TWI607223B - Press-measuring mechanism for stacked package electronic components and test classification equipment for application thereof - Google Patents

Press-measuring mechanism for stacked package electronic components and test classification equipment for application thereof Download PDF

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TWI607223B
TWI607223B TW106109963A TW106109963A TWI607223B TW I607223 B TWI607223 B TW I607223B TW 106109963 A TW106109963 A TW 106109963A TW 106109963 A TW106109963 A TW 106109963A TW I607223 B TWI607223 B TW I607223B
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electronic component
carrier
temperature
test
measuring mechanism
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TW201835595A (en
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zhi wei Liang
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Description

堆疊式封裝電子元件之壓測機構及其應用之測試分類設備 Pressure measuring mechanism for stacked package electronic components and test classification device thereof

本發明係提供一種不僅有效縮短第一、二電子元件之訊號傳輸距離而可避免雜訊,並利用溫控單元控制第一、二電子元件保持預設測試溫度執行測試作業,進而提升測試品質之堆疊式封裝電子元件之壓測機構。 The invention provides a method for not only effectively shortening the signal transmission distance of the first and second electronic components, but also avoiding noise, and controlling the first and second electronic components to maintain the preset test temperature by using the temperature control unit to perform the test operation, thereby improving the test quality. The pressure measuring mechanism of the stacked package electronic components.

在現今,電子行動裝置日趨講究更高數位訊號處理及具有更高儲存容量等需求,而廣泛應用堆疊式封裝(stacked package on package,PoP)電子元件,請參閱第1圖,該堆疊式封裝電子元件10包含二電性連接之第一電子元件11及第二電子元件12,該位於上層之第一電子元件11大多為記憶體,例如DRAM或Flash,並於底面設有複數個第一電性接點111,該位於下層之第二電子元件12大多為IC,並於頂面設有複數個第二電性接點121,而底面設有複數個第三電性接點122,第二電子元件12係以第二電性接點121電性連接第一電子元件11之第一電性接點111,而組裝成該堆疊式封裝電子元件10。 Nowadays, electronic mobile devices are increasingly demanding higher digital signal processing and higher storage capacity, and widely used stacked package on package (PoP) electronic components, please refer to FIG. 1 , the stacked package electronic The component 10 includes a first electronic component 11 and a second electronic component 12 electrically connected to each other. The first electronic component 11 located in the upper layer is mostly a memory, such as a DRAM or a Flash, and has a plurality of first electrical properties on the bottom surface. The second electronic component 12 in the lower layer is mostly an IC, and a plurality of second electrical contacts 121 are disposed on the top surface, and a plurality of third electrical contacts 122 are disposed on the bottom surface, and the second electron is The component 12 is electrically connected to the first electrical contact 111 of the first electronic component 11 by the second electrical contact 121 to be assembled into the stacked package electronic component 10.

該堆疊式封裝電子元件於實際使用時,可能處於低溫環境或高溫環境,業者為確保堆疊式封裝電子元件之使用品質,於製作完成後,必須以測試裝置對堆疊式封裝電子元件進行冷測作業或熱測作業,然若對成品之堆疊式封裝電子元件進行測試,並無法得知不良品為第一電子元件或第二電子元件,因此,業者係以具良品第一電子元件之測試裝置對待測之第二電子元件進行測試,以淘汰出不良品第二電子元件;請參閱第2、3圖, 該測試裝置之壓測機構係設有一作Z方向位移之承架21,該承架21之上方裝設有冷卻器22及加熱件23,該加熱件23並以連接件24連結裝配下壓治具25,另於連接件24之外部裝配有第一電路板26,該第一電路板26之底面設有複數個第一探針261,複數個第一探針261穿伸出下壓治具25,用以電性連接第二電子元件12,另於第一電路板26之頂面一側裝配有具第二探針271之第一測試座27,該第一測試座27係承置一為良品之第一電子元件11,並以第二探針271之一端電性連接第一電子元件11的第一電性接點111,另一端則電性連接第一電路板26,使第一測試座27經由第二探針271、第一電路板26而電性連接第一探針261,一位於壓測機構之下壓治具25下方且具有第三探針281之第二測試座28,係承置一具第二、三電性接點121、122之待測第二電子元件12,並以第三探針281電性連接第二電子元件12的第三電性接點122及第二電路板29;於測試時,該壓測機構之承架21係帶動冷卻器22、加熱件23、下壓治具25、第一電路板26及第一測試座27作Z方向向下位移,令下壓治具25上之第一探針261電性連接第二電子元件12的第二電性接點121,使第一電子元件11經由第一測試座27、第一電路板26及第一探針261而電性連接第二測試座28內待測之第二電子元件12以執行測試作業,該冷卻器22及加熱件23則經由連接件24及下壓治具25導溫第二電子元件12,使第二電子元件12於預設溫度範圍內執行測試作業;惟,此一壓測機構於使用上具有如下缺失: The stacked package electronic components may be in a low temperature environment or a high temperature environment in actual use. In order to ensure the quality of the stacked package electronic components, the stacked devices must be cold-tested by the test device after the fabrication is completed. Or thermal testing, but if the finished packaged packaged electronic components are tested, it is impossible to know that the defective product is the first electronic component or the second electronic component. Therefore, the manufacturer treats the test device with the good first electronic component. The second electronic component is tested to eliminate the defective second electronic component; see Figures 2 and 3, The pressure detecting mechanism of the testing device is provided with a carrier 21 for displacement in the Z direction. The holder 21 is provided with a cooler 22 and a heating member 23, and the heating member 23 is connected and assembled by the connecting member 24. The first circuit board 26 is disposed on the outer surface of the connecting member 24, and the first circuit board 26 is provided with a plurality of first probes 261, and the plurality of first probes 261 are extended to the lower pressing fixture. 25, for electrically connecting the second electronic component 12, and mounting a first test socket 27 with a second probe 271 on the top side of the first circuit board 26, the first test socket 27 is mounted The first electronic component 11 of the first electronic component 11 is electrically connected to the first electrical interface 111 of the first electronic component 11 and the other end is electrically connected to the first circuit board 26 to make the first The test stand 27 is electrically connected to the first probe 261 via the second probe 271 and the first circuit board 26, and a second test seat 28 having a third probe 281 under the pressure measuring mechanism 25 and under the pressure measuring mechanism 25 The second electronic component 12 to be tested is mounted on the second and third electrical contacts 121 and 122, and the second electronic component is electrically connected to the second electronic component by the third probe 281. The third electrical contact 122 of the 12 and the second circuit board 29; during testing, the frame 21 of the pressure measuring mechanism drives the cooler 22, the heating element 23, the pressing fixture 25, the first circuit board 26, and The first test seat 27 is displaced downward in the Z direction, so that the first probe 261 on the pressing fixture 25 is electrically connected to the second electrical contact 121 of the second electronic component 12, so that the first electronic component 11 passes through the first A test socket 27, a first circuit board 26 and a first probe 261 are electrically connected to the second electronic component 12 to be tested in the second test socket 28 to perform a test operation, and the cooler 22 and the heating component 23 are connected via a connection. The piece 24 and the lower pressing fixture 25 conduct the second electronic component 12 to cause the second electronic component 12 to perform the testing operation within a preset temperature range; however, the pressure measuring mechanism has the following defects in use:

1.由於壓測機構為使冷卻器22及加熱件23可經由下壓治具25導溫第二電子元件12,遂將承置第一電子元件11之第一測試座27裝配於第一電路板26之側方,導致第一電子元件11之訊號必須由第一測試座27之第二探針271先向下傳輸到第一電路板26之一側,再由第一電路板26 之一側傳輸至另一側,方可由位於另一側之第一探針261傳輸至第二電子元件12,致使第一電子元件11與第二電子元件12之間具有較長的訊號傳輸距離,以致易發生雜訊而影響測試品質,造成測試品質不佳之缺失。 1. Since the pressure detecting mechanism allows the cooler 22 and the heating member 23 to conduct the second electronic component 12 via the lower pressing fixture 25, the first test socket 27 that houses the first electronic component 11 is mounted on the first circuit board 26 . On the side, the signal of the first electronic component 11 must be transmitted downward from the second probe 271 of the first test socket 27 to one side of the first circuit board 26, and then by the first circuit board 26 One side is transmitted to the other side, and the side can be transmitted to the second electronic component 12 by the first probe 261 on the other side, so that the first electronic component 11 and the second electronic component 12 have a longer signal transmission distance. As a result, noise is easy to affect the quality of the test, resulting in the lack of good test quality.

2.若壓測機構必須使第一電子元件11與第二電子元件12於同一預設測試溫度之條件下執行測試作業時,由於冷卻器22及加熱件23僅可利用下壓治具25導溫第二電子元件12保持預設測試溫度,並無法對位於側方之第一測試座27上的第一電子元件11導溫,以致第一電子元件11與第二電子元件12無法於同一溫度下執行測試作業,造成影響測試品質之缺失。 2. If the pressure measuring mechanism must perform the test operation under the condition that the first electronic component 11 and the second electronic component 12 are under the same preset test temperature, since the cooler 22 and the heating component 23 can only use the lower pressure fixture 25 to conduct the temperature control. The two electronic components 12 maintain the preset test temperature, and cannot heat the first electronic component 11 on the side of the first test socket 27, so that the first electronic component 11 and the second electronic component 12 cannot be executed at the same temperature. Test work, which affects the lack of test quality.

3.該壓測機構之冷卻器22及加熱件23僅可導溫位於下方之第二電子元件12,若業者為使第一電子元件11亦保持預設測試溫度,即必須於第一電子元件11之上方增設另一組冷卻器、加熱件、連接件及下壓治具等元件,以致整個壓測機構之體積增大而相當佔用空間,造成不利電子元件測試設備空間配置之缺失。 3. The cooler 22 and the heating member 23 of the pressure measuring mechanism can only guide the second electronic component 12 located below. If the first electronic component 11 is maintained at a preset test temperature, the first electronic component 11 must be Another set of components such as cooler, heating element, connecting piece and pressing fixture are added above, so that the volume of the whole pressure measuring mechanism is increased and the space is occupied, which causes the lack of space configuration of the unfavorable electronic component testing equipment.

本發明之目的一,係提供一種堆疊式封裝電子元件之壓測機構,其係於承載器之承載件設有作業治具,並於內部設有導溫座,測試單元係於導溫座之下方設有具第一傳輸件之第一測試器,該第一測試器承置至少一接觸導溫座之第一電子元件,並以第一傳輸件之一端電性連接第一電子元件,而另一端則電性連接第二電子元件,溫控單元係於承載器之導溫座設有第一溫控器,以導溫第一電子元件保持預設測試溫度,另於承載器之作業治具上方設有第二溫控器,以導溫第二電子元件保持預設測試溫度;藉此,該壓測機構利用第一測試器之第一傳輸件電性連接位於上、下方之第一電子元件及第二電子元件,以有效縮短第一、二電子元件之訊號傳輸距離而避免雜訊,達到提升測試品質之實 用效益。 A first object of the present invention is to provide a pressure measuring mechanism for a stacked package electronic component, which is provided with a working fixture on a carrier of the carrier, and is provided with a temperature guiding seat inside, and the testing unit is connected to the temperature guiding seat. a first tester having a first transmission member is disposed below, the first tester is configured to receive at least one first electronic component contacting the temperature guiding seat, and electrically connected to the first electronic component at one end of the first transmission component, and The other end is electrically connected to the second electronic component, and the temperature control unit is provided with a first temperature controller in the temperature guiding seat of the carrier, and the first electronic component is kept at a temperature to maintain a preset test temperature, and the operation of the carrier is further a second temperature controller is disposed above the second electronic component to maintain the preset test temperature; thereby, the pressure measuring mechanism electrically connects the first transmission member of the first tester to the first and the lower ones The electronic component and the second electronic component are used to effectively shorten the signal transmission distance of the first and second electronic components to avoid noise, thereby improving the test quality. Use benefits.

本發明之目的二,係提供一種堆疊式封裝電子元件之壓測機構,其中,該溫控單元之第一溫控器及第二溫控器係採上、下排列配置於承載器,第一溫控器位於第一測試器之上方,而第二溫控器則位於第一測試器之下方,使第一溫控器及第二溫控器可分別導溫第一電子元件及第二電子元件,進而使第一電子元件及第二電子元件保持預設測試溫度而執行測試作業,達到提升測試品質之實用效益。 The second object of the present invention is to provide a pressure measuring mechanism for a stacked package electronic component, wherein the first temperature controller and the second temperature controller of the temperature control unit are arranged on the carrier in a top and bottom arrangement, first The temperature controller is located above the first tester, and the second temperature controller is located below the first tester, so that the first temperature controller and the second temperature controller can respectively guide the first electronic component and the second electron The component, and thus the first electronic component and the second electronic component, maintain the preset test temperature to perform a test operation, thereby achieving the practical benefit of improving the test quality.

本發明之目的三,係提供一種堆疊式封裝電子元件之壓測機構,其中,該溫控單元之第一溫控器係位於第一測試器之上方,第一測試器之第一傳輸件則穿置作業治具,除可使第一、二電子元件保持預設測試溫度外,更可利用第一溫控器及第二溫控器採上、下排列配置於承載器之設計,而避免擴增壓測機構之體積,達到利於電子元件測試設備空間配置之實用效益。 A third aspect of the present invention provides a pressure measuring mechanism for a stacked package electronic component, wherein a first thermostat of the temperature control unit is located above the first tester, and a first transmission component of the first tester is In addition to allowing the first and second electronic components to maintain a preset test temperature, the first thermostat and the second thermostat can be used to arrange the arrangement of the first and second thermostats on the carrier, thereby avoiding Amplifying the volume of the pressure measuring mechanism to achieve practical benefits for the spatial configuration of the electronic component testing equipment.

本發明之目的四,係提供一種應用堆疊式封裝電子元件之壓測機構的測試分類設備,其包含機台、供料裝置、收料裝置、測試裝置、輸送裝置及中央控制裝置,該供料裝置係配置於機台上,並設有至少一容納待測第二電子元件之供料承置器,該收料裝置係配置於機台上,並設有至少一容納已測第二電子元件之收料承置器,該測試裝置係配置於機台上,並設有至少一第二測試器及至少一本發明之壓測機構,以對第二電子元件執行測試作業,該輸送裝置係配置於機台上,並設有至少一移載第二電子元件之移料器,該中央控制裝置係用以控制及整合各裝置作動,以執行自動化作業,達到提升作業效能之實用效益。 A fourth object of the present invention is to provide a test classification device for a pressure measuring mechanism using a stacked package electronic component, which comprises a machine table, a feeding device, a receiving device, a testing device, a conveying device and a central control device, the feeding device The device is disposed on the machine table, and is provided with at least one feeding device for accommodating the second electronic component to be tested, the receiving device is disposed on the machine table, and is provided with at least one second electronic component that is tested. a receiving device, the testing device is disposed on the machine table, and is provided with at least one second testing device and at least one pressure detecting mechanism of the invention to perform a testing operation on the second electronic component, the conveying device The utility model is disposed on the machine platform and is provided with at least one shifter for transferring the second electronic component, wherein the central control device is used for controlling and integrating the operation of each device to perform an automatic operation, thereby achieving the practical benefit of improving the performance of the operation.

〔習知〕 [study]

10‧‧‧堆疊式封裝電子元件 10‧‧‧Stacked package electronic components

11‧‧‧第一電子元件 11‧‧‧First electronic components

111‧‧‧第一電性接點 111‧‧‧First electrical contact

12‧‧‧第二電子元件 12‧‧‧Second electronic components

121‧‧‧第二電性接點 121‧‧‧Second electrical contact

122‧‧‧第三電性接點 122‧‧‧ Third electrical contact

21‧‧‧承架 21‧‧‧ Shelf

22‧‧‧冷卻器 22‧‧‧ cooler

23‧‧‧加熱件 23‧‧‧heating parts

24‧‧‧連接件 24‧‧‧Connecting parts

25‧‧‧下壓治具 25‧‧‧Under pressure fixture

26‧‧‧第一電路板 26‧‧‧First board

261‧‧‧第一探針 261‧‧‧First probe

27‧‧‧第一測試座 27‧‧‧First test stand

271‧‧‧第二探針 271‧‧‧Second probe

28‧‧‧第二測試座 28‧‧‧Second test seat

281‧‧‧第三探針 281‧‧‧ third probe

29‧‧‧第二電路板 29‧‧‧Second circuit board

〔本發明〕 〔this invention〕

30‧‧‧壓測機構 30‧‧‧Inspection mechanism

31‧‧‧移動臂 31‧‧‧ moving arm

32‧‧‧承載件 32‧‧‧Carriers

321‧‧‧作業治具 321‧‧‧Working fixture

33‧‧‧導溫座 33‧‧‧Guide temperature seat

331‧‧‧接合部件 331‧‧‧ joining parts

34‧‧‧隔離件 34‧‧‧Parts

35‧‧‧第一測試座 35‧‧‧First test seat

351‧‧‧第一傳輸件 351‧‧‧First transmission

36‧‧‧第一溫控器 36‧‧‧First thermostat

37‧‧‧冷卻器 37‧‧‧cooler

38‧‧‧第二溫控器 38‧‧‧Second thermostat

41‧‧‧第一電子元件 41‧‧‧First electronic components

411‧‧‧第一電性接點 411‧‧‧First electrical contact

42‧‧‧第二電子元件 42‧‧‧Second electronic components

421‧‧‧第二電性接點 421‧‧‧Second electrical contacts

422‧‧‧第三電性接點 422‧‧‧ Third electrical contact

43‧‧‧第二測試座 43‧‧‧Second test seat

431‧‧‧第二傳輸件 431‧‧‧Second transmission

44‧‧‧電路板 44‧‧‧ boards

50‧‧‧機台 50‧‧‧ machine

60‧‧‧供料裝置 60‧‧‧Feeding device

61‧‧‧供料承置器 61‧‧‧Feeder

70‧‧‧收料裝置 70‧‧‧Receiving device

71‧‧‧收料承置器 71‧‧‧Receipt receiver

80‧‧‧測試裝置 80‧‧‧Testing device

81‧‧‧第二測試器 81‧‧‧Second tester

90‧‧‧輸送裝置 90‧‧‧Conveyor

91‧‧‧第一移料器 91‧‧‧First mover

92‧‧‧第一轉載台 92‧‧‧First transfer station

93‧‧‧第二轉載台 93‧‧‧Second transfer station

94‧‧‧第二移料器 94‧‧‧Second shifter

95‧‧‧第三移料器 95‧‧‧ third shifter

第1圖:習知堆疊式封裝電子元件之示意圖。 Figure 1: Schematic diagram of a conventional stacked package electronic component.

第2圖:習知電子元件壓測機構及第二測試座之配置示意圖。 Figure 2: Schematic diagram of the configuration of the conventional electronic component pressure measuring mechanism and the second test socket.

第3圖:習知電子元件壓測機構及第二測試座之使用示意圖。 Figure 3: Schematic diagram of the use of the conventional electronic component pressure measuring mechanism and the second test socket.

第4圖:本發明堆疊式封裝電子元件之壓測機構的示意圖。 Fig. 4 is a schematic view showing a pressure measuring mechanism of the stacked package electronic component of the present invention.

第5圖:本發明壓測機構之使用示意圖(一)。 Figure 5: Schematic diagram of the use of the pressure measuring mechanism of the present invention (1).

第6圖:本發明壓測機構之使用示意圖(二)。 Figure 6: Schematic diagram of the use of the pressure measuring mechanism of the present invention (2).

第7圖:本發明壓測機構之使用示意圖(三)。 Figure 7: Schematic diagram of the use of the pressure measuring mechanism of the present invention (3).

第8圖:本發明壓測機構應用於測試分類設備之示意圖。 Fig. 8 is a schematic view showing the application of the pressure measuring mechanism of the present invention to a test classification device.

為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:請參閱第4圖,本發明壓測機構30包含承載器、測試單元及溫控單元,該承載器係設有至少一承載件,更進一步,該承載件可由至少一移動臂帶動作至少一方向位移,於本實施例中,係設有作第一方向(如Z方向)位移之移動臂31,該移動臂31係帶動承載件32作Z方向位移,該承載件32係具有導溫不導電之特性,並設有至少一作業治具321,該作業治具321可為一壓接電子元件之壓接治具,該壓接治具可為獨立元件,或以溫控單元之溫控器(如加熱件)作為壓接治具而壓抵電子元件,該作業治具亦或為一壓接及移載電子元件之壓移治具,該作業治具321可為獨立元件或一體成型於承載件32,於本實施例中,該作業治具321係為獨立元件,並為一壓接電子元件之壓接治具,作業治具321裝配於承載件32之底部,另於承載件32設有至少一導溫座33,於本實施例中,係於承載件32之內部設有導溫座33,該導溫座33之底部設有至少一接合部件331,又為避免承載件32與導溫座33相互影響傳導之溫度,係於承載件32與導溫座33之間設有至少一隔離件34;該測試單元係裝配於該承載器之承載件32,並設有具至少一第一傳輸件之第一測試器,該第一測試器係承置至少一接觸該導溫座33之第一電子元件41,並以第一傳輸件之一端電性連接該第一電子元件41,另一端則電性連接一第二電子元件(圖未示出),於本實施例中,係於承載器之承載件32內部且位於導 溫座33下方設有第一測試器,該第一測試器係設有具第一傳輸件351之第一測試座35,第一測試座35承置一為良品且第一電性接點411朝下之第一電子元件41(如DRAM),該第一電子元件41之頂面係連接導溫座33之接合部件331,並以第一電性接點411電性連接第一傳輸件351之一端,第一傳輸件351之另一端則穿伸出作業治具321而電性連接第二電子元件,進而可利用第一測試座35之第一傳輸件351電性連接位於上、下方之第一電子元件41及第二電子元件,以有效縮短第一電子元件41及第二電子元件之訊號傳輸距離而避免雜訊,以提升測試品質;該溫控單元係於承載器之承載件32設有至少一第一溫控器36,以導溫第一電子元件41保持預設測試溫度,更進一步,係於承載件32上之導溫座33設有至少一第一溫控器36,該第一溫控器36可為致冷晶片或加熱件或具預溫流體之本體等,另於承載件32之上方裝配至少一冷卻器37,該冷卻器37可為致冷晶片或具低溫流體之本體,於本實施例中,該冷卻器37係為具低溫流體之本體,並將低溫傳導至導溫座33及承載件32,該第一溫控器36係為致冷晶片,由於導溫座33可傳導冷卻器37之低溫,該第一溫控器36即可搭配冷卻器37之低溫而調整輸出功率,使第一溫控器36之溫度配合冷卻器37之低溫保持平衡在預設測試溫度,並經由導溫座33之接合部件331導溫第一電子元件41保持預設測試溫度,該溫控單元另於承載器之承載件32上且位於第一溫控器36之下方設有至少一第二溫控器,以導溫使第二電子元件保持預設測試溫度,該第二溫控器可為致冷晶片或加熱件或具預溫流體之本體等,於本實施例中,該第二溫控器38係為致冷晶片,由於承載件32可傳導冷卻器37之低溫,該第二溫控器38可搭配冷卻器37之低溫而調整輸出功率,使第二溫控器38之溫度配合冷卻器37之低溫保持平衡在預設測試溫度,並經由作業治具321導溫第二電子元件保持預設測試溫度,進而使第一電子 元件41及第二電子元件分別保持預設測試溫度,由於冷卻器37裝配於第一溫控器36及第二溫控器38之上方,使第一溫控器36及第二溫控器38可搭配同一冷卻器37,並利用第一溫控器36及第二溫控器38採上、下排列配置於承載器之設計,不僅節省成本,亦可避免擴增壓測機構之體積,達到利於電子元件測試設備空間配置之實用效益。 In order to make the present invention further understand the present invention, a preferred embodiment and a drawing will be described in detail as follows: Referring to Figure 4, the pressure sensing mechanism 30 of the present invention comprises a carrier, a test unit and a temperature. The control unit is provided with at least one carrier member. Further, the carrier member can be displaced by at least one moving arm band in at least one direction. In this embodiment, the carrier is provided in a first direction (such as the Z direction). Displacement moving arm 31, the moving arm 31 drives the carrier 32 to be displaced in the Z direction, the carrier 32 has the characteristic of non-conductive temperature conduction, and is provided with at least one working jig 321, the working jig 321 can be a crimping fixture for crimping an electronic component, the crimping fixture can be a separate component, or a thermostat (such as a heating component) of the temperature control unit can be used as a crimping fixture to press the electronic component, the working fixture Or the pressure-moving fixture for crimping and transferring electronic components, the working fixture 321 can be a separate component or integrally formed on the carrier 32. In the embodiment, the working fixture 321 is a separate component. And is a crimping fixture for crimping electronic components, working fixture 321 In the present embodiment, at least one temperature guiding seat 33 is disposed on the bottom of the carrier member 32. In the embodiment, a temperature guiding seat 33 is disposed inside the carrier member 32, and the bottom of the temperature guiding seat 33 is provided. There is at least one engaging member 331, and in order to prevent the bearing member 32 and the temperature guiding seat 33 from mutually affecting the temperature of conduction, at least one spacer 34 is disposed between the carrier 32 and the temperature guiding seat 33; the testing unit is assembled a carrier 32 of the carrier, and a first tester having at least one first transmission member, the first tester is configured to receive at least one first electronic component 41 contacting the temperature guiding seat 33, and One end of a transmission member is electrically connected to the first electronic component 41, and the other end is electrically connected to a second electronic component (not shown). In this embodiment, it is inside the carrier 32 of the carrier and is located guide A first tester is disposed under the temperature seat 33. The first tester is provided with a first test socket 35 having a first transmission member 351. The first test socket 35 is provided with a good first electrical contact 411. a first electronic component 41 (such as a DRAM) facing down, the top surface of the first electronic component 41 is connected to the bonding component 331 of the temperature guiding seat 33, and electrically connected to the first transmitting component 351 by the first electrical contact 411 The first end of the first transmission member 351 is electrically connected to the second electronic component, and the first transmission member 351 of the first test socket 35 is electrically connected to the upper and lower portions. The first electronic component 41 and the second electronic component are configured to effectively shorten the signal transmission distance of the first electronic component 41 and the second electronic component to avoid noise, thereby improving test quality; the temperature control unit is attached to the carrier 32 of the carrier. At least one first temperature controller 36 is disposed to maintain the preset temperature of the first electronic component 41, and further, the temperature guiding seat 33 attached to the carrier 32 is provided with at least one first temperature controller 36. The first thermostat 36 can be a cryogenic wafer or a heating element or a body with a pre-warmed fluid, etc. Above the carrier 32, at least one cooler 37 is mounted. The cooler 37 can be a cryogenic wafer or a body having a low temperature fluid. In the embodiment, the cooler 37 is a body having a low temperature fluid and conducts the low temperature. To the temperature guiding seat 33 and the carrier 32, the first thermostat 36 is a refrigerating wafer. Since the temperature guiding seat 33 can conduct the low temperature of the cooler 37, the first thermostat 36 can be matched with the cooler 37. The output power is adjusted at a low temperature, so that the temperature of the first thermostat 36 is balanced with the low temperature of the cooler 37 at a preset test temperature, and the first electronic component 41 is guided to maintain the preset test via the joint member 331 of the temperature guiding seat 33. The temperature control unit is further disposed on the carrier 32 of the carrier and disposed under the first temperature controller 36 to provide at least one second temperature controller for guiding the second electronic component to maintain the preset test temperature. The second thermostat can be a refrigerating wafer or a heating element or a body with a pre-warmed fluid. In the present embodiment, the second thermostat 38 is a refrigerated wafer, and the carrier 32 can conduct the cooler 37. The low temperature, the second thermostat 38 can be adjusted with the low temperature of the cooler 37 The power, the temperature of the second thermostat 38 of the cryocooler 37 with a balance of predetermined test temperature, test temperature and maintain the preset temperature of the second guide 321 via the electronic component working jig, thereby enabling the first electronic The component 41 and the second electronic component respectively maintain a preset test temperature. Since the cooler 37 is mounted above the first thermostat 36 and the second thermostat 38, the first thermostat 36 and the second thermostat 38 are provided. The same cooler 37 can be used, and the first thermostat 36 and the second thermostat 38 can be arranged on the carrier in the upper and lower arrangement, which not only saves cost, but also avoids the volume of the amplifying and measuring mechanism. Conducive to the practical benefits of the space configuration of electronic component test equipment.

請參閱第5、6圖,該堆疊式封裝電子元件包含第一電子元件41及第二電子元件42,由於本發明壓測機構30之第一測試座35內已置入良品之第一電子元件41,業者僅需測試具第二電性接點421及第三電性接點422之第二電子元件42,因此,本發明壓測機構30應用於電子元件測試裝置,該測試裝置係於壓測機構30之下方設置至少一第二測試器,以承置測試第二電子元件42,於本實施例中,第二測試器係設有電性連接之具第二傳輸件431的第二測試座43及電路板44,更進一步,該電路板44可電性連接測試機(圖未示出),該第二測試座43可承置一待測且第二電性接點421朝上之第二電子元件42,並以第二傳輸件431電性連接第二電子元件42之第三電性接點422及電路板44。 Referring to FIGS. 5 and 6, the stacked package electronic component includes a first electronic component 41 and a second electronic component 42. The first electronic component is placed in the first test socket 35 of the pressure sensing mechanism 30 of the present invention. 41, the operator only needs to test the second electronic component 42 having the second electrical contact 421 and the third electrical contact 422. Therefore, the pressure sensing mechanism 30 of the present invention is applied to an electronic component testing device, and the testing device is pressed At least one second tester is disposed under the measuring mechanism 30 to receive the test second electronic component 42. In this embodiment, the second tester is provided with a second test electrically connected to the second transport component 431. The circuit board 44 and the circuit board 44 are further electrically connected to the testing machine (not shown). The second testing seat 43 can be placed with a second electrical contact 421 facing up. The second electronic component 42 is electrically connected to the third electrical contact 422 of the second electronic component 42 and the circuit board 44 by the second transmitting component 431 .

請參閱第7圖,於第二測試座43承置待測之第二電子元件42時,該壓接機構30之承載器係以移動臂31帶動承載件32、測試單元及溫控單元同步作Z方向向下位移,令測試單元之第一測試座35的第一傳輸件351電性連接第二電子元件42之第二電性接點421,由於測試單元之第一測試座35係配置於作業治具321之上方,測試單元即可利用第一測試座35之第一傳輸件351電性連接位於上、下方之第一電子元件41的第一電性接點411及第二電子元件42的第二電性接點421,以有效縮短第一電子元件41及第二電子元件42間之訊號傳輸距離而可避免雜訊;然為使第一電子元件41及第二電子元件42保持預設測試溫度之條件下執行測試作業,例如冷 測作業之測試溫度設定為-20℃,當冷卻器37之低溫為-40℃,並將低溫傳導至位於下方之導溫座33及承載件32,由於導溫座33與承載件32之間設有不導溫之隔離件34,使得導溫座33與承載件32在傳導溫度時不會相互影響,該第一溫控器36即可視導溫座33傳導之冷卻器37低溫而調整輸出功率,使第一溫控器36之溫度配合冷卻器37之低溫而令導溫座33之接合部件331保持平衡在預設測試溫度-20℃,以利用接合部件331接觸導溫第一電子元件41保持預設測試溫度-20℃,然當第一溫控器36導溫第一電子元件41時,由於承載件32亦會傳導冷卻器37之低溫,以及第二溫控器38裝配於承載件32及作業治具321之間,第二溫控器38即可視承載件32傳導之冷卻器37低溫而調整輸出功率,使第二溫控器38之溫度配合冷卻器37之低溫而令作業治具321保持平衡在預設測試溫度-20℃,以利用作業治具321接觸導溫第二電子元件42保持預設測試溫度,進而該溫控單元可使第一電子元件41及第二電子元件42保持預設測試溫度,第二電子元件42即利用第一測試座35之第一傳輸件351電性連接第一電子元件41,以及利用第二測試座43之第二傳輸件431電性連接電路板44而執行冷測作業,達到提升測試品質之實用效益。 Referring to FIG. 7 , when the second test component 43 is mounted on the second electronic component 42 to be tested, the carrier of the crimping mechanism 30 drives the carrier 32 , the test unit and the temperature control unit to be synchronized by the moving arm 31 . The Z direction is downwardly displaced, so that the first transmission member 351 of the first test socket 35 of the test unit is electrically connected to the second electrical contact 421 of the second electronic component 42. Since the first test socket 35 of the test unit is configured The test unit can electrically connect the first electrical contact 411 and the second electronic component 42 of the first electronic component 41 located above and below the first test component 35. The second electrical contact 421 can effectively shorten the signal transmission distance between the first electronic component 41 and the second electronic component 42 to avoid noise; however, the first electronic component 41 and the second electronic component 42 are kept in advance. Perform test operations, such as cold, under test temperature conditions The test temperature of the test operation is set to -20 ° C, when the low temperature of the cooler 37 is -40 ° C, and the low temperature is conducted to the lower temperature guide seat 33 and the carrier 32, due to the space between the temperature guide seat 33 and the carrier 32 The non-conductive spacer 34 is disposed so that the temperature guiding seat 33 and the carrier 32 do not affect each other when the temperature is conducted, and the first thermostat 36 can adjust the output according to the low temperature of the cooler 37 conducted by the temperature guiding seat 33. The power is such that the temperature of the first thermostat 36 matches the low temperature of the cooler 37 to maintain the bonding member 331 of the temperature guiding seat 33 at a preset test temperature of -20 ° C to contact the first electronic component with the temperature of the bonding member 331. 41 maintains a preset test temperature of -20 ° C, but when the first thermostat 36 conducts the first electronic component 41, the carrier 32 also conducts the low temperature of the cooler 37, and the second thermostat 38 is mounted on the carrier. Between the member 32 and the working fixture 321 , the second thermostat 38 can adjust the output power according to the low temperature of the cooler 37 conducted by the carrier 32, so that the temperature of the second thermostat 38 matches the low temperature of the cooler 37 to make the operation work. The jig 321 is balanced at a preset test temperature of -20 ° C to be connected with the work jig 321 The second temperature electronic component 42 maintains a preset test temperature, and the temperature control unit can maintain the first electronic component 41 and the second electronic component 42 at a preset test temperature, and the second electronic component 42 utilizes the first test socket 35. The first transmission member 351 is electrically connected to the first electronic component 41, and the second transmission member 431 of the second test socket 43 is electrically connected to the circuit board 44 to perform a cold-test operation, thereby achieving the practical benefit of improving the test quality.

請參閱第4、8圖,本發明壓接機構30應用於電子元件測試分類設備之示意圖,該測試分類設備包含機台50、供料裝置60、收料裝置70、具至少一本發明壓接機構30之測試裝置80、輸送裝置90及中央控制裝置(圖未示出),該供料裝置60係裝配於機台50上,並設有至少一容納待測第二電子元件之供料承置器61,該收料裝置70係裝配於機台50上,並設有至少一容納已測第二電子元件之收料承置器71,該測試裝置80係裝配於機台50上,並設有至少一承置第二電子元件之第二測試器81及至少一本發明之壓接機構30,該壓接 機構30係設有承載器、測試單元及溫控單元,以配合第二測試器81而對第二電子元件執行預設測試作業,於本實施例中,係於機台50之二側並呈對向設置有複數個測試裝置80,以對第二電子元件執行測試作業,該輸送裝置90係裝配於機台50上,並設有至少一移載第二電子元件之移料器,於本實施例中,該輸送裝置90之第一移料器91係於供料裝置60之供料承置器61取出待測之第二電子元件,並移載至第一轉載台92及第二轉載台93,第一轉載台92及第二轉載台93載送待測之第二電子元件至換料位置,以供第二移料器94及第三移料器95取料,第二移料器94及第三移料器95再分別將待測之第二電子元件移載至測試裝置80而執行測試作業,並將測試裝置80已測之第二電子元件移載至第一轉載台92及第二轉載台93,第一移料器91係於第一轉載台92及第二轉載台93取出已測之第二電子元件,並依據測試結果,將已測之第二電子元件輸送至收料裝置70之收料承置器71而分類收置,該中央控制裝置係用以控制及整合各裝置作動,以執行自動化作業,達到提升作業效能之實用效益。 Referring to Figures 4 and 8, the crimping mechanism 30 of the present invention is applied to a schematic diagram of an electronic component testing and sorting apparatus. The test sorting apparatus includes a machine table 50, a feeding device 60, a receiving device 70, and at least one crimping device of the present invention. The testing device 80 of the mechanism 30, the conveying device 90 and the central control device (not shown) are mounted on the machine 50 and provided with at least one feeding carrier for accommodating the second electronic component to be tested. The receiving device 70 is mounted on the machine 50 and is provided with at least one receiving device 71 for accommodating the second electronic component to be tested. The testing device 80 is mounted on the machine 50, and Providing at least one second tester 81 for holding the second electronic component and at least one crimping mechanism 30 of the present invention, the crimping The mechanism 30 is provided with a carrier, a test unit and a temperature control unit for performing a preset test operation on the second electronic component in cooperation with the second tester 81. In this embodiment, it is on the two sides of the machine 50. A plurality of test devices 80 are disposed opposite to perform a test operation on the second electronic component. The transport device 90 is mounted on the machine 50 and is provided with at least one shifter for transferring the second electronic component. In the embodiment, the first feeder 91 of the conveying device 90 takes out the second electronic component to be tested by the feeding device 61 of the feeding device 60, and transfers it to the first transfer station 92 and the second transfer. The stage 93, the first transfer stage 92 and the second transfer stage 93 carry the second electronic component to be tested to the refueling position for the second shifter 94 and the third shifter 95 to take the material, and the second transfer material The device 94 and the third shifter 95 respectively transfer the second electronic component to be tested to the testing device 80 to perform a test operation, and transfer the second electronic component that has been measured by the testing device 80 to the first transfer station 92. And the second transfer stage 93, the first shifter 91 is taken out from the first transfer stage 92 and the second transfer stage 93 to take out the second measured second According to the test result, the measured second electronic component is sent to the receiving device 71 of the receiving device 70 for sorting and receiving, and the central control device is used for controlling and integrating the devices to perform Automated operations to achieve practical benefits of improved operational performance.

30‧‧‧壓測機構 30‧‧‧Inspection mechanism

31‧‧‧移動臂 31‧‧‧ moving arm

32‧‧‧承載件 32‧‧‧Carriers

321‧‧‧作業治具 321‧‧‧Working fixture

33‧‧‧導溫座 33‧‧‧Guide temperature seat

331‧‧‧接合部件 331‧‧‧ joining parts

34‧‧‧隔離件 34‧‧‧Parts

35‧‧‧第一測試座 35‧‧‧First test seat

351‧‧‧第一傳輸件 351‧‧‧First transmission

36‧‧‧第一溫控器 36‧‧‧First thermostat

37‧‧‧冷卻器 37‧‧‧cooler

38‧‧‧第二溫控器 38‧‧‧Second thermostat

41‧‧‧第一電子元件 41‧‧‧First electronic components

411‧‧‧第一電性接點 411‧‧‧First electrical contact

42‧‧‧第二電子元件 42‧‧‧Second electronic components

421‧‧‧第二電性接點 421‧‧‧Second electrical contacts

43‧‧‧第二測試座 43‧‧‧Second test seat

431‧‧‧第二傳輸件 431‧‧‧Second transmission

44‧‧‧電路板 44‧‧‧ boards

Claims (10)

一種堆疊式封裝電子元件之壓測機構,包含:承載器:係設有至少一承載件;測試單元:係裝配於該承載器之該承載件,並設有具至少一第一傳輸件之第一測試器,該第一測試器係承置至少一第一電子元件,並以該第一傳輸件之一端電性連接該第一電子元件,另一端則電性連接一第二電子元件;溫控單元:係裝配於該承載器之該承載件,並於該承載件裝配至少一第一溫控器,以使該第一電子元件保持預設測試溫度,另於該第一溫控器之下方設有至少一第二溫控器,以使該第二電子元件保持預設測試溫度。 A pressure measuring mechanism for a stacked package electronic component, comprising: a carrier: at least one carrier; a test unit: the carrier mounted on the carrier, and having at least one first transmission component a tester, the first tester is configured to receive at least one first electronic component, and electrically connect the first electronic component to one end of the first transmission component, and electrically connect a second electronic component to the other end; Control unit: the carrier mounted on the carrier, and at least one first thermostat is mounted on the carrier to maintain the first electronic component at a preset test temperature, and the first thermostat At least one second thermostat is disposed below to maintain the second electronic component at a preset test temperature. 依申請專利範圍第1項所述之堆疊式封裝電子元件之壓測機構,其中,該承載器係設有作至少一方向位移之移動臂,該移動臂係裝配該承載件。 The pressure measuring mechanism of the stacked package electronic component according to claim 1, wherein the carrier is provided with a moving arm that is displaced in at least one direction, and the moving arm is equipped with the carrier. 依申請專利範圍第1項所述之堆疊式封裝電子元件之壓測機構,其中,該承載器係於該承載件上設有至少一導溫座,該測試單元之該第一測試器係承置至少一接觸該導溫座之該第一電子元件,該溫控單元係於該導溫座裝配該第一溫控器,以使該第一電子元件保持預設測試溫度。 The pressure measuring mechanism of the stacked package electronic component according to claim 1, wherein the carrier is provided with at least one temperature guiding seat on the carrier, and the first tester of the testing unit is Locating at least one of the first electronic components contacting the temperature guiding block, the temperature control unit is configured to assemble the first temperature controller to maintain the first electronic component at a preset test temperature. 依申請專利範圍第3項所述之堆疊式封裝電子元件之壓測機構,其中,該承載器之該導溫座係設有至少一接合部件,該接合部件係接觸該第一電子元件。 The pressure measuring mechanism of the stacked package electronic component of claim 3, wherein the temperature guiding seat of the carrier is provided with at least one engaging component that contacts the first electronic component. 依申請專利範圍第3項所述之堆疊式封裝電子元件之壓測機構,其中,該承載器係於該承載件與該導溫座之間設有至少一隔離件。 The pressure measuring mechanism of the stacked package electronic component according to claim 3, wherein the carrier is provided with at least one spacer between the carrier and the temperature guiding seat. 依申請專利範圍第3項所述之堆疊式封裝電子元件之壓測機構,其中,該測試單元之該第一測試器係設置於該承載器之該承載件上且位於該導溫座下方,該第一測試器係設有具第一傳輸件之第一測試座,該第一測試座之該第一傳輸件電性連接該第一電子元件之第一電性接點。 The pressure measuring mechanism of the stacked package electronic component according to claim 3, wherein the first tester of the test unit is disposed on the carrier of the carrier and below the temperature guiding seat. The first tester is provided with a first test socket having a first transmission member, and the first transmission member of the first test socket is electrically connected to a first electrical contact of the first electronic component. 依申請專利範圍第1項所述之堆疊式封裝電子元件之壓測機構,其中,該承載器之該承載件係設有至少一對電子元件執行預設作業之作業治具。 The pressure measuring mechanism of the stacked package electronic component according to claim 1, wherein the carrier of the carrier is provided with at least one pair of electronic components to perform a preset operation. 依申請專利範圍第1項所述之堆疊式封裝電子元件之壓測機構,其中,該溫控單元之該第一溫控器可為致冷晶片或加熱件或具預溫流體之本體,該第二溫控器可為致冷晶片或加熱件或具預溫流體之本體。 The pressure measuring mechanism of the stacked package electronic component of claim 1, wherein the first temperature controller of the temperature control unit is a refrigerant chip or a heating element or a body with a pre-warmed fluid, The second thermostat can be a cryogenic wafer or a heating element or a body with a pre-warmed fluid. 依申請專利範圍第1項所述之堆疊式封裝電子元件之壓測機構,其中,該溫控單元係於該承載件裝配有至少一冷卻器。 The pressure measuring mechanism of the stacked package electronic component according to claim 1, wherein the temperature control unit is equipped with at least one cooler. 一種應用堆疊式封裝電子元件之壓測機構的測試分類設備,包含:機台;供料裝置:係裝配於該機台,並設有至少一容納待測之第二電子元件的供料承置器;收料裝置:係裝配於該機台,並設有至少一容納已測之該第二電子元件的收料承置器;測試裝置:係裝配於該機台,並設有至少一承置該第二電子元件之第二測試器,以及至少一依申請專利範圍第1項所述之堆疊式封裝電子元件之壓測機構,以對該第二電子元件執行預設測試作業;輸送裝置:係裝配於該機台,並設有至少一移載該第二電子元件之移料器;中央控制裝置:係用以控制及整合各裝置作動,而執行自動化作業。 A test classification device for applying a pressure measuring mechanism of a stacked package electronic component, comprising: a machine; a feeding device: being mounted on the machine, and provided with at least one feeding bearing for accommodating the second electronic component to be tested The receiving device is mounted on the machine and is provided with at least one receiving device for accommodating the second electronic component that has been tested; the testing device is mounted on the machine and is provided with at least one bearing a second tester for the second electronic component, and at least one pressure detecting mechanism of the stacked package electronic component according to claim 1 to perform a preset test operation on the second electronic component; The system is mounted on the machine and is provided with at least one shifter for transferring the second electronic component; the central control device is for controlling and integrating the operations of the devices to perform an automated operation.
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