KR101428315B1 - 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법 - Google Patents

크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법 Download PDF

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KR101428315B1
KR101428315B1 KR1020120152851A KR20120152851A KR101428315B1 KR 101428315 B1 KR101428315 B1 KR 101428315B1 KR 1020120152851 A KR1020120152851 A KR 1020120152851A KR 20120152851 A KR20120152851 A KR 20120152851A KR 101428315 B1 KR101428315 B1 KR 101428315B1
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control
compressor
pressure
compressor unit
unit
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KR20130075688A (ko
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도시유키 기무라
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스미도모쥬기가이고교 가부시키가이샤
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00Arrangement or mounting of control or safety devices
    • F25B49/02Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/022Compressor control arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08Regulating by delivery pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/07Details of compressors or related parts
    • F25B2400/075Details of compressors or related parts with parallel compressors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020120152851A 2011-12-27 2012-12-26 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법 Active KR101428315B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-285356 2011-12-27
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Publications (2)

Publication Number Publication Date
KR20130075688A KR20130075688A (ko) 2013-07-05
KR101428315B1 true KR101428315B1 (ko) 2014-08-07

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KR1020120152851A Active KR101428315B1 (ko) 2011-12-27 2012-12-26 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법

Country Status (5)

Country Link
US (1) US9759467B2 (enExample)
JP (1) JP5738174B2 (enExample)
KR (1) KR101428315B1 (enExample)
CN (1) CN103184996B (enExample)
TW (1) TWI521179B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061742A (ko) 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6086835B2 (ja) * 2013-07-23 2017-03-01 住友重機械工業株式会社 圧縮機および冷却システム
DE202013010352U1 (de) * 2013-11-18 2015-02-19 Oerlikon Leybold Vacuum Gmbh Kaltkopf für Tieftemperatur-Kältemaschine
JP2015098844A (ja) * 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
JP6180349B2 (ja) * 2014-03-18 2017-08-16 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の制御方法
US9927152B2 (en) * 2014-11-04 2018-03-27 Goodrich Corporation Multi-dewar cooling system
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
US11149992B2 (en) 2015-12-18 2021-10-19 Sumitomo (Shi) Cryogenic Of America, Inc. Dual helium compressors
JP6534358B2 (ja) * 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
JP6123041B1 (ja) * 2017-01-04 2017-04-26 株式会社日立製作所 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法
JP2018127929A (ja) * 2017-02-07 2018-08-16 住友重機械工業株式会社 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム
JP6734817B2 (ja) * 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP2017214936A (ja) * 2017-09-11 2017-12-07 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
EP3701202B1 (en) * 2017-10-29 2024-09-11 Sumitomo (Shi) Cryogenics of America, Inc. Universal controller for integration of cryogenic equipment, requiring different control mechanisms, onto a single operating platform
JP6975066B2 (ja) 2018-02-20 2021-12-01 住友重機械工業株式会社 極低温冷凍機
CN111868459B (zh) 2018-03-23 2021-08-10 住友重机械工业株式会社 超低温制冷机
JP2021063508A (ja) * 2021-01-20 2021-04-22 住友重機械工業株式会社 クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法
US20220397322A1 (en) * 2021-06-15 2022-12-15 Applied Materials, Inc. Cryogenic Cooling System
KR102536332B1 (ko) * 2022-09-23 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프 시스템
WO2024148477A1 (zh) * 2023-01-09 2024-07-18 安徽万瑞冷电科技有限公司 低温泵、控制系统和控制方法
CN116498537B (zh) * 2023-04-25 2024-01-02 德耐尔能源装备有限公司 空压机的智能控制方法及系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110073540A (ko) * 2008-09-30 2011-06-29 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법
KR20120127284A (ko) * 2011-05-13 2012-11-21 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프 시스템, 크라이오펌프를 위한 재생방법

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11211262A (ja) * 1998-01-28 1999-08-06 Hitachi Ltd 吸収式冷凍機システム
JP2001074326A (ja) * 1999-09-07 2001-03-23 Daikin Ind Ltd 圧縮機ユニット
US6647735B2 (en) * 2000-03-14 2003-11-18 Hussmann Corporation Distributed intelligence control for commercial refrigeration
JP2001263254A (ja) * 2000-03-17 2001-09-26 Tokimec Inc 液圧装置
US6530237B2 (en) * 2001-04-02 2003-03-11 Helix Technology Corporation Refrigeration system pressure control using a gas volume
JP4445187B2 (ja) * 2002-04-18 2010-04-07 住友重機械工業株式会社 極低温冷凍機
KR100437806B1 (ko) * 2002-06-12 2004-06-30 엘지전자 주식회사 멀티형 공기조화기의 운전제어방법
JP4023249B2 (ja) * 2002-07-25 2007-12-19 ダイキン工業株式会社 圧縮機内部状態推定装置及び空気調和装置
WO2004018947A1 (ja) * 2002-08-20 2004-03-04 Sumitomo Heavy Industries, Ltd. 極低温冷凍機
JP4275374B2 (ja) * 2002-09-09 2009-06-10 株式会社デンソー 圧縮機制御装置
JP4151559B2 (ja) * 2003-10-27 2008-09-17 株式会社豊田自動織機 容量可変型圧縮機の制御装置
JP2005188783A (ja) * 2003-12-24 2005-07-14 Toshiba Corp 冷蔵庫
JP2006266172A (ja) * 2005-03-24 2006-10-05 Denso Corp 圧縮機容量制御装置および冷凍サイクル装置
US7878014B2 (en) * 2005-12-09 2011-02-01 Emerson Climate Technologies, Inc. Parallel condensing unit control system and method
JP4861914B2 (ja) * 2007-06-26 2012-01-25 サンデン株式会社 可変容量圧縮機の容量制御システム
DE112008002219B4 (de) * 2007-08-17 2018-10-25 Sanden Holdings Corporation Kapazitätssteuerungssystem für einen Kompressor mit variabler Kapazität und Anzeigevorrichtung für das System
WO2009028450A1 (ja) * 2007-08-28 2009-03-05 Canon Anelva Technix Corporation クライオポンプシステム
US8991198B2 (en) * 2012-04-10 2015-03-31 International Business Machines Corporation Cooling system control and servicing based on time-based variation of an operational variable

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110073540A (ko) * 2008-09-30 2011-06-29 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법
KR20120127284A (ko) * 2011-05-13 2012-11-21 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프 시스템, 크라이오펌프를 위한 재생방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061742A (ko) 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템

Also Published As

Publication number Publication date
CN103184996B (zh) 2016-05-25
JP2013134020A (ja) 2013-07-08
TWI521179B (zh) 2016-02-11
TW201344133A (zh) 2013-11-01
CN103184996A (zh) 2013-07-03
US9759467B2 (en) 2017-09-12
JP5738174B2 (ja) 2015-06-17
KR20130075688A (ko) 2013-07-05
US20130160468A1 (en) 2013-06-27

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