operation efficiency |
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| JPH0712512A (en) * | 1993-06-25 | 1995-01-17 | Sokkia Co Ltd | Two-dimensional coordinate measuring machine |
| US20040090126A1 (en) * | 2002-11-07 | 2004-05-13 | Chin-Mou Hsu | Structure for symmetrically disposed linear motor operated tool machine |
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| CN116609336A (en) * | 2023-04-26 | 2023-08-18 | 晶诺微(上海)科技有限公司 | Defect detection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI642066B (en) | 2018-11-21 |
| CN107607138B (en) | 2020-07-10 |
| KR20180007194A (en) | 2018-01-22 |
| KR101846385B1 (en) | 2018-04-06 |
| TW201802824A (en) | 2018-01-16 |
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