TWI426253B - Variable size abutment and liquid crystal substrate inspection device - Google Patents

Variable size abutment and liquid crystal substrate inspection device Download PDF

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Publication number
TWI426253B
TWI426253B TW097126256A TW97126256A TWI426253B TW I426253 B TWI426253 B TW I426253B TW 097126256 A TW097126256 A TW 097126256A TW 97126256 A TW97126256 A TW 97126256A TW I426253 B TWI426253 B TW I426253B
Authority
TW
Taiwan
Prior art keywords
frame
sliding
base
auxiliary
coupling member
Prior art date
Application number
TW097126256A
Other languages
English (en)
Chinese (zh)
Other versions
TW200914811A (en
Inventor
Akada Tomohiro
Akiyama Kaoru
Original Assignee
Otsuka Denshi Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otsuka Denshi Kk filed Critical Otsuka Denshi Kk
Publication of TW200914811A publication Critical patent/TW200914811A/zh
Application granted granted Critical
Publication of TWI426253B publication Critical patent/TWI426253B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
TW097126256A 2007-08-01 2008-07-11 Variable size abutment and liquid crystal substrate inspection device TWI426253B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007201119A JP4903648B2 (ja) 2007-08-01 2007-08-01 サイズ可変ステージ及び液晶基板の検査装置

Publications (2)

Publication Number Publication Date
TW200914811A TW200914811A (en) 2009-04-01
TWI426253B true TWI426253B (zh) 2014-02-11

Family

ID=40438681

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097126256A TWI426253B (zh) 2007-08-01 2008-07-11 Variable size abutment and liquid crystal substrate inspection device

Country Status (3)

Country Link
JP (1) JP4903648B2 (ja)
KR (1) KR101518051B1 (ja)
TW (1) TWI426253B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010116718A (ja) * 2008-11-13 2010-05-27 Olympus Corp 作業台
CN104807832A (zh) * 2015-04-28 2015-07-29 华中科技大学无锡研究院 硅锭自动精检生产线
CN110441932A (zh) * 2019-07-08 2019-11-12 盐城华昱光电技术有限公司 用于液晶模组的自动光学检测装置
CN112595725A (zh) * 2020-11-30 2021-04-02 大族激光科技产业集团股份有限公司 一种检测载物台及检测系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001130622A (ja) * 1999-11-09 2001-05-15 Shibaura Mechatronics Corp 箱体の梱包枠具
TW594427B (en) * 1999-12-01 2004-06-21 Asml Netherlands Bv Positioning system for use in lithographic apparatus
JP2006308334A (ja) * 2005-04-26 2006-11-09 Horiba Ltd パネル部材検査装置及びそれに適用される位置情報補正プログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0318886A (ja) * 1989-06-16 1991-01-28 Seiko Epson Corp 投影型液晶表示装置
JP2008014707A (ja) * 2006-07-04 2008-01-24 Olympus Corp 装置外装部

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001130622A (ja) * 1999-11-09 2001-05-15 Shibaura Mechatronics Corp 箱体の梱包枠具
TW594427B (en) * 1999-12-01 2004-06-21 Asml Netherlands Bv Positioning system for use in lithographic apparatus
JP2006308334A (ja) * 2005-04-26 2006-11-09 Horiba Ltd パネル部材検査装置及びそれに適用される位置情報補正プログラム

Also Published As

Publication number Publication date
KR20090013705A (ko) 2009-02-05
KR101518051B1 (ko) 2015-05-06
JP2009036629A (ja) 2009-02-19
JP4903648B2 (ja) 2012-03-28
TW200914811A (en) 2009-04-01

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