TWI554385B - 製造微透鏡之方法及裝置 - Google Patents
製造微透鏡之方法及裝置 Download PDFInfo
- Publication number
- TWI554385B TWI554385B TW100109593A TW100109593A TWI554385B TW I554385 B TWI554385 B TW I554385B TW 100109593 A TW100109593 A TW 100109593A TW 100109593 A TW100109593 A TW 100109593A TW I554385 B TWI554385 B TW I554385B
- Authority
- TW
- Taiwan
- Prior art keywords
- carrier wafer
- microlens
- lens
- matrix
- die
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 26
- 239000011159 matrix material Substances 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 36
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 230000013011 mating Effects 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 4
- 230000001066 destructive effect Effects 0.000 claims 1
- 230000000087 stabilizing effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 87
- 230000003287 optical effect Effects 0.000 description 23
- 239000000758 substrate Substances 0.000 description 16
- 229920000642 polymer Polymers 0.000 description 3
- 229920001169 thermoplastic Polymers 0.000 description 3
- 239000004416 thermosoftening plastic Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003100 immobilizing effect Effects 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
- B29D11/00375—Production of microlenses by moulding lenses in holes through a substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2010/002065 WO2011120538A1 (de) | 2010-03-31 | 2010-03-31 | Verfahren und vorrichtung zur herstellung einer mikrolinse |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201136755A TW201136755A (en) | 2011-11-01 |
| TWI554385B true TWI554385B (zh) | 2016-10-21 |
Family
ID=42555430
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100109593A TWI554385B (zh) | 2010-03-31 | 2011-03-21 | 製造微透鏡之方法及裝置 |
| TW105124678A TWI617430B (zh) | 2010-03-31 | 2011-03-21 | 製造微透鏡之方法及裝置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105124678A TWI617430B (zh) | 2010-03-31 | 2011-03-21 | 製造微透鏡之方法及裝置 |
Country Status (8)
| Country | Link |
|---|---|
| US (3) | US9052422B2 (enExample) |
| EP (2) | EP2553503B1 (enExample) |
| JP (1) | JP5611445B2 (enExample) |
| KR (1) | KR101497779B1 (enExample) |
| CN (2) | CN102812387A (enExample) |
| SG (1) | SG183819A1 (enExample) |
| TW (2) | TWI554385B (enExample) |
| WO (1) | WO2011120538A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG183819A1 (en) * | 2010-03-31 | 2012-10-30 | Ev Group Gmbh | Method and device for producing a micro-lens |
| TWI492839B (zh) * | 2012-04-02 | 2015-07-21 | Himax Tech Ltd | 晶圓級光學元件的製造方法及結構 |
| WO2015069283A1 (en) * | 2013-11-08 | 2015-05-14 | Empire Technology Development Llc | Printed ball lens and methods for their fabrication |
| GB2531744B (en) | 2014-10-28 | 2017-11-22 | Chiaro Tech Ltd | Method and apparatus for monitoring the pelvic floor muscles |
| CN105818405B (zh) * | 2016-04-20 | 2019-02-22 | 北京羽扇智信息科技有限公司 | 一种在可穿戴设备的外壳上形成透镜的方法 |
| EP3472806B1 (en) | 2016-06-17 | 2025-08-06 | Immersive Robotics Pty Ltd | Image compression method and apparatus |
| DE102016113471B4 (de) | 2016-07-21 | 2022-10-27 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur herstellung von optischen bauelementen |
| JP6976688B2 (ja) | 2017-01-26 | 2021-12-08 | ソニーセミコンダクタソリューションズ株式会社 | カメラモジュールおよびその製造方法、並びに電子機器 |
| JP6987518B2 (ja) | 2017-01-26 | 2022-01-05 | ソニーセミコンダクタソリューションズ株式会社 | 積層レンズ構造体およびその製造方法、並びに電子機器 |
| AU2018218182B2 (en) | 2017-02-08 | 2022-12-15 | Immersive Robotics Pty Ltd | Antenna control for mobile device communication |
| US10416432B2 (en) | 2017-09-04 | 2019-09-17 | International Business Machines Corporation | Microlens adapter for mobile devices |
| WO2018215823A1 (en) * | 2017-05-25 | 2018-11-29 | International Business Machines Corporation | Microlens adapter for mobile devices |
| AU2018280337B2 (en) | 2017-06-05 | 2023-01-19 | Immersive Robotics Pty Ltd | Digital content stream compression |
| US11153604B2 (en) | 2017-11-21 | 2021-10-19 | Immersive Robotics Pty Ltd | Image compression for digital reality |
| WO2019100109A1 (en) | 2017-11-21 | 2019-05-31 | Immersive Robotics Pty Ltd | Frequency component selection for image compression |
| EP3792046A1 (de) | 2019-09-12 | 2021-03-17 | Technische Hochschule Wildau | Verfahren zur herstellung asymmetrischer oder asphärischer linsen sowie leuchteinheit mit einer derart hergestellten linse |
| WO2021072498A1 (en) | 2019-10-18 | 2021-04-22 | Immersive Robotics Pty Ltd | Content compression for network transmission |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080290435A1 (en) * | 2007-05-21 | 2008-11-27 | Micron Technology, Inc. | Wafer level lens arrays for image sensor packages and the like, image sensor packages, and related methods |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4154506A (en) * | 1976-08-12 | 1979-05-15 | Izon Corporation | Projection lens plate for microfiche |
| JPH04326031A (ja) | 1991-04-25 | 1992-11-16 | Mitsubishi Electric Corp | 半導体圧力センサ |
| JPH04326301A (ja) * | 1991-04-26 | 1992-11-16 | Ricoh Co Ltd | マイクロレンズアレイ及びその製造方法 |
| JP3067114B2 (ja) | 1991-06-04 | 2000-07-17 | ソニー株式会社 | マイクロレンズ形成方法 |
| DE69625411T2 (de) | 1995-07-11 | 2003-10-30 | Interuniversitair Micro-Electronica Centrum Vzw, Leuven-Heverlee | Herstellungsverfahren für mehrschichtige Mikrolinsen und deren Verwendung |
| US5853960A (en) | 1998-03-18 | 1998-12-29 | Trw Inc. | Method for producing a micro optical semiconductor lens |
| US6049430A (en) | 1998-11-12 | 2000-04-11 | Seagate Technology | High numerical aperture objective lens manufacturable in wafer form |
| US6805902B1 (en) * | 2000-02-28 | 2004-10-19 | Microfab Technologies, Inc. | Precision micro-optical elements and the method of making precision micro-optical elements |
| US6846137B1 (en) | 2000-10-31 | 2005-01-25 | Eastman Kodak Company | Apparatus for forming a microlens mold |
| JP2002372473A (ja) * | 2001-04-12 | 2002-12-26 | Fuji Electric Co Ltd | 半導体センサ収納容器およびその製造方法、並びに半導体センサ装置 |
| DE60200225T2 (de) * | 2001-04-20 | 2004-07-15 | Matsushita Electric Industrial Co., Ltd., Kadoma | Mikrolinsen-Array und Methode für seine Herstellung |
| TW527859B (en) * | 2002-04-18 | 2003-04-11 | Hon Hai Prec Ind Co Ltd | Method of fabricating a can for optical module |
| KR20070089889A (ko) * | 2002-09-17 | 2007-09-03 | 앤터온 비.브이. | 카메라 디바이스, 카메라 디바이스 제조 방법, 웨이퍼스케일 패키지 및 광학 어셈블리 |
| KR101522977B1 (ko) | 2007-04-23 | 2015-05-28 | 난창 오-필름 옵토일렉트로닉스 테크놀로지 리미티드 | 마이크로 광학 장치의 대량 생산, 그에 대응하는 도구 및 결과적인 구조물 |
| KR101087695B1 (ko) | 2007-07-03 | 2011-11-30 | 주식회사 옵토메카 | 이종재료 일체형 렌즈 유닛 및 이를 구비하는 카메라 모듈 |
| NL1034496C2 (nl) * | 2007-10-10 | 2009-04-16 | Anteryon B V | Werkwijze voor het vervaardigen van een samenstel van lenzen, alsmede een camera voorzien van een dergelijk samenstel. |
| TWI478808B (zh) * | 2007-12-19 | 2015-04-01 | Heptagon Micro Optics Pte Ltd | 製造光學元件的方法 |
| US7920328B2 (en) * | 2008-02-28 | 2011-04-05 | Visera Technologies Company Limited | Lens module and a method for fabricating the same |
| US7888758B2 (en) | 2008-03-12 | 2011-02-15 | Aptina Imaging Corporation | Method of forming a permanent carrier and spacer wafer for wafer level optics and associated structure |
| JP2009279790A (ja) * | 2008-05-20 | 2009-12-03 | Sharp Corp | レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器 |
| JP2009300596A (ja) | 2008-06-11 | 2009-12-24 | Sharp Corp | プラスチックレンズ、成形金型、およびプラスチックレンズの製造方法 |
| WO2010033211A1 (en) | 2008-09-18 | 2010-03-25 | Tessera North America, Inc. | Recessed optical surfaces |
| SG183819A1 (en) * | 2010-03-31 | 2012-10-30 | Ev Group Gmbh | Method and device for producing a micro-lens |
-
2010
- 2010-03-31 SG SG2012063665A patent/SG183819A1/en unknown
- 2010-03-31 CN CN2010800659201A patent/CN102812387A/zh active Pending
- 2010-03-31 KR KR1020127020904A patent/KR101497779B1/ko active Active
- 2010-03-31 EP EP10732637.3A patent/EP2553503B1/de active Active
- 2010-03-31 EP EP18196563.3A patent/EP3460538B1/de active Active
- 2010-03-31 JP JP2013501636A patent/JP5611445B2/ja active Active
- 2010-03-31 CN CN201710403957.4A patent/CN107272090A/zh active Pending
- 2010-03-31 WO PCT/EP2010/002065 patent/WO2011120538A1/de not_active Ceased
- 2010-03-31 US US13/583,652 patent/US9052422B2/en active Active
-
2011
- 2011-03-21 TW TW100109593A patent/TWI554385B/zh active
- 2011-03-21 TW TW105124678A patent/TWI617430B/zh active
-
2015
- 2015-04-30 US US14/700,217 patent/US20150231840A1/en not_active Abandoned
-
2018
- 2018-04-17 US US15/954,970 patent/US10279551B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080290435A1 (en) * | 2007-05-21 | 2008-11-27 | Micron Technology, Inc. | Wafer level lens arrays for image sensor packages and the like, image sensor packages, and related methods |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5611445B2 (ja) | 2014-10-22 |
| EP2553503A1 (de) | 2013-02-06 |
| KR20120125287A (ko) | 2012-11-14 |
| EP3460538A1 (de) | 2019-03-27 |
| US10279551B2 (en) | 2019-05-07 |
| EP3460538B1 (de) | 2021-03-03 |
| TWI617430B (zh) | 2018-03-11 |
| WO2011120538A1 (de) | 2011-10-06 |
| CN102812387A (zh) | 2012-12-05 |
| US20180229458A1 (en) | 2018-08-16 |
| US9052422B2 (en) | 2015-06-09 |
| CN107272090A (zh) | 2017-10-20 |
| US20130037975A1 (en) | 2013-02-14 |
| KR101497779B1 (ko) | 2015-03-04 |
| TW201136755A (en) | 2011-11-01 |
| US20150231840A1 (en) | 2015-08-20 |
| TW201639695A (zh) | 2016-11-16 |
| EP2553503B1 (de) | 2018-12-19 |
| JP2013525828A (ja) | 2013-06-20 |
| SG183819A1 (en) | 2012-10-30 |
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