CN106610302B - A kind of absolute type measuring device - Google Patents
A kind of absolute type measuring device Download PDFInfo
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- CN106610302B CN106610302B CN201510680396.3A CN201510680396A CN106610302B CN 106610302 B CN106610302 B CN 106610302B CN 201510680396 A CN201510680396 A CN 201510680396A CN 106610302 B CN106610302 B CN 106610302B
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Abstract
The present invention discloses a kind of absolute type measuring device, comprising: one first measuring rod, first measuring rod include a horizontal plane and one first measuring surface, and first measuring surface is horizontal by an angleθ, the horizontal plane is longL 0 ；One first probe, first probe move along a straight line along the horizontal plane, and first probe is for detecting the distance between the measuring surface and first probe d；And the absolute position of first probe, using the horizontal plane and measuring surface intersection as zero-bit, calculation formula are calculated according to d are as follows:L=(D‑d) / tanθ,Wherein,LIt pops one's head in for described first in the absolute position of X-axis,DFor first probe measurement face to the distance of the horizontal plane.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field more particularly to a kind of absolute type measuring devices.
Background technique
Encoder has been widely applied in sports platform as main measuring tool, but encoder majority is increment
Formula brings certain complexity to measurement and structure so needing to look for null positions in measurement.And raster pattern or electricity
Requirement of the encoder of appearance formula for measurement gap and installation accuracy is all very high, so, certain difficulty is brought to using.
Absolute type encoder is also gradually being applied in sports platform at present, and absolute type encoder can provide for sports platform
The data of absolute position on single shaft can keep structure also relatively easy without the work of searching zero-bit in use.But
It is that absolute type encoder similarly exists for measurement gap, installation accuracy and the high request for rotating angle, so for machinery
Structure it is more demanding.
Summary of the invention
In order to overcome defect existing in the prior art, the present invention provides a kind of absolute type that measurement accuracy simple for structure is high
Measuring device.
In order to achieve the above-mentioned object of the invention, the present invention discloses a kind of absolute type measuring device, comprising: one first measuring rod,
First measuring rod includes a horizontal plane and one first measuring surface, and first measuring surface is horizontal by an angleθ, the level
Face is longL 0 ；One first probe, first probe move along a straight line along the horizontal plane, first probe for detect the measuring surface and this
The distance between one probe d；And the absolute position of first probe is calculated according to d, with the horizontal plane and measuring surface intersection
For zero-bit, calculation formula are as follows:L=(D-d) / tanθ,Wherein,LIt pops one's head in for described first in the absolute position of X-axis,DIt is described
Distance of the first probe measurement face to the horizontal plane.
Further, which realizes linear motion, X-axis linear motion by an X-axis straight-line motion mechanism
Mechanism includes a sliding block and the guide rail below the sliding block.
Further, which further includes one second probe and third probe, second probe and the
Three probe measuring surface it is contour, for measure it is described first probe X, Y-direction displacement and Rz to rotation angleΔθ；The measurement
Device further includes one second measuring rod, which is located at the lower section of first measuring rod, which includes one
Horizontal plane and one second measuring surface, second measuring surface are overlapped with first measuring surface；Second probe for detect with this
The distance d1 of the horizontal plane of two measuring rods；Third probe is for detecting the horizontal plane distance d2 with second measuring rod.
Further, which is installed on a structural member, and the structural member is for realizing level
It X, the linear motion of Y-direction and is moved along the direction Rz three degree of freedom on face.
Further, the level height of first, second, third probe is consistent.
Further, which is photoelectric sensor or capacitance sensor or current vortex sensor.
Further, the one the second probes are photoelectric sensor or capacitance sensor or current vortex sensor.
Compared with prior art, the present invention realizes one-dimensional absolute measurement using mechanical structure, according to different operating environment
Different sensors are selected, can not be restricted by factors such as environment, materials.
On the basis of realizing one-dimensional absolute measurement, addition aiding sensors can realize two-dimensional measurement in plane, solve because
Measuring system itself rotate brought by measurement error, and rotate angle and can be fed back by aiding sensors, make to measure
System is not limited by corner.
Simple in measurement system structure, for measuring system rotation center position without firm constraints, and installation accuracy requirement
Depending on being needed according to actual use and control.
Detailed description of the invention
It can be obtained further by detailed description of the invention below and institute's accompanying drawings about the advantages and spirit of the present invention
Solution.
Fig. 1 be the present invention under the conditions of motion in one dimension in the Absolute position measurement schematic diagram of X-axis；
Fig. 2 is instrumentation plan one of of present invention under the conditions of two dimensional motion Three Degree Of Freedom；
Fig. 3 is the two of instrumentation plan of present invention under the conditions of two dimensional motion Three Degree Of Freedom；
Fig. 4 is the three of instrumentation plan of present invention under the conditions of two dimensional motion Three Degree Of Freedom；
Fig. 5 is the four of instrumentation plan of present invention under the conditions of two dimensional motion Three Degree Of Freedom；
Fig. 6 is the five of instrumentation plan of present invention under the conditions of two dimensional motion Three Degree Of Freedom；
Fig. 7 is the six of instrumentation plan of present invention under the conditions of two dimensional motion Three Degree Of Freedom；
Fig. 8 is the schematic diagram of the invention applied in the sports platform of GANTRY structure；
Fig. 9 is that of the invention apply floats the schematic diagram of the sports platform of structure in magnetic.
Mainly illustrate.
101,201,301, the main measuring rod 102 of 401-, 202,302, the main probe of 402-
103,203,303,403- measurement bracket 104,204,304,404- structural member
105,205,305,405- aid measuring pole 106,206,306,406- auxiliary probe
107,207,307,407- rotation centerθMain measuring rod bevel angle
ΔθRotate angle 501- sports platform
502-X is to motion guide rail 503-Y to motion guide rail
504-X is to measuring device 505-Y to measuring device
506- moves sewing platform base 601- magnetic and floats platform mover
602- magnetic floats platform base 603- X to measuring device
604-Y is to measuring device.
Specific embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
Absolute type measuring system main body is using a measuring rod and probe composition with certain angle.Pass through probe measurement
At a distance between measuring rod inclined-plane, probe is extrapolated in horizontally absolute position.
As shown in Figure 1,101 be measuring rod, wherein tested surface and X-axis angle areθ, lengthL 0 , widthA；102 be probe,
Any time, to the measurement distance between measuring rod tested surface, that is, the measurement distance popped one's head in is in probe measurement faced, probe measurement face
Distance to the measuring rod back side isD；In the case where single-degree-of-freedom linear motion, probe is mounted on sliding block 103, passes through ball
105 can move in a straight line on guide rail 104.At this point, probe can be extrapolated by the measured value d of probe in the absolute position of X-axis.
It is assumed that view left end face is zero-bit, then any time, pop one's head in the absolute position of X-axisL=(D-d) / tanθ。
The measuring system is extendable to realize Absolute position measurement in system with 3 degrees of freedom.Add in original measuring system
Add the measuring rod of a measuring surface and X-axis level for measuring another freedom degree；And two auxiliary are added at both ends of popping one's head in respectively
Probe, for measuring the rotation angle of another freedom degree and probe.
As shown in Fig. 2, adding an aid measuring pole 205, measurement in main 201 downside (view is top view) of measuring rod
Face is parallel with X-axis, and the measuring surface of main measuring rod and the angle times of X-axis areθ, the length and width of aid measuring pole is respectivelyL 0 WithA；It is main
Popping one's head in, there are two auxiliary probes 206 for 202 two sides dress, and two auxiliary probe measuring surface are contour, and auxiliary probe centre distance isl, auxiliary
Probe measurement face is respectively to aid measuring pole tested surface distanced 1 、d 2 , there is no rotation,d 1 =d 2 ；Main spy
Head is in the absolute position of X-axisL=(D-d) / tanθ。
Main probe and auxiliary probe are installed on measurement bracket 203, and measurement bracket is mounted on structural member 204, due to
Structural member is not constrained in horizontal plane X, Y-direction, so X, Y and Rz three degree of freedom can be achieved in structural member in XY horizontal plane
Movement.
As shown in Figure 3, it is assumed that the rotation center 207 of probe segment (including structural member and measurement bracket) is in main center probe
Line and close test surface.Then any time system rotates and in the case where Y-direction has movement, the reality of two auxiliary probes 206
Ranging from ford 1 ’Withd 2 ’, auxiliary probe center line distancel, then angle is rotatedΔθ=arctan (d 2 ’- d 1 ’) / l.Due to
Rotation center is close to 202 measuring surface of main probe, it will be assumed that rotation center just in main probe measurement face central point, so, work as spy
When head rotates, main probe, which only encloses, to be rotated about the center of rotation, and the movement of X, Y-direction do not occur, so not considering probe in Y-direction
The case where generating displacement, the measured distance of main probe is at this timed’, then main probe be to the vertical distance of main measuring rodd=d’cos Δθ+d’sinΔθ·tanθ.Assuming that view left side is zero-bit, then at this point, main probe is in the absolute position of X-axisL=(D-d)/ tanθ。
It can be moved along Y-axis under the drive of structural member due to popping one's head in, so, in the case where considering Y-direction displacement, main spy
Head X to absolute position calculate when, it is necessary to remove the moving distance of Y-direction.It pops one's head in and is in the moving distance of Y-directionΔd=(d 1 cos Δθ+ d 2 cosΔθ)/2-(d 1 + d 2 )/2, and the vertical distance of main probe to main measuring rod is at this timed=d’cosΔθ+d’ sinΔθ·tanθ, then at this point, main probe is in the absolute position of X-axisL=[D-(d-Δd)] / tanθ。
When rotation center is still on main center probe line but far from test surface, after measuring system rotates, need to consider
The displacement that probe is generated in X and Y-direction by rotation.
As shown in figure 4,301 being wherein main measuring rod, aid measuring pole 305 is mounted on main measuring rod in the following, visiting based on 302
Head, two auxiliary probes 306 are mounted on main probe two sides, and center spacing isl, and two detection two sides are contour, all probes are pacified
On measurement bracket 303,304 be structural member to support measurement bracket；Rotation center 307 at this time is apart from main probe measurement
The distance at face center isr.When measuring system is only moved in X-axis, without rotating the case where moving with Y-direction, main probe is in X-axis
Absolute position and it is preceding two it is identical；It is assumed that only rotating, then rotating angle as shown in figure 5, measuring system is not moved in Y-axis
It can be calculated by the measured distance of two auxiliary probes,Δθ=arctan (d 2 ’- d 1 ’) / l；Since rotation center is separate
Main probe detection face center, so displacement can be generated in the x direction and the y direction by turning probe when measuring system rotation, at this point,
The measured value of main probe must be corrected at the absolute position of X-axis by calculating measuring system, that is, subtract the shift value generated by rotation.
As shown in fig. 6, the measured distance of main probe isd’, the distance at rotation center to main probe measurement face center isr, rotating angle isΔθ, thena=(d’+r)·cosΔθ-r, d=(a+r) ·sinΔθ·tanθ+a, then at this time measuring system in the absolute of X-axis
Position is (assuming that view left side is zero-bit.) are as follows:L=(D-d) / tanθ。
In the case where considering Y-direction displacement, main probe X to absolute position calculate when, it is necessary to remove again the movement of Y-direction away from
From.It pops one's head in and is in the moving distance of Y-directionΔd=(d 1 cosΔθ+ d 2 cosΔθ)/2-(d 1 + d 2 )/2, and main probe arrives at this time
The vertical distance of main measuring rod isd=(a+r) ·sinΔθ·tanθ+a, then at this point, main probe is in the absolute position of X-axisL= [D-(d-Δd)] / tanθ。
As shown in fig. 7, measuring system is in X-axis when the rotation center 407 of measuring system is any point on structural member
Absolute position calculation method is identical as calculation method of the rotation center on main center probe line.
Photoelectric sensor, capacitance sensor, current vortex sensor etc. can be used in main probe and auxiliary probe, can apparent motion row
Cheng Erding；Measuring rod tested surface angle precision and surface precision then can be depending on measuring the required accuracy.
Fig. 8 be gantry structure sports platform on the application scenarios of such measuring device are installed, it can be achieved that X, Y and Rz in plane
The measurement of three degree of freedom.Wherein 501 be sports platform mover, and 502 be X to motion guide rail, and 503 be Y-direction motion guide rail, and 504 be X
To measuring device, the freedom of motion of 501 sports platform movers is regarded herein, can be single freedom degree measurement or three freely
Degree measurement, 505 be Y-direction measuring device, and 506 be movement sewing platform base.The GANTRY structure can be air bearing/linear guide guiding,
Linear motor driving structure is also possible to linear guide guiding, rotating electric machine and ball-screw driving structure.In 504 and 505
The measurement range of measuring probe can be replaced with different rangings according to actual needs, when using the probe of long range measurements, this survey
Amount scheme can extend to be used in similar magnetic suspension workpiece table, sees Fig. 9.Wherein, 601 platform mover is floated for magnetic, 602 is floating flat for magnetic
Sewing platform base, 603,604 be X, Y-direction measuring device, and wherein probe segment can be optics long range measurements sensor.
It is preferred embodiment of the invention described in this specification, above embodiments are only to illustrate the present invention
Technical solution rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical solution of experiment, it all should be within the scope of the present invention.
Claims (6)
1. a kind of absolute type measuring device characterized by comprising
One first measuring rod, first measuring rod include a horizontal plane and one first measuring surface, first measuring surface and water
Plane θ at an angle, the long L of horizontal plane0；
One first probe, first probe move along a straight line along the horizontal plane, and first probe is for detecting first measurement
The distance between face and first probe d；And the absolute position of first probe is calculated according to d；
The measuring surface of one second probe and third probe, second probe and third probe is contour, described for measuring
First probe X, Y-direction displacement and Rz to rotation angle delta θ；
One second measuring rod, second measuring rod are located at the lower section of first measuring rod, and second measuring rod includes one
Horizontal plane and one second measuring surface, second measuring surface are overlapped with first measuring surface；Second probe is for detecting
With the horizontal plane distance d1 of second measuring rod；The third probe is for detecting and the horizontal plane of second measuring rod
Distance d2；
When the first probe Y to generation it is mobile when, Y to moving distance be Δ d,
Δ d=(d1cos Δ θ+d2cos Δ θ)/2- (d1+d2)/2 is with the first level face and the first measuring surface intersection
Zero-bit, calculation formula of first probe in the absolute position of X-axis are as follows: and L=[D- (d- Δ d)]/tan θ, wherein L is described
For first probe in the absolute position of X-axis, D is distance of first probe measurement face to the horizontal plane；
When first pops one's head in Y-direction when not occurring mobile, described first pops one's head in the calculation formula of the absolute position of X-axis are as follows: L=
(D-d)/tanθ。
2. absolute type measuring device as described in claim 1, which is characterized in that first probe is transported by an X-axis straight line
Motivation structure realizes linear motion, and the X-axis straight-line motion mechanism includes a sliding block and the guide rail below the sliding block.
3. absolute type measuring device as described in claim 1, which is characterized in that first, second, third probe is installed on
On one structural member, the structural member is for realizing X, the linear motion of Y-direction on horizontal plane and along the direction Rz three degree of freedom
Movement.
4. absolute type measuring device as described in claim 1, which is characterized in that the level of first, second, third probe
Height is consistent.
5. absolute type measuring device as described in claim 1, which is characterized in that the first probe is photoelectric sensor or electricity
Hold sensor or current vortex sensor.
6. absolute type measuring device as described in claim 1, which is characterized in that first, second probe is photoelectric sensing
Device or capacitance sensor or current vortex sensor.
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| CN201510680396.3A CN106610302B (en) | 2015-10-21 | 2015-10-21 | A kind of absolute type measuring device |
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| CN106610302B true CN106610302B (en) | 2019-06-25 |
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| EP1855080A3 (en) * | 1999-08-19 | 2009-11-11 | Cameron International Corporation | Method and device for measuring a distance travelled |
| KR100449749B1 (en) * | 2003-02-15 | 2004-09-22 | 삼성전자주식회사 | Calibrating method of paper feeding of inkjet printer |
| CN101067726A (en) * | 2007-06-05 | 2007-11-07 | 上海微电子装备有限公司 | Workpiece platform structure and method for raising repeat accuracy of precision processing equipment |
| CN102401901B (en) * | 2010-09-16 | 2014-09-10 | 原相科技股份有限公司 | Distance measurement system and distance measurement method |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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