TWI470646B - 載物台機構 - Google Patents

載物台機構 Download PDF

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Publication number
TWI470646B
TWI470646B TW100118245A TW100118245A TWI470646B TW I470646 B TWI470646 B TW I470646B TW 100118245 A TW100118245 A TW 100118245A TW 100118245 A TW100118245 A TW 100118245A TW I470646 B TWI470646 B TW I470646B
Authority
TW
Taiwan
Prior art keywords
stage
fixed
movable
movable stage
gap absorbing
Prior art date
Application number
TW100118245A
Other languages
English (en)
Chinese (zh)
Other versions
TW201218210A (en
Inventor
Yoshiharu Nakatomi
Original Assignee
Yoshiharu Nakatomi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yoshiharu Nakatomi filed Critical Yoshiharu Nakatomi
Publication of TW201218210A publication Critical patent/TW201218210A/zh
Application granted granted Critical
Publication of TWI470646B publication Critical patent/TWI470646B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/54—Arrangements or details not restricted to group B23Q5/02 or group B23Q5/22 respectively, e.g. control handles
    • B23Q5/56—Preventing backlash
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Transmission Devices (AREA)
  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
TW100118245A 2010-06-02 2011-05-25 載物台機構 TWI470646B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010139895 2010-06-02
JP2010139894 2010-06-02

Publications (2)

Publication Number Publication Date
TW201218210A TW201218210A (en) 2012-05-01
TWI470646B true TWI470646B (zh) 2015-01-21

Family

ID=45066496

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100118245A TWI470646B (zh) 2010-06-02 2011-05-25 載物台機構

Country Status (5)

Country Link
JP (1) JP4838402B1 (ko)
KR (1) KR101260811B1 (ko)
CN (1) CN102396032B (ko)
TW (1) TWI470646B (ko)
WO (1) WO2011152109A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014125611A1 (ja) * 2013-02-15 2014-08-21 株式会社駿河生産プラットフォーム 移動ステージ
JP6141696B2 (ja) * 2013-06-17 2017-06-07 芳春 中富 ステージ機構
CN104345417A (zh) * 2013-07-29 2015-02-11 福州高意光学有限公司 一种平移调整架
TWI579100B (zh) * 2014-08-14 2017-04-21 Suruga Production Platform Co Ltd Mobile station
CN107234606B (zh) * 2017-06-28 2021-02-19 苏州华商新能源有限公司 一种环保搬运机器人
CN107239087B (zh) * 2017-06-28 2019-07-30 苏州华商新能源有限公司 一种智能控制搬运机器人
JP6656742B1 (ja) * 2018-12-13 2020-03-04 ビブリロォス株式会社 ステージ機構
EP3693969B1 (en) * 2018-12-13 2022-08-03 Biblios Co., Ltd. Stage mechanism
WO2020188865A1 (ja) * 2019-03-15 2020-09-24 ビブリロォス株式会社 マイクロヘッド及びこれを用いたステージ機構

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6350080B1 (en) * 1998-01-26 2002-02-26 New Focus, Inc. Modular motion stages utilizing interconnecting elements
TWI273178B (en) * 2004-04-26 2007-02-11 Smc Kk Linear actuator
TW200734557A (en) * 2006-03-02 2007-09-16 Koganei Ltd Shock absorber
TWM340878U (en) * 2008-04-18 2008-09-21 xin-zheng Yao Improved structure of horizontal adjuster

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307091A (ja) * 1989-05-22 1990-12-20 Oki Electric Ind Co Ltd ステージ機構
JPH04203650A (ja) * 1990-11-30 1992-07-24 Onishi Raito Kogyosho:Kk ねじ送り装置
JPH09177924A (ja) * 1995-12-21 1997-07-11 Nippon Telegr & Teleph Corp <Ntt> ネジのバックラッシュ除去方法及び機構
KR100512582B1 (ko) 2003-09-01 2005-09-05 한국공작기계 주식회사 이송장치용 백래시 제거장치
CN101317768B (zh) * 2008-07-09 2010-06-09 新奥博为技术有限公司 一种多模态成像系统的载物台
CN201340478Y (zh) * 2008-10-24 2009-11-04 陈百捷 一种显微观察移动台

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6350080B1 (en) * 1998-01-26 2002-02-26 New Focus, Inc. Modular motion stages utilizing interconnecting elements
TWI273178B (en) * 2004-04-26 2007-02-11 Smc Kk Linear actuator
TW200734557A (en) * 2006-03-02 2007-09-16 Koganei Ltd Shock absorber
TWM340878U (en) * 2008-04-18 2008-09-21 xin-zheng Yao Improved structure of horizontal adjuster

Also Published As

Publication number Publication date
WO2011152109A1 (ja) 2011-12-08
KR20110138227A (ko) 2011-12-26
KR101260811B1 (ko) 2013-05-06
CN102396032B (zh) 2015-08-19
JPWO2011152109A1 (ja) 2013-07-25
JP4838402B1 (ja) 2011-12-14
TW201218210A (en) 2012-05-01
CN102396032A (zh) 2012-03-28

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