TWI641466B - Scribing head and scribing device - Google Patents

Abstract

The present invention provides a scribing head and a scribing device capable of smoothly switching a bracket by a simple structure.

The scribing head 2 of the present invention includes: a wheel frame 228 configured to be able to approach and away from the mother substrate G; a wheel frame 238 configured to be able to approach and be away from the mother substrate G; Rotate; cam follower 221 abuts against cam surface 212a of cylindrical cam 212; and cam follower 231 abuts on cam surface 212b of cylindrical cam 212. When the cylindrical cam 212 rotates clockwise when viewed from the negative side of the Z axis, the cam follower 221 is pushed to the cam surface 212a and the wheel carrier 228 approaches the mother substrate G. When the cylindrical cam 212 rotates counterclockwise when viewed from the negative side of the Z axis, the cam follower 231 is pushed to the cam surface 212b, and the wheel carrier 238 approaches the mother substrate G.

Description

Scribing head and scribing device

The invention relates to a scribing head for forming a scribing line on a substrate and a scribing device having the scribing head.

Previously, the division of a brittle material substrate such as a glass substrate was performed by a scribing step of forming a scribing line on the surface of the substrate and a breaking step of applying a specific force to the surface of the substrate along the formed scribing line. In the scribing step, the blade of the scribing wheel is pressed against the surface of the substrate and moves along a specific line. In the formation of the scribing line, a scribing device having a scribing head is used.

In the above-mentioned scribing step, the cutter head used to form the scribe line is sometimes switched from one cutter head to another. In addition, when the scribe line is formed, a surface on the opposite side to the surface pressed by the cutter head may be pressed by a backup roll. As a configuration for smoothly adapting such a change of a cutter head or an application of a back roller, for example, the configuration disclosed in Patent Document 1 can be used. In this configuration, two holders for holding a cutter head or a back roller are provided on one scribing head so as to be able to move up and down.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2011-194628

In the structure disclosed in the aforementioned Patent Document 1, a switching motor for switching between two brackets is provided separately from a lifting motor for lifting and lowering a bracket on a scribing head. So plan The weight of the thread head is increased, and the mechanism for switching and lifting is complicated. In addition, since the mechanism is complicated in this way, it may cause a problem that the time required for the switching operation of the bracket becomes longer.

In view of the above-mentioned problems, an object of the present invention is to provide a scribing head and a scribing device capable of smoothly switching a stand with a simple structure.

A first aspect of the present invention relates to a scribing head for scribing a substrate. The scribing head of this form includes: a first bracket configured to be able to approach and away from the substrate; a second bracket configured to be able to approach to and away from the substrate; and a motor for enabling the first bracket and the second bracket Lifting; rotating part that is rotated by the motor; and a transmission mechanism that transmits the rotation of the rotating part to the first bracket and the second bracket. The transmission mechanism includes a joint unit that switches the approach and separation of the first bracket and the second bracket from the substrate according to the rotation position of the rotation unit.

According to the scribing head of this aspect, the rotation portion is rotated by the motor, thereby bringing either the first holder or the second holder closer to the substrate. Thereby, the bracket for the scribing operation can be smoothly switched with a simple structure.

In the scribing head of the first aspect, the transmission mechanism may be configured to make the first bracket approach the substrate when the rotation portion rotates from the neutral position toward the first direction, and when the rotation portion faces the substrate from the neutral position, When rotating in a second direction opposite to the first direction, the second holder is brought close to the substrate. In this way, the stand for scribing can be switched by switching the rotation direction of the rotating body.

In the scribing head of the first aspect, the joint portion may be configured to include a cam surface provided on the rotation portion, and a first cam follower provided on the first bracket and abutting the cam surface; 2 cam followers provided on the second bracket and abutting the cam surface; and elastic members for energizing the first cam follower and the second cam follower in a direction approaching the cam surface . So by using the cam and cam follower to switch the bracket The structure can simplify the transmission mechanism, and can well perform the lifting control of the bracket.

In this case, it is preferable that when the first bracket is located near the operating position of the substrate, the second cam follower is in non-contact with the cam surface, and when the second bracket is located near the operating position of the substrate At this time, the first cam follower is not in contact with the cam surface. In this way, when one bracket is used for the scribing action, the cam follower of the other bracket will not become a load when the cam rotates, so that the lifting control of one bracket can be better performed.

In this case, the scribing head may be configured to include a stopper for maintaining the first bracket and the second bracket in the non-contact state, respectively. In this way, the cam follower of a bracket that is not used for the scribing operation can be more reliably maintained in a non-contact state with the cam surface by a simple structure.

A second aspect of the present invention relates to a scribing device. A scribing device according to a second aspect includes: the scribing head according to the first aspect; a support unit that supports a substrate to be cut; and a moving mechanism that moves the scribing head relative to the substrate supported by the support unit. .

According to the scribing device of this aspect, the same function and effect as those of the scribing head of the first aspect can be achieved.

In the scribing device of this form, for example, a first cutter head for forming a scribe is held on the first bracket, and a second cutter head for forming a scribe is held on the second bracket, for example. Or a roller for pressing the substrate. When the second cutter head is held on the second bracket, the cutter head can be switched between the first cutter head and the second cutter head by rotating the rotating part. When the roller is held on the second holder, the object used for the scribing operation can be switched between the first cutter head and the roller by rotating the rotating portion.

As described above, according to the present invention, it is possible to provide a scribing head and a scribing device capable of smoothly switching a stand with a simple configuration.

The effect or significance of the present invention can be further explained by the description of the embodiment shown below. clear. However, the embodiment shown below is at most an example for implementing the present invention, and the present invention is not limited in any way by the content described in the following embodiment.

1‧‧‧ scribing device

2‧‧‧ crossed head

3‧‧‧Control Department

4‧‧‧ mobile agency

11‧‧‧ Conveyor

12a‧‧‧ Pillar

12b‧‧‧ Pillar

13a‧‧‧movable guide

13b‧‧‧movable guide

14a‧‧‧movable guide

14b‧‧‧movable guide

15‧‧‧ sliding unit

16‧‧‧ sliding unit

21‧‧‧Driver

22‧‧‧ Lifting Department

23‧‧‧ Lifting Department

24‧‧‧ seat plate

24a‧‧‧stage

25‧‧‧Top plate

25a‧‧‧stage

25b‧‧‧Gas supply connector

26‧‧‧ floor

26a‧‧‧stage

26b‧‧‧ opening

26c‧‧‧ opening

27‧‧‧sealing member

27a ~ 27e‧‧‧Rubber frame

28‧‧‧Shield

28a‧‧‧Left shroud

28b‧‧‧Right shield section

28c‧‧‧Left face

28d‧‧‧Bend

28e‧‧‧Right face

28f‧‧‧ front surface

28g‧‧‧tier

28h‧‧‧ Sponge

211‧‧‧Servo motor

212‧‧‧ cylindrical cam

212a, 212b ‧‧‧ cam surface

221, 231‧‧‧ cam followers

222, 232‧‧‧Connection Department

222b‧‧‧Fixed section

223a, 223b, 233a, 233b

224, 234‧‧‧

224a‧‧‧ support

224b‧‧‧Column

225a, 235a‧‧‧ linear guide

225b, 235b‧‧‧ Elastic member

226, 236‧‧‧‧Guide guide

226a‧‧‧Bobe

226b‧‧‧Column

227, 237‧‧‧ stent holder

228, 238‧‧‧ round frame

229‧‧‧knife wheel

234b‧‧‧Column

236b‧‧‧Column

239‧‧‧Back Roller

51‧‧‧Driver

511‧‧‧Gear

52‧‧‧ Lifting Department

521‧‧‧ Rack and pinion

522‧‧‧tool shank

523‧‧‧Tools

53‧‧‧ Lifting Department

531‧‧‧ rack and pinion

532‧‧‧tool shank

533‧‧‧tool

G‧‧‧Motherboard

S11 ~ S17‧‧‧step

1 (a) and 1 (b) are schematic diagrams showing the configuration of a scribing device according to an embodiment.

Fig. 2 is a partially exploded perspective view showing the structure of a scribing head according to the embodiment.

Fig. 3 is a front view showing the structure of a scribing head according to the embodiment.

4 (a) and 4 (b) are side views showing the structure of the scribing head of the embodiment.

Fig. 5 is a perspective view showing the structure of a scribing head according to the embodiment.

Fig. 6 is a front view showing the structure of a scribing head when the cutter wheel of the embodiment is lowered.

7 (a) and 7 (b) are side views showing the structure of the scribing head when the cutter wheel of the embodiment is lowered.

Fig. 8 is a front view showing the configuration of a scribing head when the back roller is lowered according to the embodiment;

9 (a) and 9 (b) are side views showing the configuration of a scribing head when the back roller of the embodiment is lowered.

10 (a) and 10 (b) are block diagrams showing the configuration of the main part of the scribing device according to the embodiment, and a flow chart showing the operation flow of the scribing device.

FIG. 11 is a schematic diagram showing a driving unit and a lifting unit of a scribing head according to a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each figure, for convenience, X-axis, Y-axis, and Z-axis that are orthogonal to each other are added. The X-Y plane is parallel to the horizontal plane, and the Z-axis direction is vertical.

In the present embodiment, the conveyor belt 11 corresponds to the “support unit” described in the patent application scope, and the servo motor 211 corresponds to the “motor” described in the patent application scope. The cylindrical cam 212 corresponds to the “rotating portion” described in the scope of the patent application. The cam surfaces 212a and 212b, the cam followers 221 and 231, and the elastic members 225b and 235b correspond to the "combination unit" described in the scope of the patent application. Further, the connecting portions 222 and 232, the pressing portion 224, 234, the linear guides 225a and 235a, the bracket guides 226 and 236, and the bracket holders 227 and 237 correspond to the "transmission mechanism" described in the scope of the patent application. The wheel frame 228 corresponds to the "first bracket" described in the patent application scope. The wheel carrier 238 corresponds to the "second bracket" described in the patent application scope. The cutter wheel 229 corresponds to the "first cutter head" or the "second cutter head" described in the patent application scope. The back roller 239 corresponds to the "roller" described in the scope of the patent application. However, it is not possible to limit the scope of the patent application to the present embodiment by associating the patent application scope with the present embodiment.

1 (a) and 1 (b) are schematic diagrams showing the configuration of the scribing device 1. As shown in FIG. FIG. 1 (a) is a schematic diagram of the scribing device 1 viewed from the positive side of the Y axis, and FIG. 1 (b) is a schematic diagram of the scribing device 1 viewed from the negative side of the X axis.

Referring to FIG. 1 (a), the scribing device 1 includes a conveyor belt 11, pillars 12 a and 12 b, movable guides 13 a and 13 b, movable guides 14 a and 14 b, sliding units 15 and 16, and two scribing heads 2.

As shown in FIG. 1 (b), the conveyor belt 11 is provided so as to extend in the Y-axis direction except for the portion where the scribing head 2 is provided. A mother substrate G is placed on the conveyor belt 11. The mother substrate G has a substrate structure in which a pair of glass substrates are bonded to each other. The mother substrate G is conveyed in the Y-axis direction by a conveyor belt 11.

The pillars 12 a and 12 b are vertically arranged on the base of the scribing device 1 with the conveyor belt 11 interposed therebetween. The movable guides 13a and 13b and the movable guides 14a and 14b are respectively mounted between the pillars 12a and 12b so as to be parallel to the X-axis direction. The sliding units 15 and 16 are slidably provided on the movable guides 13a and 13b and the movable guides 14a and 14b, respectively. The movable guides 13a and 13b and the movable guides 14a and 14b are respectively provided with specific driving mechanisms, and the sliding units 15 and 16 slide along the X-axis direction by the driving mechanisms.

The scribe head 2 on the negative side of the Z-axis includes a driving section 21 and lifting sections 22 and 23. A cutter wheel 229 (see FIG. 3) is mounted on the lifting portion 22, and a back roller 239 (see FIG. 3) is mounted on the lifting portion 23. The driving section 21 raises either one of the elevation section 22 and the elevation section 23 and lowers the other. The scribing head 2 on the positive side of the Z axis also has the same configuration as the scribing head on the negative side of the Z axis. Two The scribing head 2 is arranged so that the cutter wheel 229 of one scribing head 2 and the back roller 239 of the other scribing head 2 face each other.

The lifting portion 22 of the scribing head 2 on the negative side of the Z axis and the lifting portion 23 of the scribing head 2 on the positive side of the Z axis are brought closer to the mother substrate G, respectively, thereby bringing the cutter wheel 229 on the negative side of the Z axis (see FIG. 3). The upper surface of the mother substrate G is crimped. At this time, the lower surface of the mother substrate G is abutted by a back roller 239 (see FIG. 3) having a flat peripheral surface. Then, the sliding units 15 and 16 are transmitted in the X-axis direction by a specific driving mechanism (not shown). Thereby, the cutter wheel 229 (refer to FIG. 3) on the negative side of the Z axis moves in a state of being pressed against the upper surface of the mother substrate G, thereby forming a scribe line on the upper surface of the mother substrate G. When a scribe line is formed on the lower surface of the mother substrate G, the cutter wheel 229 (see FIG. 3) on the positive side of the Z axis and the back roller 239 (see FIG. 3) on the negative side of the Z axis are brought close to the mother substrate G.

As described above, when the mother substrate G formed by bonding a pair of glass substrates to each other is scribed, it is necessary to appropriately switch the cutter wheel 229 (see FIG. 3) and the back roller 239 (see FIG. 3). When the resin substrate is cut, a crushing roller is used in order to suppress the resin bulging when the resin substrate is cut. In this way, in the scribing head 2, various tools are used. Therefore, in this embodiment, a configuration is provided in which tools can be easily switched.

FIG. 2 is a partially exploded perspective view showing the structure of the scribing head 2.

The scribing head 2 includes a driving portion 21, lifting portions 22 and 23, a seat plate 24, a top plate 25, a bottom plate 26, a sealing member 27, and a shroud 28.

The seat plate 24 has a substantially rectangular outline when viewed from the positive direction of the X axis. Step portions 24 a are formed on both side surfaces of the seat plate 24. A plurality of screw holes are formed in the seat plate 24.

The top plate 25 has a substantially rectangular outline in plan view. A step portion 25 a is formed on a side surface of the top plate 25. An opening (not shown) is formed in the center of the top plate 25. A plurality of screw holes are formed in the step portion 25 a of the top plate 25. Further, the top plate 25 is provided with a gas supply joint 25b.

The bottom plate 26 has a substantially rectangular outline in plan view. A step portion 26 a is formed on a side surface of the bottom plate 26. Openings 26 b and 26 c are formed in the bottom plate 26. A plurality of screw holes are formed in the step portion 26 a of the bottom plate 26.

In the state of FIG. 2, the top plate 25 and the bottom plate 26 are fixed to the seat plate 24 by screws. In this state, the step portions 24a, 25a, and 26a are continuous. That is, both ends of the stepped portion 25a formed on the top plate 25 are connected to the upper ends of the stepped portion 24a formed on the two side surfaces of the seat plate 24, respectively. Further, both ends of the step portion 26a formed on the bottom plate 26 are respectively connected to lower ends of the step portion 24a of the seat plate 24 formed on both side surfaces.

In the state of FIG. 2, the side surface on the positive side of the X axis and the side surface on the negative side of the X axis of the seat plate 24 are parallel to the Y-Z plane (vertical plane), respectively. The side surface of the positive side of the Z-axis of the top plate 25 and the side surface of the negative side of the Z-axis are parallel to the XY plane (horizontal plane), and the side surface of the positive side of the Z-axis and the side of the negative side of the Z-axis of the bottom plate 26 are XY plane (horizontal plane). parallel. That is, the top plate 25 and the bottom plate 26 are vertically connected to the seat plate 24 and are mounted on the seat plate 24 so as to face each other at a specified interval.

FIG. 3 is a front view showing the configuration of the drive section 21 and the elevation sections 22 and 23 as viewed from the negative side of the X axis. FIG. 4 (a) is a side view showing the configuration of the driving section 21 and the lifting section 22 as viewed from the positive side of the Y-axis. FIG. 4 (b) is a side view showing the configuration of the driving section 21 and the lifting section 23 as viewed from the negative side of the Y-axis. 3 and 4 (a) and 4 (b) show the see-through state of the connecting portion 222. 3 and 4 (a) and (b) show the state when the cylindrical cam 212 is in the neutral position.

3, the driving unit 21 includes a servo motor 211 and a cylindrical cam 212.

The servo motor 211 is arranged such that the axis of the output shaft is parallel to the Z axis. The output shaft of the servo motor 211 is pressed into a hole formed in the upper portion of the cylindrical cam 212. The root portion of the output shaft of the servo motor 211 is a cylindrical portion slightly smaller than the diameter of the opening formed in the top plate 25. The servo motor 211 is provided on the upper surface of the top plate 25 so that the cylindrical portion is inserted into the opening of the top plate 25 with almost no gap.

The cylindrical cam 212 has a shape obtained by cutting a cylinder obliquely from two directions. The output shaft of the servo motor 211 and the cylindrical cam 212 are fixed in pressure contact with each other by screws. Therefore, if the servo motor 211 is driven, the cylindrical cam 212 rotates integrally with the output shaft of the servo motor 211 in a direction parallel to the X-Y plane. As shown in Figure 4 (a), the cam surface of the cylindrical cam 212 212a is inclined at a specific angle with respect to the X-Y plane (horizontal plane). As shown in FIG. 4 (b), the cam surface 212b of the cylindrical cam 212 is inclined at a specific angle with respect to the X-Y plane (horizontal plane). As shown in FIG. 3, when the cylindrical cam 212 is located at the neutral position, the cam surface 212 a and the cam surface 212 b are symmetrical to each other in the left-right direction.

3, the lifting portion 22 includes a cam follower 221, a connecting portion 222, stops 223a, 223b, a pressing portion 224, a linear guide 225a, an elastic member 225b, a bracket guide 226, a bracket holder 227, and a wheel frame. 228, and the cutter wheel 229. Similarly, the lifting portion 23 includes a cam follower 231, a connecting portion 232, stops 233a, 233b, a pressing portion 234, a linear guide 235a, an elastic member 235b, a bracket guide 236, a bracket holder 237, and a wheel frame 238 、 和 背 滚 239。 And back roller 239. The elevating portion 22 and the elevating portion 23 are arranged so as to be plane-symmetric with respect to the X-Z plane.

The cam follower 221 is rotatably supported by the connecting portion 222 via a fixed shaft 222 a parallel to the Y axis. The cam surface 212a (see FIG. 4 (a)) of the cylindrical cam 212 abuts on the outer peripheral surface of the cam follower 221. When the cylindrical cam 212 is rotated by the servo motor 211, the contact position between the cam surface 212a (see FIG. 4 (a)) and the cam follower 221 changes in the Z-axis direction. Thereby, the cam follower 221 moves in the up-down direction (Z-axis direction).

The connecting portion 222 has a substantially rectangular parallelepiped shape with one corner cut. On the upper side (negative side of the Z axis) of the connecting portion 222, the fixed shaft 222a of the shaft support cam follower 221 is fixed, and on the lower side (the positive side of the Z axis) of the connecting portion 222, it is fixed to connect and fix the pressing portion. Two fixed shafts 222b of 224. The connecting portion 222 connects the cam follower 221 and the pressing portion 224 so that the cutout portion 222c is caught on the upper surface of the pressing portion 224 as shown in the figure. Therefore, the driving force transmitted to the cam follower 221 is transmitted to the pressing portion 224 through the connection portion 222.

As shown in FIG. 4 (a), the stopper 223 a is a screw-shaped member and is fixed to the center of the upper surface of the connecting portion 222. The stopper 223b is a screw-shaped member and is fixed to a position of the top plate 25 facing the stopper 223a. The upper surface of the stopper 223a and the lower surface of the stopper 223b are parallel to the X-Y plane. The stopper 223a comes into contact with the stopper 223b to connect the cam connected to the connecting portion 222 from The upward movement of the moving member 221 is limited to a specific range. That is, even if the cylindrical cam 212 is rotated by a certain amount or more, the rise of the connecting portion 222 and the cam follower 221 is inhibited by the abutment of the stopper 223a and the stopper 223b. A gap is created.

The pressing portion 224 is provided with a guide support portion 224a on the rear surface (the surface on the negative side of the X axis). The guide support portion 224a is fixed to the pressing portion 224 by a screw. A cylindrical portion 224b is formed on the lower surface (the surface on the positive side of the Z axis) of the pressing portion 224. The diameter of the outer periphery of the cylindrical portion 224 b is slightly smaller than the diameter of the opening 26 b (see FIG. 2) of the bottom plate 26. The cylindrical portion 224 b is inserted into the opening 26 b of the bottom plate 26. The lower end surface of the cylindrical portion 224b is screwed to the bracket holding body 227 by a screw.

The linear guide 225a is fixed to the seat plate 24 by screws so as to extend in the Z-axis direction. The guide support portion 224a of the pressing portion 224 is engaged with the linear guide 225a. Thereby, the pressing portion 224 is guided in the vertical direction (Z-axis direction) by the linear guide 225a. The upper end of the elastic member 225b is clamped to a hole formed at the front end of a screw fixed to the top plate 25, and the lower end is clamped to a convex portion formed on the back surface of the pressing portion 224. Furthermore, the elastic members 225b are respectively provided near the Y-axis positive side and the center of the seat plate 24 in the Y-axis direction. The pressing portion 224 is energized by the elastic member 225b in the upward direction (negative Z-axis direction). The elastic member 225b includes, for example, a coil spring.

The bracket guide 226 includes a plate portion 226a and a cylindrical portion 226b. The inside of the cylindrical portion 226b is an opening penetrating in the vertical direction (Z-axis direction). The plate portion 226a of the bracket guide 226 is screwed and fixed to the lower surface (positive side of the Z axis) of the bottom plate 26 by screws. The diameter of the inner periphery of the cylindrical portion 226b is slightly larger than the diameter of the outer periphery of the cylindrical portion 224b of the pressing portion 224. When the pressing portion 224 moves in the vertical direction (Z-axis direction), the cylindrical portion 224b of the pressing portion 224 moves along the inner periphery of the cylindrical portion 226b. The stent guide 226 guides a stent holder 227 described below along the outer periphery of the cylindrical portion 226b in the up-down direction (Z-axis direction).

Openings are formed in the holder holder 227 on the positive Z-axis side and the negative Z-axis side, respectively. The diameter of the opening on the negative side of the Z axis is slightly larger than the diameter of the outer periphery of the cylindrical portion 226b of the bracket guide 226. The diameter of the opening on the positive side of the Z axis is smaller than the diameter of the opening on the negative side of the Z axis. Hold the bracket guide The cylindrical portion 226b of 226 is inserted into the opening on the negative side of the Z-axis of the holder holder 227, and the holder holder 227 is screwed and fixed to the cylindrical portion 224b of the pressing portion 224 by screws. Thereby, the bracket holding body 227 is assembled to the pressing portion 224.

The wheel carrier 228 is held on the positive side of the Z-axis by a bracket holding body 227. The wheel frame 228 rotatably supports a roller-shaped cutter wheel 229 through two support axes parallel to the X axis. The front end of the cutter wheel 229 becomes a knife for forming a scribe on the surface of the mother substrate G.

The lifting portion 23 is configured in substantially the same manner as the lifting portion 22 except for the back roller 239. The wheel frame 238 of the elevating portion 23 rotatably supports the back roller 239 by two support shafts parallel to the X axis. The back roll 239 has a flat peripheral surface.

Returning to FIG. 2, the sealing member 27 includes rubber frames 27 a to 27 d and a fixing member 27 e. The rubber frames 27a to 27d are elastic members that are impermeable to air. The rubber frame 27 a has a shape embedded in the step portion 25 a of the top plate 25, and the rubber frame 27 b has a shape embedded in the step portion 26 a of the bottom plate 26. The rubber frames 27 c and 27 d have shapes that are fitted into the step portion 24 a on the negative side of the Y axis of the seat plate 24 and the step portion 24 a on the positive side of the Y axis, respectively. The thickness of the rubber frames 27a to 27d is slightly smaller than the depth of the step portions 24a, 25a, and 26a. The fixing member 27e is slightly larger than the width in the Z-axis direction of the step portion 24a of the seat plate 24.

The shield 28 includes a left shield portion 28 a and a right shield portion 28 b. The left shield portion 28a includes a plate-shaped left side surface portion 28c and a bent portion 28d formed by bending an end portion on the negative side of the X axis of the left surface portion 28c. The right shroud portion 28b includes a plate-shaped right side surface portion 28e and a front surface portion 28f, and an end portion on the positive side of the Y axis of the right surface portion 28e is a step portion 28g that is one step higher on the negative side of the X axis.

In a state where the rubber frame 27a is fitted into the step portion 25a, the rubber frame 27b is fitted into the step portion 26a, and the rubber frames 27c and 27d are fitted into the step portion 24a, the upper and lower ends of the left shield portion 28a are brought into contact with the rubber frame 27a. , 27b, 27d. In addition, the sponge 28h is sandwiched between the bent portion 28d of the left shield portion 28a and the step portion 28g of the right shield portion 28b, and the upper and lower ends of the right shield portion 28b are brought into contact with the rubber frame 27a, 27b, 27c. In this state, the screws are screwed and fixed to the holes through the holes formed at the end edges of the left shroud portion 28a and the right shroud portion 28b. The seat plate 24, the top plate 25, and the bottom plate 26.

Then, the fixing member 27e is mounted on the side of the negative side of the Y-axis of the seat plate 24 so as to cover the rubber frames 27a, 27b, and 27c, and the fixing member 27e is screwed and fixed to the seat plate 24 by screws. Thereby, the left and right end portions 28c are pressed against the rubber frames 27a and 27b, and the left side surface 28c on the X-axis positive side is pressed against the rubber frames 27a, 27b, and 27d. The shield portion 28 a is fixed to the seat plate 24, the top plate 25, and the bottom plate 26. In addition, the upper and lower end portions of the front surface portion 28f and the right side surface portion 28e are pressed against the rubber frames 27a and 27b, and the end portions on the X-axis positive side of the right surface portion 28e are pressed against the rubber frames 27a, 27b, and 27c. Method, the right shroud portion 28b is fixed to the seat plate 24, the top plate 25, and the bottom plate 26. In this way, the scribing head 2 is assembled as shown in FIG. 5.

FIG. 5 is a perspective view showing the structure of the scribing head 2.

As shown in FIG. 5, a space accommodating the driving portion 21 between the seat plate 24 and the top plate 25 and the bottom plate 26 is surrounded by a shield 28. In this way, the driving section 21 is disposed in the closed space formed by the cover 28, the seat plate 24, the top plate 25, and the bottom plate 26, so that broken glass or dust can be prevented from entering the driving section 21 from the side of the scribing head 2 or the like. . In addition, air is supplied from the air supply joint 25b of the top plate 25, and an airflow flowing from the closed space to the outside is generated, thereby further suppressing the intrusion of broken glass or dust into the drive unit 21.

As shown in FIG. 1 (b), when a mother substrate G formed by bonding a pair of glass substrates to each other is scribed, the substrate is sandwiched by arranging a pair of scribe heads 2 up and down. In this case, the back roller 239 faces the cutter wheel 229 of the scribing head 2 disposed on the opposite side, and receives the pressure from the cutter wheel 229 to support the substrate.

The operation of lowering the cutter wheel 229 will be described with reference to FIGS. 6 to 7 (b).

FIG. 6 is a side view showing the configuration of the drive section 21 and the elevation sections 22 and 23 as viewed from the negative side of the X axis. FIG. 7 (a) is a side view showing the configuration of the driving section 21 and the lifting section 22 as viewed from the positive side of the Y-axis. FIG. 7 (b) is a side view showing the configuration of the driving section 21 and the lifting section 23 as viewed from the negative side of the Y-axis. 7 (a) and 7 (b) show the see-through state of the connecting portion 222.

Referring to FIG. 6, if the servo motor 211 is driven, the output shaft of the servo motor 211 rotates clockwise when viewed from the negative side of the Z axis, and the cylindrical cam 212 installed integrally with the output shaft of the servo motor 211 will be viewed from the negative side of the Z axis Rotate clockwise from the neutral position. Thereby, as shown in FIG. 7 (a), the contact position of the cam surface 212 a and the cam follower 221 moves in a direction in which the inclined surface descends, and the pressing portion 224 passes through the connecting portion 222 and moves downward (the positive side of the Z axis). mobile.

At this time, as shown in FIG. 7 (b), the pressing portion 234 is energized in the upward direction (the negative direction of the Z axis) by the elastic member 235b, so the contact position between the cam surface 212b and the cam follower 231 is inclined. Move in the upward direction. The pressing portion 224 is guided by the linear guide 225a to move downward, and the holder holding body 227 fixed on the cylindrical portion 224b of the pressing portion 224 is guided to move downward by the cylindrical portion 226b of the holder guide 226. At the same time, the pressing portion 234 is guided by the linear guide 235a to move upward, and the holder holding body 237 fixed on the cylindrical portion 234b of the pressing portion 234 is guided upward by the cylindrical portion 236b of the holder guide 236. mobile.

In this way, if the lifting portion 23 moves in the upward direction, the stopper 233a will abut the stopper 233b soon. Thereby, the upward movement of the lifting portion 23 can be suppressed, and a gap can be generated between the cam follower 231 and the cam surface 212b of the cylindrical cam 212. Therefore, the cam follower 231 does not become a load when the other lifting portion 22 is moved in the downward direction, and the lifting portion 22 can be smoothly moved in the downward direction.

The operation of lowering the back roller 239 will be described with reference to FIGS. 8 to 9 (b).

FIG. 8 is a side view showing the configuration of the drive section 21 and the elevation sections 22 and 23 as viewed from the negative side of the X axis. FIG. 9 (a) is a side view showing the configuration of the driving section 21 and the lifting section 22 as viewed from the positive side of the Y-axis. FIG. 9 (b) is a side view showing the configuration of the driving section 21 and the lifting section 23 as viewed from the negative side of the Y-axis. 9 (a) and 9 (b) show a state where the connecting portion 222 is seen through.

Referring to FIG. 8, if the servo motor 211 is driven, the output shaft of the servo motor 211 rotates counterclockwise when viewed from the negative side of the Z axis, and the cylindrical cam 212 installed integrally with the output shaft of the servo motor 211 will be viewed from the negative side of the Z axis. Rotate counterclockwise from the neutral position. Thereby, as shown in FIG. 9 (b), the contact position between the cam surface 212b and the cam follower 231 is lowered toward the inclined surface. Moving in the direction, the pressing portion 234 moves in the downward direction (the positive side of the Z axis) through the connecting portion 232.

At this time, as shown in FIG. 9 (a), the pressing portion 224 is energized in the upward direction (the negative direction of the Z axis) by the elastic member 225b, so the contact position between the cam surface 212a and the cam follower 221 is inclined Move in the upward direction. The pressing portion 234 is guided by the linear guide 235a to move downward, and the holder holding body 237 fixed to the cylindrical portion 234b of the pressing portion 234 is guided to move downward by the cylindrical portion 236b of the holder guide 236. At the same time, the pushing portion 224 is guided by the linear guide 225a and moves upward, and the holder holding body 227 fixed on the cylindrical portion 224b of the pushing portion 224 is guided by the cylindrical portion 226b of the bracket guide 226 and faces upward. mobile.

In this way, if the lifting portion 22 moves in the upward direction, the stopper 223a will abut the stopper 223b soon. Accordingly, the upward movement of the lifting portion 22 can be suppressed, and a gap can be generated between the cam follower 221 and the cam surface 212a of the cylindrical cam 212. Therefore, the cam follower 221 does not become a load when the other lifting portion 23 is moved in the downward direction, and the lifting portion 23 can be smoothly moved in the downward direction.

In this way, as shown in FIG. 1 (b), by rotating the cylindrical cam 212 in one direction, the cutter wheel 229 is crimped to the mother substrate G on the negative side of the Z axis, and the back roller 239 is crimped to the positive side of the Z axis. The mother substrate G forms a scribe line on the mother substrate G on the negative side of the Z axis. When a scribe line is formed on the mother substrate G on the positive side of the Z axis, the back roller 239 is pressed against the mother substrate G on the negative side of the Z axis by rotating the cylindrical cam 212 in the other direction, and the knife The wheel 229 is crimped to the mother substrate G on the positive side of the Z axis. Thereby, a scribe line is formed on the mother substrate G on the positive side of the Z axis.

FIG. 10 (a) is a block diagram showing the configuration of the main part of the scribing device 1. As shown in FIG.

The control unit 3 controls each unit based on a control program. The moving mechanism 4 is a mechanism that moves the scribing head 2 relative to the mother substrate G placed on the conveyor 11. The moving mechanism 4 includes pillars 12a, 12b, movable guides 13a, 13b, movable guides 14a, 14b, and sliding units 15, 16 shown in FIG.

FIG. 10 (b) is a flowchart showing the operation flow of the scribing device 1. FIG.

When the mother substrate G is placed on the conveyor 11, the control unit 3 moves the scribing head 2 to the front. Start position of the end line (S11). Next, the control unit 3 controls the moving mechanism 4 and the driving unit 21 so that the wheel carrier 228 or the wheel carrier 238 approaches the mother substrate G (S12). For example, in FIG. 10 (a), the wheel carrier 228 of the upper scribe head 2 is brought closer to the mother substrate G, and the wheel carrier 238 of the lower scribe head 2 is brought closer to the mother substrate G. This control is performed by rotating the cylindrical cam 212 from the neutral position to a specific position in either direction as described above. Thereby, the cutter wheel 229 and the back roller 239 are brought into pressure contact with the mother substrate G.

Then, the control unit 3 controls the moving mechanism 4 and the driving unit 21 to perform a scribing operation on the leading edge of the scribing wheel while the cutter wheel 229 and the back roller 239 are in pressure contact with the mother substrate G (S13). At this time, the control unit 3 maintains the servo motor 211 of the driving unit 21 at a specific torque. Thus, the undulations appearing on the surface of the mother substrate G can be eliminated by the torque of the servo motor 211 and the cam surface of the cylindrical cam 212.

When the scribe line reaches the end position of the scribe line (S14: YES), the control unit 3 causes the moving mechanism 4 and the driving unit 21 to end the scribe operation (S15). Then, the control unit 3 controls the moving mechanism 4 and the driving unit 21 to move the wheel carrier 228 or the wheel carrier 238 away from the mother substrate G (S16). For example, in FIG. 10 (a), the wheel carrier 228 of the upper scribe head 2 is moved away from the mother substrate G, and the wheel carrier 238 of the lower scribe head 2 is moved away from the mother substrate G. By this action, the cylindrical cam 212 is positioned in the neutral position shown in FIG. 3. Therefore, any one of the cutter wheel 229 and the back roller 239 of the upper scribe head 2 and the cutter wheel 229 and the back roller 239 of the lower scribe head 2 are separated from the mother substrate G.

The operations of S11 to S16 are repeatedly performed until the scribe lines of all the scribe lines set on the mother substrate G are completed (S17). When a scribe line is formed on the lower side of the mother substrate G, in FIG. 10 (a), the control unit 3 causes the lower wheel frame 228 to approach the mother substrate G and the upper wheel frame 238 to approach the mother substrate G. And controls the driving unit 21. When all the scribe lines are completed (S17: YES), the control unit 3 ends the scribe operation to the mother substrate G.

<Effects of Implementation Mode>

The operation and effect of this embodiment will be described below.

As shown in FIG. 6, if the output shaft of the servo motor 211 rotates clockwise when viewed from the negative side of the Z axis, the cutter wheel 229 will fall and the back roller 239 will rise. On the other hand, as shown in FIG. 8, if the output shaft of the servo motor 211 rotates counterclockwise when viewed from the negative side of the Z axis, the back roller 239 will fall and the cutter wheel 229 will rise. These lifting operations are performed by a driving unit 21 including a servo motor 211 and a cylindrical cam 212. As described above, in this embodiment, the cutter wheel 229 and the back roller 239 can be switched with a simple configuration.

As shown in FIG. 9 (a), when the back roller 239 is lowered, the stoppers 223a and 223b are in contact with each other, so that the cam follower 221 and the cam surface 212a are in non-contact. Therefore, the cam follower 221 and the cam surface 212a do not become a load when the cylindrical cam 212 rotates. Therefore, the back roller 239 can be controlled smoothly and accurately. As shown in FIG. 7 (b), the cam follower 231 and the cam surface 212b are brought into non-contact by the stoppers 233a and 233b while the cutter wheel 229 is lowered. Therefore, the cam follower 231 and the cam surface 212b do not become a load when the cylindrical cam 212 rotates, so that the control of the cutter wheel 229 can be performed smoothly.

As mentioned above, although embodiment of this invention was described, this invention is not limited at all by the said embodiment, Moreover, the embodiment of this invention can be changed variously besides the above-mentioned case.

For example, in the above embodiment, the wheel frames 228 and 238 are raised and lowered by the cylindrical cam 212 and the cam followers 221 and 231, but the wheel frame may also be raised and lowered by other driving devices. For example, as shown in FIG. 11, the rack can be raised and lowered by a rack and pinion method.

FIG. 11 is a schematic diagram showing a driving unit and a lifting unit of a scribing head according to a modification.

The scribing head of the modified example includes a driving section 51 and lifting sections 52 and 53. The driving unit 51 includes a gear 511, and a motor (not shown) is connected to a rotation shaft of the gear 511. The lifting portions 52 and 53 include plate-shaped rack gears 521 and 531, tool shanks 522 and 532, and tools 523 and 533, respectively, which extend in the vertical direction. The gear 511 meshes with the rack gears 521 and 531.

When the gear 511 is rotated by a motor, the rack gears 521 and 531 are driven symmetrically up and down, respectively. That is, when the lifting portion 52 is transmitted downward by the gear 511, the lifting portion 52 is lifted. The lower part 53 is transmitted upward by a gear. Thereby, similarly to the above-mentioned embodiment, the two cutters 523 and 533 can be appropriately switched by one driving unit 51.

Further, in the above embodiment, the cam surfaces 212a and 212b of the cylindrical cam 212 are configured as follows. That is, if the output shaft of the servo motor 211 rotates clockwise when viewed from the negative side of the Z axis, the lifting portion 22 is lowered. The output shaft of the servo motor 211 rotates counterclockwise when viewed from the negative side of the Z axis, and the lifting portion 23 is lowered. Instead of this, for example, the rotation direction of the cylindrical cam 212 is not reversed, but is rotated in one direction, and the lifting portion 22 is switched. For example, the cylindrical cam 212 can also be controlled in such a manner that the lifting portion 22 is lowered in a rotation range of 0 ° to 180 °, and the lifting portion 23 is lowered in a rotation range of 180 ° to 360 °. In this case, the shape of the cam surface and the structure of the cam follower can be appropriately changed in accordance with the change of the control.

Moreover, in the above-mentioned embodiment, as shown in FIG. 3, the stoppers 223a, 223b, 233a, and 233b are each constituted as an independent body, but, for example, the upper surfaces of the connecting portions 222, 223 may be protruded upward so that The stoppers 223a and 223b are formed, and the stoppers 233a and 233b may be formed by projecting the lower surface of the top plate 25 downward. In addition, as long as the cam surfaces 212a, 212b of the cylindrical cam 212 and the cam followers 221, 231 are in a non-contact state, the stopper can be in any shape.

In addition, instead of providing the stoppers 223a, 223b, 233a, and 233b, the cam surfaces 212a, 212b of the cylindrical cam 212 and the cam followers 221, 231 may always be in contact with each other. However, in this case, there is a concern that the cam follower of the lifting portion not used for the scribe formation becomes a load for the rotation of the cylindrical cam 212, and the control of the lifting portion used for the scribe formation becomes unstable. Therefore, in order to control the lifting portion smoothly and accurately, it is preferable that the cam surfaces 212a, 212b and the cam followers 221, 231 are made into non-compliance by the stops 223a, 223b, 233a, and 233b as in the above embodiment. Contact status.

In the above embodiment, the cutter wheel 229 is held on the wheel frame 228 and the back roller 239 is held on the wheel frame 238. However, the cutter wheel 229 may be held on the wheel frame 238.

Furthermore, in the above-mentioned embodiment, as the cutter for forming a scribing line on the surface of the mother substrate G, a cutter wheel 229 rotating around a support axis is used, but the cutter for forming a scribing line is not limited to this. For example, the present invention can also be applied to a scribing head using a cutter that is crimped to the surface of the mother substrate G and moves without rotation.

In addition, the embodiment of the present invention can be appropriately modified in various ways within the scope of the technical idea shown in the patent application scope.

Claims (7)

A scribing head is characterized in that it is used for scribing a substrate, and includes: a first bracket configured to approach and away from the substrate; a second bracket configured to approach and away from the substrate; a motor, It is used for raising and lowering the first bracket and the second bracket; a rotating section that is rotated by the motor; and a transmission mechanism that transmits the rotation of the rotating section to the first bracket and the second bracket; and The transmission mechanism includes a joint unit that switches the approach and separation of the first bracket and the second bracket from the substrate according to the rotation position of the rotation unit. For example, the scribing head of claim 1, wherein when the transmission mechanism rotates from the neutral position to the first direction, the first bracket approaches the substrate, and the rotation part moves from the neutral position to the first direction. When rotating in the opposite second direction, the second holder is brought close to the substrate. For example, the scribe head of claim 1 or 2, wherein the joint unit includes: a cam surface provided on the rotating portion; a first cam follower provided on the first bracket and abutting the cam surface; the second A cam follower is provided on the second bracket and abuts the cam surface; and an elastic member energizes the first cam follower and the second cam follower in a direction approaching the cam surface. For example, the scribe head of claim 3, wherein when the first bracket is located near the operating position of the substrate, the second cam follower is non-contact with the cam surface, and when the second bracket is located near the substrate In the operating position, the first cam follower is in non-contact with the cam surface. For example, the scribe head of claim 4 is provided with a stopper for maintaining the first bracket and the second bracket in the non-contact state, respectively. A scribing device, comprising: a scribing head according to any one of claims 1 to 5; a support unit that supports a substrate to be cut; and a moving mechanism that causes the scribing head to be supported by the scribing head. The substrate supported by the unit moves. As in the scoring device of claim 6, wherein the first blade useful for forming a scribe is maintained on the first bracket, and the second blade useful for forming a scribe is maintained on the second bracket or used for Press the roller of the substrate.