TWI470646B - Stage apparatus - Google Patents

Description

Stage mechanism

The present invention relates to a small and simple structure, and the movable stage on which the workpiece is mounted, such as a precision device, is easily and stably slid with respect to the fixed stage, and the gap when the movable stage is fixed and the movable stage are fixed The stage mechanism with less movement.

In the past, various types of fixtures for setting a workpiece and a stage for including such a stage mechanism when using a processing machine such as cutting, grinding, polishing, or the like, and a microscope are proposed.

That is, the known stage mechanism basically has a fixed stage and a movable stage, for example, a micrometer head integrated with a feed screw, a feed pawl, and a movable shaft is mounted on the fixed load. On the table side, a stopper is installed on the side of the movable stage.

Further, in the stage mechanism, the stoppers on the movable shaft and the movable stage side are often in a tensioned relationship by the tension springs, thereby suppressing the generation of the gap.

Further, as one of such manual stages, for example, an adjustment mechanism for easily setting a limit mechanism of the slide unit with respect to the fixed unit and a degree of sliding is proposed, so that adjustment can be performed with high precision, and the scale can be easily read. A manual stage (for example, refer to Patent Document 1).

More specifically, as shown in FIG. 14, a manual stage 200 is characterized in that a sliding assembly 204 with a precision device mounted via a fastener and a fixing assembly 205 connected via a fastener and a base are via a sliding mechanism. The sliding member 204 is slid by the operation of the handle 219 to adjust the position of the mounted precision device. The fixing member 205 is formed of a resin, and the wall portions on both sides of the fixing member 205 form an inverted triangular protrusion. The mode of 231 is respectively provided with grooves 232 in the longitudinal direction.

Then, the slide fixing screw 210 is inserted into the sliding fixing screw hole 216 provided in the wall portion to further abut against the protruding portion 231, and the protruding portion 231 is inclined inwardly and pressed into the slide assembly 204, thereby fixing the slide assembly 204 with respect to the fixing. Positioning the assembly 205, and passing a plurality of sliding adjustment screws (not shown) through the plurality of sliding adjustment screw holes 215 provided in the wall portions of the both sides of the fixing assembly 205 to thereby abut against the protruding portion 231, so that the protruding portion The 231 is inclined inwardly to press the slide assembly 204 to finely adjust the degree of sliding between the fixed assembly 205 and the slide assembly 204.

Further, there has been proposed a stage fixing device for fixing a high-precision stage with high precision and firmness (for example, see Patent Document 2).

More specifically, as shown in FIG. 15, a stage fixing device 300 is disclosed, in which a stage 303 for fixing a workpiece is placed on a processing shaft 304 of a processing machine, and the stage is adjusted. The position fixing device 300 is fixed to a predetermined position, and the stage fixing device 300 includes a rod-shaped member 306 that is provided on the stage 303 and extends in the same direction as the moving direction, and a self-supporting stage 303 The direction in which the moving directions are orthogonal is fixed to the fixing member 307 of the rod member 306 in a surface contact manner.

[Patent Document 1] Japanese Laid-Open Patent Publication No. 2010-223611 (Application No.)

[Patent Document 2] Japanese Laid-Open Patent Publication No. 2003-48129 (Patent Patent Application, etc.)

However, the manual stage disclosed in Patent Document 1 has a problem in that a dovetail slide rail is required, and a sliding fixing screw, a plurality of sliding adjustment screws, and the like are required, resulting in a large number of components and a complicated structure, and further, When the manual stage is fixed, a large gap is generated or the fixing of the manual stage is insufficient.

Further, the stage fixing device disclosed in Patent Document 2 has a problem in that it is required to protrude from the outside (outer circumference) of a predetermined stage, so that it is a stage including the stage fixing device. When the stage is enlarged as a whole, a large gap is generated when the stage is fixed, or the fixing of the manual stage is insufficient.

Therefore, the inventors of the present invention have found that the gap absorbing member having a predetermined position can be formed into a compact and inexpensive simple structure, and it is possible to obtain excellent mobility of the movable stage and prevention of the gap, respectively. Sexuality, as well as fixation, to complete the present invention.

That is, an object of the present invention is to provide a simple and compact structure that can easily and stably slide the movable stage, and the gap when the movable stage is fixed and the movement of the movable stage after the movement is small The stage mechanism.

According to the present invention, there is provided a stage mechanism including a fixed stage and a movable stage sliding along a surface of the fixed stage, the stage mechanism being characterized in being formed on a fixed stage The boring portion is provided with a feed screw and one or two or more gap absorbing members, and is provided with a coupling member for sliding the movable stage and the feed screw in synchronization, thereby enabling Solve the above problems.

In this way, by providing a predetermined gap absorbing member through the boring portion in which the screw groove is formed at a predetermined position of the stage mechanism, it is possible to obtain a compact and inexpensive simple structure, and it is excellent only by rotating the feed screw. The mobility of the stage.

Further, by configuring in this manner, it is possible to provide a stage mechanism in which a gap is fixed when the movable stage is fixed, and movement after fixation is small.

Further, when the stage mechanism of the present invention is constructed, it is preferable that the gap absorbing member is a cylindrical resin member having a through hole for feeding screws.

By constituting the gap absorbing member in this manner, the gap absorbing member can be easily attached to a predetermined position, and stress absorption by the gap absorbing member can be facilitated, and a more excellent movement of the stage can be obtained. Sexual, fixed.

Further, when constituting the stage mechanism of the present invention, it is preferable that the gap absorbing member has a metal protective cover around it.

By constituting the gap absorbing member in this manner, it is easy to mount and fix the gap absorbing member with respect to a predetermined position, and the durability of the gap absorbing member can be improved, and the mobility of the movable stage can be excellent for a long period of time. , fixed.

Further, when constituting the stage mechanism of the present invention, it is preferable that the gap absorbing member is composed of at least one of a guanamine resin, a polyurethane resin, and a rubber-based resin.

By forming the gap absorbing member in this manner, the moldability of the gap absorbing member, the gap absorbing property, and the like can be improved, and the mobility and the fixability of the movable stage can be further improved.

Further, when the stage mechanism of the present invention is constructed, it is preferable to provide a metal piece as a guiding member between the fixed stage and the movable stage.

By providing the metal piece as the guiding member in this manner, the function as a guide rail can be exerted between the fixed stage and the movable stage, and the mobility and fixing of the movable stage can be obtained more excellently. Better durability.

Further, when constituting the stage mechanism of the present invention, it is preferable to provide a screw member for connecting the fixed stage and the movable stage in the vertical direction, and adjusting the fixed stage and the movable stage. Sliding contact force between.

By providing the screw member in this manner, it is possible to obtain more excellent mobility, fixability, or excellent durability between the fixed stage and the movable stage.

Further, in the case of constituting the stage mechanism of the present invention, it is preferable that the fixed stage and the movable stage are each formed into a flat shape.

By forming such a fixed stage and a movable stage, it is possible to provide excellent mobility and fixability even if the workpiece attached to the movable stage is large and heavy, and is small and inexpensive. Stage mechanism.

Further, another aspect of the present invention provides a stage mechanism including a rectangular parallelepiped fixed stage, a cylindrical member housed inside the fixed stage, and sliding along a surface of the fixed stage. The movable stage is characterized in that one or two or more gap absorbing members are assembled inside the cylindrical member, and the cylindrical member to which the gap absorbing member is fitted is coupled to the movable load by the connecting member The stage is slid by the feed screw attached to the fixed stage and by the gap absorbing member to slide the cylindrical member, thereby synchronously sliding the movable stage.

In this manner, the fixed stage and the movable stage of the predetermined shape substantially connect the connecting member via the predetermined cylindrical member, and the movable stage is indirectly slid indirectly by the feed screw of the fixed stage. It is possible to provide a stage mechanism that is not only excellent in mobility and fixability but also excellent in mountability, and is small and inexpensive.

[First Embodiment]

In the first embodiment, as illustrated in FIGS. 1a to b, the stage mechanism 10 includes a fixed stage 11 and a movable stage 12 that slides along the surface of the fixed stage 11, and the stage mechanism 10 It is characterized in that a feed screw 15 and one or two or more gap absorbing members 16 are provided in the bore portion 13 formed in the fixed stage 11, and a joint member 18 is provided, and the joint member 18 and the feed screw 15 are advanced. The movable stage 12 is slid in synchronization.

Then, in the first embodiment, the fixed stage 11 and the movable stage 12 each have a flat stage mechanism 10 .

Hereinafter, the stage mechanism 10 of the first embodiment will be specifically described with reference to the drawings as appropriate.

Fixed stage (1) Form

The form of the fixed stage 11 shown in the first embodiment of the present invention is not particularly limited as long as it is a flat plate in the stage mechanism 10 of the first embodiment.

That is, it is generally preferable to form the planar shape of the fixed stage 11 into a quadrangular shape (including a square shape), and as its size, the longitudinal width is formed into a value in the range of 2 to 10 cm, and the lateral width is formed as 2 A value in the range of ～10 cm, and the thickness is formed to a value in the range of 1 to 10 mm.

This is because when the fixed stage 11 having such a planar shape and size is used, it is easy to handle and easy to manufacture, and a predetermined workpiece is attached to the workpiece fixing through hole 12b or the like (not shown). When the movable stage 12 is combined, it can be stably held and can be easily slid.

Further, as for the form of the fixed stage, as shown in FIGS. 2a to 2b, it is preferable to provide a predetermined space on one side of the fixed stage 11 and 11' in a plan view. Notch 11c.

This is because the space for the notch 11c is used to form the moving space of the feed screw 15, and the feed screw 15 is provided with the connecting member 18 for moving the movable stage 12 in a predetermined direction, enabling the edges The specified direction is caused by the rotation movement.

Therefore, the fixed stages 11 and 11' having the feed screws 15 including the connecting members 18 are balanced and securely attached to the connecting members 18 and the movable loads by the plurality of connecting member fixing members 19 (19a, 19b). Since the table 12 is coupled, only the movable stage 12 can be slid in synchronization with the feed caused by the rotational movement of the feed screw 15.

In other words, by forming such a notch 11c, only the movable stage 12 can be slid in a predetermined direction while the fixed stages 11, 11' are stopped.

Here, the planar shape of the notch 11c provided in the fixed stages 11 and 11' is not particularly limited, but may be, for example, a rectangular shape, a groove shape, a semicircular shape, a semi-elliptical shape, an inverted triangular shape, a different shape, or the like. It is appropriate.

Therefore, although depending on the size of the fixed stages 11, 11', the distance from the one side of the fixed stage 11, 11' to the deepest part of the notch 11c, that is, the symbol L1 in the second drawing The distance is usually in the range of 1 to 15 mm, preferably in the range of 3 to 12 mm, and preferably in the range of 5 to 10 mm.

Further, in the second drawing, the length of the surface of the notch 11c indicated by the reference numeral L2 is usually in the range of 5 to 30 mm, and the value in the range of 8 to 25 mm is preferably formed to be 10 to 20 mm. Values within the range are particularly suitable.

Therefore, the constituent material of the fixed stage 11 is not particularly limited, but it is usually preferably aluminum (including anodized aluminum), copper, brass, iron, nickel, magnesium, tungsten, ceramic, polymer resin material, or the like. At least one of them.

In particular, in the case of anodizing aluminum, it is suitable as a constituent material of the fixed stage 11 because it involves lightweight, corrosion resistance, durability, workability, thermal conductivity, decoration, economy, and the like.

Further, as for the form of the fixed stage 11, as shown in Figs. 1a to b, the fixed stage 11 is preferably provided with one or two or more mounting holes, grease injection holes 11a on the side surface, the back surface, and the like. , the small hole of 11b.

That is, if the small hole is a mounting hole, the mounting hole can be fixed with other components, or if the small hole is a grease injection hole, the fixed load stage 11 and the movable load can be used. A predetermined grease or lubricating oil is supplied to the boundary surface between the stages 12 to make the movable stage 12 slide more smoothly.

(2) Feeding screw

Further, the feed screw 15 and the washer 15' shown in Fig. 1b are commonly attached to the bore portion 13 formed in the fixed stage 11, and a fixing member for the connecting member is provided at the end of the feed screw 15. 19 joint member 18.

Therefore, in response to the feeding of the feed screw 15, the connecting member 18 moves linearly, whereby the movable stage 12 can be stably slid.

Further, as shown in Fig. 1b, the feed screw 15 is preferably formed to include a head portion 15a having a concave portion that engages with a screwdriver or the like, and a screw portion 15b having a screw groove.

Further, the feed screw 15 is preferably rotated by a mechanical drive or an electric drive force using a motor or the like. However, in order to make the structure simpler, it is preferable to manually rotate the screw using a screwdriver or a hex wrench.

In addition, in the case of a member which can exhibit the same effect as the above-described feed screw 15, the predetermined form may be appropriately replaced or changed. For example, a rod or a prism formed of a metal material subjected to rustproof treatment may be used. Things, threads, etc.

(3) Gap absorption member

Further, the gap absorbing member 16 shown in FIG. 1b is a member that ensures good mobility of the movable stage 12, absorbs stress generated in the movable stage 12, and the like, thereby suppressing generation of a gap and firmly holding the fixed state. .

In other words, when the movable member 12 is slid according to the gap absorbing member 16, the slidability can be exhibited, the sliding of the movable stage 12 can be prevented, and yaw or twist can be prevented. Wait.

Further, it is possible to appropriately deform the movable stage 12, thereby reducing the gap between the movable stages 12, and sufficiently hardening after fixing, and also capable of absorbing the stress generated in the movable stage 12 and the like, and can be firmly held and fixed. status.

Therefore, as for the form of the gap absorbing member 16, as shown in Fig. 3a, a cylindrical cushioning resin member 16b having a through hole 16a through which the feed screw 15 passes is preferably used.

In other words, by configuring the gap absorbing member 16 in this manner, the gap absorbing member 16 is easily attached to a predetermined position of the feed screw 15, and the stress absorption by the gap absorbing member 16 becomes easy, and further, Excellent mobility and fixation of the movable stage 12 are obtained.

Further, although the constituent material of the buffer resin member 16b of the gap absorbing member 16 is not particularly limited, it is preferably composed of, for example, at least one of the following resins: guanamine resin (nylon resin), polyurethane resin, esterification Resin, carbonate resin, propylene resin, olefin resin, rubber resin (natural rubber, styrene rubber, butadiene rubber, styrene-butadiene-styrene block copolymer (SBS), styrene-isoprene Diene-styrene block copolymer (SIS), styrene-ethylene butadiene-styrene block copolymer (SEBS), etc., quinone imine resin, guanamine-imine resin, phenoxy resin , polyether oxime resin, polyether ether ketone resin, polyoxyalkylene resin, epoxy resin, cyanate resin, guanamine resin, urea resin, and phenol resin.

When the gap absorbing member 16 made of such a thermoplastic resin material or a thermosetting resin material is used, the formability of the gap absorbing member 16 and the gap absorbing property can be improved, and further, an excellent movable load can be obtained. The mobility and fixedness of the table 12.

Therefore, in particular, when at least one of a polyamide resin (nylon resin), a polyurethane resin, and a rubber resin is used, the balance between the mobility and the fixing property of the movable stage 12 is better, and the durability is more. Excellent, therefore suitable for resin materials.

In addition, it is preferable that the glass transition temperature or the melting point of the constituent material (resin material) of the buffer resin member 16b of the gap absorbing member 16 is in the range of 30 to 250 °C.

This is because when the glass transition temperature or the melting point of the above constituent material is less than 30 ° C, the heat resistance and the mechanical strength are insufficient, and the gap absorbability and the fixing property of the movable stage 12 are lowered.

On the other hand, when the glass transition temperature or the melting point of the above-mentioned constituent material is a value exceeding 250 ° C, there is a case where the type of the resin material which can be used is excessively restricted, and the gap absorbability is remarkably lowered.

Therefore, it is preferable that the glass transition temperature or the melting point of the constituent material of the gap absorbing member 16 is in the range of 50 to 200 ° C, and particularly preferably in the range of 80 to 180 ° C.

In addition, the glass transition temperature of the constituent material of the gap absorbing member 16 can be measured as a change point of the specific heat in the DSC measurement, and when it is a constituent material having a melting point, the DSC melting heat peak temperature can be measured based on JIS K7121.

Further, as shown in Figs. 3a and 3b, it is preferable that the gap absorbing member 16 has a metal protective cover 16c having a predetermined shape around it.

In other words, it is preferable to form the gap absorbing member 16 by having the metal protective cover 16c, and the gap absorbing member 16 is formed by inserting the cushioning resin member 16b into the metal protective cover 16c in the direction of the arrow in the 3a and 3b. The metal protective cover 16c integrally includes a cap-shaped receiving portion 16d for accommodating the cushioning resin member 16b and a threaded portion 16e having a threaded groove.

This is because the metal protective cover 16c is provided in such a manner that the mounting and fixing of the gap absorbing member 16 with respect to the predetermined position of the feed screw 15 are facilitated, and the durability of the gap absorbing member 16 is improved. The mobility and the fixation of the excellent movable stage 12 can be obtained for a long period of time.

Therefore, as shown in FIGS. 4a and 4b, it is preferable that the front end portion of the cap-shaped accommodating portion 16d is bent after the cushioning resin member 16b is inserted into the metal boot 16c.

This is because the bending of the cushioning resin member 16b can be prevented by the bending in this manner, and the mobility of the gap absorbing member 16 in the feed screw 15 and the stress absorption of the gap absorbing member 16 become better. To.

In addition, although the constituent material of the metal protective cover 16c is not particularly limited, it is preferably at least one of aluminum, copper, nickel, iron, and the like from the viewpoint of being lightweight, inexpensive, and having predetermined deformability and durability. .

Here, the effect of the stress absorption by the gap absorbing member 16 will be described with reference to FIGS. 4a to 4C.

That is, Fig. 4a is a view for explaining the action and effect by the gap absorbing member 16, and shows that the feed screw 15 and the two gap absorbing members are attached to the boring portion 13 formed in the fixed stage 11. The state of 16 (the cushioning resin member 16b having the metal protective cover 16c).

4b is a partially enlarged view of the two gap absorbing members 16 shown in FIG. 4a, and shows a state in which the accommodating portions 16d of the respective metal protective covers 16c are opposed to each other and overlap each other.

In addition, FIG. 4c shows a state in which the two gap absorbing members 16 are disposed such that the metal boot 16c faces the same direction with respect to the feed screw 15 (to the right in the drawing).

Therefore, in the case where one gap absorbing member 16 is provided, it is needless to say that, as shown in FIGS. 4a to 4C, even when the two gap absorbing members 16 are provided, while the feed screw 15 is rotationally moved in a predetermined direction, The cushioning resin member 16b or the like can also exhibit a predetermined slidability, and does not hinder the movement of the movable stage 12 that slides synchronously, and can effectively prevent the yaw or the twist thereof.

Further, heat generation may occur due to the rotational movement of the feed screw 15, but the two gap absorbing members 16 can effectively absorb heat generated by the heat generation phenomenon.

That is, although the absorbed heat causes the gap absorbing member 16 to be partially plasticized, it can maintain the predetermined sliding characteristics as it is.

When a predetermined metal protective cover 16c is provided around the cylindrical cushioning resin member 16b constituting the gap absorbing member 16, it is not necessary to worry that the cushioning resin member 16b is excessively deformed or flows out from a predetermined position.

On the other hand, as shown in Figs. 4a to 4c, in the case where the two gap absorbing members 16 are provided, when the rotational movement of the feed screw 15 is stopped, the position of the movable stage 12 synchronized with the feed screw 15 is passed. When fixed, the two gap absorbing members 16 are moderately deformed, and the gap between the movable stages 12 can be reduced.

That is, as a reaction force of the pressing force due to the rotational movement of the feed screw 15, the repulsive stress of the movable stage 12 is reversed, but the gap absorbing member 16 is moderately deformed, and the above-mentioned repulsive stress can be effectively absorbed, and the movable load can be reduced. The gap between the objects 12 .

Then, after the movable stage 12 is fixed to a predetermined position, the cylindrical cushioning resin member 16b included in the two gap absorbing members 16 is sufficiently solidified.

Therefore, in the case of the gap absorbing member 16 shown in Figs. 4a to 4c, the left gap absorbing member 16 can effectively absorb the external stress applied from the side of the head portion 15a of the feed screw 15, and the gap on the right side. The absorbing member 16 is capable of effectively absorbing external stress applied from the side of the feed screw 15 opposite to the head portion 15a.

Further, even in the case where one of the two gap absorbing members 16 acts to generate a slack stress, a so-called double nut effect is exerted.

Therefore, the slack of the resin member 16b based on the two gap absorbing members 16 can be effectively prevented, and even if the stress intended to move the movable stage 12 is externally applied, the stress can be effectively absorbed and can be firmly held. Fixed state.

(4) Guide member

Further, as shown in FIGS. 2a to 2b or 5th to 6th, it is preferable to provide one or two or more guides composed of the metal piece 20a and the guide groove 20b at a predetermined position of the stage mechanism 10. Member 20.

In other words, the guide member 20 is a member for stably sliding the movable stage 12 in the predetermined direction without being shaken left and right.

Therefore, the material and form of the guide member 20 are not particularly limited, but it is preferably formed as follows: for example, a BB cross-sectional view of the stage mechanism 10 shown in Fig. 1, that is, Fig. 6 is a view A guide groove 20b' is formed in the vicinity of the left and right sides of the substantially quadrilateral movable stage 12, and the metal piece 20a of a predetermined length is pressed into the guide groove 20b', whereby the metal piece 20a is on the movable stage. The surface of 12 is prominent.

Further, as will be described later, in the fixed stage 11, the same guide groove 20b is formed at a position opposed to the guide groove 20b' of the movable stage 12.

Therefore, the guide member 20 is configured by a rod-shaped (cylindrical or polygonal prism-shaped) metal piece 20a that is press-fitted into the vertical direction guide grooves 20b and 20b', respectively, and the movable stage 12 can be opposed to the guide member 20 along the guide member 20. The fixed stage 11 slides smoothly.

Further, as shown in Fig. 2b, it is preferable that the metal piece 20a has a linear shape from the viewpoint of good workability, but as shown in Fig. 2a, a metal having a rounded (curvature) rod shape at both end portions is provided. It is also preferable that the sheet 20a is curved in a predetermined direction so that the planar shape thereof draws a gentle arc.

This is because the metal piece 20a can be easily pressed into the guide groove 20a' by pressing the metal piece 20a in such a curved shape, and the predetermined bending state can be maintained after the press-fitting, so that it can be held more firmly.

Further, as shown in Fig. 2a, it is preferable to prepare two metal sheets 20a which are bent in such a manner that their respective bending directions are uniform, and are respectively pressed into the guide grooves 20a'.

This is because when the movable stage 12 is slid, the metal piece 20a is bent in the same direction, so that the guiding property is better.

Next, the relationship between the length of the metal piece 20a constituting one portion of the guide member 20 and the length of the guide groove 20b of the fixed stage 11 will be described with reference to Fig. 7.

Further, since the length of the guide groove 20b of the fixed stage 11 is substantially equal to the length of the guide groove 20b' of the movable stage 12, the relationship described later is applicable not only to the guide groove 20b of the fixed stage 11, but also to the guide groove 20b of the fixed stage 11. The guide groove 20b' of the movable stage 12.

First, although the length (L3) of the metal piece 20a is shorter than the length (L4) of the guide groove 20b, it is usually preferably a value in the range of 50 to 90% of the length (L4) of the guide groove 20b. Specifically, it is set to a value in the range of 1.5 to 8 cm.

This is because if the length (L3) of the metal piece 20a is less than 1.5 cm, the guiding effect in the case where the guiding member 20 is formed may be remarkably lowered.

On the other hand, if the length (L3) of the above-mentioned metal piece 20a is a value exceeding 8 cm, the weight of the stage mechanism 10 may be excessively heavy, or it may be difficult to synchronize with the feeding of the feed screw 15, only the movable load. The situation of the smooth sliding of the table 12 is caused.

Therefore, it is preferable to set the length (L3) of the metal piece 20a to a value in the range of 2 to 7 cm, and it is particularly preferable to set the value in the range of 3 to 5 cm.

In addition, the thickness (t1) of the metal piece 20a is a value which is approximately twice the thickness (t2) of the guide groove 20b, but it is usually set to a value within a range of 0.5 to 8 mm.

This is because if the thickness (t1) of the metal piece 20a is less than 0.5 mm, the guiding effect in the case where the guiding member 20 is formed may be remarkably lowered.

On the other hand, if the thickness (t1) of the metal piece 20a is a value exceeding 8 mm, the weight of the stage mechanism 10 may be excessively heavy, or it may be difficult to synchronize with the feeding of the feed screw 15 to make only the movable load. The situation of the smooth sliding of the table 12 is caused.

Therefore, it is preferable to set the thickness (t1) of the metal piece 20a to a value in the range of 1 to 7 mm, and it is preferable to set the value in the range of 2 to 6 mm.

On the other hand, the length (L4) of the guide groove 20b constituting a part of the guide member 20 can be determined in consideration of the length (L3), the thickness (t1) of the metal piece 20a, the degree of bending of the metal piece 20a, and the like, but it is usually preferable to Set to a value in the range of 1.8 to 9 cm.

This is because when the length (L4) of the guide groove 20b is less than 1.8 cm, the guiding effect in the case where the guiding member 20 is formed is remarkably lowered, or the pressing of the metal piece 20a becomes difficult. To.

On the other hand, if the length (L4) of the above-described guide groove 20b is a value exceeding 9 cm, the fixing property of the metal piece 20a may be lowered, or it may be difficult to synchronize with the feeding of the feed screw 15, and only the movable stage 12 may be made. Caused by smooth sliding.

Therefore, it is preferable to set the length (L4) of the above-described guide groove 20b to a value in the range of 2.2 to 7.5 cm, and it is particularly preferable to set the value in the range of 3.5 to 5.5 cm.

Further, the depth (t2) of the guide groove 20b constituting one of the guide members 20 depends on the thickness (t1) of the metal piece 20a, but is usually set to a value in the range of 0.1 to 8 mm.

This is because if the depth (t1) of the guide groove 20b is less than 0.1 mm, the guiding effect in the case where the guiding member 20 is formed is remarkably lowered, or the fixing property of the metal piece 20a is lowered.

On the other hand, if the depth (t1) of the above-described guide groove 20b is a value exceeding 8 mm, the strength and stability of the fixed stage 11 may be lowered, or it may be difficult to synchronize with the feeding of the feed screw 15 only. The movable stage 12 is smoothly slipped.

Therefore, it is preferable to set the depth (t1) of the above-described guide groove 20b to a value within a range of 0.5 to 6 mm, and it is particularly preferable to set the value within a range of 1 to 4 mm.

Further, instead of the above-described guide member 20 or the above-described guide unit 20, it is preferable to use a ball guide or a cross roller guide at the same time.

In other words, although not shown, two V-groove rails are provided in a parallel position of the fixed stage and the movable stage, and a plurality of balls or rollers are arranged therein to form a plurality of balls or rollers. For this reason, it is preferable to use a structure in which the balls or the rollers move while rolling along the V-groove rails, thereby exerting a predetermined guiding effect.

2. Activity stage (1) Form

The feature of the movable stage 12 shown in FIG. 1 is not particularly limited as in the form of the fixed stage 11, and is substantially flat.

That is, as shown in the exploded view of Fig. 5, it is preferable that the planar shape of the movable stage 12 is generally formed into a quadrangular shape (including a square shape), and as the size thereof, as in the fixed stage 11, the longitudinal direction is The width is set to a value in the range of 2 to 10 cm, the lateral width is set to a value within a range of 2 to 10 cm, and the thickness is formed to a value within a range of 1 to 10 mm.

This is because, in the case of the movable stage 12 having such a planar shape and size, it has the same size as the fixed stage 11, is relatively compact, and uses a connecting member corresponding to the feeding of the feed screw 15. The operation of 18 pushes only the end of the movable stage 12, and it is possible to slide only the movable stage 12 in a predetermined direction.

Thereby, the entire stage mechanism 10 is not only easy to use and easy to manufacture, but also can stably hold the movable stage 12 even when combined with the movable stage 12 to which a predetermined workpiece is attached. And can easily slide it.

Further, as shown in Fig. 1a, it is preferable that the movable stage 12 is provided with one or two or more small holes, that is, grease injection holes 12a, on the surface side thereof. By injecting a predetermined grease into the small hole, the slidability between the fixed stage 11 and the movable stage 12 can be further improved.

Further, as shown in Fig. 1a, it is preferable that the movable stage 12 is provided with one or two or more workpiece fixing through holes 12b having a diameter of 1 to 5 mm on the surface side thereof. The predetermined workpiece can be firmly attached to the stage mechanism 10 by using the workpiece fixing through hole 12b.

Further, as shown in Fig. 1a, it is preferable that the movable stage 12 is provided with one or two or more through-holes 12c for pressing members of, for example, a diameter of 1 to 3 mm on the surface side thereof. By inserting the pressing member 17 into the through hole 12c by the pressing member, the fixed stage 11 and the movable stage 12 can be maintained in a predetermined pressing state.

(2) constituent materials

Further, the constituent material of the movable stage 12 is not particularly limited, and similarly to the fixed stage, it is generally preferable to use aluminum (including anodized aluminum), copper, brass, iron, nickel, magnesium, tungsten, At least one of ceramics, polymer resin materials, and the like.

(3) Guide member

Further, as shown in FIGS. 5 and 6 , it is preferable to provide one or two or more positions on the movable stage 12 not only in the fixed stage 11 but also in the vertical direction. The guide groove 20b' presses the metal piece 20a thereinto, thereby forming the guiding member 20.

By providing such a guide member 20, after the fixed stage 11 and the movable stage 12 are disposed in an opposing state, the connection member 18 corresponding to the feeding of the feed screw 15 can be used. The pressing operation causes only the movable stage 12 to stably slide in the predetermined direction along the guide member 20 on the surface of the fixed stage 11.

3. Connecting member

Further, as shown in FIGS. 1a to 1b, the connecting member 18 is securely attached to the movable stage 12 by a plurality of fixing members 19 (19a, 19b) for connecting members, and is used for A member that slides the movable stage 12 in synchronization with the operation (rotation straight motion) of the feed screw 15 formed in the bore portion 13 of the fixed stage 11.

Therefore, as shown in FIGS. 1a to 1b, the connecting member 18 is preferably in the form of a plate or a rectangular parallelepiped, and its planar shape may be any shape such as a semicircular shape, an elliptical shape, a rectangular shape, or a different shape.

Therefore, as for the constituent material of the connecting member 18, similarly to the constituent material of the movable stage 12, aluminum (including anodized aluminum), copper, brass, iron, nickel, magnesium, tungsten, ceramic, or polymer is preferable. At least one of a resin material and the like.

Further, as shown in Fig. 1b, it is preferable to provide the preload member 22 so that the preload adjustment can be performed and the feed screw 15 is set to a predetermined pressure with respect to the joint member 18.

That is, it is preferable to sandwich the joint member 18 by the head portion 15a of the feed screw 15 and the preload member 22, and the preload member 22 presses and adjusts the feed screw 15 using the preload screw 22b.

This is because by providing the preload member 22 in this manner, the joint member 18 can be fixed to the movable stage 12 of the joint member 18 without hindering the feed of the feed screw 15 in the predetermined direction. Smooth sliding.

4. Pushing member

Further, it is preferable that the pressing member 17 is provided to press the fixed stage 11 and the movable stage 12 in the vertical direction, and the sliding of the feed screw 15 allows the both to slide smoothly. .

More specifically, as shown in Fig. 8 which is a CC cross-sectional view of the stage mechanism 10 shown in Figs. 1a to 2b, it is preferable to provide a pupil portion 17c in a part of the lower surface of the fixed stage 11, and to separate The compression spring 17a and the washer 17b screw the bolt as the pressing member 17 from below, and press the fixed stage 11 and the movable stage 12 in the vertical direction.

That is, the amount of screwing of the pressing member 17 is adjusted, and the distance between the bolt as the pressing member 17 and the compression spring 17a is set to a value within a predetermined range.

However, the structure of the pressing member 17 is not limited to such a bolt, and may be a leaf spring, a pressure plate, or the like.

[Second Embodiment]

As illustrated in FIGS. 9a to 5B, the stage mechanism 100 of the second embodiment includes a rectangular parallelepiped fixed stage 111, a cylindrical member 117 housed inside the fixed stage 111, and a fixed carrier. The movable stage 112 on which the surface of the stage 111 slides.

Further, the stage mechanism 100 is characterized in that one or two or more gap absorbing members 116 are fitted inside the cylindrical member 117, and the cylindrical member 117 to which the gap absorbing member 116 is attached is coupled by the connecting member 118. The movable stage 112 is slid by the feed screw 115 attached to the fixed stage 111 via the gap absorbing member 116, whereby the movable stage 112 is slid in synchronism.

Hereinafter, the stage mechanism 100 of the second embodiment will be specifically described focusing on differences from the stage mechanism 10 of the first embodiment with reference to the drawings as appropriate.

Fixed stage (1) Form

In the case of the stage mechanism 100 of the second embodiment, as shown in Fig. 9a, the fixed stage 111 has a rectangular parallelepiped shape.

That is, it is usually a quadrangular shape (including a square) having a plane size of 0.8 to 5 cm × 1 to 10 cm, and a thickness in the range of 1 to 10 mm is preferable.

This is because, when it is a fixed stage 111 of such a size, it is not only easy to use, but also easy to manufacture, and can be stably maintained even when combined with the movable stage 112 on which a predetermined workpiece is mounted. The movable stage 112 can easily slide only the movable stage 112.

(2) constituent materials

Further, as a constituent material of the fixed stage 111, aluminum (including anodized aluminum), copper, and brass is preferable from the viewpoints of obtaining excellent lightness, durability, dimensional stability, and workability, respectively. At least one of iron, nickel, magnesium, tungsten, ceramics, polymer resin materials, and the like.

(3) Feeding screw

Further, in the stage mechanism 100 of the second embodiment, the feed screw 115 includes a gap absorbing member 116 to be described later at a predetermined position of the screw portion 115b, and the feed screw 115 is inserted into a cylindrical member 117 to be described later. The combination is a member for synchronously sliding the movable stage 112.

Here, a method of attaching the gap absorbing member 116 provided in the feed screw 115 to the end portion of the columnar member 117 will be described with reference to FIGS. 10a to 10C.

First, as shown in Fig. 10a, a feed screw 115 having a gap absorbing member 116 is prepared.

Next, as shown in Fig. 10b, the feed screw 115 is rotated in the direction of the arrow and fed forward to come into contact with the cylindrical member 117 having the recess at the end.

Finally, as shown in Fig. 10c, the feed screw 115 is further rotated in the direction of the arrow and fed forward to be inserted into the recess provided at the end of the cylindrical member 117.

In other words, the gap absorbing member 116 provided in the feed screw 115 can be easily and accurately attached to the end portion of the columnar member 117.

Further, by the relationship between the gap absorbing member 116 and the screw portion 115b of the feed screw 115, the double nut effect can be easily exhibited, that is, the gap absorbing member 116 can be effectively prevented from being slack or the like.

Further, as shown in Fig. 9b, it is preferable that the feed screw 115 is also provided with a preload member 122 to impart a predetermined pressure.

In other words, a portion of the fixed stage 111 is sandwiched between the feed screw 115 and the preload member 122. In this state, the preload member 122 is pressed against the feed screw 115 by using the preload screw 122b. The preload member 122 is fixed and the preload member 122 is fixed without excessively preventing the feed operation of the feed screw 115.

(4) Gap absorption member

Further, the gap absorbing member 116 of the stage mechanism 100 according to the second embodiment can be formed substantially the same as the gap absorbing member 16 (the cushioning resin member 16b having the metal protective cover 16c) of the first embodiment.

That is, as shown in FIG. 9b, a predetermined structure is provided in the middle of the feed screw 115.

The gap absorbing member 16.

More specifically, as shown in Fig. 10c, the cushioning resin member 116b that is preliminarily attached to the accommodating portion of the metal protective cover 16c having the threaded portion 116e is provided, and the gap absorbing member 116 including the cushioning resin member 116b is placed in the Give the screw 115 halfway.

Therefore, when the feed screw 115 is fed in a predetermined direction and the movable stage 112 is slid, the gap absorbing member 116 exhibits a predetermined slidability and functions so as not to hinder the sliding of the movable stage 112.

Further, when the movable stage 112 is fixed, the gap absorbing member 116 is appropriately deformed to reduce the gap of the movable stage 112, and is sufficiently solidified after the movable stage 112 is fixed, and can be absorbed also in the movable stage 112 or the like. The stress can be firmly maintained in a fixed state.

Further, in the case of Fig. 10c, an example in which one gap absorbing member 116 is provided is shown, and two or more of the above-described gap absorbing members 116 may be arranged based on the fourth to fourth c-patterns.

(5) moving holes

Further, the stage mechanism 100 is characterized in that a moving hole 117b having a substantially columnar cross-sectional shape is provided inside the fixed stage 111, and a cylindrical member 117 to be described later can slide in the moving hole 117b.

More specifically, as shown in FIG. 11, it is preferable that the inside of the fixed stage 111 is provided with a moving hole 117b having a substantially cylindrical shape and having a rectangular opening portion 117c that opens upward. .

That is, in the case where the movable stage 112 is removed, the flat portion 117a of the cylindrical member 117 is exposed through the opening portion 117c of the moving hole 117b, and the flat portion 117a of the cylindrical member 117 and the fixed stage The surface of the flat surface 111a on the upper surface side of the 111 surface has the same position and forms the same plane structure.

By using the moving hole 117b in this manner, the cylindrical member 117 to be described later can be smoothly slid, and even if the flat movable stage 112 is mounted on the upper surface of the cylindrical member 117, Under the circumstance, the smooth sliding of the cylindrical member 117 is not hindered.

2. Activity stage

Further, the movable stage 112 is provided with a flat member that is coupled to a cylindrical member 117, which will be described later, by a connecting member 118 to be described later, and a workpiece is provided in synchronization with the feeding screw 115 attached to the fixed stage 111. In the state shown in the figure), it slides in a predetermined direction.

In a state in which a workpiece (not shown) as an object of a processing machine, a microscope, or the like is provided on the surface side of the flat movable stage 112, the movable load can be used by the feed screw 115. The position of the stage 112 is fine-tuned.

In addition, the shape of the movable stage 112 is the same as that of the movable stage 12 of the first embodiment except that the planar shape is a rectangle having a predetermined size to further reduce the weight and size.

3. Connecting member

Further, the connecting member 118 is a fixing member that directly connects the movable stage 112 and the cylindrical member 117 equipped with the gap absorbing member 116, and a feeding screw that is attached to the boring portion 113 formed in the fixed stage 111. 115 is a stationary fixing member that slides the cylindrical member 117 by the gap absorbing member 116 to slide the movable stage 112 in the same direction.

Therefore, the connecting member 118 may be the screw member 118 shown in Fig. 9b, or may be in other forms.

Further, in the stage mechanism 100 of the second embodiment, the connecting member 118 also functions as a pressing member of the stage mechanism 10 of the first embodiment.

In other words, the connecting member 118 presses the fixed stage 111 and the movable stage 112 in the vertical direction, and functions as a predetermined pressing member to smoothly slide both while sliding.

Next, an example of a method of connecting the connecting member 118 between the cylindrical member 117 to which the gap absorbing member 116 is attached and the movable stage 112 will be described with reference to FIGS. 12a to 4b.

First, as shown in Fig. 12a, the cylindrical member 117 including the gap absorbing member 116 before polishing is inserted into the moving hole 117b of the fixed stage 111, and the self-fixing is included by the polishing member (not shown). The cylindrical member 117 of the gap absorbing member 16 exposed to the upper surface of the upper surface of the stage 111 is polished by a predetermined thickness to form a flat portion 117a.

At this time, the cylindrical member 117 is in a state of being slidably engaged with the moving hole 117b, but is formed on the surface Z of the moving hole 117b of the fixed stage 111 and the surface of the cylindrical member 117 in order to eliminate the subsequent sway. There is almost no gap between them.

Then, as shown in Fig. 12b, in a state where the flat surface 117a of the cylindrical member 117 and the flat surface of the fixed stage 111 form the same surface, the fixed stage 111 is placed at a predetermined position, and then used. The connecting member 118 such as a screw firmly connects the cylindrical member 117 including the gap absorbing member 16 and the movable stage 112.

In other words, the connecting member 118 can be used to firmly connect the cylindrical member 117 including the gap absorbing member 16 and the movable stage 112 without any so-called sway, and the cylindrical member 117 can be maintained. Smooth sliding inside the hole 117b.

Further, as shown in Fig. 12a, it is preferable that the cylindrical member 117 is inserted into the moving hole 117b of the fixed stage 111, and the cylinder corresponding to the cylindrical member 117 by grinding or cutting is preferably used. The member 117 is subjected to roughing to remove a part in advance.

This is because the flattening process is performed in advance by the moving hole 117b of the fixed stage 111, and the cylindrical member 117 can be significantly shortened in the state of being inserted into the moving hole 117b of the fixed stage 111. Precision grinding and grinding time.

4. Cylindrical member

In the case of the stage mechanism 100 of the second embodiment, as shown in FIG. 9b, the cross-sectional shape is substantially slidably provided in the moving hole 117b formed inside the fixed stage 111. It is a circular cylindrical member 117.

In other words, the columnar member 117 includes a flat portion 117a that forms the same plane in the relationship of the plane position with the flat portion 111a on the upper surface side of the fixed stage 111, and the cylindrical member 117 and the above movable stage 112 is coupled by the connecting member 118, and the cylindrical member 117 is slid by the feed screw 115 attached to the fixed stage 111, thereby indirectly sliding the movable stage 112.

By providing one or two or more cylindrical members 117 in this manner, the connecting member (connecting screw) 118 is provided inside the stage mechanism 100, and the fixed stage 111 and the movable stage can be indirectly connected. 112, the stage mechanism 100 is further reduced in size and weight.

In addition, the constituent material of the columnar member 117 is not particularly limited, but it is preferably made of aluminum, aluminum alloy, or the like which is excellent in lightweight, mechanical properties, durability, and the like, similarly to the fixed stage 111. .

Further, as a modification of the columnar member 117, a polygonal prism member including a quadrangular prism member, an elliptical columnar member, an inverted triangular prism member, or the like may be used.

5. Side cover

Further, in the stage mechanism 100 according to the second embodiment, as shown in FIG. 9b, it is preferable that the side cover 119 is firmly attached to the moving hole of the fixed stage 111 by a fixing member (fixing screw or the like) 119a. The end of 117b is to conceal the moving hole 117b.

In other words, by concealing the moving hole 117b by the side cover 119, the intrusion of moisture, dust, and the like is prevented, and the durability of the stage mechanism 100 is improved.

In addition, the form and the constituent material of the side cover 119 are not particularly limited. However, similarly to the fixed stage 111, aluminum, aluminum alloy, etc., which are excellent in lightweight, mechanical properties, durability, and the like, are preferable. A rectangular shape.

Industrial availability

As described above, according to the stage mechanism of the present invention, by providing a predetermined gap absorbing member at a predetermined position, the stage mechanism can be made compact and inexpensive, and the movable stage has a good structure. Mobility, and the movement of the movable stage is fixed, and the movement after the fixed movable stage is small.

In particular, in the stage mechanism of the first embodiment or the stage mechanism of the second embodiment, even when the dovetail groove is omitted, the mobility of the movable stage can be excellent. Since it is fixed, it is possible to provide a smaller and cheaper stage mechanism that can perform high-definition alignment.

Further, according to the stage mechanism of the present invention, by appropriately combining a plurality of stage mechanisms (single-axis stage mechanism), it is possible to provide a two-axis stage mechanism that can move in the XY direction or the XYZ direction, respectively. And a three-axis stage mechanism.

For example, by arranging one uniaxial stage mechanism and another uniaxial stage mechanism in the vertical direction, it is possible to form a gap and a fixed movable load when the movable stage that moves in the XY (horizontal direction) direction is fixed. A two-axis stage mechanism with less movement behind the stage.

More specifically, as shown in Fig. 13a, the first uniaxial load consisting of the fixed stage 11, the movable stage 12, the feed screw 15, the connecting unit 18, and the fixing member 19 for connecting the components, etc. The first single-axis stage mechanism 10 and the second single-axis are placed so that the virtual central axis of the stage mechanism 10 intersects with the virtual central axis of the second single-axis stage mechanism 50' of the same configuration at right angles. The stage mechanism 50' is superimposed and fixed in the vertical direction, whereby the two-axis stage mechanism 50 that can move in the XY direction can be configured.

Further, by arranging one uniaxial stage mechanism and the other uniaxial stage mechanism in the vertical direction, and further arranging another uniaxial stage mechanism in the vertical direction, the uniaxial stage mechanism can be fixed in the XYZ direction ( The three-axis stage mechanism in which the movable stage is moved in the three-dimensional direction and the movement after the movable stage is fixed is small.

More specifically, as shown in FIG. 13b, the first uniaxial load consisting of the fixed stage 11, the movable stage 12, the feed screw 15, the joint assembly 18, and the fixing member 19 for connecting the components, etc. The first single-axis stage mechanism 10 and the second single-axis are placed so that the virtual central axis of the stage mechanism 10 intersects with the virtual central axis of the second single-axis stage mechanism 50' of the same configuration at right angles. The stage mechanism 50' is superimposed and fixed in the vertical direction, and further, the third uniaxial stage mechanism 70' having substantially the same configuration is vertically oriented with respect to the second uniaxial stage mechanism 50' ( The gravity direction is fixedly arranged, whereby the three-axis stage mechanism 70 movable in the XYZ direction can be configured.

Therefore, according to the stage mechanism of the present invention, regardless of the single-axis stage mechanism, the two-axis stage mechanism, or the three-axis stage mechanism, the gap can be separately suppressed, so that the camera, the sensor, and the like It is extremely easy to fine-tune a workpiece such as an electrode or a lamp when it is mounted on a movable stage, and it is expected to be applied to various stage mechanisms.

10. . . Stage mechanism

11 11’. . . Fixed stage

11a. . . Mounting holes

11b. . . Grease injection hole

11c. . . gap

12. . . Activity stage

12a. . . Grease injection hole

12b. . . Through hole

12c. . . Through hole

13. . . Pupil

15. . . Feed screw

15’. . . washer

15a. . . head

15b. . . Thread part

16. . . Gap absorption member

16a. . . Through hole

16b. . . Buffer resin member

16c. . . Metal protective cover

16d. . . Containment department

16e. . . Thread part

18. . . Connecting member

19, 19a, 19b. . . Fastener

20. . . Guide member

20a. . . Metal sheets

20a’, 20b, 20b’. . . Boot slot

50. . . Two-axis stage mechanism

50’. . . Second single-axis stage mechanism

70. . . Triaxial stage mechanism

70’. . . Third single-axis stage mechanism

100. . . Stage mechanism

111. . . Fixed stage

111a. . . Flat surface

112. . . Activity stage

115. . . Feed screw

115b. . . Thread part

116. . . Gap absorption member

116b. . . Buffer resin member

116e. . . Thread part

117. . . Cylindrical member

117a. . . Flat part

117b. . . Moving hole

117c. . . Opening

118. . . Connecting member

119. . . Side cover

119a. . . Fixed member

122. . . Preload member

200. . . Manual stage

204. . . Sliding component

205. . . Fixed component

219. . . handle

210. . . Sliding fixing screw

231. . . Protruding

232. . . groove

303. . . Stage

304. . . Machining axis

306. . . Rod member

307. . . Fixed member

Fig. 1a is a perspective view of the stage mechanism of the first embodiment.

Fig. 1b is a cross-sectional view taken along line A-A of the stage mechanism shown in Fig. 1a.

2a to b are diagrams for explaining a fixed stage in the stage mechanism of the first embodiment.

Fig. 3a is a view for explaining an example of mounting a gap absorbing member (cylindrical resin member).

Fig. 3b is a view for explaining a metal protective cover for the gap absorbing member.

Fig. 4a is a view for explaining the effect of the action of the gap absorbing member.

Figure 4b is a partial enlarged view of the drawing shown in Figure 4a.

Figure 4c is a partial enlarged view of a combination of other gap absorbing members.

Figure 5 is an exploded view of the stage mechanism shown in Figure 1a.

Fig. 6 is a cross-sectional view taken along line B-B of a portion including a guide member of the stage mechanism shown in Fig. 1a.

Fig. 7 is a view for explaining the relationship between the length of the guide member of the stage mechanism and the length of the groove of the guide member.

Fig. 8 is a cross-sectional view taken along line C-C of a portion including a screw fixing structure of the stage mechanism shown in Fig. 1a.

Fig. 9a is a perspective view of the stage mechanism of the second embodiment.

Figure 9b is a D-D cross-sectional view of the stage mechanism shown in Figure 9a.

Figs. 10a to 10C are views for explaining a method of attaching a feed screw having a gap absorbing member to a cylindrical member.

Fig. 11 is an exploded view showing a state in which the feed screw is removed from the stage mechanism of the second embodiment.

Fig. 12a-b are diagrams for explaining a method of joining between a cylindrical member and a movable stage based on a connecting member.

Fig. 13a is a view for explaining a two-axis stage mechanism that can move in the XY direction.

Fig. 13b is a view for explaining a three-axis stage mechanism that can move in the XYZ direction.

Fig. 14 is a perspective view for explaining a conventional manual stage.

Fig. 15 is a perspective view for explaining a conventional stage fixing device.

10. . . Stage mechanism

11. . . Fixed stage

11a. . . Mounting holes

12. . . Activity stage

12a. . . Grease injection hole

12b. . . Through hole

12c. . . Through hole

13. . . Pupil

15. . . Feed screw

18. . . Connecting member

19, 19a, 19b. . . Fastener

twenty one

twenty two

Claims (7)

A stage mechanism comprising a fixed stage and a movable stage sliding along a surface of the fixed stage, wherein a hole is formed in a hole formed in the fixed stage While the screw and the one or more gap absorbing members are provided, the gap absorbing member has a metal protective cover around the gap absorbing member, and is provided with a connecting member for the movable stage and the feeding screw The feed is synchronized with the slip. The stage mechanism according to claim 1, wherein the gap absorbing member has a cylindrical resin member having a through hole of the feed screw. The stage mechanism according to claim 1, wherein the gap absorbing member is made of at least one of a guanamine resin, a polyurethane resin, and a rubber-based resin. The stage mechanism according to claim 1, wherein a metal piece as a guiding member is provided between the fixed stage and the movable stage. The stage mechanism according to claim 1, further comprising a screw member for connecting the fixed stage and the movable stage in the vertical direction, and adjusting the between the fixed stage and the movable stage. Sliding contact force. The stage mechanism according to claim 1, wherein the fixed stage and the movable stage are each in a flat shape. A stage mechanism includes a rectangular parallelepiped fixed stage, a cylindrical member housed inside the fixed stage, and a movable stage sliding along a surface of the fixed stage. The inside of the cylindrical member is equipped with one or two or more gap absorbing members, and the cylindrical member to which the gap absorbing member is attached is coupled to the movable stage by a connecting member, and is attached to the movable stage. The feed screw of the stage is slid by the gap absorbing member to slide the cylindrical member, thereby synchronously sliding the movable stage.