CN103368456B - 用于驱动压电负载的系统和制造其的方法 - Google Patents

用于驱动压电负载的系统和制造其的方法 Download PDF

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Publication number
CN103368456B
CN103368456B CN201310113722.3A CN201310113722A CN103368456B CN 103368456 B CN103368456 B CN 103368456B CN 201310113722 A CN201310113722 A CN 201310113722A CN 103368456 B CN103368456 B CN 103368456B
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CN
China
Prior art keywords
voltage
converter
bidirectional
control
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201310113722.3A
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English (en)
Chinese (zh)
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CN103368456A (zh
Inventor
J.S.格拉泽
R.拉马巴德兰
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General Electric Co
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General Electric Co
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Publication of CN103368456A publication Critical patent/CN103368456A/zh
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Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33576—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements having at least one active switching element at the secondary side of an isolation transformer
    • H02M3/33584—Bidirectional converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/0077—Plural converter units whose outputs are connected in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Inverter Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201310113722.3A 2012-04-05 2013-04-03 用于驱动压电负载的系统和制造其的方法 Expired - Fee Related CN103368456B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/440110 2012-04-05
US13/440,110 US8896182B2 (en) 2012-04-05 2012-04-05 System for driving a piezoelectric load and method of making same

Publications (2)

Publication Number Publication Date
CN103368456A CN103368456A (zh) 2013-10-23
CN103368456B true CN103368456B (zh) 2018-02-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310113722.3A Expired - Fee Related CN103368456B (zh) 2012-04-05 2013-04-03 用于驱动压电负载的系统和制造其的方法

Country Status (6)

Country Link
US (2) US8896182B2 (enExample)
EP (1) EP2648324A3 (enExample)
JP (1) JP6183886B2 (enExample)
KR (1) KR102046791B1 (enExample)
CN (1) CN103368456B (enExample)
TW (1) TWI568039B (enExample)

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US8958217B2 (en) 2012-06-15 2015-02-17 General Electric Company System for driving a piezoelectric load and method of making same
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DE102013217102B4 (de) * 2013-08-28 2023-03-16 Robert Bosch Gmbh Regler zur Ansteuerung eines mikromechanischen Aktors, Ansteuerungssystem zur Ansteuerung eines mikromechanischen Aktors, Mikrospiegelsystem und Verfahren zum Ansteuern eines mikromechanischen Aktors
KR20150077895A (ko) * 2013-12-30 2015-07-08 삼성전기주식회사 피에조 구동 장치 및 방법, 그를 이용한 피에조 시스템
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US9879661B2 (en) 2014-08-29 2018-01-30 General Electric Company Vibrational fluid mover jet with active damping mechanism
CN104320017A (zh) * 2014-10-28 2015-01-28 中国科学院长春光学精密机械与物理研究所 压电陶瓷驱动装置
US9513319B1 (en) * 2014-11-25 2016-12-06 Cypress Semiconductor Corporation Systems, methods, and devices for energy and power metering
CN104601040B (zh) * 2014-12-26 2017-01-04 北京理工大学 一种开关线性混合式压电陶瓷驱动电路
DE102016205375B3 (de) * 2016-03-31 2017-06-08 Continental Automotive Gmbh Schaltungsanordnung zur Ladung und Entladung eines Piezo-Aktors
TWI606686B (zh) * 2016-10-13 2017-11-21 研能科技股份有限公司 壓電泵浦之驅動系統
TWI605681B (zh) * 2016-10-13 2017-11-11 研能科技股份有限公司 壓電泵浦之驅動系統
EP3566290B1 (en) * 2017-01-24 2023-04-05 Huawei Digital Power Technologies Co., Ltd. Power supply and power supply method with circulation current compensation
US12000704B2 (en) 2018-10-15 2024-06-04 Nokia Technologies Oy Apparatus and method for processing a fluid zone
TWI697200B (zh) * 2019-04-03 2020-06-21 研能科技股份有限公司 微型壓電泵模組
US11290015B2 (en) 2019-12-10 2022-03-29 xMEMS Labs, Inc. Driving circuit with energy recycle capability
US11133784B2 (en) * 2019-12-10 2021-09-28 xMEMS Labs, Inc. Method of driving circuit with energy recycle capability
DE102020205044A1 (de) 2020-04-21 2021-10-21 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
CN111654187B (zh) * 2020-06-09 2021-12-14 矽力杰半导体技术(杭州)有限公司 压电驱动电路和压电驱动方法
US11336182B2 (en) 2020-07-19 2022-05-17 xMEMS Labs, Inc. Driving circuit with energy recycle capability
DE102022208231B3 (de) 2022-08-08 2023-06-07 Carl Zeiss Smt Gmbh Ansteuervorrichtung, optisches system und lithographieanlage
TWI866221B (zh) * 2023-05-19 2024-12-11 正修學校財團法人正修科技大學 雙晶片型壓電變壓器

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Also Published As

Publication number Publication date
JP6183886B2 (ja) 2017-08-23
TW201403898A (zh) 2014-01-16
US20130264909A1 (en) 2013-10-10
EP2648324A3 (en) 2018-04-04
JP2013220012A (ja) 2013-10-24
CN103368456A (zh) 2013-10-23
US8896182B2 (en) 2014-11-25
KR102046791B1 (ko) 2019-11-20
US20150022056A1 (en) 2015-01-22
EP2648324A2 (en) 2013-10-09
KR20130113387A (ko) 2013-10-15
TWI568039B (zh) 2017-01-21
US9537413B2 (en) 2017-01-03

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