JP2015516044A5 - - Google Patents

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Publication number
JP2015516044A5
JP2015516044A5 JP2015509479A JP2015509479A JP2015516044A5 JP 2015516044 A5 JP2015516044 A5 JP 2015516044A5 JP 2015509479 A JP2015509479 A JP 2015509479A JP 2015509479 A JP2015509479 A JP 2015509479A JP 2015516044 A5 JP2015516044 A5 JP 2015516044A5
Authority
JP
Japan
Prior art keywords
pump
booster pump
backing
millibar
predetermined threshold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015509479A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015516044A (ja
JP6208219B2 (ja
Filing date
Publication date
Priority claimed from GB1207721.0A external-priority patent/GB2501735B/en
Application filed filed Critical
Publication of JP2015516044A publication Critical patent/JP2015516044A/ja
Publication of JP2015516044A5 publication Critical patent/JP2015516044A5/ja
Application granted granted Critical
Publication of JP6208219B2 publication Critical patent/JP6208219B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015509479A 2012-05-02 2013-04-24 真空ポンプ装置のウォーミングアップ方法およびウォーミングアップ装置 Expired - Fee Related JP6208219B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1207721.0A GB2501735B (en) 2012-05-02 2012-05-02 Method and apparatus for warming up a vacuum pump arrangement
GB1207721.0 2012-05-02
PCT/GB2013/051033 WO2013164571A2 (en) 2012-05-02 2013-04-24 Method and apparatus for warming up a vacuum pump arrangement

Publications (3)

Publication Number Publication Date
JP2015516044A JP2015516044A (ja) 2015-06-04
JP2015516044A5 true JP2015516044A5 (enExample) 2017-04-13
JP6208219B2 JP6208219B2 (ja) 2017-10-04

Family

ID=46330713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015509479A Expired - Fee Related JP6208219B2 (ja) 2012-05-02 2013-04-24 真空ポンプ装置のウォーミングアップ方法およびウォーミングアップ装置

Country Status (8)

Country Link
US (1) US20150086387A1 (enExample)
EP (1) EP2844879A2 (enExample)
JP (1) JP6208219B2 (enExample)
KR (1) KR20150005945A (enExample)
CN (1) CN104246230B (enExample)
GB (1) GB2501735B (enExample)
TW (1) TWI640687B (enExample)
WO (1) WO2013164571A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107208639B (zh) * 2015-01-15 2019-07-23 阿特拉斯·科普柯空气动力股份有限公司 控制器及其用途、具有该控制器的真空泵及温度调节方法
US10094381B2 (en) 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
JP2017031892A (ja) * 2015-08-03 2017-02-09 アルバック機工株式会社 真空排気装置及びその運転方法
CN106762540A (zh) * 2015-11-24 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种节能型真空泵氮气吹扫装置
CN105422454B (zh) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 真空抽气系统和真空抽气方法
DE102016005216A1 (de) * 2016-04-28 2017-11-02 Linde Aktiengesellschaft Fluidenergiemaschine
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
DE102017107601B4 (de) * 2017-04-10 2019-11-07 Gardner Denver Deutschland Gmbh Verfahren zur Steuerung eines Schraubenverdichters
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2583942A (en) * 2019-05-14 2020-11-18 Edwards Ltd Heater control unit
CN111734615B (zh) * 2020-06-28 2022-03-18 安图实验仪器(郑州)有限公司 用于真空系统的后级泵控制系统及控制方法
JP7502217B2 (ja) * 2021-02-26 2024-06-18 株式会社荏原製作所 真空排気方法および真空排気システム
WO2025009947A1 (ko) * 2023-07-06 2025-01-09 (주)엘오티베큠 진공펌프 시스템 및 이의 제어 방법
GB2641036A (en) * 2024-05-13 2025-11-19 Edwards Ltd Vacuum pumping system and method

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
US6673323B1 (en) * 2000-03-24 2004-01-06 Applied Materials, Inc. Treatment of hazardous gases in effluent
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP4364670B2 (ja) * 2004-02-24 2009-11-18 株式会社日立国際電気 Ａｌｄ装置
US7695231B2 (en) * 2004-03-08 2010-04-13 Jusung Engineering Co., Ltd. Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
GB0513867D0 (en) * 2005-07-06 2005-08-10 Boc Group Plc Method of treating an exhaust gas
JP4825608B2 (ja) * 2005-08-12 2011-11-30 株式会社荏原製作所 真空排気装置および真空排気方法、基板の加工装置および基板の加工方法
GB0520468D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Fluorine abatement
GB0521944D0 (en) * 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
EP1979619B1 (en) * 2006-01-31 2016-12-14 Ebara Corporation Vacuum pump unit
JP4702236B2 (ja) * 2006-09-12 2011-06-15 株式会社豊田自動織機 真空ポンプの運転停止制御方法及び運転停止制御装置
JP2008088880A (ja) * 2006-09-29 2008-04-17 Anest Iwata Corp 真空排気装置
KR100885919B1 (ko) * 2007-05-21 2009-02-26 삼성전자주식회사 펌프 폴트 예측 장치 및 펌프 폴트 예측 방법

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