TWI568656B - Electronic component conveyor - Google Patents

Description

Electronic component conveying device

The present invention relates to an electronic component conveying apparatus that transports an electronic component by an adsorption nozzle.

The electronic component is transported through an electronic component transport device, also referred to as a handler, for various purposes from assembly to delivery. For example, after the assembly step, the electronic component is transported in order to undergo various inspections and the like. The electronic component transfer apparatus includes various processing units in the transport path of the electronic component, and performs various processes while transporting the electronic component. Further, in order to transfer the electronic component from one container to another, the electronic component is boarded from one container to the transport path, and moved to the other container to be exchanged to another container.

There is a method of using an adsorption nozzle as a method of transporting an electronic component along a transport path. The electronic component conveying device includes an adsorption nozzle and a driving body that moves the adsorption nozzle, and moves the adsorption nozzle by the driving body while sucking and holding the electronic component to the adsorption nozzle. The drive body is, for example, a disk or a star-shaped turret table. The adsorption nozzle is disposed outside the turntable to rotate the turntable. Adsorb the nozzle while keeping electricity The sub-member rotates around the edge of the turntable.

The adsorption nozzle sucks the electronic member by the attraction force to thereby hold the electronic member, so that the clogging of the opening of the adsorption nozzle cannot occur. The reason for this is that if clogging occurs in the opening of the adsorption nozzle, the suction force is lowered, and there is a possibility that a failure of the electronic component falls during the transportation process occurs, and the production efficiency is lowered. The foreign matter that is clogged in the adsorption nozzle is coal or the like generated in the electronic component when dust or dust flutters in the installation environment of the electronic component conveying device, and laser marking. Therefore, the foreign matter that has entered the inside of the adsorption nozzle is removed by periodically discharging the air from the adsorption nozzle.

In recent years, miniaturization has been progressed due to the technical background of the advancement of the so-called miniaturization technology and the demand for the miniaturization of electric products. Electronic components such as 0603 size (0.6 mm x 0.3 mm) or 0402 size (0.4 mm x 0.2 mm) are also used for electrical products.

The adsorption nozzle holds the electronic component by sucking the electronic component with a negative pressure. Therefore, the opening diameter of the adsorption nozzle must be a size in the plane of the electronic member so as not to create a gap in which air leaks. When transporting an electronic component of the 0603 size, it is necessary to have an opening diameter of at least 0.3 mm in diameter, and when transporting an electronic component of 0402 size, it is necessary to have an opening diameter of at least 0.2 mm in diameter.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-203711

If the opening diameter of the adsorption nozzle is small, the frictional resistance of the inner wall of the adsorption nozzle and the foreign matter increases. When the electronic component is continuously miniaturized, the diameter of the opening accompanying the adsorption nozzle becomes small, and the discharge of the transmitted air may not sufficiently remove the foreign matter. If the foreign matter is left untreated, the attraction force is lowered, and it is possible to cause a drop failure during the transportation again.

It is also considered to prohibit the use of adsorption nozzles that block foreign matter before maintenance. The adsorption nozzle that blocks foreign matter passes only in the transport path, and does not transport the electronic component. However, during the assembly from the assembly of the electronic component to the shipment, the amount of conveyance of the electronic component is lowered in proportion to the decrease in the operation rate of the adsorption nozzle, so that the throughput is lowered.

The present invention has been made to solve the above problems, and an object of the invention is to provide an electronic component conveying apparatus capable of removing foreign matter even if the diameter of the opening of the adsorption nozzle is small.

An electronic component conveying apparatus according to the present invention includes: a supply unit that supplies an electronic component; an accommodating unit that accommodates the electronic component supplied from the supply unit; and an adsorption nozzle that sucks the electronic component from the supply unit And holding, moving on the path including the supply portion and the accommodating portion, and disengaging the electronic member in the accommodating portion; and the needle portion being provided in the aforementioned stopping of the adsorption nozzle after the electronic member is detached A portion of the path and inserted into the opening of the aforementioned adsorption nozzle.

The detection unit may be further provided on a movement trajectory on which the adsorption nozzle moves after the electronic member is detached, and detects clogging of the adsorption nozzle.

The detection unit may include a camera that images an opening of the adsorption nozzle, and an analysis unit that analyzes an image captured by the camera.

The detection unit may include a contact portion that is in contact with an opening of the adsorption nozzle, and a measurement unit that measures a flow rate in the contact portion.

Further, the method further includes a nozzle lifting portion provided at an installation portion of the needle portion, and moving the adsorption nozzle stopped at the installation portion toward the needle portion.

Further, the method further includes: a needle lifting portion provided at an installation portion of the needle portion, and moving the needle portion up and down toward the adsorption nozzle stopped at the installation portion.

The air blower may be further provided with a blower that is provided at an installation portion of the needle portion and that blows air to the needle portion that is pulled out from the suction nozzle.

It is also possible to set the aforementioned electronic component to include 0.4 mm × 0.2 The size of the mm is not more than 0.6 mm × 0.3 mm, and the tip end of the adsorption nozzle has an opening diameter in the plane of the electronic component.

According to the present invention, the opening of the adsorption nozzle is penetrated by the needle portion, and the clogging caused by the foreign matter is broken. Therefore, even if the opening diameter of the adsorption nozzle is reduced and the frictional resistance of the inner wall is increased, the electronic member caused by the foreign matter can be removed. The blockage.

1‧‧‧Electronic component transfer device

2‧‧‧Supply unit

3‧‧‧ Containment unit

6‧‧‧Adsorption nozzle

7‧‧‧Advance and Rescue Drive Department

8‧‧‧Cut removal unit

9‧‧‧Clog detection department

11‧‧‧ Path

11a‧‧‧ stop position

12‧‧‧ 台台

41‧‧‧ Positioning unit

42‧‧‧Electrical characteristics measuring unit

43‧‧‧ appearance inspection unit

51‧‧‧ turntable

52‧‧‧Direct drive motor

61‧‧‧ hollow tube

62‧‧‧ openings

63‧‧‧ Foreign objects

64‧‧‧ Ring

71‧‧‧ rods

81‧‧‧needle

82‧‧‧Blowers

83‧‧‧Base

83a‧‧‧Sleeve body

83b‧‧‧Cam follower

83c‧‧‧ cam

83d‧‧‧Motor

91‧‧‧ camera

92‧‧‧Light source

93‧‧‧Image Analysis Department

94‧‧‧Control Department

95‧‧‧Contacts

96‧‧‧ flowmeter

97‧‧‧Flow Analysis Department

D‧‧‧Electronic components

FIG. 1 is a plan view showing a configuration of an electronic component conveying device according to a first embodiment.

FIG. 2 is a side view showing a configuration of an electronic component conveying device according to the first embodiment.

3 is a side view showing a configuration of a clogging removing unit according to the first embodiment.

4(a) to 4(c) are diagrams showing the action of preventing clogging of the clogging removing unit according to the first embodiment.

Fig. 5 is a view showing the action of blowing the adhering matter attached to the needle portion of the first embodiment.

FIG. 6 is a side view showing a configuration of a clogging removing unit according to a modification of the first embodiment.

7 is a view showing a suction nozzle and a needle portion according to a modification of the first embodiment. The curve of the height of the time changes.

8 is a plan view showing a configuration of an electronic component conveying device according to a second embodiment.

FIG. 9 is a block diagram showing a clogging detecting unit of the electronic component conveying device according to the second embodiment.

FIGS. 10(a) and 10(b) are schematic diagrams showing images of the state of the adsorption nozzle captured by the camera of the second embodiment.

FIG. 11 is a graph showing temporal changes in the height of the adsorption nozzle and the needle portion according to a modification of the second embodiment.

FIG. 12 is a block diagram showing a clogging detecting unit according to a modification of the second embodiment.

(First embodiment)

First, the electronic component conveying apparatus of the first embodiment will be described in detail with reference to the drawings.

(constitution)

The electronic component conveying device 1 shown in FIGS. 1 and 2 transports the electronic component D along the path 11. The supply unit 2 and the storage unit 3 are disposed in the path 11. The supply unit 2 moves the electronic components D one by one toward the intersection with the path 11. The storage unit 3 houses the electronic component D that is transported on the path 11. Between the supply unit 2 and the storage unit 3, various types can be provided Processing unit. The processing unit is a device that performs processing such as inspection, processing, sorting, and marking on the electronic component D, and is an auxiliary device that corrects the posture of the electronic component D in order to perform these processes. The processing unit includes a positioning unit 41, an electrical characteristic measuring unit 42, an appearance inspection unit 43, and a marking unit.

The path 11 is formed by the turntable 51 and the adsorption nozzle 6. The turntable 51 has a shape such as a disk or a star that is radially expanded at the same radius around a point. The turntable 51 is placed on the gantry 12 and spreads in a horizontal direction at a predetermined height. The drive source of the turntable 51 is a direct drive motor 52. The direct drive motor 52 is connected to the bottom surface of the turntable 51, and supports the turntable 51 at a predetermined height from the surface of the gantry 12. The direct drive motor 52 intermittently rotates the turntable 51 at a predetermined angle in the circumferential direction.

The adsorption nozzle 6 is mounted at a circumferentially equal position along the outer edge of the turntable 51. Therefore, the adsorption nozzles 6 are intermittently rotated by the turntable 51, and are sequentially stopped at the respective stop positions 11a. In other words, the stop position 11a is a point which is divided by the rotation angle of one pitch of the turntable 51 on the coaxial circumference with the turntable 51.

The adsorption nozzle 6 holds the electronic component D by suction, and disengages the electronic component D by releasing the suction. That is, the path 11 is the movement locus of the adsorption nozzle 6, and is the outer circumference of the turntable 51. The adsorption nozzle 6 has a hollow tube 61 therein (see FIGS. 4( a ) to 4 ( c )). The adsorption nozzle 6 is directed downward toward the gantry 12 and has an opening 62 at its front end. The opening 62 is connected to the hollow tube 61. The hollow tube 61 is opposite to the opening 62 The side end is in communication with a pneumatic circuit of a vacuum pump or an ejector negative pressure generating device. The adsorption nozzle 6 generates a negative pressure through the pneumatic circuit, and the electronic member D is adsorbed by the opening 62, and when the vacuum is broken or released into the atmosphere, the attraction force is lost and the electronic component D is detached from the opening 62.

The adsorption nozzle 6 is attached to the outer edge of the turntable 51 via a bearing. The bearing has an axis perpendicular to the turntable 51, and the adsorption nozzle 6 is slidable inside the bearing to be lifted and lowered. The adsorption nozzle 6 is pushed down by the advancing and retracting drive unit 7, thereby descending in a direction orthogonal to the turntable 51. The advancing and retracting drive unit 7 is provided at the stop position 11a of the adsorption nozzle 6, and is disposed directly above the outer edge of the turntable 51. The base end of the adsorption nozzle 6 exists on a vertical line extending from the advancing and retracting drive portion 7. The advancing and retracting drive unit 7 has no fixed relationship with the turntable 51, and the position of the advancing and retracting drive unit 7 does not move. The advancing and retracting drive unit 7 includes a motor, a cam mechanism, and a lever 71. The cam mechanism converts the rotational force of the motor into a linear motion and transmits it to the lever 71. The rod 71 extends toward the stop position 11a of the adsorption nozzle 6, and abuts from the upper side to the upper end of the adsorption nozzle 6 existing at the stop position 11a, and further pushes down the adsorption nozzle 6 downward.

The supply unit 2, the positioning unit 41, the electrical characteristic measuring unit 42, the visual inspection unit 43, and the storage unit 3 are provided on the gantry 12, and are placed directly below the outer edge of the turntable 51, thereby being disposed at the stop position 11a of the adsorption nozzle 6. Below. The adsorption nozzle 6 is lifted and lowered by receiving an external force from each of the advancing and retracting drive units 7, and receives the electronic component D from the supply unit 2 by the elevating and lowering, and the electronic component D is received by the positioning unit 41, the electrical characteristic measuring unit 42, and the visual inspection unit 43. The electronic component D is delivered to the storage unit 3 by lifting.

Here, the electronic component D is a member used in an electric product, and a semiconductor element or the like is packaged. Examples of the semiconductor element include a discrete semiconductor or an integrated circuit such as a transistor, a diode, a capacitor, or a resistor. The electronic component D conveyed by the electronic component conveying apparatus 1 is particularly suitable for a small product including 0603 size (0.6 mm × 0.3 mm) of 0403 size (0.4 mm × 0.2 mm). Therefore, the diameter of the opening 62 of the adsorption nozzle 6 is a size in the plane of the small electronic component D, which is equal to or shorter than the short side of the electronic component D. For example, the diameter of the opening 62 of the adsorption nozzle 6 is preferably about 0.2 mm or less.

At a portion of the stop position 11a of the adsorption nozzle 6, a clogging removing unit 8 that removes the foreign matter 63 occluded in the adsorption nozzle 6 is provided. The installation position of the clogging removal unit 8 is an empty section in which the electronic component different from the processing section in which the processing unit is provided does not move when the annular path 11 is divided by the supply unit 2 and the processing unit. The foreign matter 63 is coal generated by dust, dust or a laser mark. As shown in FIG. 3, the clogging removal unit 8 includes a needle portion 81, an advance and retreat driving portion 7, and a blower 82.

The needle portion 81 is an extremely long long rod and has flexibility to be buckling by contact with the adsorption nozzle 6. For the needle portion 81, for example, a probe for measuring electrical characteristics can be used. The rod diameter of the needle portion 81 does not reach the opening diameter of the adsorption nozzle 6, and for example, the rod diameter of the needle portion 81 is 0.1 mm with respect to the opening diameter of the adsorption nozzle 6 of 0.2 mm. A base 83 is provided on the gantry 12, and the needle portion 81 is supported on the base 83 and opens to the opening 62 of the adsorption nozzle 6. extend. The base 83 is a table that is reinforced from the gantry 12 toward the turntable 51. The needle portion 81 is provided so that the opening 62 of the adsorption nozzle 6 exists above the axis extension line, and is disposed at a position in the vertical direction of the gantry 12 of the stopped adsorption nozzle 6.

The advancing and retracting drive unit 7 is also provided at the installation position of the needle portion 81 via the adsorption nozzle 6. The adsorption nozzle 6 can be moved up and down toward the needle portion 81 through the advance/retract drive portion 7. The position of the upper end portion of the needle portion 81 is higher than the position of the opening 62 of the adsorption nozzle 6 that is lowered by the advancing and retracting drive portion 7.

A blower 82 is provided on the base 83 in addition to the needle portion 81. The blower 82 causes air to be ejected toward the upper end portion of the needle portion 81. The blower 82 is, for example, an air tube that is connected to a pneumatic circuit. The open end of the air tube is disposed toward the upper end portion of the needle portion 81. Further, the needle portion 81 is grounded through the base 83 to remove static electricity.

(effect)

When the direct drive motor 52 is rotated by one pitch, one adsorption nozzle 6 is stopped above the supply unit 2. The adsorption nozzle 6 is lowered by the advancing and retracting drive unit 7, and the electronic component D is picked up from the supply unit 2. The supply unit 2 is, for example, a parts feeder. The feeder includes a bowl through which a spiral groove is formed from the bottom surface to the edge, and a linear track whose one end is connected to the edge of the bowl and the other end is connected to the path 11, and the swing of the bowl and the orthosis of the track The electronic components in the bowl are guided to the path 11. The adsorption unit is dropped to the front end of the track to attract the front end of the track The electronic component D rises again.

The adsorption nozzle 6 that receives the electronic component D from the supply unit 2 measures the electrical characteristics of the electrical characteristics measured by the positioning unit 41 that corrects the posture in the processing section every time the direct drive motor 52 intermittently rotates the turntable 51. The unit 42 is located directly above the storage unit 3 by the visual inspection unit 43 that inspects the appearance by the camera 91 or the like.

The adsorption nozzle 6 located directly above the storage unit 3 is lowered by the advancing and retracting drive unit 7, and the electronic component D is detached from the storage unit 3. The housing unit 3 is, for example, a taping unit. The conveyor unit moves a carrier tape having a plurality of bags in the longitudinal direction, and the rotation timing of the turntable 51 is moved by one bag distance each time, and the empty bags are sequentially arranged on the path 11. The adsorption nozzle 6 releases the electronic component D to the empty bag by releasing the suction.

The adsorption nozzle 6 that does not hold the electronic component D passes through the housing unit 3 and is stopped directly above the clogging removal unit 8 provided in the empty section. The adsorption nozzle 6 passes through the advance/retract drive unit 7 and descends toward the needle portion 81. As shown in FIG. 4(a), the adsorption nozzle 6 sucks dust or dust floating in the installation area of the electronic component conveying apparatus 1, or foreign matter 63 such as coal generated during the laser marking, and the opening 62 may be clogged.

As shown in FIG. 4(b), the opening 62 of the adsorption nozzle 6 that has been lowered by the advancing and retracting drive unit 7 falls to a position lower than the upper end of the needle portion 81, and the needle portion 81 is inserted into the adsorption nozzle 6. Insert to suck The needle portion 81 to which the nozzle 6 is attached passes through and breaks the clogging of the opening 62. Therefore, as shown in Fig. 4(c), the external force received from the advancing and retracting drive unit 7 is released, and the adsorption nozzle 6 is raised again, whereby when the needle portion 81 is pulled out from the adsorption nozzle 6, the clogging in the adsorption nozzle 6 is eliminated. .

Further, the needle portion 81 has buckling flexibility, and is easily guided to the opening 62 of the adsorption nozzle 6 even if a precision error occurs in the positions of the needle portion 81 and the adsorption nozzle 6. Further, since the buckling flexibility is provided, damage to the adsorption nozzle 6 by the needle portion 81 can be prevented. In order to make the guiding easier, the opening 62 of the adsorption nozzle 6 may be tapered.

In the needle portion 81 pulled out from the adsorption nozzle 6, there is a case where the foreign matter 63 jammed in the adsorption nozzle 6 is adhered. However, as shown in FIG. 5, the air blower 82 blows air toward the upper end of the needle portion 81, thereby blowing away the foreign matter 63. That is, the blower 82 is only required to be arranged to blow air into the range of the adsorption nozzle 6. Further, the needle portion 81 is grounded to remove static electricity, and the foreign matter 63 is easily removed by the blower 82.

(effect)

As described above, the electronic component conveying apparatus 1 sucks and transports the electronic component by the adsorption nozzle 6 between the supply unit 2 that supplies the electronic component D and the storage unit 3 that houses the electronic component D supplied from the supply unit 2. Further, the needle portion 81 is provided in one portion of the path 11 in which the adsorption nozzle 6 is temporarily stopped after the electronic member D is detached, and is inserted into the opening 62 of the adsorption nozzle 6.

Thereby, the reliability of the deposit in the adsorption nozzle 6 is removed. The increase prevents the electronic component from falling down during transportation. Further, it is not necessary to disable the adsorption nozzle 6 whose suction force is lowered by the occurrence of deposits, and the transfer efficiency of the electronic component is improved, and the production speed of the electronic component is increased.

In particular, the opening diameter of the adsorption nozzle 6 must be set to be within the range of the electronic member, but if the opening diameter is made to fit an electronic member including 0402 size or less of 0402 size, the opening diameter becomes extremely fine, resulting in the adsorption nozzle 6 Since the piping resistance is increased, the air flow rate in the piping is limited, and the foreign matter 63 is hard to be ejected from the adsorption nozzle 6. However, in the electronic component conveying apparatus 1, in order to convey the small electronic component as described above, even if the opening diameter of the adsorption nozzle 6 is small, the foreign matter 63 can be surely removed.

(Modification 1)

In the first embodiment, in order to insert the needle portion 81 into the adsorption nozzle 6, the adsorption nozzle 6 is lowered toward the needle portion 81. FIG. 6 is a side view showing the clogging removing unit 8 of the modification. As shown in Fig. 6, the needle portion 81 is fixed to a sleeve body 83a. The sleeve body 83a includes a cylindrical cam follower 83b that extends in parallel with the plane of the turntable 51. The cam follower 83b abuts against the circumferential surface of the cam 83c. The cam 83c extends the cam shaft in parallel with the plane of the turntable 51, and connects the cam shaft coaxially with the motor shaft of the motor 83d. The circumferential surface of the cam 83c serves as a cam surface, and the cam surface has a narrow diameter section and a wide diameter section.

The cam follower 83b is placed along with the rotation of the motor 83d The cam 83c is driven in the wide diameter section to push the sleeve body 83a upward. Thereby, the needle portion 81 moves toward the adsorption nozzle 6. As described above, the adsorption nozzle 6 and the needle portion 81 may be connected or separated as long as they are relatively connected, and the needle portion 81 may be inserted into the adsorption nozzle 6 side and inserted.

In the modified example, the insertion movement of the needle portion 81 to the adsorption nozzle 6 can be made independent of the movement of the adsorption nozzle 6 along the path 11. FIG. 7 shows the movement trajectory of the adsorption nozzle 6 and the needle portion 81. As shown in Fig. 7, the needle portion 81 can be raised immediately before the adsorption nozzle 6 reaches the clogging removal unit 8, and the needle portion 81 can be inserted into the adsorption almost at the same timing as when the adsorption nozzle 6 reaches the clogging removal unit 8. Nozzle 6. Therefore, the time required for the foreign matter removing process of the clogging removing unit 8 can be minimized, so that the transportation or other processing of the electronic component D is not affected.

(Second embodiment)

Next, the electronic component conveying apparatus 1 of the second embodiment will be described in detail with reference to the drawings. The same configurations and the same functions as those in the first embodiment are denoted by the same reference numerals, and the detailed description thereof will be omitted.

(constitution)

As shown in FIG. 8, the electronic component conveying device 1 includes a clogging detecting portion 9 on the path 11. The clogging detecting unit 9 is provided in the same empty section as the clogging removing unit 8. In the empty section, the supply unit 2 is disposed at the most downstream of the moving direction of the adsorption nozzle 6, and a clogging removal unit is disposed upstream thereof 8. The clogging detecting unit 9 is disposed on the upstream side and the downstream side of the clogging removing unit 8. The clogging detecting unit 9 is not limited to the vacant stop position 11a at which the adsorption nozzle 6 is stopped, as long as it can be installed on the movement trajectory of the empty adsorption nozzle 6.

The clogging detecting unit 9 detects the foreign matter 63 in the adsorption nozzle 6. When it is disposed on the upstream side in the moving direction of the adsorption nozzle 6 from the clogging removal unit 8, the foreign matter 63 of the adsorption nozzle 6 can be removed by the clogging removal unit 8 after detecting the foreign matter 63 in the adsorption nozzle 6. As shown in FIG. 9, the clogging detecting unit 9 includes a camera 91, a light source 92, an image analyzing unit 93, and a control unit 94.

The trajectory of the camera 91 moving toward the opening 62 of the adsorption nozzle 6 images an image from below. The camera 91 images the opening 62 of the adsorption nozzle 6 when the adsorption nozzle 6 passes directly above. The light source 92 is irradiated toward the opening 62 of the adsorption nozzle 6 and is disposed below the movement locus of the adsorption nozzle 6 in the same manner as the camera 91.

The video analysis unit 93 is a so-called computer that analyzes the image captured by the camera 91 and determines whether or not a jam has occurred in the opening 62. For example, as shown in FIG. 10(a), the edge of the opening object in the image is illuminated by the light source 92, and in a state where there is no clogging, a ring 64 having a high brightness surrounds the image of the circular dark portion. On the other hand, as shown in FIG. 10(b), when the foreign matter 63 is present in the opening 62, the foreign matter 63 is also irradiated by the light source 92, and the brightness is improved. Thus, within the image, the shape of the dark portion surrounded by the ring 64 is shaped from a circle. The image analyzing unit 93 determines the shape of the dark portion to determine whether or not the clogging of the adsorption nozzle 6 is present.

The control unit 94 is a so-called computer. When the image analyzing unit 93 determines that there is clogging, when the clogging adsorption nozzle 6 reaches the clogging removal unit 8, the advance/retract drive unit 7 or the needle unit 81 for the adsorption nozzle 6 is caused. The motor 83d is driven to insert the needle portion 81 into the adsorption nozzle 6.

The image analysis unit 93 and the control unit 94 can also install and use a program for analyzing and a program for removing jams on a computer that controls the entire electronic component transport device 1. In other words, the computer can simultaneously control the direct drive motor 52, the suction and suction release of the adsorption nozzle 6, and the control of the advance/retract drive unit 7, the supply unit 2, the storage unit 3, the positioning unit 41, and the electrical characteristics measurement. The control of the unit 42 and the visual inspection unit 43 functions as the image analysis unit 93 and the control unit 94.

Furthermore, the presence or absence of foreign matter removal can be analyzed by providing the camera 91 at a position further downstream than the clogging removal unit 8. Therefore, the clogging detecting unit 9 may be provided at a position upstream of the clogging removing unit 8 for confirming clogging, or may be provided at a position further downstream than the clogging removing unit 8 for judging whether or not the foreign matter is removed. Can be set in the two locations.

When the clogging detecting unit 9 is disposed downstream of the clogging removing unit 8 and it is determined that the foreign matter removal has failed, the control unit 94 may reverse the turret 51 by one pitch to perform foreign matter removal again. Alternatively, it may be set such that the adsorption nozzle 6 that fails the clogging removal deactivates the turntable 51 for one turn, and when it reaches the clogging removal unit 8 again, Perform foreign matter removal.

(effect)

FIG. 11 is a timing chart showing an operation sequence of the clogging removal unit 8. It is assumed that the camera 91 and the clogging removing unit 8 that block the detecting unit 9 are adjacent to each other in this order from the upstream side. As shown in FIG. 11, in the state in which the foreign matter 63 is not detected by the analysis unit in each period in which the turntable 51 is stopped, the drive of the jam removal unit 8 in the next period is not performed. On the other hand, when the analysis unit detects the foreign matter 63, the clogging removal unit 8 is driven to remove the foreign matter 63 in the next period, that is, during the period in which the clogging adsorption nozzle 6 reaches the clogging removal unit 8.

(effect)

As described above, the trajectory detecting unit 9 that detects the clogging of the adsorption nozzle 6 is included in the movement trajectory of the adsorption nozzle 6 after the electronic member D is detached. Thereby, after the clogging of the adsorption nozzle 6 is confirmed, the clogging removing unit 8 can be driven, and the clogging removing unit 8 is not driven until the adsorption nozzle 6 is not clogged, so that the abrasion of the needle portion 81 is suppressed, and the needle portion 81 is suppressed. The frequency of replacement operations is reduced, and the production efficiency of the electronic component D is improved. Further, it is possible to confirm the occurrence of the foreign matter removal by the adsorption nozzle 6, and it is possible to further prevent the falling failure of the electronic component D during transportation.

(Modification 2)

The clogging can also be detected by detecting the amount of suction that is attracted to the adsorption nozzle 6. FIG. 12 is a side view showing a configuration of a clogging detecting unit 9 according to a modification. As shown in FIG. 12, the clogging detecting unit 9 includes a contact portion 95, a flow meter 96, a flow rate analyzing unit 97, and a control unit 94. The contact portion 95 is provided at the stop position 11a of the adsorption nozzle 6, and faces the opening 62 of the adsorption nozzle 6. The contact portion 95 has an opening on the upper surface and is in contact with the descending adsorption nozzle 6. Inside the contact portion 95, a hollow tube having an opening at one end is inserted.

When the contact portion 95 comes into contact with the adsorption nozzle 6, the inside of the adsorption nozzle 6 communicates with the inside of the contact portion 95, and the suction force of the adsorption nozzle 6 reaches the inside of the contact portion 95, thereby generating a flow of air in the contact portion 95. A flow meter 96 is provided in the hollow tube of the contact portion 95. The flow meter 96 is a sensor that measures the flow rate inside the contact portion 95. For example, the flow meter 96 is, for example, a pitot tube that faces the upstream side when the adsorption nozzle 6 is on the downstream side.

The flow rate analysis unit 97 stores a threshold value of the flow rate in advance, and compares the flow rate detected by the flow meter 96 with the threshold value. If the result of the comparison is that the flow rate is lower than the threshold value, it is determined that the adsorption nozzle 6 has foreign matter. When the flow rate analysis unit 97 determines that there is a foreign matter, the control unit 94 drives the clogging removal unit 8.

As described above, the clogging detecting unit 9 may include a contact portion 95 that contacts the opening 62 of the adsorption nozzle 6, and a flow meter 96 that measures the flow rate in the contact portion 95, and that passes through the adsorption nozzle 6. The drop in attraction is to determine the blockage.

(Other embodiments)

The embodiments of the present invention have been described above, but the embodiments are presented as examples, and are not intended to limit the scope of the invention. The present invention may be embodied in a variety of other forms, and various omissions, substitutions and changes may be made without departing from the scope of the invention. Further, the embodiment and its modifications are included in the scope and spirit of the invention, and are included in the scope equivalent to the invention described in the claims.

For example, in the present embodiment, the annular path 11 is taken as an example. However, the transport mechanism of the electronic component D may be a linear transport method, or one of the plurality of turntables 51 may be configured as one path 11 . Further, the various processing units are not limited to the above-described types, and may be replaced, changed in number, and changed in the order of arrangement.

As the supply unit 2 and the storage unit 3, in addition to the feeder, a wafer holder in which a wafer to which the cut electronic component D is attached may be held, and electrons may be arranged in an array. The tray of the member D is an XY stage in which the plane moves, and the like. Further, the supply unit 2 may be a tape feeder in which a carrier tape in which the electronic component D is housed is attached, and the bag of the carrier tape is sequentially sent out to the intersection with the path 11.

When the supply unit 2 and the storage unit 3 are wafer holders, the switching device may be interposed between the wafer holder and the path 11. The switching device picks up the electronic component D from the wafer holder and turns to the adsorption nozzle 6 rotary pickup, etc. The rotary pickup is a device that reciprocates the adsorption nozzle such that the wafer holder faces the adsorption nozzle 6 on the path 11.

The timing at which the needle portion 81 is inserted into the adsorption nozzle 6 is described as the number of times the adsorption nozzle 6 reaches the clogging removal unit 8 and the time at which the clogging is detected. However, the same adsorption nozzle 6 may be rotated around the path 11. The number of times is repeated, and the number of times of arrival to the block removal unit 8 is repeated.

6‧‧‧Adsorption nozzle

7‧‧‧Advance and Rescue Drive Department

8‧‧‧Cut removal unit

12‧‧‧ 台台

51‧‧‧ turntable

62‧‧‧ openings

71‧‧‧ rods

81‧‧‧needle

82‧‧‧Blowers

83‧‧‧Base

Claims (8)

An electronic component conveying apparatus comprising: a supply unit that supplies an electronic component; an accommodating unit that accommodates the electronic component supplied from the supply unit; and an adsorption nozzle that sucks and holds the electronic component from the supply unit while a path including the supply unit and the accommodating portion is moved, and the electronic component is detached from the accommodating portion; and the needle portion is provided at a portion of the path in which the adsorption nozzle is temporarily stopped after the electronic component is detached. And inserted into the opening of the aforementioned adsorption nozzle. The electronic component conveying apparatus according to claim 1, further comprising: a detecting unit that is provided on a movement trajectory on which the adsorption nozzle moves after the electronic member is detached, and detects clogging of the adsorption nozzle. The electronic component conveying apparatus according to the second aspect of the invention, wherein the detecting unit includes: a camera that images an opening of the adsorption nozzle; and an analysis unit that analyzes an image captured by the camera. The electronic component conveying apparatus according to the second aspect of the invention, wherein the detecting unit includes: a contact portion that is in contact with an opening of the adsorption nozzle; The measuring unit measures the flow rate in the contact portion. The electronic component conveying apparatus according to any one of claims 1 to 4, further comprising: a nozzle lifting portion provided at an installation portion of the needle portion, and the adsorption nozzle stopped at the installation portion facing the needle The department carries out the lifting. The electronic component conveying apparatus according to any one of claims 1 to 4, further comprising: a needle lifting and lowering portion provided at an installation portion of the needle portion, and stopping the needle portion toward the suction at the installation portion The nozzle is lifted and lowered. The electronic component conveying apparatus according to any one of claims 1 to 4, further comprising: a blower provided at an installation portion of the needle portion, and blowing air to the needle portion pulled out from the adsorption nozzle. The electronic component conveying apparatus according to any one of claims 1 to 4, wherein the electronic component is equal to or smaller than a size of 0.6 mm × 0.3 mm having a size of 0.4 mm × 0.2 mm, and the front end of the adsorption nozzle has The diameter of the opening in the plane of the aforementioned electronic component.