TWI536104B - A photosensitive resin composition, and a color filter and a display device using the same - Google Patents
A photosensitive resin composition, and a color filter and a display device using the same Download PDFInfo
- Publication number
- TWI536104B TWI536104B TW101104726A TW101104726A TWI536104B TW I536104 B TWI536104 B TW I536104B TW 101104726 A TW101104726 A TW 101104726A TW 101104726 A TW101104726 A TW 101104726A TW I536104 B TWI536104 B TW I536104B
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- photopolymerization initiator
- resin composition
- photosensitive resin
- component
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 90
- 239000003999 initiator Substances 0.000 claims description 67
- 150000001875 compounds Chemical class 0.000 claims description 42
- 125000001424 substituent group Chemical group 0.000 claims description 29
- 125000003118 aryl group Chemical group 0.000 claims description 23
- 125000000217 alkyl group Chemical group 0.000 claims description 17
- 125000004432 carbon atom Chemical group C* 0.000 claims description 17
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 14
- 150000002923 oximes Chemical class 0.000 claims description 13
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 12
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 11
- 239000003086 colorant Substances 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 7
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 6
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 claims description 6
- 125000005843 halogen group Chemical group 0.000 claims description 6
- 239000003605 opacifier Substances 0.000 claims description 6
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 150000008064 anhydrides Chemical group 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 claims description 3
- 244000028419 Styrax benzoin Species 0.000 claims description 3
- 235000000126 Styrax benzoin Nutrition 0.000 claims description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 claims description 3
- 125000004018 acid anhydride group Chemical group 0.000 claims description 3
- 229960002130 benzoin Drugs 0.000 claims description 3
- 235000019382 gum benzoic Nutrition 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 3
- 125000003261 o-tolyl group Chemical group [H]C1=C([H])C(*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 claims description 3
- MHDULSOPQSUKBQ-UHFFFAOYSA-N 2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 MHDULSOPQSUKBQ-UHFFFAOYSA-N 0.000 claims description 2
- MXMZCLLIUQEKSN-UHFFFAOYSA-N benzimidazoline Chemical compound C1=CC=C2NCNC2=C1 MXMZCLLIUQEKSN-UHFFFAOYSA-N 0.000 claims description 2
- 125000001037 p-tolyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 claims description 2
- 239000003505 polymerization initiator Substances 0.000 claims description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 claims 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- AZUHIVLOSAPWDM-UHFFFAOYSA-N 2-(1h-imidazol-2-yl)-1h-imidazole Chemical compound C1=CNC(C=2NC=CN=2)=N1 AZUHIVLOSAPWDM-UHFFFAOYSA-N 0.000 claims 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 56
- -1 oxime ester compound Chemical class 0.000 description 36
- 239000000049 pigment Substances 0.000 description 22
- 239000011159 matrix material Substances 0.000 description 20
- 229920005989 resin Polymers 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 16
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 11
- 239000000178 monomer Substances 0.000 description 11
- 239000006229 carbon black Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 239000003822 epoxy resin Substances 0.000 description 10
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 10
- 229920000647 polyepoxide Polymers 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 239000003795 chemical substances by application Substances 0.000 description 9
- 238000011161 development Methods 0.000 description 9
- 230000018109 developmental process Effects 0.000 description 9
- 239000007787 solid Substances 0.000 description 9
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 125000001624 naphthyl group Chemical group 0.000 description 5
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 5
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- 125000003545 alkoxy group Chemical group 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012860 organic pigment Substances 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000001023 inorganic pigment Substances 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 229920005862 polyol Polymers 0.000 description 3
- 150000003077 polyols Chemical class 0.000 description 3
- 150000007519 polyprotic acids Polymers 0.000 description 3
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 3
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- 125000004860 4-ethylphenyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])C([H])([H])[H] 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- FFOPEPMHKILNIT-UHFFFAOYSA-N Isopropyl butyrate Chemical compound CCCC(=O)OC(C)C FFOPEPMHKILNIT-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- XUPYJHCZDLZNFP-UHFFFAOYSA-N butyl butanoate Chemical compound CCCCOC(=O)CCC XUPYJHCZDLZNFP-UHFFFAOYSA-N 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- 125000000040 m-tolyl group Chemical group [H]C1=C([H])C(*)=C([H])C(=C1[H])C([H])([H])[H] 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- LPEKGGXMPWTOCB-UHFFFAOYSA-N methyl 2-hydroxypropionate Chemical compound COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- ZMKHGTFOTMLCNQ-UHFFFAOYSA-N (2,3-diethoxy-4-propylphenyl) but-2-enoate Chemical compound CC=CC(=O)OC1=C(C(=C(C=C1)CCC)OCC)OCC ZMKHGTFOTMLCNQ-UHFFFAOYSA-N 0.000 description 1
- HJIAMFHSAAEUKR-UHFFFAOYSA-N (2-hydroxyphenyl)-phenylmethanone Chemical compound OC1=CC=CC=C1C(=O)C1=CC=CC=C1 HJIAMFHSAAEUKR-UHFFFAOYSA-N 0.000 description 1
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 1
- OWSKJORLRSWYGK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) propanoate Chemical compound CCC(=O)OCCC(C)(C)OC OWSKJORLRSWYGK-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- XLYMOEINVGRTEX-ONEGZZNKSA-N (e)-4-ethoxy-4-oxobut-2-enoic acid Chemical compound CCOC(=O)\C=C\C(O)=O XLYMOEINVGRTEX-ONEGZZNKSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- QWQFVUQPHUKAMY-UHFFFAOYSA-N 1,2-diphenyl-2-propoxyethanone Chemical compound C=1C=CC=CC=1C(OCCC)C(=O)C1=CC=CC=C1 QWQFVUQPHUKAMY-UHFFFAOYSA-N 0.000 description 1
- 229940031723 1,2-octanediol Drugs 0.000 description 1
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 1
- VZXPHDGHQXLXJC-UHFFFAOYSA-N 1,6-diisocyanato-5,6-dimethylheptane Chemical compound O=C=NC(C)(C)C(C)CCCCN=C=O VZXPHDGHQXLXJC-UHFFFAOYSA-N 0.000 description 1
- UWFRVQVNYNPBEF-UHFFFAOYSA-N 1-(2,4-dimethylphenyl)propan-1-one Chemical compound CCC(=O)C1=CC=C(C)C=C1C UWFRVQVNYNPBEF-UHFFFAOYSA-N 0.000 description 1
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- 229930003836 cresol Natural products 0.000 description 1
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- MGNCLNQXLYJVJD-UHFFFAOYSA-N cyanuric chloride Chemical compound ClC1=NC(Cl)=NC(Cl)=N1 MGNCLNQXLYJVJD-UHFFFAOYSA-N 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
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- MHDVGSVTJDSBDK-UHFFFAOYSA-N dibenzyl ether Chemical compound C=1C=CC=CC=1COCC1=CC=CC=C1 MHDVGSVTJDSBDK-UHFFFAOYSA-N 0.000 description 1
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- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
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- 125000005745 ethoxymethyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])* 0.000 description 1
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- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
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- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
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- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
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- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
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- G—PHYSICS
- G02—OPTICS
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- G02B5/20—Filters
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Architecture (AREA)
- Engineering & Computer Science (AREA)
- Structural Engineering (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
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Description
本發明係關於感光性樹脂組成物,以及使用其之彩色濾光片及顯示裝置。
液晶顯示器等顯示裝置為在形成相互對向相對之電極之兩片基板之間夾持液晶層之構造。而且,於其一方之基板之內側形成有由紅色(R)、綠色(G)、藍色(B)等各色之像素區域所組成之彩色濾光片。該彩色濾光片中,通常以區分成紅色、綠色、藍色等之各像素區域之方式形成黑色基質。
一般,彩色濾光片係以微影法製造。亦即,首先將黑色感光性樹脂組成物塗佈於基板上,經乾燥後,予以曝光、顯像,形成黑色基質。接著,以紅色、綠色、藍色等各色之感光性樹脂組成物重複塗佈、乾燥、曝光及顯像,在特定位置上形成各色之像素區域,製造彩色濾光片。
黑色基質係由含有遮光劑之感光性樹脂組成物製作而成之圖型,藉由抑制自各像素區域之光漏,有助於獲得顯示裝置中之對比性之提高或良好之顯色。且,如上述,於彩色濾光片製作之最初階段形成之黑色基質亦擔負著形成用以埋入隨後對各像素區域著色之感光性樹脂組成物之凹部,並在特定位置形成各色像素區域之角色。
近年來,液晶顯示器之製造中已嘗試利用黑色基質而
改善遮光性,進一步提高液晶顯示器所顯示之圖像之對比性。因此,必須在用以形成黑色基質之感光性樹脂組成物中含大量遮光劑。然而,如此感光性樹脂組成物中含大量遮光劑時,使塗佈於基板上之感光性樹脂組成物之膜曝光後,用以使感光性樹脂組成物硬化之光難以到達膜之底部,會有隨著硬化性樹脂組成物之感度顯著下降而導致硬化不良之虞。
感光性樹脂組成物係藉由使成為其成分之一部份而含有之光聚合起始劑曝光而產生自由基,該自由基使感光性樹脂組成物中所含之聚合性化合物聚合而硬化。因此。感光性樹脂組成物之感度已知隨著其中所含之光聚合起始劑之種類而受到影響。又,近年來,隨著液晶顯示器之生產台數增大,彩色濾光片之生產量亦增大,就進一步提高生產性之觀點而言,期望可在低曝光量下形成圖型之高感度之感光性樹脂組成物。該種情況下,作為可使感光性樹脂組成物之感度變良好之光聚合起始劑,在專利文獻1及2中提案有具有環烷基之肟酯化合物。專利文獻1及2中所記載之實施例中具體揭示以下述化學式(a)及(b)(專利文獻1),以及以下述化學式(c)及(d)(專利文獻2)表示之化合物。
[專利文獻1]中華人民共和國公開專利公報第101565472號
[專利文獻2]中華人民共和國公開專利公報第101508744號
藉由使用以上述化學式(a)~(d)表示之化合物作為光聚合起始劑,可製作高感度之感光性樹脂組成物。然而,本發明人等發現使用該等化合物作為光聚合起始劑形成黑色基質時雖感度良好,但相反地於形成之黑色基質之圖型形狀會產生如下問題。
通常,使用感光性樹脂組成物形成液晶顯示器用之彩
色濾光片之圖型時,如圖1(a)所示,一般而言會成為該圖型之寬度方向剖面之剖面1愈接近底邊1a寬度愈寬,愈接近頂邊1b寬度愈狹窄之梯形形狀。此時,圖型之剖面1與彩色濾光片基板(未圖示)間所成之角度θ成為銳角。
然而,使用含有以上述化學式(a)~(d)表示之化合物作為光聚合起始劑之感光性樹脂組成物來形成黑色基質時,如圖1(b)所示,會有顯像時隨著圖型底部之一部份溶解,該圖型寬度方向之剖面圖之剖面2中之底邊2a兩端產生底切21之情況。此時,圖型之剖面2與彩色濾光片基板(未圖示)間所成之角度θ為鈍角。該角度θ為鈍角時,於形成鄰接於黑色基質之紅色、綠色、藍色等之各色像素區域時,會於底切21部分產生氣泡。亦即,形成鄰接黑色基質之像素區域形成用之感光性樹脂組成物之膜後,感光性樹脂組成物不會進入存在底切21之空間中,而在該空間中殘留氣泡。該種氣泡存在於彩色濾光片中時,由於會大幅損及液晶顯示裝置之畫質而會有問題。該問題在黑色基質之圖型形成時之顯像於稍過量之過度顯像時尤其顯著發生。
本發明係鑑於上述情況而完成者,其目的係提供一種具有良好感度,且即使在感光性樹脂組成物含遮光劑,或曝光量不足之情況下,仍可抑制顯像後之圖型發生底切之感光性樹脂組成物,以及使用其之彩色濾光片及顯示裝置。
本發明人等為解決上述課題而積極檢討之結果,發現藉由組合使用以下述通式(1)表示之肟酯化合物與其他光聚合起始劑,可維持使用肟酯化合物之良好感度,且抑制圖型之底切,因而完成本發明。
本發明之第一樣態為一種感光性樹脂組成物,其含有(A)光聚合性化合物,及(B)以下述通式(1)表示之肟系光聚合起始劑,且進而含有(C)與前述(B)成分不同之光聚合起始劑,
(上述通式(1)中,1為1~5之整數,m為0~(1+3)之整數,n為1~8之整數,R1為可具有取代基之碳數1~11之烷基,或可具有取代基之芳基,R2為以下述通式(2)~(4)表示之取代基之任一種,R3為碳數1~11之烷基、或芳基),
(上述通式(2)及(3)中,R4為可具有取代基之芳基,R5為氫原子、可具有取代基之碳數1~10之烷基、或芳基,上述通式(4)中,R6為可具有取代基之芳基)。
且本發明之第二樣態為使用上述感光性樹脂組成物形成之彩色濾光片。
又本發明之第三樣態為使用上述彩色濾光片之顯示裝置。
依據本發明,提供一種具有良好感度,且即使在感光性樹脂組成物含遮光劑,或曝光量不足之情況,仍可抑制顯像後之圖型出現底切之感光性樹脂組成物,以及使用該等之彩色濾光片及顯示裝置。
本發明之感光性樹脂組成物至少含有(A)光聚合性化合物,(B)肟系光聚合起始劑,及(C)與上述(B)
成分不同之光聚合起始劑。以下,針對本發明之感光性樹脂組成物中含有之各成分加以詳細說明。
本發明之感光性樹脂組成物中所含有之(A)光聚合性化合物(以下亦稱為「(A)成分」)並無特別限制,可使用過去習知之光聚合性化合物。其中,較好為具有乙烯性不飽和基之樹脂或單體,更好為組合該等者。藉由組合具有乙烯性不飽和基之樹脂與具有乙烯性不飽和基之單體,可提高感光性樹脂組成物之硬化性,而使圖型形成容易。
具有乙烯性不飽和基之樹脂列舉為使(甲基)丙烯酸、富馬酸、馬來酸、富馬酸單甲酯、富馬酸單乙酯、(甲基)丙烯酸2-羥基乙酯、乙二醇單甲醚(甲基)丙烯酸酯、乙二醇單乙醚(甲基)丙烯酸酯、丙三醇(甲基)丙烯酸酯、(甲基)丙烯醯胺、丙烯腈、甲基丙烯腈、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸苄酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、四羥
甲基丙烷四(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、cardo環氧二丙烯酸酯等聚合而成之寡聚物類;使多元醇類與單元酸或多元酸縮合獲得之聚酯預聚物再與(甲基)丙烯酸反應獲得之聚酯(甲基)丙烯酸酯;使多元醇與帶有兩個異氰酸酯基之化合物反應後,再與(甲基)丙烯酸反應獲得之聚胺基甲酸酯(甲基)丙烯酸酯;使雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、酚或甲酚酚醛清漆型環氧樹脂、甲階型環氧樹脂、三酚甲烷型環氧樹脂、聚碳酸聚縮水甘油酯、多元醇聚縮水甘油酯、脂肪族或脂環式環氧樹脂、胺環氧樹脂、二羥基苯型環氧樹脂等之環氧樹脂,與(甲基)丙烯酸反應獲得之環氧(甲基)丙烯酸酯樹脂等。另外,可使用使環氧(甲基)丙烯酸酯樹脂與多元酸酐反應而成之樹脂。又,本說明書中之「(甲基)丙烯酸」意指「丙烯酸或甲基丙烯酸」。
另外,具有乙烯性不飽和基之樹脂可較好地使用藉由使環氧化合物與含有不飽和基之羧酸化合物之反應物再與多元酸酐反應而得之樹脂。
其中,較好為以下述式(a1)表示之化合物。以該式(a1)表示之化合物其本身由於光硬化性高故較佳。
上述式(a1)中,X表示以下述式(a2)表示之基。
上述式(a2)中,R1a各獨立表示氫原子、碳數1~6之烴基、或鹵素原子,R2a各獨立表示氫原子或甲基,W表示單鍵或以下述式(a3)表示之基。
又,上述式(a1)中,Y表示由二羧酸酐去除酸酐基(-CO-O-CO-)之殘基。二羧酸酐之例列舉為馬來酸酐、琥珀酸酐、衣康酸酐、苯二甲酸酐、四氫苯二甲酸酐、六氫苯二甲酸酐、甲基橋-亞甲基四氫苯二甲酸酐、氯菌酸酐(chlorendic anhydride)、甲基四氫苯二甲酸酐、戊二酸酐等。
且,上述式(a1)中,Z表示自四羧酸二酐去除兩個
酸酐基之殘基。四羧酸二酐之例列舉為均苯四酸酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、聯苯醚四羧酸二酐等。
又,上述式(a1)中,m表示0~20之整數。
具有乙烯性不飽和基之樹脂之酸價以樹脂固體成分計,較好為10~150mgKOH/g,更好為70~110mgKOH/g。藉由使酸價成為10mgKOH/g以上,可獲得對顯像液足夠之溶解性故較佳。且,藉由使酸價為150mgKOH/g以下,可獲得充分硬化性,可使表面性良好故較佳。
又,具有乙烯性不飽和基之樹脂之質量平均分子量較好為1000~40000,更好為2000~30000。藉由使質量平均分子量為1000以上,可獲得良好之耐熱性、膜強度故而較佳。且,藉由使質量平均分子量為40000以下,可獲得良好顯像性故而較佳。
具有乙烯性不飽和基之單體有單官能單體與多官能單體。
單官能單體列舉為(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、馬來酸酐、衣康酸、衣康酸酐、檸康酸
、檸康酸酐、巴豆酸、2-丙烯醯胺-2-甲基丙烷磺酸、第三丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、2-(甲基)丙烯醯氧基-2-羥基丙基苯二甲酸酯、甘油單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯、二甲胺基(甲基)丙烯酸酯、縮水甘油基(甲基)丙烯酸酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、苯二甲酸衍生物之半(甲基)丙烯酸酯等。該等單官能單體可單獨使用,亦可組合兩種以上使用。
另一方面,多官能單體列舉為乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、丙三醇二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)
丙烯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二縮水甘油基醚二(甲基)丙烯酸酯、二乙二醇二縮水甘油醚二(甲基)丙烯酸酯、苯二甲酸二縮水甘油酯二(甲基)丙烯酸酯、丙三醇三丙烯酸酯、丙三醇聚縮水甘油醚聚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯(亦即,甲苯二異氰酸酯)、三甲基六亞甲基二異氰酸酯與六亞甲基二異氰酸酯及(甲基)丙烯酸2-羥基乙酯之反應物、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等之多官能單體,或三丙烯酸甲縮醛等。該等多官能單體可單獨使用,亦可組合兩種以上使用。
(A)成分的光聚合性化合物之含量相對於感光性樹脂組成物之固體成分之合計100質量份較好為10~99.9質量份。藉由使(A)成分之含量相對於固體成分之合計100質量份為10質量份以上,可期待形成之圖型之足夠耐熱性及耐藥品性。
本發明之感光性樹脂組成物中含有之(B)肟系光聚合起始劑(以下亦稱為「(B)成分」)為以下述通式(1)表示之化合物。如先前所述,肟系光聚合起始劑尤其在如黑色基質形成用之感光性樹脂組成物之組成物含遮光劑時雖亦具有良好之感度,但另一方面會有在形成之圖型中
產生底切之情況。本發明人發現尤其藉由組合使用下述通式(1)之肟系光聚合起始劑與後述之(C)成分作為感光性樹脂組成物之光聚合起始劑,可對感光性樹脂組成物賦予良好感度,同時可抑制形成之圖型中之底切,因而完成本發明。
上述通式(1)中,1為1~5之整數,m為0~(1+3)之整數,n為1~8之整數,R1為可具有取代基之碳數1~11之烷基,或為可具有取代基之芳基,R2為以下述通式(2)~(4)表示之取代基之任一種,R3為碳數1~11之烷基、或芳基。R1為烷基時可具有之取代基較佳之例示為苯基、萘基等。又,R1為芳基時可具有之取代基較佳之例示為碳數1~5之烷基、烷氧基、鹵素原子等。
上述通式(1)中,作為R1較好例示為甲基、乙基、丙基、異丙基、丁基、苯基、苄基、甲基苯基、萘基等。其中,更好為甲基或苯基。又,上述通式(1)中,R3較佳例示為甲基、乙基、丙基、異丙基、丁基、苯基等。該等中,更好為甲基。
上述通式(2)及(3)中,R4為可具有取代基之芳基,R5為氫原子、可具有取代基之碳數1~10之烷基、或芳基。R4之芳基可具有之取代基較佳例示為碳數1~5之烷基、碳數1~5之烷氧基、鹵素原子等。又,R5為烷基時可具有之取代基較佳例示為碳數1~5之烷氧基、苯基、萘基等。
上述通式(2)及(3)中,作為R4較佳例示為苯基、2-甲基苯基、3-甲基苯基、4-甲基苯基、2-乙基苯基、3-乙基苯基、4-乙基苯基、2,3-二甲基苯基、2,4-二甲基苯基、2,5-二甲基苯基、2,6-二甲基苯基、萘基、2-甲氧基-1-萘基、9-蒽基等。上述通式(2)及(3)中,R5較佳例示為氫原子、甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、苯基、3-甲基丁基、3-甲氧基丁基等,該等中,更好為乙基。
上述通式(4)中,R6為可具有取代基之芳基。R6之芳基可具有之取代基較佳例示為碳數1~5之烷基、碳數1~5之烷氧基、鹵素原子等。
該等R6較佳例示為苯基、2-甲基苯基、3-甲基苯基、
4-甲基苯基、2-乙基苯基、3-乙基苯基、4-乙基苯基、2,3-二甲基苯基、2,4-二甲基苯基、2,5-二甲基苯基、2,6-二甲基苯基、萘基、對-第三丁基苯基、對-甲氧基苯基等,該等中,更好例示為苯基。
更具體而言,可較好例示下述式之化合物作為(B)肟系光聚合起始劑。
(B)成分的肟系光聚合起始劑之含量相對於感光性樹脂組成物之固體成分之合計100質量份,較好為0.1~50質量份,更好為1~45質量份。藉由成為上述範圍內,可獲得足夠之耐熱性、耐藥品性,同時可提高塗膜形成能力,抑制光硬化不良。
本發明之感光性樹脂組成物中含有之(C)光聚合起始劑(以下亦稱為「(C)成分」)為與作為上述(B)成分使用之光聚合起始劑不同之光聚合起始劑。(C)成分只要為與上述(B)成分不同之化合物即可,且與上述(B)成分同樣,亦可為肟系光聚合起始劑。
(C)成分只要是藉由紫外線或電子束等之活性能量線之照射而產生自由基之化合物即無特別限制。該種光聚合起始劑例示為2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)丁酮-1、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙-1-酮、2-苄基-2-二甲胺基-1-(4-二甲胺基苯基)丁酮-1、2-(4-甲基苄基)-2-二乙胺基-1-(4-嗎啉基苯基)丁酮-1、2-甲基-1-苯基-2-嗎啉基丙-1-酮、2-甲基-1-[4-(己基)苯基]-2-嗎啉基丙-1-酮、2-乙基-2-二甲胺基-1-(4-嗎啉基苯基)丁酮-1等之α-胺基酮系光聚合起始劑;1-苯基-2-羥基-2-甲基丙-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙-1-酮、4-(2-羥基乙氧基)苯基-(2-羥基-2-丙基)酮、1-羥基環己基苯基酮等之α-羥基酮系光聚合起始劑;苯偶因、
苯偶因甲基醚、苯偶因乙基醚、苯偶因丙基醚、苄基甲基縮酮等苯偶因系光聚合起始劑;二苯甲酮、苯甲醯基苯甲酸、苯甲醯基苯甲酸甲酯、4-苯基二苯甲酮、羥基二苯甲酮、丙烯酸化二苯甲酮、4-苯甲醯、4’-甲基二苯基硫醚、4,4’-雙二乙胺基二苯甲酮等二苯甲酮系光聚合起始劑;噻噸酮、2-氯噻噸酮、2-甲基噻噸酮、異丙基噻噸酮、2,4-二異丙基噻噸酮等噻噸酮系光聚合起始劑,2,4,6-三氯-s-三嗪、2-苯基-4,6-雙(三氯甲基)-s-三嗪、2-(對-甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2-(對-甲苯基)-4,6-雙(三氯甲基)-s-三嗪、2-胡椒基-4,6-雙(三氯甲基)-s-三嗪、2,4-雙(三氯甲基)-6-苯乙烯基-s-三嗪、2-(萘-1-基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基-萘-1-基)-4,6-雙(三氯甲基)-s-三嗪、2,4-三氯甲基-(胡椒基)-6-三嗪、2,4-三氯甲基-(4’-甲氧基苯乙烯基)-6-三嗪、2-[4-(4-甲氧基苯乙烯基)苯基]4,6-雙(三氯甲基)-1,3,5-三嗪等三嗪系光聚合起始劑;咔唑系光聚合起始劑;2,2’-雙(2-氯苯基)-4,4’,5,5’-肆(4-乙氧基羰基苯基)-1,2’-聯咪唑、2,2’-雙(2-溴苯基)-4,4’,5,5’-肆(4-乙氧基羰基苯基)-1,2’-聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2-溴苯基)-4,4’,5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二溴苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4,6-三溴苯基)-
4,4',5,5'-四苯基-1,2’-聯咪唑等聯咪唑系光聚合起始劑;2-(O-苯甲醯基肟)-1-[4-(苯硫基)苯基]-1,2-辛二醇、1-(4-甲基胺磺醯基苯基)丁烷-1、2-丁烷-2-肟-O-乙酸酯、1-(4-甲基胺磺醯基苯基)丁烷-1-酮肟-O-乙酸酯、羥基亞胺基(4-甲基胺磺醯基苯基)乙酸乙酯-O-乙酸酯、羥基亞胺基(4-甲基胺磺醯基苯基)乙酸乙酯-O-苯甲酸酯等肟系光聚合起始劑;以下式表示之苯并咪唑啉系光聚合起始劑等。
上述例示之光聚合起始劑中,可較好地使用α-胺基酮系光聚合起始劑、二苯甲酮系光聚合起始劑、三嗪系光聚合起始劑、咔唑系光聚合起始劑。又,上述光聚合起始劑可單獨使用,亦可組合兩種以上使用。
(C)成分之含量相對於感光性樹脂組成物之固體成分之合計100質量份,較好為0.1~50質量份,更好為1~45質量份。又,上述(B)成分與(C)成分之比率以質量比計較好為(B)成分/(C)成分=100/1~1/100之範圍,更好為(B)成分/(C)成分=10/1~1/10之範圍。藉由使(B)成分與(C)成分之比率在上述範圍內,可維持感光性樹脂組成物之良好感度,同時可抑制由感光性樹脂組成物所形成之圖型中之底切發生。
本發明之感光性樹脂組成物亦可進而含有(D)著色劑(以下亦稱為「(D)成分」)。感光性樹脂組成物藉由含有(D)成分的著色劑,可較好地使用作為例如液晶顯示器之彩色濾光片形成用途。又,本發明之感光性樹脂組成物藉由含遮光劑作為(D)成分,可較好地使用作為例如顯示裝置之彩色濾光片中之黑色基質形成用途。
本發明之感光性樹脂組成物中所含有之(D)成分並無特別限制,但較好使用例如色彩指數(C.I.;The Society of Dyers and Colourists公司發行)中歸類為顏料(pigment)之化合物,具體為如下述之附加色彩指數(C.I.)編號者。
C.I.顏料黃1(以下,同樣為「C.I.顏料黃」,僅列出編號)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73、74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、151、152、153、154、155、156、166、167、168、175、180、185;C.I.顏料橙1(以下,同樣為「C.I.顏料橙」,僅列出編號)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、73;C.I.顏料紫1(以下,同樣為「C.I.顏料紫」,僅列出
編號)、19、23、29、30、32、36、37、38、39、40、50;C.I.顏料紅1(以下,同樣為「C.I.顏料紅」,僅列出編號)、2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、265;C.I.顏料藍1(以下,同樣為「C.I.顏料藍」,僅列出編號)、2、15、15:3、15:4、15:6、16、22、60、64、66;C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠37、C.I.顏料棕23、C.I.顏料棕25、C.I.顏料棕26、C.I.顏料棕28;C.I.顏料黑1、C.I.顏料黑7。
又,以成分(D)作為遮光劑時,遮光劑較好使用黑色顏料。作為黑色顏料可列舉為碳黑、鈦黑、銅、鐵、錳、鈷、鉻、鎳、鋅、鈣、銀等金屬氧化物、複合氧化物、
金屬硫化物、金屬硫酸鹽或金屬碳酸鹽等,無論是有機物、無機物之各種顏料。該等中,較好使用具有高遮光性之碳黑。藉由併用上述(B)成分與(C)成分作為光聚合起始劑,即使使用遮光性高之黑色顏料,亦可抑制顯像後之圖型出現底切之問題。
至於碳黑可使用槽黑(channel black)、爐黑、熱裂碳黑、燈黑等習知之碳黑,但較好使用遮光性優異之槽黑。又,亦可使用被覆樹脂之碳黑。
被覆樹脂之碳黑相較於未被覆樹脂之碳黑,由於導電性較低,故使用作為如液晶顯示器之液晶顯示元件之黑色基質時,電流洩漏較少,可製造信賴性高且電力消耗低之顯示器。
又,為了調整碳黑之色調,亦可適當添加上述有機顏料作為輔助顏料。
為使上述(D)成分均勻分散於感光性樹脂組成物中,可進而使用分散劑。該種分散劑較好使用聚乙烯亞胺系、胺基甲酸酯樹脂系、丙烯酸樹脂系高分子分散劑。尤其,使用碳黑作為(D)成分時,較好使用丙烯酸樹脂系之分散劑作為分散劑。
又,無機顏料與有機顏料可分別單獨使用或併用兩種以上,但併用時,相對於無機顏料與有機顏料之總量100質量份,較好使用10~80質量份範圍之有機顏料,更好使用20~40質量份之範圍。
感光性樹脂組成物中之著色劑之使用量只要依據感光
性樹脂組成物之用途適當決定即可,但其一例,為相對於感光性樹脂組成物之固體成分之合計100質量份,較好為5~70質量份,更好為25~60質量份。藉由在上述範圍內,可以目標圖型形成黑色基質或各著色層而較佳。
尤其,使用感光性樹脂組成物形成黑色基質時,較好以使黑色基質之被膜每1μm之OD值為4以上之方式調整感光性樹脂組成物中之遮光劑之量。黑色基質中被膜每1μm之OD值若為4以上,則使用於液晶顯示器之黑色基質中時,可獲得足夠之顯示對比性。
(D)成分較好使用分散劑以適當濃度分散成分散液後,添加於感光性樹脂組成物中。
本發明之感光性樹脂組成物中,可視需要添加各種添加劑。具體例示為溶劑、增感劑、硬化促進劑、光交聯劑、光增感劑、分散助劑、填充劑、密合促進劑、抗氧化劑、紫外線吸收劑、抗凝聚劑、熱聚合抑制劑、消泡劑、界面活性劑等。
本發明之感光性樹脂組成物中使用之溶劑列舉為例如乙二醇單甲醚、乙二醇單乙醚、乙二醇正丙醚、乙二醇單正丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單正丙醚、丙二醇單正丁醚、二丙二醇單甲醚、二丙二醇單乙醚、
二丙二醇單正丙醚、二丙二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等之(聚)烷二醇單烷基醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等之(聚)烷二醇單烷基醚乙酸酯類;二乙二醇二甲醚、二乙二醇甲基乙基醚、二乙二醇二乙醚、四氫呋喃等之其他醚類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、乙酸3-甲基-3-甲氧基丁基酯、丙酸3-甲基-3-甲氧基丁基酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯基乙酸甲酯、乙醯基乙酸乙酯、2-氧代丁酸乙酯等其他酯類;甲苯、二甲苯等芳香族烴類;N-甲基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等醯胺類等。該等溶劑可單獨使用,亦可組合兩種以上使用。
上述溶劑中,丙二醇單甲醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、二乙二醇二甲醚、二乙二醇甲基乙基醚、環己酮、乙酸3-甲氧基丁基酯對於上述之(A)成分、(B)成分及(C)成分顯示優
異之溶解性,同時可使上述之(D)成分之分散性良好故而較佳,最好使用丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁基酯。溶劑較好依據感光性樹脂組成物之用途適當決定,其一例,列舉為相對於感光性樹脂組成物之固體成分之合計100質量份為50~900質量份左右。
本發明之感光性樹脂組成物中使用之熱聚合抑制劑可列舉為例如氫醌、氫醌單乙醚等。另外,消泡劑分別例示為矽氧系、氟系等化合物,界面活性劑例示為陰離子系、陽離子系、非離子系等之化合物。
本發明之感光性樹脂組成物可藉攪拌機混合上述各成分全部而調製。又,亦可使用過濾器過濾使經調製之感光性樹脂組成物成為均勻者。
使用本發明之感光性樹脂組成物形成圖型首先係使用輥塗佈器、逆轉塗佈器、棒塗佈器等接觸轉印型塗佈裝置或旋轉塗佈器(旋轉式塗佈裝置)、簾流式塗佈器等非接觸型塗佈裝置,將感光性樹脂組成物塗佈於基板上。
接著,使經塗佈之感光性樹脂組成物乾燥形成塗膜。乾燥方法並無特別限制,列舉為例如(1)以加熱板在80~120℃,較好90~100℃之溫度乾燥60~120秒之方法,(2)在室溫放置數小時至數天之方法,(3)在溫風加熱器
或紅外線加熱器中放置數十分鐘至數小時而去除溶劑之方法等。
接著,透過負型光罩對該塗膜照射紫外線、準分子雷射光等活性能量線予以部分曝光。照射之能量線之量係依據感光性樹脂組成物之組成而不同,但較好為例如30~200 mJ/cm2左右。
接著,以顯像液使曝光後之膜顯像,圖型化成期望形狀。顯像方法並無特別限制,可使用例如浸漬法、噴霧法等。顯像液列舉為單乙醇胺、二乙醇胺、三乙醇胺等有機系者,或氫氧化鈉、氫氧化鉀、碳酸鈉、氨、四級銨鹽等水溶液。如先前說明,藉由使用本發明之感光性樹脂組成物,顯像後形成之圖型中之底切受到抑制。因此,若使用本發明之感光性樹脂組成物,則製作例如顯示裝置用之彩色濾光片時,可抑制氣泡進入到各像素邊界部附近故較佳。
接著,較好在200℃~250℃左右對經顯像圖型進行後烘烤。
如此形成之圖型可適當地使用作為例如液晶顯示器等之顯示裝置中之彩色濾光片之像素或黑色基質。該彩色濾光片或使用該彩色濾光片之顯示裝置亦為本發明之一。
以下例示實施例更具體說明本發明,但本發明之範圍並不受限於該等實施例。
使用下述式B1~B12之化合物作為肟系光聚合起始劑,且使用下述式C1~C9之化合物作為其他光聚合起始劑,調製實施例1~20及比較例1~15之感光性樹脂組成物。下述式B1~B12之肟系光聚合起始劑中,式B1~B8之化合物相當於上述通式(1)之肟系光聚合起始劑。各實施例及比較例之感光性樹脂組成物中之光聚合起始劑如表1~3所示。又,表1~3中,「肟/其他之比」該項所示之比率表示感光性樹脂組成物所含光聚合起始劑中,肟系之光聚合起始劑與其他光聚合起始劑之質量比。
各感光性樹脂組成物之調製係在光聚合起始劑(肟系及其他光聚合起始劑之合計)100質量份、下述樹脂A(固體成分55質量%,溶劑乙酸3-甲氧基丁酯)310質量份、二季戊四醇六丙烯酸酯(DPHA,日本化藥股份有限公司製造)175質量份、及碳黑分散液(碳黑含量20質量%,「CF Black」,御國色素股份有限公司製造)450質量份之混合物中,以使固體成分成為15質量%之方式添加乙酸3-甲氧基丁基酯/環己酮/丙二醇單甲醚乙酸酯(PGMEA)=60/20/20(重量比),且攪拌直至均勻而進行。
上述感光性樹脂之調製中使用之樹脂A為與特開2010-32940號公報之段落0063~0064中記載之樹脂A-1相
同者。
分別針對實施例1~20及比較例1~15之感光性樹脂組成物,以下述順序進行感度評價。首先,將感光性樹脂組成物旋轉塗佈於玻璃基板(10cm×10cm)上,在90℃加熱120秒,藉以於玻璃基板之表面形成1.0μm之塗佈膜。隨後,使用鏡面投射分析儀(製品名:TME-150RTO,TOPCON股份有限公司製造),透過形成線寬10μm之直線圖型之負型光罩,使間距為50μm,以30mJ/cm2、60mJ/cm2、120mJ/cm2三種曝光量使塗佈膜曝光。曝光後之膜以26℃之0.04質量% KOH水溶液顯像50秒後,在230℃進行燒成處理30分鐘,使用掃描電子顯微鏡,分別針對30mJ/cm2、60mJ/cm2、120mJ/cm2三種曝光量求得形成之直線圖型之線寬。使用所得結果,自各線寬與曝光量以最小平方法之近似計算,算出獲得10μm之線寬時之曝光量。其結果,作為感度列於表1~3。又,感度數值愈小意指感光性樹脂組成物之感度愈高。且,表1~3中,為了
使各實施例及比較例之對比變得容易,故重複列出一部份實施例及比較例之內容。
分別針對實施例1~20及比較例1~15之感光性樹脂組成物,以下述順序進行曝光,接著進行顯像後之圖型中有無底切,亦即圖型形狀之評價。首先,將感光性樹脂組成物旋轉塗佈於玻璃基板(10cm×10cm)上,在90℃加熱120秒,而於玻璃基板表面形成1.0μm之塗佈膜。隨後,使用鏡面投射分析儀(製品名:TME-150RTO,TOPCON股份有限公司製造),透過形成線寬10μm之直線圖型之負型光罩,以曝光量100mJ/cm2(間距50μm)曝光。曝光後之膜以26℃之0.04質量% KOH水溶液顯像50秒後,在230℃進行燒成處理30分鐘,以掃描電子顯微鏡測定圖型與基板間之接合角度(錐角)。該錐角係對應於圖1(a)及(b)中之角度θ。測定之錐角列於表1~3。若錐角為銳角,則意指圖型中不存在底切,若錐角為鈍角,則意指圖型中存在底切。
如由表1~3所了解,具備本發明中之(B)成分及(C)成分之實施例1~20之感光性樹脂組成物為具有實用感度者。
又,若對實施例10、11、13、15及16之感光性樹脂組成物與比較例7~11之感光性樹脂組成物進行比較時,可知藉由組合上述(B)成分及(C)成分作為光聚合起始
劑,所形成之圖型之錐角成為銳角,可有效地抑制圖型底切。
1‧‧‧不存在底切之圖型中之寬度方向之剖面
1a‧‧‧底邊
1b‧‧‧頂邊
2‧‧‧存在底切之圖型中之寬度方向之剖面
2a‧‧‧底邊
2b‧‧‧頂邊
21‧‧‧底切
圖1為顯示由感光性樹脂組成物形成之圖型之寬度方向之剖面形狀之示意圖,(a)為顯示通常圖型剖面形狀之圖,(b)為顯示產生底切21之圖型之剖面形狀之圖。
1‧‧‧不存在底切之圖型中之寬度方向之剖面
1a‧‧‧底邊
1b‧‧‧頂邊
2‧‧‧存在底切之圖型中之寬度方向之剖面
2a‧‧‧底邊
21‧‧‧底切
Claims (11)
- 一種感光性樹脂組成物,其含有(A)光聚合性化合物,及(B)以下述通式(1)表示之肟系光聚合起始劑,且進而含有(C)與前述(B)成分不同之選自由α-胺基酮系光聚合起始劑、α-羥基酮系光聚合起始劑、苯偶因系光聚合起始劑、三嗪系光聚合起始劑、咔唑系光聚合起始劑、聯咪唑系光聚合起始劑、肟系光聚合起始劑及苯并咪唑啉系光聚合起始劑所成之群的光聚合起始劑,
- 如申請專利範圍第1項之感光性樹脂組成物,其中前述(B)成分與前述(C)成分之質量比(B)/(C)=50/50~90/10。
- 如申請專利範圍第1或2項之感光性樹脂組成物,其中前述(A)成分為以下述通式(a1)表示之化合物,
- 一種感光性樹脂組成物,其係含有(A)光聚合性化合物,及(B)以下述通式(1)表示之肟系光聚合起始劑,且進而含有(C)與前述(B)成分不同之光聚合起始劑,
- 一種感光性樹脂組成物,其係含有(A)光聚合性化合物,及(B)選自由以下述式(B1)~(B8)表示之化合物所成之群的肟系光聚合起始劑,且進而含有(C) 選自由以下述式(C1)~(C9)表示之化合物所成之群的光聚合起始劑,惟下述組合除外:前述(B)成分為以下述式(B1)表示之化合物,且前述(C)成分為以下述(C3)、(C4)、(C5)、或(C7)表示之化合物的組合;
- 一種感光性樹脂組成物,其係含有(A)光聚合性化合物,及(B)選自由以下述式(B1)~(B8)表示之化合物所成之群的肟系光聚合起始劑,且進而含有(C)選自由以下述式(C1)~(C9)表示之化合物所成之群的光聚合起始劑,前述(B)成分與前述(C)成分之質量比(B)/(C)=50/50~90/10,惟下述組合除外:前述(B)成分為以下述式(B1)表示之化合物,且前述(C)成分為以下述(C3)、(C4)、或(C5)表示之化合物的組合;
- 一種感光性樹脂組成物,其係含有以下述通式(a1)表示之(A)光聚合性化合物,及(B)選自由以下述式(B1)~(B8)表示之化合物所成之群的肟系光聚合起始劑,且進而含有(C)選自由以下述式(C1)~(C9)表示之化合物所成之群的光聚合起始劑,前述(B)成分與前述(C)成分之質量比(B)/(C)=50/50~90/10,
- 如申請專利範圍第1、4、5、6或7項之感光性樹脂組成物,其進而含有著色劑(D)。
- 如申請專利範圍第8項之感光性樹脂組成物,其中前述著色劑為遮光劑。
- 一種彩色濾光片,其係使用如申請專利範圍第8或9項之感光性樹脂組成物而形成。
- 一種顯示裝置,其係使用如申請專利範圍第10項之彩色濾光片。
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