KR101497779B1 - 마이크로렌즈 제조 장치 및 제조 방법 - Google Patents

마이크로렌즈 제조 장치 및 제조 방법 Download PDF

Info

Publication number
KR101497779B1
KR101497779B1 KR1020127020904A KR20127020904A KR101497779B1 KR 101497779 B1 KR101497779 B1 KR 101497779B1 KR 1020127020904 A KR1020127020904 A KR 1020127020904A KR 20127020904 A KR20127020904 A KR 20127020904A KR 101497779 B1 KR101497779 B1 KR 101497779B1
Authority
KR
South Korea
Prior art keywords
lens
carrier wafer
die
microlens
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020127020904A
Other languages
English (en)
Korean (ko)
Other versions
KR20120125287A (ko
Inventor
엔리히 탈너
마르쿠스 윔프링거
미카엘 카스트
Original Assignee
에베 그룹 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에베 그룹 게엠베하 filed Critical 에베 그룹 게엠베하
Publication of KR20120125287A publication Critical patent/KR20120125287A/ko
Application granted granted Critical
Publication of KR101497779B1 publication Critical patent/KR101497779B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B29D11/00375—Production of microlenses by moulding lenses in holes through a substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
KR1020127020904A 2010-03-31 2010-03-31 마이크로렌즈 제조 장치 및 제조 방법 Active KR101497779B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2010/002065 WO2011120538A1 (de) 2010-03-31 2010-03-31 Verfahren und vorrichtung zur herstellung einer mikrolinse

Publications (2)

Publication Number Publication Date
KR20120125287A KR20120125287A (ko) 2012-11-14
KR101497779B1 true KR101497779B1 (ko) 2015-03-04

Family

ID=42555430

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127020904A Active KR101497779B1 (ko) 2010-03-31 2010-03-31 마이크로렌즈 제조 장치 및 제조 방법

Country Status (8)

Country Link
US (3) US9052422B2 (enExample)
EP (2) EP3460538B1 (enExample)
JP (1) JP5611445B2 (enExample)
KR (1) KR101497779B1 (enExample)
CN (2) CN102812387A (enExample)
SG (1) SG183819A1 (enExample)
TW (2) TWI617430B (enExample)
WO (1) WO2011120538A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3460538B1 (de) * 2010-03-31 2021-03-03 EV Group GmbH Verfahren und vorrichtung zur herstellung einer mikrolinse
TWI492839B (zh) * 2012-04-02 2015-07-21 Himax Tech Ltd 晶圓級光學元件的製造方法及結構
WO2015069283A1 (en) * 2013-11-08 2015-05-14 Empire Technology Development Llc Printed ball lens and methods for their fabrication
GB2531744B (en) 2014-10-28 2017-11-22 Chiaro Tech Ltd Method and apparatus for monitoring the pelvic floor muscles
CN105818405B (zh) * 2016-04-20 2019-02-22 北京羽扇智信息科技有限公司 一种在可穿戴设备的外壳上形成透镜的方法
EP3472806B1 (en) 2016-06-17 2025-08-06 Immersive Robotics Pty Ltd Image compression method and apparatus
DE102016113471B4 (de) 2016-07-21 2022-10-27 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur herstellung von optischen bauelementen
JP6987518B2 (ja) 2017-01-26 2022-01-05 ソニーセミコンダクタソリューションズ株式会社 積層レンズ構造体およびその製造方法、並びに電子機器
JP6976688B2 (ja) 2017-01-26 2021-12-08 ソニーセミコンダクタソリューションズ株式会社 カメラモジュールおよびその製造方法、並びに電子機器
AU2018218182B2 (en) 2017-02-08 2022-12-15 Immersive Robotics Pty Ltd Antenna control for mobile device communication
DE112017007129T5 (de) * 2017-05-25 2019-11-14 International Business Machines Corporation Mikrolinsen-Adapter für mobile Einheiten
US10416432B2 (en) 2017-09-04 2019-09-17 International Business Machines Corporation Microlens adapter for mobile devices
CN110999287A (zh) 2017-06-05 2020-04-10 因默希弗机器人私人有限公司 数字内容流压缩
TWI875684B (zh) 2017-11-21 2025-03-11 澳大利亞商伊門斯機器人控股有限公司 用於影像壓縮之頻率分量選擇
WO2019100108A1 (en) 2017-11-21 2019-05-31 Immersive Robotics Pty Ltd Image compression for digital reality
EP3792046A1 (de) 2019-09-12 2021-03-17 Technische Hochschule Wildau Verfahren zur herstellung asymmetrischer oder asphärischer linsen sowie leuchteinheit mit einer derart hergestellten linse
WO2021072498A1 (en) 2019-10-18 2021-04-22 Immersive Robotics Pty Ltd Content compression for network transmission

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6805902B1 (en) * 2000-02-28 2004-10-19 Microfab Technologies, Inc. Precision micro-optical elements and the method of making precision micro-optical elements
US20080290435A1 (en) * 2007-05-21 2008-11-27 Micron Technology, Inc. Wafer level lens arrays for image sensor packages and the like, image sensor packages, and related methods
JP2009153178A (ja) * 2002-09-17 2009-07-09 Anteryon Bv カメラ・デバイス、ならびに、カメラ・デバイスおよびウェハスケールパッケージの製造方法
WO2010033211A1 (en) * 2008-09-18 2010-03-25 Tessera North America, Inc. Recessed optical surfaces

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4154506A (en) * 1976-08-12 1979-05-15 Izon Corporation Projection lens plate for microfiche
JPH04326031A (ja) 1991-04-25 1992-11-16 Mitsubishi Electric Corp 半導体圧力センサ
JPH04326301A (ja) * 1991-04-26 1992-11-16 Ricoh Co Ltd マイクロレンズアレイ及びその製造方法
JP3067114B2 (ja) 1991-06-04 2000-07-17 ソニー株式会社 マイクロレンズ形成方法
EP0753765B1 (en) 1995-07-11 2002-12-18 Interuniversitair Micro-Elektronica Centrum Vzw Method for forming multiple-layer microlenses and use thereof
US5853960A (en) 1998-03-18 1998-12-29 Trw Inc. Method for producing a micro optical semiconductor lens
US6049430A (en) 1998-11-12 2000-04-11 Seagate Technology High numerical aperture objective lens manufacturable in wafer form
US6846137B1 (en) 2000-10-31 2005-01-25 Eastman Kodak Company Apparatus for forming a microlens mold
JP2002372473A (ja) * 2001-04-12 2002-12-26 Fuji Electric Co Ltd 半導体センサ収納容器およびその製造方法、並びに半導体センサ装置
US6814901B2 (en) * 2001-04-20 2004-11-09 Matsushita Electric Industrial Co., Ltd. Method of manufacturing microlens array and microlens array
TW527859B (en) * 2002-04-18 2003-04-11 Hon Hai Prec Ind Co Ltd Method of fabricating a can for optical module
WO2008133864A2 (en) 2007-04-23 2008-11-06 Tessera North America, Inc. Mass production of micro-optical devices, corresponding tools, and resultant structures
KR101087695B1 (ko) 2007-07-03 2011-11-30 주식회사 옵토메카 이종재료 일체형 렌즈 유닛 및 이를 구비하는 카메라 모듈
NL1034496C2 (nl) * 2007-10-10 2009-04-16 Anteryon B V Werkwijze voor het vervaardigen van een samenstel van lenzen, alsmede een camera voorzien van een dergelijk samenstel.
TWI478808B (zh) * 2007-12-19 2015-04-01 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
US7920328B2 (en) * 2008-02-28 2011-04-05 Visera Technologies Company Limited Lens module and a method for fabricating the same
US7888758B2 (en) 2008-03-12 2011-02-15 Aptina Imaging Corporation Method of forming a permanent carrier and spacer wafer for wafer level optics and associated structure
JP2009279790A (ja) * 2008-05-20 2009-12-03 Sharp Corp レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器
JP2009300596A (ja) 2008-06-11 2009-12-24 Sharp Corp プラスチックレンズ、成形金型、およびプラスチックレンズの製造方法
EP3460538B1 (de) * 2010-03-31 2021-03-03 EV Group GmbH Verfahren und vorrichtung zur herstellung einer mikrolinse

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6805902B1 (en) * 2000-02-28 2004-10-19 Microfab Technologies, Inc. Precision micro-optical elements and the method of making precision micro-optical elements
JP2009153178A (ja) * 2002-09-17 2009-07-09 Anteryon Bv カメラ・デバイス、ならびに、カメラ・デバイスおよびウェハスケールパッケージの製造方法
US20080290435A1 (en) * 2007-05-21 2008-11-27 Micron Technology, Inc. Wafer level lens arrays for image sensor packages and the like, image sensor packages, and related methods
WO2010033211A1 (en) * 2008-09-18 2010-03-25 Tessera North America, Inc. Recessed optical surfaces

Also Published As

Publication number Publication date
TWI617430B (zh) 2018-03-11
TW201639695A (zh) 2016-11-16
KR20120125287A (ko) 2012-11-14
US20180229458A1 (en) 2018-08-16
TWI554385B (zh) 2016-10-21
US10279551B2 (en) 2019-05-07
EP2553503A1 (de) 2013-02-06
WO2011120538A1 (de) 2011-10-06
SG183819A1 (en) 2012-10-30
CN107272090A (zh) 2017-10-20
US20150231840A1 (en) 2015-08-20
CN102812387A (zh) 2012-12-05
EP2553503B1 (de) 2018-12-19
TW201136755A (en) 2011-11-01
JP5611445B2 (ja) 2014-10-22
EP3460538B1 (de) 2021-03-03
EP3460538A1 (de) 2019-03-27
US20130037975A1 (en) 2013-02-14
JP2013525828A (ja) 2013-06-20
US9052422B2 (en) 2015-06-09

Similar Documents

Publication Publication Date Title
KR101497779B1 (ko) 마이크로렌즈 제조 장치 및 제조 방법
EP2193911B1 (en) Micro lens, method and apparatus for manufacturing micro lens, and camera module including micro lens
EP2225596B1 (en) Spacer element and method for manufacturing a spacer element
EP3081369B1 (en) Method for manufacturing a lens
US20140016216A1 (en) Manufacturing method for image pickup lens unit and image pickup lens
NL2012262C2 (en) Method of fabricating a wafer level optical lens assembly.
US20150014875A1 (en) Lens Plate For Wafer-Level Camera And Method Of Manufacturing Same
KR20090092213A (ko) 복합렌즈
TWI526297B (zh) 用於製作透鏡晶圓之模工具、設備及方法
US20120248637A1 (en) Methods and devices for manufacturing an array of lenses
WO2015093945A1 (en) Method of fabricating a wafer level optical lens assembly
CN110554471B (zh) 光学镜头、摄像模组及其组装方法
US7736550B2 (en) Method of manufacturing an optical device by means of a replication method
KR101724189B1 (ko) 렌즈 재료로부터 복수의 마이크로렌즈를 제조하기 위한 방법 및 장치
TW201922468A (zh) 透鏡模塑裝置及透鏡製造方法
KR20100050042A (ko) 마이크로 렌즈용 마스터 및 마이크로 렌즈 제조방법
CN106457622A (zh) 光学元件的成形方法、成形模具及光学元件
HK1186777A (en) Lens plate for wafer-level camera and method of manufacturing same
HK1186777B (en) Lens plate for wafer-level camera and method of manufacturing same

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20120809

Patent event code: PA01051R01D

Comment text: International Patent Application

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20120910

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20131126

Patent event code: PE09021S01D

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20140226

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20141219

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20150224

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20150224

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20180219

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20180219

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20190214

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20190214

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20210216

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20220215

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20230214

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20240215

Start annual number: 10

End annual number: 10