TWI544590B - 半導體裝置封裝體及其製造方法 - Google Patents
半導體裝置封裝體及其製造方法 Download PDFInfo
- Publication number
- TWI544590B TWI544590B TW100144032A TW100144032A TWI544590B TW I544590 B TWI544590 B TW I544590B TW 100144032 A TW100144032 A TW 100144032A TW 100144032 A TW100144032 A TW 100144032A TW I544590 B TWI544590 B TW I544590B
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- Prior art keywords
- semiconductor device
- passivation layer
- dielectric
- device package
- layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3164—Partial encapsulation or coating the coating being a foil
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- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
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- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
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- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
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- H01L2224/76—Apparatus for connecting with build-up interconnects
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- H01L2924/12043—Photo diode
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Light Receiving Elements (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/962,761 US8310040B2 (en) | 2010-12-08 | 2010-12-08 | Semiconductor device package having high breakdown voltage and low parasitic inductance and method of manufacturing thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201246475A TW201246475A (en) | 2012-11-16 |
| TWI544590B true TWI544590B (zh) | 2016-08-01 |
Family
ID=45002829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100144032A TWI544590B (zh) | 2010-12-08 | 2011-11-30 | 半導體裝置封裝體及其製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US8310040B2 (enExample) |
| EP (1) | EP2463901B1 (enExample) |
| JP (1) | JP5926547B2 (enExample) |
| KR (1) | KR101944477B1 (enExample) |
| CN (1) | CN102543946B (enExample) |
| PH (1) | PH12011000403A1 (enExample) |
| SG (1) | SG182076A1 (enExample) |
| TW (1) | TWI544590B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8431438B2 (en) * | 2010-04-06 | 2013-04-30 | Intel Corporation | Forming in-situ micro-feature structures with coreless packages |
| US9209151B2 (en) | 2013-09-26 | 2015-12-08 | General Electric Company | Embedded semiconductor device package and method of manufacturing thereof |
| US9806051B2 (en) | 2014-03-04 | 2017-10-31 | General Electric Company | Ultra-thin embedded semiconductor device package and method of manufacturing thereof |
| US9607914B2 (en) * | 2014-05-15 | 2017-03-28 | Intel Corporation | Molded composite enclosure for integrated circuit assembly |
| JP6573876B2 (ja) * | 2014-05-29 | 2019-09-11 | アーゼッド・エレクトロニック・マテリアルズ(ルクセンブルグ)ソシエテ・ア・レスポンサビリテ・リミテ | 空隙形成用組成物、その組成物を用いて形成された空隙を具備した半導体装置、およびその組成物を用いた半導体装置の製造方法 |
| EP3065164A1 (en) * | 2015-03-04 | 2016-09-07 | ABB Technology AG | Power semiconductor arrangement and method of generating a power semiconductor arrangement |
| WO2020014499A1 (en) * | 2018-07-13 | 2020-01-16 | Array Photonics, Inc. | Dual-depth via device and process for large back contact solar cells |
| DE102020135088A1 (de) * | 2020-03-27 | 2021-09-30 | Samsung Electronics Co., Ltd. | Halbleitervorrichtung |
| US11699663B2 (en) | 2020-04-27 | 2023-07-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Passivation scheme design for wafer singulation |
| CN113517205A (zh) * | 2020-04-27 | 2021-10-19 | 台湾积体电路制造股份有限公司 | 半导体器件及其形成方法 |
| CN115939222B (zh) * | 2022-11-24 | 2025-10-17 | 湖南三安半导体有限责任公司 | 半导体器件及其制备方法 |
| CN116936592A (zh) * | 2023-07-24 | 2023-10-24 | 华天科技(昆山)电子有限公司 | 一种高可靠性的cis芯片封装结构及方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4198444A (en) * | 1975-08-04 | 1980-04-15 | General Electric Company | Method for providing substantially hermetic sealing means for electronic components |
| US4249299A (en) * | 1979-03-05 | 1981-02-10 | Hughes Aircraft Company | Edge-around leads for backside connections to silicon circuit die |
| US5161093A (en) | 1990-07-02 | 1992-11-03 | General Electric Company | Multiple lamination high density interconnect process and structure employing a variable crosslinking adhesive |
| US6265782B1 (en) * | 1996-10-08 | 2001-07-24 | Hitachi Chemical Co., Ltd. | Semiconductor device, semiconductor chip mounting substrate, methods of manufacturing the device and substrate, adhesive, and adhesive double coated film |
| EP0926729A3 (en) * | 1997-12-10 | 1999-12-08 | Mitsubishi Gas Chemical Company, Inc. | Semiconductor plastic package and process for the production thereof |
| US6239980B1 (en) | 1998-08-31 | 2001-05-29 | General Electric Company | Multimodule interconnect structure and process |
| US6306680B1 (en) | 1999-02-22 | 2001-10-23 | General Electric Company | Power overlay chip scale packages for discrete power devices |
| JP3602000B2 (ja) * | 1999-04-26 | 2004-12-15 | 沖電気工業株式会社 | 半導体装置および半導体モジュール |
| US6232151B1 (en) | 1999-11-01 | 2001-05-15 | General Electric Company | Power electronic module packaging |
| JP4454814B2 (ja) * | 2000-08-29 | 2010-04-21 | Necエレクトロニクス株式会社 | 樹脂封止型半導体装置及びその製造方法 |
| US7633765B1 (en) * | 2004-03-23 | 2009-12-15 | Amkor Technology, Inc. | Semiconductor package including a top-surface metal layer for implementing circuit features |
| US7262444B2 (en) | 2005-08-17 | 2007-08-28 | General Electric Company | Power semiconductor packaging method and structure |
| JP5033682B2 (ja) * | 2008-03-12 | 2012-09-26 | 株式会社テラミクロス | 半導体素子およびその製造方法並びに半導体装置およびその製造方法 |
| US8963314B2 (en) * | 2008-06-26 | 2015-02-24 | Nxp B.V. | Packaged semiconductor product and method for manufacture thereof |
| TW201101547A (en) * | 2009-06-23 | 2011-01-01 | Univ Kun Shan | Packaging structure of light emitting diode |
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2010
- 2010-12-08 US US12/962,761 patent/US8310040B2/en active Active
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2011
- 2011-11-28 EP EP11190875.2A patent/EP2463901B1/en active Active
- 2011-11-30 TW TW100144032A patent/TWI544590B/zh active
- 2011-12-02 PH PH1/2011/000403A patent/PH12011000403A1/en unknown
- 2011-12-06 JP JP2011266379A patent/JP5926547B2/ja active Active
- 2011-12-07 SG SG2011090644A patent/SG182076A1/en unknown
- 2011-12-08 CN CN201110427046.8A patent/CN102543946B/zh active Active
- 2011-12-08 KR KR1020110131042A patent/KR101944477B1/ko active Active
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2012
- 2012-09-07 US US13/606,186 patent/US8586421B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US8310040B2 (en) | 2012-11-13 |
| PH12011000403A1 (en) | 2014-07-23 |
| KR20120089993A (ko) | 2012-08-16 |
| EP2463901B1 (en) | 2018-06-13 |
| SG182076A1 (en) | 2012-07-30 |
| EP2463901A2 (en) | 2012-06-13 |
| JP5926547B2 (ja) | 2016-05-25 |
| KR101944477B1 (ko) | 2019-01-31 |
| JP2012124486A (ja) | 2012-06-28 |
| EP2463901A3 (en) | 2012-08-29 |
| CN102543946B (zh) | 2016-12-07 |
| TW201246475A (en) | 2012-11-16 |
| CN102543946A (zh) | 2012-07-04 |
| US20120146234A1 (en) | 2012-06-14 |
| US8586421B2 (en) | 2013-11-19 |
| US20120329207A1 (en) | 2012-12-27 |
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