TWI640687B - 用於對一真空泵配置暖機之方法及裝置 - Google Patents

用於對一真空泵配置暖機之方法及裝置 Download PDF

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Publication number
TWI640687B
TWI640687B TW102115762A TW102115762A TWI640687B TW I640687 B TWI640687 B TW I640687B TW 102115762 A TW102115762 A TW 102115762A TW 102115762 A TW102115762 A TW 102115762A TW I640687 B TWI640687 B TW I640687B
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TW
Taiwan
Prior art keywords
pump
booster pump
support
mbar
back pressure
Prior art date
Application number
TW102115762A
Other languages
English (en)
Chinese (zh)
Other versions
TW201407037A (zh
Inventor
傑克 雷蒙 泰特索
Original Assignee
愛德華有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 愛德華有限公司 filed Critical 愛德華有限公司
Publication of TW201407037A publication Critical patent/TW201407037A/zh
Application granted granted Critical
Publication of TWI640687B publication Critical patent/TWI640687B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/08—Cylinder or housing parameters
    • F04B2201/0801—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/70—Safety, emergency conditions or requirements
    • F04C2270/701—Cold start
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/85—Starting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
TW102115762A 2012-05-02 2013-05-02 用於對一真空泵配置暖機之方法及裝置 TWI640687B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
??1207721.0 2012-05-02
GB1207721.0A GB2501735B (en) 2012-05-02 2012-05-02 Method and apparatus for warming up a vacuum pump arrangement

Publications (2)

Publication Number Publication Date
TW201407037A TW201407037A (zh) 2014-02-16
TWI640687B true TWI640687B (zh) 2018-11-11

Family

ID=46330713

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102115762A TWI640687B (zh) 2012-05-02 2013-05-02 用於對一真空泵配置暖機之方法及裝置

Country Status (8)

Country Link
US (1) US20150086387A1 (enExample)
EP (1) EP2844879A2 (enExample)
JP (1) JP6208219B2 (enExample)
KR (1) KR20150005945A (enExample)
CN (1) CN104246230B (enExample)
GB (1) GB2501735B (enExample)
TW (1) TWI640687B (enExample)
WO (1) WO2013164571A2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112017014960B1 (pt) 2015-01-15 2022-10-04 Atlas Copco Airpower, Naamloze Vennootschap Método para regular a temperatura em um canal de saída, controlador para controlar o fornecimento de um gás de purga em um canal de entrada, bomba de vácuo e uso de um controlador
US10094381B2 (en) 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
JP2017031892A (ja) * 2015-08-03 2017-02-09 アルバック機工株式会社 真空排気装置及びその運転方法
CN106762540A (zh) * 2015-11-24 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种节能型真空泵氮气吹扫装置
CN105422454B (zh) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 真空抽气系统和真空抽气方法
DE102016005216A1 (de) * 2016-04-28 2017-11-02 Linde Aktiengesellschaft Fluidenergiemaschine
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
DE102017107601B4 (de) * 2017-04-10 2019-11-07 Gardner Denver Deutschland Gmbh Verfahren zur Steuerung eines Schraubenverdichters
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2583942A (en) * 2019-05-14 2020-11-18 Edwards Ltd Heater control unit
CN111734615B (zh) * 2020-06-28 2022-03-18 安图实验仪器(郑州)有限公司 用于真空系统的后级泵控制系统及控制方法
JP7502217B2 (ja) * 2021-02-26 2024-06-18 株式会社荏原製作所 真空排気方法および真空排気システム
CN121586807A (zh) * 2023-07-06 2026-02-27 Lot真空股份有限公司 真空泵系统及其控制方法
GB2641036A (en) * 2024-05-13 2025-11-19 Edwards Ltd Vacuum pumping system and method
US20260028975A1 (en) * 2024-07-29 2026-01-29 Applied Materials, Inc. Protective coatings for cryogenic pump components in process chambers

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TW533504B (en) * 2001-03-22 2003-05-21 Ebara Corp Gas recirculation flow control method and apparatus for use in vacuum system
WO2005038255A2 (en) * 2003-10-17 2005-04-28 Ebara Corporation Evacuation apparatus
JP2005243735A (ja) * 2004-02-24 2005-09-08 Hitachi Kokusai Electric Inc 基板処理装置
TW200632221A (en) * 2005-02-02 2006-09-16 Boc Group Plc Method of operating a pumping system
TW200643311A (en) * 2005-06-07 2006-12-16 Ebara Corp Vacuum exhaust system
TW200823369A (en) * 2006-09-12 2008-06-01 Toyota Jidoshokki Kk Method and device for controlling the rotation stop of vacuum pump
US20080294382A1 (en) * 2007-05-21 2008-11-27 Samsung Electronics Co., Ltd. Method and apparatus for pump fault prediction
CN101375063A (zh) * 2006-01-31 2009-02-25 株式会社荏原电产 真空泵单元
US20100215513A1 (en) * 2004-03-08 2010-08-26 Jusung Engineering Co., Ltd. Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same

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JP4825608B2 (ja) * 2005-08-12 2011-11-30 株式会社荏原製作所 真空排気装置および真空排気方法、基板の加工装置および基板の加工方法
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Publication number Priority date Publication date Assignee Title
TW533504B (en) * 2001-03-22 2003-05-21 Ebara Corp Gas recirculation flow control method and apparatus for use in vacuum system
WO2005038255A2 (en) * 2003-10-17 2005-04-28 Ebara Corporation Evacuation apparatus
JP2005243735A (ja) * 2004-02-24 2005-09-08 Hitachi Kokusai Electric Inc 基板処理装置
US20100215513A1 (en) * 2004-03-08 2010-08-26 Jusung Engineering Co., Ltd. Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
TW200632221A (en) * 2005-02-02 2006-09-16 Boc Group Plc Method of operating a pumping system
TW200643311A (en) * 2005-06-07 2006-12-16 Ebara Corp Vacuum exhaust system
CN101375063A (zh) * 2006-01-31 2009-02-25 株式会社荏原电产 真空泵单元
TW200823369A (en) * 2006-09-12 2008-06-01 Toyota Jidoshokki Kk Method and device for controlling the rotation stop of vacuum pump
US20080294382A1 (en) * 2007-05-21 2008-11-27 Samsung Electronics Co., Ltd. Method and apparatus for pump fault prediction

Also Published As

Publication number Publication date
TW201407037A (zh) 2014-02-16
JP6208219B2 (ja) 2017-10-04
US20150086387A1 (en) 2015-03-26
GB2501735A (en) 2013-11-06
CN104246230A (zh) 2014-12-24
GB201207721D0 (en) 2012-06-13
EP2844879A2 (en) 2015-03-11
WO2013164571A3 (en) 2013-12-27
CN104246230B (zh) 2016-10-26
GB2501735B (en) 2015-07-22
JP2015516044A (ja) 2015-06-04
WO2013164571A2 (en) 2013-11-07
KR20150005945A (ko) 2015-01-15

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