KR20120101489A - Gas supply device - Google Patents

Gas supply device Download PDF

Info

Publication number
KR20120101489A
KR20120101489A KR1020127017182A KR20127017182A KR20120101489A KR 20120101489 A KR20120101489 A KR 20120101489A KR 1020127017182 A KR1020127017182 A KR 1020127017182A KR 20127017182 A KR20127017182 A KR 20127017182A KR 20120101489 A KR20120101489 A KR 20120101489A
Authority
KR
South Korea
Prior art keywords
gas
hot water
pressure
gas supply
supply device
Prior art date
Application number
KR1020127017182A
Other languages
Korean (ko)
Other versions
KR101755744B1 (en
Inventor
다카시 요네다
다카시 요시다
Original Assignee
다이요 닛산 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이요 닛산 가부시키가이샤 filed Critical 다이요 닛산 가부시키가이샤
Publication of KR20120101489A publication Critical patent/KR20120101489A/en
Application granted granted Critical
Publication of KR101755744B1 publication Critical patent/KR101755744B1/en

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/0206—Heat exchangers immersed in a large body of liquid
    • F28D1/0213—Heat exchangers immersed in a large body of liquid for heating or cooling a liquid in a tank
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/035—High pressure (>10 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F17C2227/0316—Water heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F17C2227/0323—Heat exchange with the fluid by heating using another fluid in a closed loop
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0388—Localisation of heat exchange separate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/042—Reducing risk of explosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
    • F28F2009/222—Particular guide plates, baffles or deflectors, e.g. having particular orientation relative to an elongated casing or conduit
    • F28F2009/226—Transversal partitions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Pipeline Systems (AREA)

Abstract

압축가스를 안정된 상태로 감압하여 공급할 수 있고, 경제성이나 안전성에도 뛰어난 가스 공급장치로서, 압축가스 공급원(고압가스 용기(11))으로부터 공급되는 가스를 감압수단(압력 조정기(21,31))으로 감압하여 공급하는 가스 공급장치에 있어서, 상기 감압수단의 가스 흐름방향 상류측에, 상기 감압수단에 도입되는 가스와 온수 공급원(온수순환 유닛(15))으로부터 공급되는 온수를 열교환시켜 상기 가스를 가온하는 열교환기(22,32)를 설치하는 동시에, 상기 감압수단에, 상기 온수의 일부에 의해서 상기 감압수단을 가온하기 위한 온수 유로(53)를 마련한다.As a gas supply device capable of supplying compressed gas under reduced pressure in a stable state and excellent in economy and safety, the gas supplied from the compressed gas supply source (high pressure gas container 11) is supplied to the decompression means (pressure regulators 21 and 31). In the gas supply device for supplying the reduced pressure, the gas introduced in the gas flow direction upstream side of the pressure reducing means heats the gas introduced into the pressure reducing means and the hot water supplied from the hot water supply source (hot water circulation unit 15) to heat the gas. The heat exchangers 22 and 32 are provided, and a hot water flow passage 53 for heating the pressure reducing means by a part of the hot water is provided in the pressure reducing means.

Figure P1020127017182
Figure P1020127017182

Description

가스 공급장치{GAS SUPPLY DEVICE}Gas supply device {GAS SUPPLY DEVICE}

본 발명은, 가스 공급장치에 관한 것으로, 자세하게는, 압축가스를 감압하여 공급하는 가스 공급장치에 관한 것이다. The present invention relates to a gas supply device, and more particularly, to a gas supply device for supplying a compressed gas under reduced pressure.

47리터의 용기나 대형 용기로부터의 압축가스를 공급할 때에는, 압력 조정 설비, 감압 밸브, 컨트롤 밸브 등의 감압수단에 의해서 지정된 압력으로 감압하여 공급하도록 하고 있다. 이 때, 감압수단으로 감압된 가스는, 단열 팽창 및 줄 톰슨 효과에 의해서 가스온도가 저하하기 때문에, 감압수단의 외면에 의한 결로나 결상(frost formation)이 발생하여 가스 압력의 조정이 곤란하게 되거나 하는 경우가 있다. 이 때문에, 감압수단의 상류측 배관(1차측 배관)을 가열하거나, 감압수단을 가열하거나 함으로써, 감압 후의 가스온도의 저하를 억제하는 것이 행하여지고 있다(예를 들면, 특허문헌 1?3 참조.).When supplying the compressed gas from a 47-liter container or a large container, it supplies pressure by depressurizing to the pressure specified by pressure-reducing means, such as a pressure regulator, a pressure reduction valve, and a control valve. At this time, the gas depressurized by the decompression means decreases the gas temperature due to the adiabatic expansion and Joule Thompson effect, so that condensation or frost formation occurs due to the outer surface of the decompression means, making it difficult to adjust the gas pressure. There is a case. For this reason, suppressing the fall of the gas temperature after pressure reduction is performed by heating the upstream piping (primary-side piping) of a pressure reduction means, or heating a pressure reduction means (for example, refer patent documents 1-3). ).

: 일본 공개특허공보 2006-283812호Japanese Unexamined Patent Publication No. 2006-283812 : 일본특허공보 제3592446호Japanese Patent Publication No. 3592446 : 일본 특허공고공보 평성6-33858호Japanese Patent Publication No. 6-33858

그러나, 가연성 가스를 공급하는 장치의 배관이나 감압수단을 가열하기 위한 가열원으로서 전기히터를 이용하는 것은, 만일 가스 누출이 발생했을 때에 발화의 위험성이 있기 때문에 바람직한 것은 아니다. 또한, 가열용의 유체가 흐르는 가열용 배관을 가스 배관의 주위에 감아 돌린 것에서는, 가스 배관내의 가스를 충분히 승온(昇溫)시키기 위해서는 열전달면적을 극히 크게 하거나, 가열용 배관내를 흐르는 유체 온도를 고온으로 할 필요가 있어, 설비비용이나 운전비용의 상승을 초래해 버린다. However, it is not preferable to use an electric heater as a heating source for heating pipes or decompression means of a device for supplying flammable gas because there is a risk of ignition when a gas leak occurs. In the case where the heating pipe in which the heating fluid flows is wound around the gas pipe, in order to sufficiently raise the temperature of the gas in the gas pipe, the heat transfer area is made extremely large or the fluid temperature flowing in the heating pipe is increased. It is necessary to make it high temperature, and it raises an installation cost and an operation cost.

한편, 모노실란(SiH4)이나 3불화 질소(NF3)는, 임계 압력이 충전압력에 매우 가깝고, 임계 온도도 비교적 실온에 가깝기 때문에, 임계점 근방에서 충전된 상태로부터의 공급이 된다. 그리고, 표준 비점이 높기 때문에, 단열 팽창에 의한 가스온도의 저하가 크고, 가스가 액화하기 쉽고, 감압수단에의 결로나 결상도 많아지기 쉽다. 게다가, 모노실란은 가연성(可燃性), 자연성(自燃性)을 가지고, 3불화 질소도 지연성(支燃性)을 가지고 있기 때문에, 전기히터의 사용은 피하는 것이 바람직하다. On the other hand, monosilane (SiH 4 ) and nitrogen trifluoride (NF 3 ) are supplied from the state charged near the critical point because the critical pressure is very close to the filling pressure and the critical temperature is relatively close to the room temperature. And since a standard boiling point is high, the fall of the gas temperature by adiabatic expansion is large, gas is easy to liquefy, and condensation and an image formation to a decompression means are also easy. In addition, since monosilane is combustible and natural, and nitrogen trifluoride also has a delay, it is preferable to avoid the use of an electric heater.

따라서 본 발명은, 압축가스를 안정된 상태로 감압하여 공급할 수 있고, 경제성이나 안전성에도 뛰어난 가스 공급장치를 제공하는 것을 목적으로 하고 있다. Accordingly, an object of the present invention is to provide a gas supply device capable of supplying compressed gas under reduced pressure in a stable state, and excellent in economy and safety.

상기 목적을 달성하기 위해, 본 발명의 가스 공급장치는, 압축가스 공급원으로부터 공급되는 가스를 감압수단으로 감압하여 공급하는 가스 공급장치에 있어서, 상기 감압수단의 가스 흐름방향 상류측에, 상기 감압수단에 도입되는 가스와 온수 공급원으로부터 공급되는 온수를 열교환시켜 상기 가스를 가온하는 열교환기를 설치하는 동시에, 상기 감압수단에, 상기 온수의 일부에 의해서 상기 감압수단을 가온하기 위한 온수 유로를 마련하였다. In order to achieve the above object, the gas supply device of the present invention is a gas supply device for supplying the gas supplied from the compressed gas supply source by reducing the pressure to the decompression means, the decompression means on the upstream side of the gas flow direction of the decompression means; A heat exchanger for heating the gas by heat-exchanging the gas introduced into the hot water supplied from the hot water supply source was provided, and a hot water flow passage for heating the pressure-reducing means by a part of the hot water was provided in the pressure-reducing means.

게다가, 본 발명의 가스 공급장치는, 상기 온수를 30?40℃의 온도로 가온하여 상기 열교환기 및 상기 감압수단의 온수 유로에 공급하는 온수순환수단을 구비하고 있다. 또한, 상기 감압수단이 직렬 또는 병렬로 복수 배치되고, 각 감압수단의 가스 흐름방향 상류측에 상기 열교환기가 각각 배치되어 있다. 게다가, 상기 가스가 모노실란 또는 3불화 질소이다. Furthermore, the gas supply apparatus of this invention is equipped with the warm water circulation means which warms the said hot water to the temperature of 30-40 degreeC, and supplies it to the hot water flow path of the said heat exchanger and the said decompression means. In addition, a plurality of the decompression means are arranged in series or in parallel, and the heat exchangers are arranged on the upstream side of the gas flow direction of each decompression means. In addition, the gas is monosilane or nitrogen trifluoride.

본 발명의 가스 공급장치에 의하면, 온수를 가열원으로 하는 열교환기로 가스를 가온하므로, 배관내를 흐르는 가스를 효율적으로 확실히 가온할 수 있고, 감압수단도 온수에 의해서 가온함으로써 감압 후의 가스가 액화되는 것을 확실히 방지할 수 있다. 또한, 가열원을 온수로 하는 것에 의해, 전기히터에 비해 안전성을 높일 수 있다. 게다가, 온수온도를 40℃ 이하로 함으로써, 가스온도가 지나치게 높아지는 일이 없이, 가온에 필요로 하는 에너지도 줄일 수 있다. 또한, 감압수단을 직렬 또는 병렬로 복수 설치하는 것에 의해, 각 감압수단에 있어서의 감압도를 최적으로 설정할 수 있으므로, 감압수단이나 배관계에 결로나 결상을 발생시키지 않고, 보다 효율적으로 감압 가스를 공급할 수 있고, 특히, 모노실란이나 3불화 질소와 같은 가스도 안전하게 안정된 상태로 공급할 수 있다. According to the gas supply device of the present invention, since the gas is heated by a heat exchanger using hot water as a heating source, the gas flowing in the pipe can be reliably and efficiently heated, and the decompression means is also heated by the hot water to liquefy the gas after depressurization. It can certainly prevent things. In addition, by using the heating source as hot water, safety can be improved as compared with an electric heater. In addition, by setting the hot water temperature to 40 ° C. or less, the energy required for heating can be reduced without excessively increasing the gas temperature. In addition, by providing a plurality of decompression means in series or in parallel, the decompression degree in each decompression means can be optimally set, so that decompression gas and condensation can be efficiently supplied to the decompression means and piping system, and the decompression gas can be supplied more efficiently. In particular, a gas such as monosilane or nitrogen trifluoride can be safely supplied in a stable state.

도 1은 본 발명의 가스 공급장치의 한 형태예를 나타내는 계통도이다.
도 2는 본 발명의 가스 공급장치에서 사용하는 열교환기의 일례를 나타내는 단면도이다.
도 3은 본 발명의 가스 공급장치에서 사용하는 압력 조정기의 일례를 나타내는 단면도이다.1 is a system diagram showing an embodiment of a gas supply device of the present invention.
2 is a cross-sectional view showing an example of a heat exchanger used in the gas supply device of the present invention.
3 is a cross-sectional view showing an example of a pressure regulator used in the gas supply device of the present invention.

본 형태예에 나타내는 가스 공급장치는, 소정의 고압 상태로 압축가스를 충전한 압축가스 공급원이 되는 고압가스 용기(11)로부터 공급하는 가스의 압력을 저하시키기 위한 감압수단으로서 2개의 압력 조정기(21,31)를 직렬로 설치한 것으로, 가스 흐름방향 상류측의 제 1 압력 조정기(21)에서 고압의 가스를 미리 설정한 감압도(減壓度)로 감압하여 중압의 가스로 하고, 하류측의 제 2 압력 조정기(31)에서 중압의 가스를 미리 설정한 감압도로 감압하는 것에 의해, 공급처의 요망에 따른 압력의 저압가스를 공급하도록 형성되고 있다. 예를 들면, 충전압력이 9MPa(절대압, 이하 같다)의 압축가스를 대기압 근처까지 감압하여 공급하는 경우, 제 1 압력 조정기(21)에서 4MPa 정도의 중압으로 감압한 후, 제 2 압력 조정기(31)에서 4MPa로부터 대기압에 가까운 공급압력으로 감압하여 공급한다. The gas supply apparatus shown in this embodiment has two pressure regulators 21 as pressure reducing means for reducing the pressure of the gas supplied from the high pressure gas container 11 which becomes the compressed gas supply source which filled the compressed gas in the predetermined high pressure state. And 31 in series, the first pressure regulator 21 on the upstream side of the gas flow direction is used to reduce the high pressure gas to a predetermined pressure level to form a medium pressure gas. The second pressure regulator 31 is configured to supply the low pressure gas of the pressure in accordance with the request of the supplier by reducing the gas of the medium pressure to a predetermined reduced pressure. For example, in the case of supplying a compressed gas of 9 MPa (absolute pressure or less) under reduced pressure to near atmospheric pressure, the first pressure regulator 21 reduces the pressure to about 4 MPa and then the second pressure regulator 31. ), The pressure is reduced from 4 MPa to a supply pressure close to atmospheric pressure.

가스 공급장치와 고압가스 용기(11)와의 사이에는, 고압밸브(12)와 압력 검출기(13)가 설치되고, 가스 공급장치와 공급처와의 사이에는 저압밸브(14)가 설치되어 있다. 그리고, 각 압력 조정기(21,31)의 가스 흐름방향 상류측(1차측)에는, 열교환기(22,32)와 차단밸브(23,33)가 설치되고, 각 압력 조정기(21,31)의 가스 흐름방향 하류측(2차측)에는, 압력 검출기(24,34)가 각각 설치되어 있다. 또한, 본 형태예에 나타내는 가스 공급장치에는, 상기 압력 조정기(21,31) 및 상기 열교환기(22,32)에 가온용의 온수를 각각 순환 공급하기 위한 온수순환 유닛(15)이, 상기 압력 조정기(21,31)나 열교환기(22,32) 등을 배치한 장치 본체부(16)와는 격리된 상태로 설치되어 있다. The high pressure valve 12 and the pressure detector 13 are provided between the gas supply device and the high pressure gas container 11, and the low pressure valve 14 is provided between the gas supply device and the supply destination. And heat exchangers 22 and 32 and the shutoff valves 23 and 33 are provided in the gas flow direction upstream (primary side) of each pressure regulator 21 and 31, and each of the pressure regulators 21 and 31 is provided. On the downstream side of the gas flow direction (secondary side), pressure detectors 24 and 34 are provided, respectively. Further, in the gas supply device shown in the embodiment, the hot water circulation unit 15 for circulating and supplying hot water for heating to the pressure regulators 21 and 31 and the heat exchangers 22 and 32 is the pressure. The apparatus main body 16 in which the regulators 21 and 31, the heat exchangers 22 and 32, etc. are arrange | positioned is installed in isolation | separation state.

도 2에 도시하는 바와 같이, 상기 열교환기(22,32)에는, 상방이 개구한 유저의 용기(41)내에 금속제의 코일관(42)을 수납한 구조(쉘 앤드 코일 구조)의 것이 이용되고, 용기(41)의 상부 개구에는, 코일관(42)의 입구관(42a)과 출구관(42b)을 삽입통과한 덮개(43)가 탈착 가능하게 부착되어 있다. 또한, 용기(41)가 대향하는 측벽의 한쪽에는 온수 도입구(44)가 설치되고, 다른쪽의 측벽에는 온수 도출구(45)가 설치되는 동시에, 용기(41)의 내부에는, 온수 도입구(44)로부터 용기(41)내에 유입된 온수를 코일관(42)과 효율적으로 접촉시키기 위한 복수의 방해판(배플판, baffle board)(46)이 코일관(42)에 간섭하지 않도록 하여 설치되어 있다. 온수 도입구(44)로부터 용기(41)내에 유입된 온수는, 방해판(46)의 작용으로 용기(41)내를 구불거리면서 흐르는 것에 의해서 코일관(42)의 외면에 골고루 접촉하여, 코일관(42)의 관벽을 사이에 두고 코일관(42)의 내부를 흐르는 가스와 열교환하는 것에 의해 가스를 가온한 후, 온수 도출구(45)로부터 도출된다. As shown in FIG. 2, the heat exchangers 22 and 32 have a structure (shell-and-coil structure) in which a metal coil pipe 42 is housed in a container 41 of a user whose upper side is opened. In the upper opening of the container 41, a lid 43 through which the inlet pipe 42a and the outlet pipe 42b of the coil pipe 42 is inserted is detachably attached. Moreover, the hot water inlet 44 is provided in one side of the side wall which the container 41 opposes, and the hot water outlet 45 is provided in the other side wall, and the hot water inlet is provided in the inside of the container 41. A plurality of baffle boards 46 for efficiently contacting the hot water introduced into the container 41 from the 44 with the coil pipe 42 do not interfere with the coil pipe 42. It is. The hot water introduced into the container 41 from the hot water inlet 44 flows while beating the inside of the container 41 by the action of the baffle plate 46, thereby evenly contacting the outer surface of the coil pipe 42. After the gas is warmed by heat exchange with a gas flowing through the inside of the coil pipe 42 with the pipe wall of the coherent 42 interposed therebetween, it is led out of the hot water outlet 45.

도 3에 도시하는 바와 같이, 상기 압력 조정기(21,31)에는, 중앙의 가스 유로(51,52)의 주위를 둘러싸도록 하여 온수 유로(53)가 마련된 보온기능이 부착된 것이 이용되고 있다. 상기 온수 유로(53)의 일단에는 온수 도입구(54)가, 타단에는 온수 도출구(55)가 각각 설치되어 있고, 온수 도입구(54)로부터 온수 유로(53)에 유입된 온수는, 가스 유로(51)의 주위에 형성된 입구측 고리 형상 유로(53a)를 통과하여, 상기 입구측 고리 형상 유로(53a)로부터 밸브상자부분의 주위에 마련된 밸브상자 외주 유로 (53b)를 통과하여, 출구측 고리 형상 유로(53c)에 유입되어, 이들의 각 유로를 흐를 때에 압력 조정기(21,31)를 가온한 후, 온수 도출구(55)로부터 도출된다. As shown in FIG. 3, the pressure regulators 21 and 31 are provided with a heat retention function provided with a hot water flow passage 53 so as to surround the center gas flow passages 51 and 52. The hot water inlet 54 is provided at one end of the hot water flow passage 53, and the hot water inlet 55 is provided at the other end, and the hot water introduced into the hot water flow passage 53 from the hot water inlet 54 is gas. Passes through the inlet side annular flow passage 53a formed around the flow passage 51, passes through the valve box outer periphery flow passage 53b provided around the valve box portion from the inlet side annular flow passage 53a, and exits the outlet side. It flows into the annular flow path 53c, and when it flows through each of these flow paths, the pressure regulators 21 and 31 are heated, and are led out from the hot water discharge port 55.

온수순환 유닛(15)은, 임의의 열에너지를 이용하여 미리 설정된 온도의 온수를 생성하는 온수 생성기(17)와, 상기 온수 생성기(17)와 상기 장치 본체부(16)내의 가온 대상을 접속하는 온수 공급관(18) 및 온수 복귀관(19)을 구비하고 있다. 온수 생성기(17)는, 예를 들면 전기히터에 의해서 30?40℃의 온도로 가온한 온수를 생성하여 펌프로 공급하는 것으로서, 온수 생성기(17)에서 생성한 온수는, 온수 공급관(18)을 통과하여 열교환기(22,32)나 압력 조정기(21,31)에 각각 대응하는 도입측 분기관(18a)으로 나뉘어, 열교환기(22,32)나 압력 조정기(21,31)로부터 도출된 온수는, 각 도출측 분기관(19a)으로부터 온수 복귀관(19)에 합류하여 온수 생성기(17)에 순환하여 재이용되도록 형성되어 있다. The hot water circulation unit 15 is a hot water generator 17 for generating hot water at a predetermined temperature using any heat energy, and hot water for connecting the hot water generator 17 and a heating target in the apparatus main body 16. A supply pipe 18 and a hot water return pipe 19 are provided. The hot water generator 17 generates hot water heated at a temperature of 30 to 40 ° C. by an electric heater, and supplies the hot water generator 17 to the pump. The hot water generated by the hot water generator 17 is a hot water supply pipe 18. It is divided into the inlet side branch pipe (18a) corresponding to the heat exchanger (22, 32) and the pressure regulator (21, 31), respectively, and the hot water derived from the heat exchanger (22,32) or the pressure regulator (21,31). Is formed to join the hot water return pipe 19 from each of the outlet side branch pipes 19a, circulate through the hot water generator 17, and reuse it.

온수 생성기(17)로부터 공급되는 온수의 온도는, 공급하는 가스 유량이나 열교환기(22,32)의 열교환 효율, 압력 조정기(21,31)에 있어서의 가온 효율 등의 조건에 따라서 임의로 설정하는 것이 가능하지만, 누설시의 안전성을 고려하면, 40℃ 이하로 설정하는 것이 바람직하고, 가스의 가온 효과를 고려하면, 30℃ 이상, 특히 35℃ 이상이 최적이다. 온수 유량도, 열교환기(22,32)에 있어서의 가스 유량이나 열교환 효율 등에 따라서 적절히 설정하는 것이 가능하지만, 예를 들면, 열교환기(22,32)에 있어서, 코일관(42)내의 가스와 향류(向流, counterflow)방향의 흐름으로 열교환을 행하는 것에 의해서 온도가 저하한 온수의 온도, 즉, 온수 도출구(45)에 있어서의 온수온도가, 온수 도입구(44)에 있어서의 온수온도에 대해서 -5℃ 미만, 바람직하게는 -2℃ 미만이 되도록 설정하는 것이 바람직하다. The temperature of the hot water supplied from the hot water generator 17 may be arbitrarily set according to the conditions such as the gas flow rate to be supplied, the heat exchange efficiency of the heat exchangers 22 and 32, and the heating efficiency of the pressure regulators 21 and 31. Although it is possible, it is preferable to set it at 40 degrees C or less in consideration of the safety at the time of leak, and when it considers the heating effect of gas, 30 degreeC or more, especially 35 degreeC or more are optimal. The hot water flow rate can also be appropriately set in accordance with the gas flow rate and heat exchange efficiency in the heat exchangers 22 and 32, but for example, in the heat exchangers 22 and 32, The temperature of the hot water whose temperature dropped by performing heat exchange in a counterflow direction flow, that is, the hot water temperature at the hot water outlet 45 is the hot water temperature at the hot water inlet 44. It is preferable to set so that it may be less than -5 ° C, preferably less than -2 ° C.

한편, 코일관(42)에는, 공급처가 요망하는 가스 유량과, 상기 코일관(42)을 통과하는 가스 압력에 따른 지름이나 두께의 파이프가 이용된다. 이 코일관(42)의 길이는, 코일관(42)을 길게 하는 것에 의해서 열교환 후의 가스온도를 온수온도에 가까이 할 수 있지만, 사용하는 파이프의 비용 상승에 걸맞는 충분한 효과를 기대할 수 없기 때문에, 온수와의 열교환에 의해 가온된 가스온도가, 온수온도에 대해서 -5℃ 미만, 바람직하게는 -3℃ 미만이 되도록 설정하는 것이 바람직하다. On the other hand, the coil pipe 42 uses a pipe having a diameter or a thickness corresponding to the gas flow rate desired by the supplier and the gas pressure passing through the coil pipe 42. Although the length of this coil pipe 42 can make the gas temperature after heat exchange near hot water temperature by lengthening the coil pipe 42, since the sufficient effect suitable for the cost rise of the pipe to be used cannot be expected, It is preferable to set so that the gas temperature heated by heat exchange with hot water may be less than -5 degreeC, preferably less than -3 degreeC with respect to warm water temperature.

이 때, 코일관(42)내를 흐르는 가스와, 코일관(42)의 주위를 흐르는 온수는, 코일관(42)의 관벽을 사이에 두고 열교환을 행하여, 가스 배관의 주위에 온수 배관을 감아 돌리는 종래의 경우와 같이, 2개의 파이프의 관외면끼리가 선접촉하거나 관 끼리의 사이에 공기층이 개재되거나 하는 일이 없기 때문에, 코일관(42)의 안팎의 각 표면적, 관벽의 두께, 안팎의 온도차, 비열(比熱) 등의 각종 조건을 설정하는 것에 의해, 열교환 후의 가스온도 등을 계산에 따라서 용이하게 구할 수 있다. 따라서, 종래와 같이 가스온도를 충분히 상승시킬 수 없게 되거나, 가스온도가 불안정하게 되거나 하는 일이 없어, 하류측의 압력 조정기(21,31)에 유입되는 가스를 소정 온도로 확실히 가온할 수 있다. At this time, the gas flowing in the coil pipe 42 and the hot water flowing around the coil pipe 42 exchange heat with the pipe wall of the coil pipe 42 interposed, and wind the hot water pipe around the gas pipe. As in the conventional case, since the outer surfaces of the two pipes are not in line contact with each other or the air layer is interposed between the pipes, each surface area of the coil pipe 42, the thickness of the pipe wall, the inside and the outside of the pipe By setting various conditions, such as a temperature difference and a specific heat | fever, the gas temperature etc. after heat exchange can be calculated | required easily according to calculation. Therefore, the gas temperature cannot be sufficiently raised or the gas temperature becomes unstable as in the prior art, and the gas flowing into the downstream pressure regulators 21 and 31 can be warmed to a predetermined temperature.

또한, 압력 조정기(21,31)에서는, 감압 후의 가스온도와 온수의 가온 효과를 고려하여 각 압력 조정기(21,31)에 있어서의 감압도를 각각 설정하는 것이 바람직하고, 열교환기(22,32)에 공급하는 온수온도로, 압력 조정기(21,31)의 외면에 결로가 생기지 않을 정도로 압력 조정기(21,31)의 외면을 가온할 수 있도록 온수 유량이나 온수 유로(53)의 구조, 형상을 설정하면 좋다. Moreover, in the pressure regulators 21 and 31, it is preferable to set the pressure reduction degree in each pressure regulator 21 and 31, respectively, considering the gas temperature after pressure reduction and the warming effect of hot water, and the heat exchangers 22 and 32, respectively. The hot water temperature to be supplied to the hot water flow rate, and the structure and shape of the hot water flow rate and the hot water flow path 53 so as to warm the outer surfaces of the pressure regulators 21 and 31 so that condensation does not occur on the outer surfaces of the pressure regulators 21 and 31. It is good to set.

게다가, 상기 온수온도나 상기 온수순환 유닛(15)의 온수 공급 능력, 열교환기(22,32)의 열교환 능력, 압력 조정기(21,31)의 가온 능력은, 일반적으로, 공급하는 가스의 최대유량에 대응시켜 설정하게 되지만, 최대유량의 계속시간이 단시간이고, 그 때의 압력 조정기(21,31)에의 결로량을 무시할 수 있는 정도라면, 최대유량보다 적은 가스유량에 대응시켜 각 능력을 설정할 수 있다. In addition, the hot water temperature, the hot water supply capacity of the hot water circulation unit 15, the heat exchange capacity of the heat exchangers 22 and 32, and the heating capacity of the pressure regulators 21 and 31 are generally the maximum flow rates of the gas to be supplied. If the duration of the maximum flow rate is short, and the amount of dew condensation on the pressure regulators 21 and 31 is negligible, the respective capacity can be set in response to the gas flow rate less than the maximum flow rate. have.

본 형태예에 나타내는 바와 같이, 압축가스의 감압을 복수 단계에서 행하는 것에 의해, 각 감압 단계에 있어서의 감압도를 작게 할 수 있는 동시에, 감압수단(압력 조정기(21,31))에 도입하는 압축가스를 고온으로 가열할 필요가 없어져, 40℃ 이하의 온수를 이용한 열교환기(22,32)에서 가스를 가온함으로써 감압수단에서의 가스의 액화나 감압수단 외면에의 결로를 방지할 수 있다. 특히, 온수에 의한 가스의 가온을 열교환기로 행하는 것에 의해, 가스를 소정온도로 효율적으로 가온할 수 있어, 40℃ 이하의 온수를 이용하는 것에 의해, 전기히터로 배관 등을 가열하는 경우에 비해 안전성을 확보할 수 있다. 또한, 압축가스가 흐르는 배관계를 구비한 장치 본체부(16)와, 온수를 생성하는 온수 생성기(17)를 격벽 등을 사이에 두고 격리된 상태로 설치하는 것에 의해, 온수 생성기(17)의 가열원에 전기히터를 이용해도, 압축가스와 전기히터가 격리되어 있기 때문에, 안전성을 큰 폭으로 향상시킬 수 있다. 또한, 온수를 이용하는 것에 의해서, 열수(熱水)나 스팀을 이용한 경우에 비해 가온에 필요로 하는 에너지의 저감이 도모되어, 배관계로부터의 열 손실도 적어져서, 만일, 온수가 누설되어도 화상 등의 위험은 없다. As shown in this embodiment, by reducing the pressure of the compressed gas in a plurality of stages, the pressure reduction degree in each pressure reduction stage can be reduced, and compression is introduced into the pressure reduction means (pressure regulators 21 and 31). Since the gas does not need to be heated to high temperature, the gas is heated in the heat exchangers 22 and 32 using hot water of 40 ° C. or lower, thereby preventing liquefaction of the gas in the decompression means and condensation on the outer surface of the decompression means. In particular, by heating the gas by hot water with a heat exchanger, it is possible to efficiently heat the gas to a predetermined temperature, and by using hot water of 40 ° C. or lower, it is safer than when heating a pipe or the like with an electric heater. It can be secured. In addition, the hot water generator 17 is heated by providing the apparatus main body 16 with the piping system through which the compressed gas flows, and the hot water generator 17 for generating hot water in an isolated state with a partition or the like interposed therebetween. Even when an electric heater is used for the source, the compressed gas and the electric heater are separated, whereby the safety can be greatly improved. By using hot water, energy required for warming can be reduced compared to the case where hot water or steam is used, and the heat loss from the piping system is also reduced. There is no danger.

한편, 감압 후의 저압가스를 공급처에 연속 공급하는 경우에는, 상기 장치 본체부(16)와 온수순환 유닛(15)을 구비한 가스 공급장치를 복수 설치해도 좋지만, 하나의 온수순환 유닛(15)을 복수의 장치 본체부(16)에 대응시킬 수도 있다. 또한, 단열 팽창에 의한 가스온도의 저하가 비교적 작고, 감압도가 작은 압축가스를 감압하여 공급하는 경우에는, 감압수단 및 열교환기를 한개씩만 설치하도록 할 수 있다. On the other hand, in the case of continuously supplying the low pressure gas after depressurization to a supply destination, a plurality of gas supply devices including the apparatus main body 16 and the hot water circulation unit 15 may be provided, but one hot water circulation unit 15 may be provided. It is also possible to correspond to the some apparatus main-body part 16. FIG. In addition, in the case where the decrease in the gas temperature due to the adiabatic expansion is relatively small and the compressed gas having a low decompression degree is supplied under reduced pressure, only one decompression means and one heat exchanger can be provided.

11 : 고압가스 용기
12 : 고압밸브
13 : 압력 검출기
14 : 저압밸브
15 : 온수순환 유닛
16 : 장치 본체부
17 : 온수 생성기
18 : 온수 공급관
18a : 도입측 분기관
19 : 온수 복귀관
19a : 도출측 분기관
21, 31 : 압력 조정기
22, 32 : 열교환기
23, 33 : 차단 밸브
24, 34 : 압력 검출기
41 : 용기
42 : 코일관
42a : 입구관
42b : 출구관
43 : 덮개
44 : 온수 도입구
45 : 온수 도출구
46 : 방해판
51, 52 : 가스 유로
53 : 온수 유로
53a : 입구측 고리 형상 유로
53b : 밸브 상자 외주 유로
53c : 출구측 고리 형상 유로
54 : 온수 도입구
55 : 온수 도출구11: high pressure gas container
12: high pressure valve
13: pressure detector
14 low pressure valve
15: hot water circulation unit
16: device main body
17: hot water generator
18: hot water supply pipe
18a: inlet branch pipe
19: hot water return tube
19a: branch on exit side
21, 31: pressure regulator
22, 32: heat exchanger
23, 33: shutoff valve
24, 34: pressure detector
41: container
42: coiled tube
42a: entrance tube
42b: outlet pipe
43: cover
44: hot water inlet
45: hot water outlet
46: baffle
51, 52: gas flow path
53: hot water flow path
53a: inlet side ring-shaped flow path
53b: valve box outer periphery
53c: exit ring-shaped flow path
54: hot water inlet
55: hot water outlet

Claims (4)

압축가스 공급원으로부터 공급되는 가스를 감압수단으로 감압하여 공급하는 가스 공급장치로서, 상기 감압수단의 가스 흐름방향 상류측에, 상기 감압수단에 도입되는 가스와 온수 공급원으로부터 공급되는 온수를 열교환시켜 상기 가스를 가온하는 열교환기를 설치하는 동시에, 상기 감압수단에, 상기 온수의 일부에 의해서 상기 감압수단을 가온하기 위한 온수 유로를 마련한 가스 공급장치.A gas supply device for decompressing and supplying a gas supplied from a compressed gas supply source to a decompression means, wherein the gas introduced into the decompression means and the hot water supplied from the hot water supply source are heat-exchanged to the gas flow direction upstream of the decompression means. And a heat exchanger for heating the gas supply device, and a hot water flow path for heating the pressure reducing means by a part of the hot water. 제 1 항에 있어서, 상기 온수를 30?40℃의 온도로 가온하여 상기 열교환기 및 상기 감압수단의 온수 유로에 공급하는 온수순환수단을 구비하고 있는 가스 공급장치.The gas supply apparatus according to claim 1, further comprising: a warm water circulation means for warming the hot water to a temperature of 30 to 40 ° C and supplying the warm water to the heat exchange path of the heat exchanger and the decompression means. 제 1 항 또는 제 2 항에 있어서, 상기 감압수단이 직렬 또는 병렬로 복수 배치되고, 각 감압수단의 가스 흐름방향 상류측에 상기 열교환기가 각각 배치되어 있는 가스 공급장치.3. The gas supply device according to claim 1 or 2, wherein a plurality of said decompression means are arranged in series or in parallel, and said heat exchanger is arranged on the upstream side in the gas flow direction of each decompression means. 제 1 항 내지 제 3 항 중의 어느 한 항에 있어서, 상기 가스가 모노실란 또는 3불화 질소인 가스 공급장치.The gas supply device according to any one of claims 1 to 3, wherein the gas is monosilane or nitrogen trifluoride.
KR1020127017182A 2009-12-03 2010-11-18 Gas supply device KR101755744B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2009-275650 2009-12-03
JP2009275650A JP5462607B2 (en) 2009-12-03 2009-12-03 Gas supply device
PCT/JP2010/070525 WO2011068035A1 (en) 2009-12-03 2010-11-18 Gas supply device

Publications (2)

Publication Number Publication Date
KR20120101489A true KR20120101489A (en) 2012-09-13
KR101755744B1 KR101755744B1 (en) 2017-07-07

Family

ID=44114885

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127017182A KR101755744B1 (en) 2009-12-03 2010-11-18 Gas supply device

Country Status (6)

Country Link
EP (1) EP2508786B1 (en)
JP (1) JP5462607B2 (en)
KR (1) KR101755744B1 (en)
CN (1) CN102639922B (en)
TW (1) TWI503501B (en)
WO (1) WO2011068035A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10151428B2 (en) * 2015-12-27 2018-12-11 GE Oil & Gas, LLC Reducing pressure of compressed gas from a storage tank
CN111425755A (en) * 2019-12-13 2020-07-17 凯馺国际股份有限公司 Filling equipment and filling method for gas in steel cylinder for bubble water machine
CN112984534B (en) * 2021-02-05 2022-10-18 新郑市吉龙包装材料有限公司 Heat utilization system of packaging printing waste gas treatment equipment
US20220390179A1 (en) * 2021-06-04 2022-12-08 Jeffrey A. Wilmer Methods and systems for a heat exchanger

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4373354A (en) * 1981-09-28 1983-02-15 Trane Cac, Inc. Combination discharge gas muffler and water heater
JPS64798U (en) * 1987-06-19 1989-01-05
JPH0633858B2 (en) 1988-03-17 1994-05-02 テイサン株式会社 Method and device for preventing gas outflow phenomenon of pressure regulator
JPH064798U (en) * 1992-06-26 1994-01-21 株式会社日立ビルシステムサービス Elevator noise suppression device
EP0633423B1 (en) * 1993-07-06 1997-01-15 The Commonwealth Industrial Gases Limited Pressure reduction and flow regulation device
JP3592446B2 (en) * 1996-06-19 2004-11-24 日酸Ｔａｎａｋａ株式会社 Pressure regulator
JPH10105853A (en) * 1996-10-01 1998-04-24 Tokyo Gas Co Ltd Gas supply system
US20030070432A1 (en) * 2001-03-05 2003-04-17 Nalin Walpita Natural gas depressurization temperature maintenance expansion system with production of useful work
US8015993B2 (en) * 2004-10-18 2011-09-13 GM Global Technology Operations LLC Heatable hydrogen pressure regulator
JP2006283812A (en) * 2005-03-31 2006-10-19 Japan Air Gases Ltd System and method for feeding liquefied gas
CN201173384Y (en) * 2008-04-02 2008-12-31 天津市华迈燃气技术发展有限公司 Mobile type compressed natural gas pressure regulating gas supply device
CN201281224Y (en) * 2008-10-28 2009-07-29 赵先勤 High-pressure compressed gas discharging device

Also Published As

Publication number Publication date
CN102639922B (en) 2014-11-19
EP2508786A1 (en) 2012-10-10
EP2508786A4 (en) 2016-01-06
EP2508786B1 (en) 2017-06-14
KR101755744B1 (en) 2017-07-07
JP2011117536A (en) 2011-06-16
TW201139917A (en) 2011-11-16
TWI503501B (en) 2015-10-11
WO2011068035A1 (en) 2011-06-09
CN102639922A (en) 2012-08-15
JP5462607B2 (en) 2014-04-02

Similar Documents

Publication Publication Date Title
JP6874000B2 (en) Thermal server plant and its control method
CN107210072B (en) It is passive except hot system from pressurized water reactor by steam generator
US10288314B2 (en) Hot water heating system and related methods
Qi et al. Performance analysis of submerged combustion vaporizer
KR20120101489A (en) Gas supply device
US11448406B2 (en) Local thermal energy consumer assembly and a local thermal energy generator assembly for a district thermal energy distribution system
EP3090213B1 (en) Heat exchanger, heating device, heating system and method for heating water
CN104180530A (en) Pressure-bearing hot-water boiler system
CN102853152A (en) Dual-channel constant temperature control valve
JP5575184B2 (en) Heating system
JP6651370B2 (en) BOG heating system for low temperature liquefied gas
JP2008096064A (en) Heat pump system for hot water supply
EP3327399B1 (en) Method for operating a heat exchange system with a bypass duct and heat exchange system with a bypass duct
JP5982635B2 (en) Heat pump water heater
JP5178142B2 (en) Hot water storage water heater
KR101543013B1 (en) Movable thermal storage apparatus
KR102359789B1 (en) Fluid Tank Including Internal Pressure Booster and Internal Evaporator
KR101633558B1 (en) Water heat exchanger
SK1002008U1 (en) Device of gas governor station
CN203964393U (en) A kind of bearing hot water steam generator system
CZ19656U1 (en) Circuit arrangement of gas regulation station
SE429997B (en) Heat recuperating plant

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant