TWI503501B - Gas supply device - Google Patents

Gas supply device Download PDF

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Publication number
TWI503501B
TWI503501B TW099141683A TW99141683A TWI503501B TW I503501 B TWI503501 B TW I503501B TW 099141683 A TW099141683 A TW 099141683A TW 99141683 A TW99141683 A TW 99141683A TW I503501 B TWI503501 B TW I503501B
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Taiwan
Prior art keywords
warm water
gas
pressure
supply device
gas supply
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TW099141683A
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English (en)
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TW201139917A (en
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Takashi Yoneda
Takashi Yoshida
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Taiyo Nippon Sanso Corp
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/0206—Heat exchangers immersed in a large body of liquid
    • F28D1/0213—Heat exchangers immersed in a large body of liquid for heating or cooling a liquid in a tank
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/035—High pressure (>10 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F17C2227/0316—Water heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F17C2227/0323—Heat exchange with the fluid by heating using another fluid in a closed loop
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0388—Localisation of heat exchange separate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/042—Reducing risk of explosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
    • F28F2009/222—Particular guide plates, baffles or deflectors, e.g. having particular orientation relative to an elongated casing or conduit
    • F28F2009/226—Transversal partitions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pipeline Systems (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Description

氣體供給裝置
本發明係關於一種氣體供給裝置，詳言之，係關於一種將壓縮氣體進行減壓而供給之氣體供給裝置。
在供給來自47公升容器或大型容器之壓縮氣體時，係透過壓力調整設備、減壓閥、控制閥等減壓手段予以減壓至指定壓力而供給。此時，藉由減壓手段所減壓之氣體，係因隔熱膨脹及焦耳-湯姆森效應而使氣體溫度降低，會產生因減壓手段外面所造成之結露或結霜，而有氣體壓力變得難以調整之情形。因此，藉由將減壓手段之上游側配管(主要側配管)進行加熱或將減壓手段進行加熱，而進行抑制減壓後之氣體溫度下降(參照例如專利文獻1~3)。
[專利文獻1]日本專利特開2006-283812號公報
[專利文獻2]日本專利第3592446號公報
[專利文獻3]日本專利特公平6-33858號公報
然而，採用電熱器作為用以針對供給可燃性氣體之裝置的配管或減壓手段進行加熱之加熱源，係因當萬一發生氣體外漏時會有起火的危險性，故不佳。又，將有加熱用流體流動之加熱用配管捲繞在氣體配管周圍，係因為了使氣體配管內之氣體充分升溫而將熱傳導面積擴至極大，因有將流動於加熱用配管內之流體溫度設為高溫之必要，將導致設備成本或運轉成本的增加。
另一方面，單矽烷(SiH4 )或三氟化氮(NF3 )係因為臨界壓力非常接近填充壓力，臨界溫度亦比較接近室溫，而成為來自在臨界點附近進行填充之狀態的供給。另外，由於標準沸點高，所以因隔熱膨脹所造成之氣體溫度大為下降，氣體容易液化，亦容易使減壓手段之結露或結霜變多。此外，單矽烷係具有可燃性、自燃性，三氟化氮亦具有助燃性，故而期望避免使用電熱器。
於此，本發明係以提供可在壓縮氣體穩定之狀態下進行減壓並予以供給，經濟性和安全性均優異之氣體供給裝置為其目的。
為了達成上述目的，本發明之氣體供給裝置係利用減壓手段將來自壓縮氣體供給源所供給之氣體進行減壓而供給之氣體供給裝置，其特徵為，於上述減壓手段之氣體流動方向上游側，設置熱交換器，使導入至該減壓手段之氣體與由溫水供給源所供給之溫水進行熱交換而將上述氣體進行加溫，同時於上述減壓手段上設置藉由上述溫水之一部分用以將該減壓手段進行加溫之溫水流路。
此外，本發明之之氣體供給裝置係具有下述特徵：具備有將上述溫水加溫至30~40℃之溫度，而供給至上述熱交換器及上述減壓手段之溫水流路的溫水循環手段；上述減壓手段係可複數配置成串聯或並聯，且於各減壓手段之氣體流動方向上游側分別配置上述熱交換器；及上述氣體為單矽烷或三氟化氮。
若根據本發明之之氣體供給裝置的話，因為利用以溫水為加熱源之熱交換器來加溫氣體，故可有效地且確實地針對於配管內流動之氣體進行加溫，減壓手段亦可藉由溫水進行加溫而確實防止減壓後之氣體的液化。又，透過以溫水為加熱源，相對於電熱器，可提高安全性。此外，藉由將溫水溫度設定在40℃以下，則不會有氣體溫度變得過高的情形，可減少加溫時所需要的能量。又，藉由將減壓手段複數設置成串聯或並聯方式，因為可以將各減壓手段之減壓度數設定為最佳化，故於減壓手段或配管系統上不會發生結露或結霜，而可更為有效地供給減壓氣體，尤其是單矽烷或三氟化氮類之氣體亦能夠以安全且穩定之狀態下進行供給。
本形態例所示之氣體供給裝置係以串聯方式設置2個壓力調整器21、31作為減壓手段，以在既定高壓狀態下，用以使填充有壓縮氣體屬於壓縮氣體供給源之高壓氣體容器11所供給之氣體的壓力降低，利用氣體流動方向上游側之第1壓力調整器21，將高壓氣體進行減壓預先所設定之減壓度數，而為中壓氣體，利用下游側之第2壓力調整器31，將中壓氣體進行減壓預先所設定之減壓度數，藉此形成為供給因應於供給目標所期望壓力之低壓氣體的方式。例如，在將填充壓力為9MPa(絕對壓，以下均同)之壓縮氣體減壓至接近大氣壓而予以供給之情況下，於利用第1壓力調整器21減壓至4MPa左右之中壓後，利用第2壓力調整器31從4MPa減壓至接近大氣壓之供給壓力而予以供給。
於氣體供給裝置與高壓氣體容器11之間設置有高壓閥12與壓力檢測器13，而在氣體供給裝置與供給目標之間設置有低壓閥14。另外，於各壓力調整器21、31之氣體流動方向上游側(主要側)，設置有熱交換器22、32與切斷閥23、33，而在各壓力調整器21、31之氣體流動方向下游側(次要側)，分別設置有壓力檢測器24、34。又，於本形態例所示之氣體供給裝置，係以與配置有上述壓力調整器21、31或熱交換器22、32等之裝置本體部16隔離的狀態下，設置有用以將加溫用溫水分別循環供給至上述壓力調整器21、31及上述熱交換器22、32的溫水循環單元15。
如圖2所示般，在上述熱交換器22、32，係採用將金屬製線圈管42收納於上方開口之有底容器41內的構造(殼與線圈構造)者，於容器41之上部開口，係可裝卸地安裝有已插通線圈管42之入口管42a與出口管42b之蓋體43。又，在容器41對向側壁之其一上，設置有溫水導入口44，於另一側壁上，則設置有溫水導出口45，且在容器41的內部，設置有用以使從溫水導入口44流入至容器41內之溫水，可有效地接觸線圈管42的複數阻撓板(泡泡板)46，以使不致於干涉到線圈管42。從溫水導入口44流入至容器41內之溫水係利用阻撓板46之作用，而於容器41內蛇行流動，藉以平均地接觸於線圈管42之外面，透過線圈管42之管壁，與在線圈管42之內部流動的氣體進行熱交換，藉此加溫氣體之後，從溫水導出口45導出。
如圖3所示般，於上述壓力調整器21、31，係以包圍中央氣體流路51、52周圍之方式，採用設置有溫水流路53之附有保溫功能者。於該溫水流路53之一端設置有溫水導入口54，而於另一端則設置有溫水導出口55，從溫水導入口54流入至溫水流路53之溫水，係通過形成在氣體流路51周圍之入口側環狀流路53a，再從該入口側環狀流路53a通過設置在閥箱部分之周圍的閥箱外周流路53b，而流入至出口側環狀流路53c，並在流動於該等流路時，將壓力調整器21、31加溫後，由溫水導出口55被導出。
溫水循環單元15係具備有：使用任意熱能而生成預先所設定之溫度之溫水的溫水生成器17；連接該溫水生成器17與上述裝置本體部16內之加溫對象的溫水供給管18及溫水回流管19。溫水生成器17係藉由例如電熱器來生成加溫至30~40℃溫度之溫水並以泵進行供給者，利用溫水生成器17所生成之溫水係通過溫水供給管18，分別導至熱交換器22、32或壓力調整器21、31分別對應之導入側分支管18a，而從熱交換器22、32或壓力調整器21、31導出之溫水，係形成為由各導出側分支管19a合流到溫水回流管19，並於溫水生成器17循環而進行再利用之型態。
從溫水生成器17所供給之溫水的溫度，係可根據所供給之氣體流量或熱交換器22、32之熱交換效率、壓力調整器21、31之加溫效率等而進行任意設定，若考慮到漏洩時的安全性，則以設定在40℃以下為佳，若考慮到氣體的加溫效果，則最好是30℃以上，特別以35℃以上更好。而溫水流量亦可因應於熱交換器22、32之氣體流量或熱交換效率等進行適當設定，例如，在熱交換器22、32中，利用與線圈管42內之氣體對象方向的流動來進行熱交換，藉此，溫度降低之溫水溫度(亦即，溫水導出口45之溫水溫度)相對於溫水導入口44之溫水溫度，較佳的是設定為未滿-5℃，較佳的是未滿-2℃。
另一方面，關於線圈管42，係採用因應於供給目標所期望之氣體流量與通過該線圈管42之氣體壓力之管徑或厚度的管路。此線圈管42之長度係藉由將線圈管42拉長而可將熱交換後之氣體溫度設為接近溫水溫度，因為無法期待符合所使用管路之成本增加的充分效果，故藉由與溫水熱交換而加溫之氣體溫度係相對於溫水溫度，較佳的是設定為未滿-5℃，更佳的是設定為未滿-3℃。
此時，於線圈管42內流動之氣體、與在線圈管42周圍流動之溫水，係透過線圈管42之管壁進行熱交換，並非如將溫水配管捲繞於氣體配管周圍之先前技術般，因為沒有2根管路之管外面彼此接觸、或管彼此間存在空氣層的狀況，故而可設定線圈管42之內外各表面積、管壁厚度、內外溫度差、比熱等各種條件，藉以可輕易根據計算熱交換後之氣體溫度等而求得。因此，並無如先前技術般之未能使氣體溫度充分上升或氣體溫度變得不穩定的事情，而可將流入至下游側之壓力調整器21、31的氣體確實地加溫到指定溫度。
又，關於壓力調整器21、31，當考慮到減壓後之氣體溫度與溫水之加溫效果，則以分別設定各壓力調整器21、31之減壓度數為宜，以利用供應至熱交換器22、32之溫水溫度，使壓力調整器21、31外面不會結露的程度，針對壓力調整器21、31外面進行加溫之方式，設定溫水流量或溫水流路53之構造、形狀即可。
此外，上述溫水溫度或上述溫水循環單元15之溫水供應能力、熱交換器22、32之熱交換能力、壓力調整器21、31之加溫能力，一般係使對應於供應氣體之最大流量而設定，但若是最大流量之繼續時間為短時間，而可無視此時對於壓力調整器21、31之結露量的程度的話，則可對應於少於最大流量之氣體流量而設定各能力。
如本形態例所示，藉由複數階段進行壓縮氣體之減壓，則可縮小各減壓階段之減壓度數，同時沒有必要將用以導入至減壓手段(壓力調整器21、31)之壓縮氣體加熱至高溫，透過採用40℃以下之溫水之熱交換器22、32將氣體加溫，藉以可防止減壓手段處之氣體液化或減壓手段外面之結露。特別是藉由利用熱交換器進行以溫水之氣體加溫，而可將氣體有效地加溫至指定溫度，透過使用40℃以下之溫水，可確保相較於利用電熱器加熱配管等時之安全性。又，在利用間隔壁等，將具備有壓縮氣體所流動之配管系統的裝置本體部16、與生成溫水之溫水生成器17予以隔離之狀態下進行設置，即便是於溫水生成器17之加熱源使用電熱器，因為壓縮氣體與電熱器被隔離開，故而可大幅度提升安全性。又，相較於熱水或蒸氣之情形，藉由使用溫水，而可達到加溫所需要之能量的減少，亦可減少來自配管系統之熱損失，即便萬一溫水漏洩，亦無火燙傷等危險。
另外，在將減壓後之低壓氣體連續供應至供應目標之情形下，可複數設置具備有上述裝置本體部16與溫水循環單元15之氣體供應裝置，亦可使一個溫水循環單元15對應於複數裝置本體部16。又，在隔熱膨脹所造成之氣體溫度降低比較小，將減壓度數小之壓縮氣體進行減壓而供應之情形下，可以一個一個設置減壓手段及熱交換器。
11．．．高壓氣體容器
12．．．高壓閥
13．．．壓力檢測器
14．．．低壓閥
15．．．溫水循環單元
16．．．裝置本體部
17．．．溫水生成器
18．．．溫水供給管
18a．．．導入側分支管
19．．．溫水回流管
19a．．．導出側分支管
21．．．壓力調整器
22．．．熱交換器
23．．．切斷閥
24．．．壓力檢測器
31．．．壓力調整器
32．．．熱交換器
33．．．切斷閥
34．．．壓力檢測器
41．．．容器
42．．．線圈管
42a．．．入口管
42b．．．出口管
43．．．蓋體
44．．．溫水導入口
45．．．溫水導出口
46．．．阻撓板
51．．．氣體流路
52．．．氣體流路
53．．．溫水流路
53a．．．入口側環狀流路
53b．．．閥箱外周流路
53c．．．出口側環狀流路
54．．．溫水導入口
55．．．溫水導出口
圖1係表示本發明之氣體供給裝置一形態例的系統圖。
圖2係表示在本發明之氣體供給裝置中所使用之熱交換器一例的剖面圖。
圖3係表示在本發明之氣體供給裝置中所使用之壓力調整器一例的剖面圖。
11．．．高壓氣體容器
12．．．高壓閥
13．．．壓力檢測器
14．．．低壓閥
15．．．溫水循環單元
16．．．裝置本體部
17．．．溫水生成器
18．．．溫水供給管
18a．．．導入側分支管
19．．．溫水回流管
19a．．．導出側分支管
21．．．壓力調整器
22．．．熱交換器
23．．．切斷閥
24．．．壓力檢測器
31．．．壓力調整器
32．．．熱交換器
33．．．切斷閥
34．．．壓力檢測器

Claims (5)

  1. 一種氣體供給裝置，係利用減壓手段將由壓縮氣體供給源所供給之氣體進行減壓而供給者，其特徵為，於上述減壓手段之氣體流動方向上游側設置熱交換器，以使導入至該減壓手段之氣體與由溫水供給源所供給之溫水進行熱交換而將上述氣體進行加溫；並且於上述減壓手段設置用以藉由上述溫水之一部分將該減壓手段進行加溫之溫水流路。
  2. 如申請專利範圍第1項之氣體供給裝置，其中，具備有溫水循環手段，係將上述溫水加溫至30~40℃之溫度，並供給至上述熱交換器及上述減壓手段之溫水流路。
  3. 如申請專利範圍第1項之氣體供給裝置，其中，上述減壓手段係複數配置成串聯或並聯，於各減壓手段之氣體流動方向上游側，分別配置上述熱交換器。
  4. 如申請專利範圍第2項之氣體供給裝置，其中，上述減壓手段係複數配置成串聯或並聯，於各減壓手段之氣體流動方向上游側，分別配置上述熱交換器。
  5. 如申請專利範圍第1至4項中任一項之氣體供給裝置，其中，上述氣體為單矽烷或三氟化氮。
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