TWI521179B - Cryogenic pump system, very low temperature system, compressor unit control device and its control method - Google Patents
Cryogenic pump system, very low temperature system, compressor unit control device and its control method Download PDFInfo
- Publication number
- TWI521179B TWI521179B TW101143454A TW101143454A TWI521179B TW I521179 B TWI521179 B TW I521179B TW 101143454 A TW101143454 A TW 101143454A TW 101143454 A TW101143454 A TW 101143454A TW I521179 B TWI521179 B TW I521179B
- Authority
- TW
- Taiwan
- Prior art keywords
- control
- amount
- compressor
- unit
- target
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 16
- 238000001816 cooling Methods 0.000 claims description 64
- 230000008569 process Effects 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 103
- 239000013256 coordination polymer Substances 0.000 description 42
- 238000005259 measurement Methods 0.000 description 22
- 238000012545 processing Methods 0.000 description 21
- 230000008859 change Effects 0.000 description 17
- 238000011156 evaluation Methods 0.000 description 13
- 238000003860 storage Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 238000010977 unit operation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005057 refrigeration Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000010349 pulsation Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/022—Compressor control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/07—Details of compressors or related parts
- F25B2400/075—Details of compressors or related parts with parallel compressors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011285356A JP5738174B2 (ja) | 2011-12-27 | 2011-12-27 | クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201344133A TW201344133A (zh) | 2013-11-01 |
| TWI521179B true TWI521179B (zh) | 2016-02-11 |
Family
ID=48653237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101143454A TWI521179B (zh) | 2011-12-27 | 2012-11-21 | Cryogenic pump system, very low temperature system, compressor unit control device and its control method |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9759467B2 (enExample) |
| JP (1) | JP5738174B2 (enExample) |
| KR (1) | KR101428315B1 (enExample) |
| CN (1) | CN103184996B (enExample) |
| TW (1) | TWI521179B (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6086835B2 (ja) * | 2013-07-23 | 2017-03-01 | 住友重機械工業株式会社 | 圧縮機および冷却システム |
| DE202013010352U1 (de) * | 2013-11-18 | 2015-02-19 | Oerlikon Leybold Vacuum Gmbh | Kaltkopf für Tieftemperatur-Kältemaschine |
| JP2015098844A (ja) * | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| JP6180349B2 (ja) * | 2014-03-18 | 2017-08-16 | 住友重機械工業株式会社 | 極低温冷凍機および極低温冷凍機の制御方法 |
| US9927152B2 (en) * | 2014-11-04 | 2018-03-27 | Goodrich Corporation | Multi-dewar cooling system |
| JP6410589B2 (ja) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプの制御方法、及び冷凍機 |
| US11149992B2 (en) | 2015-12-18 | 2021-10-19 | Sumitomo (Shi) Cryogenic Of America, Inc. | Dual helium compressors |
| JP6534358B2 (ja) * | 2016-03-22 | 2019-06-26 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法 |
| KR20180061742A (ko) | 2016-11-30 | 2018-06-08 | 재단법인 한국섬유기계융합연구원 | 크라이오 펌프용 극저온 온도 제어 시스템 |
| JP6123041B1 (ja) * | 2017-01-04 | 2017-04-26 | 株式会社日立製作所 | 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法 |
| JP2018127929A (ja) * | 2017-02-07 | 2018-08-16 | 住友重機械工業株式会社 | 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム |
| JP6734817B2 (ja) * | 2017-06-23 | 2020-08-05 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ制御方法 |
| JP2017214936A (ja) * | 2017-09-11 | 2017-12-07 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| EP3701202B1 (en) * | 2017-10-29 | 2024-09-11 | Sumitomo (Shi) Cryogenics of America, Inc. | Universal controller for integration of cryogenic equipment, requiring different control mechanisms, onto a single operating platform |
| JP6975066B2 (ja) | 2018-02-20 | 2021-12-01 | 住友重機械工業株式会社 | 極低温冷凍機 |
| CN111868459B (zh) | 2018-03-23 | 2021-08-10 | 住友重机械工业株式会社 | 超低温制冷机 |
| JP2021063508A (ja) * | 2021-01-20 | 2021-04-22 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法 |
| US20220397322A1 (en) * | 2021-06-15 | 2022-12-15 | Applied Materials, Inc. | Cryogenic Cooling System |
| KR102536332B1 (ko) * | 2022-09-23 | 2023-05-26 | 크라이오에이치앤아이(주) | 크라이오 펌프 시스템 |
| WO2024148477A1 (zh) * | 2023-01-09 | 2024-07-18 | 安徽万瑞冷电科技有限公司 | 低温泵、控制系统和控制方法 |
| CN116498537B (zh) * | 2023-04-25 | 2024-01-02 | 德耐尔能源装备有限公司 | 空压机的智能控制方法及系统 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211262A (ja) * | 1998-01-28 | 1999-08-06 | Hitachi Ltd | 吸収式冷凍機システム |
| JP2001074326A (ja) * | 1999-09-07 | 2001-03-23 | Daikin Ind Ltd | 圧縮機ユニット |
| US6647735B2 (en) * | 2000-03-14 | 2003-11-18 | Hussmann Corporation | Distributed intelligence control for commercial refrigeration |
| JP2001263254A (ja) * | 2000-03-17 | 2001-09-26 | Tokimec Inc | 液圧装置 |
| US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
| JP4445187B2 (ja) * | 2002-04-18 | 2010-04-07 | 住友重機械工業株式会社 | 極低温冷凍機 |
| KR100437806B1 (ko) * | 2002-06-12 | 2004-06-30 | 엘지전자 주식회사 | 멀티형 공기조화기의 운전제어방법 |
| JP4023249B2 (ja) * | 2002-07-25 | 2007-12-19 | ダイキン工業株式会社 | 圧縮機内部状態推定装置及び空気調和装置 |
| WO2004018947A1 (ja) * | 2002-08-20 | 2004-03-04 | Sumitomo Heavy Industries, Ltd. | 極低温冷凍機 |
| JP4275374B2 (ja) * | 2002-09-09 | 2009-06-10 | 株式会社デンソー | 圧縮機制御装置 |
| JP4151559B2 (ja) * | 2003-10-27 | 2008-09-17 | 株式会社豊田自動織機 | 容量可変型圧縮機の制御装置 |
| JP2005188783A (ja) * | 2003-12-24 | 2005-07-14 | Toshiba Corp | 冷蔵庫 |
| JP2006266172A (ja) * | 2005-03-24 | 2006-10-05 | Denso Corp | 圧縮機容量制御装置および冷凍サイクル装置 |
| US7878014B2 (en) * | 2005-12-09 | 2011-02-01 | Emerson Climate Technologies, Inc. | Parallel condensing unit control system and method |
| JP4861914B2 (ja) * | 2007-06-26 | 2012-01-25 | サンデン株式会社 | 可変容量圧縮機の容量制御システム |
| DE112008002219B4 (de) * | 2007-08-17 | 2018-10-25 | Sanden Holdings Corporation | Kapazitätssteuerungssystem für einen Kompressor mit variabler Kapazität und Anzeigevorrichtung für das System |
| WO2009028450A1 (ja) * | 2007-08-28 | 2009-03-05 | Canon Anelva Technix Corporation | クライオポンプシステム |
| CN102165192B (zh) * | 2008-09-30 | 2014-03-12 | 佳能安内华股份有限公司 | 真空排气系统、冷冻机、低温泵及其运转方法、以及基板处理装置 |
| JP5634323B2 (ja) * | 2011-05-13 | 2014-12-03 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプのための再生方法 |
| US8991198B2 (en) * | 2012-04-10 | 2015-03-31 | International Business Machines Corporation | Cooling system control and servicing based on time-based variation of an operational variable |
-
2011
- 2011-12-27 JP JP2011285356A patent/JP5738174B2/ja active Active
-
2012
- 2012-11-21 TW TW101143454A patent/TWI521179B/zh active
- 2012-12-21 US US13/724,092 patent/US9759467B2/en active Active
- 2012-12-26 CN CN201210576016.8A patent/CN103184996B/zh active Active
- 2012-12-26 KR KR1020120152851A patent/KR101428315B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103184996B (zh) | 2016-05-25 |
| JP2013134020A (ja) | 2013-07-08 |
| TW201344133A (zh) | 2013-11-01 |
| KR101428315B1 (ko) | 2014-08-07 |
| CN103184996A (zh) | 2013-07-03 |
| US9759467B2 (en) | 2017-09-12 |
| JP5738174B2 (ja) | 2015-06-17 |
| KR20130075688A (ko) | 2013-07-05 |
| US20130160468A1 (en) | 2013-06-27 |
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