TWI568039B - 用以驅動一壓電負載之系統及製造其之方法 - Google Patents

用以驅動一壓電負載之系統及製造其之方法 Download PDF

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Publication number
TWI568039B
TWI568039B TW102110559A TW102110559A TWI568039B TW I568039 B TWI568039 B TW I568039B TW 102110559 A TW102110559 A TW 102110559A TW 102110559 A TW102110559 A TW 102110559A TW I568039 B TWI568039 B TW I568039B
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TW
Taiwan
Prior art keywords
voltage
converter
bidirectional
control
coupled
Prior art date
Application number
TW102110559A
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English (en)
Chinese (zh)
Other versions
TW201403898A (zh
Inventor
約翰 史丹利 葛萊瑟
瑞曼紐傑姆 雷瑪巴哈德倫
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奇異電器公司
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Publication of TW201403898A publication Critical patent/TW201403898A/zh
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Publication of TWI568039B publication Critical patent/TWI568039B/zh

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33576—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements having at least one active switching element at the secondary side of an isolation transformer
    • H02M3/33584—Bidirectional converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/0077—Plural converter units whose outputs are connected in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Inverter Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
TW102110559A 2012-04-05 2013-03-25 用以驅動一壓電負載之系統及製造其之方法 TWI568039B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/440,110 US8896182B2 (en) 2012-04-05 2012-04-05 System for driving a piezoelectric load and method of making same

Publications (2)

Publication Number Publication Date
TW201403898A TW201403898A (zh) 2014-01-16
TWI568039B true TWI568039B (zh) 2017-01-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW102110559A TWI568039B (zh) 2012-04-05 2013-03-25 用以驅動一壓電負載之系統及製造其之方法

Country Status (6)

Country Link
US (2) US8896182B2 (enExample)
EP (1) EP2648324A3 (enExample)
JP (1) JP6183886B2 (enExample)
KR (1) KR102046791B1 (enExample)
CN (1) CN103368456B (enExample)
TW (1) TWI568039B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8896182B2 (en) * 2012-04-05 2014-11-25 General Electric Corporation System for driving a piezoelectric load and method of making same
US8958217B2 (en) 2012-06-15 2015-02-17 General Electric Company System for driving a piezoelectric load and method of making same
EP2969235A4 (en) 2013-03-14 2016-11-16 Gen Electric LOW RESONANCE ACOUSTIC SYNTHETIC JET STRUCTURE
KR20150128935A (ko) 2013-03-14 2015-11-18 제네럴 일렉트릭 컴퍼니 합성 제트 서스펜션 구조체
DE102013217102B4 (de) * 2013-08-28 2023-03-16 Robert Bosch Gmbh Regler zur Ansteuerung eines mikromechanischen Aktors, Ansteuerungssystem zur Ansteuerung eines mikromechanischen Aktors, Mikrospiegelsystem und Verfahren zum Ansteuern eines mikromechanischen Aktors
KR20150077895A (ko) * 2013-12-30 2015-07-08 삼성전기주식회사 피에조 구동 장치 및 방법, 그를 이용한 피에조 시스템
TWI532305B (zh) * 2014-06-20 2016-05-01 Asian Power Devices Inc Parallel Resistive Resonant Converter Circuit with Current Sharing Function
US9879661B2 (en) 2014-08-29 2018-01-30 General Electric Company Vibrational fluid mover jet with active damping mechanism
CN104320017A (zh) * 2014-10-28 2015-01-28 中国科学院长春光学精密机械与物理研究所 压电陶瓷驱动装置
US9513319B1 (en) * 2014-11-25 2016-12-06 Cypress Semiconductor Corporation Systems, methods, and devices for energy and power metering
CN104601040B (zh) * 2014-12-26 2017-01-04 北京理工大学 一种开关线性混合式压电陶瓷驱动电路
DE102016205375B3 (de) * 2016-03-31 2017-06-08 Continental Automotive Gmbh Schaltungsanordnung zur Ladung und Entladung eines Piezo-Aktors
TWI606686B (zh) * 2016-10-13 2017-11-21 研能科技股份有限公司 壓電泵浦之驅動系統
TWI605681B (zh) * 2016-10-13 2017-11-11 研能科技股份有限公司 壓電泵浦之驅動系統
EP3566290B1 (en) * 2017-01-24 2023-04-05 Huawei Digital Power Technologies Co., Ltd. Power supply and power supply method with circulation current compensation
US12000704B2 (en) 2018-10-15 2024-06-04 Nokia Technologies Oy Apparatus and method for processing a fluid zone
TWI697200B (zh) * 2019-04-03 2020-06-21 研能科技股份有限公司 微型壓電泵模組
US11290015B2 (en) 2019-12-10 2022-03-29 xMEMS Labs, Inc. Driving circuit with energy recycle capability
US11133784B2 (en) * 2019-12-10 2021-09-28 xMEMS Labs, Inc. Method of driving circuit with energy recycle capability
DE102020205044A1 (de) 2020-04-21 2021-10-21 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
CN111654187B (zh) * 2020-06-09 2021-12-14 矽力杰半导体技术(杭州)有限公司 压电驱动电路和压电驱动方法
US11336182B2 (en) 2020-07-19 2022-05-17 xMEMS Labs, Inc. Driving circuit with energy recycle capability
DE102022208231B3 (de) 2022-08-08 2023-06-07 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
TWI866221B (zh) * 2023-05-19 2024-12-11 正修學校財團法人正修科技大學 雙晶片型壓電變壓器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479062A (en) * 1992-08-04 1995-12-26 Fujitsu Limited Piezo actuator driving circuit
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
US20030111933A1 (en) * 2001-12-19 2003-06-19 Gallmeyer Christopher F. Method and apparatus for exciting a piezoelectric material
US20030164658A1 (en) * 2002-03-04 2003-09-04 Cepheid Method and apparatus for controlling ultrasonic transducer

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3140237B2 (ja) * 1993-02-09 2001-03-05 オリンパス光学工業株式会社 超音波モータ駆動回路
US6385235B1 (en) * 1997-04-22 2002-05-07 Silicon Laboratories, Inc. Direct digital access arrangement circuitry and method for connecting to phone lines
DE19961068C1 (de) * 1999-12-17 2001-01-25 Daimler Chrysler Ag Piezoelektrisches Aktorsystem
US6556462B1 (en) * 2002-06-28 2003-04-29 General Electric Company High power factor converter with a boost circuit having continuous/discontinuous modes
DE10248677B4 (de) * 2002-10-18 2011-12-08 Robert Bosch Gmbh Schaltungsanordnung zur Auswertung und/oder Ansteuerung von Schallwandlern sowie Ultraschallsensor mit einer solchen Schaltungsanordnung
US7388247B1 (en) * 2003-05-28 2008-06-17 The United States Of America As Represented By The Secretary Of The Navy High precision microelectromechanical capacitor with programmable voltage source
JP2005253230A (ja) * 2004-03-05 2005-09-15 Canon Inc 周波数制御回路及び振動型駆動装置
US20060008075A1 (en) * 2004-07-07 2006-01-12 Silicon Laboratories Inc. Direct digital access arrangement circuitry and method for connecting DSL circuitry to phone lines
JP4075884B2 (ja) * 2004-11-05 2008-04-16 株式会社デンソー 電荷蓄積素子の電力制御回路
JP4765405B2 (ja) * 2005-05-30 2011-09-07 株式会社ニコン 超音波モータ駆動装置
US8023296B2 (en) 2007-09-06 2011-09-20 General Electric Company High voltage, high speed, high pulse repetition rate pulse generator
US7733171B2 (en) * 2007-12-31 2010-06-08 Synopsys, Inc. Class D amplifier having PWM circuit with look-up table
EP2245433A4 (en) * 2008-02-21 2011-05-18 Luna Innovations Inc HIGH-PRECISION WAVELENGTH MEASUREMENT AND CONTROL OF A TUNABLE LASER
CN101257273B (zh) * 2008-03-07 2010-11-24 张志贤 一种由二次锂电池组供电的直流电机驱动装置
US7929325B2 (en) 2008-05-27 2011-04-19 General Electric Company High efficiency, multi-source photovoltaic inverter
US8023297B2 (en) 2008-06-27 2011-09-20 General Electric Company High efficiency photovoltaic inverter
EP2230027B1 (fr) * 2009-03-16 2012-08-08 Tip Top Tips Sàrl Générateur pour transducteur piézoélectrique
US7915944B2 (en) 2009-04-27 2011-03-29 General Electric Company Gate drive circuitry for non-isolated gate semiconductor devices
US7924580B2 (en) 2009-08-28 2011-04-12 General Electric Company Switching inverters and converters for power conversion
US8896182B2 (en) * 2012-04-05 2014-11-25 General Electric Corporation System for driving a piezoelectric load and method of making same
US8958217B2 (en) 2012-06-15 2015-02-17 General Electric Company System for driving a piezoelectric load and method of making same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479062A (en) * 1992-08-04 1995-12-26 Fujitsu Limited Piezo actuator driving circuit
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
US20030111933A1 (en) * 2001-12-19 2003-06-19 Gallmeyer Christopher F. Method and apparatus for exciting a piezoelectric material
US20030164658A1 (en) * 2002-03-04 2003-09-04 Cepheid Method and apparatus for controlling ultrasonic transducer

Also Published As

Publication number Publication date
JP6183886B2 (ja) 2017-08-23
TW201403898A (zh) 2014-01-16
US20130264909A1 (en) 2013-10-10
EP2648324A3 (en) 2018-04-04
JP2013220012A (ja) 2013-10-24
CN103368456A (zh) 2013-10-23
US8896182B2 (en) 2014-11-25
KR102046791B1 (ko) 2019-11-20
CN103368456B (zh) 2018-02-09
US20150022056A1 (en) 2015-01-22
EP2648324A2 (en) 2013-10-09
KR20130113387A (ko) 2013-10-15
US9537413B2 (en) 2017-01-03

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