KR101428315B1 - 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법 - Google Patents
크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법 Download PDFInfo
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- KR101428315B1 KR101428315B1 KR1020120152851A KR20120152851A KR101428315B1 KR 101428315 B1 KR101428315 B1 KR 101428315B1 KR 1020120152851 A KR1020120152851 A KR 1020120152851A KR 20120152851 A KR20120152851 A KR 20120152851A KR 101428315 B1 KR101428315 B1 KR 101428315B1
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- KR
- South Korea
- Prior art keywords
- control
- compressor
- pressure
- compressor unit
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/022—Compressor control arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/07—Details of compressors or related parts
- F25B2400/075—Details of compressors or related parts with parallel compressors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2011-285356 | 2011-12-27 | ||
| JP2011285356A JP5738174B2 (ja) | 2011-12-27 | 2011-12-27 | クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130075688A KR20130075688A (ko) | 2013-07-05 |
| KR101428315B1 true KR101428315B1 (ko) | 2014-08-07 |
Family
ID=48653237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120152851A Active KR101428315B1 (ko) | 2011-12-27 | 2012-12-26 | 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9759467B2 (enExample) |
| JP (1) | JP5738174B2 (enExample) |
| KR (1) | KR101428315B1 (enExample) |
| CN (1) | CN103184996B (enExample) |
| TW (1) | TWI521179B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180061742A (ko) | 2016-11-30 | 2018-06-08 | 재단법인 한국섬유기계융합연구원 | 크라이오 펌프용 극저온 온도 제어 시스템 |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6086835B2 (ja) * | 2013-07-23 | 2017-03-01 | 住友重機械工業株式会社 | 圧縮機および冷却システム |
| DE202013010352U1 (de) * | 2013-11-18 | 2015-02-19 | Oerlikon Leybold Vacuum Gmbh | Kaltkopf für Tieftemperatur-Kältemaschine |
| JP2015098844A (ja) * | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| JP6180349B2 (ja) * | 2014-03-18 | 2017-08-16 | 住友重機械工業株式会社 | 極低温冷凍機および極低温冷凍機の制御方法 |
| US9927152B2 (en) * | 2014-11-04 | 2018-03-27 | Goodrich Corporation | Multi-dewar cooling system |
| JP6410589B2 (ja) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプの制御方法、及び冷凍機 |
| US11149992B2 (en) | 2015-12-18 | 2021-10-19 | Sumitomo (Shi) Cryogenic Of America, Inc. | Dual helium compressors |
| JP6534358B2 (ja) * | 2016-03-22 | 2019-06-26 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法 |
| JP6123041B1 (ja) * | 2017-01-04 | 2017-04-26 | 株式会社日立製作所 | 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法 |
| JP2018127929A (ja) * | 2017-02-07 | 2018-08-16 | 住友重機械工業株式会社 | 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム |
| JP6734817B2 (ja) * | 2017-06-23 | 2020-08-05 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ制御方法 |
| JP2017214936A (ja) * | 2017-09-11 | 2017-12-07 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| EP3701202B1 (en) * | 2017-10-29 | 2024-09-11 | Sumitomo (Shi) Cryogenics of America, Inc. | Universal controller for integration of cryogenic equipment, requiring different control mechanisms, onto a single operating platform |
| JP6975066B2 (ja) | 2018-02-20 | 2021-12-01 | 住友重機械工業株式会社 | 極低温冷凍機 |
| CN111868459B (zh) | 2018-03-23 | 2021-08-10 | 住友重机械工业株式会社 | 超低温制冷机 |
| JP2021063508A (ja) * | 2021-01-20 | 2021-04-22 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法 |
| US20220397322A1 (en) * | 2021-06-15 | 2022-12-15 | Applied Materials, Inc. | Cryogenic Cooling System |
| KR102536332B1 (ko) * | 2022-09-23 | 2023-05-26 | 크라이오에이치앤아이(주) | 크라이오 펌프 시스템 |
| WO2024148477A1 (zh) * | 2023-01-09 | 2024-07-18 | 安徽万瑞冷电科技有限公司 | 低温泵、控制系统和控制方法 |
| CN116498537B (zh) * | 2023-04-25 | 2024-01-02 | 德耐尔能源装备有限公司 | 空压机的智能控制方法及系统 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110073540A (ko) * | 2008-09-30 | 2011-06-29 | 캐논 아네르바 가부시키가이샤 | 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법 |
| KR20120127284A (ko) * | 2011-05-13 | 2012-11-21 | 스미도모쥬기가이고교 가부시키가이샤 | 크라이오펌프 시스템, 크라이오펌프를 위한 재생방법 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211262A (ja) * | 1998-01-28 | 1999-08-06 | Hitachi Ltd | 吸収式冷凍機システム |
| JP2001074326A (ja) * | 1999-09-07 | 2001-03-23 | Daikin Ind Ltd | 圧縮機ユニット |
| US6647735B2 (en) * | 2000-03-14 | 2003-11-18 | Hussmann Corporation | Distributed intelligence control for commercial refrigeration |
| JP2001263254A (ja) * | 2000-03-17 | 2001-09-26 | Tokimec Inc | 液圧装置 |
| US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
| JP4445187B2 (ja) * | 2002-04-18 | 2010-04-07 | 住友重機械工業株式会社 | 極低温冷凍機 |
| KR100437806B1 (ko) * | 2002-06-12 | 2004-06-30 | 엘지전자 주식회사 | 멀티형 공기조화기의 운전제어방법 |
| JP4023249B2 (ja) * | 2002-07-25 | 2007-12-19 | ダイキン工業株式会社 | 圧縮機内部状態推定装置及び空気調和装置 |
| WO2004018947A1 (ja) * | 2002-08-20 | 2004-03-04 | Sumitomo Heavy Industries, Ltd. | 極低温冷凍機 |
| JP4275374B2 (ja) * | 2002-09-09 | 2009-06-10 | 株式会社デンソー | 圧縮機制御装置 |
| JP4151559B2 (ja) * | 2003-10-27 | 2008-09-17 | 株式会社豊田自動織機 | 容量可変型圧縮機の制御装置 |
| JP2005188783A (ja) * | 2003-12-24 | 2005-07-14 | Toshiba Corp | 冷蔵庫 |
| JP2006266172A (ja) * | 2005-03-24 | 2006-10-05 | Denso Corp | 圧縮機容量制御装置および冷凍サイクル装置 |
| US7878014B2 (en) * | 2005-12-09 | 2011-02-01 | Emerson Climate Technologies, Inc. | Parallel condensing unit control system and method |
| JP4861914B2 (ja) * | 2007-06-26 | 2012-01-25 | サンデン株式会社 | 可変容量圧縮機の容量制御システム |
| DE112008002219B4 (de) * | 2007-08-17 | 2018-10-25 | Sanden Holdings Corporation | Kapazitätssteuerungssystem für einen Kompressor mit variabler Kapazität und Anzeigevorrichtung für das System |
| WO2009028450A1 (ja) * | 2007-08-28 | 2009-03-05 | Canon Anelva Technix Corporation | クライオポンプシステム |
| US8991198B2 (en) * | 2012-04-10 | 2015-03-31 | International Business Machines Corporation | Cooling system control and servicing based on time-based variation of an operational variable |
-
2011
- 2011-12-27 JP JP2011285356A patent/JP5738174B2/ja active Active
-
2012
- 2012-11-21 TW TW101143454A patent/TWI521179B/zh active
- 2012-12-21 US US13/724,092 patent/US9759467B2/en active Active
- 2012-12-26 CN CN201210576016.8A patent/CN103184996B/zh active Active
- 2012-12-26 KR KR1020120152851A patent/KR101428315B1/ko active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110073540A (ko) * | 2008-09-30 | 2011-06-29 | 캐논 아네르바 가부시키가이샤 | 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법 |
| KR20120127284A (ko) * | 2011-05-13 | 2012-11-21 | 스미도모쥬기가이고교 가부시키가이샤 | 크라이오펌프 시스템, 크라이오펌프를 위한 재생방법 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180061742A (ko) | 2016-11-30 | 2018-06-08 | 재단법인 한국섬유기계융합연구원 | 크라이오 펌프용 극저온 온도 제어 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103184996B (zh) | 2016-05-25 |
| JP2013134020A (ja) | 2013-07-08 |
| TWI521179B (zh) | 2016-02-11 |
| TW201344133A (zh) | 2013-11-01 |
| CN103184996A (zh) | 2013-07-03 |
| US9759467B2 (en) | 2017-09-12 |
| JP5738174B2 (ja) | 2015-06-17 |
| KR20130075688A (ko) | 2013-07-05 |
| US20130160468A1 (en) | 2013-06-27 |
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