JP6183886B2 - 圧電負荷を駆動するためのシステム及びそれを製作する方法 - Google Patents

圧電負荷を駆動するためのシステム及びそれを製作する方法 Download PDF

Info

Publication number
JP6183886B2
JP6183886B2 JP2013077309A JP2013077309A JP6183886B2 JP 6183886 B2 JP6183886 B2 JP 6183886B2 JP 2013077309 A JP2013077309 A JP 2013077309A JP 2013077309 A JP2013077309 A JP 2013077309A JP 6183886 B2 JP6183886 B2 JP 6183886B2
Authority
JP
Japan
Prior art keywords
voltage
converter
bidirectional
coupled
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013077309A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013220012A (ja
JP2013220012A5 (enExample
Inventor
ジョン・スタンレー・グレイサー
ラマヌジャム・ラマバドラン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2013220012A publication Critical patent/JP2013220012A/ja
Publication of JP2013220012A5 publication Critical patent/JP2013220012A5/ja
Application granted granted Critical
Publication of JP6183886B2 publication Critical patent/JP6183886B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33576—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements having at least one active switching element at the secondary side of an isolation transformer
    • H02M3/33584—Bidirectional converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/0077—Plural converter units whose outputs are connected in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Inverter Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2013077309A 2012-04-05 2013-04-03 圧電負荷を駆動するためのシステム及びそれを製作する方法 Expired - Fee Related JP6183886B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/440,110 2012-04-05
US13/440,110 US8896182B2 (en) 2012-04-05 2012-04-05 System for driving a piezoelectric load and method of making same

Publications (3)

Publication Number Publication Date
JP2013220012A JP2013220012A (ja) 2013-10-24
JP2013220012A5 JP2013220012A5 (enExample) 2016-05-19
JP6183886B2 true JP6183886B2 (ja) 2017-08-23

Family

ID=47997152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013077309A Expired - Fee Related JP6183886B2 (ja) 2012-04-05 2013-04-03 圧電負荷を駆動するためのシステム及びそれを製作する方法

Country Status (6)

Country Link
US (2) US8896182B2 (enExample)
EP (1) EP2648324A3 (enExample)
JP (1) JP6183886B2 (enExample)
KR (1) KR102046791B1 (enExample)
CN (1) CN103368456B (enExample)
TW (1) TWI568039B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8896182B2 (en) * 2012-04-05 2014-11-25 General Electric Corporation System for driving a piezoelectric load and method of making same
US8958217B2 (en) 2012-06-15 2015-02-17 General Electric Company System for driving a piezoelectric load and method of making same
EP2969235A4 (en) 2013-03-14 2016-11-16 Gen Electric LOW RESONANCE ACOUSTIC SYNTHETIC JET STRUCTURE
KR20150128935A (ko) 2013-03-14 2015-11-18 제네럴 일렉트릭 컴퍼니 합성 제트 서스펜션 구조체
DE102013217102B4 (de) * 2013-08-28 2023-03-16 Robert Bosch Gmbh Regler zur Ansteuerung eines mikromechanischen Aktors, Ansteuerungssystem zur Ansteuerung eines mikromechanischen Aktors, Mikrospiegelsystem und Verfahren zum Ansteuern eines mikromechanischen Aktors
KR20150077895A (ko) * 2013-12-30 2015-07-08 삼성전기주식회사 피에조 구동 장치 및 방법, 그를 이용한 피에조 시스템
TWI532305B (zh) * 2014-06-20 2016-05-01 Asian Power Devices Inc Parallel Resistive Resonant Converter Circuit with Current Sharing Function
US9879661B2 (en) 2014-08-29 2018-01-30 General Electric Company Vibrational fluid mover jet with active damping mechanism
CN104320017A (zh) * 2014-10-28 2015-01-28 中国科学院长春光学精密机械与物理研究所 压电陶瓷驱动装置
US9513319B1 (en) * 2014-11-25 2016-12-06 Cypress Semiconductor Corporation Systems, methods, and devices for energy and power metering
CN104601040B (zh) * 2014-12-26 2017-01-04 北京理工大学 一种开关线性混合式压电陶瓷驱动电路
DE102016205375B3 (de) * 2016-03-31 2017-06-08 Continental Automotive Gmbh Schaltungsanordnung zur Ladung und Entladung eines Piezo-Aktors
TWI606686B (zh) * 2016-10-13 2017-11-21 研能科技股份有限公司 壓電泵浦之驅動系統
TWI605681B (zh) * 2016-10-13 2017-11-11 研能科技股份有限公司 壓電泵浦之驅動系統
EP3566290B1 (en) * 2017-01-24 2023-04-05 Huawei Digital Power Technologies Co., Ltd. Power supply and power supply method with circulation current compensation
US12000704B2 (en) 2018-10-15 2024-06-04 Nokia Technologies Oy Apparatus and method for processing a fluid zone
TWI697200B (zh) * 2019-04-03 2020-06-21 研能科技股份有限公司 微型壓電泵模組
US11290015B2 (en) 2019-12-10 2022-03-29 xMEMS Labs, Inc. Driving circuit with energy recycle capability
US11133784B2 (en) * 2019-12-10 2021-09-28 xMEMS Labs, Inc. Method of driving circuit with energy recycle capability
DE102020205044A1 (de) 2020-04-21 2021-10-21 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
CN111654187B (zh) * 2020-06-09 2021-12-14 矽力杰半导体技术(杭州)有限公司 压电驱动电路和压电驱动方法
US11336182B2 (en) 2020-07-19 2022-05-17 xMEMS Labs, Inc. Driving circuit with energy recycle capability
DE102022208231B3 (de) 2022-08-08 2023-06-07 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
TWI866221B (zh) * 2023-05-19 2024-12-11 正修學校財團法人正修科技大學 雙晶片型壓電變壓器

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662585A (ja) * 1992-08-04 1994-03-04 Fujitsu Ltd 圧電素子駆動回路
JP3140237B2 (ja) * 1993-02-09 2001-03-05 オリンパス光学工業株式会社 超音波モータ駆動回路
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
US6385235B1 (en) * 1997-04-22 2002-05-07 Silicon Laboratories, Inc. Direct digital access arrangement circuitry and method for connecting to phone lines
DE19961068C1 (de) * 1999-12-17 2001-01-25 Daimler Chrysler Ag Piezoelektrisches Aktorsystem
US6794795B2 (en) * 2001-12-19 2004-09-21 Caterpillar Inc Method and apparatus for exciting a piezoelectric material
US6819027B2 (en) * 2002-03-04 2004-11-16 Cepheid Method and apparatus for controlling ultrasonic transducer
US6556462B1 (en) * 2002-06-28 2003-04-29 General Electric Company High power factor converter with a boost circuit having continuous/discontinuous modes
DE10248677B4 (de) * 2002-10-18 2011-12-08 Robert Bosch Gmbh Schaltungsanordnung zur Auswertung und/oder Ansteuerung von Schallwandlern sowie Ultraschallsensor mit einer solchen Schaltungsanordnung
US7388247B1 (en) * 2003-05-28 2008-06-17 The United States Of America As Represented By The Secretary Of The Navy High precision microelectromechanical capacitor with programmable voltage source
JP2005253230A (ja) * 2004-03-05 2005-09-15 Canon Inc 周波数制御回路及び振動型駆動装置
US20060008075A1 (en) * 2004-07-07 2006-01-12 Silicon Laboratories Inc. Direct digital access arrangement circuitry and method for connecting DSL circuitry to phone lines
JP4075884B2 (ja) * 2004-11-05 2008-04-16 株式会社デンソー 電荷蓄積素子の電力制御回路
JP4765405B2 (ja) * 2005-05-30 2011-09-07 株式会社ニコン 超音波モータ駆動装置
US8023296B2 (en) 2007-09-06 2011-09-20 General Electric Company High voltage, high speed, high pulse repetition rate pulse generator
US7733171B2 (en) * 2007-12-31 2010-06-08 Synopsys, Inc. Class D amplifier having PWM circuit with look-up table
EP2245433A4 (en) * 2008-02-21 2011-05-18 Luna Innovations Inc HIGH-PRECISION WAVELENGTH MEASUREMENT AND CONTROL OF A TUNABLE LASER
CN101257273B (zh) * 2008-03-07 2010-11-24 张志贤 一种由二次锂电池组供电的直流电机驱动装置
US7929325B2 (en) 2008-05-27 2011-04-19 General Electric Company High efficiency, multi-source photovoltaic inverter
US8023297B2 (en) 2008-06-27 2011-09-20 General Electric Company High efficiency photovoltaic inverter
EP2230027B1 (fr) * 2009-03-16 2012-08-08 Tip Top Tips Sàrl Générateur pour transducteur piézoélectrique
US7915944B2 (en) 2009-04-27 2011-03-29 General Electric Company Gate drive circuitry for non-isolated gate semiconductor devices
US7924580B2 (en) 2009-08-28 2011-04-12 General Electric Company Switching inverters and converters for power conversion
US8896182B2 (en) * 2012-04-05 2014-11-25 General Electric Corporation System for driving a piezoelectric load and method of making same
US8958217B2 (en) 2012-06-15 2015-02-17 General Electric Company System for driving a piezoelectric load and method of making same

Also Published As

Publication number Publication date
TW201403898A (zh) 2014-01-16
US20130264909A1 (en) 2013-10-10
EP2648324A3 (en) 2018-04-04
JP2013220012A (ja) 2013-10-24
CN103368456A (zh) 2013-10-23
US8896182B2 (en) 2014-11-25
KR102046791B1 (ko) 2019-11-20
CN103368456B (zh) 2018-02-09
US20150022056A1 (en) 2015-01-22
EP2648324A2 (en) 2013-10-09
KR20130113387A (ko) 2013-10-15
TWI568039B (zh) 2017-01-21
US9537413B2 (en) 2017-01-03

Similar Documents

Publication Publication Date Title
JP6183886B2 (ja) 圧電負荷を駆動するためのシステム及びそれを製作する方法
US9537080B2 (en) System for driving a piezoelectric load and method of making same
JP2013220012A5 (enExample)
JP4909412B2 (ja) Ｐｗｍリップル抑制のために交互配置信号を使用する増幅器
US20060006933A1 (en) Self-oscillating switching amplifier
US20130271214A1 (en) Class d amplifiers
JP2006512004A (ja) デジタル信号変調器を用いたデジタル入力信号の変調および信号の分割
KR20130081639A (ko) 초고효율 스위칭 전력 인버터 및 전력 증폭기
JP2018198446A (ja) 直接駆動波形発生装置
JP5551294B2 (ja) オーディオ帯域のノイズ成分が小さい三角波を生成するための方法および装置
CN103780229B (zh) 电容性负载驱动电路以及脉冲激发装置
CN101199111B (zh) 具有脉宽调制rf激励的数字调幅发射器
Ido et al. A digital input controller for audio class-D amplifiers with 100W 0.004% THD+ N and 113dB DR
Li et al. Design of a self-oscillating PWM signal generator with a double integration loop
JP4565355B2 (ja) 交流信号生成装置およびその方法
Tang et al. Adaptive switching vibration control of flexible piezoelectric structure
Ramabhadran et al. A low power consumption driver with low acoustics for piezoelectric synthetic jets
KR101230862B1 (ko) 단일 전원으로 구동되는 멀티레벨 인버터 장치
Joshi et al. Sliding mode controlled half bridge audio amplifier using single power supply
TWI253227B (en) DC-to-AC voltage converting circuit and its controlling method
CN116054763A (zh) 一种电压放大器
TWI222780B (en) DC-AC inverter using Sigma-Delta modulation
JP2023163359A (ja) スイッチング電源装置
KR100952176B1 (ko) 디지털 오디오 증폭장치의 구조
Esslinger et al. Distortions by switching errors in digital power amplifiers using sigma delta coded signals

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160324

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160324

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170207

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170405

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170627

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170720

R150 Certificate of patent or registration of utility model

Ref document number: 6183886

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees