TWI535495B - 塗佈裝置 - Google Patents

塗佈裝置 Download PDF

Info

Publication number
TWI535495B
TWI535495B TW102106412A TW102106412A TWI535495B TW I535495 B TWI535495 B TW I535495B TW 102106412 A TW102106412 A TW 102106412A TW 102106412 A TW102106412 A TW 102106412A TW I535495 B TWI535495 B TW I535495B
Authority
TW
Taiwan
Prior art keywords
coating liquid
coating
substrate
gas supply
scanning direction
Prior art date
Application number
TW102106412A
Other languages
English (en)
Chinese (zh)
Other versions
TW201341065A (zh
Inventor
上野雅敏
小瀬弘和
Original Assignee
斯克林集團公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 斯克林集團公司 filed Critical 斯克林集團公司
Publication of TW201341065A publication Critical patent/TW201341065A/zh
Application granted granted Critical
Publication of TWI535495B publication Critical patent/TWI535495B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/06Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with a blast of gas or vapour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C17/00Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
    • B05C17/005Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces for discharging material from a reservoir or container located in or on the hand tool through an outlet orifice by pressure without using surface contacting members like pads or brushes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/40Distributing applied liquids or other fluent materials by members moving relatively to surface
    • B05D1/42Distributing applied liquids or other fluent materials by members moving relatively to surface by non-rotary members

Landscapes

  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Nozzles (AREA)
  • Electroluminescent Light Sources (AREA)
  • Spray Control Apparatus (AREA)
TW102106412A 2012-02-27 2013-02-23 塗佈裝置 TWI535495B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012040480A JP5750385B2 (ja) 2012-02-27 2012-02-27 塗布装置

Publications (2)

Publication Number Publication Date
TW201341065A TW201341065A (zh) 2013-10-16
TWI535495B true TWI535495B (zh) 2016-06-01

Family

ID=49089966

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102106412A TWI535495B (zh) 2012-02-27 2013-02-23 塗佈裝置

Country Status (4)

Country Link
JP (1) JP5750385B2 (ja)
KR (1) KR101466466B1 (ja)
CN (1) CN103288356B (ja)
TW (1) TWI535495B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016112797B3 (de) * 2016-07-12 2017-12-21 Eisenmann Se Vorrichtung und Verfahren zum Maskieren von Befestigungsbohrungen in Felgen
CN110523558A (zh) * 2019-08-28 2019-12-03 昆山工研院新型平板显示技术中心有限公司 一种涂布机构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842629A (ja) * 1981-09-08 1983-03-12 Showa Electric Wire & Cable Co Ltd プラスチツクチユ−ブ或いはパイプの架橋方法
JPH0771662A (ja) * 1993-09-02 1995-03-17 Nitta Moore Co Ltd 流体用集合配管
JPH09143670A (ja) * 1995-11-21 1997-06-03 Mitsubishi Materials Corp 酸化物系セラミックスコーティングディスクローター
JPH10236140A (ja) * 1997-02-26 1998-09-08 Toyota Autom Loom Works Ltd ビスカスヒータ
JP2000038024A (ja) 1998-07-23 2000-02-08 Toyota Autom Loom Works Ltd 熱発生器
JP2005218899A (ja) * 2004-02-03 2005-08-18 Toshiba Corp 塗布装置及びこれを備えた表示装置製造装置
KR100840482B1 (ko) * 2006-02-27 2008-06-20 다이니폰 스크린 세이조우 가부시키가이샤 도포 장치 및 도포 방법
JP2009131735A (ja) * 2007-11-28 2009-06-18 Dainippon Screen Mfg Co Ltd 塗布装置
WO2010033060A1 (en) * 2008-09-22 2010-03-25 Berg Propulsion Technology Ab An adjustable propeller arrangement and a method of distributing fluid to and/or from such an adjustable propeller arrangement.

Also Published As

Publication number Publication date
JP5750385B2 (ja) 2015-07-22
KR101466466B1 (ko) 2014-11-28
TW201341065A (zh) 2013-10-16
CN103288356B (zh) 2015-06-24
KR20130098214A (ko) 2013-09-04
CN103288356A (zh) 2013-09-11
JP2013173123A (ja) 2013-09-05

Similar Documents

Publication Publication Date Title
TWI321430B (ja)
TW201332410A (zh) 用於在基材上沉積材料的材料沉積系統
TW201330735A (zh) 於基板上沉積材料的方法
TWI535495B (zh) 塗佈裝置
JP5798411B2 (ja) 塗布装置
JP5733636B2 (ja) ノズルユニット、基板処理装置、及び基板処理方法
JP2009131735A (ja) 塗布装置
TWI417497B (zh) 減壓乾燥裝置及減壓乾燥方法
JP5537223B2 (ja) 塗布装置
KR101528456B1 (ko) 기판 처리 장치 및 기판 처리 방법
CN103537404A (zh) 浆料涂敷装置
KR101530318B1 (ko) 증발원 유닛 및 증착 장치
JP4726124B2 (ja) 塗布システム
JP2006150206A (ja) 機能性膜形成装置及び機能性膜形成方法
JP6208515B2 (ja) 塗布装置および塗布方法
JP2005246312A (ja) 塗布処理方法及び塗布処理装置
TW201509538A (zh) 塗布裝置及塗布方法
JP7568330B2 (ja) インクジェットプリント装備
KR102150452B1 (ko) 클러스터형 증착장치
JP2012208009A (ja) 塗布装置
JP2005230817A (ja) 有機物噴射装置
JP5554609B2 (ja) 塗布装置
JP2009195851A (ja) 塗布装置
JP2013043136A (ja) 塗布液塗布装置および塗布液塗布方法
JP2011088121A (ja) 塗布装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees