KR102046791B1 - 압전 부하 구동 시스템 및 그 제조 방법 - Google Patents

압전 부하 구동 시스템 및 그 제조 방법 Download PDF

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Publication number
KR102046791B1
KR102046791B1 KR1020130037000A KR20130037000A KR102046791B1 KR 102046791 B1 KR102046791 B1 KR 102046791B1 KR 1020130037000 A KR1020130037000 A KR 1020130037000A KR 20130037000 A KR20130037000 A KR 20130037000A KR 102046791 B1 KR102046791 B1 KR 102046791B1
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South Korea
Prior art keywords
voltage
converter
control signal
bidirectional
control
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Expired - Fee Related
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KR1020130037000A
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English (en)
Korean (ko)
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KR20130113387A (ko
Inventor
존 스탠리 글래저
라마누잠 라마바드란
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제너럴 일렉트릭 캄파니
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33576—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements having at least one active switching element at the secondary side of an isolation transformer
    • H02M3/33584—Bidirectional converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/0077—Plural converter units whose outputs are connected in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Inverter Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020130037000A 2012-04-05 2013-04-04 압전 부하 구동 시스템 및 그 제조 방법 Expired - Fee Related KR102046791B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/440,110 2012-04-05
US13/440,110 US8896182B2 (en) 2012-04-05 2012-04-05 System for driving a piezoelectric load and method of making same

Publications (2)

Publication Number Publication Date
KR20130113387A KR20130113387A (ko) 2013-10-15
KR102046791B1 true KR102046791B1 (ko) 2019-11-20

Family

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KR1020130037000A Expired - Fee Related KR102046791B1 (ko) 2012-04-05 2013-04-04 압전 부하 구동 시스템 및 그 제조 방법

Country Status (6)

Country Link
US (2) US8896182B2 (enExample)
EP (1) EP2648324A3 (enExample)
JP (1) JP6183886B2 (enExample)
KR (1) KR102046791B1 (enExample)
CN (1) CN103368456B (enExample)
TW (1) TWI568039B (enExample)

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US8896182B2 (en) * 2012-04-05 2014-11-25 General Electric Corporation System for driving a piezoelectric load and method of making same
US8958217B2 (en) 2012-06-15 2015-02-17 General Electric Company System for driving a piezoelectric load and method of making same
EP2969235A4 (en) 2013-03-14 2016-11-16 Gen Electric LOW RESONANCE ACOUSTIC SYNTHETIC JET STRUCTURE
KR20150128935A (ko) 2013-03-14 2015-11-18 제네럴 일렉트릭 컴퍼니 합성 제트 서스펜션 구조체
DE102013217102B4 (de) * 2013-08-28 2023-03-16 Robert Bosch Gmbh Regler zur Ansteuerung eines mikromechanischen Aktors, Ansteuerungssystem zur Ansteuerung eines mikromechanischen Aktors, Mikrospiegelsystem und Verfahren zum Ansteuern eines mikromechanischen Aktors
KR20150077895A (ko) * 2013-12-30 2015-07-08 삼성전기주식회사 피에조 구동 장치 및 방법, 그를 이용한 피에조 시스템
TWI532305B (zh) * 2014-06-20 2016-05-01 Asian Power Devices Inc Parallel Resistive Resonant Converter Circuit with Current Sharing Function
US9879661B2 (en) 2014-08-29 2018-01-30 General Electric Company Vibrational fluid mover jet with active damping mechanism
CN104320017A (zh) * 2014-10-28 2015-01-28 中国科学院长春光学精密机械与物理研究所 压电陶瓷驱动装置
US9513319B1 (en) * 2014-11-25 2016-12-06 Cypress Semiconductor Corporation Systems, methods, and devices for energy and power metering
CN104601040B (zh) * 2014-12-26 2017-01-04 北京理工大学 一种开关线性混合式压电陶瓷驱动电路
DE102016205375B3 (de) * 2016-03-31 2017-06-08 Continental Automotive Gmbh Schaltungsanordnung zur Ladung und Entladung eines Piezo-Aktors
TWI606686B (zh) * 2016-10-13 2017-11-21 研能科技股份有限公司 壓電泵浦之驅動系統
TWI605681B (zh) * 2016-10-13 2017-11-11 研能科技股份有限公司 壓電泵浦之驅動系統
EP3566290B1 (en) * 2017-01-24 2023-04-05 Huawei Digital Power Technologies Co., Ltd. Power supply and power supply method with circulation current compensation
US12000704B2 (en) 2018-10-15 2024-06-04 Nokia Technologies Oy Apparatus and method for processing a fluid zone
TWI697200B (zh) * 2019-04-03 2020-06-21 研能科技股份有限公司 微型壓電泵模組
US11290015B2 (en) 2019-12-10 2022-03-29 xMEMS Labs, Inc. Driving circuit with energy recycle capability
US11133784B2 (en) * 2019-12-10 2021-09-28 xMEMS Labs, Inc. Method of driving circuit with energy recycle capability
DE102020205044A1 (de) 2020-04-21 2021-10-21 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
CN111654187B (zh) * 2020-06-09 2021-12-14 矽力杰半导体技术(杭州)有限公司 压电驱动电路和压电驱动方法
US11336182B2 (en) 2020-07-19 2022-05-17 xMEMS Labs, Inc. Driving circuit with energy recycle capability
DE102022208231B3 (de) 2022-08-08 2023-06-07 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
TWI866221B (zh) * 2023-05-19 2024-12-11 正修學校財團法人正修科技大學 雙晶片型壓電變壓器

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JP2010220466A (ja) 2009-03-16 2010-09-30 Tip Top Tips Sarl 圧電トランスデューサ用の発電器

Also Published As

Publication number Publication date
JP6183886B2 (ja) 2017-08-23
TW201403898A (zh) 2014-01-16
US20130264909A1 (en) 2013-10-10
EP2648324A3 (en) 2018-04-04
JP2013220012A (ja) 2013-10-24
CN103368456A (zh) 2013-10-23
US8896182B2 (en) 2014-11-25
CN103368456B (zh) 2018-02-09
US20150022056A1 (en) 2015-01-22
EP2648324A2 (en) 2013-10-09
KR20130113387A (ko) 2013-10-15
TWI568039B (zh) 2017-01-21
US9537413B2 (en) 2017-01-03

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