JP5611445B2 - マイクロレンズの製造方法及び製造装置 - Google Patents

マイクロレンズの製造方法及び製造装置 Download PDF

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Publication number
JP5611445B2
JP5611445B2 JP2013501636A JP2013501636A JP5611445B2 JP 5611445 B2 JP5611445 B2 JP 5611445B2 JP 2013501636 A JP2013501636 A JP 2013501636A JP 2013501636 A JP2013501636 A JP 2013501636A JP 5611445 B2 JP5611445 B2 JP 5611445B2
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lens
carrier wafer
die
microlens
carrier
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JP2013525828A5 (enExample
JP2013525828A (ja
Inventor
エーリッヒ・タルナー
マルクス・ヴィンプリンガー
ミヒャエル・カスト
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エーファウ・グループ・ゲーエムベーハー
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B29D11/00375—Production of microlenses by moulding lenses in holes through a substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2013501636A 2010-03-31 2010-03-31 マイクロレンズの製造方法及び製造装置 Active JP5611445B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2010/002065 WO2011120538A1 (de) 2010-03-31 2010-03-31 Verfahren und vorrichtung zur herstellung einer mikrolinse

Publications (3)

Publication Number Publication Date
JP2013525828A JP2013525828A (ja) 2013-06-20
JP2013525828A5 JP2013525828A5 (enExample) 2014-05-08
JP5611445B2 true JP5611445B2 (ja) 2014-10-22

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ID=42555430

Family Applications (1)

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JP2013501636A Active JP5611445B2 (ja) 2010-03-31 2010-03-31 マイクロレンズの製造方法及び製造装置

Country Status (8)

Country Link
US (3) US9052422B2 (enExample)
EP (2) EP3460538B1 (enExample)
JP (1) JP5611445B2 (enExample)
KR (1) KR101497779B1 (enExample)
CN (2) CN102812387A (enExample)
SG (1) SG183819A1 (enExample)
TW (2) TWI617430B (enExample)
WO (1) WO2011120538A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3460538B1 (de) * 2010-03-31 2021-03-03 EV Group GmbH Verfahren und vorrichtung zur herstellung einer mikrolinse
TWI492839B (zh) * 2012-04-02 2015-07-21 Himax Tech Ltd 晶圓級光學元件的製造方法及結構
WO2015069283A1 (en) * 2013-11-08 2015-05-14 Empire Technology Development Llc Printed ball lens and methods for their fabrication
GB2531744B (en) 2014-10-28 2017-11-22 Chiaro Tech Ltd Method and apparatus for monitoring the pelvic floor muscles
CN105818405B (zh) * 2016-04-20 2019-02-22 北京羽扇智信息科技有限公司 一种在可穿戴设备的外壳上形成透镜的方法
EP3472806B1 (en) 2016-06-17 2025-08-06 Immersive Robotics Pty Ltd Image compression method and apparatus
DE102016113471B4 (de) 2016-07-21 2022-10-27 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur herstellung von optischen bauelementen
JP6987518B2 (ja) 2017-01-26 2022-01-05 ソニーセミコンダクタソリューションズ株式会社 積層レンズ構造体およびその製造方法、並びに電子機器
JP6976688B2 (ja) 2017-01-26 2021-12-08 ソニーセミコンダクタソリューションズ株式会社 カメラモジュールおよびその製造方法、並びに電子機器
AU2018218182B2 (en) 2017-02-08 2022-12-15 Immersive Robotics Pty Ltd Antenna control for mobile device communication
DE112017007129T5 (de) * 2017-05-25 2019-11-14 International Business Machines Corporation Mikrolinsen-Adapter für mobile Einheiten
US10416432B2 (en) 2017-09-04 2019-09-17 International Business Machines Corporation Microlens adapter for mobile devices
CN110999287A (zh) 2017-06-05 2020-04-10 因默希弗机器人私人有限公司 数字内容流压缩
TWI875684B (zh) 2017-11-21 2025-03-11 澳大利亞商伊門斯機器人控股有限公司 用於影像壓縮之頻率分量選擇
WO2019100108A1 (en) 2017-11-21 2019-05-31 Immersive Robotics Pty Ltd Image compression for digital reality
EP3792046A1 (de) 2019-09-12 2021-03-17 Technische Hochschule Wildau Verfahren zur herstellung asymmetrischer oder asphärischer linsen sowie leuchteinheit mit einer derart hergestellten linse
WO2021072498A1 (en) 2019-10-18 2021-04-22 Immersive Robotics Pty Ltd Content compression for network transmission

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4154506A (en) * 1976-08-12 1979-05-15 Izon Corporation Projection lens plate for microfiche
JPH04326031A (ja) 1991-04-25 1992-11-16 Mitsubishi Electric Corp 半導体圧力センサ
JPH04326301A (ja) * 1991-04-26 1992-11-16 Ricoh Co Ltd マイクロレンズアレイ及びその製造方法
JP3067114B2 (ja) 1991-06-04 2000-07-17 ソニー株式会社 マイクロレンズ形成方法
EP0753765B1 (en) 1995-07-11 2002-12-18 Interuniversitair Micro-Elektronica Centrum Vzw Method for forming multiple-layer microlenses and use thereof
US5853960A (en) 1998-03-18 1998-12-29 Trw Inc. Method for producing a micro optical semiconductor lens
US6049430A (en) 1998-11-12 2000-04-11 Seagate Technology High numerical aperture objective lens manufacturable in wafer form
US6805902B1 (en) 2000-02-28 2004-10-19 Microfab Technologies, Inc. Precision micro-optical elements and the method of making precision micro-optical elements
US6846137B1 (en) 2000-10-31 2005-01-25 Eastman Kodak Company Apparatus for forming a microlens mold
JP2002372473A (ja) * 2001-04-12 2002-12-26 Fuji Electric Co Ltd 半導体センサ収納容器およびその製造方法、並びに半導体センサ装置
US6814901B2 (en) * 2001-04-20 2004-11-09 Matsushita Electric Industrial Co., Ltd. Method of manufacturing microlens array and microlens array
TW527859B (en) * 2002-04-18 2003-04-11 Hon Hai Prec Ind Co Ltd Method of fabricating a can for optical module
CN100440544C (zh) 2002-09-17 2008-12-03 安特约恩股份有限公司 照相装置、制造照相装置的方法以及晶片尺度的封装
WO2008133864A2 (en) 2007-04-23 2008-11-06 Tessera North America, Inc. Mass production of micro-optical devices, corresponding tools, and resultant structures
US20080290435A1 (en) * 2007-05-21 2008-11-27 Micron Technology, Inc. Wafer level lens arrays for image sensor packages and the like, image sensor packages, and related methods
KR101087695B1 (ko) 2007-07-03 2011-11-30 주식회사 옵토메카 이종재료 일체형 렌즈 유닛 및 이를 구비하는 카메라 모듈
NL1034496C2 (nl) * 2007-10-10 2009-04-16 Anteryon B V Werkwijze voor het vervaardigen van een samenstel van lenzen, alsmede een camera voorzien van een dergelijk samenstel.
TWI478808B (zh) * 2007-12-19 2015-04-01 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
US7920328B2 (en) * 2008-02-28 2011-04-05 Visera Technologies Company Limited Lens module and a method for fabricating the same
US7888758B2 (en) 2008-03-12 2011-02-15 Aptina Imaging Corporation Method of forming a permanent carrier and spacer wafer for wafer level optics and associated structure
JP2009279790A (ja) * 2008-05-20 2009-12-03 Sharp Corp レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器
JP2009300596A (ja) 2008-06-11 2009-12-24 Sharp Corp プラスチックレンズ、成形金型、およびプラスチックレンズの製造方法
TW201033641A (en) * 2008-09-18 2010-09-16 Tessera North America Inc Recessed optical surfaces
EP3460538B1 (de) * 2010-03-31 2021-03-03 EV Group GmbH Verfahren und vorrichtung zur herstellung einer mikrolinse

Also Published As

Publication number Publication date
TWI617430B (zh) 2018-03-11
TW201639695A (zh) 2016-11-16
KR20120125287A (ko) 2012-11-14
US20180229458A1 (en) 2018-08-16
TWI554385B (zh) 2016-10-21
US10279551B2 (en) 2019-05-07
EP2553503A1 (de) 2013-02-06
WO2011120538A1 (de) 2011-10-06
SG183819A1 (en) 2012-10-30
CN107272090A (zh) 2017-10-20
US20150231840A1 (en) 2015-08-20
CN102812387A (zh) 2012-12-05
KR101497779B1 (ko) 2015-03-04
EP2553503B1 (de) 2018-12-19
TW201136755A (en) 2011-11-01
EP3460538B1 (de) 2021-03-03
EP3460538A1 (de) 2019-03-27
US20130037975A1 (en) 2013-02-14
JP2013525828A (ja) 2013-06-20
US9052422B2 (en) 2015-06-09

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