201139917 六、發明說明： 【發明所屬之技術領域】 本么月係關於-種氣體供給裳置，詳言之，係關於一種將 .壓縮氣體進行減壓而供給之氣體供給裝置。 【先前技術】 在供給來自47公升容器或大型容器之壓縮氣體時，係透 過I力、減壓閥、控制閥等減壓手段予以減壓至指 疋壓力而供給。此時’藉由減壓手段所減壓之氣體，係因隔 熱膨脹及焦耳_湯姆森效應而使氣體溫度降低，會產生因減 G手&外面所造成之結露或結霜，而有氣體壓力變得難以調 ‘整之m因此’藉由將減壓手段之上游側配管（主要側配 管）進行加熱或將減壓手段進行加熱，而進行抑制減壓後之 氣體/皿度下降（參照例如專利文獻1〜3)。 [專利文獻1]日本專利特開2006_283812號公報 [專利文獻2]日本專利第3592446號公報 [專利文獻3]日本專利特公平6_33858號公報 【發明内容】 - (發明所欲解決之問題） 然而’採用電熱器作為用以針對供給可燃性氣體之裝置的 配管或減壓手段進行加熱之加熱源，係因當萬-發生氣體外 漏寺^有起火的危險性，故不佳。又，將有加熱用流體流動 之加熱魏管捲繞在氣體配f ，仙為了使氣體配管内 099141683 201139917 之氣體充分升溫而將熱傳導面積擴至極大，因有將流動於加 熱用配管内之流體溫度設為高溫之必要，將導致設備成本或 運轉成本的增加。 另一方面，單矽烷(SiH4)或三氟化氮(NF3)係因為臨界壓力 非常接近填充壓力，臨界溫度亦比較接近室溫，而成為來自 在臨界點附近進行填充之狀態的供給。另外，由於標準沸點 高，所以因隔熱膨脹所造成之氣體溫度大為下降，氣體容易 夕。此外，單石夕烧 助燃性，故而期望 液化’亦容易使減壓手段之結露或結霜變 係具有可燃性、自燃性，三氟化氮亦具有 避免使用電熱器。 穩定之狀態下進行減 之氣體供給裝置為其 於此，本發明係以提供可在壓縮氣體 壓並予以供給’經濟性和安全性均優異 目的。 (解決問題之手段） 為了達成上述目的’本發明之氣體供給 x置係利用減壓手 段將來自壓縮氣體供給源所供給之氣f '、逼行減壓而供給之 氣體供給裝置，其特徵為，於上述減壓手段之$體穿動。 上游側’設置熱交換II，使導入至該減壓= 水供給源所供給之溫水進行熱交換而㈣0 溫，同時於上述減壓手段上設置藉由上述⑼ 极水之一部分用以 將該減壓手段進行加溫之溫水流路。 此外，本發明之之氣體供給裂置係具有下述特徵：具備有 099141683 4 201139917 將上述溫水加溫至30〜4(rc之溫度，而供給至上述熱交換。。 及上，顧手段之溫水流料溫水彳盾環手m賴手 係可稷數配置成串聯或並聯，且於各減壓手段之氣體流動^ 向上游側分觀置上述熱交換器；及上述氣體為單傾或： 氟化氮。 〜 (發明效果） 右根據本發明之之氣體供給裝置的話，因為利用以溫水為 力，、、、原之熱父換②來力口溫氣體，故可有效地且確實地針對於 配&内動之氣體進行加溫’減壓手段亦可藉由溫水進行加 狐而確只p方止減壓後之氣體的液化。又，透過以溫水為加熱 源’相對於電熱器，可提高安全性。此外’藉由將溫水溫度 a又疋在40C以下’則不會有氣體溫度變得過高的情形，可 減加溫時所需要的能量。又，藉由將減壓手段複數設置成 _ Aium因為可以將各減壓手段之減壓度數設定為 最佳化’故於減壓手段或配管系統上不會發生結露或結霜， 而可更為有效地供給減壓氣體’尤其是單矽烷或三氟化氮類 之氣體亦能夠以安全且穩定之狀態下進行供給。 【實施方式】 本形態例所示之氣體供給裝置係以串聯方式設置2個壓 力5周整益21、31作為減壓手段，以在既定高壓狀態下，用 以使填充有壓縮氣體屬於壓縮氣體供給源之高壓氣體容器 11所供給之氣體的壓力降低，利用氣體流動方向上游側之 099141683 5 201139917 第1壓力調整器2Γ，將高壓氣體進行減麗預先所設定之減 壓度數’而為中壓氣體’利用下游側之第2壓力調整器31， 將中壓氣體進行減壓預先所設定之減壓度數，藉此形成為供 給因應於供給目標所期望壓力之低壓氣體的方式。例如，在 將填充壓力為9MPa(絕對壓m㈣）之壓縮氣體減壓至 接近大氣壓而予以供給之情況下，於利用第】壓力調整器 2!減壓至4MPa左右之中壓後，利用第u力調整器g 4MPa減壓至接近大氣壓之供給壓力而予以供终 ^體供轉置與高壓氣體容器高壓闕12 與壓力檢測器13，而在氣體供給带 太η 裝置與供給目標之間設置 有低壓閥14。另外，於各壓力調整 .,蹩斋21、31之氣體流動方 向上游侧（主要側），設置有熱交換 uy々r 兴裔22、32與切斷闕23、 :):壓力調整器21、31之氣體流動方™^ 側）’刀別設置有壓力檢測器24 一 之氣體供給裝置，係以與配置有上述壓又/於本形態例= ％ 上4壓力調整器21、31或 用、以將力 等之裝置本體部16隔離的狀態下，設麯 用以將加>凰用溫水分別循環供給 及上述熱交換器22、32的溫水·;二壓她 製=:Γ:…熱交換= =1:納於上方心有底容器一構〆 線圈構㈣，於容器41之上部開口，係可裝卸地安裝有己 插通線圈管42之入口管42a與出口管之蓋體^。又， 099141683 6 201139917 在容器41 tf向側壁之其一上，設置有溫水導入。^，於另 -側壁上，則設置有溫水導出口 45，且在容器41㈣部， 設置有用以使從溫水導入口 44流入至容器41内之溫水，可 有效地接觸線圈管42的複數阻撓板（泡泡板)46，以使不致 於干涉到線圈管42。從溫水導入口 44流入至容器41内之 溫水係利用阻撓板46之作用，而於容器41内蛇行流動，藉 以平均地接觸於線圈管42之外面，透過線圈管c之管壁， 與在線圈管42之内部流動的氣體進行熱交換，藉此加&溫氣 體之後，從溫水導出口 45導出。 如圖3所示般，於上述壓力調整器21、31，係以包圍中 . 央氣體流路51、52周圍之方式，採用設置有溫水流路53 之附有保溫功能者。於該溫水流路53之—端設置有溫水導 入口 54,而於另一端則設置有溫水導出口 55，從溫水導入 口 54流入至溫水流路53之溫水’係通過形成在氣體流路 5丄周圍之入口側環狀流路53a，再從該人口側環狀流路… 通過設置在閥箱部分之周圍的閥箱外周流路饥，而流入至 出口側環狀流路53e，並在流動於該等流路時，將壓力調整 器21、31加溫後，由溫水導出口 55被導出。 財循環單元15係具備有：使㈣意魏而生成預先所 設定之溫度之溫水的溫水生成器17;連接該溫水生成器口 與上職置本體部16内之加溫對象的溫水供給管Μ及、 回流管19。溫水生成器】7係藉由例如電熱器來生成加^至 099141683 201139917 30〜40 C溫度之ρ并 恤水並M泵進行供給者， 所生成之溫水係通過溫水供仏瞥18 水生成"17 仏⑽力調㈣乂: I分別導至熱交換器 整态21、31分別對應之導 而從熱交換器22、叫力調整器21、3二: =:4側分支管一到溫水二： /皿欠生成α 17循環而進行再利用之型態。 從溫水生成器17所㈣mm 之氣體流量_交換器22、3 =、T根據所供給 2卜 熱乂換效率、壓力調整器 安入性料而進行任意設定，若考慮到漏_的 女王丨生則以設定在40。(：以下為佳，若老磨$丨尸μ @ιΙ.( 匕Λ卜雜右考慮到氣體的加溫 則最好是3〇t以上，特別以坑以上更好。而溫水 ^里，可因應於熱交換器22、32之氣體流量或熱交換效率 等，灯適§岐’例如’在熱交換器22、32中，利用與線 iU 42 ^氣體對象方向的流動來進行熱交換，藉此，溫 度降低之此水溫度（亦即，溫水導出口 45之溫水溫度)相對 ； 導入口 44之溫水溫度，較佳的是設定為未滿-5°C， 較佳的是未滿-2°C。 一方面關於線圈管42 ,係採用因應於供給目標所期 望之氣體机量與通過該線圈管42之氣體壓力之管徑或厚度 的b路此線圈管42之長度係藉由將線圈管42拉長而可將 熱父換，之氣體溫度設為接近溫水溫度，因為無法期待符合 斤使用Ϊ路之成本增加的充分效果，故藉由與溫水熱交換而 099141683 8 201139917 加溫之氣體溫度係相對於溫水溫度，較佳的是設定為未滿 -5°C，更佳的是設定為未滿-3°C。 此時，於線圈管42内流動之氣體、與在線圈管42周圍流 動之溫水，係透過線圈管42之管壁進行熱交換，並非如將 溫水配管捲繞於氣體配管周圍之先前技術般，因為沒有2 根管路之管外面彼此接觸、或管彼此間存在空氣層的狀況， 故而可設定線圈管42之内外各表面積、管壁厚度、内外溫 度差、比熱等各種條件，藉以可輕易根據計算熱交換後之氣 體溫度等而求得。因此，並無如先前技術般之未能使氣體溫 度充分上升或氣體溫度變得不穩定的事情，而可將流入至下 游側之壓力調整器21、31的氣體確實地加溫到指定溫度。 又，關於壓力調整器21、31，當考慮到減壓後之氣體溫 度與溫水之加溫效果，則以分別設定各壓力調整器21、31 之減壓度數為宜，以利用供應至熱交換器22、32之溫水溫 度，使壓力調整器21、31外面不會結露的程度，針對壓力 調整器21、31外面進行加溫之方式，設定溫水流量或溫水 流路53之構造、形狀即可。 此外，上述溫水溫度或上述溫水循環單元15之溫水供應 能力、熱交換器22、32之熱交換能力、壓力調整器21、31 之加溫能力，一般係使對應於供應氣體之最大流量而設定， 但若是最大流量之繼續時間為短時間，而可無視此時對於壓 力調整器21、31之結露量的程度的話，則可對應於少於最 099141683 9 201139917 大流量之氣||涔θ 祖而設定各能力。 如本形態例辦-^ 、、 不藉由複數階段進行壓縮氣體之減壓，則 可縮小各減壓階段之減壓度數’同時沒有必要將用以導入呈 減壓手段(壓力調整器21、31)之壓縮氣體加熱至 採用40°C以下之加& 边 、…之恤水之熱交換器22、32將氣體加溫，藉以 y =止減壓手段處之氣體液化或減壓手段外面之結露。特別 疋猎由利用熱交換器進行以溫水之氣體加溫，而可 效地加溫至指定溫度，透過使用啊以下之溫水，^確保 相較於利用電熱器加熱配管等時之安全性。又，在利用間隔 壁等’將具財壓職體所流狀配管线的裝置本體部 16、與生成溫水之溫水生成器17予以隔離之狀態下進行設 置，即便是於溫水生成器17之加熱源使用電熱器，因為壓 縮氣體與電熱器被隔離開，故而可大幅度提升安全性。又， 相較於熱水或蒸氣之情形，藉由使用溫水，而可達到加溫所 需要之能量的減少，亦可減少來自配管系統之熱損失，即便 萬一溫水漏洩，亦無火燙傷等危險。 另外’在將減壓後之低壓氣體連續供應至供應目標之情形 下，可複數設置具備有上述裝置本體部16與溫水循環單元 15之氣體供應裝置，亦可使一個溫水猶環單元1 $對應於複 數裝置本體部16。又，在隔熱膨脹所造成之氣體溫度降低 比較小，將減壓度數小之壓縮氣體進行減麼而供應之情形 下，可以一個一個設置減壓手段及熱交換器。 099141683 10 201139917 【圖式簡單說明】 圖1係表示本發明之氣體供給裝置一形態例的系統圖。 圖2係表示在本發明之氣體供給裝置中所使用之熱交換 器一例的剖面圖。 圖3係表示在本發明之氣體供給裝置中所使用之壓力調 整器一例的剖面圖。 【主要元件符號說明】 11 1¾壓氣體容器 12 高壓閥 13 壓力檢測器 14 低壓閥 15 溫水循環單元 16 裝置本體部 17 溫水生成裔 18 溫水供給管 18a 導入側分支管 19 溫水回流管 19a 導出側分支管 21 壓力調整器 22 熱交換器 23 切斷閥 24 壓力檢測器 099141683 11 201139917 31 壓力調整器 32 熱交換器 33 切斷閥 34 壓力檢測器 41 容器 42 線圈管 42a 入口管 42b 出口管 43 蓋體 44 溫水導入口 45 溫水導出口 46 阻撓板 51 氣體流路 52 氣體流路 53 溫水流路 53a 入口側環狀流路 53b 閥箱外周流路 53c 出口側環狀流路 54 溫水導入口 55 溫水導出口 099141683 12201139917 VI. Description of the Invention: [Technical Field to Which the Invention Is Applicable] This is a gas supply device for a gas supply, and more specifically, a gas supply device for supplying a compressed gas under reduced pressure. [Prior Art] When a compressed gas from a 47-liter container or a large-sized container is supplied, it is supplied under reduced pressure to a finger pressure by a decompression means such as a force, a pressure reducing valve, or a control valve. At this time, the gas decompressed by the decompression means causes the temperature of the gas to decrease due to the thermal expansion and the Joule-Thomson effect, which may cause condensation or frosting due to the reduction of the G hand & Therefore, it is difficult to adjust the gas pressure so that the gas/container degree after the pressure reduction is suppressed by heating the upstream side pipe (main side pipe) of the pressure reducing means or heating the pressure reducing means ( For example, Patent Documents 1 to 3). [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The use of an electric heater as a heating source for heating a pipe or a decompression means for a device for supplying a combustible gas is not preferable because the risk of fire is caused by the gas leakage. In addition, the heating tube in which the heating fluid flows is wound around the gas distribution f, and the heat conduction area is greatly increased in order to sufficiently increase the temperature of the gas in the gas pipe at 099141683 201139917, because the fluid flowing in the heating pipe is present. The need to set the temperature to high temperatures will result in an increase in equipment costs or operating costs. On the other hand, monodecane (SiH4) or nitrogen trifluoride (NF3) is supplied at a critical temperature from the vicinity of the critical point because the critical pressure is very close to the filling pressure, and the critical temperature is relatively close to room temperature. In addition, since the standard boiling point is high, the temperature of the gas caused by the thermal expansion is greatly lowered, and the gas is easy. In addition, the single-fired kiln is flammable, so liquefaction is expected to be easy to cause dew condensation or frosting of the decompression means to be flammable and pyrophoric, and nitrogen trifluoride also avoids the use of an electric heater. The gas supply device is reduced in a stable state. The present invention is to provide an object that is excellent in both economy and safety in terms of providing a compressible gas pressure and supplying it. (Means for Solving the Problem) In order to achieve the above object, the gas supply device according to the present invention is characterized in that the gas supply unit supplied from the compressed gas supply source is supplied with a reduced pressure by means of a pressure reducing means. , in the above-mentioned decompression means $ body piercing. The upstream side is provided with a heat exchange II for introducing heat to the warm water supplied from the water supply source, and (4) 0 temperature, and a part of the (9) polar water is provided on the pressure reducing means for The warm water flow path for heating is performed by a decompression means. Further, the gas supply cleavage system of the present invention has the following feature: it is equipped with 099141683 4 201139917, and the warm water is heated to a temperature of 30 to 4 (rc, and supplied to the heat exchange. The warm water flow material warm water 彳 环 环 m 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖Nitrogen fluoride. ~ (Effect of the invention) According to the gas supply device of the present invention, it is effective and reliable because it uses the warm water as the force, and the original hot father exchanges 2 to force the mouth temperature gas. The heating is carried out for the gas of the internal & internal pressure. The decompression means can also be used to add fox by warm water, and the liquefaction of the gas after decompression is only p. Also, the warm water is used as the heating source. Compared with the electric heater, the safety can be improved. In addition, 'by heating the warm water temperature a below 40C', there is no possibility that the gas temperature becomes too high, and the energy required for heating can be reduced. By setting the decompression means to _ Aium, because each The degree of pressure reduction of the pressure means is set to be optimized. Therefore, condensation or frosting does not occur on the pressure reducing means or the piping system, and the pressure reducing gas can be supplied more efficiently, especially monoterpene or nitrogen trifluoride. The gas supply device can be supplied in a safe and stable state. [Embodiment] The gas supply device shown in the present embodiment is provided with two pressures and five weeks of leanness 21 and 31 as a decompression means in series. In a high-pressure state, the pressure of the gas supplied from the high-pressure gas container 11 filled with the compressed gas as the compressed gas supply source is lowered, and the high-pressure gas is carried out by using the first pressure regulator 2Γ on the upstream side of the gas flow direction at 099141683 5 201139917 The second pressure regulator 31 on the downstream side is used for the intermediate pressure gas 'the medium pressure gas', and the medium pressure gas is decompressed by the pressure reduction degree set in advance, thereby forming the supply in response to the supply. A method of low-pressure gas at a desired pressure of the target. For example, a compressed gas having a filling pressure of 9 MPa (absolute pressure m (d)) is decompressed to near atmospheric pressure and supplied. In this case, after the pressure is reduced to about 4 MPa by the pressure regulator 2!, the pressure is reduced to a supply pressure close to atmospheric pressure by the u-force adjuster g 4 MPa, and the final supply and the high-pressure gas are supplied. The container high pressure crucible 12 and the pressure detector 13 are provided with a low pressure valve 14 between the gas supply belt too η device and the supply target. In addition, for each pressure adjustment, the upstream side of the gas flow direction of the 21, 21, 31 (mainly Side), provided with heat exchange uy々r Xingyu 22, 32 and cut-off 阙23, :): gas flow side of pressure regulators 21, 31 TM^ side) 'Knife set with pressure detector 24 The supply device is provided in a state in which the pressure regulator 21, 31 or the device body portion 16 for isolating the force is disposed in the state in which the above-mentioned pressure is applied to the pressure regulator 21, 31, or the like. The phoenix is separately supplied with warm water and the warm water of the heat exchangers 22 and 32 described above; the second pressure is made by the system: = Γ: ... heat exchange = =1: the upper core bottomed container is constructed with a coil structure (four), The upper portion of the container 41 is open, and the inlet tube 42a and the outlet of the inserted coil tube 42 are detachably mounted. The cover body ^. Further, 099141683 6 201139917 is provided with warm water introduction on one of the side walls of the container 41 tf. On the other side wall, a warm water outlet 45 is provided, and in the container (four) portion, warm water is provided to allow the warm water from the warm water introduction port 44 to flow into the container 41, and the coil tube 42 can be effectively contacted. The plurality of resist plates (bubble plates) 46 are so as not to interfere with the coil tube 42. The warm water flowing into the container 41 from the warm water introduction port 44 acts by the obstruction plate 46 to meanderly flow in the container 41, thereby uniformly contacting the outer surface of the coil tube 42 and passing through the wall of the coil tube c, and The gas flowing inside the coil tube 42 is subjected to heat exchange, thereby adding & warm gas, and then being led out from the warm water outlet 45. As shown in Fig. 3, the pressure regulators 21 and 31 are provided with a heat insulating function provided with a warm water flow path 53 so as to surround the middle gas flow paths 51 and 52. A warm water introduction port 54 is provided at the end of the warm water flow path 53, and a warm water outlet port 55 is provided at the other end, and the warm water flow from the warm water introduction port 54 to the warm water flow path 53 is formed by The inlet side annular flow path 53a around the gas flow path 5丄, and the annular flow path from the population side, flows into the outlet side annular flow path through the outer peripheral flow path of the valve box provided around the valve box portion. 53e, when flowing in the flow paths, the pressure regulators 21, 31 are heated, and then exported from the warm water outlets 55. The financial cycle unit 15 is provided with a warm water generator 17 that generates (4) a warm water to generate a temperature set in advance, and a temperature of a warming object connected to the warm water generator port and the upper working body unit 16 The water supply pipe and the return pipe 19. The warm water generator 7 is generated by adding, for example, an electric heater to the temperature of 099141683 201139917 30~40 C, and the M pump is supplied to the supplier. The warm water generated is supplied by warm water. Generate "17 仏(10) force adjustment (4) 乂: I lead to the heat exchanger full state 21, 31 respectively corresponding to the guide from the heat exchanger 22, the force adjuster 21, 3 two: =: 4 side branch pipe To the warm water two: / dish is less than the formation of the α 17 cycle and reused. The gas flow rate_exchanger 22, 3 =, T from the warm water generator 17 (4) mm is arbitrarily set according to the supplied heat transfer efficiency and the pressure adjuster material, and the queen 丨 considering the leak _ The student is set at 40. (: The following is good, if the old mill $ 丨 μ @ @ @ @ @ @ @ @ @ @ Ι 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右Depending on the gas flow rate or heat exchange efficiency of the heat exchangers 22, 32, etc., the lamp may be configured to perform heat exchange in the heat exchangers 22, 32 by using a flow in the direction of the gas object, i. Thereby, the water temperature at which the temperature is lowered (that is, the warm water temperature of the warm water outlet 45) is opposite; the warm water temperature of the inlet 44 is preferably set to less than -5 ° C, preferably It is less than -2 ° C. On the one hand, the coil tube 42 is a length of the coil tube 42 in accordance with the diameter of the gas required for the supply target and the diameter or thickness of the gas passing through the coil tube 42. By extending the coil tube 42, the hot parent can be changed, and the gas temperature is set to be close to the warm water temperature. Since the sufficient effect of increasing the cost of the use of the crucible can not be expected, the heat exchange with the warm water is 099141683. 8 201139917 Heating gas temperature is preferably set to less than -5 ° relative to warm water temperature More preferably, C is set to be less than -3 ° C. At this time, the gas flowing in the coil tube 42 and the warm water flowing around the coil tube 42 are heat-exchanged through the tube wall of the coil tube 42 . Unlike the prior art in which the warm water pipe is wound around the gas pipe, since the pipes of the two pipes are not in contact with each other or the air layer exists between the pipes, the inner and outer surfaces of the coil pipe 42 can be set, Various conditions such as the thickness of the pipe wall, the temperature difference between the inside and the outside, and the specific heat can be easily obtained from the calculation of the temperature of the gas after the heat exchange, etc. Therefore, the gas temperature is not sufficiently increased or the gas temperature is not changed as in the prior art. Unstable, the gas flowing into the pressure regulators 21, 31 on the downstream side can be surely warmed to a specified temperature. Further, regarding the pressure regulators 21, 31, when considering the temperature and temperature of the gas after decompression For the heating effect of water, it is preferable to set the degree of decompression of each of the pressure regulators 21, 31, respectively, so that the outside of the pressure regulators 21, 31 is not dewed by the temperature of the warm water supplied to the heat exchangers 22, 32. Cheng Cheng The warm water flow rate or the structure and shape of the warm water flow path 53 may be set in such a manner that the outside of the pressure regulators 21 and 31 is heated. Further, the warm water temperature or the warm water supply capacity of the warm water circulation unit 15 and the heat are provided. The heat exchange capacity of the exchangers 22, 32 and the heating capacity of the pressure regulators 21, 31 are generally set to correspond to the maximum flow rate of the supply gas, but if the maximum flow rate continues for a short period of time, the situation can be ignored. For the degree of dew condensation of the pressure regulators 21, 31, the respective capacities can be set corresponding to the gas ||涔θ ancestor of less than the maximum flow rate of 099141683 9 201139917. As in this example, the method does not pass When the pressure of the compressed gas is reduced in a plurality of stages, the degree of pressure reduction in each decompression stage can be reduced. At the same time, it is not necessary to heat the compressed gas for introducing the pressure reducing means (pressure regulators 21, 31) to 40 ° C or less. The heat exchangers 22 and 32 of the water supply are heated to increase the gas by y = condensation on the outside of the gas liquefaction or decompression means at the decompression means. In particular, the hunt is heated by warm water using a heat exchanger, and is effectively heated to a specified temperature. The warm water is used below, and the safety is ensured when the piping is heated by an electric heater. . In addition, it is installed in a state where the device main body portion 16 having the flow line of the financial body is separated from the warm water generator 17 that generates the warm water by the partition wall or the like, even in the warm water generator. The heating source of 17 uses an electric heater, because the compressed gas is separated from the electric heater, so that the safety can be greatly improved. Moreover, compared with hot water or steam, by using warm water, the energy required for heating can be reduced, and the heat loss from the piping system can be reduced, even if the warm water leaks, there is no fire. Risk of burns. In addition, in the case where the low-pressure gas after the decompression is continuously supplied to the supply target, the gas supply device provided with the above-mentioned device main body portion 16 and the warm water circulation unit 15 may be provided in plurality, or a warm water helium ring unit 1 $ Corresponding to the plurality of device body portions 16. Further, in the case where the temperature of the gas caused by the heat insulating expansion is relatively small, and the compressed gas having a small degree of pressure reduction is supplied and supplied, the pressure reducing means and the heat exchanger can be provided one by one. 099141683 10 201139917 [Brief Description of the Drawings] Fig. 1 is a system diagram showing an example of a gas supply device of the present invention. Fig. 2 is a cross-sectional view showing an example of a heat exchanger used in the gas supply device of the present invention. Fig. 3 is a cross-sectional view showing an example of a pressure regulator used in the gas supply device of the present invention. [Main component symbol description] 11 13⁄4 pressure gas container 12 High pressure valve 13 Pressure detector 14 Low pressure valve 15 Warm water circulation unit 16 Device body portion 17 Warm water generator 18 Warm water supply pipe 18a Introduction side branch pipe 19 Warm water return pipe 19a Derivation side branch pipe 21 Pressure regulator 22 Heat exchanger 23 Shutoff valve 24 Pressure detector 099141683 11 201139917 31 Pressure regulator 32 Heat exchanger 33 Shutoff valve 34 Pressure detector 41 Container 42 Coil tube 42a Inlet tube 42b Outlet tube 43 cover body 44 warm water inlet port 45 warm water outlet port 46 barrier plate 51 gas flow path 52 gas flow path 53 warm water flow path 53a inlet side annular flow path 53b valve box outer peripheral flow path 53c outlet side annular flow path 54 temperature Water inlet 55 warm water outlet 099141683 12