TWI485363B - 振盪擾動之時域測量的設備及方法 - Google Patents

振盪擾動之時域測量的設備及方法 Download PDF

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Publication number
TWI485363B
TWI485363B TW101122472A TW101122472A TWI485363B TW I485363 B TWI485363 B TW I485363B TW 101122472 A TW101122472 A TW 101122472A TW 101122472 A TW101122472 A TW 101122472A TW I485363 B TWI485363 B TW I485363B
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TW
Taiwan
Prior art keywords
oscillator
electrode
signal
sensing
oscillating
Prior art date
Application number
TW101122472A
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English (en)
Chinese (zh)
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TW201326751A (zh
Inventor
Paul D Swanson
Richard L Waters
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Lumedyne Technologies Inc
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Application filed by Lumedyne Technologies Inc filed Critical Lumedyne Technologies Inc
Publication of TW201326751A publication Critical patent/TW201326751A/zh
Application granted granted Critical
Publication of TWI485363B publication Critical patent/TWI485363B/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/955—Proximity switches using a capacitive detector

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
TW101122472A 2011-06-24 2012-06-22 振盪擾動之時域測量的設備及方法 TWI485363B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/168,603 US9705450B2 (en) 2011-06-24 2011-06-24 Apparatus and methods for time domain measurement of oscillation perturbations

Publications (2)

Publication Number Publication Date
TW201326751A TW201326751A (zh) 2013-07-01
TWI485363B true TWI485363B (zh) 2015-05-21

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
TW101122472A TWI485363B (zh) 2011-06-24 2012-06-22 振盪擾動之時域測量的設備及方法
TW104107893A TWI565930B (zh) 2011-06-24 2012-06-22 慣性感測器以及形成和使用慣性感測器的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW104107893A TWI565930B (zh) 2011-06-24 2012-06-22 慣性感測器以及形成和使用慣性感測器的方法

Country Status (6)

Country Link
US (2) US9705450B2 (ja)
EP (1) EP2724465A4 (ja)
JP (2) JP5960257B2 (ja)
CN (1) CN103891147A (ja)
TW (2) TWI485363B (ja)
WO (1) WO2012178086A1 (ja)

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US8683862B2 (en) * 2011-11-03 2014-04-01 The United States Of America As Represented By The Secretary Of The Navy Oscillation apparatus with atomic-layer proximity switch
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US9577633B1 (en) * 2016-06-17 2017-02-21 The United States Of America As Represented By Secretary Of The Navy Capacitive charge triggered proximity switch for use with time domain switched inertial sensors
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JP6805187B2 (ja) 2018-01-04 2020-12-23 株式会社東芝 振動装置及び振動装置の制御方法
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JP7422770B2 (ja) 2018-12-17 2024-01-26 ソクプラ サイエンシズ イーティー ジェニー エス．イー．シー． ニューロモルフィックｍｅｍｓデバイス
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US11342884B2 (en) 2020-08-26 2022-05-24 Mediatek Inc. Crystal oscillator and phase noise reduction method thereof
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US20230048216A1 (en) * 2021-08-04 2023-02-16 University Of Windsor MEMS Vibrating Ring Resonator with Deformable Inner Ring-Shaped Spring Supports
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CN117572021B (zh) * 2024-01-17 2024-04-05 中国工程物理研究院电子工程研究所 敏感结构及加速度传感器

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Also Published As

Publication number Publication date
WO2012178086A1 (en) 2012-12-27
TW201538931A (zh) 2015-10-16
US20160126890A1 (en) 2016-05-05
EP2724465A4 (en) 2015-04-22
TWI565930B (zh) 2017-01-11
TW201326751A (zh) 2013-07-01
JP2014520277A (ja) 2014-08-21
CN103891147A (zh) 2014-06-25
US10027281B2 (en) 2018-07-17
JP5960257B2 (ja) 2016-08-02
EP2724465A1 (en) 2014-04-30
JP2015187613A (ja) 2015-10-29
US9705450B2 (en) 2017-07-11
US20120326700A1 (en) 2012-12-27

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