WO2011068035A1 - Gas supply device - Google Patents

Gas supply device Download PDF

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Publication number
WO2011068035A1
WO2011068035A1 PCT/JP2010/070525 JP2010070525W WO2011068035A1 WO 2011068035 A1 WO2011068035 A1 WO 2011068035A1 JP 2010070525 W JP2010070525 W JP 2010070525W WO 2011068035 A1 WO2011068035 A1 WO 2011068035A1
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WO
WIPO (PCT)
Prior art keywords
gas
hot water
pressure
gas supply
decompression means
Prior art date
Application number
PCT/JP2010/070525
Other languages
French (fr)
Japanese (ja)
Inventor
隆 米田
吉田　隆
Original Assignee
大陽日酸株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大陽日酸株式会社 filed Critical 大陽日酸株式会社
Priority to EP10834487.0A priority Critical patent/EP2508786B1/en
Priority to KR1020127017182A priority patent/KR101755744B1/en
Priority to CN201080054408.7A priority patent/CN102639922B/en
Publication of WO2011068035A1 publication Critical patent/WO2011068035A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/0206—Heat exchangers immersed in a large body of liquid
    • F28D1/0213—Heat exchangers immersed in a large body of liquid for heating or cooling a liquid in a tank
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/035—High pressure (>10 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F17C2227/0316—Water heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F17C2227/0323—Heat exchange with the fluid by heating using another fluid in a closed loop
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0388—Localisation of heat exchange separate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/042—Reducing risk of explosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
    • F28F2009/222—Particular guide plates, baffles or deflectors, e.g. having particular orientation relative to an elongated casing or conduit
    • F28F2009/226—Transversal partitions

Definitions

  • the present invention relates to a gas supply device, and more particularly to a gas supply device that supplies a compressed gas with a reduced pressure.
  • the pressure is reduced to a specified pressure by a pressure reducing device such as a pressure adjusting device, a pressure reducing valve, or a control valve.
  • a pressure reducing device such as a pressure adjusting device, a pressure reducing valve, or a control valve.
  • the gas temperature of the gas decompressed by the decompression means decreases due to adiabatic expansion and the Joule-Thompson effect, condensation or frost formation on the outer surface of the decompression means may occur, making it difficult to adjust the gas pressure. There is. For this reason, the fall of the gas temperature after pressure reduction is suppressed by heating the upstream piping (primary side piping) of a pressure reduction means, or heating a pressure reduction means (for example, patent documents). See 1-3.)
  • JP 2006-283812 A Japanese Patent No. 3592446 Japanese Patent Publication No. 6-33858
  • an electric heater as a heating source for heating the piping of the apparatus for supplying the combustible gas or the decompression means, because there is a risk of ignition when a gas leak occurs.
  • a heating pipe through which a heating fluid flows is wound around the gas pipe, in order to sufficiently raise the temperature of the gas in the gas pipe, the heat transfer area is extremely large, It is necessary to make the temperature of the fluid flowing through the pipes high, resulting in an increase in equipment costs and operating costs.
  • monosilane (SiH 4 ) and nitrogen trifluoride (NF 3 ) have a critical pressure very close to the filling pressure and the critical temperature is relatively close to room temperature. Become. And since a standard boiling point is high, the fall of the gas temperature by adiabatic expansion is large, gas tends to liquefy, and the dew condensation and frost formation to a decompression means tend to increase. Furthermore, since monosilane has flammability and self-flammability, and nitrogen trifluoride also has combustion support, it is desirable to avoid the use of an electric heater.
  • an object of the present invention is to provide a gas supply apparatus that can supply compressed gas under reduced pressure in a stable state, and is excellent in economy and safety.
  • a gas supply apparatus is a gas supply apparatus that supplies a gas supplied from a compressed gas supply source by reducing the pressure with a decompression means, and on the upstream side in the gas flow direction of the decompression means.
  • a heat exchanger is provided for heat exchange between the gas introduced into the decompression means and the hot water supplied from the hot water supply source to warm the gas, and the decompression means is provided to the decompression means by a part of the warm water.
  • a warm water channel for heating was provided.
  • the gas supply apparatus of the present invention further includes hot water circulation means for heating the hot water to a temperature of 30 to 40 ° C. and supplying the hot water to the heat exchanger and the hot water flow path of the decompression means.
  • hot water circulation means for heating the hot water to a temperature of 30 to 40 ° C. and supplying the hot water to the heat exchanger and the hot water flow path of the decompression means.
  • a plurality of the decompression means are arranged in series or in parallel, and the heat exchanger is arranged on the upstream side of each decompression means in the gas flow direction.
  • the gas is monosilane or nitrogen trifluoride.
  • the gas supply device of the present invention since the gas is heated by the heat exchanger using hot water as a heating source, the gas flowing in the pipe can be heated efficiently and reliably, and the decompression means is also heated by the hot water. By heating, it can prevent reliably that the gas after pressure reduction liquefies. In addition, by using hot water as the heating source, safety can be improved as compared with an electric heater. Furthermore, by setting the hot water temperature to 40 ° C. or less, the gas temperature does not become too high, and the energy required for heating can be reduced.
  • the degree of decompression in each decompression means can be set optimally, so that decompression can be performed more efficiently without causing condensation or frost formation on the decompression means or the piping system.
  • a gas can be supplied, and in particular, a gas such as monosilane or nitrogen trifluoride can be supplied in a safe and stable state.
  • the gas supply apparatus shown in the present embodiment includes two pressure regulators as decompression means for reducing the pressure of the gas supplied from the high-pressure gas container 11 serving as a compressed gas supply source filled with the compressed gas in a predetermined high-pressure state.
  • 21 and 31 are provided in series, and the first pressure regulator 21 on the upstream side in the gas flow direction is depressurized to a medium pressure gas by depressurizing the high-pressure gas at a preset degree of decompression.
  • the pressure regulator 31 is configured to supply a low-pressure gas having a pressure according to a request of the supply destination by reducing the pressure of the medium-pressure gas at a predetermined degree of pressure reduction.
  • the first pressure regulator 21 reduces the pressure to about 4 MPa and then the second pressure.
  • the regulator 31 supplies the pressure reduced from 4 MPa to a supply pressure close to atmospheric pressure.
  • a high pressure valve 12 and a pressure detector 13 are provided between the gas supply device and the high pressure gas container 11, and a low pressure valve 14 is provided between the gas supply device and the supply destination.
  • the heat exchangers 22 and 32 and the shut-off valves 23 and 33 are provided on the upstream side (primary side) of the pressure regulators 21 and 31 in the gas flow direction, and the gas flow directions of the pressure regulators 21 and 31 are provided.
  • Pressure detectors 24 and 34 are provided on the downstream side (secondary side), respectively.
  • a hot water circulation unit 15 for circulating and supplying warm water for heating to the pressure regulators 21 and 31 and the heat exchangers 22 and 32 is provided for the pressure adjustment.
  • the devices 21 and 31 and the heat exchangers 22 and 32 are provided in a state of being isolated from the apparatus main body portion 16.
  • the heat exchangers 22 and 32 have a structure (shell-and-coil structure) in which a metal coil tube 42 is housed in a bottomed container 41 having an open top.
  • a lid 43 through which the inlet pipe 42 a and the outlet pipe 42 b of the coil pipe 42 are inserted is detachably attached to the upper opening of the container 41.
  • a hot water inlet 44 is provided on one of the opposing side walls of the container 41, and a hot water outlet 45 is provided on the other side wall, and the hot water inlet 44 is provided in the container 41 inside the container 41.
  • baffle plates 46 for efficiently bringing the inflowing hot water into contact with the coil tube 42 are provided so as not to interfere with the coil tube 42.
  • the hot water flowing into the container 41 from the hot water inlet 44 flows while meandering in the container 41 by the action of the baffle plate 46, thereby uniformly contacting the outer surface of the coiled tube 42, and passing through the tube wall of the coiled tube 42. After the gas is heated by exchanging heat with the gas flowing inside the pipe 42, the gas is led out from the hot water outlet 45.
  • the pressure regulators 21 and 31 are those having a heat retention function in which a hot water channel 53 is provided so as to surround the central gas channels 51 and 52.
  • a hot water inlet 54 is provided at one end of the hot water passage 53 and a hot water outlet 55 is provided at the other end. The hot water flowing into the hot water passage 53 from the hot water inlet 54 is supplied to the gas passage 51.
  • the hot water circulation unit 15 is a hot water generator 17 that generates hot water having a preset temperature using arbitrary thermal energy, and hot water that connects the hot water generator 17 and a heating target in the apparatus main body 16.
  • a supply pipe 18 and a hot water return pipe 19 are provided.
  • the hot water generator 17 generates hot water heated to a temperature of 30 to 40 ° C. by an electric heater, for example, and supplies it with a pump.
  • the hot water generated by the hot water generator 17 passes through the hot water supply pipe 18.
  • the hot water derived from the heat exchangers 22 and 32 and the pressure regulators 21 and 31 is separated from the introduction side branch pipes 18a corresponding to the heat exchangers 22 and 32 and the pressure regulators 21 and 31, respectively.
  • the pipe 19a is joined to the hot water return pipe 19 and is circulated to the hot water generator 17 to be reused.
  • the temperature of the hot water supplied from the hot water generator 17 can be arbitrarily set according to conditions such as the supplied gas flow rate, the heat exchange efficiency of the heat exchangers 22 and 32, and the heating efficiency of the pressure regulators 21 and 31. However, in consideration of safety at the time of leakage, it is preferable to set the temperature to 40 ° C. or less, and considering the gas heating effect, 30 ° C. or more, particularly 35 ° C. or more is optimal.
  • the hot water flow rate can also be set as appropriate according to the gas flow rate and heat exchange efficiency in the heat exchangers 22 and 32. For example, in the heat exchangers 22 and 32, the gas in the coil tube 42 and the countercurrent flow are counteracted.
  • the temperature of the hot water whose temperature has decreased due to heat exchange in the direction of flow that is, the temperature of the warm water at the warm water outlet 45 is less than ⁇ 5 ° C., preferably less than ⁇ 2 ° C. with respect to the warm water temperature at the warm water inlet 44 It is preferable to set so that.
  • the coil tube 42 a pipe having a diameter and a thickness corresponding to the gas flow rate desired by the supply destination and the gas pressure passing through the coil tube 42 is used.
  • the temperature of the gas heated by heat exchange with the hot water is preferably set to be lower than ⁇ 5 ° C., preferably lower than ⁇ 3 ° C. with respect to the hot water temperature.
  • the gas flowing in the coil tube 42 and the hot water flowing around the coil tube 42 exchange heat through the tube wall of the coil tube 42 and wind the hot water tube around the gas pipe.
  • the pipe outer surfaces of the two pipes are not in line contact with each other, and an air layer is not interposed between the pipes.
  • the gas temperature after heat exchange can be easily obtained by calculation. Therefore, the gas temperature cannot be raised sufficiently unlike the conventional case, or the gas temperature does not become unstable, and the gas flowing into the pressure regulators 21 and 31 on the downstream side can be reliably kept at a predetermined temperature. Can be warmed.
  • the decompression degree in each pressure regulator 21 and 31 in consideration of the gas temperature after depressurization and the warming effect of the hot water.
  • the hot water flow rate and the structure and shape of the hot water flow channel 53 are set so that the outer surface of the pressure regulators 21 and 31 can be heated to such an extent that dew condensation does not occur on the outer surfaces of the pressure regulators 21 and 31 do it.
  • the hot water temperature, the hot water supply capacity of the hot water circulation unit 15, the heat exchange capacity of the heat exchangers 22 and 32, and the heating capacity of the pressure regulators 21 and 31 are generally set to the maximum flow rate of the supplied gas. If the duration of the maximum flow rate is short and the amount of dew condensation on the pressure regulators 21 and 31 is negligible at that time, the gas flow rate is set lower than the maximum flow rate. Each ability can be set.
  • the degree of decompression in each decompression stage can be reduced, and the compressed gas introduced into the decompression means (pressure regulators 21, 31) can be reduced.
  • the compressed gas introduced into the decompression means pressure regulators 21, 31
  • There is no need to heat to a high temperature and by heating the gas with the heat exchangers 22 and 32 using hot water of 40 ° C. or less, liquefaction of the gas in the decompression means and condensation on the outer surface of the decompression means can be prevented.
  • the gas can be efficiently heated to a predetermined temperature. When using hot water of 40 ° C.
  • the apparatus main body 16 having a piping system through which the compressed gas flows and the hot water generator 17 for generating hot water are installed in a state of being separated by a partition wall or the like, so that the heating source of the hot water generator 17 is electrically Even if a heater is used, since the compressed gas and the electric heater are isolated, safety can be greatly improved. Also, by using hot water, the energy required for heating can be reduced compared to when hot water or steam is used, heat loss from the piping system is reduced, and even if hot water leaks, burns etc. There is no danger.
  • a plurality of gas supply devices including the apparatus main body 16 and the hot water circulation unit 15 may be installed, but one hot water circulation unit 15 is provided. Can be made to correspond to a plurality of apparatus main body portions 16.
  • the compressed gas having a relatively small gas temperature drop due to adiabatic expansion and a low degree of decompression is supplied under reduced pressure, only one decompression means and one heat exchanger can be provided.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pipeline Systems (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Abstract

Provided is an economically advantageous and safe gas supply device which can stably supply compressed gas by reducing the pressure thereof. The gas supply device supplies the gas supplied from a compressed gas supply source (high-pressure gas container [11]) by reducing the pressure of said gas using a decompression means (pressure regulator [21 and 31]), wherein heat exchangers (22 and 32) for heating the aforementioned gas by exchanging the heat between the gas introduced to the decompression means and the hot water supplied from a hot-water supplying source (hot-water circulation unit [15]) are disposed on the upstream side in terms of the direction of gas flow on the decompression means, and the decompression means is provided with a hot-water flow path (53) for heating the decompression means using a portion of the hot water.

Description

ガス供給装置Gas supply device
　本発明は、ガス供給装置に関し、詳しくは、圧縮ガスを減圧して供給するガス供給装置に関する。 The present invention relates to a gas supply device, and more particularly to a gas supply device that supplies a compressed gas with a reduced pressure.
　４７リットルの容器や大型容器からの圧縮ガスを供給する際には、圧力調整設備、減圧弁、コントロール弁などの減圧手段によって指定された圧力に減圧して供給するようにしている。このとき、減圧手段で減圧されたガスは、断熱膨張及びジュールトムソン効果によってガス温度が低下するため、減圧手段の外面による結露や着霜が発生してガス圧力の調整が困難になったりすることがある。このため、減圧手段の上流側配管（一次側配管）を加熱したり、減圧手段を加熱したりすることで、減圧後のガス温度の低下を抑制することが行われている（例えば、特許文献１～３参照。）。 When supplying compressed gas from a 47 liter container or a large container, the pressure is reduced to a specified pressure by a pressure reducing device such as a pressure adjusting device, a pressure reducing valve, or a control valve. At this time, since the gas temperature of the gas decompressed by the decompression means decreases due to adiabatic expansion and the Joule-Thompson effect, condensation or frost formation on the outer surface of the decompression means may occur, making it difficult to adjust the gas pressure. There is. For this reason, the fall of the gas temperature after pressure reduction is suppressed by heating the upstream piping (primary side piping) of a pressure reduction means, or heating a pressure reduction means (for example, patent documents). See 1-3.)
特開２００６－２８３８１２号公報JP 2006-283812 A 特許第３５９２４４６号公報Japanese Patent No. 3592446 特公平６－３３８５８号公報Japanese Patent Publication No. 6-33858
　しかし、可燃性ガスを供給する装置の配管や減圧手段を加熱するための加熱源として電気ヒーターを用いることは、万一ガス漏れが発生したときに発火の危険性があるため好ましいものではない。また、加熱用の流体が流れる加熱用配管をガス配管の周囲に巻回したものでは、ガス配管内のガスを十分に昇温させるためには熱伝達面積を極めて大きくしたり、加熱用配管内を流れる流体温度を高温にする必要があり、設備コストや運転コストの上昇を招いてしまう。 However, it is not preferable to use an electric heater as a heating source for heating the piping of the apparatus for supplying the combustible gas or the decompression means, because there is a risk of ignition when a gas leak occurs. In addition, when a heating pipe through which a heating fluid flows is wound around the gas pipe, in order to sufficiently raise the temperature of the gas in the gas pipe, the heat transfer area is extremely large, It is necessary to make the temperature of the fluid flowing through the pipes high, resulting in an increase in equipment costs and operating costs.
　一方、モノシラン（ＳｉＨ４）や三フッ化窒素（ＮＦ３）は、臨界圧力が充填圧力に非常に近く、臨界温度も比較的室温に近いため、臨界点近傍で充填された状態からの供給となる。そして、標準沸点が高いため、断熱膨張によるガス温度の低下が大きく、ガスが液化しやすく、減圧手段への結露や着霜も多くなりやすい。さらに、モノシランは可燃性、自燃性を有し、三フッ化窒素も支燃性を有しているため、電気ヒーターの使用は避けることが望ましい。 On the other hand, monosilane (SiH 4 ) and nitrogen trifluoride (NF 3 ) have a critical pressure very close to the filling pressure and the critical temperature is relatively close to room temperature. Become. And since a standard boiling point is high, the fall of the gas temperature by adiabatic expansion is large, gas tends to liquefy, and the dew condensation and frost formation to a decompression means tend to increase. Furthermore, since monosilane has flammability and self-flammability, and nitrogen trifluoride also has combustion support, it is desirable to avoid the use of an electric heater.
　そこで本発明は、圧縮ガスを安定した状態で減圧して供給することができ、経済性や安全性にも優れたガス供給装置を提供することを目的としている。 Therefore, an object of the present invention is to provide a gas supply apparatus that can supply compressed gas under reduced pressure in a stable state, and is excellent in economy and safety.
　上記目的を達成するため、本発明のガス供給装置は、圧縮ガス供給源から供給されるガスを減圧手段で減圧して供給するガス供給装置において、前記減圧手段のガス流れ方向上流側に、該減圧手段に導入されるガスと温水供給源から供給される温水とを熱交換させて前記ガスを加温する熱交換器を設けるとともに、前記減圧手段に、前記温水の一部によって該減圧手段を加温するための温水流路を設けた。 In order to achieve the above object, a gas supply apparatus according to the present invention is a gas supply apparatus that supplies a gas supplied from a compressed gas supply source by reducing the pressure with a decompression means, and on the upstream side in the gas flow direction of the decompression means. A heat exchanger is provided for heat exchange between the gas introduced into the decompression means and the hot water supplied from the hot water supply source to warm the gas, and the decompression means is provided to the decompression means by a part of the warm water. A warm water channel for heating was provided.
　さらに、本発明のガス供給装置は、前記温水を３０～４０℃の温度に加温して前記熱交換器及び前記減圧手段の温水流路に供給する温水循環手段を備えている。また、前記減圧手段が直列又は並列に複数配置され、各減圧手段のガス流れ方向上流側に前記熱交換器がそれぞれ配置されている。さらに、前記ガスがモノシラン又は三フッ化窒素である。 Furthermore, the gas supply apparatus of the present invention further includes hot water circulation means for heating the hot water to a temperature of 30 to 40 ° C. and supplying the hot water to the heat exchanger and the hot water flow path of the decompression means. In addition, a plurality of the decompression means are arranged in series or in parallel, and the heat exchanger is arranged on the upstream side of each decompression means in the gas flow direction. Further, the gas is monosilane or nitrogen trifluoride.
　本発明のガス供給装置によれば、温水を加熱源とする熱交換器でガスを加温するので、配管内を流れるガスを効率よく確実に加温することができ、減圧手段も温水によって加温することで減圧後のガスが液化することを確実に防止できる。また、加熱源を温水とすることにより、電気ヒーターに比べて安全性を高めることができる。さらに、温水温度を４０℃以下とすることで、ガス温度が高くなりすぎることがなく、加温に要するエネルギーも少なくすることができる。また、減圧手段を直列又は並列に複数設けることにより、各減圧手段における減圧度を最適に設定することができるので、減圧手段や配管系に結露や着霜を発生させずに、より効率よく減圧ガスを供給することができ、特に、モノシランや三フッ化窒素のようなガスも安全に安定した状態で供給することができる。 According to the gas supply device of the present invention, since the gas is heated by the heat exchanger using hot water as a heating source, the gas flowing in the pipe can be heated efficiently and reliably, and the decompression means is also heated by the hot water. By heating, it can prevent reliably that the gas after pressure reduction liquefies. In addition, by using hot water as the heating source, safety can be improved as compared with an electric heater. Furthermore, by setting the hot water temperature to 40 ° C. or less, the gas temperature does not become too high, and the energy required for heating can be reduced. In addition, by providing a plurality of decompression means in series or in parallel, the degree of decompression in each decompression means can be set optimally, so that decompression can be performed more efficiently without causing condensation or frost formation on the decompression means or the piping system. A gas can be supplied, and in particular, a gas such as monosilane or nitrogen trifluoride can be supplied in a safe and stable state.
本発明のガス供給装置の一形態例を示す系統図である。It is a systematic diagram which shows one example of the gas supply apparatus of this invention. 本発明のガス供給装置で使用する熱交換器の一例を示す断面図である。It is sectional drawing which shows an example of the heat exchanger used with the gas supply apparatus of this invention. 本発明のガス供給装置で使用する圧力調整器の一例を示す断面図である。It is sectional drawing which shows an example of the pressure regulator used with the gas supply apparatus of this invention.
　本形態例に示すガス供給装置は、所定の高圧状態で圧縮ガスを充填した圧縮ガス供給源となる高圧ガス容器１１から供給するガスの圧力を低下させるための減圧手段として２個の圧力調整器２１、３１を直列に設けたもので、ガス流れ方向上流側の第１の圧力調整器２１で高圧のガスをあらかじめ設定した減圧度で減圧して中圧のガスとし、下流側の第２の圧力調整器３１で中圧のガスをあらかじめ設定した減圧度で減圧することにより、供給先の要望に応じた圧力の低圧ガスを供給するように形成されている。例えば、充填圧力が９ＭＰａ（絶対圧、以下同じ）の圧縮ガスを大気圧近くまで減圧して供給する場合、第１の圧力調整器２１で４ＭＰａ程度の中圧に減圧した後、第２の圧力調整器３１で４ＭＰａから大気圧に近い供給圧力に減圧して供給する。 The gas supply apparatus shown in the present embodiment includes two pressure regulators as decompression means for reducing the pressure of the gas supplied from the high-pressure gas container 11 serving as a compressed gas supply source filled with the compressed gas in a predetermined high-pressure state. 21 and 31 are provided in series, and the first pressure regulator 21 on the upstream side in the gas flow direction is depressurized to a medium pressure gas by depressurizing the high-pressure gas at a preset degree of decompression. The pressure regulator 31 is configured to supply a low-pressure gas having a pressure according to a request of the supply destination by reducing the pressure of the medium-pressure gas at a predetermined degree of pressure reduction. For example, when a compressed gas having a filling pressure of 9 MPa (absolute pressure, hereinafter the same) is supplied after being reduced to near atmospheric pressure, the first pressure regulator 21 reduces the pressure to about 4 MPa and then the second pressure. The regulator 31 supplies the pressure reduced from 4 MPa to a supply pressure close to atmospheric pressure.
　ガス供給装置と高圧ガス容器１１との間には、高圧弁１２と圧力検出器１３とが設けられ、ガス供給装置と供給先との間には低圧弁１４が設けられている。そして、各圧力調整器２１、３１のガス流れ方向上流側（一次側）には、熱交換器２２，３２と遮断弁２３，３３とが設けられ、各圧力調整器２１、３１のガス流れ方向下流側（二次側）には、圧力検出器２４，３４がそれぞれ設けられている。また、本形態例に示すガス供給装置には、前記圧力調整器２１、３１及び前記熱交換器２２，３２に加温用の温水をそれぞれ循環供給するための温水循環ユニット１５が、前記圧力調整器２１、３１や熱交換器２２，３２などを配置した装置本体部１６とは隔離された状態で設けられている。 A high pressure valve 12 and a pressure detector 13 are provided between the gas supply device and the high pressure gas container 11, and a low pressure valve 14 is provided between the gas supply device and the supply destination. And the heat exchangers 22 and 32 and the shut-off valves 23 and 33 are provided on the upstream side (primary side) of the pressure regulators 21 and 31 in the gas flow direction, and the gas flow directions of the pressure regulators 21 and 31 are provided. Pressure detectors 24 and 34 are provided on the downstream side (secondary side), respectively. Further, in the gas supply device shown in the present embodiment, a hot water circulation unit 15 for circulating and supplying warm water for heating to the pressure regulators 21 and 31 and the heat exchangers 22 and 32 is provided for the pressure adjustment. The devices 21 and 31 and the heat exchangers 22 and 32 are provided in a state of being isolated from the apparatus main body portion 16.
　図２に示すように、前記熱交換器２２，３２には、上方が開口した有底の容器４１内に金属製のコイル管４２を収納した構造（シェルアンドコイル構造）のものが用いられ、容器４１の上部開口には、コイル管４２の入口管４２ａと出口管４２ｂとを挿通した蓋体４３が着脱可能に取り付けられている。また、容器４１の対向する側壁の一方には温水導入口４４が設けられ、他方の側壁には温水導出口４５が設けられるとともに、容器４１の内部には、温水導入口４４から容器４１内に流入した温水をコイル管４２と効率よく接触させるための複数の邪魔板（バッフル板）４６がコイル管４２に干渉しないようにして設けられている。温水導入口４４から容器４１内に流入した温水は、邪魔板４６の作用で容器４１内を蛇行しながら流れることによってコイル管４２の外面に満遍なく接触し、コイル管４２の管壁を介してコイル管４２の内部を流れるガスと熱交換することによりガスを加温した後、温水導出口４５から導出される。 As shown in FIG. 2, the heat exchangers 22 and 32 have a structure (shell-and-coil structure) in which a metal coil tube 42 is housed in a bottomed container 41 having an open top. A lid 43 through which the inlet pipe 42 a and the outlet pipe 42 b of the coil pipe 42 are inserted is detachably attached to the upper opening of the container 41. Further, a hot water inlet 44 is provided on one of the opposing side walls of the container 41, and a hot water outlet 45 is provided on the other side wall, and the hot water inlet 44 is provided in the container 41 inside the container 41. A plurality of baffle plates (baffle plates) 46 for efficiently bringing the inflowing hot water into contact with the coil tube 42 are provided so as not to interfere with the coil tube 42. The hot water flowing into the container 41 from the hot water inlet 44 flows while meandering in the container 41 by the action of the baffle plate 46, thereby uniformly contacting the outer surface of the coiled tube 42, and passing through the tube wall of the coiled tube 42. After the gas is heated by exchanging heat with the gas flowing inside the pipe 42, the gas is led out from the hot water outlet 45.
　図３に示すように、前記圧力調整器２１、３１には、中央のガス流路５１，５２の周囲を囲むようにして温水流路５３が設けられた保温機能付きのものが用いられている。該温水流路５３の一端には温水導入口５４が、他端には温水導出口５５がそれぞれ設けられており、温水導入口５４から温水流路５３に流入した温水は、ガス流路５１の周囲に形成された入口側環状流路５３ａを通り、該入口側環状流路５３ａから弁箱部分の周囲に設けられた弁箱外周流路５３ｂを通って出口側環状流路５３ｃに流入し、これらの各流路を流れる際に圧力調整器２１、３１を加温した後、温水導出口５５から導出される。 As shown in FIG. 3, the pressure regulators 21 and 31 are those having a heat retention function in which a hot water channel 53 is provided so as to surround the central gas channels 51 and 52. A hot water inlet 54 is provided at one end of the hot water passage 53 and a hot water outlet 55 is provided at the other end. The hot water flowing into the hot water passage 53 from the hot water inlet 54 is supplied to the gas passage 51. It passes through the inlet-side annular flow path 53a formed in the periphery, flows into the outlet-side annular flow path 53c from the inlet-side annular flow path 53a, through the valve box outer peripheral flow path 53b provided around the valve box part, When the pressure regulators 21 and 31 are heated when flowing through each of these flow paths, they are led out from the hot water outlet 55.
　温水循環ユニット１５は、任意の熱エネルギーを用いてあらかじめ設定された温度の温水を生成する温水生成器１７と、該温水生成器１７と前記装置本体部１６内の加温対象とを接続する温水供給管１８及び温水戻り管１９とを備えている。温水生成器１７は、例えば電気ヒーターによって３０～４０℃の温度に加温した温水を生成してポンプで供給するものであって、温水生成器１７で生成した温水は、温水供給管１８を通って熱交換器２２，３２や圧力調整器２１、３１にそれぞれ対応する導入側分岐管１８ａに別れ、熱交換器２２，３２や圧力調整器２１、３１から導出された温水は、各導出側分岐管１９ａから温水戻り管１９に合流して温水生成器１７に循環して再利用されるように形成されている。 The hot water circulation unit 15 is a hot water generator 17 that generates hot water having a preset temperature using arbitrary thermal energy, and hot water that connects the hot water generator 17 and a heating target in the apparatus main body 16. A supply pipe 18 and a hot water return pipe 19 are provided. The hot water generator 17 generates hot water heated to a temperature of 30 to 40 ° C. by an electric heater, for example, and supplies it with a pump. The hot water generated by the hot water generator 17 passes through the hot water supply pipe 18. The hot water derived from the heat exchangers 22 and 32 and the pressure regulators 21 and 31 is separated from the introduction side branch pipes 18a corresponding to the heat exchangers 22 and 32 and the pressure regulators 21 and 31, respectively. The pipe 19a is joined to the hot water return pipe 19 and is circulated to the hot water generator 17 to be reused.
　温水生成器１７から供給する温水の温度は、供給するガス流量や熱交換器２２，３２の熱交換効率、圧力調整器２１、３１における加温効率などの条件によって任意に設定することが可能であるが、漏洩時の安全性を考慮すると、４０℃以下に設定することが好ましく、ガスの加温効果を考慮すると、３０℃以上、特に３５℃以上が最適である。温水流量も、熱交換器２２，３２におけるガス流量や熱交換効率などに応じて適宜設定することが可能であるが、例えば、熱交換器２２，３２において、コイル管４２内のガスと向流方向の流れで熱交換を行うことによって温度が低下した温水の温度、すなわち、温水導出口４５における温水温度が、温水導入口４４における温水温度に対して－５℃未満、好ましくは－２℃未満となるように設定することが好ましい。 The temperature of the hot water supplied from the hot water generator 17 can be arbitrarily set according to conditions such as the supplied gas flow rate, the heat exchange efficiency of the heat exchangers 22 and 32, and the heating efficiency of the pressure regulators 21 and 31. However, in consideration of safety at the time of leakage, it is preferable to set the temperature to 40 ° C. or less, and considering the gas heating effect, 30 ° C. or more, particularly 35 ° C. or more is optimal. The hot water flow rate can also be set as appropriate according to the gas flow rate and heat exchange efficiency in the heat exchangers 22 and 32. For example, in the heat exchangers 22 and 32, the gas in the coil tube 42 and the countercurrent flow are counteracted. The temperature of the hot water whose temperature has decreased due to heat exchange in the direction of flow, that is, the temperature of the warm water at the warm water outlet 45 is less than −5 ° C., preferably less than −2 ° C. with respect to the warm water temperature at the warm water inlet 44 It is preferable to set so that.
　一方、コイル管４２には、供給先が要望するガス流量と、該コイル管４２を通るガス圧力とに応じた径や肉厚のパイプが用いられる。このコイル管４２の長さは、コイル管４２を長くすることによって熱交換後のガス温度を温水温度に近付けることはできるが、使用するパイプのコスト上昇に見合う十分な効果を期待できないため、温水との熱交換により加温されたガス温度が、温水温度に対して－５℃未満、好ましくは－３℃未満になるように設定することが好ましい。 On the other hand, for the coil tube 42, a pipe having a diameter and a thickness corresponding to the gas flow rate desired by the supply destination and the gas pressure passing through the coil tube 42 is used. Although the length of the coil tube 42 can make the gas temperature after heat exchange close to the hot water temperature by making the coil tube 42 longer, a sufficient effect commensurate with the cost increase of the pipe to be used cannot be expected. The temperature of the gas heated by heat exchange with the hot water is preferably set to be lower than −5 ° C., preferably lower than −3 ° C. with respect to the hot water temperature.
　このとき、コイル管４２内を流れるガスと、コイル管４２の周囲を流れる温水とは、コイル管４２の管壁を介して熱交換を行い、ガス配管の周囲に温水配管を巻回する従来の場合のように、２本のパイプの管外面同士が線接触したり、管同士の間に空気層が介在したりすることがないので、コイル管４２の内外の各表面積、管壁の厚さ、内外の温度差、比熱などの各種条件を設定することにより、熱交換後のガス温度などを計算によって容易に求めることができる。したがって、従来のようにガス温度を十分に上昇させることができなくなったり、ガス温度が不安定になったりすることがなく、下流側の圧力調整器２１、３１に流入するガスを所定温度に確実に加温することができる。 At this time, the gas flowing in the coil tube 42 and the hot water flowing around the coil tube 42 exchange heat through the tube wall of the coil tube 42 and wind the hot water tube around the gas pipe. As in the case, the pipe outer surfaces of the two pipes are not in line contact with each other, and an air layer is not interposed between the pipes. By setting various conditions such as the temperature difference between the inside and outside and specific heat, the gas temperature after heat exchange can be easily obtained by calculation. Therefore, the gas temperature cannot be raised sufficiently unlike the conventional case, or the gas temperature does not become unstable, and the gas flowing into the pressure regulators 21 and 31 on the downstream side can be reliably kept at a predetermined temperature. Can be warmed.
　また、圧力調整器２１、３１では、減圧後のガス温度と温水の加温効果とを考慮して各圧力調整器２１、３１における減圧度をそれぞれ設定することが好ましく、熱交換器２２，３２に供給する温水温度で、圧力調整器２１、３１の外面に結露が生じない程度に圧力調整器２１、３１の外面を加温できれるように温水流量や温水流路５３の構造、形状を設定すればよい。 Moreover, in the pressure regulators 21 and 31, it is preferable to set the decompression degree in each pressure regulator 21 and 31 in consideration of the gas temperature after depressurization and the warming effect of the hot water. The hot water flow rate and the structure and shape of the hot water flow channel 53 are set so that the outer surface of the pressure regulators 21 and 31 can be heated to such an extent that dew condensation does not occur on the outer surfaces of the pressure regulators 21 and 31 do it.
　さらに、前記温水温度や前記温水循環ユニット１５の温水供給能力、熱交換器２２，３２の熱交換能力、圧力調整器２１、３１の加温能力は、一般的に、供給するガスの最大流量に対応させて設定することになるが、最大流量の継続時間が短時間で、そのときの圧力調整器２１、３１への結露量が無視できる程度ならば、最大流量より少ないガス流量に対応させて各能力を設定することができる。 Furthermore, the hot water temperature, the hot water supply capacity of the hot water circulation unit 15, the heat exchange capacity of the heat exchangers 22 and 32, and the heating capacity of the pressure regulators 21 and 31 are generally set to the maximum flow rate of the supplied gas. If the duration of the maximum flow rate is short and the amount of dew condensation on the pressure regulators 21 and 31 is negligible at that time, the gas flow rate is set lower than the maximum flow rate. Each ability can be set.
　本形態例に示すように、圧縮ガスの減圧を複数段階で行うことにより、各減圧段階における減圧度を小さくすることができるとともに、減圧手段（圧力調整器２１、３１）に導入する圧縮ガスを高温に加熱する必要がなくなり、４０℃以下の温水を用いた熱交換器２２，３２でガスを加温することで減圧手段でのガスの液化や減圧手段外面への結露を防止することができる。特に、温水によるガスの加温を熱交換器で行うことにより、ガスを所定温度に効率よく加温することができ、４０℃以下の温水を用いることにより、電気ヒーターで配管などを加熱する場合に比べて安全性を確保することができる。また、圧縮ガスが流れる配管系を備えた装置本体部１６と、温水を生成する温水生成器１７とを隔壁などを介して隔離した状態で設置することにより、温水生成器１７の加熱源に電気ヒータを用いても、圧縮ガスと電気ヒーターとが隔離されているため、安全性を大幅に向上させることができる。また、温水を用いることによって、熱水やスチームを用いた場合に比べて加温に要するエネルギーの低減が図れ、配管系からの熱ロスも少なくなり、万一、温水が漏洩しても火傷などの危険はない。 As shown in this embodiment, by performing the decompression of the compressed gas in a plurality of stages, the degree of decompression in each decompression stage can be reduced, and the compressed gas introduced into the decompression means (pressure regulators 21, 31) can be reduced. There is no need to heat to a high temperature, and by heating the gas with the heat exchangers 22 and 32 using hot water of 40 ° C. or less, liquefaction of the gas in the decompression means and condensation on the outer surface of the decompression means can be prevented. . In particular, by heating the gas with hot water using a heat exchanger, the gas can be efficiently heated to a predetermined temperature. When using hot water of 40 ° C. or less, piping or the like is heated with an electric heater Safety can be ensured compared to In addition, the apparatus main body 16 having a piping system through which the compressed gas flows and the hot water generator 17 for generating hot water are installed in a state of being separated by a partition wall or the like, so that the heating source of the hot water generator 17 is electrically Even if a heater is used, since the compressed gas and the electric heater are isolated, safety can be greatly improved. Also, by using hot water, the energy required for heating can be reduced compared to when hot water or steam is used, heat loss from the piping system is reduced, and even if hot water leaks, burns etc. There is no danger.
　なお、減圧後の低圧ガスを供給先に連続供給する場合には、前記装置本体部１６と温水循環ユニット１５とを備えたガス供給装置を複数設置してもよいが、一つの温水循環ユニット１５を複数の装置本体部１６に対応させることもできる。また、断熱膨張によるガス温度の低下が比較的小さく、減圧度が小さな圧縮ガスを減圧して供給する場合には、減圧手段及び熱交換器を一つずつだけ設けるようにすることができる。 When continuously supplying low-pressure gas after decompression to the supply destination, a plurality of gas supply devices including the apparatus main body 16 and the hot water circulation unit 15 may be installed, but one hot water circulation unit 15 is provided. Can be made to correspond to a plurality of apparatus main body portions 16. In addition, when the compressed gas having a relatively small gas temperature drop due to adiabatic expansion and a low degree of decompression is supplied under reduced pressure, only one decompression means and one heat exchanger can be provided.
　１１…高圧ガス容器、１２…高圧弁、１３…圧力検出器、１４…低圧弁、１５…温水循環ユニット、１６…装置本体部、１７…温水生成器、１８…温水供給管、１８ａ…導入側分岐管、１９…温水戻り管、１９ａ…導出側分岐管、２１、３１…圧力調整器、２２，３２…熱交換器、２３，３３…遮断弁、２４，３４…圧力検出器、４１…容器、４２…コイル管、４２ａ…入口管、４２ｂ…出口管、４３…蓋体、４４…温水導入口、４５…温水導出口、４６…邪魔板、５１，５２…ガス流路、５３…温水流路、５３ａ…入口側環状流路、５３ｂ…弁箱外周流路、５３ｃ…出口側環状流路、５４…温水導入口、５５…温水導出口 DESCRIPTION OF SYMBOLS 11 ... High pressure gas container, 12 ... High pressure valve, 13 ... Pressure detector, 14 ... Low pressure valve, 15 ... Hot water circulation unit, 16 ... Apparatus main-body part, 17 ... Hot water generator, 18 ... Hot water supply pipe, 18a ... Introduction side Branch pipe, 19 ... warm water return pipe, 19a ... outlet branch pipe, 21, 31 ... pressure regulator, 22, 32 ... heat exchanger, 23, 33 ... shut-off valve, 24, 34 ... pressure detector, 41 ... container 42 ... Coil tube, 42a ... Inlet tube, 42b ... Outlet tube, 43 ... Lid, 44 ... Hot water inlet, 45 ... Hot water outlet, 46 ... Baffle plate, 51, 52 ... Gas flow path, 53 ... Hot water flow , 53a ... inlet side annular flow path, 53b ... valve box outer periphery flow path, 53c ... outlet side annular flow path, 54 ... warm water inlet, 55 ... warm water outlet

Claims (4)

  1. 　圧縮ガス供給源から供給されるガスを減圧手段で減圧して供給するガス供給装置であって、前記減圧手段のガス流れ方向上流側に、該減圧手段に導入されるガスと温水供給源から供給される温水とを熱交換させて前記ガスを加温する熱交換器を設けるとともに、前記減圧手段に、前記温水の一部によって該減圧手段を加温するための温水流路を設けたガス供給装置。 A gas supply device for supplying a gas supplied from a compressed gas supply source by reducing the pressure with a decompression unit, and supplying the gas introduced into the decompression unit and a hot water supply source upstream of the decompression unit in the gas flow direction. A gas supply is provided in which a heat exchanger is provided for heat exchange with the hot water to be heated and the gas is heated, and a hot water flow path is provided in the pressure reducing means for heating the pressure reducing means by a part of the hot water apparatus.
  2. 　前記温水を３０～４０℃の温度に加温して前記熱交換器及び前記減圧手段の温水流路に供給する温水循環手段を備えている請求項１記載のガス供給装置。 2. The gas supply device according to claim 1, further comprising hot water circulation means for heating the hot water to a temperature of 30 to 40 ° C. and supplying the hot water to the hot water flow path of the heat exchanger and the pressure reducing means.
  3. 　前記減圧手段が直列又は並列に複数配置され、各減圧手段のガス流れ方向上流側に前記熱交換器がそれぞれ配置されている請求項１又は２記載のガス供給装置。 The gas supply device according to claim 1 or 2, wherein a plurality of the decompression means are arranged in series or in parallel, and the heat exchanger is arranged upstream of each decompression means in the gas flow direction.
  4. 　前記ガスがモノシラン又は三フッ化窒素である請求項１乃至３のいずれか１項記載のガス供給装置。 The gas supply device according to any one of claims 1 to 3, wherein the gas is monosilane or nitrogen trifluoride.
PCT/JP2010/070525 2009-12-03 2010-11-18 Gas supply device WO2011068035A1 (en)

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JP5462607B2 (en) 2014-04-02
EP2508786A1 (en) 2012-10-10
KR20120101489A (en) 2012-09-13
TWI503501B (en) 2015-10-11
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EP2508786B1 (en) 2017-06-14
JP2011117536A (en) 2011-06-16

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