TWI518334B - - Google Patents

Info

Publication number
TWI518334B
TWI518334B TW103140682A TW103140682A TWI518334B TW I518334 B TWI518334 B TW I518334B TW 103140682 A TW103140682 A TW 103140682A TW 103140682 A TW103140682 A TW 103140682A TW I518334 B TWI518334 B TW I518334B
Authority
TW
Taiwan
Application number
TW103140682A
Other versions
TW201537181A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW103140682A priority Critical patent/TW201537181A/zh
Priority to SG10201502299QA priority patent/SG10201502299QA/en
Priority to KR1020150040542A priority patent/KR101681238B1/ko
Priority to EP15160526.8A priority patent/EP2924446B1/en
Priority to CN201510128996.9A priority patent/CN104950148B/zh
Priority to US14/668,374 priority patent/US10119991B2/en
Priority to JP2015062494A priority patent/JP6149060B2/ja
Publication of TW201537181A publication Critical patent/TW201537181A/zh
Application granted granted Critical
Publication of TWI518334B publication Critical patent/TWI518334B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Geometry (AREA)
TW103140682A 2014-03-25 2014-11-24 垂直式探針裝置及使用於該垂直式探針裝置之支撐柱 TW201537181A (zh)

Priority Applications (7)

Application Number Priority Date Filing Date Title
TW103140682A TW201537181A (zh) 2014-03-25 2014-11-24 垂直式探針裝置及使用於該垂直式探針裝置之支撐柱
SG10201502299QA SG10201502299QA (en) 2014-03-25 2015-03-24 Vertical probe device and supporter used in the same
KR1020150040542A KR101681238B1 (ko) 2014-03-25 2015-03-24 수직형 프로브 장치 및 수직형 프로브 장치에 사용되는 지지 기둥
EP15160526.8A EP2924446B1 (en) 2014-03-25 2015-03-24 Vertical probe device
CN201510128996.9A CN104950148B (zh) 2014-03-25 2015-03-24 垂直式探针装置及使用于该垂直式探针装置的支撑柱
US14/668,374 US10119991B2 (en) 2014-03-25 2015-03-25 Vertical probe device and supporter used in the same
JP2015062494A JP6149060B2 (ja) 2014-03-25 2015-03-25 垂直型プローブモジュールおよびその柱状支持部

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW103111115 2014-03-25
TW103140682A TW201537181A (zh) 2014-03-25 2014-11-24 垂直式探針裝置及使用於該垂直式探針裝置之支撐柱

Publications (2)

Publication Number Publication Date
TW201537181A TW201537181A (zh) 2015-10-01
TWI518334B true TWI518334B (zh) 2016-01-21

Family

ID=52807594

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103140682A TW201537181A (zh) 2014-03-25 2014-11-24 垂直式探針裝置及使用於該垂直式探針裝置之支撐柱

Country Status (7)

Country Link
US (1) US10119991B2 (zh)
EP (1) EP2924446B1 (zh)
JP (1) JP6149060B2 (zh)
KR (1) KR101681238B1 (zh)
CN (1) CN104950148B (zh)
SG (1) SG10201502299QA (zh)
TW (1) TW201537181A (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
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TWI570416B (zh) 2015-12-01 2017-02-11 The probe base of the vertical probe device
JP6855185B2 (ja) * 2016-07-27 2021-04-07 株式会社日本マイクロニクス 電気的接続装置
KR101907270B1 (ko) * 2016-09-05 2018-10-12 주식회사 코엠테크 프로브 회전 방지 기능을 구비한 수직형 프로브 모듈
KR101869044B1 (ko) * 2016-11-10 2018-07-19 윌테크놀러지(주) 스크럽 현상이 저감된 수직형 프로브 카드용 니들유닛 및 이를 이용한 프로브 카드
IT201600127507A1 (it) 2016-12-16 2018-06-16 Technoprobe Spa Sonda di contatto e relativa testa di misura per un’apparecchiatura di test di dispositivi elettronici
KR101882268B1 (ko) 2017-01-19 2018-08-24 주식회사 휴로 수직형 프로브카드 및 그 제작 방법
JP2018179721A (ja) * 2017-04-12 2018-11-15 株式会社日本マイクロニクス 電気的接続装置
DE102017209510A1 (de) * 2017-06-06 2018-12-06 Feinmetall Gmbh Kontaktelementsystem
TWI666451B (zh) * 2017-09-15 2019-07-21 中華精測科技股份有限公司 探針裝置及其導板
CN110568231A (zh) * 2018-06-06 2019-12-13 中华精测科技股份有限公司 探针卡装置及其立体式信号转接结构
TW202006366A (zh) * 2018-07-04 2020-02-01 旺矽科技股份有限公司 具有線型探針之探針頭
KR102164358B1 (ko) * 2019-07-01 2020-10-12 윌테크놀러지(주) 니들유닛의 팁 길이조절이 가능한 프로브 카드
IT201900024946A1 (it) * 2019-12-20 2021-06-20 Technoprobe Spa Testa di misura con un contatto migliorato tra sonde di contatto e fori guida
TWI712802B (zh) * 2020-01-21 2020-12-11 中華精測科技股份有限公司 探針卡裝置及其類頸式探針
KR102261798B1 (ko) * 2020-04-03 2021-06-07 (주)화이컴 프로브 카드 제조용 지그, 이를 포함하는 프로브 정렬 시스템 및 이를 이용하여 제조된 프로브 카드
TWI737291B (zh) * 2020-05-08 2021-08-21 中華精測科技股份有限公司 垂直式測試裝置
IT202000013978A1 (it) 2020-06-11 2021-12-11 Microtest S R L Un supporto porta sonde e relative sonde con montaggio facilitato
CN114720736A (zh) * 2021-01-07 2022-07-08 旺矽科技股份有限公司 具有能横向微调的导板的探针头与导板组以及探针头调整方法
TWI751940B (zh) * 2021-04-14 2022-01-01 中華精測科技股份有限公司 探針卡裝置及類彈簧探針
KR102260983B1 (ko) * 2021-04-16 2021-06-04 윌테크놀러지(주) 정렬효율이 향상된 수직형 프로브 카드용 니들
CN114034894B (zh) * 2021-11-19 2022-04-26 法特迪精密科技（苏州）有限公司 一种垂直探针卡装置及其检测方法
KR102475883B1 (ko) * 2022-11-09 2022-12-08 윌테크놀러지(주) 니들 팁의 길이조절을 위한 가변형 스페이서를 갖는 니들블럭

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CN201281716Y (zh) * 2008-09-19 2009-07-29 洪干耀 电路测试装置的电路板结构
CN201302583Y (zh) * 2008-10-28 2009-09-02 旺矽科技股份有限公司 具有补强装置的垂直式探针卡
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TWI442053B (zh) 2009-12-01 2014-06-21 Mpi Corporaion 探針卡以及用於探針卡的維修裝置和方法
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Also Published As

Publication number Publication date
US20150276800A1 (en) 2015-10-01
CN104950148B (zh) 2017-10-27
KR20150111309A (ko) 2015-10-05
JP2015184283A (ja) 2015-10-22
CN104950148A (zh) 2015-09-30
SG10201502299QA (en) 2015-10-29
US10119991B2 (en) 2018-11-06
EP2924446B1 (en) 2016-12-21
EP2924446A1 (en) 2015-09-30
TW201537181A (zh) 2015-10-01
KR101681238B1 (ko) 2016-11-30
JP6149060B2 (ja) 2017-06-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees