JP5738174B2 - クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 - Google Patents

クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 Download PDF

Info

Publication number
JP5738174B2
JP5738174B2 JP2011285356A JP2011285356A JP5738174B2 JP 5738174 B2 JP5738174 B2 JP 5738174B2 JP 2011285356 A JP2011285356 A JP 2011285356A JP 2011285356 A JP2011285356 A JP 2011285356A JP 5738174 B2 JP5738174 B2 JP 5738174B2
Authority
JP
Japan
Prior art keywords
control
compressor unit
amount
compressor
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011285356A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013134020A (ja
JP2013134020A5 (enExample
Inventor
敏之 木村
敏之 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2011285356A priority Critical patent/JP5738174B2/ja
Priority to TW101143454A priority patent/TWI521179B/zh
Priority to US13/724,092 priority patent/US9759467B2/en
Priority to KR1020120152851A priority patent/KR101428315B1/ko
Priority to CN201210576016.8A priority patent/CN103184996B/zh
Publication of JP2013134020A publication Critical patent/JP2013134020A/ja
Publication of JP2013134020A5 publication Critical patent/JP2013134020A5/ja
Application granted granted Critical
Publication of JP5738174B2 publication Critical patent/JP5738174B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/022—Compressor control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/07—Details of compressors or related parts
    • F25B2400/075—Details of compressors or related parts with parallel compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2011285356A 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 Active JP5738174B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法
TW101143454A TWI521179B (zh) 2011-12-27 2012-11-21 Cryogenic pump system, very low temperature system, compressor unit control device and its control method
US13/724,092 US9759467B2 (en) 2011-12-27 2012-12-21 Cryopump system, cryogenic system, and apparatus and method of controlling compressor unit
KR1020120152851A KR101428315B1 (ko) 2011-12-27 2012-12-26 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법
CN201210576016.8A CN103184996B (zh) 2011-12-27 2012-12-26 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Publications (3)

Publication Number Publication Date
JP2013134020A JP2013134020A (ja) 2013-07-08
JP2013134020A5 JP2013134020A5 (enExample) 2013-11-28
JP5738174B2 true JP5738174B2 (ja) 2015-06-17

Family

ID=48653237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011285356A Active JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Country Status (5)

Country Link
US (1) US9759467B2 (enExample)
JP (1) JP5738174B2 (enExample)
KR (1) KR101428315B1 (enExample)
CN (1) CN103184996B (enExample)
TW (1) TWI521179B (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6086835B2 (ja) * 2013-07-23 2017-03-01 住友重機械工業株式会社 圧縮機および冷却システム
DE202013010352U1 (de) * 2013-11-18 2015-02-19 Oerlikon Leybold Vacuum Gmbh Kaltkopf für Tieftemperatur-Kältemaschine
JP2015098844A (ja) * 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
JP6180349B2 (ja) * 2014-03-18 2017-08-16 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の制御方法
US9927152B2 (en) * 2014-11-04 2018-03-27 Goodrich Corporation Multi-dewar cooling system
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
US11149992B2 (en) 2015-12-18 2021-10-19 Sumitomo (Shi) Cryogenic Of America, Inc. Dual helium compressors
JP6534358B2 (ja) * 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
KR20180061742A (ko) 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
JP6123041B1 (ja) * 2017-01-04 2017-04-26 株式会社日立製作所 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法
JP2018127929A (ja) * 2017-02-07 2018-08-16 住友重機械工業株式会社 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム
JP6734817B2 (ja) * 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP2017214936A (ja) * 2017-09-11 2017-12-07 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
EP3701202B1 (en) * 2017-10-29 2024-09-11 Sumitomo (Shi) Cryogenics of America, Inc. Universal controller for integration of cryogenic equipment, requiring different control mechanisms, onto a single operating platform
JP6975066B2 (ja) 2018-02-20 2021-12-01 住友重機械工業株式会社 極低温冷凍機
CN111868459B (zh) 2018-03-23 2021-08-10 住友重机械工业株式会社 超低温制冷机
JP2021063508A (ja) * 2021-01-20 2021-04-22 住友重機械工業株式会社 クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法
US20220397322A1 (en) * 2021-06-15 2022-12-15 Applied Materials, Inc. Cryogenic Cooling System
KR102536332B1 (ko) * 2022-09-23 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프 시스템
WO2024148477A1 (zh) * 2023-01-09 2024-07-18 安徽万瑞冷电科技有限公司 低温泵、控制系统和控制方法
CN116498537B (zh) * 2023-04-25 2024-01-02 德耐尔能源装备有限公司 空压机的智能控制方法及系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11211262A (ja) * 1998-01-28 1999-08-06 Hitachi Ltd 吸収式冷凍機システム
JP2001074326A (ja) * 1999-09-07 2001-03-23 Daikin Ind Ltd 圧縮機ユニット
US6647735B2 (en) * 2000-03-14 2003-11-18 Hussmann Corporation Distributed intelligence control for commercial refrigeration
JP2001263254A (ja) * 2000-03-17 2001-09-26 Tokimec Inc 液圧装置
US6530237B2 (en) * 2001-04-02 2003-03-11 Helix Technology Corporation Refrigeration system pressure control using a gas volume
JP4445187B2 (ja) * 2002-04-18 2010-04-07 住友重機械工業株式会社 極低温冷凍機
KR100437806B1 (ko) * 2002-06-12 2004-06-30 엘지전자 주식회사 멀티형 공기조화기의 운전제어방법
JP4023249B2 (ja) * 2002-07-25 2007-12-19 ダイキン工業株式会社 圧縮機内部状態推定装置及び空気調和装置
WO2004018947A1 (ja) * 2002-08-20 2004-03-04 Sumitomo Heavy Industries, Ltd. 極低温冷凍機
JP4275374B2 (ja) * 2002-09-09 2009-06-10 株式会社デンソー 圧縮機制御装置
JP4151559B2 (ja) * 2003-10-27 2008-09-17 株式会社豊田自動織機 容量可変型圧縮機の制御装置
JP2005188783A (ja) * 2003-12-24 2005-07-14 Toshiba Corp 冷蔵庫
JP2006266172A (ja) * 2005-03-24 2006-10-05 Denso Corp 圧縮機容量制御装置および冷凍サイクル装置
US7878014B2 (en) * 2005-12-09 2011-02-01 Emerson Climate Technologies, Inc. Parallel condensing unit control system and method
JP4861914B2 (ja) * 2007-06-26 2012-01-25 サンデン株式会社 可変容量圧縮機の容量制御システム
DE112008002219B4 (de) * 2007-08-17 2018-10-25 Sanden Holdings Corporation Kapazitätssteuerungssystem für einen Kompressor mit variabler Kapazität und Anzeigevorrichtung für das System
WO2009028450A1 (ja) * 2007-08-28 2009-03-05 Canon Anelva Technix Corporation クライオポンプシステム
CN102165192B (zh) * 2008-09-30 2014-03-12 佳能安内华股份有限公司 真空排气系统、冷冻机、低温泵及其运转方法、以及基板处理装置
JP5634323B2 (ja) * 2011-05-13 2014-12-03 住友重機械工業株式会社 クライオポンプシステム、クライオポンプのための再生方法
US8991198B2 (en) * 2012-04-10 2015-03-31 International Business Machines Corporation Cooling system control and servicing based on time-based variation of an operational variable

Also Published As

Publication number Publication date
CN103184996B (zh) 2016-05-25
JP2013134020A (ja) 2013-07-08
TWI521179B (zh) 2016-02-11
TW201344133A (zh) 2013-11-01
KR101428315B1 (ko) 2014-08-07
CN103184996A (zh) 2013-07-03
US9759467B2 (en) 2017-09-12
KR20130075688A (ko) 2013-07-05
US20130160468A1 (en) 2013-06-27

Similar Documents

Publication Publication Date Title
JP5738174B2 (ja) クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法
JP5545858B2 (ja) クライオポンプシステム及びその制御方法
TWI677626B (zh) 用於極低溫冷凍機的壓縮機單元及低溫泵系統
TWI534348B (zh) A cryopump system, a cryopump system operating method, and a compressor unit
US8336318B2 (en) Cryopump and method for diagnosing the cryopump
JP5669658B2 (ja) クライオポンプシステム、圧縮機、及びクライオポンプの再生方法
JP5943865B2 (ja) クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット
JP6053551B2 (ja) クライオポンプ、及びクライオポンプの運転方法
JP2015098844A (ja) クライオポンプシステム、及びクライオポンプシステムの運転方法
TW202006251A (zh) 低溫泵系統
JP2017214936A (ja) クライオポンプシステム、及びクライオポンプシステムの運転方法
JP2019173756A (ja) クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131016

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140317

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140917

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140930

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141118

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150421

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150421

R150 Certificate of patent or registration of utility model

Ref document number: 5738174

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150