TWI561452B - Cassette body capable of reducing liquid turbulence when soaking into a liquid - Google Patents

Cassette body capable of reducing liquid turbulence when soaking into a liquid

Info

Publication number
TWI561452B
TWI561452B TW105100094A TW105100094A TWI561452B TW I561452 B TWI561452 B TW I561452B TW 105100094 A TW105100094 A TW 105100094A TW 105100094 A TW105100094 A TW 105100094A TW I561452 B TWI561452 B TW I561452B
Authority
TW
Taiwan
Prior art keywords
liquid
soaking
cassette body
body capable
turbulence
Prior art date
Application number
TW105100094A
Other languages
English (en)
Other versions
TW201704130A (zh
Inventor
Tzu-Chung Lin
Jung-Lung Huang
Chun-Chieh Lu
Original Assignee
Mirle Automation Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mirle Automation Corp filed Critical Mirle Automation Corp
Priority to CN201620065414.7U priority Critical patent/CN205368143U/zh
Priority to CN201610044753.1A priority patent/CN106396424A/zh
Application granted granted Critical
Publication of TWI561452B publication Critical patent/TWI561452B/zh
Publication of TW201704130A publication Critical patent/TW201704130A/zh

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates
TW105100094A 2015-07-27 2016-01-04 Cassette body capable of reducing liquid turbulence when soaking into a liquid TWI561452B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201620065414.7U CN205368143U (zh) 2015-07-27 2016-01-22 可在浸入浸泡液时降低液面扰流的卡匣本体
CN201610044753.1A CN106396424A (zh) 2015-07-27 2016-01-22 可在浸入浸泡液时降低液面扰流的卡匣本体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201562197105P 2015-07-27 2015-07-27

Publications (2)

Publication Number Publication Date
TWI561452B true TWI561452B (en) 2016-12-11
TW201704130A TW201704130A (zh) 2017-02-01

Family

ID=55639413

Family Applications (12)

Application Number Title Priority Date Filing Date
TW104217353U TWM515418U (zh) 2015-07-27 2015-10-30 用來清洗平板構件之槽體
TW104135695A TWI571320B (zh) 2015-07-27 2015-10-30 用來清洗平板構件之槽體
TW104218819U TWM519645U (zh) 2015-07-27 2015-11-24 可降低擾流之槽盤式液體循環系統
TW104138864A TW201704129A (zh) 2015-07-27 2015-11-24 可降低擾流之槽盤式液體循環系統
TW104219574U TWM522082U (zh) 2015-07-27 2015-12-07 用來清洗平板構件之自動化系統
TW104140900A TWI571321B (zh) 2015-07-27 2015-12-07 用來清洗一平板構件之自動化系統
TW105100094A TWI561452B (en) 2015-07-27 2016-01-04 Cassette body capable of reducing liquid turbulence when soaking into a liquid
TW105100047A TWI574895B (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣本體
TW105200022U TWM520515U (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣本體
TW105100030A TWI572533B (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣結構
TW105200045U TWM521064U (zh) 2015-07-27 2016-01-04 可於浸入浸泡液時降低液面擾流之卡匣本體
TW105200012U TWM523187U (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣結構

Family Applications Before (6)

Application Number Title Priority Date Filing Date
TW104217353U TWM515418U (zh) 2015-07-27 2015-10-30 用來清洗平板構件之槽體
TW104135695A TWI571320B (zh) 2015-07-27 2015-10-30 用來清洗平板構件之槽體
TW104218819U TWM519645U (zh) 2015-07-27 2015-11-24 可降低擾流之槽盤式液體循環系統
TW104138864A TW201704129A (zh) 2015-07-27 2015-11-24 可降低擾流之槽盤式液體循環系統
TW104219574U TWM522082U (zh) 2015-07-27 2015-12-07 用來清洗平板構件之自動化系統
TW104140900A TWI571321B (zh) 2015-07-27 2015-12-07 用來清洗一平板構件之自動化系統

Family Applications After (5)

Application Number Title Priority Date Filing Date
TW105100047A TWI574895B (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣本體
TW105200022U TWM520515U (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣本體
TW105100030A TWI572533B (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣結構
TW105200045U TWM521064U (zh) 2015-07-27 2016-01-04 可於浸入浸泡液時降低液面擾流之卡匣本體
TW105200012U TWM523187U (zh) 2015-07-27 2016-01-04 用以承載平板構件之卡匣結構

Country Status (2)

Country Link
CN (2) CN205362162U (zh)
TW (12) TWM515418U (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM515418U (zh) * 2015-07-27 2016-01-11 盟立自動化股份有限公司 用來清洗平板構件之槽體
CN107479060B (zh) * 2017-08-17 2019-09-27 京东方科技集团股份有限公司 卡匣清洗设备
SG11202001663XA (en) * 2017-09-08 2020-03-30 Acm Res Shanghai Inc Method and apparatus for cleaning semiconductor wafer

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CN201367470Y (zh) * 2009-03-05 2009-12-23 沈阳铝镁设计研究院 节能型铝电解槽
TWM403509U (en) * 2010-09-03 2011-05-11 Chang-Ying Li Improved structure of electrochemical application equipment
CN203292440U (zh) * 2012-10-19 2013-11-20 中冶南方工程技术有限公司 一种可降低钢液冲击的连铸浸入式水口
CN203890487U (zh) * 2014-04-29 2014-10-22 深圳市崇辉表面技术开发有限公司 一种电镀扰流装置
TWM521064U (zh) * 2015-07-27 2016-05-01 盟立自動化股份有限公司 可於浸入浸泡液時降低液面擾流之卡匣本體

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US20020026952A1 (en) * 1997-12-12 2002-03-07 Naohiko Fujino Method of and device for cleaning silicon wafer, cleaned silicon wafer, and cleaned semiconductor element
JP4590700B2 (ja) * 2000-07-14 2010-12-01 ソニー株式会社 基板洗浄方法及び基板洗浄装置
JP3978393B2 (ja) * 2002-12-02 2007-09-19 株式会社カイジョー 基板処理装置
US7363777B2 (en) * 2004-03-05 2008-04-29 Corning Incorporated Closed cassette and method for heat treating glass sheets
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CN102862772B (zh) * 2012-09-19 2015-04-15 深圳市华星光电技术有限公司 玻璃基板卡匣的承载装置及仓储设备
CN203380142U (zh) * 2013-06-19 2014-01-08 镇江东艺机械有限公司 一种工件自动清洗机
CN103878138B (zh) * 2014-03-25 2016-10-05 福建浔兴拉链科技股份有限公司 一种拉链头清洗机
CN104117501A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 超声波清洗机的槽体布局结构
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CN201367470Y (zh) * 2009-03-05 2009-12-23 沈阳铝镁设计研究院 节能型铝电解槽
TWM403509U (en) * 2010-09-03 2011-05-11 Chang-Ying Li Improved structure of electrochemical application equipment
CN203292440U (zh) * 2012-10-19 2013-11-20 中冶南方工程技术有限公司 一种可降低钢液冲击的连铸浸入式水口
CN203890487U (zh) * 2014-04-29 2014-10-22 深圳市崇辉表面技术开发有限公司 一种电镀扰流装置
TWM521064U (zh) * 2015-07-27 2016-05-01 盟立自動化股份有限公司 可於浸入浸泡液時降低液面擾流之卡匣本體

Also Published As

Publication number Publication date
TWI574895B (zh) 2017-03-21
TW201704103A (zh) 2017-02-01
TWI572533B (zh) 2017-03-01
TWM523187U (zh) 2016-06-01
CN205362162U (zh) 2016-07-06
TW201704116A (zh) 2017-02-01
TWM520515U (zh) 2016-04-21
TW201704130A (zh) 2017-02-01
TWI571320B (zh) 2017-02-21
CN106391623A (zh) 2017-02-15
CN106391623B (zh) 2018-09-18
TWI571321B (zh) 2017-02-21
TW201703887A (zh) 2017-02-01
TW201703888A (zh) 2017-02-01
TWM515418U (zh) 2016-01-11
TWM519645U (zh) 2016-04-01
TW201704129A (zh) 2017-02-01
TWM521064U (zh) 2016-05-01
TWM522082U (zh) 2016-05-21

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