TWI618814B - Surface treatment metal foil, laminate, printed wiring board, semiconductor package, electronic device, and printed wiring board manufacturing method - Google Patents
Surface treatment metal foil, laminate, printed wiring board, semiconductor package, electronic device, and printed wiring board manufacturing method Download PDFInfo
- Publication number
- TWI618814B TWI618814B TW105130807A TW105130807A TWI618814B TW I618814 B TWI618814 B TW I618814B TW 105130807 A TW105130807 A TW 105130807A TW 105130807 A TW105130807 A TW 105130807A TW I618814 B TWI618814 B TW I618814B
- Authority
- TW
- Taiwan
- Prior art keywords
- metal foil
- layer
- group
- resin
- treated metal
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 277
- 239000002184 metal Substances 0.000 title claims abstract description 277
- 239000011888 foil Substances 0.000 title claims abstract description 263
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000004065 semiconductor Substances 0.000 title claims description 18
- 238000004381 surface treatment Methods 0.000 title description 6
- 239000010410 layer Substances 0.000 claims abstract description 292
- 229920005989 resin Polymers 0.000 claims abstract description 253
- 239000011347 resin Substances 0.000 claims abstract description 253
- 239000000758 substrate Substances 0.000 claims abstract description 185
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000002335 surface treatment layer Substances 0.000 claims abstract description 20
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 96
- -1 aluminate compounds Chemical class 0.000 claims description 70
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 46
- 150000001875 compounds Chemical class 0.000 claims description 37
- 125000000217 alkyl group Chemical group 0.000 claims description 35
- 125000005843 halogen group Chemical group 0.000 claims description 35
- 150000002430 hydrocarbons Chemical group 0.000 claims description 34
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 33
- 125000003545 alkoxy group Chemical group 0.000 claims description 30
- 239000011889 copper foil Substances 0.000 claims description 30
- 229910052719 titanium Inorganic materials 0.000 claims description 23
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 22
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 21
- 125000003118 aryl group Chemical group 0.000 claims description 20
- 229910052726 zirconium Inorganic materials 0.000 claims description 18
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 16
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical class [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 13
- 238000007788 roughening Methods 0.000 claims description 11
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 9
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 5
- 229920001187 thermosetting polymer Polymers 0.000 claims description 5
- DIOQZVSQGTUSAI-NJFSPNSNSA-N decane Chemical class CCCCCCCCC[14CH3] DIOQZVSQGTUSAI-NJFSPNSNSA-N 0.000 claims description 3
- 230000003301 hydrolyzing effect Effects 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- 238000007747 plating Methods 0.000 description 44
- 239000010949 copper Substances 0.000 description 33
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 28
- 239000007864 aqueous solution Substances 0.000 description 28
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 27
- 239000000243 solution Substances 0.000 description 27
- 229910052802 copper Inorganic materials 0.000 description 26
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 24
- 150000004703 alkoxides Chemical class 0.000 description 24
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 22
- 238000001035 drying Methods 0.000 description 20
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 19
- 239000010936 titanium Substances 0.000 description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 16
- 229910052799 carbon Inorganic materials 0.000 description 16
- 239000000654 additive Substances 0.000 description 15
- 238000003756 stirring Methods 0.000 description 15
- 238000000576 coating method Methods 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 13
- 229910052759 nickel Inorganic materials 0.000 description 13
- 239000007822 coupling agent Substances 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 239000011259 mixed solution Substances 0.000 description 12
- 239000011701 zinc Substances 0.000 description 11
- 125000003277 amino group Chemical group 0.000 description 10
- 238000007772 electroless plating Methods 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 9
- 238000009713 electroplating Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- GBMDVOWEEQVZKZ-UHFFFAOYSA-N methanol;hydrate Chemical compound O.OC GBMDVOWEEQVZKZ-UHFFFAOYSA-N 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 9
- 150000003839 salts Chemical class 0.000 description 9
- 239000007921 spray Substances 0.000 description 9
- 229910052725 zinc Inorganic materials 0.000 description 9
- 229910001297 Zn alloy Inorganic materials 0.000 description 8
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 8
- QELJHCBNGDEXLD-UHFFFAOYSA-N nickel zinc Chemical compound [Ni].[Zn] QELJHCBNGDEXLD-UHFFFAOYSA-N 0.000 description 8
- 239000005871 repellent Substances 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 125000001931 aliphatic group Chemical group 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 7
- 125000000623 heterocyclic group Chemical group 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 229910052718 tin Inorganic materials 0.000 description 7
- 239000011135 tin Substances 0.000 description 7
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 229910052785 arsenic Inorganic materials 0.000 description 6
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 6
- 238000010030 laminating Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 229910000990 Ni alloy Inorganic materials 0.000 description 5
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 5
- SMZOGRDCAXLAAR-UHFFFAOYSA-N aluminium isopropoxide Chemical compound [Al+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] SMZOGRDCAXLAAR-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000003792 electrolyte Substances 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 5
- ZYVYEJXMYBUCMN-UHFFFAOYSA-N 1-methoxy-2-methylpropane Chemical compound COCC(C)C ZYVYEJXMYBUCMN-UHFFFAOYSA-N 0.000 description 4
- SXPGQGNWEWPWQZ-UHFFFAOYSA-N 4-(triethoxymethyl)dodecan-1-amine Chemical compound NCCCC(C(OCC)(OCC)OCC)CCCCCCCC SXPGQGNWEWPWQZ-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical group N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 238000006482 condensation reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000006460 hydrolysis reaction Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- WREDNSAXDZCLCP-UHFFFAOYSA-N methanedithioic acid Chemical compound SC=S WREDNSAXDZCLCP-UHFFFAOYSA-N 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 3
- 125000001637 1-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C(*)=C([H])C([H])=C([H])C2=C1[H] 0.000 description 3
- 125000001622 2-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C(*)C([H])=C([H])C2=C1[H] 0.000 description 3
- AAMHBRRZYSORSH-UHFFFAOYSA-N 2-octyloxirane Chemical compound CCCCCCCCC1CO1 AAMHBRRZYSORSH-UHFFFAOYSA-N 0.000 description 3
- GNPSQUCXOBDIDY-UHFFFAOYSA-N 4-(trimethoxymethyl)dodecane Chemical compound C(CCCCCCC)C(C(OC)(OC)OC)CCC GNPSQUCXOBDIDY-UHFFFAOYSA-N 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
- DKCXIJLUMAOOHX-UHFFFAOYSA-N C(CCCCC)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(CCCCC)C(C(OC)(OC)OC)CCCCCCCC DKCXIJLUMAOOHX-UHFFFAOYSA-N 0.000 description 3
- WMAZOIVUIWQRKU-UHFFFAOYSA-N C1(=CC=CC=C1)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical group C1(=CC=CC=C1)C(C(OCC)(OCC)OCC)CCCCCCCC WMAZOIVUIWQRKU-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 125000000640 cyclooctyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 3
- 238000010979 pH adjustment Methods 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- RMVRSNDYEFQCLF-UHFFFAOYSA-N thiophenol Chemical compound SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 description 3
- 125000003944 tolyl group Chemical group 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 125000005023 xylyl group Chemical group 0.000 description 3
- YJTRKPYANPCCNT-UHFFFAOYSA-N C(=CC1=CC=CC=C1)CN(CCCC(C(OC)(OC)OC)CCCCCCCC)CCN Chemical compound C(=CC1=CC=CC=C1)CN(CCCC(C(OC)(OC)OC)CCCCCCCC)CCN YJTRKPYANPCCNT-UHFFFAOYSA-N 0.000 description 2
- WKCJNWWBNPXUHZ-UHFFFAOYSA-N C(CC)[Zr](OCCCC)(OCCCC)OCCCC Chemical compound C(CC)[Zr](OCCCC)(OCCCC)OCCCC WKCJNWWBNPXUHZ-UHFFFAOYSA-N 0.000 description 2
- NWMOELHTLYQZAK-UHFFFAOYSA-N C1(=CC=CC=C1)[Zr](OC)(OC)OC Chemical group C1(=CC=CC=C1)[Zr](OC)(OC)OC NWMOELHTLYQZAK-UHFFFAOYSA-N 0.000 description 2
- IDSNHSOYZUDTCG-UHFFFAOYSA-N C1(=CC=CC=C1)[Zr](OCC)(OCC)OCC Chemical group C1(=CC=CC=C1)[Zr](OCC)(OCC)OCC IDSNHSOYZUDTCG-UHFFFAOYSA-N 0.000 description 2
- PZKBIVOXIFYDRI-UHFFFAOYSA-N CC(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound CC(C(OCC)(OCC)OCC)CCCCCCCC PZKBIVOXIFYDRI-UHFFFAOYSA-N 0.000 description 2
- PQZRIHABPZTYJN-UHFFFAOYSA-N CCO[Ti](OCC)(OCC)C1=CC=CC=C1 Chemical group CCO[Ti](OCC)(OCC)C1=CC=CC=C1 PQZRIHABPZTYJN-UHFFFAOYSA-N 0.000 description 2
- XNWFNQBBLNHBBO-UHFFFAOYSA-N CNCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound CNCCCC(C(OC)(OC)OC)CCCCCCCC XNWFNQBBLNHBBO-UHFFFAOYSA-N 0.000 description 2
- BBQNJCCMGOPPQJ-UHFFFAOYSA-N CO[Ti](OC)(OC)C1=CC=CC=C1 Chemical group CO[Ti](OC)(OC)C1=CC=CC=C1 BBQNJCCMGOPPQJ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- XEEHRQPQNJOFIQ-UHFFFAOYSA-N N(C1=CC=CC=C1)CCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound N(C1=CC=CC=C1)CCCC(C(OC)(OC)OC)CCCCCCCC XEEHRQPQNJOFIQ-UHFFFAOYSA-N 0.000 description 2
- JQGRTPYQELFPKX-UHFFFAOYSA-N OCCC(C(C(OCC)(OCC)OCC)(CCCN)CCO)CCCCCCC Chemical compound OCCC(C(C(OCC)(OCC)OCC)(CCCN)CCO)CCCCCCC JQGRTPYQELFPKX-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- JPUHCPXFQIXLMW-UHFFFAOYSA-N aluminium triethoxide Chemical compound CCO[Al](OCC)OCC JPUHCPXFQIXLMW-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical group 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000007809 chemical reaction catalyst Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- DYHSMQWCZLNWGO-UHFFFAOYSA-N di(propan-2-yloxy)alumane Chemical compound CC(C)O[AlH]OC(C)C DYHSMQWCZLNWGO-UHFFFAOYSA-N 0.000 description 2
- ARJRUFOOUOQJFU-UHFFFAOYSA-N dialuminum propan-2-olate Chemical compound [Al+3].CC([O-])C.CC([O-])C.[Al+3] ARJRUFOOUOQJFU-UHFFFAOYSA-N 0.000 description 2
- JWTZUGLUHPPGQT-UHFFFAOYSA-N diethoxy(phenyl)alumane Chemical group CC[O-].CC[O-].[Al+2]C1=CC=CC=C1 JWTZUGLUHPPGQT-UHFFFAOYSA-N 0.000 description 2
- VFNGKCDDZUSWLR-UHFFFAOYSA-N disulfuric acid Chemical compound OS(=O)(=O)OS(O)(=O)=O VFNGKCDDZUSWLR-UHFFFAOYSA-N 0.000 description 2
- 150000004662 dithiols Chemical class 0.000 description 2
- XGZNHFPFJRZBBT-UHFFFAOYSA-N ethanol;titanium Chemical compound [Ti].CCO.CCO.CCO.CCO XGZNHFPFJRZBBT-UHFFFAOYSA-N 0.000 description 2
- UARGAUQGVANXCB-UHFFFAOYSA-N ethanol;zirconium Chemical compound [Zr].CCO.CCO.CCO.CCO UARGAUQGVANXCB-UHFFFAOYSA-N 0.000 description 2
- VHTVKYGGDBORAK-UHFFFAOYSA-N ethanolate propan-2-ylaluminum(2+) Chemical compound CC[O-].CC[O-].CC(C)[Al++] VHTVKYGGDBORAK-UHFFFAOYSA-N 0.000 description 2
- GAEKPEKOJKCEMS-UHFFFAOYSA-N gamma-valerolactone Chemical compound CC1CCC(=O)O1 GAEKPEKOJKCEMS-UHFFFAOYSA-N 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- CBFCDTFDPHXCNY-UHFFFAOYSA-N icosane Chemical compound CCCCCCCCCCCCCCCCCCCC CBFCDTFDPHXCNY-UHFFFAOYSA-N 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- ZEIWWVGGEOHESL-UHFFFAOYSA-N methanol;titanium Chemical compound [Ti].OC.OC.OC.OC ZEIWWVGGEOHESL-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- PJUIMOJAAPLTRJ-UHFFFAOYSA-N monothioglycerol Chemical compound OCC(O)CS PJUIMOJAAPLTRJ-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Chemical group 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- ZGSOBQAJAUGRBK-UHFFFAOYSA-N propan-2-olate;zirconium(4+) Chemical compound [Zr+4].CC(C)[O-].CC(C)[O-].CC(C)[O-].CC(C)[O-] ZGSOBQAJAUGRBK-UHFFFAOYSA-N 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 2
- 125000000542 sulfonic acid group Chemical group 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- UAEJRRZPRZCUBE-UHFFFAOYSA-N trimethoxyalumane Chemical compound [Al+3].[O-]C.[O-]C.[O-]C UAEJRRZPRZCUBE-UHFFFAOYSA-N 0.000 description 2
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 2
- WJMXTYZCTXTFJM-UHFFFAOYSA-N 1,1,1,2-tetraethoxydecane Chemical compound C(C)OC(C(OCC)(OCC)OCC)CCCCCCCC WJMXTYZCTXTFJM-UHFFFAOYSA-N 0.000 description 1
- VJNSCINLGYURMF-UHFFFAOYSA-N 1,1,1-trichloro-2-methyldecane Chemical compound CCCCCCCCC(C)C(Cl)(Cl)Cl VJNSCINLGYURMF-UHFFFAOYSA-N 0.000 description 1
- DQGPWNBGAYGUPK-UHFFFAOYSA-N 1,1,1-trifluoro-4-(trimethoxymethyl)dodecane Chemical compound FC(CCC(C(OC)(OC)OC)CCCCCCCC)(F)F DQGPWNBGAYGUPK-UHFFFAOYSA-N 0.000 description 1
- BUDDNLUUVBCSJZ-UHFFFAOYSA-N 1,1,1-trifluoro-4-(trimethoxymethyl)undecane Chemical compound FC(CCC(C(OC)(OC)OC)CCCCCCC)(F)F BUDDNLUUVBCSJZ-UHFFFAOYSA-N 0.000 description 1
- ANBBCZAIOXDZPV-UHFFFAOYSA-N 1,1,1-trimethoxy-2-methyldecane Chemical compound CC(C(OC)(OC)OC)CCCCCCCC ANBBCZAIOXDZPV-UHFFFAOYSA-N 0.000 description 1
- CWZQYRJRRHYJOI-UHFFFAOYSA-N 1,1,1-trimethoxydecane Chemical compound CCCCCCCCCC(OC)(OC)OC CWZQYRJRRHYJOI-UHFFFAOYSA-N 0.000 description 1
- VYMPLPIFKRHAAC-UHFFFAOYSA-N 1,2-ethanedithiol Chemical compound SCCS VYMPLPIFKRHAAC-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- DOVWXDUOIJZAGN-UHFFFAOYSA-N 10-aminododecane-1-thiol Chemical compound CCC(N)CCCCCCCCCS DOVWXDUOIJZAGN-UHFFFAOYSA-N 0.000 description 1
- IDXOZZNUOVLNGO-UHFFFAOYSA-N 12-sulfanyldodecan-3-ol Chemical compound OC(CCCCCCCCCS)CC IDXOZZNUOVLNGO-UHFFFAOYSA-N 0.000 description 1
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- AFBBKYQYNPNMAT-UHFFFAOYSA-N 1h-1,2,4-triazol-1-ium-3-thiolate Chemical compound SC=1N=CNN=1 AFBBKYQYNPNMAT-UHFFFAOYSA-N 0.000 description 1
- GCZWJRLXIPVNLU-UHFFFAOYSA-N 2,2-dimethoxy-3-methylundecane Chemical compound CC(C(OC)(OC)C)CCCCCCCC GCZWJRLXIPVNLU-UHFFFAOYSA-N 0.000 description 1
- ZKYGQQHIWMWBOJ-UHFFFAOYSA-N 2,2-dimethylpropyl(dimethoxy)alumane Chemical compound C(C(C)(C)C)[Al](OC)OC ZKYGQQHIWMWBOJ-UHFFFAOYSA-N 0.000 description 1
- AMNLXDDJGGTIPL-UHFFFAOYSA-N 2,4-dimethylbenzenethiol Chemical compound CC1=CC=C(S)C(C)=C1 AMNLXDDJGGTIPL-UHFFFAOYSA-N 0.000 description 1
- GFCRSKBAFJBQQS-UHFFFAOYSA-N 2-ethyl-11-sulfanylundecanoic acid Chemical compound C(=O)(O)C(CCCCCCCCCS)CC GFCRSKBAFJBQQS-UHFFFAOYSA-N 0.000 description 1
- IIEWMRPKJCXTAD-UHFFFAOYSA-N 3-(trimethoxymethyl)undecane Chemical compound C(C)C(C(OC)(OC)OC)CCCCCCCC IIEWMRPKJCXTAD-UHFFFAOYSA-N 0.000 description 1
- DKKYOQYISDAQER-UHFFFAOYSA-N 3-[3-(3-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=C(OC=3C=C(N)C=CC=3)C=CC=2)=C1 DKKYOQYISDAQER-UHFFFAOYSA-N 0.000 description 1
- LFBALUPVVFCEPA-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)C(C(O)=O)=C1 LFBALUPVVFCEPA-UHFFFAOYSA-N 0.000 description 1
- DFYGYTNMHPUJBY-UHFFFAOYSA-N 4-(trimethoxymethyl)dodecane-1-thiol Chemical compound SCCCC(C(OC)(OC)OC)CCCCCCCC DFYGYTNMHPUJBY-UHFFFAOYSA-N 0.000 description 1
- KMKWGXGSGPYISJ-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=CC(N)=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=C(N)C=C1 KMKWGXGSGPYISJ-UHFFFAOYSA-N 0.000 description 1
- WCDSVWRUXWCYFN-UHFFFAOYSA-N 4-aminobenzenethiol Chemical compound NC1=CC=C(S)C=C1 WCDSVWRUXWCYFN-UHFFFAOYSA-N 0.000 description 1
- WLHCBQAPPJAULW-UHFFFAOYSA-N 4-methylbenzenethiol Chemical compound CC1=CC=C(S)C=C1 WLHCBQAPPJAULW-UHFFFAOYSA-N 0.000 description 1
- UGZAJZLUKVKCBM-UHFFFAOYSA-N 6-sulfanylhexan-1-ol Chemical compound OCCCCCCS UGZAJZLUKVKCBM-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- MEGXDQPBFCOWNX-UHFFFAOYSA-L Br[Ti](Br)(c1ccccc1)c1ccccc1 Chemical compound Br[Ti](Br)(c1ccccc1)c1ccccc1 MEGXDQPBFCOWNX-UHFFFAOYSA-L 0.000 description 1
- QRMVAJJHRVEHRC-UHFFFAOYSA-N C(=C)C(C(OC)(OC)OC)(CCCCCCCC)C1=CC=CC=C1 Chemical compound C(=C)C(C(OC)(OC)OC)(CCCCCCCC)C1=CC=CC=C1 QRMVAJJHRVEHRC-UHFFFAOYSA-N 0.000 description 1
- JZHKIUBMQMDQRG-UHFFFAOYSA-N C(=C)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(=C)C(C(OC)(OC)OC)CCCCCCCC JZHKIUBMQMDQRG-UHFFFAOYSA-N 0.000 description 1
- MCUAOGVAPFZFQX-UHFFFAOYSA-N C(=CC)OCC(CNCCCC(C(OCC)(OCC)OCC)CCCCCCCC)O Chemical compound C(=CC)OCC(CNCCCC(C(OCC)(OCC)OCC)CCCCCCCC)O MCUAOGVAPFZFQX-UHFFFAOYSA-N 0.000 description 1
- NZWUKTQPVORZQC-UHFFFAOYSA-N C(C(C)(C)C)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(C(C)(C)C)C(C(OC)(OC)OC)CCCCCCCC NZWUKTQPVORZQC-UHFFFAOYSA-N 0.000 description 1
- BQIAXALHVCHSRQ-UHFFFAOYSA-N C(C(C)(C)C)[Ti](OC)(OC)OC Chemical compound C(C(C)(C)C)[Ti](OC)(OC)OC BQIAXALHVCHSRQ-UHFFFAOYSA-N 0.000 description 1
- RBDYQYNPUNIQNB-UHFFFAOYSA-N C(C(C)(C)C)[Zr](OC)(OC)OC Chemical compound C(C(C)(C)C)[Zr](OC)(OC)OC RBDYQYNPUNIQNB-UHFFFAOYSA-N 0.000 description 1
- USVBOGGVFRZJKP-UHFFFAOYSA-N C(C)(C)(C)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(C)(C)(C)C(C(OC)(OC)OC)CCCCCCCC USVBOGGVFRZJKP-UHFFFAOYSA-N 0.000 description 1
- VWFVNYYIDHXXBH-UHFFFAOYSA-N C(C)(C)(C)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical group C(C)(C)(C)C(C(OCC)(OCC)OCC)CCCCCCCC VWFVNYYIDHXXBH-UHFFFAOYSA-N 0.000 description 1
- UMXYZKNCFHIWMJ-UHFFFAOYSA-N C(C)(C)(C)[Ti](OCC)(OCC)OCC Chemical compound C(C)(C)(C)[Ti](OCC)(OCC)OCC UMXYZKNCFHIWMJ-UHFFFAOYSA-N 0.000 description 1
- CRGRAEKAAYUVLU-UHFFFAOYSA-N C(C)(C)(C)[Zr](OC(C)C)(OC(C)C)OC(C)C Chemical compound C(C)(C)(C)[Zr](OC(C)C)(OC(C)C)OC(C)C CRGRAEKAAYUVLU-UHFFFAOYSA-N 0.000 description 1
- PVZLFDBGOHYOBU-UHFFFAOYSA-N C(C)(C)(C)[Zr](OCC)(OCC)OCC Chemical compound C(C)(C)(C)[Zr](OCC)(OCC)OCC PVZLFDBGOHYOBU-UHFFFAOYSA-N 0.000 description 1
- APDXQBWLTXFUPB-UHFFFAOYSA-N C(C)(C)C(C(OC)(OC)OC)CCCCCCC Chemical compound C(C)(C)C(C(OC)(OC)OC)CCCCCCC APDXQBWLTXFUPB-UHFFFAOYSA-N 0.000 description 1
- AWDKVIUUINUYAI-UHFFFAOYSA-N C(C)(C)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C(C)(C)C(C(OCC)(OCC)OCC)CCCCCCCC AWDKVIUUINUYAI-UHFFFAOYSA-N 0.000 description 1
- KNHZFCNKXYRWIK-UHFFFAOYSA-N C(C)(C)[Ti](OC)(OC)OC Chemical compound C(C)(C)[Ti](OC)(OC)OC KNHZFCNKXYRWIK-UHFFFAOYSA-N 0.000 description 1
- LFNLUYRPANEYJZ-UHFFFAOYSA-N C(C)(C)[Ti](OCC)(OCC)OCC Chemical compound C(C)(C)[Ti](OCC)(OCC)OCC LFNLUYRPANEYJZ-UHFFFAOYSA-N 0.000 description 1
- QHTDCHMSSLFPLZ-UHFFFAOYSA-N C(C)(C)[Zr](OC)(OC)OC Chemical compound C(C)(C)[Zr](OC)(OC)OC QHTDCHMSSLFPLZ-UHFFFAOYSA-N 0.000 description 1
- REPJEOHVYFVHAQ-UHFFFAOYSA-N C(C)(C)[Zr](OCC)(OCC)OCC Chemical compound C(C)(C)[Zr](OCC)(OCC)OCC REPJEOHVYFVHAQ-UHFFFAOYSA-N 0.000 description 1
- UEYMLSDWUUKDND-UHFFFAOYSA-N C(C)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C(C)C(C(OCC)(OCC)OCC)CCCCCCCC UEYMLSDWUUKDND-UHFFFAOYSA-N 0.000 description 1
- DVRAXXHSIKPLJZ-UHFFFAOYSA-N C(C)N(CCCC(C(OC)(OC)OC)CCCCCCCC)CC Chemical compound C(C)N(CCCC(C(OC)(OC)OC)CCCCCCCC)CC DVRAXXHSIKPLJZ-UHFFFAOYSA-N 0.000 description 1
- DQLKIHZAISMEAT-UHFFFAOYSA-N C(C)[Zr](OC)(OC)OC Chemical compound C(C)[Zr](OC)(OC)OC DQLKIHZAISMEAT-UHFFFAOYSA-N 0.000 description 1
- ZHPGRPRBAJHIFL-UHFFFAOYSA-N C(C1CO1)CCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound C(C1CO1)CCCCC(C(OC)(OC)OC)CCCCCCCC ZHPGRPRBAJHIFL-UHFFFAOYSA-N 0.000 description 1
- GUKHINYNBHFUFN-UHFFFAOYSA-N C(CC)CCCC(C(OCC)(OCC)OCC)CCCCCCCC Chemical group C(CC)CCCC(C(OCC)(OCC)OCC)CCCCCCCC GUKHINYNBHFUFN-UHFFFAOYSA-N 0.000 description 1
- FPYZFGNMCPBDBU-UHFFFAOYSA-N C(CCC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical group C(CCC)C(C(OCC)(OCC)OCC)CCCCCCCC FPYZFGNMCPBDBU-UHFFFAOYSA-N 0.000 description 1
- FMKWYHVTQUABQM-UHFFFAOYSA-N C(CCCC)[Ti](OCC)(OCC)OCC Chemical compound C(CCCC)[Ti](OCC)(OCC)OCC FMKWYHVTQUABQM-UHFFFAOYSA-N 0.000 description 1
- GMAZIELCMRTUGE-UHFFFAOYSA-N C(CCCC)[Zr](OCC)(OCC)OCC Chemical compound C(CCCC)[Zr](OCC)(OCC)OCC GMAZIELCMRTUGE-UHFFFAOYSA-N 0.000 description 1
- PEMNUNHFISSEER-UHFFFAOYSA-N C(CCCCC)[Zr](OC(C)C)(OC(C)C)OC(C)C Chemical group C(CCCCC)[Zr](OC(C)C)(OC(C)C)OC(C)C PEMNUNHFISSEER-UHFFFAOYSA-N 0.000 description 1
- MMRRCDCXJAMKIP-UHFFFAOYSA-N C(CCCCC)[Zr](OC)(OC)OC Chemical compound C(CCCCC)[Zr](OC)(OC)OC MMRRCDCXJAMKIP-UHFFFAOYSA-N 0.000 description 1
- MCVMZEAMGQRWGD-UHFFFAOYSA-N C(CCCCC)[Zr](OCC)(OCC)OCC Chemical compound C(CCCCC)[Zr](OCC)(OCC)OCC MCVMZEAMGQRWGD-UHFFFAOYSA-N 0.000 description 1
- XGZMTEYVJVJULA-UHFFFAOYSA-N C(CCCCCCC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical group C(CCCCCCC)C(C(OCC)(OCC)OCC)CCCCCCCC XGZMTEYVJVJULA-UHFFFAOYSA-N 0.000 description 1
- XGOQLEBJALBEQN-UHFFFAOYSA-N C(CCCCCCC)[Zr](OC(C)C)(OC(C)C)OC(C)C Chemical group C(CCCCCCC)[Zr](OC(C)C)(OC(C)C)OC(C)C XGOQLEBJALBEQN-UHFFFAOYSA-N 0.000 description 1
- IKEVUICGDJISMI-UHFFFAOYSA-N C(CCCCCCCCC)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(CCCCCCCCC)C(C(OC)(OC)OC)CCCCCCCC IKEVUICGDJISMI-UHFFFAOYSA-N 0.000 description 1
- UDEQNDCZULOGLM-UHFFFAOYSA-N C(CCCCCCCCC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical group C(CCCCCCCCC)C(C(OCC)(OCC)OCC)CCCCCCCC UDEQNDCZULOGLM-UHFFFAOYSA-N 0.000 description 1
- RFVDJPBNRSKTJM-UHFFFAOYSA-N C(CCCCCCCCC)[Ti](OC)(OC)OC Chemical group C(CCCCCCCCC)[Ti](OC)(OC)OC RFVDJPBNRSKTJM-UHFFFAOYSA-N 0.000 description 1
- TTWFAZWBUAVCCY-UHFFFAOYSA-N C(CCCCCCCCC)[Zr](OC(C)C)(OC(C)C)OC(C)C Chemical group C(CCCCCCCCC)[Zr](OC(C)C)(OC(C)C)OC(C)C TTWFAZWBUAVCCY-UHFFFAOYSA-N 0.000 description 1
- BFFLZJWRKHJXCI-UHFFFAOYSA-N C(CCCCCCCCC)[Zr](OC)(OC)OC Chemical group C(CCCCCCCCC)[Zr](OC)(OC)OC BFFLZJWRKHJXCI-UHFFFAOYSA-N 0.000 description 1
- BICFFZVJJIYRCJ-UHFFFAOYSA-N C1(=CC=C(C=C1)C(C(OCC)(OCC)OCC)CCCCCCCC)C Chemical compound C1(=CC=C(C=C1)C(C(OCC)(OCC)OCC)CCCCCCCC)C BICFFZVJJIYRCJ-UHFFFAOYSA-N 0.000 description 1
- LEQNJIDABJKFGY-UHFFFAOYSA-N C1(=CC=CC=C1)C(C(Br)(Br)C1=CC=CC=C1)CCCCCCCC Chemical compound C1(=CC=CC=C1)C(C(Br)(Br)C1=CC=CC=C1)CCCCCCCC LEQNJIDABJKFGY-UHFFFAOYSA-N 0.000 description 1
- SQGGNSFBZLGMOO-UHFFFAOYSA-N C1(=CC=CC=C1)C(C(Cl)(Cl)Cl)CCCCCCCC Chemical compound C1(=CC=CC=C1)C(C(Cl)(Cl)Cl)CCCCCCCC SQGGNSFBZLGMOO-UHFFFAOYSA-N 0.000 description 1
- ZMBZVKYXSFJSFT-UHFFFAOYSA-N C1(=CC=CC=C1)C(C(OC)(OC)OC)CCCCCCC Chemical class C1(=CC=CC=C1)C(C(OC)(OC)OC)CCCCCCC ZMBZVKYXSFJSFT-UHFFFAOYSA-N 0.000 description 1
- JSGRIFNBTXDZQU-UHFFFAOYSA-N C1(=CC=CC=C1)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C1(=CC=CC=C1)C(C(OC)(OC)OC)CCCCCCCC JSGRIFNBTXDZQU-UHFFFAOYSA-N 0.000 description 1
- LTJTVYQUGMECJC-UHFFFAOYSA-N C1(=CC=CC=C1)[Zr](OC(C)C)(OC(C)C)OC(C)C Chemical group C1(=CC=CC=C1)[Zr](OC(C)C)(OC(C)C)OC(C)C LTJTVYQUGMECJC-UHFFFAOYSA-N 0.000 description 1
- LLWDOWHSHCUJBJ-UHFFFAOYSA-N CC(C(Br)(Br)C)CCCCCCCC Chemical compound CC(C(Br)(Br)C)CCCCCCCC LLWDOWHSHCUJBJ-UHFFFAOYSA-N 0.000 description 1
- UFUYDYUQFXMKFB-UHFFFAOYSA-N CC(C(Cl)(Cl)C)CCCCCCCC Chemical compound CC(C(Cl)(Cl)C)CCCCCCCC UFUYDYUQFXMKFB-UHFFFAOYSA-N 0.000 description 1
- FOZRJAOZCKOKHG-UHFFFAOYSA-N CC(C)(C)[Ti] Chemical compound CC(C)(C)[Ti] FOZRJAOZCKOKHG-UHFFFAOYSA-N 0.000 description 1
- XVUQPESXTGAQTC-UHFFFAOYSA-N CC(C)O[Ti](C)(C)OC(C)C Chemical compound CC(C)O[Ti](C)(C)OC(C)C XVUQPESXTGAQTC-UHFFFAOYSA-N 0.000 description 1
- ZQBSPSZMRYBLLZ-UHFFFAOYSA-N CC(CCCCCCCCCCl)(C)C Chemical compound CC(CCCCCCCCCCl)(C)C ZQBSPSZMRYBLLZ-UHFFFAOYSA-N 0.000 description 1
- UWUSPSJNJXNANA-UHFFFAOYSA-N CC(CCCCCCCCCF)(C)C Chemical compound CC(CCCCCCCCCF)(C)C UWUSPSJNJXNANA-UHFFFAOYSA-N 0.000 description 1
- XUTOYRKOTJJZBH-UHFFFAOYSA-N CC1=CC=C(C=C1)[Zr](OC)(OC)OC Chemical compound CC1=CC=C(C=C1)[Zr](OC)(OC)OC XUTOYRKOTJJZBH-UHFFFAOYSA-N 0.000 description 1
- IXQYDYUVFUXTTH-UHFFFAOYSA-N CC1=CC=C(C=C1)[Zr](OCC)(OCC)OCC Chemical compound CC1=CC=C(C=C1)[Zr](OCC)(OCC)OCC IXQYDYUVFUXTTH-UHFFFAOYSA-N 0.000 description 1
- FNSHNSSIEYQVJW-UHFFFAOYSA-N CCCCCC[Ti](OC)(OC)OC Chemical compound CCCCCC[Ti](OC)(OC)OC FNSHNSSIEYQVJW-UHFFFAOYSA-N 0.000 description 1
- JCKJLCIZGYHWCU-UHFFFAOYSA-N CCCCCC[Ti](OCC)(OCC)OCC Chemical compound CCCCCC[Ti](OCC)(OCC)OCC JCKJLCIZGYHWCU-UHFFFAOYSA-N 0.000 description 1
- AYAWAUCIDXKRJS-UHFFFAOYSA-N CCO[Ti](C)(C)OCC Chemical compound CCO[Ti](C)(C)OCC AYAWAUCIDXKRJS-UHFFFAOYSA-N 0.000 description 1
- ITJHDXSUEINCDE-UHFFFAOYSA-N CCO[Ti](C)(OCC)OCC Chemical compound CCO[Ti](C)(OCC)OCC ITJHDXSUEINCDE-UHFFFAOYSA-N 0.000 description 1
- ATJDCQWLPDJCAA-UHFFFAOYSA-N CCO[Ti](CC)(OCC)OCC Chemical compound CCO[Ti](CC)(OCC)OCC ATJDCQWLPDJCAA-UHFFFAOYSA-N 0.000 description 1
- POFPFCXEHIUVHR-UHFFFAOYSA-N CCO[Zr](C)(C)OCC Chemical compound CCO[Zr](C)(C)OCC POFPFCXEHIUVHR-UHFFFAOYSA-N 0.000 description 1
- IWESBPXAEDNEJI-UHFFFAOYSA-N CCO[Zr](C)(OCC)OCC Chemical compound CCO[Zr](C)(OCC)OCC IWESBPXAEDNEJI-UHFFFAOYSA-N 0.000 description 1
- XLEMSPCLROKULC-UHFFFAOYSA-N CCO[Zr](CC)(OCC)OCC Chemical compound CCO[Zr](CC)(OCC)OCC XLEMSPCLROKULC-UHFFFAOYSA-N 0.000 description 1
- XEYPUVOBWLBTKR-UHFFFAOYSA-N CC[Ti](OC)(OC)OC Chemical compound CC[Ti](OC)(OC)OC XEYPUVOBWLBTKR-UHFFFAOYSA-N 0.000 description 1
- UTHKIWAWEFGMFE-UHFFFAOYSA-N CN(CCCC(C(OC)(OC)OC)CCCCCCC)C Chemical compound CN(CCCC(C(OC)(OC)OC)CCCCCCC)C UTHKIWAWEFGMFE-UHFFFAOYSA-N 0.000 description 1
- GUWTUQVATYZAIT-UHFFFAOYSA-N CO[Ti](C)(C)OC Chemical compound CO[Ti](C)(C)OC GUWTUQVATYZAIT-UHFFFAOYSA-N 0.000 description 1
- ZSUKUOGKYJEUPO-UHFFFAOYSA-N CO[Ti](C)(OC)OC Chemical compound CO[Ti](C)(OC)OC ZSUKUOGKYJEUPO-UHFFFAOYSA-N 0.000 description 1
- RNVHPBRQCJGAEL-UHFFFAOYSA-N CO[Zr](C)(C)OC Chemical compound CO[Zr](C)(C)OC RNVHPBRQCJGAEL-UHFFFAOYSA-N 0.000 description 1
- WKZKLABUTFRSJN-UHFFFAOYSA-N CO[Zr](C)(OC)OC Chemical compound CO[Zr](C)(OC)OC WKZKLABUTFRSJN-UHFFFAOYSA-N 0.000 description 1
- LBLJRMOSEXHZJU-UHFFFAOYSA-L C[Ti](C)(Br)Br Chemical compound C[Ti](C)(Br)Br LBLJRMOSEXHZJU-UHFFFAOYSA-L 0.000 description 1
- YZGWUFQVIHZQRK-UHFFFAOYSA-L C[Zr](C)(Br)Br Chemical compound C[Zr](C)(Br)Br YZGWUFQVIHZQRK-UHFFFAOYSA-L 0.000 description 1
- GYOKZAWZKPAQEX-UHFFFAOYSA-M C[Zr](C)(C)Cl Chemical compound C[Zr](C)(C)Cl GYOKZAWZKPAQEX-UHFFFAOYSA-M 0.000 description 1
- HOPQFIOBAGDTDO-UHFFFAOYSA-N C[Zr](C)C Chemical compound C[Zr](C)C HOPQFIOBAGDTDO-UHFFFAOYSA-N 0.000 description 1
- BTBWBLQKMKYGIX-UHFFFAOYSA-L C[Zr](F)(F)C Chemical compound C[Zr](F)(F)C BTBWBLQKMKYGIX-UHFFFAOYSA-L 0.000 description 1
- WBDFYFHSUDRILU-UHFFFAOYSA-K Cl[Ti](Cl)(Cl)c1ccccc1 Chemical compound Cl[Ti](Cl)(Cl)c1ccccc1 WBDFYFHSUDRILU-UHFFFAOYSA-K 0.000 description 1
- HANBKTXNGOJAII-UHFFFAOYSA-K Cl[Zr](Cl)(Cl)c1ccccc1 Chemical compound Cl[Zr](Cl)(Cl)c1ccccc1 HANBKTXNGOJAII-UHFFFAOYSA-K 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- MHZGKXUYDGKKIU-UHFFFAOYSA-N Decylamine Chemical compound CCCCCCCCCCN MHZGKXUYDGKKIU-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- KVBCJFLGVJOMSN-UHFFFAOYSA-N FC(CCC(C(OC)(OC)OC)O[Ti](OCC)(OCC)C(C(C(C(C(CCC(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F.[Ti] Chemical compound FC(CCC(C(OC)(OC)OC)O[Ti](OCC)(OCC)C(C(C(C(C(CCC(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F.[Ti] KVBCJFLGVJOMSN-UHFFFAOYSA-N 0.000 description 1
- QUBBAGMYGLKUKL-UHFFFAOYSA-N FC(CCCCCCC[Zr](OCC)(OCC)OCC)(F)F Chemical compound FC(CCCCCCC[Zr](OCC)(OCC)OCC)(F)F QUBBAGMYGLKUKL-UHFFFAOYSA-N 0.000 description 1
- WCCMAVWPCRWHTB-UHFFFAOYSA-N FC(CC[Zr](OC)(OC)OC)(F)F Chemical compound FC(CC[Zr](OC)(OC)OC)(F)F WCCMAVWPCRWHTB-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- RAXXELZNTBOGNW-UHFFFAOYSA-O Imidazolium Chemical compound C1=C[NH+]=CN1 RAXXELZNTBOGNW-UHFFFAOYSA-O 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 1
- HYEJBGTWLUHUPE-UHFFFAOYSA-N NC(C(OC)(OC)OC)(CCCCCCCC)C1=CC=CC=C1 Chemical compound NC(C(OC)(OC)OC)(CCCCCCCC)C1=CC=CC=C1 HYEJBGTWLUHUPE-UHFFFAOYSA-N 0.000 description 1
- XJDCHDFUMGSEHD-UHFFFAOYSA-N NCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound NCCCC(C(OC)(OC)OC)CCCCCCCC XJDCHDFUMGSEHD-UHFFFAOYSA-N 0.000 description 1
- LAWAEOHJWOSSKX-UHFFFAOYSA-N NCCCC(C(OCCOCCOC)(OCCOCCOC)OCCOCCOC)CCCCCCCC Chemical compound NCCCC(C(OCCOCCOC)(OCCOCCOC)OCCOCCOC)CCCCCCCC LAWAEOHJWOSSKX-UHFFFAOYSA-N 0.000 description 1
- GKCODXAKDPZJOQ-UHFFFAOYSA-N NCCCCC(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound NCCCCC(C(OCC)(OCC)OCC)CCCCCCCC GKCODXAKDPZJOQ-UHFFFAOYSA-N 0.000 description 1
- DHYFHTHSTPXLDY-UHFFFAOYSA-N NCCCCCCNCCCC(CCCCC(OC)(OC)OC)CCCC Chemical compound NCCCCCCNCCCC(CCCCC(OC)(OC)OC)CCCC DHYFHTHSTPXLDY-UHFFFAOYSA-N 0.000 description 1
- BWYXVEUUCBEWTJ-UHFFFAOYSA-N NCCCOCCCCOCCCNCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound NCCCOCCCCOCCCNCCCC(C(OC)(OC)OC)CCCCCCCC BWYXVEUUCBEWTJ-UHFFFAOYSA-N 0.000 description 1
- DJEUPJAFPFEAQG-UHFFFAOYSA-N NCCNCC(C(OC)(OC)OC)(CCCCCCCC)CCC1=CC=CC=C1 Chemical compound NCCNCC(C(OC)(OC)OC)(CCCCCCCC)CCC1=CC=CC=C1 DJEUPJAFPFEAQG-UHFFFAOYSA-N 0.000 description 1
- PEXBBTCNDBSFHT-UHFFFAOYSA-N NCCNCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound NCCNCCCC(C(OC)(OC)OC)CCCCCCCC PEXBBTCNDBSFHT-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical group [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- NATPSSVRZZGRRC-UHFFFAOYSA-M [Cl-].C[Ti+] Chemical compound [Cl-].C[Ti+] NATPSSVRZZGRRC-UHFFFAOYSA-M 0.000 description 1
- XWMCJIOSNAXGAT-UHFFFAOYSA-L [Cl-].[Cl-].C[Ti+2]C Chemical compound [Cl-].[Cl-].C[Ti+2]C XWMCJIOSNAXGAT-UHFFFAOYSA-L 0.000 description 1
- PVRIRQFFAWJTPS-UHFFFAOYSA-L [Cl-].[Cl-].C[Zr+2]C Chemical compound [Cl-].[Cl-].C[Zr+2]C PVRIRQFFAWJTPS-UHFFFAOYSA-L 0.000 description 1
- DGXOWMLKUUUVMZ-UHFFFAOYSA-K [Cl-].[Cl-].[Cl-].[Ti+3]C Chemical compound [Cl-].[Cl-].[Cl-].[Ti+3]C DGXOWMLKUUUVMZ-UHFFFAOYSA-K 0.000 description 1
- HCVWSVWRFCCSNL-UHFFFAOYSA-K [Cl-].[Cl-].[Cl-].[Zr+3]C Chemical compound [Cl-].[Cl-].[Cl-].[Zr+3]C HCVWSVWRFCCSNL-UHFFFAOYSA-K 0.000 description 1
- QZYDAIMOJUSSFT-UHFFFAOYSA-N [Co].[Ni].[Mo] Chemical compound [Co].[Ni].[Mo] QZYDAIMOJUSSFT-UHFFFAOYSA-N 0.000 description 1
- LMZWAJYABPXUHR-UHFFFAOYSA-L [F-].[F-].C[Ti+2]C Chemical compound [F-].[F-].C[Ti+2]C LMZWAJYABPXUHR-UHFFFAOYSA-L 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- UIJGNTRUPZPVNG-UHFFFAOYSA-N benzenecarbothioic s-acid Chemical compound SC(=O)C1=CC=CC=C1 UIJGNTRUPZPVNG-UHFFFAOYSA-N 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- BIXFMOUJSRCOMS-UHFFFAOYSA-M chloro(methyl)alumane Chemical compound C[AlH]Cl BIXFMOUJSRCOMS-UHFFFAOYSA-M 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- GTBGXKPAKVYEKJ-UHFFFAOYSA-N decyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCOC(=O)C(C)=C GTBGXKPAKVYEKJ-UHFFFAOYSA-N 0.000 description 1
- WNJVNPGSANNOKM-UHFFFAOYSA-N decyl(diethoxy)alumane Chemical group C(CCCCCCCCC)[Al](OCC)OCC WNJVNPGSANNOKM-UHFFFAOYSA-N 0.000 description 1
- DGXBZJHPDDGPQB-UHFFFAOYSA-N decyl(dimethoxy)alumane Chemical compound C(CCCCCCCCC)[Al](OC)OC DGXBZJHPDDGPQB-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- CMMUKUYEPRGBFB-UHFFFAOYSA-L dichromic acid Chemical compound O[Cr](=O)(=O)O[Cr](O)(=O)=O CMMUKUYEPRGBFB-UHFFFAOYSA-L 0.000 description 1
- DLRHRQTUCJTIIV-UHFFFAOYSA-N diethoxy(ethyl)alumane Chemical compound CC[O-].CC[O-].CC[Al+2] DLRHRQTUCJTIIV-UHFFFAOYSA-N 0.000 description 1
- WJPUZKVKWVCCET-UHFFFAOYSA-N diethoxy(pentyl)alumane Chemical group C(CCCC)[Al](OCC)OCC WJPUZKVKWVCCET-UHFFFAOYSA-N 0.000 description 1
- BZVIOPULJMXGOB-UHFFFAOYSA-N dimethoxy(3,3,3-trifluoropropyl)alumane Chemical compound FC(CC[Al](OC)OC)(F)F BZVIOPULJMXGOB-UHFFFAOYSA-N 0.000 description 1
- FQCQVANPVQMMKW-UHFFFAOYSA-N dimethoxy-(4-methylphenyl)alumane Chemical compound CC1=CC=C(C=C1)[Al](OC)OC FQCQVANPVQMMKW-UHFFFAOYSA-N 0.000 description 1
- ZGMHEOLLTWPGQX-UHFFFAOYSA-M dimethylalumanylium;bromide Chemical compound C[Al](C)Br ZGMHEOLLTWPGQX-UHFFFAOYSA-M 0.000 description 1
- JGHYBJVUQGTEEB-UHFFFAOYSA-M dimethylalumanylium;chloride Chemical compound C[Al](C)Cl JGHYBJVUQGTEEB-UHFFFAOYSA-M 0.000 description 1
- AWZNNSIUJBVSTJ-UHFFFAOYSA-M diphenylalumanylium;bromide Chemical compound C=1C=CC=CC=1[Al](Br)C1=CC=CC=C1 AWZNNSIUJBVSTJ-UHFFFAOYSA-M 0.000 description 1
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 1
- YLWCNZQVNYRELK-UHFFFAOYSA-N dodecane-1-thiol;sodium Chemical compound [Na].CCCCCCCCCCCCS YLWCNZQVNYRELK-UHFFFAOYSA-N 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- BLFCDSUFXJPVAS-UHFFFAOYSA-N ethanolate;(4-methylphenyl)aluminum(2+) Chemical compound CC[O-].CC[O-].CC1=CC=C([Al+2])C=C1 BLFCDSUFXJPVAS-UHFFFAOYSA-N 0.000 description 1
- KKDMRHPZWJTSLH-UHFFFAOYSA-N ethanolate;hexylaluminum(2+) Chemical group CC[O-].CC[O-].CCCCCC[Al+2] KKDMRHPZWJTSLH-UHFFFAOYSA-N 0.000 description 1
- JXVBWSROJSOQFU-UHFFFAOYSA-N ethanolate;methylaluminum(2+) Chemical compound CCO[Al](C)OCC JXVBWSROJSOQFU-UHFFFAOYSA-N 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- UABOHUHCGKGGOJ-UHFFFAOYSA-N ethyl(dimethoxy)alumane Chemical compound [O-]C.[O-]C.CC[Al+2] UABOHUHCGKGGOJ-UHFFFAOYSA-N 0.000 description 1
- GNTRBBGWVVMYJH-UHFFFAOYSA-M fluoro(dimethyl)alumane Chemical compound [F-].C[Al+]C GNTRBBGWVVMYJH-UHFFFAOYSA-M 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- YCSJJCRCOUGEPI-UHFFFAOYSA-N hexyl(dimethoxy)alumane Chemical compound CCCCCC[Al](OC)OC YCSJJCRCOUGEPI-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 125000002510 isobutoxy group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])O* 0.000 description 1
- 125000005921 isopentoxy group Chemical group 0.000 description 1
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- DKUIXLPCCDROFD-UHFFFAOYSA-N methanolate;methylaluminum(2+) Chemical compound [O-]C.[O-]C.[Al+2]C DKUIXLPCCDROFD-UHFFFAOYSA-N 0.000 description 1
- OFSZFUWOFXCOQU-UHFFFAOYSA-N methanolate;propan-2-ylaluminum(2+) Chemical compound [O-]C.[O-]C.CC(C)[Al+2] OFSZFUWOFXCOQU-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- BQBCXNQILNPAPX-UHFFFAOYSA-N methoxy(dimethyl)alumane Chemical compound [O-]C.C[Al+]C BQBCXNQILNPAPX-UHFFFAOYSA-N 0.000 description 1
- YSTQWZZQKCCBAY-UHFFFAOYSA-L methylaluminum(2+);dichloride Chemical compound C[Al](Cl)Cl YSTQWZZQKCCBAY-UHFFFAOYSA-L 0.000 description 1
- DDTIGTPWGISMKL-UHFFFAOYSA-N molybdenum nickel Chemical compound [Ni].[Mo] DDTIGTPWGISMKL-UHFFFAOYSA-N 0.000 description 1
- 125000006606 n-butoxy group Chemical group 0.000 description 1
- 125000001298 n-hexoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 125000006608 n-octyloxy group Chemical group 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000005484 neopentoxy group Chemical group 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- KZCOBXFFBQJQHH-UHFFFAOYSA-N octane-1-thiol Chemical compound CCCCCCCCS KZCOBXFFBQJQHH-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- BPQPJXCUBLCZIB-UHFFFAOYSA-L phenylaluminum(2+);dichloride Chemical compound [Cl-].[Cl-].[Al+2]C1=CC=CC=C1 BPQPJXCUBLCZIB-UHFFFAOYSA-L 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 239000005077 polysulfide Substances 0.000 description 1
- 229920001021 polysulfide Polymers 0.000 description 1
- 150000008117 polysulfides Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- BCWYYHBWCZYDNB-UHFFFAOYSA-N propan-2-ol;zirconium Chemical compound [Zr].CC(C)O.CC(C)O.CC(C)O.CC(C)O BCWYYHBWCZYDNB-UHFFFAOYSA-N 0.000 description 1
- KBHBDZQAQRNXRB-UHFFFAOYSA-N propan-2-olate;titanium(3+) Chemical compound [Ti+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] KBHBDZQAQRNXRB-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 150000004772 tellurides Chemical class 0.000 description 1
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- UZLGSAUVSUOWGY-UHFFFAOYSA-N tert-butyl(diethoxy)alumane Chemical group C(C)(C)(C)[Al](OCC)OCC UZLGSAUVSUOWGY-UHFFFAOYSA-N 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- AWIJRPNMLHPLNC-UHFFFAOYSA-N thiocarboxylic acid group Chemical group C(=S)O AWIJRPNMLHPLNC-UHFFFAOYSA-N 0.000 description 1
- 150000003566 thiocarboxylic acids Chemical class 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- FGYSRRUNRYVMBF-UHFFFAOYSA-N tris(3-methylbutan-2-yloxy)alumane Chemical compound CC(C([O-])C)C.[Al+3].CC(C([O-])C)C.CC(C([O-])C)C FGYSRRUNRYVMBF-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating Methods And Accessories (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015187537A JP6498091B2 (ja) | 2015-09-25 | 2015-09-25 | 表面処理金属箔、積層体、プリント配線板、半導体パッケージ、電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201718937A TW201718937A (zh) | 2017-06-01 |
| TWI618814B true TWI618814B (zh) | 2018-03-21 |
Family
ID=58386090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| TW105130807A TWI618814B (zh) | 2015-09-25 | 2016-09-23 | Surface treatment metal foil, laminate, printed wiring board, semiconductor package, electronic device, and printed wiring board manufacturing method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6498091B2 (enExample) |
| KR (1) | KR20180051600A (enExample) |
| CN (1) | CN107921749A (enExample) |
| TW (1) | TWI618814B (enExample) |
| WO (1) | WO2017051905A1 (enExample) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US10581081B1 (en) * | 2019-02-01 | 2020-03-03 | Chang Chun Petrochemical Co., Ltd. | Copper foil for negative electrode current collector of lithium ion secondary battery |
| JP7607343B2 (ja) | 2022-03-24 | 2024-12-27 | 株式会社サーフテクノロジー | 固着物剥離性改善表面処理方法及び固着物剥離性改善部材 |
| KR20250080922A (ko) * | 2022-03-30 | 2025-06-05 | 아티엔스 가부시키가이샤 | 금속판용 접합제, 프린트 배선판용 보강 부재 및 그 제조 방법, 그리고, 배선판 및 그 제조 방법 |
Citations (5)
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| JPH02144177A (ja) * | 1988-11-26 | 1990-06-01 | Nisshin Steel Co Ltd | 金属板への有機薄膜形成方法 |
| JPH08246163A (ja) * | 1995-01-11 | 1996-09-24 | Kao Corp | 金属表面への撥液性付与方法 |
| JP2008104936A (ja) * | 2006-10-25 | 2008-05-08 | National Institute Of Advanced Industrial & Technology | 超撥水性アルミ箔及びその製造方法 |
| JP2012169598A (ja) * | 2011-01-26 | 2012-09-06 | Sumitomo Bakelite Co Ltd | プリント配線板およびプリント配線板の製造方法 |
| JP2014060407A (ja) * | 2012-01-17 | 2014-04-03 | Panasonic Corp | 配線基板とその製造方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5114355B2 (ja) * | 2008-10-08 | 2013-01-09 | 株式会社Ｓｎｔ | 撥水・撥油性コーティング物品およびその製造 |
| JP4790003B2 (ja) * | 2008-12-26 | 2011-10-12 | 株式会社カーメイト | コーティング膜形成方法およびコーティング液 |
| KR101687462B1 (ko) * | 2012-02-24 | 2016-12-16 | 제이에프이 스틸 가부시키가이샤 | 금속 재료, 표면 처리 방법 및 장치 |
| CN104335688B (zh) * | 2012-06-04 | 2018-02-09 | Jx日矿日石金属株式会社 | 多层印刷配线板的制造方法 |
| CN104334346B (zh) * | 2012-06-04 | 2017-05-03 | Jx日矿日石金属株式会社 | 附载体金属箔 |
| JP2014014752A (ja) * | 2012-07-06 | 2014-01-30 | Toyota Motor Corp | 撥水撥油性被膜の形成方法、及び当該方法によって形成される撥水撥油性被膜 |
| JP6096787B2 (ja) * | 2012-09-24 | 2017-03-15 | Ｊｘ金属株式会社 | キャリア付金属箔、樹脂製の板状キャリアと金属箔とからなる積層体、ならびにそれらの用途 |
| CA2895091C (en) * | 2013-01-07 | 2017-07-04 | Mitsubishi Electric Corporation | Coating composition, method for producing same, and coated article |
| JP6593979B2 (ja) * | 2013-07-24 | 2019-10-23 | Ｊｘ金属株式会社 | 表面処理銅箔、キャリア付銅箔、基材、銅張積層板の製造方法、電子機器の製造方法及びプリント配線板の製造方法 |
| JP6327840B2 (ja) * | 2013-12-04 | 2018-05-23 | Ｊｘ金属株式会社 | 熱硬化性樹脂と離型剤とを含む樹脂組成物 |
| JP6266965B2 (ja) * | 2013-12-04 | 2018-01-24 | Ｊｘ金属株式会社 | 多層プリント配線基板の製造方法及びベース基材 |
| JP6306865B2 (ja) * | 2013-12-05 | 2018-04-04 | Ｊｘ金属株式会社 | 樹脂基板を互いに剥離可能に密着させた積層体 |
| CN106102935A (zh) * | 2014-03-18 | 2016-11-09 | 3M创新有限公司 | 经处理的制品及其制备方法 |
-
2015
- 2015-09-25 JP JP2015187537A patent/JP6498091B2/ja not_active Expired - Fee Related
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2016
- 2016-09-23 TW TW105130807A patent/TWI618814B/zh active
- 2016-09-23 WO PCT/JP2016/078117 patent/WO2017051905A1/ja not_active Ceased
- 2016-09-23 KR KR1020187009978A patent/KR20180051600A/ko not_active Ceased
- 2016-09-23 CN CN201680049528.5A patent/CN107921749A/zh active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02144177A (ja) * | 1988-11-26 | 1990-06-01 | Nisshin Steel Co Ltd | 金属板への有機薄膜形成方法 |
| JPH08246163A (ja) * | 1995-01-11 | 1996-09-24 | Kao Corp | 金属表面への撥液性付与方法 |
| JP2008104936A (ja) * | 2006-10-25 | 2008-05-08 | National Institute Of Advanced Industrial & Technology | 超撥水性アルミ箔及びその製造方法 |
| JP2012169598A (ja) * | 2011-01-26 | 2012-09-06 | Sumitomo Bakelite Co Ltd | プリント配線板およびプリント配線板の製造方法 |
| JP2014060407A (ja) * | 2012-01-17 | 2014-04-03 | Panasonic Corp | 配線基板とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201718937A (zh) | 2017-06-01 |
| KR20180051600A (ko) | 2018-05-16 |
| CN107921749A (zh) | 2018-04-17 |
| JP2017061080A (ja) | 2017-03-30 |
| JP6498091B2 (ja) | 2019-04-10 |
| WO2017051905A1 (ja) | 2017-03-30 |
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